CN202421721U - Long-stroke movable air bearing module, and exposure table using same - Google Patents
Long-stroke movable air bearing module, and exposure table using same Download PDFInfo
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- CN202421721U CN202421721U CN2011205707580U CN201120570758U CN202421721U CN 202421721 U CN202421721 U CN 202421721U CN 2011205707580 U CN2011205707580 U CN 2011205707580U CN 201120570758 U CN201120570758 U CN 201120570758U CN 202421721 U CN202421721 U CN 202421721U
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- air supporting
- ball
- guide rail
- socket hinge
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Abstract
The utility model discloses a long-stroke movable air bearing module, and an exposure table using the air bearing module. The long-stroke movable air bearing module comprises a lateral spherical hinge type air bearing cushion, a lateral self-adapting spherical hinge type air bearing cushion and a vertical spherical hinge type air bearing cushion. One end of the lateral spherical hinge type air bearing cushion is equipped with a spherical hinge and connected with a first side of a U-shaped guide rail, and the other end of the lateral spherical hinge type air bearing cushion is provided with an air bearing cushion and connected with the base. The lateral spherical hinge type air bearing cushion has the rotary decoupling function in Ry and Rz directions. One end of the lateral self-adapting spherical hinge type air bearing cushion is provided with a spherical hinge and connected with a second side of the U-shaped guide rail; and the other end of the lateral self-adapting spherical hinge type air bearing cushion is provided with the air bearing cushion and connected with the base. The lateral self-adapting spherical hinge type air bearing cushion has the rotary decoupling function in Ry and Rz directions, and can perform micro displacement compensation in X-direction. One end of the vertical spherical hinge type air bearing cushion is connected with the end surface of the U-shaped guide rail; the other end of the vertical spherical hinge type air bearing cushion is provided with the air bearing cushion and connected with the base. According to long-stroke movable air bearing module, and the exposure table using the air bearing module, the design difficulty and the manufacturing difficulty of the guide component are greatly reduced, and the assembling precision is enhanced.
Description
Technical field
The utility model relates to SIC (semiconductor integrated circuit) photoetching production field, relates in particular to a kind of long stroke motion air supporting module and uses its exposure desk.
Background technology
Lithographic equipment of the prior art is mainly used in the manufacturing of IC or other microdevice.Through lithographic equipment, the multilayer mask with different mask patterns is imaged on the wafer that is coated with photoresist under accurately aiming at successively, for example semiconductor wafer or LCD plate.Lithographic equipment is divided into two types substantially; One type is the stepping lithographic equipment; The mask pattern single exposure is imaged on an exposure area of wafer, and wafer moves with respect to mask subsequently, and next exposure area is moved to mask pattern and projection objective below; Again mask pattern is made public in another exposure area of wafer, repeat the picture that this process all exposure areas on wafer all have mask pattern.Another kind of is the step-scan lithographic equipment, and in said process, mask pattern is not single exposure imaging, but the scanning mobile imaging through the projection light field.In the mask pattern imaging process, mask and wafer move with respect to optical projection system and projected light beam simultaneously.In above-mentioned lithographic equipment, need have the carrier of corresponding device thereof as mask and silicon chip, the carrier that is mounted with mask/silicon chip produces accurate motion each other and satisfies the photoetching needs.The carrier of aforementioned mask version is referred to as and holds bed, and the carrier of silicon chip is referred to as wafer-supporting platform.The motion of holding bed and wafer-supporting platform then need drive and realize coarse positioning by long Strok mechanism.
At publication number is in the Japanese patent application document of JP61290231, proposes a kind of long stroke motion air supporting module.Please refer to Fig. 1.Its level as preload force, guarantees air supporting rigidity through the both sides lift of gas to adopting the horizontal air-bearing of monolateral bilateral 11 as guiding mechanism; Vertical air-bearing 12 is adopted in vertical support, and increases its air supporting rigidity through the magnetic force preload between magnetic 13 and the permanent magnet 14.Yet this air supporting mechanism does not all have the decoupling zero function in vertical and side direction, and in the air floating structure of both sides, does not possess adaptivity adjusting position function, causes the machining precision of U type air-float guide rail and gib block and assembly precision are required high, and difficulty of processing is big.Behind the logical upward barotropic gas of U type guide rail, there is lateral deformation, influences side direction air supporting rigidity.And vertical air floating structure is unadjustable, makes that the magnet preload force is unadjustable, and then when one timing of input compressed air pressure, air supporting rigidity, air-film thickness can not effectively be regulated.
The utility model content
The exposure desk that the purpose of the utility model is that a kind of long stroke motion air supporting module is provided and uses it is to improve the disappearance of prior art.
For solving the problems of the technologies described above, the long stroke motion air supporting module that the utility model provides is arranged at the U type guide rail of exposure desk and connects pedestal.U type guide rail has an end face and the first side and the second side that are positioned at the end face both sides.Long stroke motion air supporting module comprises side direction ball-and-socket hinge style air supporting pad, lateral adaptive ball-and-socket hinge style air supporting pad and vertical ball-and-socket hinge style air supporting pad.Side direction ball-and-socket hinge style air supporting pad one end has ball pivot, connects the first side of U type guide rail, and the other end has the air supporting pad, connects pedestal, and side direction ball-and-socket hinge style air supporting spacer has Ry and Rz to rotation decoupling zero function.Lateral adaptive ball-and-socket hinge style air supporting pad one end has ball pivot, connects the second side of U type guide rail, and the other end has the air supporting pad, connects pedestal, and lateral adaptive ball-and-socket hinge style air supporting spacer has Ry and Rz to rotating the decoupling zero function and can compensating to making micro-displacement along X.Vertical ball-and-socket hinge style air supporting pad one end connects the end face of U type guide rail, and the other end has the air supporting pad, connects pedestal.
In an embodiment of the utility model, side direction ball-and-socket hinge style air supporting pad is two, is arranged at the two ends of the first side of U type guide rail respectively.
In an embodiment of the utility model, lateral adaptive ball-and-socket hinge style air supporting pad is two, is arranged at the two ends of the second side of U type guide rail respectively.
In an embodiment of the utility model, side direction ball-and-socket hinge style air supporting spacer provides the compressed-air actuated first air feed interface.
In an embodiment of the utility model, lateral adaptive ball-and-socket hinge style air supporting spacer provides the compressed-air actuated second air feed interface.
In an embodiment of the utility model; Lateral adaptive ball-and-socket hinge style air supporting pad comprises body, first locating part, second locating part and cylinder piston; To being fixed in body, cylinder piston is arranged between first locating part and second locating part movably along X for first locating part and second locating part.
In an embodiment of the utility model, vertical ball-and-socket hinge style air supporting pad is three, becomes Chinese character pin-shaped layout.
In an embodiment of the utility model, vertical ball-and-socket hinge style air supporting pad is four, the setting that is centrosymmetric of the geometric center of the end face of the relative U type of each vertical ball-and-socket hinge style air supporting pad guide rail.
In an embodiment of the utility model; Long stroke motion air supporting module also comprises ball screw; Vertical ball-and-socket hinge style air supporting pad is installed on the U type guide rail through ball screw, through ball screw make vertical ball-and-socket hinge style air supporting pad at Rx, Ry to the rotation decoupling zero, and at Z to adjustable.
The utility model also provides a kind of exposure desk, comprises the long stroke motion air supporting module that pedestal, U type guide rail and aforementioned arbitrary embodiment provide.U type guide rail is suspended in the pedestal top, and has an end face and the first side and the second side that are positioned at the end face both sides.Long stroke motion air supporting module is arranged at U type guide rail and connects pedestal.
In an embodiment of the utility model, exposure desk also comprises coarse motion motor, preload magnet and preload magnetic metal.The coarse motion motor comprises stator and mover, and stator and preload magnetic metal are fixed in pedestal, and mover and preload magnet are fixed in U type guide rail.
The long stroke motion air supporting module that the utility model provides, side direction ball-and-socket hinge style air supporting pad and lateral adaptive ball-and-socket hinge style air supporting pad all have Ry and Rz to rotation decoupling zero function, and the air supporting of lateral adaptive ball-and-socket hinge style pay somebody's debt and expect repayment later can be along X to doing the micro-displacement compensation.Thus, can greatly reduce design complexities, processing and manufacturing difficulty and the assembly precision of guide elements.
Description of drawings
Fig. 1 is a kind of synoptic diagram of known long stroke motion air supporting module;
Fig. 2 is the vertical view of the long stroke motion air supporting module of the utility model one preferred embodiment;
Fig. 3 is the right view of the long stroke motion air supporting module of the utility model one preferred embodiment;
Fig. 4 is the synoptic diagram of the side direction ball-and-socket hinge style air supporting pad of the utility model one preferred embodiment;
Fig. 5 is the synoptic diagram of the lateral adaptive ball-and-socket hinge style air supporting pad of the utility model one preferred embodiment;
Fig. 6 is the synoptic diagram of the vertical ball-and-socket hinge style air supporting pad of the utility model one preferred embodiment.
Embodiment
Below will combine accompanying drawing that the technique effect of design, concrete structure and the generation of the utility model is described further, with purpose, characteristic and the effect of understanding the utility model fully.
Fig. 2 is the vertical view of the long stroke motion air supporting module of the utility model one preferred embodiment.Fig. 3 is the right view of the long stroke motion air supporting module of the utility model one preferred embodiment.Please refer to Fig. 2 and Fig. 3.In the present embodiment, exposure desk 2 comprises pedestal 20, U type guide rail 21, long stroke motion air supporting module, coarse motion motor 22, preload magnet 24 and preload magnetic metal (figure does not show).U type guide rail 21 is suspended in pedestal 20 tops.At this, U type guide rail 21 has an end face 210 and first side that is positioned at end face 210 both sides 211 and second side 212.Long stroke motion air supporting module is arranged at U type guide rail 21 and connects pedestal 20.
In the present embodiment, long stroke motion air supporting module comprises side direction ball-and-socket hinge style air supporting pad 231, lateral adaptive ball-and-socket hinge style air supporting pad 232 and vertical ball-and-socket hinge style air supporting pad 233.At this, side direction ball-and-socket hinge style air supporting pad 231 can be two with the individual number average of lateral adaptive ball-and-socket hinge style air supporting pad 232.And two side direction ball-and-socket hinge style air supporting pads 231 are arranged at the two ends of first side 211 respectively, 232 two ends that are arranged at second side 212 respectively of two lateral adaptive ball-and-socket hinge style air supporting pads.At this, two side direction ball-and-socket hinge style air supporting pads 231 can become complete symmetric configuration to center line along X with two lateral adaptive ball-and-socket hinge style air supporting pads 232.Yet the utility model is not done any restriction to this.In other embodiments, side direction ball-and-socket hinge style air supporting pad 231 can respectively be one also with the number of lateral adaptive ball-and-socket hinge style air supporting pad 232.
In the present embodiment; The first side 211 of pedestal 20 corresponding U type guide rails 21 and the position of second side 212; Side direction air supporting spigot surface then is set respectively, to ball-and-socket hinge style air supporting pad 231 and lateral adaptive ball-and-socket hinge style air supporting pad 232, realizes side direction air supporting guide function with the difference respective side.About the concrete structure of side direction ball-and-socket hinge style air supporting pad 231 with lateral adaptive ball-and-socket hinge style air supporting pad 232, can be referring to Fig. 4 and Fig. 5.
Fig. 4 is the synoptic diagram of the side direction ball-and-socket hinge style air supporting pad of the utility model one preferred embodiment.Fig. 5 is the synoptic diagram of the lateral adaptive ball-and-socket hinge style air supporting pad of the utility model one preferred embodiment.Please refer to Fig. 4 and Fig. 5.In the present embodiment, side direction ball-and-socket hinge style air supporting pad 231 and lateral adaptive ball-and-socket hinge style air supporting pad 232 all have Ry and Rz to rotation decoupling zero function, therefore, can realize the vibration air supporting isolation of pedestal 20 and U type guide rail 21.That is, U type guide rail 21 Ry and Rz to rotation can directly not cause pedestal 20 Ry and Rz to rotation, thereby can remove the rough micro-moving mechanism platform full decoupled to degree of freedom of Ry and Rz.
In the present embodiment, an end of side direction ball-and-socket hinge style air supporting pad 231 can have ball pivot, connects the first side 211 of U type guide rail 21, and the other end then can have the air supporting pad, connects pedestal 20.
In the present embodiment, side direction ball-and-socket hinge style air supporting pad 231 can be arranged at U type guide rail 21 through equally distributed four screws 2310 on its circumference.Side direction ball-and-socket hinge style air supporting pad 231 can have the first air feed interface 2311, so that pressurized air to be provided.At this, the size that can regulate side direction air supporting rigidity and air-film thickness through the size of regulating supply gas pressure.Yet the utility model is not done any restriction to this.
In the present embodiment, an end of lateral adaptive ball-and-socket hinge style air supporting pad 232 also can have ball pivot, connects the second side 212 of U type guide rail 21, and the other end also can have the air supporting pad, connects pedestal 20.
In the present embodiment, lateral adaptive ball-and-socket hinge style air supporting pad 232 also is arranged at U type guide rail 21 through equally distributed four screws 2320 on its circumference.Lateral adaptive ball-and-socket hinge style air supporting pad 232 can have the second air feed interface 2321, so that pressurized air to be provided.Yet the utility model is not done any restriction to this.
In the present embodiment, lateral adaptive ball-and-socket hinge style air supporting pad 232 can comprise body 2322, first locating part 2323, second locating part 2324 and cylinder piston 2325.Body 2322 connect pedestal 20, the first locating parts 2323 and second locating part 2324 along X to being fixed in body 2322.Cylinder piston 2325 is arranged at U type guide rail 21.The 3rd air feed interface 2326 provides pressurized air for the cylinder in the lateral adaptive ball-and-socket hinge style air supporting pad 232; Move between first locating part 2323 and second locating part 2324 to drive corresponding cylinder piston 2325, realization lateral adaptive ball-and-socket hinge style air supporting pad 232 X to the micro-displacement compensate function.At this, the spacing between first locating part 2323 and second locating part 2324 can be 2 millimeters (mm), and under the normal condition, the centre position of cylinder piston 2325 between first locating part 2323 and second locating part 2324.That is, when pressure one regularly, lateral adaptive ball-and-socket hinge style air supporting pad 232 can X to ± 1mm in realization adaptive displacement compensate function.In the present embodiment, the size of the adjustable size of the supply gas pressure through regulating the second air feed interface 2321 and the 3rd air feed interface 2326 joint side direction air supporting rigidity and air-film thickness.
In the present embodiment, because the side direction air floating structure possesses Ry and Rz to rotating decoupling zero function and X to the adaptive displacement compensate function, therefore, with the design complexities that greatly reduces U type guide rail 21, processing and manufacturing difficulty and assembly precision.In addition, because lateral adaptive ball-and-socket hinge style air supporting pad 232 also can compensate the variable quantity of the air-film thickness that the Rz moment of torsion that produces in elastic deformation and the motion of U type guide rail 21 brought, therefore, can guarantee the side direction air supporting rigidity and the air-film thickness of U type guide rail 21.
Please continue with reference to figure 2 and Fig. 3.In the present embodiment, vertical ball-and-socket hinge style air supporting pad 233 has Rx and Ry to rotation decoupling zero function, and it is arranged at U type guide rail 21.One end of vertical ball-and-socket hinge style air supporting pad 233 connects the end face 210 of U type guide rail 21, and the other end then has the air supporting pad.On the direction of pedestal 20 corresponding vertical ball-and-socket hinge style air supporting pads 233; Vertical air supporting supporting surface then is set; To realize the vertical support function of vertical ball-and-socket hinge style air supporting pad 233, its preload force can be provided by the suction that the coarse motion motor 22 that drives function is provided and the magnetic force of preload magnet 24.
Particularly, in the present embodiment, coarse motion motor 22 can comprise stator and mover, and wherein stator is fixed in pedestal 20, and mover then is fixed in U type guide rail 21.Similarly, the preload magnetic metal is fixed in pedestal 20, and 24 of the preload magnet corresponding with it are fixed in U type guide rail 21.Magnetic force between the stator of coarse motion motor 22 and the suction between the mover and preload magnet 24 and the preload magnetic metal can provide the preload force of the vertical support of vertical ball-and-socket hinge style air supporting pad 233.
In the present embodiment, long stroke motion air supporting module can comprise three vertical ball-and-socket hinge style air supporting pads 233, becomes Chinese character pin-shaped layout.Coarse motion motor 22 can be positioned at this Chinese character pin-shaped center position with preload magnet 24, so that keep balance between the vertical air supporting anchorage force of vertical ball-and-socket hinge style air supporting pad 233 and the preload force, guarantees the stationarity of U type guide rail 21.Yet the utility model is not done any restriction to this.In other embodiments, the number of vertical ball-and-socket hinge style air supporting pad 233 also can be four, the relatively geometric center of the end face 210 of U type guide rail 21 setting that is centrosymmetric.Perhaps, the number of vertical ball-and-socket hinge style air supporting pad 233 also can be one, itself and coarse motion motor 22, preload magnet 24 all be positioned at X to center position.
Fig. 6 is the synoptic diagram of the vertical ball-and-socket hinge style air supporting pad of the utility model one preferred embodiment.Please refer to Fig. 6.In the present embodiment, long stroke motion air supporting module also comprises ball screw 25, and vertical ball-and-socket hinge style air supporting pad 233 is installed on the U type guide rail 21 through ball screw 25.At this, through regulate ball screw 25 can realize vertical ball-and-socket hinge style air supporting pad 233 Z to adjusting, and make vertical ball-and-socket hinge style air supporting pad 233 rotate decoupling zero to tool at Rx, Ry.Can ball screw 25 be locked on the U type guide rail 21 through set nut 26 after waiting to regulate completion.In addition, in the present embodiment, bulb also can be set between ball screw 25 and vertical ball-and-socket hinge style air supporting pad 233 keep seat 27, under the situation of dying, break away from ball screw 25 in order to prevent vertical ball-and-socket hinge style air supporting pad 233.Anti-rotation screw 28 can be with to prevent that vertical ball-and-socket hinge style air supporting pad 233 from rotating inserting under the compressed-air actuated situation.
In sum; The long stroke motion air supporting module that the utility model preferred embodiment provides; Side direction ball-and-socket hinge style air supporting pad and lateral adaptive ball-and-socket hinge style air supporting pad all have Ry and Rz to rotation decoupling zero function, and the air supporting of lateral adaptive ball-and-socket hinge style pay somebody's debt and expect repayment later can be along X to doing the micro-displacement compensation.Thus, can greatly reduce design complexities, processing and manufacturing difficulty and the assembly precision of guide elements.
More than describe the preferred embodiment of the utility model in detail.The ordinary skill that should be appreciated that this area need not creative work and just can make many modifications and variation according to the design of the utility model.Therefore, all technician in the art according to the design of the utility model on the basis of existing technology through the available technical scheme of logical analysis, reasoning, or a limited experiment, all should be in determined protection domain by claims.
Claims (11)
1. one kind long stroke motion air supporting module is arranged at the U type guide rail of exposure desk and connects pedestal, and said U type guide rail has an end face and the first side and the second side that are positioned at said end face both sides, it is characterized in that said long stroke motion air supporting module comprises:
Side direction ball-and-socket hinge style air supporting pad, the one of which end has ball pivot, connects the first side of said U type guide rail, and the other end has the air supporting pad, connects said pedestal, and said side direction ball-and-socket hinge style air supporting spacer has Ry and Rz to rotation decoupling zero function;
Lateral adaptive ball-and-socket hinge style air supporting pad; The one of which end has ball pivot, connects the second side of said U type guide rail, and the other end has the air supporting pad; Connect said pedestal, said lateral adaptive ball-and-socket hinge style air supporting spacer has Ry and Rz to rotating the decoupling zero function and can compensating to making micro-displacement along X; And
Vertical ball-and-socket hinge style air supporting pad, the one of which end connects the end face of said U type guide rail, and the other end has the air supporting pad, connects said pedestal.
2. long stroke motion air supporting module according to claim 1 is characterized in that, said side direction ball-and-socket hinge style air supporting pad is two, is arranged at the two ends of the first side of said U type guide rail respectively.
3. long stroke motion air supporting module according to claim 1 is characterized in that, said lateral adaptive ball-and-socket hinge style air supporting pad is two, is arranged at the two ends of the second side of said U type guide rail respectively.
4. long stroke motion air supporting module according to claim 1 is characterized in that, said side direction ball-and-socket hinge style air supporting spacer provides the compressed-air actuated first air feed interface.
5. long stroke motion air supporting module according to claim 1 is characterized in that, said lateral adaptive ball-and-socket hinge style air supporting spacer provides the compressed-air actuated second air feed interface.
6. long stroke motion air supporting module according to claim 1; It is characterized in that; Said lateral adaptive ball-and-socket hinge style air supporting pad comprises body, first locating part, second locating part and cylinder piston; To being fixed in said body, said cylinder piston is arranged between said first locating part and said second locating part movably along X for said first locating part and said second locating part.
7. long stroke motion air supporting module according to claim 1 is characterized in that, said vertical ball-and-socket hinge style air supporting pad is three, becomes Chinese character pin-shaped layout.
8. long stroke motion air supporting module according to claim 1 is characterized in that, said vertical ball-and-socket hinge style air supporting pad is four, the setting that is centrosymmetric of the geometric center of the end face of the said relatively U type of said each vertical ball-and-socket hinge style air supporting pad guide rail.
9. long stroke motion air supporting module according to claim 1; It is characterized in that; Said long stroke motion air supporting module also comprises ball screw; Said vertical ball-and-socket hinge style air supporting pad is installed on the said U type guide rail through said ball screw, through said ball screw make said vertical ball-and-socket hinge style air supporting pad at Rx, Ry to the rotation decoupling zero, and at Z to adjustable.
10. an exposure desk is characterized in that, comprising:
Pedestal;
U type guide rail is suspended in said pedestal top, and said U type guide rail has an end face and the first side and the second side that are positioned at said end face both sides; And
Like any described long stroke motion air supporting module in the claim 1 to 9, be arranged at said U type guide rail and connect said pedestal.
11. exposure desk according to claim 10; It is characterized in that; Said exposure desk also comprises coarse motion motor, preload magnet and preload magnetic metal; Said coarse motion motor comprises stator and mover, and said stator and said preload magnetic metal are fixed in said pedestal, and said mover and said preload magnet are fixed in said U type guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205707580U CN202421721U (en) | 2011-12-30 | 2011-12-30 | Long-stroke movable air bearing module, and exposure table using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205707580U CN202421721U (en) | 2011-12-30 | 2011-12-30 | Long-stroke movable air bearing module, and exposure table using same |
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| Publication Number | Publication Date |
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| CN202421721U true CN202421721U (en) | 2012-09-05 |
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| CN2011205707580U Expired - Lifetime CN202421721U (en) | 2011-12-30 | 2011-12-30 | Long-stroke movable air bearing module, and exposure table using same |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076033A (en) * | 2013-01-18 | 2013-05-01 | 西安爱德华测量设备股份有限公司 | Air-floating guide rail |
| CN104238276A (en) * | 2013-06-19 | 2014-12-24 | 上海微电子装备有限公司 | Large-mask shaping device and method as well as application |
| CN105234912A (en) * | 2015-10-22 | 2016-01-13 | 苏州金纬机械制造有限公司 | Pipe supporting structure |
| CN109597279A (en) * | 2017-09-30 | 2019-04-09 | 上海微电子装备（集团）股份有限公司 | Vacuum suction hand, substrate connection device and litho machine |
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2011
- 2011-12-30 CN CN2011205707580U patent/CN202421721U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076033A (en) * | 2013-01-18 | 2013-05-01 | 西安爱德华测量设备股份有限公司 | Air-floating guide rail |
| CN104238276A (en) * | 2013-06-19 | 2014-12-24 | 上海微电子装备有限公司 | Large-mask shaping device and method as well as application |
| WO2014201963A1 (en) * | 2013-06-19 | 2014-12-24 | 上海微电子装备有限公司 | Mask shaping device and method, and exposure device using same |
| CN104238276B (en) * | 2013-06-19 | 2016-07-06 | 上海微电子装备有限公司 | A kind of big mask apparatus for shaping, method and application |
| JP2016526701A (en) * | 2013-06-19 | 2016-09-05 | シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド | Reticle shaping apparatus, method, and exposure apparatus used therefor |
| US9760025B2 (en) | 2013-06-19 | 2017-09-12 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Reticle shape regulation device and method, and exposure apparatus using same |
| CN105234912A (en) * | 2015-10-22 | 2016-01-13 | 苏州金纬机械制造有限公司 | Pipe supporting structure |
| CN109597279A (en) * | 2017-09-30 | 2019-04-09 | 上海微电子装备（集团）股份有限公司 | Vacuum suction hand, substrate connection device and litho machine |
| CN109597279B (en) * | 2017-09-30 | 2023-09-29 | 上海微电子装备（集团）股份有限公司 | Vacuum adsorption hand, substrate handing-over device and photoetching machine |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203, No. 1525 Zhang Dong Road, Shanghai, Shanghai, Pudong New Area Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120905 |