CN202316398U - 硅片清洗机的漂洗槽 - Google Patents
硅片清洗机的漂洗槽 Download PDFInfo
- Publication number
- CN202316398U CN202316398U CN2011204042950U CN201120404295U CN202316398U CN 202316398 U CN202316398 U CN 202316398U CN 2011204042950 U CN2011204042950 U CN 2011204042950U CN 201120404295 U CN201120404295 U CN 201120404295U CN 202316398 U CN202316398 U CN 202316398U
- Authority
- CN
- China
- Prior art keywords
- potcher
- rinsing groove
- water level
- rinsing
- level controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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[Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 16
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Abstract
本实用新型公开一种硅片清洗机的漂洗槽，包括前后两部分，前半部分依次布置五个漂洗槽，后半部分依次布置两个漂洗槽，所述前半部分最外侧的漂洗槽I与进水口相连，且漂洗槽I与前半部分最内侧的漂洗槽V之间、后半部分内侧漂洗槽VI与外侧漂洗槽VII之间均采用由高到低的阶梯式结构，所述漂洗槽V与漂洗槽VI通过一个溢流管道相连通，所述漂洗槽VII上开设有排污口，所述溢流管道上安装有蓄水槽，所述蓄水槽中安装有水位控制器，水位控制器连接有管道泵。该漂洗槽采用阶梯溢流式结构，只需一个进水口与出水口，具有结构简单、节约用水量的优点。
Description
硅片清洗机的漂洗槽
技术领域
[0001] 本实用新型涉及一种硅片清洗机的漂洗槽，尤其涉及一种节水型溢流式的硅片清洗机漂洗槽。
背景技术
[0002] 目前使用的硅片清洗机漂洗槽分为两部分，前半部分包括依次布置的五个漂洗槽，后半部分包括依次布置的两个漂洗槽，前半部分与后半部分之间依次布置两浸润槽，每两个漂洗槽为一个独立工作单元，七个漂洗槽共有四个进水口与出水口，使得硅片清洗机用水量较大，造成了水资源的浪费。
实用新型内容
[0003] 本实用新型的目的在于解决上述问题，提供一种硅片清洗机的漂洗槽，其采用溢流式结构，只需一个进水口与出水口，具有结构简单、节约用水量的优点。
[0004] 本实用新型的目的是通过以下技术方案来实现：
[0005] 一种硅片清洗机的漂洗槽，包括前后两部分，前半部分依次布置五个漂洗槽，后半部分依次布置两个漂洗槽，所述前半部分最外侧的漂洗槽I与进水口相连，且漂洗槽I与前半部分最内侧的漂洗槽V之间、后半部分内侧漂洗槽VI与外侧漂洗槽VII之间均采用由高到低的阶梯式结构，所述漂洗槽V与漂洗槽VI通过一个溢流管道相连通，所述漂洗槽VII上开设有排污口，所述溢流管道上安装有蓄水槽，所述蓄水槽中安装有水位控制器，水位控制器连接有管道泵。
[0006] 所述水位控制器包括高水位控制器和低水位控制器。
[0007] 所述漂洗槽中均安装有物料感应器。
[0008] 本实用新型的有益效果为：漂洗槽I与前半部分最内侧的漂洗槽V之间、后半部分内侧漂洗槽VI与外侧漂洗槽VII之间均采用由高到低的阶梯式结构，使得漂洗槽之间为溢流模式，无需增加管道；通过将漂洗槽V与漂洗槽VI用一个溢流管道相连通，即实现前半部分与后半部分的连通，使得只需要一个进水口与出水口 ；通过设置水位控制器，当蓄水槽中的水位达到设定的高水位时，高水位控制器控制管道泵进行排水，反之，低水位控制器控制管道泵停止排水，具有自动化程度高的优点，对比现有技术，该漂洗槽具有结构简单、节约用水量的优点。
附图说明
[0009] 下面根据附图和实施例对本实用新型作进一步详细说明。
[0010] 图1为本实用新型所述的硅片清洗机的漂洗槽的结构示意图。
[0011] 图中：
[0012] 1、漂洗槽I ；2、漂洗槽V ；3、漂洗槽VI ；4、漂洗槽VII ；5、溢流管道；6、蓄水槽；7、管道泵；8、进水口 ；9、排污口。具体实施方式
[0013] 如图1所示，于本实施例中，本实用新型所述的硅片清洗机的漂洗槽，包括前后两部分，前半部分依次布置五个漂洗槽，后半部分依次布置两个漂洗槽，前半部分最外侧的漂洗槽Il与进水口 8相连，且漂洗槽Il与前半部分最内侧的漂洗槽V2之间、后半部分内侧漂洗槽VI3与外侧漂洗槽VII4之间均采用由高到低的阶梯式结构，漂洗槽V2与漂洗槽VI3通过一个溢流管道5相连通，漂洗槽VII4上开设有排污口 9，溢流管道5上安装有蓄水槽6，蓄水槽6中安装有水位控制器，水位控制器连接有管道泵7，水位控制器包括高水位控制器和低水位控制器。
[0014] 漂洗槽Il与前半部分最内侧的漂洗槽V2之间、后半部分内侧漂洗槽VI3与外侧漂洗槽VII4之间均采用由高到低的阶梯式结构，使得漂洗槽之间为溢流模式，无需增加管道；通过将漂洗槽V2与漂洗槽VI3用一个溢流管道5相连通，即实现前半部分与后半部分的连通，使得只需要一个进水口 8与排污口 9 ；通过设置水位控制器，当蓄水槽6中的水位达到设定的高水位时，高水位控制器控制管道泵7进行排水，反之，低水位控制器控制管道泵7停止排水，具有自动化程度高、结构简单、节约用水量的优点
[0015] 每个漂洗槽中均安装有物料感应器，当有硅片篮筐进入漂洗槽时，物料感应器将信号传送至控制系统，控制清洗机进入工作状态，当硅片篮筐离开漂洗槽时，物料感应器将信号传送至控制系统，控制清洗机进入待机状态，进一步节约了用水、用电量。
Claims (3)
1. 一种硅片清洗机的漂洗槽，包括前后两部分，前半部分依次布置五个漂洗槽，后半部分依次布置两个漂洗槽，其特征在于：所述前半部分最外侧的漂洗槽I与进水口相连，且漂洗槽I与前半部分最内侧的漂洗槽V之间、后半部分内侧漂洗槽VI与外侧漂洗槽VII之间均采用由高到低的阶梯式结构，所述漂洗槽V与漂洗槽VI通过一个溢流管道相连通，所述漂洗槽VII上开设有排污口，所述溢流管道上安装有蓄水槽，所述蓄水槽中安装有水位控制器，水位控制器连接有管道泵。
2.根据权利要求1所述的硅片清洗机的漂洗槽，其特征在于：所述水位控制器包括高水位控制器和低水位控制器。
3.根据权利要求1所述的硅片清洗机的漂洗槽，其特征在于：所述漂洗槽中均安装有物料感应器。
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| CN102343340B (zh) * | 2011-10-20 | 2016-01-13 | 高佳太阳能股份有限公司 | 硅片清洗机的漂洗槽 |
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