CN202297854U - Graphite heat field deflecting hood of Czochralski single crystal furnace - Google Patents
Graphite heat field deflecting hood of Czochralski single crystal furnace Download PDFInfo
- Publication number
- CN202297854U CN202297854U CN201120442513XU CN201120442513U CN202297854U CN 202297854 U CN202297854 U CN 202297854U CN 201120442513X U CN201120442513X U CN 201120442513XU CN 201120442513 U CN201120442513 U CN 201120442513U CN 202297854 U CN202297854 U CN 202297854U
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- Prior art keywords
- deflecting hood
- pod
- single crystal
- hood
- crystal furnace
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model relates to a graphite heat field deflecting hood of a Czochralski single crystal furnace. The graphite heat field deflecting hood of the Czochralski single crystal furnace comprises an inner deflecting hood and an outer deflecting hood, wherein the inner deflecting hood takes the shape of a cone-shaped tube; a space filled with a heat insulating material is formed between the inner deflecting hood and the outer deflecting hood; the upper part of the outer deflecting hood takes the shape of a cone-shaped tube; the lower part of the outer deflecting hood takes the shape of a column-shaped tube; and the junction of the side wall and the bottom of the outer deflecting hood is circularly chamfered. By changing the angles and the shapes of the inner deflecting hood and the outer deflecting hood of the graphite heat field deflecting hood of the Czochralski single crystal furnace, heat insulation between the inner deflecting hood and the outer deflecting hood is improved, the temperature gradient inside the single crystal furnace is kept constant, an ideal environment for single crystal growth is provided, the yield and the finished product ratio are improved, the production time is shortened, and the cost is reduced.
Description
Technical field
The utility model relates to a kind of Czochralski method mono-crystal furnace graphite thermal field pod.
Background technology
During single crystal growing furnace pulling monocrystal silicon rod; The quartz crucible of raw materials such as splendid attire polysilicon block is put into the plumbago crucible holder that is positioned on the crucible holder; Heating and melting in protective atmosphere is regulated and control behind technological temperature, and seed crystal inserts through pod and dissolves in the polysilicon liquid; Do retrograde rotation with crucible and upwards promote, make polysilicon liquid become silicon single crystal rod by the Siliciumatom of the seed crystal crystallization and freezing that puts in order.
Present pod ectonexine all is swedged tapered tubular structure (as shown in Figure 1) gradually, and interior pod is 27 ° to the angle of bottom extended line, and temperature is unstable in the single crystal growing furnace, can't guarantee that monocrystalline continues normal effectively growth, has also increased production cost.
The utility model content
The technical problem that the utility model will solve is: in order to stablize the thermograde in the single crystal growing furnace, the utility model provides a kind of Czochralski method mono-crystal furnace graphite thermal field pod.
The utility model solves the technical scheme that its technical problem adopted: a kind of Czochralski method mono-crystal furnace graphite thermal field pod; Pod and outer pod in comprising; Interior pod is a tapered tubular, has the spacing of fill insulant material between interior pod and the outer pod, and the top of described outer pod is tapered tubular; The bottom is the cylindricality tubulose, and the intersection of described outer pod sidewall and bottom is a rounded corner.
Particularly, said interior pod is 30 ° ± 1 ° to the angle of bottom extended line.
Particularly, the intersection of outer pod sidewall and bottom is the rounded corner of radius 75～85mm.
The beneficial effect of the utility model is; The Czochralski method mono-crystal furnace graphite thermal field pod of the utility model has increased the insulation between interior pod and the outer pod through the angle and the shape of pod in changing and outer pod, and thermograde continues temperature in the maintenance single crystal growing furnace; The ecotopia of single crystal growing is provided; Improve output and yield rate, shorten the production operation time, reduce cost.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is the structural representation of existing pod.
Fig. 2 is the structural representation of the optimum embodiment of the utility model Czochralski method mono-crystal furnace graphite thermal field pod.
Among the figure 1, interior pod, 2, outer pod.
Embodiment
Combine accompanying drawing that the utility model is done further detailed explanation now.These accompanying drawings are the synoptic diagram of simplification, the substruction of the utility model only is described in a schematic way, so it only show the formation relevant with the utility model.
As shown in Figure 2, be the optimum embodiment of the utility model Czochralski method mono-crystal furnace graphite thermal field pod, a kind of Czochralski method mono-crystal furnace graphite thermal field pod; Pod 1 and outer pod 2 in comprising; Interior pod 1 is a tapered tubular, has the spacing of fill insulant material between interior pod 1 and the outer pod 2, and the top of outer pod 2 is tapered tubular; The bottom is the cylindricality tubulose; The intersection of outer pod 2 sidewalls and bottom is a rounded corner, and interior pod 1 is 30 ° to the angle of bottom extended line, and the intersection of outer pod 2 sidewalls and bottom is the rounded corner of radius 80mm.
With above-mentioned desirable embodiment according to the utility model is enlightenment, and through above-mentioned description, the related work personnel can carry out various change and modification fully in the scope that does not depart from this utility model technological thought.The technical scope of this utility model is not limited to the content on the specification sheets, must confirm its technical scope according to the claim scope.
Claims (3)
1. Czochralski method mono-crystal furnace graphite thermal field pod; Comprise interior pod (1) and outer pod (2); Interior pod (1) is a tapered tubular, has the spacing of fill insulant material between interior pod (1) and the outer pod (2), and it is characterized in that: the top of described outer pod (2) is tapered tubular; The bottom is the cylindricality tubulose, and the intersection of described outer pod (2) sidewall and bottom is a rounded corner.
2. Czochralski method mono-crystal furnace graphite thermal field pod as claimed in claim 1 is characterized in that: pod (1) is 30 ° ± 1 ° to the angle of bottom extended line in said.
3. Czochralski method mono-crystal furnace graphite thermal field pod as claimed in claim 1 is characterized in that: the intersection of described outer pod (2) sidewall and bottom is the rounded corner of radius 75～85mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120442513XU CN202297854U (en) | 2011-11-10 | 2011-11-10 | Graphite heat field deflecting hood of Czochralski single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120442513XU CN202297854U (en) | 2011-11-10 | 2011-11-10 | Graphite heat field deflecting hood of Czochralski single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202297854U true CN202297854U (en) | 2012-07-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120442513XU Expired - Fee Related CN202297854U (en) | 2011-11-10 | 2011-11-10 | Graphite heat field deflecting hood of Czochralski single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202297854U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107130295A (en) * | 2017-04-17 | 2017-09-05 | 宜昌南玻硅材料有限公司 | A kind of elimination hidden device and method split of silicon plug |
-
2011
- 2011-11-10 CN CN201120442513XU patent/CN202297854U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107130295A (en) * | 2017-04-17 | 2017-09-05 | 宜昌南玻硅材料有限公司 | A kind of elimination hidden device and method split of silicon plug |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20151110 |
|
| EXPY | Termination of patent right or utility model |