CN202271259U - High-precision spherical polishing machine - Google Patents

High-precision spherical polishing machine Download PDF

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Publication number
CN202271259U
CN202271259U CN201120303838XU CN201120303838U CN202271259U CN 202271259 U CN202271259 U CN 202271259U CN 201120303838X U CN201120303838X U CN 201120303838XU CN 201120303838 U CN201120303838 U CN 201120303838U CN 202271259 U CN202271259 U CN 202271259U
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CN
China
Prior art keywords
planker
workpiece
processing head
interferometer
carriage
Prior art date
Application number
CN201120303838XU
Other languages
Chinese (zh)
Inventor
陈健
陈福恭
Original Assignee
上海中晶企业发展有限公司
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Publication date
Application filed by 上海中晶企业发展有限公司 filed Critical 上海中晶企业发展有限公司
Priority to CN201120303838XU priority Critical patent/CN202271259U/en
Application granted granted Critical
Publication of CN202271259U publication Critical patent/CN202271259U/en

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Abstract

A high-precision spherical polishing machine includes a machine seat, a workpiece turntable and a workpiece carriage which can reciprocate in the X direction, wherein the workpiece turntable is placed on the workpiece carriage, and is driven by a speed-adjustable workpiece turntable driving motor for autorotation; a bridge rack is arranged above the workpiece carriage, and a Y-direction carriage is arranged on the bridge rack and driven by a Y-direction moving mechanism for horizontal reciprocation in the direction of a crossbeam; a Z-direction carriage is arranged on the Y-direction carriage, and is driven by a Z-direction moving mechanism to vertically ascend and descend; a processing head assembly is arranged on the Z-direction carriage, and includes a processing head motor, a processing head rod and a processing head; and the processing head includes a diamond saw blade, a copy polishing head and a small grinding head. The processing head can be replaced without dismounting of workpieces; and through the online detection of an interferometer, the effects on product quality from errors caused by dismounting and re-clamping are avoided.

Description

High-precise ball mirror polish machine
Technical field
The utility model relates to the cold worked equipment of optical glass elements face, specifically refers to a kind of to the cold worked high accuracy Twp-sided polishing machine of optical glass elements face.
Background technology
In the existing optical element surface cold working equipment; Classical sphere polisher lapper is the mould of employing and the basic identical size of work piece; Drag mould through swing mechanism; Make it reciprocally swinging on the surface that is clamped in the work piece of rotation on the main shaft, through dosing the attrition process that abrasive material carries out mould and surface to be machined.Its right process can't be carried out parameter quantification control, and precision is lower.
There is a kind of small abrasive nose polishing machine that a kind of processing sphere, aspheric effective way are provided, utilizes the rotation small abrasive nose, on finished surface, move according to preassigned path.The track in this path and movement velocity can realize to a certain extent that by computer control weak point is that polishing efficiency is low, is not suitable for the heavy caliber mirror finish to the quantitative control of material removal, produce middle and high frequency difference at finished surface simultaneously.
Above-mentioned existing optics process equipment performance is single, when unit uses, is difficult to avoid shortcoming and the limitation of himself, has limited their ranges of application separately.
Summary of the invention
The object of the present invention is to provide a kind of high-precise ball mirror polish machine, this equipment integrates functions such as thick moulding, profiling throwing, small abrasive nose throwing, can not only improve working (machining) efficiency, and can improve machining accuracy.
Another object of the present invention has been to provide the means of online detection, in dismounting down under the prerequisite of workpiece, through online detection, and with online detected data as foundation, form and further revise the instruction of processing, machining accuracy is improved greatly.
The technical scheme of the utility model is: a kind of high-precise ball mirror polish machine comprises support, the workpiece rotating disk; It is characterized in that; Comprise that one can be along X to the workpiece planker that moves back and forth, said workpiece rotating disk places on this workpiece planker, and rotation under the driving of the workpiece rotating disk drive motors of an adjustable speed; A crane span structure is established in workpiece planker top, and this crane span structure is provided with Y to planker, and this planker drives lower edge crossbeam direction level at Y to travel mechanism and moves back and forth; Z is located at Y on planker to planker, this Z to planker in Z lifting moving vertically under travel mechanism drives; One processing head assembly is located at Z on planker, and this assembly comprises processing head motor, processing head rod and processing head.Said processing head comprises the diamond saw blade, profiling rubbing head and small abrasive nose.
Further, an interferometer seat is located at an end of support, and this interferometer seat is provided with the interferometer planker that liftable moves, this planker mat one handwheel and screw mandrel, guide rail mechanism lifting moving, and interferometer is located on the interferometer planker.
The characteristics of the utility model are:
⑴ have the reciprocating device of X, Y and Z direction, and processing head can be processed the arbitrfary point that is fixed on the workpiece on the workpiece planker,
⑵ can change processing head not dismantling under the situation of following workpiece, slightly throws as using the profiling rubbing head instead after with the roughing of diamond saw blade, also can after thick the throwing, change small abrasive nose and carry out essence throwing, can be to the further deep processing of workpiece, with the raising machining accuracy.
⑶ through the online detection of interferometer; Can be under the situation of not dismantling following workpiece; Obtain process data, for further revising foundation is provided, because of need not to dismantle down workpiece; Not only can avoid the duplication of labour of dismantling repeatedly, can avoid because of dismounting with clamp the influence of the error brought again to product quality.
Description of drawings
Fig. 1 is the structural representation of an embodiment of high-precise ball mirror polish machine.
Fig. 2 is workpiece planker and the running part sketch map of workpiece rotating disk among Fig. 1.
Among the figure: 1 frame, 2 workpiece plankers, 3 workpiece rotating disks, 4 crane span structures, 5 Y are to planker, and 6 Z are to planker; 7 Z are to drive motors, and 8 Y are to motor, 9 interferometers, 10 processing head motors, 11 interferometer plankers, 12 interferometer handwheels; 13 interferometer seats, 14X are to guide rail, 15 electric cabinets, and 16 processing head rods, 21 X are to drive motors; 22 X are to screw mandrel, 23 slide blocks, and 24 workpiece rotating disk drive motors, 25 workpiece planker slide blocks, 27 X are to guide rail.
The specific embodiment
Combine an embodiment and accompanying drawing thereof that the utility model is described further at present.
By Fig. 1 and Fig. 2, support 1 is provided with workpiece planker 2, and this planker 2 moves back and forth at directions X at the driving lower edge planker slide block of motor 21 and screw mandrel 22 25.Workpiece rotating disk 3 places on the workpiece planker 2, rotation under workpiece rotating disk drive motors 24 drives.
A crane span structure 4 is established in workpiece planker 2 tops, and crane span structure 4 is provided with Y to planker 5, and this planker 5 drives lower edge crossbeam direction level at Y to travel mechanism and moves back and forth.Y is made up of motor 8, screw mandrel and guide rail to travel mechanism.
Y is provided with Z to planker 6 to planker 5, and this planker 6 is in Z lifting moving vertically under travel mechanism drives, and said Z is made up of motor 7, screw mandrel and guide rail to mobile machine.
The processing head assembly is located at Z on planker 6, and this assembly comprises processing head motor 10, processing head rod 16 and processing head.Processing head is fixed on the processing head rod 16, rotates at a high speed with the processing head rod, and processing head can have various forms, like rough machined diamond saw blade, the thick profiling rubbing head of throwing and the smart small abrasive nose of throwing.Can change according to processing request, also can change better processing head with the raising of the precision of processing.
Interferometer seat 13 is located at an end of support 1, and this interferometer seat 13 is provided with the interferometer planker 11 that liftable moves, this planker 11 mats one handwheel 12 and screw mandrel, guide rail mechanism lifting moving, and interferometer 9 is located on the interferometer planker 11.Mat interferometer 9 can carry out online detection to workpiece, and the data of detection can be imported computer in real time, gives the processing that makes new advances instruction by computer, carries out precision correction.
During work, workpiece is fixed on the workpiece rotating disk 3 with the rotating disk rotation, under the control of computer, the mat workpiece directions X move with processing head the moving of Y, Z direction, the arbitrfary point of workpiece on three-dimensional coordinate processed.In the time of need detecting the face graphic data of workpiece, the workpiece planker is moved to interferometer 9 times, do not dismantle workpiece ground workpiece is detected.

Claims (5)

1. a high-precise ball mirror polish machine comprises support (1), and a workpiece rotating disk (3) is characterized in that:
Comprise that one can be along X to the workpiece planker (2) that moves back and forth, said workpiece rotating disk (3) places on this workpiece planker (2), and rotation under a workpiece rotating disk drive motors (24) drives;
A crane span structure (4) is established in workpiece planker (2) top, and crane span structure (4) is provided with Y to planker (5), and this planker drives lower edge crossbeam direction level at Y to travel mechanism and moves back and forth;
Z is located at Y on planker (5) to planker (6), this Z to planker (6) in Z lifting moving vertically under travel mechanism drives;
One processing head assembly is located at Z to planker (6), and this assembly comprises processing head motor (10), processing head rod (16) and processing head, and processing head is fixed on the processing head rod (16).
2. high-precise ball mirror polish machine according to claim 1; It is characterized in that; One interferometer seat (13) is located at an end of support (1); This interferometer seat (13) is provided with the interferometer planker (11) that liftable moves, this planker (11) mat one handwheel (12) and screw mandrel, guide rail mechanism lifting moving, and interferometer (9) is located on the interferometer planker (11).
3. high-precise ball mirror polish machine according to claim 1 is characterized in that, said Y is made up of to drive motors (8), screw mandrel and guide rail Y to the travel mechanism of planker (5).
4. high-precise ball mirror polish machine according to claim 1 is characterized in that said Z is made up of to drive motors (7), screw mandrel and guide rail Z to travel mechanism.
5. high-precise ball mirror polish machine according to claim 1 is characterized in that said processing head comprises the diamond saw blade, profiling rubbing head and small abrasive nose.
CN201120303838XU 2011-08-19 2011-08-19 High-precision spherical polishing machine CN202271259U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201120303838XU CN202271259U (en) 2011-08-19 2011-08-19 High-precision spherical polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201120303838XU CN202271259U (en) 2011-08-19 2011-08-19 High-precision spherical polishing machine

Publications (1)

Publication Number Publication Date
CN202271259U true CN202271259U (en) 2012-06-13

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CN201120303838XU CN202271259U (en) 2011-08-19 2011-08-19 High-precision spherical polishing machine

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CN (1) CN202271259U (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103317436A (en) * 2013-06-18 2013-09-25 浙江工业大学 Grinding mechanism based on Hilbert-Peano fractal path
CN103862373A (en) * 2014-02-25 2014-06-18 复旦大学 Real-time grinding and polishing method based on dynamic interferometer
CN104385080A (en) * 2014-11-24 2015-03-04 成都精密光学工程研究中心 Polishing die surface shape modification device
CN105290915A (en) * 2015-09-02 2016-02-03 上海交通大学 Large-aperture ultra-precise grinding machine integrated system
CN105666281A (en) * 2016-02-06 2016-06-15 苏州信达光电科技有限公司 Telescope lens polishing detection device and polishing detection method thereof
CN106166712A (en) * 2016-06-24 2016-11-30 中南大学 On-line grinding and detection integral system
CN106622877A (en) * 2016-12-27 2017-05-10 哈尔滨工业大学 Surface coating, polishing and wiping equipment
CN106737084A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of adjustable full automatic polishing machining production line of polishing position
CN106737094A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of polishing production line of flowing water transport
CN106737057A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of polishing production line of workpiece linear transport between station
CN106737095A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of continuous-flow type polishing production line of vacsorb transport
CN108177047A (en) * 2017-12-15 2018-06-19 中国科学院上海光学精密机械研究所 The processing unit (plant) detection device and processing method of larger size panel strip optical element
CN108177037A (en) * 2017-12-15 2018-06-19 中国科学院上海光学精密机械研究所 Large scale polylith neodymium glass element lateral processing device detection device and processing method
CN108723968A (en) * 2017-04-17 2018-11-02 蓝思科技股份有限公司 Polissoir

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103317436A (en) * 2013-06-18 2013-09-25 浙江工业大学 Grinding mechanism based on Hilbert-Peano fractal path
CN103862373A (en) * 2014-02-25 2014-06-18 复旦大学 Real-time grinding and polishing method based on dynamic interferometer
CN103862373B (en) * 2014-02-25 2016-03-30 复旦大学 Based on the real-time abrasive polishing method of dynamic interferometer
CN104385080A (en) * 2014-11-24 2015-03-04 成都精密光学工程研究中心 Polishing die surface shape modification device
CN105290915A (en) * 2015-09-02 2016-02-03 上海交通大学 Large-aperture ultra-precise grinding machine integrated system
CN105666281A (en) * 2016-02-06 2016-06-15 苏州信达光电科技有限公司 Telescope lens polishing detection device and polishing detection method thereof
CN106166712A (en) * 2016-06-24 2016-11-30 中南大学 On-line grinding and detection integral system
CN106737057A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of polishing production line of workpiece linear transport between station
CN106737095A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of continuous-flow type polishing production line of vacsorb transport
CN106737094A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of polishing production line of flowing water transport
CN106737084A (en) * 2016-12-12 2017-05-31 江门市楚材科技有限公司 A kind of adjustable full automatic polishing machining production line of polishing position
CN106622877A (en) * 2016-12-27 2017-05-10 哈尔滨工业大学 Surface coating, polishing and wiping equipment
CN106622877B (en) * 2016-12-27 2019-03-19 哈尔滨工业大学 Surface, which applies to throw, wipes equipment
CN108723968A (en) * 2017-04-17 2018-11-02 蓝思科技股份有限公司 Polissoir
CN108177047A (en) * 2017-12-15 2018-06-19 中国科学院上海光学精密机械研究所 The processing unit (plant) detection device and processing method of larger size panel strip optical element
CN108177037A (en) * 2017-12-15 2018-06-19 中国科学院上海光学精密机械研究所 Large scale polylith neodymium glass element lateral processing device detection device and processing method
CN108177047B (en) * 2017-12-15 2019-10-18 中国科学院上海光学精密机械研究所 The processing unit (plant) detection device and processing method of larger size panel strip optical element

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