CN202255306U - Ceramic substrate plane contour scanning system - Google Patents
Ceramic substrate plane contour scanning system Download PDFInfo
- Publication number
- CN202255306U CN202255306U CN2011203743510U CN201120374351U CN202255306U CN 202255306 U CN202255306 U CN 202255306U CN 2011203743510 U CN2011203743510 U CN 2011203743510U CN 201120374351 U CN201120374351 U CN 201120374351U CN 202255306 U CN202255306 U CN 202255306U
- Authority
- CN
- China
- Prior art keywords
- ceramic substrate
- scanner
- laser range
- guide assembly
- module
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000000758 substrate Substances 0.000 title claims abstract description 34
- 239000000919 ceramic Substances 0.000 title claims abstract description 33
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a ceramic substrate plane contour scanning system, comprising a contour scanner and a computer; the contour scanner comprises a guide rail assembly and a laser range finder movably arranged on the guide rail assembly; the laser range finder is in connection with a line row; the scanner body base plate is fixedly provided with a motion control module, a power supply module and a measurement arrangement module; the motion control module and the power supply module are arranged on one side of the guide rail assembly and the measurement arrangement module is arranged on the opposite side; the scanner body is provided with data conversion transmission interfaces which are in connection with the computer through data lines. The scanner body is also fixedly provided with a top cover plate, the center of which is provided with a laser range finding aperture; the top cover plate is rotatably provided with an adjustable locating fixture block; the laser range finding aperture is arranged just above the guide rail assembly. The system determines ceramic substrate warping through detecting formed curves by laser; the accuracy is high, the whole detection process is short time-consuming and the efficiency is substantially increased.
Description
Technical field
The utility model relates to a kind of ceramic substrate face profile scanning system, especially relates to a kind of song that is used for the ceramic substrate plane and sticks up and carry out scanning-detecting system and scan method.
Background technology
Ceramic substrate is meant that Copper Foil at high temperature is bonded directly to the special process plate on aluminium oxide or the aluminium nitride ceramic substrate surface (single or double), is the basic material of high-power electric and electronic circuit structure technology and interconnection technique.And the planarization of ceramic substrate or bent set-back have decisive influence to the quality quality of product; Basic at present employing is artificial observes detection to ceramic substrate; Such method and operator's experience have very big relation, and not only time-consuming also being difficult to ensured the quality of products inefficiency.
The utility model content
The purpose of the utility model is to solve above-mentioned technical matters, proposes a kind of ceramic substrate face profile scanning system and scan method.
The purpose of the utility model will be achieved through following technical scheme:
A kind of ceramic substrate face profile scanning system comprises a profile scanner and the computing machine that is connected with profile scanner through data line;
Said profile scanner comprises one scan appearance body, is provided with a guide assembly and laser range finder in the said scanner body, and said laser range finder is connected with line row, and said laser range finder movably is arranged on the said guide assembly;
Also be fixed with motion-control module, power module and measurement on the base plate of said scanner body module is set, said motion-control module and power module are arranged at a side of said guide assembly, and said measurement is provided with the opposite side that module is arranged at guide assembly;
Said scanner body is provided with the data-switching transmission interface, and said data-switching transmission interface is connected with data line, and the other end of said data line is connected with computing machine;
Said scanner body also is fixed with a upper cover plate; Said upper cover plate center offers a laser ranging hole; Magnetic force is adsorbed with the scalable positioning wedged block on the said upper cover plate; Said scalable positioning wedged block is arranged on the periphery in laser ranging hole, said laser ranging hole be arranged on guide assembly directly over.
Preferably, said guide assembly is fixed on the rail support plate, and said rail support plate is fixed in the scanner body.
Preferably, said scalable positioning wedged block is provided with four, offers the board of putting that is used to place ceramic substrate on the said scalable positioning wedged block, and the said board of putting inwardly is oppositely arranged, and adjacent to put board line profile suitable with the ceramic substrate outline.
Preferably, said guide assembly comprises drive motor and screw arbor assembly, and said screw arbor assembly is provided with the screw arbor assembly movable block, and said laser range finder is installed on the said screw arbor assembly movable block.
The beneficial effect of the utility model is mainly reflected in: the curve through laser detection forms is judged the bent set-back of ceramic substrate, and accuracy is high, and the whole testing process time spent is short, and efficient is improved greatly.
Description of drawings
Fig. 1 is the inner structure synoptic diagram of the utility model.
Fig. 2 is the utility model one-piece construction synoptic diagram.
Embodiment
The utility model provides a kind of ceramic substrate face profile scanning system, like Fig. 1, shown in Figure 2, comprises a profile scanner and the computing machine 6 that is connected with profile scanner through data line;
Said profile scanner comprises one scan appearance body 1; Said scanner body 1 internal fixation has a rail support plate 23; Be fixed with a guide assembly on the said rail support plate 23, movably be provided with laser range finder 32 on the said guide assembly, said laser range finder is connected with line row 33.
Concrete, said guide assembly comprises drive motor and screw arbor assembly 21, and said screw arbor assembly 21 is provided with screw arbor assembly movable block 31, and said laser range finder 32 is installed on the said screw arbor assembly movable block 31.During work, it is reciprocating in screw arbor assembly 21 that said laser ranging piece 31 drives laser range finder 32 through winding displacement 33.
Also be fixed with motion-control module 42, power module 43 on the base plate 12 of said scanner body 1 and measure module 41 is set; Said motion-control module 42 and power module 43 are arranged at a side of said guide assembly, and said measurement is provided with the opposite side that module 41 is arranged at guide assembly.Said scanner body 1 is provided with data-switching transmission interface 5, and said data-switching transmission interface 5 is connected with data line (meaning not shown in the figures), and the other end of said data line is connected with computing machine 6;
Concrete, said motion-control module 42 is used to control move distance and the speed of laser range finder 32 on guide assembly.Said measurement is provided with module 41 data that measure is transferred in the computing machine 6 through data line through data-switching transmission interface 5; And measure control program by the terminal in the computing machine 6 and carry out data processing, the form with curve demonstrates at display screen at last.
Said scanner body 1 also is fixed with a upper cover plate 11; Said upper cover plate 11 centers offer a laser ranging hole 12; In order to make ceramic substrate can well position placement; Magnetic force is adsorbed with scalable positioning wedged block 13 on the said upper cover plate 11, and scalable positioning wedged block 13 adjustable positions to be to adapt to the different size substrate, offer on the said scalable positioning wedged block 13 be used to place ceramic substrate put board 14.In general, scalable positioning wedged block 13 is provided with four, and the said board 14 of putting inwardly is oppositely arranged, and adjacent to put board 14 line profiles suitable with the ceramic substrate outline.
Said scalable positioning wedged block 13 is arranged on the periphery in laser ranging hole 12, said laser ranging hole 12 be arranged on guide assembly directly over.When laser range finder 32 moves, just can well scan ceramic substrate through laser ranging hole 12.
Following mask body is set forth the course of work of the profile scan system of the utility model down:
At first, preset, preestablish the displacement and the speed of guide assembly through motion-control module 42.Earlier move setpoint distance along single direction, be along reverse mobile phase same distance next time when measuring.Preestablish the parameters such as survey frequency of laser range finder 32 through measuring setting module 41, measuring accuracy is less than 10 μ.
Then, according to the size of ceramic substrate to be measured, adjust the position of scalable positioning wedged block 13, ceramic substrate to be measured is positioned on the scalable positioning wedged block 13, start button is measured.
Concrete, laser range finder 32 at the uniform velocity moves to the distance of setting by the speed of setting on guide assembly, obtain one group of range data to ceramic substrate to be measured at last, feeds back to terminal and measures in the control program.
The processing procedure that terminal is measured control program is: to measure starting point is 0 point, and the distance that the measurement starting point is set at laser range finder 32 to ceramic substrate to be measured is a gauged distance, to the data correction.With data be depicted as with 0 be benchmark up and down the skew inflection curves, form chart simultaneously.By ceramic substrate characteristic to be measured decision, inflection curves has two types of concave, convex, and the operating personnel inspects inflection curves, and is protruding and for the ceramic substrate that transfinites promptly meets the requirements, recessed is undesirable, carries out with this that ceramic substrate is satisfactory deletes choosing.Whole time process time spent shortens greatly, and accuracy is high, and efficient is greatly improved.
The utility model still has numerous embodiments, and all employing equivalents or equivalent transformation and all technical schemes of forming all drop within the protection domain of the utility model.
Claims (4)
1. a ceramic substrate face profile scanning system is characterized in that: comprise a profile scanner and the computing machine that is connected with profile scanner through data line;
Said profile scanner comprises one scan appearance body, is provided with a guide assembly and laser range finder in the said scanner body, and said laser range finder is connected with line row, and said laser range finder movably is arranged on the said guide assembly;
Also be fixed with motion-control module, power module and measurement on the base plate of said scanner body module is set, said motion-control module and power module are arranged at a side of said guide assembly, and said measurement is provided with the opposite side that module is arranged at guide assembly;
Said scanner body is provided with the data-switching transmission interface, and said data-switching transmission interface is connected with data line, and the other end of said data line is connected with computing machine;
Said scanner body also is fixed with a upper cover plate; Said upper cover plate center offers a laser ranging hole; Magnetic force is adsorbed with the scalable positioning wedged block on the said upper cover plate; Said scalable positioning wedged block is arranged on the periphery in laser ranging hole, said laser ranging hole be arranged on guide assembly directly over.
2. ceramic substrate face profile scanning system according to claim 1, it is characterized in that: said guide assembly is fixed on the rail support plate, and said rail support plate is fixed in the scanner body.
3. ceramic substrate face profile scanning system according to claim 2; It is characterized in that: said scalable positioning wedged block is provided with four; Offer the board of putting that is used to place ceramic substrate on the said scalable positioning wedged block; The said board of putting inwardly is oppositely arranged, and adjacent to put board line profile suitable with the ceramic substrate outline.
4. ceramic substrate face profile scanning system according to claim 3; It is characterized in that: said guide assembly comprises drive motor and screw arbor assembly; Said screw arbor assembly is provided with the screw arbor assembly movable block, and said laser range finder is installed on the said screw arbor assembly movable block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203743510U CN202255306U (en) | 2011-10-08 | 2011-10-08 | Ceramic substrate plane contour scanning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203743510U CN202255306U (en) | 2011-10-08 | 2011-10-08 | Ceramic substrate plane contour scanning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202255306U true CN202255306U (en) | 2012-05-30 |
Family
ID=46116533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203743510U Expired - Fee Related CN202255306U (en) | 2011-10-08 | 2011-10-08 | Ceramic substrate plane contour scanning system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202255306U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506747A (en) * | 2011-10-08 | 2012-06-20 | 苏州赛琅泰克高技术陶瓷有限公司 | Ceramic substrate planar contour scanning system and method |
| CN112179307A (en) * | 2020-09-10 | 2021-01-05 | 上海交通大学 | Fuel cell metal bipolar plate forming error detection device |
-
2011
- 2011-10-08 CN CN2011203743510U patent/CN202255306U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506747A (en) * | 2011-10-08 | 2012-06-20 | 苏州赛琅泰克高技术陶瓷有限公司 | Ceramic substrate planar contour scanning system and method |
| CN112179307A (en) * | 2020-09-10 | 2021-01-05 | 上海交通大学 | Fuel cell metal bipolar plate forming error detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20161008 |