CN202226962U - Polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon - Google Patents
Polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon Download PDFInfo
- Publication number
- CN202226962U CN202226962U CN 201120283848 CN201120283848U CN202226962U CN 202226962 U CN202226962 U CN 202226962U CN 201120283848 CN201120283848 CN 201120283848 CN 201120283848 U CN201120283848 U CN 201120283848U CN 202226962 U CN202226962 U CN 202226962U
- Authority
- CN
- China
- Prior art keywords
- argon gas
- argon
- stove
- polysilicon
- casting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon, which is used for solving the problems in the existing polysilicon ingot casting furnace that: in the production process, the production cost is high, the environmental pollution is serious, and the power consumption is great. The polysilicon ingot casting furnace linking system comprises a plurality of polysilicon ingot casting furnaces (1) and a gas station argon pipeline (18), wherein the polysilicon ingot casting furnaces (1) are all communicated with a shared linking vacuum pump (8), the linking vacuum pump (8) is communicated with a purified argon storage tank (14) through an argon recovery buffer tank (10), a buffer valve (11), an argon purifying unit (12) and a supercharging pump (13), the purified argon storage tank (14) is communicated with a recycled argon main pipeline (16), and a recycled argon branch pipeline (19) is communicated with input ports of mass flux controllers (4), which are arranged on the polysilicon ingot casting furnaces (1). The utility model further discloses a specific production process for recycling the argon. The polysilicon ingot casting furnace linking system can reduce power consumption, reduce the consumption of the process gas, namely the argon, and directly reduce production cost.
Description
Technical field
The present invention relates to the integrated utilization of a kind of polycrystalline silicon ingot or purifying furnace scale prodn system, the stove on-line system is decided in particularly a kind of polysilicon casting of reusable edible argon gas.
Background technology
Along with highlighting day by day of the energy and environmental problem, human also growing to the demand of new forms of energy.From the evolution of present international solar cell and from industrialization development, polysilicon replaces the chief component that silicon single crystal becomes crystal silicon cell gradually.Because the running cost in silicon material cost and the photovoltaic whole production chain makes the cell power generation cost higher always.Therefore, energy-saving and cost-reducing is the key that each production link reduces cost.Existing polycrystalline silicon ingot or purifying furnace generally adopts the production technique of argon gas emptying in process of production, exists production cost high, the serious and big defective of power consumption of contaminate environment.
Summary of the invention
The casting of the polysilicon of a kind of recycle argon gas provided by the invention decide the stove on-line system and has been solved existing polycrystalline silicon ingot or purifying furnace and exist production cost high in process of production, and contaminate environment seriously and the big problem of power consumption.
The present invention overcomes the above problems through following scheme:
The stove on-line system is decided in a kind of polysilicon casting of recycle argon gas; Comprise that the casting of many polysilicons decides the gentle station of stove argon gas pipeline; Every polysilicon casting decides to be provided with on the stove mass flow controller, proportional valve and system; Gas station argon gas pipeline is communicated with the input aperture that the mass flow controller of stove is decided in every polysilicon casting respectively; Decide in the casting of every polysilicon to be connected with on the delivery port of proportional valve of stove and carry vacuum pump; Decide in the casting of every polysilicon to be provided with online vacuum-pumping tube respectively on the delivery port of proportional valve of stove, each online vacuum-pumping tube all is communicated with shared online vacuum pump, and online vacuum-pumping tube is provided with online vacuum pumping valve; The extraction argon gas vent pipe of online vacuum pump is communicated with the purification for argon unit through argon gas recovery surge tank, cushion valve, topping-up pump successively; The purification for argon unit is communicated with the purification of argon gas-holder, and the delivery port of purification of argon gas-holder is communicated with reuse argon gas main pipe rail through argon gas reuse valve, decides to be provided with respectively between the stove reuse argon gas bye-pass at reuse argon gas main pipe rail and every polysilicon casting; Reuse argon gas bye-pass is communicated with the input aperture of the mass flow controller that the polysilicon casting is decided to be provided with on the stove, and reuse argon gas bye-pass is provided with argon gas reuse bypass valve.
In described purification for argon unit, be provided with non-evaporable zirconium aluminium 16 and adsorption filtration unit, contained particle diameter is less than or equal to 5 more than or equal to the number of the dust of 0.5 μ m in every liter of argon gas behind the purification for argon purification unit.
Decide in described every polysilicon casting to be parallel with first manual ball valve and second manual ball valve on the output interface that carries vacuum pump of stove; Second manual ball valve is connected with the end that argon gas is gathered corrugated tube, and the other end that argon gas is gathered corrugated tube is connected with the 3rd manual ball valve.
The online production technique of stove is decided in a kind of polysilicon casting of recycle argon gas, may further comprise the steps:
The first step, stove parallel connection setting decide in the casting of many polysilicons; Decide in the casting of every polysilicon on the delivery port of proportional valve of stove online vacuum-pumping tube to be set respectively; Each online vacuum-pumping tube is decided the shared online vacuum pump of stove with many polysilicon castings to be communicated with; Online vacuum pumping valve is set on online vacuum-pumping tube; The delivery port of online vacuum pump is reclaimed surge tank and topping-up pump and cushion valve and purification for argon unit through argon gas successively be connected together, the purification for argon unit is communicated with the purification of argon gas-holder, the delivery port of purification of argon gas-holder is passed through argon gas reuse valve be communicated with reuse argon gas main pipe rail; Decide to be provided with respectively between the stove reuse argon gas bye-pass at reuse argon gas main pipe rail and the casting of every polysilicon, reuse argon gas bye-pass and corresponding polysilicon cast the input aperture connection of the mass flow controller of deciding to be provided with on the stove.
The vacuum pump that carries that stove is decided in second step, every polysilicon casting of opening online setting vacuumizes separately body of heater;
The 3rd goes on foot, opens simultaneously gas station argon gas pipeline; Decide stove to every polysilicon casting and charge into the manufacturability argon gas; Realize the constant voltage of furnace pressure through controlling quality flow director and proportional valve; Close every polysilicon casting and decide the vacuum pump that carries of stove, open online vacuum pump and simultaneously every stove is taken out argon gas, and carry out melting process;
The 4th step, the argon gas in the stove extracted out via online vacuum pump after; Send in the purification for argon unit that is provided with non-evaporable zirconium aluminium 16 and purify through reclaiming surge tank and topping-up pump and cushion valve, make contained particle diameter in every liter of argon gas be less than or equal to 5 more than or equal to the number of the dust of 0.5 μ m;
The 5th step, the argon gas after will purifying are sent into this polysilicon through purification of argon gas-holder, reuse argon gas main pipe rail and reuse argon gas bye-pass and cast and decide in the stove;
The 6th goes on foot, finishes up to production technique from the fusing beginning, and this reclaiming clean system ability is out of service.
The present invention has reduced power consumption, reduces the consumption of process gas argon gas, directly reduces production costs.Take vacuum system online, realize a vacuum pump operation, the purpose that all the other many vacuum pumps are stopped transport is concentrated purifying treatment through online vacuum pump to the argon gas of releasing, and accomplishes melting down again of argon gas through pipe valve and utilizes.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is the synoptic diagram of bleeding that stove is decided in separate unit polysilicon casting of the present invention
Fig. 3 is that process flow sheet is decided in polysilicon casting of the present invention
Fig. 4 is the process flow sheet of argon gas recycle of the present invention
Fig. 5 is the structural representation of argon gas collecting unit of the present invention.
Embodiment
The stove on-line system is decided in a kind of polysilicon casting of recycle argon gas; Comprise that the casting of many polysilicons decides stove 1 gentle station argon gas pipeline 18; Every polysilicon casting decides to be provided with on the stove 1 mass flow controller 4, proportional valve 2 and system 3; Gas station argon gas pipeline 18 is communicated with the input aperture that the mass flow controller 4 of stove 1 is decided in every polysilicon casting respectively; Decide in the casting of every polysilicon to be connected with on the delivery port of proportional valve 2 of stove 1 and carry vacuum pump 5; Decide in the casting of every polysilicon to be provided with online vacuum-pumping tube 6 respectively on the delivery port of proportional valve 2 of stove 1, each online vacuum-pumping tube 6 all is communicated with shared online vacuum pump 8, and online vacuum-pumping tube 6 is provided with online vacuum pumping valve 7; The extraction argon gas vent pipe 9 of online vacuum pump 8 is communicated with purification for argon unit 12 through argon gas recovery surge tank 10, cushion valve 11, topping-up pump 13 successively; Purification for argon unit 12 is communicated with purification of argon gas-holder 14, and the delivery port of purification of argon gas-holder 14 is communicated with reuse argon gas main pipe rail 16 through argon gas reuse valve 15, decides to be provided with respectively between the stove 1 reuse argon gas bye-pass 19 at reuse argon gas main pipe rail 16 and every polysilicon casting; Reuse argon gas bye-pass 19 is communicated with the input aperture that the mass flow controller 4 of setting on the stove 1 is decided in the polysilicon casting, and reuse argon gas bye-pass 19 is provided with argon gas reuse bypass valve 17.
In described purification for argon unit 12, be provided with non-evaporable zirconium aluminium 16 and adsorption filtration unit, contained particle diameter is less than or equal to 5 more than or equal to the number of the dust of 0.5 μ m in every liter of argon gas after purification for argon unit 12 purifies.
Decide in described every polysilicon casting to be parallel with first manual ball valve 20 and second manual ball valve 21 on the output interface that carries vacuum pump 5 of stove 1; Second manual ball valve 21 is connected with the end that argon gas is gathered corrugated tube 23, and the other end that argon gas is gathered corrugated tube 23 is connected with the 3rd manual ball valve 22.
The online production technique of stove is decided in a kind of polysilicon casting of recycle argon gas, may further comprise the steps:
The first step, stove parallel connection setting decide in the casting of many polysilicons; Decide in the casting of every polysilicon on the delivery port of proportional valve 2 of stove 1 online vacuum-pumping tube 6 to be set respectively; Each online vacuum-pumping tube 6 is decided the shared online vacuum pump 8 of stove with many polysilicon castings to be communicated with; Online vacuum pumping valve 7 is set on online vacuum-pumping tube 6; The delivery port of online vacuum pump 8 is connected together with purification for argon unit 12 through argon gas recovery surge tank 10 and topping-up pump 13 and cushion valve 11 successively; Purification for argon unit 12 is communicated with purification of argon gas-holder 14; The delivery port of purification of argon gas-holder 14 is communicated with reuse argon gas main pipe rail 16 through argon gas reuse valve 15, decides to be provided with respectively between the stove 1 reuse argon gas bye-pass 19, reuse argon gas bye-pass 19 and corresponding polysilicon are cast the input aperture connection of deciding the mass flow controller 4 of setting on the stove 1 at reuse argon gas main pipe rail 16 and every polysilicon casting.
The 5 pairs of bodies of heater separately of vacuum pump that carry that stove is decided in every polysilicon casting of second step, the online setting of unlatching vacuumize;
The 3rd goes on foot, opens simultaneously gas station argon gas pipeline 18; Decide stove 1 to every polysilicon casting and charge into the manufacturability argon gas; Realize the constant voltage of furnace pressure through controlling quality flow director 4 and proportional valve 2; That closes that the casting of every polysilicon decides stove 1 carries vacuum pump 5, opens online vacuum pump 8 and simultaneously every stove is taken out argon gas, and carry out melting process;
The 4th step, the argon gas in the stove extracted out via online vacuum pump after; Send in the purification for argon unit 12 that is provided with non-evaporable zirconium aluminium 16 and purify through reclaiming surge tank 10 and topping-up pump 13 and cushion valve 11, make contained particle diameter in every liter of argon gas be less than or equal to 5 more than or equal to the number of the dust of 0.5 μ m;
The 5th step, the argon gas after will purifying are sent into this polysilicon through purification of argon gas-holder 14, reuse argon gas main pipe rail 16 and reuse argon gas bye-pass 19 and cast and decide in the stove 1;
The 6th goes on foot, finishes up to production technique from the fusing beginning, and this reclaiming clean system ability is out of service.
In the applying argon gas technological process, the maximum free air delivery 39L/min that carries vacuum pump 5 of single device, vacuum pump of per ten online uses of equipment, then the actual pumping speed of maximum required vacuum pump is answered 390L/min.When reality is confirmed the theoretical pumping speed of vacuum pump, must calculate the conductance influence of the conductance and the vacuum valve of connecting tube, therefore the actual pumping speed of required vacuum pump will be bigger.Through above online bleeding, increased the free air delivery of online vacuum pump, be convenient to the collection and the processing of purification for argon system gas.
Carrying out clearly to know the composition that reclaims gas before argon gas reclaims, therefore must be earlier the recovery gas of each operation stage be being carried out composition analysis and mensuration, can reach the requirement of explained hereafter argon gas with the argon gas after the assurance reclaiming clean cell processing.
Decide in polysilicon casting that in the stove 1 there be the high-temperature zone essential substance: silicon material, high purity graphite, thomel, quartz crucible.Top temperature is 1550 ℃ in the stove, under oxygen-free environment and under the ar gas environment, has the volatile matter of non-sila matter in the silicon material, the volatile matter of insulation thomel, graphite dust particle high-temperature volatile matter.
Following reaction can take place with graphite in quartz crucible under the high temperature:
C+SiO2=SiO+CO?，CO+Si=SiO+C
The SiO and the CO that generate are extracted out by vacuum system in company with the process gas argon gas, need in follow-up purification system, to handle.The silicon of high temperature attitude is very responsive to oxygen, needs in purification system, to be provided with the oxygen analysis appearance, the gas leak phenomenon that possibly occur in the pipeline is increased the clean unit deoxygenation denitrogenate function.
To the mensuration that reclaims argon gas is through the exhaust line that carries vacuum pump 5 being carried out the vacuum-sealing transformation, adopt the bypass type acquisition mode, gathering pipeline and adopt welding ripple and silica tube series system; Argon gas is collected and is at first opened second manual ball valve 21, closes first manual ball valve 20, slowly opens the 3rd manual ball valve 22; When drawing high Deng the 23 obvious expansions of argon gas collection corrugated tube; Close second manual ball valve 21, open first manual ball valve 20, close the 3rd manual ball valve 22 simultaneously.This moment argon gas to gather in the corrugated tube 23 is exactly the gas of this operation stage, argon gas is gathered corrugated tube 23 together pulls down together with valve, change next cover and collect pipeline, carry out the collection preparation work of next operation stage gas.To repeatedly collect after gas indicates, prepare censorship.
To the purification of the argon gas that is recovered to, at first, select for use the method for Filtration Adsorption that it is dropped to≤3-5/liter (for particle diameter>=0.5 μ m dust) to the dust impurity that reclaims in the gas, satisfy the requirement of ingot production.For other gaseous constituents, purification for argon unit 12 is that employing non-evaporable zirconium aluminium 16 getters are scavenging agent.At a certain temperature, getter can form stable compound or sosoloid with micro-O2 in the argon gas, N2, H2, H2O, CO, CO2, CH4 etc., thereby reaches argon gas purified purpose.The purification for argon machine can with direct-reading spectrometer, XRF, the supporting use of aura spectrograph, guarantee the reliability and stability of analytical data with hyperpure gaseous mass.
Guarantee the reliable and stable operation of this system, safe and reliable system is essential, through to technological flow analysis, the The whole control system closed-loop control is designed.In the ingot production process, after technology proceeded to aeration phase, online evacuating valve was opened; Carry extraction valve and close, carry vacuum system simultaneously and shut down, bleed and accomplish by online vacuum pump; Argon gas through reclaiming argon gas gas-holder pressure detection, arrives the SC service ceiling of gas tank after extracting out via online vacuum pump like pressure; Then do not need to reclaim gas work, directly emptying gets final product again, and goes up in limited time when pressure is lower than; The supercharging that can carry out gas purifies recycles, and for guaranteeing the stable of casting ingot process process air-flow, must guarantee the relatively stable pressure of inlet mouth.When recovery gas-holder argon gas is lower than 0.2MPa, just can not continue to use and reclaim argon gas, need make the argon gas of gas using station guarantee to produce; When the argon pressure that reclaims is higher than 0.2MPa; Charging valve automaticallyes switch, and makes gas station argon gas valve closes, reclaims the state of argon gas valve open.
Opening of each valve closed, and the operation of online vacuum pump stops, and the start and stop of clean unit all can realize automatic control, all adopts manual dual mode at operation interface, can make things convenient for timely and switch.
Through the research of vacuum system on-line execute, argon gas recycle utilization, to calculate with the industrial scale of 100MW (industrial scales of 20 ingot furnaces), then adopt this technology back annual economize on electricity to be about 841680 kilowatt-hours according to actual production in 350 days every year; Save the argon gas usage quantity and be about 38769.23 m
3(using the recovery argon gas) according to annealing and colling stages; Save the argon gas usage quantity and be about 119300.00 m
3(reclaiming argon gas according to omnidistance use of inflation) calculates with the polysilicon output of 6GW, is about 50500800 kilowatt-hours as all adopting the annual electric power of saving of this technology; Save the argon gas usage quantity and be about 2326140 m3 (using the recovery argon gas) according to annealing and colling stages; Saving the argon gas usage quantity is about: 7158000 m
3(reclaiming argon gas) according to omnidistance use of inflation; Be equivalent to the annual burning that reduces by 28280.00 tons of raw coal, reduce by 50349297.60 kilograms of emission of carbon-dioxide.
Claims (3)
1. the stove on-line system is decided in the casting of the polysilicon of a recycle argon gas; Comprise that the casting of many polysilicons decides stove (1) gentle station argon gas pipeline (18); Every polysilicon casting decides to be provided with on the stove (1) mass flow controller (4), proportional valve (2) and system (3); Gas station argon gas pipeline (18) is communicated with the input aperture that the mass flow controller (4) of stove (1) is decided in every polysilicon casting respectively; Decide in the casting of every polysilicon to be connected with on the delivery port of proportional valve (2) of stove (1) and carry vacuum pump (5); It is characterized in that; Decide in the casting of every polysilicon to be provided with online vacuum-pumping tube (6) respectively on the delivery port of proportional valve (2) of stove (1); Each online vacuum-pumping tube (6) all is communicated with shared online vacuum pump (8); Online vacuum-pumping tube (6) is provided with online vacuum pumping valve (7), and the extraction argon gas vent pipe (9) of online vacuum pump (8) is communicated with purification for argon unit (12) through argon gas recovery surge tank (10), cushion valve (11), topping-up pump (13) successively, and purification for argon unit (12) are communicated with purification of argon gas-holder (14); The delivery port of purification of argon gas-holder (14) is communicated with reuse argon gas main pipe rail (16) through argon gas reuse valve (15); Decide to be provided with respectively between the stove (1) reuse argon gas bye-pass (19) at reuse argon gas main pipe rail (16) and every polysilicon casting, reuse argon gas bye-pass (19) is decided stove (1) with the polysilicon casting and upward is communicated with the input aperture of the mass flow controller (4) of setting, and reuse argon gas bye-pass (19) is provided with argon gas reuse bypass valve (17).
2. the stove on-line system is decided in the polysilicon casting of a kind of recycle argon gas according to claim 1; It is characterized in that; In described purification for argon unit (12), be provided with non-evaporable zirconium aluminium 16 and adsorption filtration unit, contained particle diameter is less than or equal to 5 more than or equal to the number of the dust of 0.5 μ m in every liter of argon gas after purification for argon unit (12) purify.
3. the stove on-line system is decided in the polysilicon casting of a kind of recycle argon gas according to claim 1; It is characterized in that; Decide in described every polysilicon casting to be parallel with first manual ball valve (20) and second manual ball valve (21) on the output interface that carries vacuum pump (5) of stove (1); Second manual ball valve (21) is connected with the end that argon gas is gathered corrugated tube (23), and the other end that argon gas is gathered corrugated tube (23) is connected with the 3rd manual ball valve (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120283848 CN202226962U (en) | 2011-08-05 | 2011-08-05 | Polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120283848 CN202226962U (en) | 2011-08-05 | 2011-08-05 | Polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202226962U true CN202226962U (en) | 2012-05-23 |
Family
ID=46077560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120283848 Expired - Fee Related CN202226962U (en) | 2011-08-05 | 2011-08-05 | Polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202226962U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102277617A (en) * | 2011-08-05 | 2011-12-14 | 中国电子科技集团公司第二研究所 | Polycrystalline silicon ingot furnace online system capable of recycling argon and production process thereof |
| CN103215414A (en) * | 2013-04-24 | 2013-07-24 | 苏州品源气体设备有限公司 | Shielding gas recovery and cyclic utilization system for vacuumized bell-type bright annealing furnaces |
| CN103866400A (en) * | 2014-03-10 | 2014-06-18 | 陈勇 | Sapphire production system |
| WO2018050096A1 (en) * | 2016-09-14 | 2018-03-22 | 清华大学 | Gas passage pressure response system |
-
2011
- 2011-08-05 CN CN 201120283848 patent/CN202226962U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102277617A (en) * | 2011-08-05 | 2011-12-14 | 中国电子科技集团公司第二研究所 | Polycrystalline silicon ingot furnace online system capable of recycling argon and production process thereof |
| CN103215414A (en) * | 2013-04-24 | 2013-07-24 | 苏州品源气体设备有限公司 | Shielding gas recovery and cyclic utilization system for vacuumized bell-type bright annealing furnaces |
| CN103866400A (en) * | 2014-03-10 | 2014-06-18 | 陈勇 | Sapphire production system |
| CN103866400B (en) * | 2014-03-10 | 2016-06-15 | 陈勇 | Sapphire crystal heat-exchanging method growth furnace helium cooling system |
| WO2018050096A1 (en) * | 2016-09-14 | 2018-03-22 | 清华大学 | Gas passage pressure response system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202226962U (en) | Polysilicon ingot casting furnace linking system capable of realizing cyclic utilization of argon | |
| WO2018001265A1 (en) | Molten carbon thermal process magnesium preparation technique and magnesium refining system | |
| CN111748691B (en) | Aluminothermic magnesium smelting device and magnesium smelting process | |
| CN103184347B (en) | Preparation method of high purity cadmium | |
| CN210512327U (en) | High-purity liquid oxygen production device | |
| CN102277617A (en) | Polycrystalline silicon ingot furnace online system capable of recycling argon and production process thereof | |
| CN105084329A (en) | Method and device for separating argon from a gas mixture | |
| CN202141345U (en) | Tail gas recovering system for annealing furnace | |
| CN205175855U (en) | Device of farine volume and tar flow measurement among high -temperature gas | |
| CN210764317U (en) | Electronic grade hydrogen bromide purification device | |
| CN102748957A (en) | Yellow phosphorus electric stove tail gas recovery system | |
| CN215138624U (en) | Argon tail gas treatment device of single crystal furnace | |
| CN102698563B (en) | High purity and high recovery rate methane concentration production process and implementing device thereof | |
| CN110906734B (en) | Brake disc continuous siliconizing furnace and working method thereof | |
| CN211689134U (en) | Novel blast furnace top pressure-equalizing gas and blast furnace damping-down waste gas integrated treatment system | |
| CN210322537U (en) | Hydrocarbon concentration enrichment device | |
| CN202876604U (en) | Furnace gas purifying system for sealed calcium carbide furnace | |
| CN105259072B (en) | The apparatus and method of fine powder amount and tar content measure in high-temperature gas | |
| CN202666621U (en) | Dry method dust removal device of hermetic electric furnace and with high-temperature bypass devices | |
| CN201737956U (en) | Recycling device for gas in blast-furnace charging and uniform-pressure diffusing process | |
| CN201634435U (en) | Jointed vacuum high-temperature disproportionated reaction device | |
| CN209836261U (en) | Aluminothermic method magnesium smelting device | |
| CN204818074U (en) | Titanium powder apparatus for producing | |
| CN204051046U (en) | A kind of cyclohexane oxidation off-gas recycle device | |
| CN210656991U (en) | Anti-condensation pressure-equalizing gas recovery system at top of blast furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20130805 |