CN202204836U - 高压试验设备绝缘支架 - Google Patents
高压试验设备绝缘支架 Download PDFInfo
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- CN202204836U CN202204836U CN 201120270875 CN201120270875U CN202204836U CN 202204836 U CN202204836 U CN 202204836U CN 201120270875 CN201120270875 CN 201120270875 CN 201120270875 U CN201120270875 U CN 201120270875U CN 202204836 U CN202204836 U CN 202204836U
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- 238000012360 testing method Methods 0.000 title claims abstract description 27
- 239000011810 insulating material Substances 0.000 claims abstract description 4
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CN 201120270875 CN202204836U (zh) | 2011-07-28 | 2011-07-28 | 高压试验设备绝缘支架 |
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CN 201120270875 CN202204836U (zh) | 2011-07-28 | 2011-07-28 | 高压试验设备绝缘支架 |
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CN202204836U true CN202204836U (zh) | 2012-04-25 |
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Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2757571A1 (en) * | 2013-01-17 | 2014-07-23 | IMS Nanofabrication AG | High-voltage insulation device for charged-particle optical apparatus |
CN104158384A (zh) * | 2014-08-26 | 2014-11-19 | 国家电网公司 | 一种便携式高压直流发生器绝缘加固装置 |
US9053906B2 (en) | 2013-07-25 | 2015-06-09 | Ims Nanofabrication Ag | Method for charged-particle multi-beam exposure |
US9099277B2 (en) | 2013-07-17 | 2015-08-04 | Ims Nanofabrication Ag | Pattern definition device having multiple blanking arrays |
US9269543B2 (en) | 2014-02-28 | 2016-02-23 | Ims Nanofabrication Ag | Compensation of defective beamlets in a charged-particle multi-beam exposure tool |
US9373482B2 (en) | 2014-07-10 | 2016-06-21 | Ims Nanofabrication Ag | Customizing a particle-beam writer using a convolution kernel |
US9443699B2 (en) | 2014-04-25 | 2016-09-13 | Ims Nanofabrication Ag | Multi-beam tool for cutting patterns |
US9495499B2 (en) | 2014-05-30 | 2016-11-15 | Ims Nanofabrication Ag | Compensation of dose inhomogeneity using overlapping exposure spots |
US9568907B2 (en) | 2014-09-05 | 2017-02-14 | Ims Nanofabrication Ag | Correction of short-range dislocations in a multi-beam writer |
US9653263B2 (en) | 2015-03-17 | 2017-05-16 | Ims Nanofabrication Ag | Multi-beam writing of pattern areas of relaxed critical dimension |
US9799487B2 (en) | 2015-03-18 | 2017-10-24 | Ims Nanofabrication Ag | Bi-directional double-pass multi-beam writing |
US10325756B2 (en) | 2016-06-13 | 2019-06-18 | Ims Nanofabrication Gmbh | Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer |
US10325757B2 (en) | 2017-01-27 | 2019-06-18 | Ims Nanofabrication Gmbh | Advanced dose-level quantization of multibeam-writers |
US10410831B2 (en) | 2015-05-12 | 2019-09-10 | Ims Nanofabrication Gmbh | Multi-beam writing using inclined exposure stripes |
US10522329B2 (en) | 2017-08-25 | 2019-12-31 | Ims Nanofabrication Gmbh | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus |
US10651010B2 (en) | 2018-01-09 | 2020-05-12 | Ims Nanofabrication Gmbh | Non-linear dose- and blur-dependent edge placement correction |
US10840054B2 (en) | 2018-01-30 | 2020-11-17 | Ims Nanofabrication Gmbh | Charged-particle source and method for cleaning a charged-particle source using back-sputtering |
US11099482B2 (en) | 2019-05-03 | 2021-08-24 | Ims Nanofabrication Gmbh | Adapting the duration of exposure slots in multi-beam writers |
US11569064B2 (en) | 2017-09-18 | 2023-01-31 | Ims Nanofabrication Gmbh | Method for irradiating a target using restricted placement grids |
US11735391B2 (en) | 2020-04-24 | 2023-08-22 | Ims Nanofabrication Gmbh | Charged-particle source |
-
2011
- 2011-07-28 CN CN 201120270875 patent/CN202204836U/zh not_active Expired - Fee Related
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2757571A1 (en) * | 2013-01-17 | 2014-07-23 | IMS Nanofabrication AG | High-voltage insulation device for charged-particle optical apparatus |
JP2014137998A (ja) * | 2013-01-17 | 2014-07-28 | Ims Nanofabrication Ag | 荷電粒子光学機器用高電圧絶縁装置 |
US9093201B2 (en) | 2013-01-17 | 2015-07-28 | Ims Nanofabrication Ag | High-voltage insulation device for charged-particle optical apparatus |
US9099277B2 (en) | 2013-07-17 | 2015-08-04 | Ims Nanofabrication Ag | Pattern definition device having multiple blanking arrays |
US9053906B2 (en) | 2013-07-25 | 2015-06-09 | Ims Nanofabrication Ag | Method for charged-particle multi-beam exposure |
US9269543B2 (en) | 2014-02-28 | 2016-02-23 | Ims Nanofabrication Ag | Compensation of defective beamlets in a charged-particle multi-beam exposure tool |
US9443699B2 (en) | 2014-04-25 | 2016-09-13 | Ims Nanofabrication Ag | Multi-beam tool for cutting patterns |
US9495499B2 (en) | 2014-05-30 | 2016-11-15 | Ims Nanofabrication Ag | Compensation of dose inhomogeneity using overlapping exposure spots |
US9373482B2 (en) | 2014-07-10 | 2016-06-21 | Ims Nanofabrication Ag | Customizing a particle-beam writer using a convolution kernel |
US9520268B2 (en) | 2014-07-10 | 2016-12-13 | Ims Nanofabrication Ag | Compensation of imaging deviations in a particle-beam writer using a convolution kernel |
CN104158384A (zh) * | 2014-08-26 | 2014-11-19 | 国家电网公司 | 一种便携式高压直流发生器绝缘加固装置 |
CN104158384B (zh) * | 2014-08-26 | 2016-06-01 | 国网黑龙江省电力有限公司牡丹江供电公司 | 一种便携式高压直流发生器绝缘加固装置 |
US9568907B2 (en) | 2014-09-05 | 2017-02-14 | Ims Nanofabrication Ag | Correction of short-range dislocations in a multi-beam writer |
US9653263B2 (en) | 2015-03-17 | 2017-05-16 | Ims Nanofabrication Ag | Multi-beam writing of pattern areas of relaxed critical dimension |
US9799487B2 (en) | 2015-03-18 | 2017-10-24 | Ims Nanofabrication Ag | Bi-directional double-pass multi-beam writing |
US10410831B2 (en) | 2015-05-12 | 2019-09-10 | Ims Nanofabrication Gmbh | Multi-beam writing using inclined exposure stripes |
US10325756B2 (en) | 2016-06-13 | 2019-06-18 | Ims Nanofabrication Gmbh | Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer |
US10325757B2 (en) | 2017-01-27 | 2019-06-18 | Ims Nanofabrication Gmbh | Advanced dose-level quantization of multibeam-writers |
US10522329B2 (en) | 2017-08-25 | 2019-12-31 | Ims Nanofabrication Gmbh | Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus |
US11569064B2 (en) | 2017-09-18 | 2023-01-31 | Ims Nanofabrication Gmbh | Method for irradiating a target using restricted placement grids |
US10651010B2 (en) | 2018-01-09 | 2020-05-12 | Ims Nanofabrication Gmbh | Non-linear dose- and blur-dependent edge placement correction |
US10840054B2 (en) | 2018-01-30 | 2020-11-17 | Ims Nanofabrication Gmbh | Charged-particle source and method for cleaning a charged-particle source using back-sputtering |
US11099482B2 (en) | 2019-05-03 | 2021-08-24 | Ims Nanofabrication Gmbh | Adapting the duration of exposure slots in multi-beam writers |
US11735391B2 (en) | 2020-04-24 | 2023-08-22 | Ims Nanofabrication Gmbh | Charged-particle source |
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Legal Events
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Owner name: STATE ELECTRIC NET CROP. Effective date: 20130122 Owner name: MAINTENANCE BRANCH OF LIAONING ELECTRIC POWER CO., Free format text: FORMER OWNER: LIAONING ELECTRIC POWER CO., LTD. Effective date: 20130122 |
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Free format text: CORRECT: ADDRESS; FROM: 121000 JINZHOU, LIAONING PROVINCE TO: 110000 SHENYANG, LIAONING PROVINCE |
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Effective date of registration: 20130122 Address after: 110000 21 glorious Street, Heping District, Liaoning, Shenyang Patentee after: Maintenance Branch, Liaoning Power Co.,Ltd. Patentee after: State Grid Corporation of China Address before: 121000 Liaoning city of Jinzhou province high tech Zone Dexinlikang Park No. 15 Patentee before: Liaoning Electric Power Company Limited |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120425 Termination date: 20190728 |
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CF01 | Termination of patent right due to non-payment of annual fee |