CN202092769U - Electret vibration sensor - Google Patents
Electret vibration sensor Download PDFInfo
- Publication number
- CN202092769U CN202092769U CN2011201215835U CN201120121583U CN202092769U CN 202092769 U CN202092769 U CN 202092769U CN 2011201215835 U CN2011201215835 U CN 2011201215835U CN 201120121583 U CN201120121583 U CN 201120121583U CN 202092769 U CN202092769 U CN 202092769U
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- China
- Prior art keywords
- electret
- stator
- moving plate
- shell
- plates
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- Expired - Fee Related
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The present utility model relates to the sensing technology field, especially to an electret vibration sensor. Substrates are arranged on the upper and lower ends inside a shell, stator plates are arranged on the substrates, electret extracting insulations are arranged on the left and right sides inside the shell, elastic membranes are arranged inside the electret extracting insulations, and electret moving plates are arranged between every two elastic membranes. To prevent the electrets from touching the shell, the number of the electret moving plates is always one less than that of the stator plates, and a structures that the electret moving plates are always clamped between the stator plates is formed. One side of the shell is provided with an electric potential extraction which can be connected with an electric control system. The arrangement form of the electret moving plates and the stator plates is variable, when the relative area of the electret moving plates and the stator plates is rather large, the arrangement number of the electret moving plates and the stator plates is rather small, and when the relative area of the electret moving plates and the stator plates is rather small and the depth is large, the arrangement number of the electret moving plates and the stator plates is increased. The sensor has good stability, and the sensitivity is obviously increased.
Description
Technical field
The utility model relates to field of sensing technologies, specifically, is a kind of electret vibration transducer.
Background technology
Electret of many uses can be used to make high-voltage power supply, transducer, microphone, electrometer etc.But, since the specific factor of electret, their exploitation and universal deficiencies in addition in actual applications.At present, the development of society is more and more higher to the requirement of sensing technology with the progress of science and technology, especially requires sensor to develop with microminiaturized to intellectuality.The principal mode of existing vibration transducer has: piezoelectric type, electrodynamic type, condenser type, inductance type, resistance-type, photo-electric etc., wherein, the electro-optical pickoff that can be applicable to precision measurement can not be used on body, especially spacecraft in the spatial movement process owing to there is not an air resistance, therefore, its vibration amplitude that runs into is different fully with the vibration amplitude that earth surface produces, and the amplitude of generation is small, like this, electro-optical pickoff just lacks the fixedly relativity of vibration survey.And other sensors are not easy to microminiaturization more greatly because of volume, are exactly with it when microminiaturized, its also can signal a little less than, insufficient sensitivity.Therefore, study a kind of good stability, highly sensitive microminiaturized vibration transducer is that market is badly in need of.
Summary of the invention
The purpose of this utility model is to be to overcome the deficiencies in the prior art, and a kind of good stability, highly sensitive microminiaturized electret vibration transducer are provided.
For achieving the above object, the technical scheme taked of the utility model is:
A kind of electret vibration transducer, comprise that shell, substrate, stator, electret moving plate, electret draw insulation, flexible sheet, current potential and draw, it is characterized in that, upper and lower side in the enclosure is provided with substrate, stator is set on substrate, left and right sides in the enclosure is provided with electret and draws insulation, and the inside that electret is drawn insulation respectively is provided with flexible sheet, and the electret moving plate is set between two flexible sheets; For preventing that the electret moving plate from running into shell, the number of electret moving plate is lacked a slice than stator all the time, forms the electret moving plate and always is clamped in structure between the stator; Being provided with current potential in a side of shell draws.
The arrangement form of described electret moving plate and stator can change: when the relative area of electret moving plate and stator is big, electret moving plate and stator that the sheet number is set is less; When the less and degree of depth of the relative area of electret moving plate and stator was dark, the sheet number that is provided with of electret moving plate and stator increased.
The mode of operation of a kind of miniature electret vibration transducer of the utility model is:
When the miniature electret vibration transducer is worked, because vibration, even little vibration, ultra-thin flexible sheet promptly has swing, the electret moving plate that causes connecting with it produces vibration, because of the electret moving plate always is clamped between the stator, will produce displacement between electret moving plate vibration back itself and the stator apart from property, because the existence of electret self electric field, thereby the sensitivity that can form electric field electric capacity between electret moving plate and the stator changes, the ripple frequency of these variations and electric field capacitance signal are drawn output by current potential, are applied to different demands after the electric-control system acquisition process through connecting.
Good effect of the present utility model is: good stability, the sensitivity of miniature electret vibration transducer are significantly increased.
Description of drawings
Accompanying drawing 1 is the structural representation of a kind of electret vibration transducer of the utility model embodiment 1;
Accompanying drawing 2 is structural representations of a kind of electret vibration transducer of the utility model embodiment 2;
Label among the figure is respectively:
1, shell; 2, substrate; 3, stator; 4, electret moving plate;
5, electret is drawn insulation; 6, flexible sheet; 7, current potential is drawn.
Embodiment
Provide the embodiment of a kind of electret vibration transducer of the utility model below in conjunction with accompanying drawing, but it may be noted that enforcement of the present utility model is not limited to following embodiment.
A kind of electret vibration transducer comprises that shell 1, substrate 2, stator 3, electret moving plate 4, electret are drawn insulation 5, flexible sheet 6, current potential draw 7.The material that shell 1 adopts can be selected according to different application scenarios, and the upper and lower side in shell 1 is provided with substrate 2, and stator 3 is set on substrate 2.Left and right sides in shell 1 is provided with electret and draws insulation 5, and the inside of drawing insulation 5 at electret respectively is provided with a slice flexible sheet 6, and electret moving plate 4 is set between two flexible sheets 6.For preventing that electret moving plate 4 from running into shell 1, the number of electret moving plate 4 should be lacked a slice than stator 3 all the time, forms the structure that electret moving plate 4 always is clamped between the stator 3; In a side of shell 1 current potential is set and draws 7, current potential is drawn 7 and can be connected with electric-control system.
Because the occasion difference that the electret vibration transducer is used, the arrangement form of described electret moving plate 4 and stator 2 is different and can changes, and can adopt two kinds of embodiments to this:
Claims (2)
1. electret vibration transducer, comprise that shell (1), substrate (2), stator (3), electret moving plate (4), electret draw insulation (5), flexible sheet (6), current potential and draw (7), it is characterized in that, upper and lower side in shell (1) is provided with substrate (2), and stator (3) is set on substrate (2); Left and right sides in shell (1) is provided with electret and draws insulation (5), and the inside that electret is drawn insulation (5) respectively is provided with flexible sheet (6), and electret moving plate (4) is set between two flexible sheets (6); For preventing that electret moving plate (4) from running into shell (1), the number of electret moving plate (4) is lacked a slice than stator (3) all the time, forms electret moving plate (4) and always is clamped in structure between the stator (3); Be provided with current potential in a side of shell (1) and draw (7).
2. a kind of electret vibration transducer according to claim 1, it is characterized in that, the arrangement form of described electret moving plate (4) and stator (3) can change: when the relative area of electret moving plate (4) and stator (3) is big, electret moving plate (4) and stator (3) that the sheet number is set is less; When the less and degree of depth of the relative area of electret moving plate (4) and stator (3) was dark, the sheet number that is provided with of electret moving plate (4) and stator (3) increased.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201215835U CN202092769U (en) | 2011-04-22 | 2011-04-22 | Electret vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201215835U CN202092769U (en) | 2011-04-22 | 2011-04-22 | Electret vibration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202092769U true CN202092769U (en) | 2011-12-28 |
Family
ID=45367830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201215835U Expired - Fee Related CN202092769U (en) | 2011-04-22 | 2011-04-22 | Electret vibration sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202092769U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104364623A (en) * | 2012-05-30 | 2015-02-18 | 欧姆龙株式会社 | Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration |
-
2011
- 2011-04-22 CN CN2011201215835U patent/CN202092769U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104364623A (en) * | 2012-05-30 | 2015-02-18 | 欧姆龙株式会社 | Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration |
| CN104364623B (en) * | 2012-05-30 | 2017-02-22 | 欧姆龙株式会社 | Electret-type vibration detection system, method for generating external vibration information, method for generating transfer function information relating to external vibration, program for generating external vibration information, and program for generating transfer function information relating to external vibration |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111228 Termination date: 20140422 |