Be used to clean the cleaning machine of graphite boat
Technical field
The utility model relates to a kind of cleaning machine that is used to clean graphite boat, belongs to the manufacture of solar cells equipment technical field.
Background technology
Cleaning machine is an equipment commonly used in the industrial production.There is no in the prior art and be specifically designed to the cleaning machine that cleans graphite boat, and in the manufacture of solar cells process, it is residual that the graphite boat surface has deposit, when graphite boat is reused, need to clean it earlier, therefore need a kind of simple in structure, easy to operate, cleaning machine that graphite boat is cleaned in good being used to of cleaning performance.
Summary of the invention
The purpose of this utility model provides a kind of simple in structure, easy to operate, cleaning machine that graphite boat is cleaned in good being used to of cleaning performance.
In order to achieve the above object, the utility model provides a kind of cleaning machine that is used to clean graphite boat, it is characterized in that, comprise the cell body base angle, cell body base angle upside is provided with major trough body, the major trough body bottom is divided into hydrofluoric acid dips groove and clear water potcher via demarcation strip, respectively be provided with a water inlet pipe, a nitrogen bubble pipe and a waste discharge mouth in hydrofluoric acid dips groove and the clear water potcher, water inlet pipe connects the clear water pipe, the nitrogen bubble pipe connects nitrogen tube, the waste discharge mouth connects waste pipe, and the left and right sides on major trough body top all is provided with side door, and the major trough body top is provided with the exhausting mouth of pipe.
Preferably, the both sides, front and back on described major trough body top all are provided with two opening and observe door.
Preferably, described demarcation strip is provided with graphite boat and puts platform temporarily.
The utility model provides the carrier of a cleaning for graphite boat, the acid corrosion-resistant environment of the major trough body by the PCV material.Utilize the deposit chemical reaction on hydrofluoric acid solution and graphite boat surface to remove deposit on the graphite boat,, use exhausting that the hydrofluoric acid of volatilization is extracted out by the speed and the uniformity of bubbling accelerated reaction, simple in structure, easy to operate, cleaning performance is good.
Description of drawings
Fig. 1 is the cleaning machine side view that is used to clean graphite boat;
Fig. 2 is the cleaning machine front view that is used to clean graphite boat;
Fig. 3 is the major trough body bottom plan view;
Fig. 4 is the graphite boat side view;
Fig. 5 is the graphite boat vertical view.
The specific embodiment
Specify the utility model below in conjunction with embodiment.
Embodiment
As shown in Figure 1, for being used to clean the cleaning machine side view of graphite boat, the described cleaning machine that is used to clean graphite boat, comprise cell body base angle 1, cell body base angle 1 upside is provided with major trough body 2, major trough body 2 tops are provided with the exhausting mouth of pipe 5, and the left and right sides on major trough body 2 tops all is provided with side door, major trough body 2 rear portions each side be provided with a waste pipe 6.
As shown in Figure 2, for being used to clean the cleaning machine front view of graphite boat, major trough body 2 front portions each side be provided with a nitrogen tube 7 and a clear water pipe 3, the both sides, front and back on major trough body 2 tops all are provided with two opening and observe door 8.
As shown in Figure 3, be the major trough body bottom plan view, major trough body 2 bottoms are divided into hydrofluoric acid dips groove and clear water potcher via demarcation strip 12, respectively be provided with a water inlet pipe 10, a nitrogen bubble pipe 9 and a waste discharge mouth 11 in hydrofluoric acid dips groove and the clear water potcher, water inlet pipe 10 connects clear water pipe 3, nitrogen bubble pipe 9 connects nitrogen tube 7, and waste discharge mouth 11 connects waste pipe 6, and demarcation strip 12 is provided with graphite boat and puts platform 13 temporarily.
As shown in Figure 4, be the graphite boat side view; Fig. 5 is its vertical view, when graphite boat 14 is cleaned, at first open side door 4, graphite boat 14 is put into the hydrofluoric acid groove of major trough body 2, open clear water pipe 3 and in hydrofluoric acid groove, add clear water till not having graphite boat 14, add certain density hydrofluoric acid, close side door 4 again, then open nitrogen tube 7 and nitrogen is sent into carry out of rinse bath with accelerated reaction uniformly by bubbling pipe 9, hydrofluoric acid is volatile, need by the exhausting mouth of pipe 5 its extraction, observe the cleaning situations that door 8 is observed graphite boats 14 by two opening, treat to open after graphite boat 14 cleans up side door 4 and graphite boat 14 is placed on graphite boat puts temporarily on the platform 13, open the side door 4 of opposite side again, graphite boat 14 is put into the rinsing of clear water potcher, close side door 4 and open nitrogen tube 7 beginning bubblings, treat that rinsing is clean after, open waste pipe 6, water is discharged, at last graphite boat is taken out.