CN202022979U - 大容量石墨舟 - Google Patents
大容量石墨舟 Download PDFInfo
- Publication number
- CN202022979U CN202022979U CN2011200941045U CN201120094104U CN202022979U CN 202022979 U CN202022979 U CN 202022979U CN 2011200941045 U CN2011200941045 U CN 2011200941045U CN 201120094104 U CN201120094104 U CN 201120094104U CN 202022979 U CN202022979 U CN 202022979U
- Authority
- CN
- China
- Prior art keywords
- boat
- sheet
- silicon chip
- graphite
- boat sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 48
- 239000010439 graphite Substances 0.000 title claims abstract description 48
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 47
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 42
- 239000010703 silicon Substances 0.000 claims abstract description 42
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 abstract 11
- 239000000969 carrier Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011200941045U CN202022979U (zh) | 2011-04-01 | 2011-04-01 | 大容量石墨舟 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011200941045U CN202022979U (zh) | 2011-04-01 | 2011-04-01 | 大容量石墨舟 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202022979U true CN202022979U (zh) | 2011-11-02 |
Family
ID=44847938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011200941045U Expired - Lifetime CN202022979U (zh) | 2011-04-01 | 2011-04-01 | 大容量石墨舟 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202022979U (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102534564A (zh) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | 一种pecvd用的双面电极孔石墨舟 |
CN102610701A (zh) * | 2012-04-06 | 2012-07-25 | 无锡绿波新能源设备有限公司 | 便于拆装的石墨舟 |
CN102856176A (zh) * | 2012-09-27 | 2013-01-02 | 合肥海润光伏科技有限公司 | 一种管式pecvd镀膜方法 |
WO2024077864A1 (zh) * | 2022-10-10 | 2024-04-18 | 上海中欣晶圆半导体科技有限公司 | 一种改善抛光平坦度及提高产能的贴附配凑方法 |
-
2011
- 2011-04-01 CN CN2011200941045U patent/CN202022979U/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102534564A (zh) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | 一种pecvd用的双面电极孔石墨舟 |
CN102610701A (zh) * | 2012-04-06 | 2012-07-25 | 无锡绿波新能源设备有限公司 | 便于拆装的石墨舟 |
CN102856176A (zh) * | 2012-09-27 | 2013-01-02 | 合肥海润光伏科技有限公司 | 一种管式pecvd镀膜方法 |
WO2024077864A1 (zh) * | 2022-10-10 | 2024-04-18 | 上海中欣晶圆半导体科技有限公司 | 一种改善抛光平坦度及提高产能的贴附配凑方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202022979U (zh) | 大容量石墨舟 | |
CN209461478U (zh) | 一种太阳能电池片电增强氢钝化炉电注入机构 | |
CN202072762U (zh) | 一种石墨舟 | |
CN103346177A (zh) | 单边取放位高倍聚光光伏电池基板固定底座 | |
CN204144294U (zh) | 硅片承载盒 | |
CN203150564U (zh) | 一种太阳能电池正面栅线分段电池片 | |
CN204167328U (zh) | 一种具有次主栅线的太阳能电池正面栅极结构 | |
CN203910817U (zh) | 太阳能电池正面电极结构 | |
CN202871806U (zh) | 太阳能电池片背面电极结构及有该结构的太阳能电池片 | |
CN202585452U (zh) | 三合一太阳能电池组件 | |
CN203142007U (zh) | 分体式电池片印刷装置 | |
CN203536394U (zh) | 多晶硅片水平制绒机的自动下料装置 | |
CN203674185U (zh) | 一种承载硅片的石墨框装置 | |
CN202796886U (zh) | 石墨舟 | |
CN202686818U (zh) | 一种新型伺服装箱机械手 | |
CN202268378U (zh) | 一种晶体硅太阳能电池扩散用石英舟 | |
CN204303824U (zh) | 一种太阳能电池片 | |
CN204348729U (zh) | 光电转换效率高的多晶硅太阳能电池片 | |
CN102231406A (zh) | 一种用于太阳能电池硅片生产的石英舟 | |
CN202817099U (zh) | 新型电池极板板栅结构 | |
CN201741678U (zh) | 镀膜工艺中用于放置薄片的装置 | |
CN202957257U (zh) | 太阳能电池片背面电极结构及具有该结构的太阳能电池片 | |
CN202965448U (zh) | 适用于太阳能高方阻电池的正电极网版 | |
CN202523731U (zh) | 一种太阳能电池框 | |
CN202601626U (zh) | 一种背电极分段式太阳能电池片 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. Free format text: FORMER NAME: GOLD STONE PRECISION TECHNOLOGY(SHENZHEN)CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee after: Shenzhen Gold Stone Technology Co., Ltd. Address before: 518000 Guangdong city of Shenzhen province Baoan District manhole Street third Jiao Sha Tau Tong industrial area ranked first, one to two Patentee before: Gold stone precision technology (Shenzhen) Co., Ltd. |
|
C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN GOLD STONE TECHNOLOGY STOCK CO., LTD. Free format text: FORMER NAME: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee after: Shenzhen Gold Stone Technology Co., Ltd Address before: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee before: Shenzhen Gold Stone Technology Co., Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20111102 |
|
CX01 | Expiry of patent term |