CN201760706U - Touch screen ito film laser etching device - Google Patents

Abstract

The utility model provides a touch screen ITO film laser etching equipment, including a frame, a control system, a display system, a laser generator, a lifting mechanism and an adsorption platform, and the control system, the display system, the lifting mechanism and the adsorption platform are all installed on the frame Above, the laser generator is installed on the lifting mechanism, which is characterized in that it also includes a two-dimensional vibrating lens and an F-θ lens group. The two-dimensional vibrating lens is installed on the lifting frame of the lifting mechanism, and the F-θ lens group is installed on the The lower part of the oscillating head. The lifting mechanism includes a motor, a worm gear reducer, a screw motion pair, a linear guide rail motion pair and a lifting frame. The touch screen ITO thin film laser etching equipment of the utility model has fast etching speed, high efficiency and uniform engraved line width for the touch screen ITO thin film.

Description

Touch screen ITO thin film laser etching equipment

technical field

The utility model relates to the field of laser processing, in particular to a touch screen ITO film laser etching equipment. the

Background technique

ITO film is Indium-Tin Oxide (Indium-Tin Oxide) transparent conductive film glass, which is widely used in liquid crystal touch screens, displays (LCD), solar cells, microelectronics ITO conductive film glass, optoelectronics and various optical fields. the

Touch screens are more and more widely used in various industries. Traditional touch screen ITO films are mainly produced by chemical etching. However, with the emergence of capacitive multi-touch technology in Apple's iphone and the support of multi-touch operating systems such as Windows 7, it has triggered a revolutionary change in touch screens. Wide precision) and processing efficiency and yield cannot meet the requirements. the

The laser has the characteristics of high coherence, high directionality and high intensity, and it is easy to obtain a high luminous flux density, focus the strong laser beam on the medium, and use the process of interaction between the laser beam and the substance to change the nature of the substance, which is laser processing. With the development of optics, electromechanical, material, computer and control technology, laser processing technology has gradually developed into a new processing technology. Laser processing has significant advantages such as wide processing objects, small deformation, high precision, energy saving, small pollution, long-distance processing and automatic processing. etc. are becoming more and more important. the

Patent No. CN200720171149.1 is an ITO thin film laser etching machine, including a frame, an industrial computer, a display system, a laser generator, a cutting head, a suction plate, an X-axis motion system, a Y-axis motion system, and a Z-axis motion system. The industrial computer, laser generator, display system and Z-axis motion system are all installed on the frame, the cutting head is installed on the Z-axis motion system, and the adsorption disc is fixed on the X-axis motion system, located on the Y-axis Above the kinematic system, the X-axis kinematic system is installed on the Y-axis kinematic system, and crosses in a cross shape, and the Y-axis kinematic system is fixedly installed on the frame. The utility model has high efficiency and good linearity for the marking of the ITO film. , capable of laser etching large-size ITO films. the

However, due to the ITO thin film laser etching machine whose patent number is CN200720171149.1, its adsorption plate is fixed on the X-axis motion system, and the X-axis motion system is installed on the Y-axis motion system, and the X-axis motion system and the Y-axis motion system are composed of a straight line Driven by a motor, the quality of the suction disc, the X-axis motion system and the Y-axis motion system are relatively large, and the inertia is also large. The linear motor drives the ITO film on the adsorption disc to move the engraving line. The mass of the Y-axis motion system is large and the inertia is large, so the marking speed is slow and the efficiency is low; The vibration is also large during the process, and the stable line of the engraved line is also affected, and the engraved line width is uneven. the

Contents of the invention

The purpose of the utility model is to provide a touch screen ITO thin film laser etching equipment, the touch screen ITO thin film laser etching equipment, the etching speed is high, the efficiency is high, and the engraved line width is uniform. the

In order to achieve the above object, the touch screen ITO thin film laser etching equipment of the present invention includes a frame, a control system, a display system, a laser generator, a lifting mechanism and an adsorption platform, and the control system, the display system, the lifting mechanism and the adsorption platform are all installed On the frame, the laser generator is installed on the lifting mechanism, which is characterized in that it also includes a two-dimensional vibrating lens and an F-θ lens group. The two-dimensional vibrating lens is installed on the lifting frame of the lifting mechanism, and the F-θ lens group is installed In the lower part of the two-dimensional vibrating head. the

The above-mentioned touch screen ITO film laser etching equipment is characterized in that: the lifting mechanism includes a motor, a worm gear reducer, a screw motion pair, a linear guide rail motion pair and a lifting frame, and the output shaft of the motor and the input of the worm gear reducer Shaft connection, the output shaft of the worm gear reducer is connected with the screw of the screw motion pair, the nut of the screw motion pair is connected with the lifting frame, the guide rail of the linear guide rail motion pair is installed on the connecting plate connected with the frame, The slider of the linear guide rail kinematic pair is connected with the lifting frame. The function of the lifting mechanism is to adjust the distance between the F-θ lens group and the ITO film on the adsorption platform, so that the focus of the laser beam passing through the F-θ lens group falls on the ITO film. the

The above touch screen ITO thin film laser etching equipment is characterized in that: the lifting mechanism includes a hand wheel, a worm gear reducer, a screw motion pair, a linear guide rail motion pair and a lifting frame, and the input shaft of the hand wheel and the worm gear reducer Connection, the output shaft of the worm gear reducer is connected with the screw of the screw kinematic pair, the nut of the screw kinematic pair is connected with the lifting frame, the guide rail of the linear guide rail kinematic pair is installed on the connecting plate connected with the frame, and the straight line The slider of the guide rail kinematic pair is connected with the lifting frame. The function of the lifting mechanism is to adjust the distance between the F-θ lens group and the ITO film on the adsorption platform, so that the focus of the laser beam passing through the F-θ lens group falls on the ITO film. the

The above touch screen ITO thin film laser etching equipment is characterized in that: it also includes a two-dimensional motion system, the two-dimensional motion system is composed of an X-axis motion system and a Y-axis motion system, and the X-axis motion system is installed on the Y-axis motion system , the X-axis motion system and the Y-axis motion system are in the shape of a cross, the two-dimensional motion system is installed on the frame, and the adsorption platform is installed on the two-dimensional motion system. the

The touch screen ITO thin film laser etching equipment as above is characterized in that: the wavelength of the laser emitted by the laser generator is 266nm; the wavelength of the laser emitted by the laser generator can also be 1064nm, 532nm or 355nm. the

There are two high-speed servo vibration motors in the two-dimensional oscillating head, a laser reflection lens is installed on the shaft of each high-speed servo vibration motor, and the two high-speed servo vibration motors are installed crosswise. This touch screen ITO thin film laser etching equipment uses a two-dimensional oscillating lens to control the deflection of the laser. Through the vibration of two high-speed servo vibration motors, the laser reflective mirror installed on its axis is deflected. The deflection angle of the laser beam is controlled by controlling the deflection angle of the high-speed servo vibration motor shaft, which also determines the deflection distance of the laser beam. Due to the high deflection speed of the high-speed servo vibration motor of the two-dimensional vibrating lens, the laser beam moves at a high speed, that is, the etching speed of the ITO film is fast and the efficiency is high. the

The F-θ lens group is a group of lens groups, and its function is to focus the laser beams at different angles through the two-dimensional vibrating lens onto a plane, so the ITO film placed on the adsorption platform can be etched. the

The interior of the adsorption platform is a cavity, the upper surface is provided with a plurality of small holes communicating with the cavity, and the side or lower part of the adsorption platform is provided with a plurality of through holes communicating with the cavity; wherein, at least one through hole Connect with vacuum device or suction device; at least one through hole is connected with blowing device. To etch the ITO film, the ITO film should be adsorbed on the adsorption platform. After the etching is completed, the ITO film should be blown up to the adsorption platform so that it can be easily removed from the adsorption platform. the

The frame is a metal structure, which is the supporting and connecting part of the entire touch screen ITO thin film laser etching equipment. The control system, display system, lifting mechanism, adsorption platform, and two-dimensional motion system are all installed on the frame. the

The control system includes an industrial computer and its operation control software, and its function is to control the operation of the touch screen ITO thin film laser etching equipment. the

The display system is a display screen, which is used to display the interface of the operation control software. the

When working, the ITO film is placed flat on the adsorption platform. Under the action of the vacuum device or the exhaust device, the ITO film is flatly adsorbed on the upper surface of the adsorption platform. The laser emitted by the laser generator is controlled by the control system. The vibrating lens and F-θ lens group act on the ITO film to etch the ITO film. the

Since this touch screen ITO film laser etching equipment uses a two-dimensional vibrating lens to control the deflection of the laser, and the deflection speed of the high-speed servo vibration motor of the two-dimensional vibrating lens is very fast, so that the laser beam moves at a high speed, that is, the ITO film is engraved The erosion speed is fast and the efficiency is high; at the same time, although the vibration of the high-speed servo vibration motor of the two-dimensional vibrating lens is very fast, its mass is very small, so the vibration of the high-speed servo vibrating motor of the two-dimensional vibrating lens is small when it deflects, which has an impact on the entire equipment Small, uniform ITO film etching line width. the

Two-dimensional vibrating lens is used to control the deflection of the laser, and the etching speed is fast, but the etching format of the two-dimensional vibrating lens is limited. If the format is to be increased, the focal length of the F-θ lens group must be increased. However, increasing the If the focal length of the F-θ lens group is exceeded, the laser focus point will become larger, and the etched line width will be wide, which is difficult to meet the requirements. In order to increase the etching range, the touch screen ITO thin film laser etching equipment is equipped with a two-dimensional motion system. The two-dimensional motion system is composed of an X-axis motion system and a Y-axis motion system. The X-axis motion system is installed on the Y-axis motion system. The X-axis motion system and the Y-axis motion system are in the shape of a cross, the two-dimensional motion system is installed on the frame, and the adsorption platform is installed on the two-dimensional motion system. Through software control, the X-axis motion system and the Y-axis motion system are moved to etch the ITO film on the touch screen on the adsorption platform. After one area is etched, another area can be etched, so that a large area can be etched. Large format touch screen ITO film. the

The touch screen ITO thin film laser etching equipment of the utility model has fast etching speed and high efficiency for the touch screen ITO thin film, and the engraved line width is uniform. the

Description of drawings

Fig. 1 is a schematic front view of an embodiment of the utility model. the

Figure 2 is a schematic side view. the

Figure 3 is a structural diagram of the lifting mechanism. the

Detailed ways

Description of the marks in Figure 1: Frame 1, Control System 2, Display System 3, Lifting Mechanism 4, 2D Vibrating Head 5, F-θ Lens Group 6, Adsorption Platform 7, Protective Door 8, Perspective Window 9, Disk Drawer 10, support feet 11. the

Description of FIG. 2 labeled: laser generator 12 . the

The explanation of Fig. 3 mark: worm gear reducer 13, electric motor 14, connecting plate 15, slide block 16, guide rail 17, elevating frame 18, screw mandrel 19, nut 20. the

Referring to Fig. 1, the embodiment of the touch screen ITO thin film laser etching equipment of the present invention includes a frame 1, a control system 2, a display system 3, a laser generator 12 (see Fig. 2), a lifting mechanism 4, a two-dimensional vibrating lens 5, F-θ lens group 6 and adsorption platform 7. The control system 2, the display system 3, the lifting mechanism 4 and the adsorption platform 7 are all installed on the frame 1, the laser generator 12 is installed on the lifting mechanism 4, and the two-dimensional vibrating lens 5 is installed on the lifting frame 18 of the lifting mechanism 4, The F-θ lens group 6 is installed on the lower part of the two-dimensional vibrating head 5 . the

Referring to Fig. 3, the lifting mechanism 4 of the embodiment of the touch screen ITO thin film laser etching equipment of the present invention includes a motor 14, a worm gear reducer 13, a screw motion pair, a linear guide rail motion pair and a lifting frame 18, and the output shaft of the motor 14 is connected to the lifting frame 18. The input shaft of the worm gear reducer 13 is connected, the output shaft of the worm gear reducer 13 is connected with the screw 19 of the screw motion pair, the nut 20 of the screw motion pair is connected with the lifting frame 18, and the guide rail 17 of the linear guide rail motion pair Installed on the connecting plate 15 connected with the frame 1, the slide block 16 of the linear guide rail motion pair is connected with the lifting frame 18. The function of the lifting mechanism 4 is to adjust the distance between the F-θ lens group 6 and the ITO film on the adsorption platform 7, so that the focus of the laser beam passing through the F-θ lens group 6 falls on the ITO film. the

Referring to Fig. 1, the front portion of the frame 1 of the embodiment of the touch screen ITO thin film laser etching equipment of the present invention is provided with a protective door 8 to facilitate the placement or removal of the ITO film during work; the protective door 8 is provided with a perspective window 9 for perspective Window 9 is an observation window during work. A keyboard drawer 10 is installed on the frame 1, and the input keyboard is placed therein. The lower part of the frame 1 is provided with supporting feet 11 . the

The utility model touch screen ITO thin film laser etching equipment also includes a two-dimensional motion system, the two-dimensional motion system is composed of an X-axis motion system and a Y-axis motion system, the X-axis motion system is installed on the Y-axis motion system, and the X-axis motion system and The Y-axis motion system is in the shape of a cross, the two-dimensional motion system is installed on the frame 1, and the adsorption platform 7 is installed on the two-dimensional motion system. the

There are two high-speed servo vibration motors in the two-dimensional vibrating head 5, and a laser reflector is installed on the shaft of each high-speed servo vibration motor, and the two high-speed servo vibration motors are installed crosswise. This touch screen ITO thin film laser etching equipment uses a two-dimensional vibrating lens 5 to control the deflection of the laser, and deflects the laser reflective mirror installed on its axis through the vibration of two high-speed servo vibration motors. The deflection angle of the laser beam is controlled by controlling the deflection angle of the high-speed servo vibration motor shaft, which also determines the deflection distance of the laser beam. Because the deflection speed of the high-speed servo vibration motor of the two-dimensional vibrating lens 5 is very fast, the moving speed of the laser beam is high, that is, the etching speed of the ITO thin film is fast and the efficiency is high. the

The F-θ lens group 6 is a group of lens groups, and its function is to focus the laser beams of different angles passing through the two-dimensional vibrating lens 5 onto a plane, so that the ITO film placed on the adsorption platform 7 can be etched. The laser generator 12 is a solid-state laser generator with a wavelength of 266 nm. The interior of the adsorption platform 7 is a cavity, and the upper surface is provided with a plurality of small holes communicating with the cavity, and the side or lower part of the adsorption platform 7 is provided with a plurality of arrays of through holes communicating with the cavity; wherein, there is a through hole It is connected with a vacuum device or a draft device, and a through hole is connected with a blowing device. By controlling the opening and closing of the air valve, the ITO film can be adsorbed on the adsorption platform 7 or blown away from the adsorption platform 7 . To etch the ITO film, the ITO film should be adsorbed on the adsorption platform 7. After the etching is completed, the ITO film should be blown up to the adsorption platform 7 so as to be easily removed from the adsorption platform 7. the

Frame 1 is a metal structural part, which is the supporting and connecting part of the entire touch screen ITO thin film laser etching equipment. Control system 2, display system 3, lifting mechanism 4, adsorption platform 7, and two-dimensional motion system are all installed on frame 1. . the

The control system 2 includes an industrial computer and its operation control software, its function is to control the operation of the touch screen ITO thin film laser etching equipment; the display system 3 is a display screen, its function is to display the interface of the operation control software. the

When working, the ITO film is placed flat on the adsorption platform 7. Under the action of the vacuum device or the ventilation device, the ITO film is flatly adsorbed on the upper surface of the adsorption platform 7. The laser emitted by the laser generator 12 is controlled by the control system 2. Next, the ITO film is etched by the two-dimensional vibrating head 5 and the F-θ lens group 6 acting on the ITO film. the

Because the touch screen ITO thin film laser etching equipment uses the two-dimensional vibrating lens 5 to control the deflection of the laser, and the deflection speed of the high-speed servo vibration motor of the two-dimensional vibrating lens 5 is very fast, so that the laser beam moves at a high speed, that is, the ITO thin film The etching speed is fast and the efficiency is high; at the same time, although the vibration of the high-speed servo vibrating motor of the two-dimensional vibrating lens 5 is very fast, its mass is very small, so the vibration of the high-speed servo vibrating motor of the two-dimensional vibrating lens 5 is small when it deflects. The influence of the whole device is small, and the etching line width of the ITO film is uniform. the

The two-dimensional vibrating lens 5 is used to control the deflection of the laser, and the etching speed is fast, but the etching format of the two-dimensional vibrating lens 5 is limited. If the format is to be increased, the focal length of the F-θ lens group 6 must be increased, but , increasing the focal length of the F-θ lens group 6 will increase the focal point of the laser, and the etched line width will be wide, which is difficult to meet the requirements. In order to increase the etching range, the touch screen ITO thin film laser etching equipment can be equipped with a two-dimensional motion system. The two-dimensional motion system is composed of an X-axis motion system and a Y-axis motion system. The X-axis motion system is installed on the Y-axis motion system. The X-axis motion system and the Y-axis motion system are in the shape of a cross, the two-dimensional motion system is installed on the frame 1, and the adsorption platform 7 is installed on the two-dimensional motion system. Through software control, the X-axis motion system and the Y-axis motion system are moved to etch the touch-screen ITO film placed on the adsorption platform 7 in different areas. After one area is etched, another area is etched, so that it can be etched. Large format touch screen ITO film. the

The touch screen ITO thin film laser etching equipment of the present utility model has fast etching speed, high efficiency, and even engraved line width for the touch screen ITO thin film. meaning. the

Claims (5)

1. touch-screen ito thin film laser ablation equipment, comprise frame, control system, display system, laser generator, elevating mechanism and absorption platform, control system, display system, elevating mechanism and absorption platform all are installed on the frame, laser generator is installed on the elevating mechanism, it is characterized in that: also comprise two-dimensional vibration lens and F-θ set of lenses, two-dimensional vibration lens are installed on the crane of elevating mechanism, and F-θ set of lenses is installed in the two-dimensional vibration lens bottom.

2. touch-screen ito thin film laser ablation equipment according to claim 1, it is characterized in that: elevating mechanism comprises motor, worm-gear speed reducer, screw mandrel kinematic pair, line slideway kinematic pair and crane, the output shaft of motor connects with the power shaft of worm-gear speed reducer, the output shaft of worm-gear speed reducer connects with the screw mandrel of screw mandrel kinematic pair, the nut of screw mandrel kinematic pair connects with crane, the guide rail of line slideway kinematic pair is installed on the gusset piece that links with frame, and the slide block and the crane of line slideway kinematic pair link.

3. touch-screen ito thin film laser ablation equipment according to claim 1, it is characterized in that: elevating mechanism comprises handwheel, worm-gear speed reducer, screw mandrel kinematic pair, line slideway kinematic pair and crane, handwheel connects with the power shaft of worm-gear speed reducer, the output shaft of worm-gear speed reducer connects with the screw mandrel of screw mandrel kinematic pair, the nut of screw mandrel kinematic pair connects with crane, the guide rail of line slideway kinematic pair is installed on the gusset piece that links with frame, and the slide block and the crane of line slideway kinematic pair link.

4. according to claim 1, claim 2 or the described touch-screen ito thin film of claim 3 laser ablation equipment, it is characterized in that: also comprise the two dimensional motion system, the two dimensional motion system is made up of X-axis kinematic system and Y-axis kinematic system, the X-axis kinematic system is installed on the Y-axis kinematic system, X-axis kinematic system and Y-axis kinematic system are cross-shaped cross, the two dimensional motion system is installed on the frame, and the absorption platform is installed in the two dimensional motion system.

5. touch-screen ito thin film laser ablation equipment according to claim 1, it is characterized in that: the optical maser wavelength that laser generator sends is 266nm.

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