CN201692753U - 三氯氢硅尾气吸收塔 - Google Patents
三氯氢硅尾气吸收塔 Download PDFInfo
- Publication number
- CN201692753U CN201692753U CN2010202231737U CN201020223173U CN201692753U CN 201692753 U CN201692753 U CN 201692753U CN 2010202231737 U CN2010202231737 U CN 2010202231737U CN 201020223173 U CN201020223173 U CN 201020223173U CN 201692753 U CN201692753 U CN 201692753U
- Authority
- CN
- China
- Prior art keywords
- exhaust
- washing
- washroom
- absorption tower
- trichlorosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N Trichlorosilane Chemical compound 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Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 13
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 11
- 238000005406 washing Methods 0.000 claims abstract description 20
- 239000007921 spray Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 4
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O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005591 charge neutralization Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001264 neutralization Effects 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Abstract
本实用新型公开了一种三氯氢硅尾气吸收塔，它包括：第一级废气和水旋流混合洗涤-粗洗涤间01，第二级喷淋洗涤间02，第三级喷淋洗涤间03，喷淋填料洗涤-精洗涤间04，精洗涤间04内部设有离心式脱水装置05，外部通过管道与防腐离心风机06相连。三氯氢硅尾气经过进气口与水旋流混合后处理了大部分尾气，随后尾气又经过两级逆向喷淋和填料层的处理，再经离心式气水分离器将气、水分离后，排放达标的气体由离心式风机排至室外。本实用新型装置适用于大排量的尾气处理，方便可靠，效果显著，适合流水作业，且成本低廉。
Description
三氯氢硅尾气吸收塔
技术领域
[0001] 本发明涉及一种三氯氢硅尾气吸收塔。 背景技术
[0002] 在高纯三氯氢硅生产工艺中需要处理大量的不再回收的尾气，但是，这些大排量 的尾气处理（5000立方米/h)，如罐区进料、分析室通风柜的排风、灌装间的钢瓶余气的处 理等，现有技术设备处理结果尚不能尽如人意，有时尾气的处理未能达标即排放到了室外， 污染了环境。
发明内容
[0003] 针对现有技术中存在的问题，本专利设计一种全新的设备，本发明采用如下技术
方案：
[0004] 一种三氯氢硅尾气吸收塔，其特征在于：它包括粗洗涤间、喷淋洗涤间、精洗涤间、 离心式脱水装置和防腐离心风机，所述粗洗涤间、喷淋洗涤间、精洗涤间依此相通，所述离 心式脱水装置安装于精洗涤间上部，所述精洗涤间通过管道与所述防腐离心风机相连。
[0005] 上述的三氯氢硅尾气吸收塔，其进一步特征在于：
[0006] 所述粗洗涤间是废气和水旋流混合洗涤室；所述喷淋洗涤间是两级逆向喷淋洗涤 室；所述精洗涤间是设置有填料层的处理室。
[0007] 本发明创造的有益效果：本装置适用于大排量的尾气处理，方便可靠，效果显著， 适合流水作业，且成本低廉。
附图说明
[0008] 图1为本发明实施例的三氯氢硅尾气吸收塔的结构示意图。 具体实施方式
[0009] 以下结合附图，通过具体实施例对本发明技术方案做进一步的说明。
[0010] 本装置用于高纯三氯氢硅生产工艺中不再回收的尾气的处理。它适用于大排量的 尾气处理（5000立方米/h)，如罐区进料、分析室通风柜的排风、灌装间的钢瓶余气的处理 等。引入本装置的尾气通过废气进气口经气水旋流混合后处理了大部分尾气，生成的二氧 化硅随着水流排到水池，随后尾气又经过两级逆向喷淋和填料层的处理，再经离心式气水 分离器将气、水分离后，排放达标的气体由离心式风机排至室外。循环的喷淋水池上面浮有 白色的二氧化硅可收集后集中处理，逐渐呈酸性的喷淋水，可定期送到中和池内加碱中和， 到符合排放标准，再经压滤后排放。
[0011] 本实施例的三氯氢硅尾气吸收塔，如图1所示，它包括：第一级废气和水旋流混合 洗涤-粗洗涤间01，第二级喷淋洗涤间02，第三级喷淋洗涤间03，喷淋填料洗涤-精洗涤间 04，精洗涤间04上部设有离心式脱水装置05，外部通过管道与防腐离心风机06相连。
3[0012] 虽然本发明已以较佳实施例公开如上，但它们并不是用来限定本发明，任何熟悉 此技艺者，在不脱离本发明之精神和范围内，自当可作各种变化或润饰，但同样在本发明的 保护范围之内。因此本发明的保护范围应当以本申请的权利要求保护范围所界定的为准。
Claims (2)
- 一种三氯氢硅尾气吸收塔，其特征在于：它包括粗洗涤间、喷淋洗涤间、精洗涤间、离心式脱水装置和防腐离心风机，所述粗洗涤间、喷淋洗涤间、精洗涤间依此相通，所述离心式脱水装置安装于精洗涤间上部，所述精洗涤间通过管道与所述防腐离心风机相连。
- 2.根据权利要求1所述的三氯氢硅尾气吸收塔，其特征在于：所述粗洗涤间是废气和水旋流混合洗涤室；所述喷淋洗涤间是两级逆向喷淋洗涤室； 所述精洗涤间是设置有填料层的处理室。
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| CN103007717A (zh) * | 2012-12-25 | 2013-04-03 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | 一种有机硅单体尾气吸收装置及其工艺 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103007717A (zh) * | 2012-12-25 | 2013-04-03 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | 一种有机硅单体尾气吸收装置及其工艺 |
| CN103007717B (zh) * | 2012-12-25 | 2014-12-17 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | 一种有机硅单体尾气吸收装置及其工艺 |
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