CN201581127U - Horizontal direction revolution and autorotation mechanism for vacuum coating - Google Patents

Horizontal direction revolution and autorotation mechanism for vacuum coating Download PDF

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Publication number
CN201581127U
CN201581127U CN2009202648649U CN200920264864U CN201581127U CN 201581127 U CN201581127 U CN 201581127U CN 2009202648649 U CN2009202648649 U CN 2009202648649U CN 200920264864 U CN200920264864 U CN 200920264864U CN 201581127 U CN201581127 U CN 201581127U
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CN
China
Prior art keywords
gear
mounting rod
revolution
vacuum plating
main shaft
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2009202648649U
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Chinese (zh)
Inventor
卫红
刘志宇
曹一鸣
黄涌
王小辉
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GUANGZHOU MECHANICAL AND ELECTRICAL TECHNOLOGY RESEARCH INSTITUTE
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GUANGZHOU MECHANICAL AND ELECTRICAL TECHNOLOGY RESEARCH INSTITUTE
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Priority to CN2009202648649U priority Critical patent/CN201581127U/en
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Publication of CN201581127U publication Critical patent/CN201581127U/en
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Abstract

The utility model provides a horizontal direction revolution and autorotation mechanism for vacuum coating, which comprises a revolution driving component and an autorotation driving component, wherein the revolution driving component comprises a main shaft which is connected with a vacuum coating machine power source at one end through a gear, the other end of the main shaft is provided with a supporting frame for fixing at least one solid object installation rod, the autorotation driving component comprises a driving bar arranged on one side of the main shaft, a top end gear and a bottom end gear which are respectively arranged on two ends of the driving bar, a driving gear group which is matched and connected with the bottom end gear, and installation bar gears which are respectively arranged on one end of the solid object installation rod and are matched and connected with the driving gear group, and the top end gear is meshed and matched with the vacuum coating machine power source. The horizontal direction revolution and autorotation mechanism can simultaneously realize revolution and autorotation movement of at least one solid object only through utilizing a power source of the vacuum coating machine, the conformation is simple and compact, cost is saved, the operation is precise and reliable, and the mechanism not only can be well applied in the technical field of vacuum coating, but also can be applied to other similar fields.

Description

The horizontal revolution and rotation mechanism that is used for vacuum plating
Technical field
The utility model relates to technical field of vacuum plating, particularly a kind of horizontal revolution and rotation mechanism that is used for vacuum plating.
Background technology
In the process of vacuum plating, continue revolution and rotation when needing to keep the plated body body in the horizontal direction, to improve the stability of film quality.At present,, need the optics of processing not only to be confined to flat glass, a lot of erose elements also occurred along with developing rapidly of optics, photoelectronic industry, as annular, cylindrical etc.Vacuum plating unit is because vacuum, and the propulsion source of anchor clamps is few more good more, so coating equipment commonly used at present generally has only the turning axle of a vertical direction.Existing coating equipment is under the situation of not adding propulsion source, because the turning axle of propulsion source only is a vertical direction, so anchor clamps can only be turning axle with the vertical direction also, the rotation track and the revolution track that are anchor clamps parallel, therefore existing vacuum plating unit substantially all can only be accomplished the public rotation of flat glass on horizontal plane, and can't realize the plated film of three-dimensional elements such as cylindricality.For the development of adaptive optics, photoelectronic industry, adapt to the plated film requirement of more and more irregularly shaped elements, this just requires plane public rotation anchor clamps working ability to expand to the 3 D stereo element from the two dimensional surface element.
The utility model content
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, a kind of horizontal revolution and rotation mechanism that is used for vacuum plating is provided, this mechanism only need utilize the propulsion source of vacuum plating unit just can realize the public spinning motion of at least one three-dimensional thing in the horizontal plane direction simultaneously, and it constructs concision and compact, and operation is accurately reliable.
The utility model is achieved through the following technical solutions: a kind of horizontal revolution and rotation mechanism that is used for vacuum plating comprises revolution transmission component and rotation transmission component; Described revolution transmission component comprises the main shaft that an end is connected with the vacuum plating unit propulsion source by gear, and the main shaft the other end is provided with the support that is used for fixing at least one three-dimensional thing mounting rod; Described rotation transmission component comprises the transmission rod of being located at main shaft one side, is located at the top gear at transmission rod two ends and bottom gear, the driving gear set that is connected with the bottom gear and the mounting rod gear of being located at three-dimensional thing mounting rod one end respectively and being connected with driving gear set respectively, and the top gear cooperates with the toothing of vacuum plating unit propulsion source.
Described support comprises a retaining plate that coils and be used for fixing three-dimensional thing mounting rod, and a dribbling has at least one projection, and retaining plate is fixedlyed connected with projection; Described main shaft and transmission rod are located at a dish top side by side.
Described retaining plate, projection are identical with the number of three-dimensional thing mounting rod, and corresponding one by one fixedlying connected between retaining plate and projection, retaining plate and the three-dimensional thing mounting rod.
Described bottom gear and transmitting gear are mounted on a dish below of internal stent, each three-dimensional thing mounting rod passes corresponding retaining plate and is connected with retaining plate by bearing, the mounting rod gear of being located at each three-dimensional thing mounting rod one end respectively with the driving gear set engagement fit.
Be provided with at least one fixed block between described main shaft and the transmission rod, fix, thereby guarantee each transmission component operation accurately to guarantee main shaft and transmission rod.
The described top gear of being located at the transmission rod two ends is identical with the bottom gear set specifications.
Described driving gear set is two gears by the bearing vertical fixing, and the bottom gear of the gear of top and transmission rod is connected, and the gear of below and each mounting rod gear are connected.
When the utility model is used for the horizontal revolution and rotation mechanism use of vacuum plating, its principle of work is: the vacuum plating unit propulsion source drives main axis rotation, thereby drive the support and the rotation of three-dimensional thing mounting rod that are installed on the main shaft the other end, realized the revolution motion of each three-dimensional thing mounting rod horizontal direction this moment; When the vacuum plating unit propulsion source drives main axis rotation, be installed in gear (the required gear size difference that installs additional of the vacuum plating unit of each vacuum plating unit manufacturer on the propulsion source, therefore gear size is selected according to actual needs) drive top gear rotation simultaneously, the top gear drives terminal gear rotation by transmission rod, thereby drive the driving gear set rotation, driving gear set has realized the spinning motion of each three-dimensional thing mounting rod horizontal direction this moment by the three-dimensional thing mounting rod rotation of each its correspondence of mounting rod gear driven; Therefore, horizontal revolution and rotation mechanism of the present utility model has been realized each three-dimensional thing mounting rod public affairs, spinning motion in the horizontal direction simultaneously.
The utility model has following advantageous effect with respect to above-mentioned prior art:
1, horizontal revolution and rotation mechanism of the present utility model only need utilize the propulsion source of vacuum plating unit just can realize the public spinning motion of at least one three-dimensional thing in the horizontal plane direction simultaneously, it constructs concision and compact, save cost, simultaneously, transmission between each transmission component is finished by a plurality of gears, and its operation is accurately reliable.
2, horizontal revolution and rotation mechanism of the present utility model, the revolution turning axle of its anchor clamps is a vertical direction, the rotation turning axle of anchor clamps is a horizontal direction, therefore can realize the vacuum plating of three-dimensional element preferably, adapts to the development of 3 D stereo element; Simultaneously, except applying to technical field of vacuum plating well, also can apply to other close field.
Description of drawings
Fig. 1 is the principle of work synoptic diagram that originally is used for the horizontal revolution and rotation mechanism of vacuum plating.
Fig. 2 is the structural representation that originally is used for the horizontal revolution and rotation mechanism of vacuum plating.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment
A kind of horizontal revolution and rotation mechanism that is used for vacuum plating of present embodiment, its structure comprise revolution transmission component and rotation transmission component as shown in Figure 2; The transmission component that wherein revolves round the sun comprises the main shaft 7 that an end is connected with the vacuum plating unit propulsion source by gear, and main shaft 7 the other ends are provided with the support 8 that is used for fixing at least one three-dimensional thing mounting rod 5; The rotation transmission component comprises the transmission rod 2 of being located at main shaft 7 one sides, is located at the top gear 1 at transmission rod 2 two ends and bottom gear, the driving gear set 3 that is connected with the bottom gear and the mounting rod gear 4 of being located at three-dimensional thing mounting rod 5 one ends respectively and being connected with driving gear set 3 respectively, and top gear 1 cooperates with the toothing of vacuum plating unit propulsion source.
Support 8 comprises a dish 8-1 and is used for fixing the retaining plate 8-3 of three-dimensional thing mounting rod 5 that prop up a dish 8-1 and have at least one projection 8-2, retaining plate 8-3 is fixedlyed connected with projection 8-2; Main shaft 7 and transmission rod 2 are located at a dish 8-1 top side by side.
Retaining plate 8-3, projection 8-2 are identical with the number of three-dimensional thing mounting rod 5, and corresponding one by one fixedlying connected between retaining plate 8-3 and projection 8-2, retaining plate 8-3 and the three-dimensional thing mounting rod 5.
Bottom gear and driving gear set 3 are located at a dish 8-1 below of support 8 inside, each three-dimensional thing mounting rod 5 passes corresponding retaining plate 8-3 and is connected with retaining plate 8-3 by bearing, the mounting rod gear 4 of being located at each three-dimensional thing mounting rod 5 one end respectively with driving gear set 3 engagement fit.
Be provided with at least one fixed block 9 between main shaft 7 and the transmission rod 2, fixing to guarantee main shaft 7 and transmission rod 2, thus guarantee each transmission component operation accurately.
The top gear of being located at transmission rod 2 two ends is identical with the bottom gear set specifications.
Driving gear set 3 is two gears by bearing 10 vertical fixing, and the bottom gear of the gear of top and transmission rod is connected, and the gear of below and each mounting rod gear 4 are connected.
In the present embodiment, all fixedly connected between main shaft 7 and fixed block 9, transmission rod 2 and fixed block 9, main shaft 7 and support 8, transmission rod 2 and support 8, a dish 8-1 and the retaining plate 8-3 by screw 6.
When a kind of horizontal revolution and rotation mechanism that is used for vacuum plating of present embodiment uses, as shown in Figure 1, its principle of work is: the vacuum plating unit propulsion source drives main shaft 7 rotations, thereby drive the support 8 and 5 rotations of three-dimensional thing mounting rod that are installed on main shaft 7 the other ends, realized the revolution motion of each three-dimensional thing mounting rod 5 horizontal direction this moment; When the vacuum plating unit propulsion source drives main shaft 7 rotations, be installed in gear 11 (the required gear size difference that installs additional of the vacuum plating unit of each vacuum plating unit manufacturer on the propulsion source, therefore gear size is selected according to actual needs) drive 1 rotation of top gear simultaneously, top gear 1 drives terminal gear 12 rotations by transmission rod 2, thereby drive driving gear set 3 rotations, driving gear set 3 drives three-dimensional thing mounting rod 5 rotations of its correspondence by each mounting rod gear 4, the spinning motion of each three-dimensional thing mounting rod 5 horizontal direction, wherein each gear have been realized this moment, the turning direction of axle or three-dimensional thing mounting rod is shown in the direction of arrow among the figure; Therefore, horizontal revolution and rotation mechanism of the present utility model has been realized each three-dimensional thing mounting rod 5 public affairs, spinning motion in the horizontal direction simultaneously.
As mentioned above, just can realize the utility model preferably, the foregoing description is preferred embodiment of the present utility model only, is not to be used for limiting practical range of the present utility model; Be that all equalizations of being done according to the utility model content change and modification, all contained by the utility model claim scope required for protection.

Claims (7)

1. be used for the horizontal revolution and rotation mechanism of vacuum plating, it is characterized in that, comprise revolution transmission component and rotation transmission component; Described revolution transmission component comprises the main shaft that an end is connected with the vacuum plating unit propulsion source by gear, and the main shaft the other end is provided with the support that is used for fixing at least one three-dimensional thing mounting rod; Described rotation transmission component comprises the transmission rod of being located at main shaft one side, is located at the top gear at transmission rod two ends and bottom gear, the driving gear set that is connected with the bottom gear and the mounting rod gear of being located at three-dimensional thing mounting rod one end respectively and being connected with driving gear set respectively, and the top gear cooperates with the toothing of vacuum plating unit propulsion source.
2. according to the described horizontal revolution and rotation mechanism that is used for vacuum plating of claim 1, it is characterized in that described support comprises a retaining plate that coils and be used for fixing three-dimensional thing mounting rod, a dribbling has at least one projection, and retaining plate is fixedlyed connected with projection; Described main shaft and transmission rod are located at a dish top side by side.
3. according to the described horizontal revolution and rotation mechanism that is used for vacuum plating of claim 2, it is characterized in that, described retaining plate, projection are identical with the number of three-dimensional thing mounting rod, and corresponding one by one fixedlying connected between retaining plate and projection, retaining plate and the three-dimensional thing mounting rod.
4. according to claim 1 or the 2 described horizontal revolution and rotation mechanisms that are used for vacuum plating, it is characterized in that, described bottom gear and transmitting gear are mounted on a dish below of internal stent, each three-dimensional thing mounting rod passes corresponding retaining plate and is connected with retaining plate by bearing, the mounting rod gear of being located at each three-dimensional thing mounting rod one end respectively with the driving gear set engagement fit.
5. according to the described horizontal revolution and rotation mechanism that is used for vacuum plating of claim 1, it is characterized in that, be provided with at least one fixed block between described main shaft and the transmission rod.
6. according to the described horizontal revolution and rotation mechanism that is used for vacuum plating of claim 1, it is characterized in that the described top gear of being located at the transmission rod two ends is identical with the bottom gear set specifications.
7. according to the described horizontal revolution and rotation mechanism that is used for vacuum plating of claim 1, it is characterized in that, described driving gear set is two gears by the bearing vertical fixing, and the bottom gear of the gear of top and transmission rod is connected, and the gear of below and each mounting rod gear are connected.
CN2009202648649U 2009-12-18 2009-12-18 Horizontal direction revolution and autorotation mechanism for vacuum coating Expired - Lifetime CN201581127U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202648649U CN201581127U (en) 2009-12-18 2009-12-18 Horizontal direction revolution and autorotation mechanism for vacuum coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009202648649U CN201581127U (en) 2009-12-18 2009-12-18 Horizontal direction revolution and autorotation mechanism for vacuum coating

Publications (1)

Publication Number Publication Date
CN201581127U true CN201581127U (en) 2010-09-15

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CN2009202648649U Expired - Lifetime CN201581127U (en) 2009-12-18 2009-12-18 Horizontal direction revolution and autorotation mechanism for vacuum coating

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101736309B (en) * 2009-12-18 2011-11-16 广州市光机电技术研究院 Horizontal revolution and rotation mechanism for vacuum coating
CN107116418A (en) * 2017-05-15 2017-09-01 中国科学院光电技术研究所 A kind of wheeled polishing bistrique of public rotation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101736309B (en) * 2009-12-18 2011-11-16 广州市光机电技术研究院 Horizontal revolution and rotation mechanism for vacuum coating
CN107116418A (en) * 2017-05-15 2017-09-01 中国科学院光电技术研究所 A kind of wheeled polishing bistrique of public rotation

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20100915

Effective date of abandoning: 20091218