CN201508323U - LED wafer microscope positioning test device - Google Patents
LED wafer microscope positioning test device Download PDFInfo
- Publication number
- CN201508323U CN201508323U CN2009203112681U CN200920311268U CN201508323U CN 201508323 U CN201508323 U CN 201508323U CN 2009203112681 U CN2009203112681 U CN 2009203112681U CN 200920311268 U CN200920311268 U CN 200920311268U CN 201508323 U CN201508323 U CN 201508323U
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- Prior art keywords
- sliding seat
- slide
- led wafer
- utility
- hole
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a device for LED wafer detection, in particular to an LED wafer microscope positioning test device which relates to a positioning test structure, adopts an integral compact structure, and finishes operations like microchip test positioning, probe adjustment and photoelectric detection. The device includes a base 1; a translation assembly is arranged above the base 1 and includes a power source 20, a fixing seat 21, a first sliding seat 22, a second sliding seat 23, and a roller sliding rail component 24; the translation assembly is connected with the base 1 through the first sliding seat 22; the power source 20 is fixed by the fixing seat 21 and arranged on the top surface of the first sliding seat 22; the second sliding seat 23 is arranged on the top surface of the first sliding seat 22; the roller sliding rail 24 is arranged between the first sliding seat 22 and the second sliding seat 23; a through hole 231 is formed at the end part of the second sliding seat 23; a notch 232 is formed on the though hole; and a CCD camera is placed in the though hole 231 and includes a CCD, a lens 31 and a light source 32. The utility model has the advantages of compact structure, convenient operation, and good man-machine interaction, and one CCD camera can finish the positioning and monitoring function. The device is placed on a detection machine, and used for LED wafer detection.
Description
Technical field
The utility model relates to LED wafer detection device.A kind of especially relevant with the assignment test structure, adopt integrated cramped construction, be a kind of LED wafer micro locating test device of finishing work such as microwafer test position fix, probe adjustment, Photoelectric Detection.
Background technology
Chinese patent literature discloses the utility model patent that a kind of name is called " the instant assignment test structure of cinephotomicrography " on May 31st, 1996, the patent No. is 200420088008.x, this patented technology is the instant assignment test structure of a kind of cinephotomicrography, it comprises a light characteristic analysis module, an analysis module holder is established in its below, and adjacent is established CCD (image perception original paper) video camera, it is to contain a microlens, lens fixing base, CCD focal length fine setting seat, CCD fixed angle part, its below then is provided with CCD x-y fine setting seat, an and CCD fixed pedestal, and a CCD camera light source is established in another corresponding section, and contains first of light holder far away, second and the 3rd, by this, be assembled into whole group system structure, and be located on the machines body, can be for test LED, the use of LCD and other wafers.This method of the instant assignment test of described device cinephotomicrography mechanism causes the motion stroke big, and structure is not compact, and location and probe location are accurately adjusted difficulty, and operation can't reach quick requirement, has its further improved necessity.
The utility model content
Fundamental purpose of the present utility model according to above-mentioned the deficiencies in the prior art part, proposes a kind of micro locating test device, reaches swift to operate, and man-machine interaction is good, the purpose of increasing work efficiency.
The utility model purpose realizes being finished by following technical scheme:
The utility model comprises: pedestal 1, a translation assembly is placed in the top, the translation assembly comprises power source 20, holder 21, first slide 22, second slide 23, the roller slide rail constitutes 24, wherein power source is a cylinder, carry out rectilinear motion, the translation assembly links to each other with pedestal 1 by first slide 22, power source 20 is fixing by holder 21, and being positioned over the end face of first slide 22, second slide 23 places first slide, 22 end faces, and first slide 22, between second slide 23 roller slide rail 24 is set, second slide, 23 ends are provided with through hole 231, jagged 232 in the through hole, place ccd video cameras in the through hole 231, ccd video camera is by CCD, camera lens 31, light source 32.
Advantage of the present utility model is compact conformation, and is easy to operate, and man-machine interaction is good, and a CCD camera is promptly finished the positioning monitoring function.The utility model is to be positioned on the machines, detects for test LED wafer and uses
Description of drawings
Fig. 1 is the perspective exploded view of the utility model;
Fig. 2 is the combination schematic perspective view of the utility model;
Fig. 3 is the second slide synoptic diagram of the utility model.
Embodiment
Show that as accompanying drawing 1,2,3 number in the figure is expressed as follows respectively:
1-pedestal, 20--power source, 21--holder, 22--first slide, 23--second slide, 231--through hole, 232--breach, 24--roller slide rail, 30--CCD, 31--camera lens, 32--light source.
Consult Fig. 1, Fig. 2, a kind of micro locating test structure of the utility model, system comprises a pedestal 1, continuous first slide 22 in its top, power source 20 is fixing by holder 21, and together be positioned over first slide, 22 end faces, second slide 23 places first slide, 22 end faces, and 23 of first slides 22, second slide are placed roller slide rail 24, the second slide end through holes, and through hole 231 place's gaps 232, ccontaining in the through hole 231 by CCD30, camera lens 31, the assembly that light source 32 is formed, by this, be assembled into whole system.A kind of micro locating test structure of the utility model mainly is located on the machines, is used for monitoring when machines is surveyed the identification of crystal grain location and point, increases work efficiency simplied system structure.
Though below design and embodiment according to the utility model purpose have been done to elaborate with reference to accompanying drawing; but those of ordinary skills can recognize; under the precondition that does not break away from the claim limited range; still can make various improvement and conversion to the utility model, and this improvement and conversion still should belong to protection domain of the present utility model.
Claims (1)
1.LED wafer micro locating test device, it is characterized in that: it comprises a pedestal (1), a translation assembly is placed in the top, the translation assembly comprises power source (20), holder (21), first slide (22), second slide (23), the roller slide rail constitutes (24), the translation assembly links to each other with pedestal (1) by first slide (22), power source (20) is fixing by holder (21), and be positioned over the end face of first slide (22), second slide (23) places first slide (22) end face, and first slide (22), roller slide rail (24) is set between second slide (23), second slide (23) end is provided with through hole (231), jagged in the through hole (232), place ccd video camera in the through hole (231), ccd video camera is by CCD, camera lens (31), light source (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203112681U CN201508323U (en) | 2009-09-24 | 2009-09-24 | LED wafer microscope positioning test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203112681U CN201508323U (en) | 2009-09-24 | 2009-09-24 | LED wafer microscope positioning test device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201508323U true CN201508323U (en) | 2010-06-16 |
Family
ID=42469450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009203112681U Expired - Lifetime CN201508323U (en) | 2009-09-24 | 2009-09-24 | LED wafer microscope positioning test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201508323U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308734A (en) * | 2012-03-14 | 2013-09-18 | 东京毅力科创株式会社 | Probe apparatus and providing method for probe card of probe apparatus |
| WO2014026583A1 (en) * | 2012-08-16 | 2014-02-20 | 南京协力电子科技集团有限公司 | Ccd line scanning mechanism for test zone |
| CN107144529A (en) * | 2017-06-06 | 2017-09-08 | 大连理工大学 | A kind of device and method that measurement is accurately positioned for ellipsometer |
-
2009
- 2009-09-24 CN CN2009203112681U patent/CN201508323U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308734A (en) * | 2012-03-14 | 2013-09-18 | 东京毅力科创株式会社 | Probe apparatus and providing method for probe card of probe apparatus |
| WO2014026583A1 (en) * | 2012-08-16 | 2014-02-20 | 南京协力电子科技集团有限公司 | Ccd line scanning mechanism for test zone |
| CN107144529A (en) * | 2017-06-06 | 2017-09-08 | 大连理工大学 | A kind of device and method that measurement is accurately positioned for ellipsometer |
| CN107144529B (en) * | 2017-06-06 | 2019-10-11 | 大连理工大学 | A kind of device and method being accurately positioned measurement for ellipsometer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100084 Beijing City, Haidian District Tsinghua Yuan Patentee after: Tsinghua University Patentee after: Co., Ltd of mechanical group is opened up in Beijing Address before: 100084 Beijing City, Haidian District Tsinghua Yuan Patentee before: Tsinghua University Patentee before: Beijing Chn-Top Machinery Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20100616 |
|
| CX01 | Expiry of patent term |