CN201371405Y - Grinding and polishing integrated silicon block processing special machine tool - Google Patents

Abstract

The utility model relates to a metal processing machine tool. The purpose is to provide a special machine tool, which can effectively improve the surface processing quality, improve processing efficiency, eliminate environmental pollution and reduce cost. The technical scheme adopted by the utility model is: a special machine tool for grinding and polishing integrated silicon block processing, including a bed, a workbench on the bed and a guide rail horizontally arranged on the top of the bed; it is characterized in that the machine tool is also equipped with a Grinding grinding head and a polishing grinding head; these two grinding heads are respectively slidably positioned on the guide rail through sliders, and are driven by a traction mechanism to move laterally.

Description

Grinding and polishing integrated silicon block processing special machine tool

technical field

The utility model relates to a metal processing machine tool, in particular to a special machine tool for grinding and polishing electronic materials such as silicon.

Background technique

The silicon wafer of solar photovoltaic cells is made of polycrystalline silicon straight-pulled into single crystal rods or cast into polycrystalline ingots, cut into single crystal or polycrystalline silicon blocks, and then sliced from silicon blocks. Since silicon crystal is a hard and brittle material, it is difficult to process. Single crystal rods or cast polycrystalline ingots cannot guarantee high geometric dimensions and surface roughness during the cutting process. It must be ground to the specified size such as: 124×124; 156×156. Existing grinding method generally adopts common surface grinder to grind with emery wheel. Due to factors such as narrow grinding wheel, small grinding area and difficult correction of diamond grinding wheel, the grinding efficiency is low and the surface quality is poor, which cannot meet the requirements. And due to the hardness and brittleness of silicon, the grinding surface is damaged and cannot be directly used for slicing; so the grinding surface is usually chemically etched with cyanofluoric acid to reduce surface damage. This has also brought problems such as environmental pollution.

Utility model content

The technical problem to be solved by the utility model is to overcome the disadvantages of the above-mentioned background technology and provide a special machine tool, which can effectively improve the quality of surface processing, improve processing efficiency, eliminate environmental pollution, and reduce costs.

The technical scheme adopted by the utility model is: a special machine tool for grinding and polishing integrated silicon block processing, including a bed, a workbench on the bed and a guide rail horizontally arranged on the top of the bed; it is characterized in that the machine tool is also equipped with a Grinding grinding head and a polishing grinding head; these two grinding heads are respectively slidably positioned on the guide rail through sliders, and are driven by a traction mechanism to move laterally.

Described grinding head comprises a column and a feeding frame that motor is installed, and emery wheel is fixed on the rotating shaft of motor; Described polishing grinding head includes a column and a feeding frame that motor is installed, and the rotation of motor The polishing wheel is fixed on the shaft; a vertical guide rail is provided on the front side of the two columns, and a slider matching the vertical guide rail is provided on the rear side of the two feed frames, and the stepping motor passes through the screw rod respectively. The mechanism drives the feed frame to perform vertical feed motion.

In the traction mechanism, the transmission belt is positioned by the pulleys arranged at the left and right ends of the bed, and the oil motor drives the pulley to make the transmission belt move. A hydraulic clamping device is installed on the grinding head and the polishing grinding head respectively to hold Tighten the drive belt to make the grinding head slide, or disengage the drive belt to stop the grinding head from moving.

The hydraulic clamping device is provided with two splints, the transmission belt is positioned in the middle of the two splints, and the top of the piston rod of the hydraulic cylinder is fixed to one of the splints, so that the movement of the oil cylinder is converted into clamping or loosening of the drive belt by the splints. working status.

The guide rail is arranged on the rear half of the bed, and the workbench is arranged on the front half of the bed.

The working principle of the utility model is: the oil motor starts to move the transmission belt 14 (indicated by a dotted line in the figure) through the pulley, and the hydraulic clamping device fixed on the column moves the transmission belt tightly so that the column moves left and right (when a grinding head The holding device of the other grinding head is sent away during work); the movement of the grinding head is controlled by the stepping motor, and the rotation of the stepping motor is controlled by the limiter; the limiter sends a limit signal to the stepping motor each time Feed amount at one time. When the feed switch is turned off, the grinding head performs no-feed grinding. When the grinding head needs to move up and down quickly, the stepper motor switch can be turned on and directly driven by the motor. After finishing the amount of grinding, the grinding head is closed and moved away from the position of the workpiece 10 (indicated by a dotted line in the figure), and switches to the working state of the polishing grinding head (the holding device connected to the grinding head is released, and the other Then, the transmission belt drives the polishing grinding head for polishing, and the left and right movement of the polishing grinding head is also controlled by the limiter. After the polishing reaches the required surface roughness, the polishing head moves away from the workpiece 10, the machine is stopped to disassemble the workpiece, and the process is completed.

The beneficial effects of the utility model are: the grinding and polishing integrated silicon block processing special machine tool adopts the structure of double grinding heads with movable grinding heads, the grinding area is increased, the efficiency of multi-block combined grinding is greatly improved, and the grinding wheel It can be corrected automatically, and the flatness is good; after the grinding, the workpiece can be directly polished without disassembly and assembly, and the benchmark is uniform; and the elastic characteristics of the soft grinding wheel can ensure the pressure on the workpiece during the polishing process, and the consistency of the two grinding heads can be reduced during polishing. It also avoids the difficulty of tool setting in hard grinding, and avoids damage to the workpiece and grinding wheel during fast cutting. Therefore, the use of the machine tool can greatly improve the processing efficiency, and at the same time reduce the difficulty of manufacturing the machine tool. In addition, compared with the ordinary surface grinder, the use of this machine tool can cancel the chemical corrosion process, save costs, and eliminate environmental pollution; at the same time, the surface quality of the product is greatly improved (flatness and surface roughness can reach mirror level), and the production efficiency is More than twice that of ordinary machine tools.

Description of drawings

Fig. 1 is a front structural schematic view of the utility model.

Fig. 2 is a top view structural diagram of the utility model.

Fig. 3 is a left view structural diagram of the utility model.

Fig. 4 is a schematic structural view of the hydraulic clamping device in the present invention.

Detailed ways

As shown in the figure, the grinding and polishing integrated silicon block processing special machine tool includes a bed 1, a worktable 2 and a guide rail 1-1 horizontally arranged on the top of the bed; the machine tool is also equipped with a grinding head 7 and a polishing grinding head 4, these two grinding heads are slidably positioned on the guide rail by the slide block installed at the bottom respectively, and are driven by a traction mechanism to carry out transverse (horizontal) feed motion.

Described grinding grinding head 7 comprises column 7-1 and a feeding frame 7-2 that motor is installed, and fixed emery wheel 6 is fixed on the rotating shaft of motor; The front side of column is provided with a vertical guide rail 7-1-1, The rear side of feed frame is provided with the slide block that cooperates with vertical guide rail 7-1-1. Described polishing grinding head 4 comprises column 4-1 and a feeding frame 4-2 that motor is installed, and polishing wheel 5 is fixed on the rotating shaft of motor; The front side of column is provided with a vertical guide rail 4-1-1, The rear side of feed frame is provided with the slide block that cooperates with vertical guide rail 4-1-1. The two feed frames are respectively driven by a stepping motor through a screw mechanism (both the stepping motor and the screw mechanism are omitted in the figure) to perform vertical feeding motion. The feed movement of the grinding head (that is, the vertical feed movement of the feed frame) is controlled by the stepper motor, and the rotation of the stepper motor is controlled by the limiter; the limiter sends a limit signal to the stepper motor each time Feed amount at one time.

In the traction mechanism: the drive belt 14 is positioned by the pulleys 11 arranged at the left and right ends of the bed, and the oil motor (for clarity in the drawing, the oil motor is omitted and not drawn) drives the pulley coaxial with it to make the drive belt move, grinding A hydraulic clamping device 13 is also respectively installed on the grinding head and the polishing grinding head, and a hydraulic oil cylinder (hydraulic cylinder is omitted in the figure) is respectively driven to drive the hydraulic clamping device so that the driving belt is tightly held so that the grinding head slides on the guide rail, or Disengage the drive belt to make the grinding head stationary. Two splints (shown in Fig. 4 ) are set in the described hydraulic clamping device, the transmission belt is positioned in the middle of the upper splint 13-3 and the lower splint 13-4, and the top of the piston rod 13-2 of the hydraulic cylinder 13-1 is connected with the The upper splint 13-3 is fixed, and the oil cylinder is activated (the oil pump driving the oil cylinder is omitted in the figure), so that the two splints clamp the transmission belt, and the grinding head or polishing head is pulled by the drive belt to slide along the guide rail; the oil cylinder Reverse movement, the two splints are disengaged from the transmission belt, and the grinding head or polishing head is in a static state.

The guide rail 1-1 is arranged on the rear half of the bed, and the front half of the bed is used as a workbench 2 for fixing workpieces to be processed.

The limiter can be purchased directly.

Claims (5)

1, grinding, the integrated silico briquette Special Purpose Machine for Processing of polishing comprise workbench (2) on lathe bed (1), the lathe bed and the guide rail (1-1) that is horizontally set on the lathe bed top; It is characterized in that also disposing on this lathe a grinding bistrique (7) and a grinding head for polishing (4); These two bistriques are positioned on the guide rail slidably by slide block respectively, and by haulage gear driving carrying out transverse movement.

2, grinding according to claim 1, the integrated silico briquette Special Purpose Machine for Processing of polishing is characterized in that described grinding bistrique (7) comprises that a column (7-1) and is installed with the feeding frame (7-2) of motor, is fixing emery wheel (6) on the turning cylinder of motor; Described grinding head for polishing (4) comprises the feeding frame (4-2) of a column (4-1) and an installation motor, is fixing polishing wheel (5) on the turning cylinder of motor; The leading flank of two columns respectively is provided with a vertical guide (7-1-1,4-1-1), and the trailing flank of two feeding framves respectively is provided with the slide block that matches with vertical guide, and carries out vertical feed motion by stepper motor by screw body driving feeding frame respectively.

3, grinding according to claim 1 and 2, the integrated silico briquette Special Purpose Machine for Processing of polishing, it is characterized in that in the described haulage gear: driving-belt (14) is located by the belt wheel that is arranged on two ends, the lathe bed left and right sides (11), oil motor driving pulley again makes driving-belt move, one hydraulic enclasp device (13) also is installed respectively on grinding bistrique and the grinding head for polishing, make bistrique produce slip to hold driving-belt tightly, perhaps throw off driving-belt and make the bistrique stop motion.

4, grinding according to claim 3, the integrated silico briquette Special Purpose Machine for Processing of polishing, it is characterized in that being provided with in the described hydraulic enclasp device two clamping plate, driving-belt (14) is positioned at the centre of two clamping plate, piston rod (13-2) top of hydraulic jack (13-1) is fixed with one of them clamping plate again, thereby makes the motion of oil cylinder be converted to clamping plate to the clamping of driving-belt or unclamp duty.

5, grinding according to claim 4, the integrated silico briquette Special Purpose Machine for Processing of polishing is characterized in that described guide rail (1-1) is arranged on back one side of something of lathe bed, and workbench (2) is arranged on preceding one side of something of lathe bed.

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