CN201371405Y - Grinding and polishing integral special machine tool for processing silicon blocks - Google Patents

Grinding and polishing integral special machine tool for processing silicon blocks Download PDF

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Publication number
CN201371405Y
CN201371405Y CN 200920115120 CN200920115120U CN201371405Y CN 201371405 Y CN201371405 Y CN 201371405Y CN 200920115120 CN200920115120 CN 200920115120 CN 200920115120 U CN200920115120 U CN 200920115120U CN 201371405 Y CN201371405 Y CN 201371405Y
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CN
China
Prior art keywords
grinding
polishing
driving
belt
bistrique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200920115120
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Chinese (zh)
Inventor
杜红文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Institute of Mechanical and Electrical Engineering Co Ltd
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Zhejiang Institute of Mechanical and Electrical Engineering Co Ltd
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Filing date
Publication date
Application filed by Zhejiang Institute of Mechanical and Electrical Engineering Co Ltd filed Critical Zhejiang Institute of Mechanical and Electrical Engineering Co Ltd
Priority to CN 200920115120 priority Critical patent/CN201371405Y/en
Application granted granted Critical
Publication of CN201371405Y publication Critical patent/CN201371405Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a metal processing machine tool and aims at providing a special machine tool capable of effectively improving the surface processing quality and processing efficiency, eliminating environmental pollution and reducing cost. The utility model adopts the technical scheme that the grinding and polishing integral special machine tool for processing silicon blocks comprises a bed, a working bench on the bed and a guide rail horizontally arranged at the top end of the bed; the special machine tool is characterized in that a grinding head and a polishing head are also configured on the machine tool; and the grinding head and the polishing head are respectively positioned on the guide rail in a sliding manner through sliding blocks and are driven by a traction mechanism to make transverse movement.

Description

Grinding, the integrated silico briquette Special Purpose Machine for Processing of polishing
Technical field
The utility model relates to a kind of metal working machine tool, especially the electronic material of silicon and so on is carried out the special purpose machine tool of grinding, polishing processing.
Background technology
The silicon chip of solar-energy photo-voltaic cell is to be become monocrystal rod or cast polycrystalline ingot by the polysilicon vertical pulling, becomes monocrystalline or polysilicon block through butt, is formed by the silico briquette section again.Because silicon crystal belongs to hard brittle material, processing difficulties.Monocrystal rod or cast polycrystalline ingot and in the butt process, can't guarantee higher physical dimension and surface roughness.Must through grinding to the regulation size as: 124 * 124; 156 * 156.Existing method for grinding generally adopts the common plane grinding machine to carry out grinding with Carborundum wheel.Because emery wheel is narrow, factors such as the little and Carborundum wheel correction difficulty of grinding area cause grinding efficiency low, and surface quality is poor, does not reach requirement.And, can not be directly used in slice processing because the hard fragility of silicon causes grinding skin that damage is arranged; So also grinding skin is carried out chemical attack to reduce surface damage with the cyanogen fluoric acid usually.Problems such as environmental pollution have also been brought thus.
The utility model content
Technical problem to be solved in the utility model is the deficiency that overcomes the above-mentioned background technology, and a kind of special purpose machine tool is provided, and this lathe should be able to effectively improve suface processing quality, and can improve working (machining) efficiency, elimination environmental pollution, reduces cost.
The technical solution adopted in the utility model is: grinding, the integrated silico briquette Special Purpose Machine for Processing of polishing comprise workbench on lathe bed, the lathe bed and the guide rail that is horizontally set on the lathe bed top; It is characterized in that also disposing on this lathe a grinding bistrique and a grinding head for polishing; These two bistriques are positioned on the guide rail slidably by slide block respectively, and by haulage gear driving carrying out transverse movement.
Described grinding bistrique comprises that a column and is installed with the feeding frame of motor, is fixing emery wheel on the turning cylinder of motor; Described grinding head for polishing comprises the feeding frame of a column and an installation motor, is fixing polishing wheel on the turning cylinder of motor; The leading flank of two columns respectively is provided with a vertical guide, and the trailing flank of two feeding framves respectively is provided with the slide block that matches with vertical guide, and carries out vertical feed motion by stepper motor by screw body driving feeding frame respectively.
In the described haulage gear: driving-belt is by the belt wheel location that is arranged on two ends, the lathe bed left and right sides, oil motor driving pulley again makes driving-belt move, one hydraulic enclasp device also is installed respectively on grinding bistrique and the grinding head for polishing, make bistrique produce slip to hold driving-belt tightly, perhaps throw off driving-belt and make the bistrique stop motion.
Two clamping plate are set in the described hydraulic enclasp device, and driving-belt is positioned at the centre of two clamping plate, and the hydraulic cylinder piston rod top is fixed with one of them clamping plate again, thereby makes the motion of oil cylinder be converted to clamping plate to the clamping of driving-belt or unclamp duty.
Described guide rail is arranged on back one side of something of lathe bed, and workbench is arranged on preceding one side of something of lathe bed.
Operation principle of the present utility model is: oil motor starts by belt wheel makes driving-belt 14 (representing with chain-dotted line among the figure) motion, is fixed in hydraulic enclasp device on the column and holds tightly and make column move left and right (enclasp device of another bistrique send out when a bistrique job) behind the driving-belt; The amount of movement of bistrique is by step motor control, and the rotation of stepper motor is then controlled by stop; Stop sends limit signal at every turn and gives stepper motor primary feed amount.Bistrique is done no feeding grinding when closing the feeding switch.When needing bistrique to move up and down fast, then can open the stepper motor switch and directly use motor-driven.After finishing stock removal, workpiece 10 (dotting among the figure) position is just closed and kept to the side to leave to the grinding bistrique, switches to grinding head for polishing duty (enclasp device that is connected in the grinding bistrique unclamps, and another enclasp device is locked); Then, driving-belt drives grinding head for polishing and polishes, and the move left and right of same grinding head for polishing is also controlled by stop.After polishing met the requirements of surface roughness, rubbing head moved away workpiece 10, shut down the dismounting workpiece, finished.
The beneficial effects of the utility model are: this grinding, the integrated silico briquette Special Purpose Machine for Processing of polishing adopt the two grinding wheel head structures of bistrique mobile vertical grinding, and the grinding area increases, and polylith combination grinding efficiency significantly improves, and emery wheel can revise automatically, and flatness is good; Workpiece must dismounting and can directly be polished unifying datum after finishing grinding; And the elastic characteristic of Soft grinding wheel can guarantee the pressure of polishing process to workpiece, can reduce the coherence request of two bistriques during polishing, has avoided the tool setting difficulty of rigid grinding simultaneously, avoids workpiece and emery wheel to destroy when cutting fast.Thereby, adopt this lathe can significantly improve working (machining) efficiency, reduced the manufacture difficulty of lathe simultaneously.In addition, adopt this machine tooling and adopt the common plane grinding machine relatively, can cancel the chemical attack operation, save cost, eliminate environmental pollution; Surface quality of products significantly improves (flatness, surface roughness can reach the minute surface level) simultaneously, and production efficiency is more than the twice of machine tool.
Description of drawings
Fig. 1 is a main TV structure schematic diagram of the present utility model.
Fig. 2 is a plan structure schematic diagram of the present utility model.
Fig. 3 is a left TV structure schematic diagram of the present utility model.
Fig. 4 is the structural representation of the hydraulic enclasp device in the utility model.
The specific embodiment
As shown in the figure, this grinding, the integrated silico briquette Special Purpose Machine for Processing of polishing comprise lathe bed 1, workbench 2 and the guide rail 1-1 that is horizontally set on the lathe bed top; Also dispose a grinding bistrique 7 and a grinding head for polishing 4 on this lathe, these two bistriques are positioned on the guide rail slidably by the slide block that install the bottom respectively, and are carried out laterally (level) feed motion by haulage gear driving.
Described grinding bistrique 7 comprises that column 7-1 and is installed with the feeding frame 7-2 of motor, and fixed emery wheel 6 on the turning cylinder of motor; The leading flank of column is provided with a vertical guide 7-1-1, and the trailing flank of feeding frame is provided with the slide block that matches with vertical guide 7-1-1.Described grinding head for polishing 4 comprises that column 4-1 and is installed with the feeding frame 4-2 of motor, fixing polishing wheel 5 on the turning cylinder of motor; The leading flank of column is provided with a vertical guide 4-1-1, and the trailing flank of feeding frame is provided with the slide block that matches with vertical guide 4-1-1.Two feeding framves drive the feeding frame by stepper motor by screw body (stepper motor and screw body are all omitted among the figure) respectively and carry out vertical feed motion.The feeding amount of movement of bistrique (being the vertical feed motion amount of feeding frame) by step motor control, then controlled by stop by the rotation of stepper motor; Stop sends limit signal at every turn and gives stepper motor primary feed amount.
In the described haulage gear: driving-belt 14 is by belt wheel 11 location that are arranged on two ends, the lathe bed left and right sides, oil motor (is that drawing is clear, oil motor omits not to be drawn) drive coaxial with it belt wheel again and make the driving-belt motion, one hydraulic enclasp device 13 also is installed respectively on grinding bistrique and the grinding head for polishing, and configuration hydraulic jack (hydraulic jack omits among the figure) drives hydraulic enclasp device respectively, make it hold driving-belt tightly bistrique is slided on guide rail, perhaps throw off driving-belt and make bistrique static.Two clamping plate (shown in Figure 4) are set in the described hydraulic enclasp device, driving-belt is positioned at the centre of train wheel bridge 13-3 and lower plate 13-4, the piston rod 13-2 top of hydraulic jack 13-1 is fixed with train wheel bridge 13-3 again, oil cylinder makes two clamping plate clamp driving-belt after starting (oil pump that drives oil cylinder among the figure omits and do not draw), grinding bistrique or grinding head for polishing be just by the driving-belt pulling motion, thereby slide along guide rail; The oil cylinder counter motion, two clamping plate are then thrown off driving-belt, and grinding bistrique or grinding head for polishing just remain static.
Described guide rail 1-1 is arranged on back one side of something of lathe bed, the workbench 2 that the preceding half of conduct of lathe bed is fixing to be processed.
The directly outsourcing of described stop.

Claims (5)

1, grinding, the integrated silico briquette Special Purpose Machine for Processing of polishing comprise workbench (2) on lathe bed (1), the lathe bed and the guide rail (1-1) that is horizontally set on the lathe bed top; It is characterized in that also disposing on this lathe a grinding bistrique (7) and a grinding head for polishing (4); These two bistriques are positioned on the guide rail slidably by slide block respectively, and by haulage gear driving carrying out transverse movement.
2, grinding according to claim 1, the integrated silico briquette Special Purpose Machine for Processing of polishing is characterized in that described grinding bistrique (7) comprises that a column (7-1) and is installed with the feeding frame (7-2) of motor, is fixing emery wheel (6) on the turning cylinder of motor; Described grinding head for polishing (4) comprises the feeding frame (4-2) of a column (4-1) and an installation motor, is fixing polishing wheel (5) on the turning cylinder of motor; The leading flank of two columns respectively is provided with a vertical guide (7-1-1,4-1-1), and the trailing flank of two feeding framves respectively is provided with the slide block that matches with vertical guide, and carries out vertical feed motion by stepper motor by screw body driving feeding frame respectively.
3, grinding according to claim 1 and 2, the integrated silico briquette Special Purpose Machine for Processing of polishing, it is characterized in that in the described haulage gear: driving-belt (14) is located by the belt wheel that is arranged on two ends, the lathe bed left and right sides (11), oil motor driving pulley again makes driving-belt move, one hydraulic enclasp device (13) also is installed respectively on grinding bistrique and the grinding head for polishing, make bistrique produce slip to hold driving-belt tightly, perhaps throw off driving-belt and make the bistrique stop motion.
4, grinding according to claim 3, the integrated silico briquette Special Purpose Machine for Processing of polishing, it is characterized in that being provided with in the described hydraulic enclasp device two clamping plate, driving-belt (14) is positioned at the centre of two clamping plate, piston rod (13-2) top of hydraulic jack (13-1) is fixed with one of them clamping plate again, thereby makes the motion of oil cylinder be converted to clamping plate to the clamping of driving-belt or unclamp duty.
5, grinding according to claim 4, the integrated silico briquette Special Purpose Machine for Processing of polishing is characterized in that described guide rail (1-1) is arranged on back one side of something of lathe bed, and workbench (2) is arranged on preceding one side of something of lathe bed.
CN 200920115120 2009-03-09 2009-03-09 Grinding and polishing integral special machine tool for processing silicon blocks Expired - Fee Related CN201371405Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200920115120 CN201371405Y (en) 2009-03-09 2009-03-09 Grinding and polishing integral special machine tool for processing silicon blocks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200920115120 CN201371405Y (en) 2009-03-09 2009-03-09 Grinding and polishing integral special machine tool for processing silicon blocks

Publications (1)

Publication Number Publication Date
CN201371405Y true CN201371405Y (en) 2009-12-30

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CN 200920115120 Expired - Fee Related CN201371405Y (en) 2009-03-09 2009-03-09 Grinding and polishing integral special machine tool for processing silicon blocks

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102284904A (en) * 2011-09-23 2011-12-21 无锡天马通用设备有限公司 Cleaning device of mirror grinding machine
CN102975097A (en) * 2012-12-05 2013-03-20 厦门大学 Grinding and polishing combined machining machine tool
WO2013107030A1 (en) * 2012-01-19 2013-07-25 大连理工大学 Multifunctional substrate polishing and burnishing device and polishing and burnishing method thereof
CN103707175A (en) * 2013-12-30 2014-04-09 天津英利新能源有限公司 Silicon block polishing method
CN103831684A (en) * 2012-11-28 2014-06-04 苏州英达瑞机器人科技有限公司 Smart edge grinding machine with movable grinding head set
CN108838812A (en) * 2018-06-22 2018-11-20 储晓慧 A kind of lithium battery transmits process equipment and its transmission processing technology automatically

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102284904A (en) * 2011-09-23 2011-12-21 无锡天马通用设备有限公司 Cleaning device of mirror grinding machine
CN102284904B (en) * 2011-09-23 2013-06-12 江苏天马通用设备有限公司 Cleaning device of mirror grinding machine
US9138855B2 (en) 2012-01-19 2015-09-22 Dalian University of Technology School of Mechanical Engineering Multifunctional substrate polishing and burnishing device and polishing and burnishing method thereof
WO2013107030A1 (en) * 2012-01-19 2013-07-25 大连理工大学 Multifunctional substrate polishing and burnishing device and polishing and burnishing method thereof
CN103831684A (en) * 2012-11-28 2014-06-04 苏州英达瑞机器人科技有限公司 Smart edge grinding machine with movable grinding head set
CN103831684B (en) * 2012-11-28 2016-01-20 苏州英达瑞机器人科技有限公司 A kind of intelligent edge polisher with removable bistrique group
CN102975097B (en) * 2012-12-05 2015-03-25 厦门大学 Grinding and polishing combined machining machine tool
CN102975097A (en) * 2012-12-05 2013-03-20 厦门大学 Grinding and polishing combined machining machine tool
CN103707175A (en) * 2013-12-30 2014-04-09 天津英利新能源有限公司 Silicon block polishing method
CN108838812A (en) * 2018-06-22 2018-11-20 储晓慧 A kind of lithium battery transmits process equipment and its transmission processing technology automatically

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GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20091230

Termination date: 20110309