CN201293698Y - Pressure transmitter with temperature compensation circuit - Google Patents

Pressure transmitter with temperature compensation circuit Download PDF

Info

Publication number
CN201293698Y
CN201293698Y CNU2008202227217U CN200820222721U CN201293698Y CN 201293698 Y CN201293698 Y CN 201293698Y CN U2008202227217 U CNU2008202227217 U CN U2008202227217U CN 200820222721 U CN200820222721 U CN 200820222721U CN 201293698 Y CN201293698 Y CN 201293698Y
Authority
CN
China
Prior art keywords
circuit
temperature
pressure
pressure sensor
signal
Prior art date
Application number
CNU2008202227217U
Other languages
Chinese (zh)
Inventor
丁明东
来军平
谷荣祥
Original Assignee
西安中星测控有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 西安中星测控有限公司 filed Critical 西安中星测控有限公司
Priority to CNU2008202227217U priority Critical patent/CN201293698Y/en
Application granted granted Critical
Publication of CN201293698Y publication Critical patent/CN201293698Y/en

Links

Abstract

The utility model discloses a pressure transformer with a temperature compensation circuit, which comprises a pressure sensor, and a signal modulation circuit connected with the pressure sensor for converting the output signals of the pressure transformer into standard current signals of 4 to 20mA, wherein the pressure sensor is a piezoresistive pressure sensor, comprising a wheatstone bridge composed by strain gauge made from diffusion silicon. The pressure transformer further comprises a temperature sampling circuit for detecting the working temperature of the wheatstone bridge. The signal modulation circuit is composed of a signal adjusting circuit for amplifying, nonlinearly compensating the output signals of the and processing temperature compensation piezoresistive pressure sensor, and a V/I conversion circuit connected with the signal adjusting circuit; and the temperature sampling circuit is connected with the signal adjusting circuit. The pressure transformer has simple and reasonable structure, less elements, low cost, stable and reliable working performance, and can effectively resolve the temperature drift problem of prior pressure transformer.

Description

带温度补偿电路的压力变送器 Pressure transducer with temperature compensation circuit

技术领域 FIELD

本实用新型涉及一种压力变送器,尤其是涉及一种用于液体压力、流量及液位等工业控制领域中的带温度补偿电路的压力变送器。 The present invention relates to a pressure transmitter, particularly relates to a temperature compensating circuit A tape pressure industrial control fluid pressure, flow and level and the like for the transmitter.

背景技术 Background technique

压阻式压力传感器是应用最广泛的压力传感器之一,它是利用硅的压阻效应和微电子技术制成的,具有灵敏度高、动态响应好、准确度高、易于微型化和集成化等特点。 Piezoresistive pressure sensor is one of the most widely used of the pressure sensor, which is made of silicon piezoresistive effect and microelectronics technology, with high sensitivity, good dynamic response, high accuracy, easy miniaturization and integration, etc. features. 但由于它是由半导体材料制成的,因此传感器的输出值不只决定于输入的压力,还会受到环境温度变化的影响,从而产生温度漂移现象。 But because it is made of a semiconductor material, the sensor output value thus determined not only to the input pressure, is also affected by changes in ambient temperature, to produce a temperature drift. 再加上其本身所存在的非线性问题,器件在封装加工过程中受到的应力影响,使测量精度难以满足精密压力测量的需要。 Coupled Nonlinear problems of its own existence, stress effect device is subjected to processing in the package, so that the measurement accuracy is difficult to meet the needs precise pressure measurements.

压力传感器是传感器世界中很重要的一种类型,它已经基本实现了系列化、标准化,并且进一步向小型化,集体化,智能化和高精度方向发展, 但是零点漂移,温度漂移,非线形问题仍然是尚未完全解决的问题,温度漂移产生交叉灵敏度,是影响传感器精度的最主要的原因。 The pressure sensor is a very important one type of sensor in the world, it has been largely achieved serialization, standardization, and further miniaturization, collectivization, intelligent and high-precision direction, but zero drift, temperature drift, non-linear problem still has not been fully resolved, cross-sensitivity temperature drift is the main reason affecting the accuracy of the sensor. 解决温度漂移的方法为温度补偿,有硬件补偿方法和软件补偿方法。 The solution temperature compensation for temperature drift, hardware and software compensation method compensation method. 硬件补偿主要是釆用硬件电路来消除其影响,但难以做到全额补偿,且存在补偿电路硬件漂 Preclude the use of the hardware compensation is primarily a hardware circuit to eliminate the effects, but it is difficult to achieve full compensation, and there is a drift compensation circuit hardware

移等问题;软件补偿可以分为数值分析法和人工智能法,数值分析法中主要是最小二乘法拟合和多段折线法拟合,但是由于其本身算法的不完善不能够对数据进行完全拟合。 Shift problems; compensation software can be divided into numerical analysis and artificial intelligence, the numerical analysis method is a least squares fit and the main multi-segment fold line fitting algorithm itself but due to the imperfections of the data can not be completely Quasi co.

目前,巿场上存在的压力变送器普遍温度漂移过大,在全温区漂移达到1%之多,而高精度的压力变送器成本较高, 一款全温区0.2%精度的变送器售价往往在2000元,巿场上很多用户承担不了如此高的价格。 Currently, there is market pressure transmitter generally temperature drift field is too large, drift as much as 1% in the whole temperature range, while the higher cost precision pressure transmitter, a 0.2% accuracy the whole temperature becomes transmitter often priced in 2000 dollars, market field many users can not afford such a high price. 实用新型内容 SUMMARY

本实用新型所要解决的技术问题在于针对上述现有技术中的不足,提供一种带温度补偿电路的压力变送器,其结构简单合理、所用器件少且成本低、工作性能稳定可靠,能够有效解决现有压力变送器的温度漂移问题。 The present invention is to solve the technical problems that the prior art view of the above deficiencies, there is provided A tape pressure transducer temperature compensation circuit, which is simple and reasonable structure, the small and low cost device, a stable and reliable performance, can be effectively temperature solve existing pressure transmitter drift.

为解决上述技术问题,本实用新型釆用的技术方案是: 一种带温度补偿电路的压力变送器,包括压力传感器以及与其相接且将所述压力传感器所输出信号转换为4-20mA标准电流信号的信号调制电路,其特征在于:所 To solve the above technical problem, the technical solution of the present invention is to preclude the use of: A tape pressure transducer temperature compensation circuit, comprising a pressure sensor in contact therewith and the pressure sensor output signal is converted to a standard 4-20mA signal modulation circuit current signal, wherein: the

述压力传感器为压阻式压力传感器且其为由扩散硅制的应变片组成的惠斯通电桥,还包括对惠斯通电桥的工作温度进行检测的温度采样电路,所述信号调制电路由对压阻式压力传感器所输出信号进行放大、非线性补偿和温度补偿的信号调理电路以及与信号调理电路相接的V/I转换电路组成,所述温度采样电路接信号调理电路。 Said pressure sensor is a piezoresistive pressure sensor and which by diffusion of silicon strain gauge consisting of a Wheatstone bridge, further comprising a Wheatstone bridge operating temperature detected by the temperature sampling circuit, the signal of the modulation circuit by the piezoresistive pressure sensor output signal is amplified, non-linear compensation and temperature compensation and signal conditioning circuit in contact with the V signal conditioning circuit / I converting circuit, a sampling circuit connected to the temperature signal conditioning circuit.

所述惠斯通电桥的激励源为恒流源激励且其负激励端经电阻R后接地,所述负激励端为温度釆样电路对惠斯通电桥的温度采集点。 The excitation source Wheatstone bridge is energized and the negative constant current excitation source terminal grounded via a resistor R, a collection point for the negative temperature Wheatstone bridge excitation circuit end temperature Bian like.

所述信号调理电路为芯片PGA309。 The signal conditioning circuit chip PGA309.

所述V/I转换电路为芯片XTR117。 The V / I converting circuit chip XTR117.

所述温度釆样电路为数字温度传感器。 The temperature of the sample preclude digital temperature sensor circuit.

本实用新型与现有技术相比具有以下优点,1、不仅结构简单合理、 所用器件少且成本低、加工制作方便、使用操作简便;2、釆用普通的扩散硅芯体,通过专用的温度补偿电路,对温度进行补偿,可以自由迁移量程、改变增益,能偶对零点偏移和增益进行精细校准;另外,通过输入端 The present invention has the following advantages over the prior art, one is not only simple and reasonable structure, the use of fewer devices and low cost, easy to manufacture, easy to use operation; 2, preclude the use of conventional diffused silicon core body temperature via a dedicated compensation circuit for temperature compensation, can migrate freely range, changing the gain can be even of fine offset and gain calibration; Further, through the input terminal

和输出端的带限滤波,使输出噪声降到最低;3、其温度补偿电路采用数 And a band limiting filter output terminal, the output noise to a minimum; 3, with digital temperature compensation circuit

字化方式,可以最多获得17个温度点的校准值,即使温度的漂移达到15%, 也能将之精确的校准成功,在-40到8(TC达到0. 2%的综合精度,低成本, Digitization mode, calibration values ​​can be obtained up to 17 points of temperature, even if the temperature drift of 15%, the accurate calibration can be successfully integrated precision (TC reaches 0.2% of the -40 to 8, low-cost ,

高可靠;其温度釆样采用了测量惠斯通电桥电阻的方式,这样可以避免由于温度突然变化而造成系统误差过大的问题;4、适用范围广,广泛应用 High reliability; Bian temperature measuring mode sample using a Wheatstone bridge resistance, to avoid sudden changes in temperature caused by system error is too big problem; 4, wide application range, is widely used

在航空、航天、石油、化工、矿山、机械、大坝、地质、水文等行业中,用于测量各种气体和流体的压力。 In aviation, aerospace, petroleum, chemical, mining, machinery, dams, geology, hydrology and other industries for measuring various gases and fluid pressure. 总之,本实用新型的电路成本很低,器件少且工作性能稳定可靠,能够有效解决现有压力变送器的温度漂移问题,实现了很好的性价比,在巿场上具有很大的竟争优势。 In summary, the present invention circuit cost is very low, less reliable components and stable performance, can effectively solve the existing pressure transmitter temperature drift, we achieved a very good price, great competition in the market field Advantage.

下面通过附图和实施例,对本实用新型的技术方案做进一步的详细描述。 By the following figures and examples, further detailed description of the technical solution of the present invention.

附图说明 BRIEF DESCRIPTION

图1为本实用新型的电路原理框图。 Figure 1 is a circuit block diagram of the invention.

图2为图1中惠斯通电桥的电路原理图。 FIG 2 is a diagram of the Wheatstone bridge circuit diagram 1. 附图标记说明: REFERENCE NUMERALS:

l一压阻式压力传感器;3—信号调理电路; 4一V/1转换电路; l a piezoresistive pressure sensor; 3- signal conditioning circuit; a 4 V / 1 converting circuit;

5 —温度釆样电路。 5 - Temperature preclude sampling circuit.

具体实施方式 Detailed ways

如图1所示,本实用新型包括压力传感器以及与其相接且将所述压力传感器所输出信号转换为4-20mA标准电流信号的信号调制电路,其中, 所述压力传感器为压阻式压力传感器l且其为由扩散硅制的应变片组成的惠斯通电桥,还包括对惠斯通电桥的工作温度进行检测的温度釆样电路5, 所述信号调制电路由对压阻式压力传感器1所输出信号进行放大、非线性补偿和温度补偿的信号调理电路3以及与信号调理电路3相接的V/I转换电路4组成,所述温度釆样电路5接信号调理电路3。 As shown, the present invention includes a pressure sensor in contact therewith and the pressure sensor output signal into a signal modulating circuit 4-20mA standard current signal, wherein the pressure sensor is a piezoresistive pressure sensor 1 l and by its diffusion strained silicon sheet consisting Wheatstone bridge, further comprising a Wheatstone bridge operating temperature of the temperature detection circuit 5 preclude the like, the signal modulation circuit is composed of a piezoresistive pressure transducer signal conditioning circuit for amplifying the output signal, non-linear compensation and temperature compensation and signal conditioning circuit 3 and the contact 3 V / I converter circuit 4 which, like the circuit 5 connected to preclude temperature signal conditioning circuit 3.

结合图2,所述惠斯通电桥的激励源为恒流源激励且其负激励端经电阻R后接地,所述负激励端为温度采样电路5对惠斯通电桥的温度釆集点。 In conjunction with FIG. 2, the excitation source Wheatstone bridge is excited and the constant current source to the negative excitation terminal grounded via a resistor R, the negative excitation terminal of the sampling circuit 5 is a temperature Wheatstone bridge temperature set point Bian.

本实施例中,所述信号调理电路3为芯片PGA309, V/I转换电路4为芯片XTR117。 In this embodiment, the signal conditioning circuit chip 3 PGA309, V / I converting circuit 4 as a chip XTR117. 具体工作过程是:所述惠斯通电桥应变产生的压力信号传到调理芯片PGA309,该芯片实现了信号的放大、非线性补偿和温度补偿,最终将压力信号以电压的形式输出到芯片XTR117,芯片XTR117将电压信号转换成电流信号并且该芯片还实现了系统的稳压。 Specific working process is: the pressure signals to conditioning chip PGA309 the Wheatstone bridge strain generated by the amplified signal of the chip, non-linear compensation and temperature compensation, the ultimate pressure signal to the chip as a voltage XTR117, XTR117 chip converts the voltage signal to a current signal and the chip also implements regulation system. 所述温度釆样电路5为数字温度传感器,即采用数字标定校准的方式,具体是釆用测量桥阻的方式测量温度且采用5个温度点的校准方式。 The temperature of the sample preclude a digital temperature sensor circuit 5, i.e., by way of a digital calibrations, in particular preclude the use of the measuring bridge to measure the temperature and resistance of embodiment 5 with a calibrated temperature points embodiment.

以上所述,仅是本实用新型的较佳实施例,并非对本实用新型作任何限 The above are only preferred embodiments of the present invention embodiments is not any restriction for the present invention

以及等效结构变化,均仍属于本实用新型技术方案的保护范围内。 Structural changes and equivalents as would fall within the scope of the technical solution of the present invention.

Claims (5)

1.一种带温度补偿电路的压力变送器,包括压力传感器以及与其相接且将所述压力传感器所输出信号转换为4-20mA标准电流信号的信号调制电路,其特征在于:所述压力传感器为压阻式压力传感器(1)且其为由扩散硅制的应变片组成的惠斯通电桥,还包括对惠斯通电桥的工作温度进行检测的温度采样电路(5),所述信号调制电路由对压阻式压力传感器(1)所输出信号进行放大、非线性补偿和温度补偿的信号调理电路(3)以及与信号调理电路(3)相接的V/I转换电路(4)组成,所述温度采样电路(5)接信号调理电路(3)。 A pressure transducer with temperature compensation circuit comprising a pressure sensor in contact therewith and the pressure sensor output signal into a signal modulating circuit 4-20mA standard current signal, wherein: said pressure Wheatstone bridge sensor is a piezoresistive pressure sensor (1) and which is strained by the diffusion sheet consisting of silicon, further comprising a Wheatstone bridge for detecting the operating temperature of temperature sampling circuit (5), the signal modulation circuit is amplified by piezoresistive pressure sensor (1) output signal, non-linear compensation and temperature compensation signal conditioning circuit (3) and a signal conditioning circuit (3) contacting the V / I converter circuit (4) composition, the temperature sampling circuit (5) connected to a signal conditioning circuit (3).
2. 按照权利要求l所述的带温度补偿电路的压力变送器,其特征在于: 所述惠斯通电桥的激励源为恒流源激励且其负激励端经电阻R后接地,所述负激励端为温度釆样电路(5)对所述惠斯通电桥的温度釆集点。 2. A pressure belt according to claim l The temperature compensation circuit of the transmitter, wherein: the excitation source Wheatstone bridge is energized and the negative constant current excitation source terminal grounded via a resistor R, the preclude the negative excitation terminal temperature sampling circuit (5) the temperature of the Wheatstone bridge Bian set point.
3. 按照权利要求1或2所述的带温度补偿电路的压力变送器,其特征在于:所述信号调理电路(3)为芯片PGA309。 3. A pressure transmitter according to claim temperature compensated circuit of claim 1 or 2, characterized in that: said signal conditioning circuit (3) chip PGA309.
4. 按照权利要求1或2所述的带温度补偿电路的压力变送器,其特征在于:所述V/I转换电路(4)为芯片XTR117。 4. The belt as claimed in claim pressure or the temperature compensation circuit 12 of the transmitter, wherein: the V / I converter circuit (4) chip XTR117.
5. 按照权利要求l或2所述的带温度补偿电路的压力变送器,其特征在于:所述温度釆样电路(5)为数字温度传感器。 5. A belt according to claim l or 2, said temperature compensation circuit pressure transmitter, characterized in that: said temperature preclude sampling circuit (5) is a digital temperature sensor.
CNU2008202227217U 2008-12-02 2008-12-02 Pressure transmitter with temperature compensation circuit CN201293698Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008202227217U CN201293698Y (en) 2008-12-02 2008-12-02 Pressure transmitter with temperature compensation circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2008202227217U CN201293698Y (en) 2008-12-02 2008-12-02 Pressure transmitter with temperature compensation circuit

Publications (1)

Publication Number Publication Date
CN201293698Y true CN201293698Y (en) 2009-08-19

Family

ID=41007181

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2008202227217U CN201293698Y (en) 2008-12-02 2008-12-02 Pressure transmitter with temperature compensation circuit

Country Status (1)

Country Link
CN (1) CN201293698Y (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101936791A (en) * 2010-07-28 2011-01-05 四川蜀谷仪表科技有限公司 Digital pressure gauge
CN102645293A (en) * 2012-04-25 2012-08-22 无锡商业职业技术学院 Intelligent pressure transmitter
CN102865951A (en) * 2012-09-26 2013-01-09 太原理工大学 Piezoresistive sensor for internal pressure detection of expressway road bed
CN103017798A (en) * 2012-12-14 2013-04-03 烟台荏原空调设备有限公司 Resistance transmitter
CN103335778A (en) * 2013-06-27 2013-10-02 苏州中崟传感股份有限公司 Diesel engine urea solution pressure sensor
CN103913266A (en) * 2013-01-05 2014-07-09 上海朝辉压力仪器有限公司 Pressure sensor and pressure transmitter
CN104061978A (en) * 2014-06-17 2014-09-24 西安微纳传感器研究所有限公司 Intelligent liquid level transmitter and control method thereof
CN104516387A (en) * 2014-12-12 2015-04-15 天津大学 Constant flow source supply circuit of respiration signal sensor based on air cushion bed
KR20150066514A (en) * 2012-07-20 2015-06-16 엔도피스 홀딩스, 엘엘시 Transducer interface system and method
CN105242063A (en) * 2015-09-09 2016-01-13 西安邮电大学 Reservoir flow velocity measurement method based on pressure sensor
CN105579820A (en) * 2013-09-19 2016-05-11 恩德莱斯和豪瑟尔两合公司 Pressure transducer
CN105973509A (en) * 2016-05-06 2016-09-28 武汉航空仪表有限责任公司 Pressure transducer circuit and commissioning method thereof

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101936791A (en) * 2010-07-28 2011-01-05 四川蜀谷仪表科技有限公司 Digital pressure gauge
CN102645293A (en) * 2012-04-25 2012-08-22 无锡商业职业技术学院 Intelligent pressure transmitter
KR101998915B1 (en) 2012-07-20 2019-10-01 엔도피스 홀딩스, 엘엘시 Transducer interface system and method
KR20150066514A (en) * 2012-07-20 2015-06-16 엔도피스 홀딩스, 엘엘시 Transducer interface system and method
CN102865951A (en) * 2012-09-26 2013-01-09 太原理工大学 Piezoresistive sensor for internal pressure detection of expressway road bed
CN102865951B (en) * 2012-09-26 2015-02-25 太原理工大学 Piezoresistive sensor for internal pressure detection of expressway road bed
CN103017798A (en) * 2012-12-14 2013-04-03 烟台荏原空调设备有限公司 Resistance transmitter
CN103913266A (en) * 2013-01-05 2014-07-09 上海朝辉压力仪器有限公司 Pressure sensor and pressure transmitter
CN103335778B (en) * 2013-06-27 2016-01-20 苏州中崟传感股份有限公司 Diesel engine urea solution pressure sensor
CN103335778A (en) * 2013-06-27 2013-10-02 苏州中崟传感股份有限公司 Diesel engine urea solution pressure sensor
CN105579820B (en) * 2013-09-19 2018-05-04 恩德莱斯和豪瑟尔两合公司 Pressure transmitter
CN105579820A (en) * 2013-09-19 2016-05-11 恩德莱斯和豪瑟尔两合公司 Pressure transducer
US9897502B2 (en) 2013-09-19 2018-02-20 Endress + Hauser Gmbh + Co. Kg Pressure transducer
CN104061978A (en) * 2014-06-17 2014-09-24 西安微纳传感器研究所有限公司 Intelligent liquid level transmitter and control method thereof
CN104516387B (en) * 2014-12-12 2017-05-17 天津大学 Constant flow source supply circuit of respiration signal sensor based on air cushion bed
CN104516387A (en) * 2014-12-12 2015-04-15 天津大学 Constant flow source supply circuit of respiration signal sensor based on air cushion bed
CN105242063A (en) * 2015-09-09 2016-01-13 西安邮电大学 Reservoir flow velocity measurement method based on pressure sensor
CN105973509A (en) * 2016-05-06 2016-09-28 武汉航空仪表有限责任公司 Pressure transducer circuit and commissioning method thereof
CN105973509B (en) * 2016-05-06 2019-10-15 武汉航空仪表有限责任公司 A kind of pressure sensor circuit and its adjustment method

Similar Documents

Publication Publication Date Title
US20080105057A1 (en) Dual span absolute pressure sense die
CN102032974B (en) Temperature compensation method for pressure sensor
CA1046790A (en) Mass flowmeter for a gaseous medium, for example air
US5303167A (en) Absolute pressure sensor and method
EP0803054B1 (en) A temperature compensation method in pressure sensors
CN101858811B (en) Method for compensating signal of high-precision pressure sensor
CN101044382A (en) Pressure Sensor
US6828802B2 (en) Pressure measurement device including a capacitive sensor in an amplifier feedback path
JP2000088891A (en) Bridge circuit and detector using the same
CN2692646Y (en) Thermoresistor temp measuring circuit
CN1858601B (en) Capacitance microwave power sensor
CN101295188B (en) DC small current constant-current source and calibration method thereof
CN1086012A (en) Pulsed pressure sensor circuit and method therefor
US7530274B2 (en) Apparatus for providing an output proportional to pressure divided by temperature (P/T)
CN102545793A (en) Weak current amplifier with pA (picoamperes)-mu A(microamperes) range
CN101706345A (en) Method for compensating for heat drift of sensibility of micro pressure sensor
US7146860B2 (en) Method for temperature compensation of a digital pressure meter
CN101846644B (en) Oil and gas pipeline corrosion online monitor
CN101718605B (en) Sensor for measuring pressure of water in soil at bottom of dam, river and lake and measuring method
US9182457B2 (en) Isolated voltage transducer
US7308832B1 (en) Strain gage differential pressure measurement in a fluid flow meter
CN100446417C (en) Differential circuit for reading out signal of integrated ISFET sensor based on two modes
CN201653608U (en) High-intelligent resistance strain gage sensor
US7347098B2 (en) Apparatus for providing an output proportional to pressure divided by temperature (P/T)
CN101936791B (en) Digital pressure gauge

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
CF01