CN201188049Y - Detector for leakage of carbon-dioxide laser resonant cavity - Google Patents
Detector for leakage of carbon-dioxide laser resonant cavity Download PDFInfo
- Publication number
- CN201188049Y CN201188049Y CNU200820056752XU CN200820056752U CN201188049Y CN 201188049 Y CN201188049 Y CN 201188049Y CN U200820056752X U CNU200820056752X U CN U200820056752XU CN 200820056752 U CN200820056752 U CN 200820056752U CN 201188049 Y CN201188049 Y CN 201188049Y
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- Prior art keywords
- circuit
- gas
- sample gas
- water
- oxygen
- Prior art date
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- CURLTUGMZLYLDI-UHFFFAOYSA-N carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims abstract description 15
- 239000001569 carbon dioxide Substances 0.000 title claims abstract description 15
- 239000007789 gas Substances 0.000 claims abstract description 134
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 45
- 239000001301 oxygen Substances 0.000 claims abstract description 35
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 35
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 32
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000001816 cooling Methods 0.000 claims abstract description 15
- 238000001914 filtration Methods 0.000 claims abstract description 7
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 3
- 230000003321 amplification Effects 0.000 abstract description 2
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract 3
- 238000000605 extraction Methods 0.000 abstract 1
- 238000010992 reflux Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 4
- 230000001105 regulatory Effects 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000001808 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium(0) Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- -1 temperature Substances 0.000 description 1
Abstract
The utility model discloses a resonant cavity leakage detection instrument for a carbon dioxide laser, which mainly comprises a detection gas circuit part and a measurement and control circuit part. The detection gas circuit part is composed of a sample gas extraction and treatment gas circuit, a sample gas measurement gas circuit and a sample gas reflux gas circuit; the measurement and control circuit part mainly comprises a core control circuit, a micro water detection circuit, a micro oxygen detection circuit and a keyboard input and display circuit; the micro water detection circuit and the micro oxygen detection circuit comprise a water sensor, an oxygen sensor, and a signal processing circuit, the water sensor causes the content value of water in sample gas which enters a micro water detection gas chamber to be converted into electric signals, the oxygen sensor causes the content value of oxygen in sample gas which enters a micro oxygen detection gas chamber to be converted into electric signals, and then the electric signals are input into the core control circuit after amplification and wave filtering processing by the signal processing circuit. The utility model can carry out on-line real-time detection under the conditions of the internal cooling pipeline leakage and the external air leakage of the carbon dioxide laser.
Description
Technical field
The utility model relates to and is used to detect industrial high-power carbon dioxide (CO
2) gas laser intra resonant cavity cooling water pipe leaks and the device of outside seal air leakage, belongs to laser instrument and field of gas detection.
Background technology
Present industrial high-power CO
2The ingredient of laser instrument comprises laserresonator, excitation power supply, the working gas circulation system, cooling system and TT﹠C system etc.Wherein laserresonator is the key of laser instrument, and it is equivalent to the CPU of computing machine, and generation of Laser and amplification are provided.Whether the operate as normal of laserresonator directly has influence on the stability of laser works.Operation material is the main body of laser and matter interaction in the laserresonator, by the stimulated radiation shoot laser of operation material, CO
2The operation material of laser instrument is CO
2, He and N
2Mixed gas (gas purity will reach more than 99.99%), the density of operation material, temperature, air pressure, component, foreign gas content etc. all have influence on the normal output of laser in the resonator cavity, and very responsive to the variation of these parameters.At high-power CO
2In the laser instrument, all require the leakage of resonator cavity to be less than 0.1hP/min, laser instrument could operate as normal.Therefore, laser resonant cavity all is to be in strict air-tight state.
High-power crossing current CO
2The working gas of laser instrument flows along circumferential direction, and working volume is very big, and resonator cavity is very difficult with extraneous sealing; Secondly the exciting electrode of this laser instrument is exposed in the working gas, its cooling line is also in working gas, and other parts, as corrugated tube, catoptron bracing frame, catoptron cooling line etc. all in the encirclement of working gas, be easy to cause the leakage of laser resonant cavity, taken place a lot of because cooling line water leaks or extraneous seal leakage causes laser works undesired, even do not exported the fault of laser, had a strong impact on the normal operation of production line.Therefore, how to understand the leakage situation of laser resonant cavity timely and accurately, judge that simultaneously the laser instrument leak type is that outside air leaks or inner cooling water pipe leaks, and helps ensureing high-power crossing current CO
2Laser instrument normally moves.
The utility model content
The purpose of this utility model is to provide a kind of carbon dioxide laser resonator cavity leakage detector, can online in real time detect the situation that carbon dioxide laser intra resonant cavity cooling line leaks and outside air leaks.
The utility model is achieved in that a kind of carbon dioxide laser resonator cavity leakage detector, mainly comprises detecting air path part and telemetry circuit part;
Described detection air path part is extracted and is handled gas circuit by sample gas, sample gas measures gas circuit and sample gas backflow gas circuit is formed;
Sample gas extracts and handles gas circuit and comprises air intake opening, cooling coil pipe, variable valve and asepwirator pump, and air intake opening is two the tunnel, and pipeline taps into gas port, switch valve, cooling coil pipe, variable valve and asepwirator pump successively, and asepwirator pump output sample gas enters sample gas and measures gas circuit;
Sample gas is measured gas circuit and is detected air chamber, flowmeter and tensimeter and formed by four-way connection, gas admittance valve, micro amount of oxygen detection air chamber, minor amount of water, sample gas is divided into three branch roads by four-way connection: branch road one is that micro amount of oxygen detects gas circuit, and pipeline connects gas admittance valve successively, micro amount of oxygen detects air chamber, flowmeter; Branch road two is that minor amount of water detects gas circuit, and pipeline connects gas admittance valve successively, minor amount of water detects air chamber, flowmeter; Branch road three is the bypasses of sample gas, is connected to flowmeter and tensimeter in the bypass; Article three, the branch road outflow end enters sample gas backflow gas circuit by four-way connection;
Sample gas backflow gas circuit comprises switch valve and gas outlet, and wherein switch valve is a T-valve, and T-valve output connects two gas outlets;
Described telemetry circuit part mainly comprises core control circuit, minor amount of water testing circuit, micro amount of oxygen testing circuit and keyboard input and display circuit;
Core control circuit is made up of Single Chip Microcomputer (SCM) system, D/A converting circuit and I/O interface circuit, the analog voltage signal of minor amount of water testing circuit and the output of micro amount of oxygen testing circuit is by D/A converting circuit conversion back input Single Chip Microcomputer (SCM) system, and the I/O interface circuit links to each other Single Chip Microcomputer (SCM) system with keyboard input and display circuit;
The minor amount of water testing circuit comprises water sensor and signal processing circuit, the content value that the minor amount of water that will enter water sensor detects water in the sample gas in the air chamber is converted to electric signal, again through signal processing circuit amplify with Filtering Processing after be input to D/A converting circuit;
The micro amount of oxygen testing circuit comprises lambda sensor and signal processing circuit, the content value that the micro amount of oxygen that will enter lambda sensor detects oxygen in the sample gas in the air chamber is converted to electric signal, again through signal processing circuit amplify with Filtering Processing after be input to D/A converting circuit;
Keyboard input and display circuit mainly comprise display driver circuit, digital demonstration, keyboard treatment circuit, operation push-button, photoelectric isolating circuit and sound and light alarm, and display driver circuit links to each other with Single Chip Microcomputer (SCM) system by the I/O interface circuit, are used for driving digital the demonstration; The keyboard treatment circuit links to each other with Single Chip Microcomputer (SCM) system by the I/O interface circuit, is used for handling the action of operation push-button; Photoelectric isolating circuit links to each other with Single Chip Microcomputer (SCM) system by the I/O interface circuit, is used for driving sound and light alarm.
Principle of work of the present utility model is: according to the analysis to carbon dioxide laser cavity resonator structure and leakage situation, can determine that the laser resonant cavity leakage can be divided into the chilled water leakage and air leaks two types, judge the leakage situation and the leak type of resonator cavity by the content of minor amount of water and micro amount of oxygen in the testing gas.As: for high-power CO
2Cross-flow laser is because its working gas that uses is helium He, nitrogen N
2With carbon dioxide CO
2Mixed gas, under the normal condition in the working gas micro-water content be about: 10ppm, micro-oxygen content is about: 5ppm.When leakage of cooling water takes place, can cause micro-water content increase in the resonator cavity working gas; Micro-oxygen content increases in the working gas and take place can cause when air leaks.Therefore, can judge the leakage situation and the leak type of resonator cavity by the content of minor amount of water and micro amount of oxygen in the testing gas.
The utility model can online in real time detect the situation that carbon dioxide laser intra resonant cavity cooling line leaks and outside air leaks, and gets rid of for the fault of laser instrument to point the direction, and shortens the field maintemance time.
Description of drawings
Fig. 1 is the detection air path part connection diagram of the utility model detector;
Fig. 2 is the telemetry circuit part electrical diagram of the utility model detector.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Referring to Fig. 1, Fig. 2, a kind of carbon dioxide laser resonator cavity leakage detector mainly comprises and detects air path part A and be the telemetry circuit part B of core with the single-chip microcomputer.
Described detection air path part A is extracted and is handled gas circuit A1 by sample gas, sample gas measures gas circuit A2 and sample gas backflow gas circuit A3 forms.Sample gas extracts and handles gas circuit A1 and comprises air intake opening 1, air intake opening 2, switch valve 3, cooling coil pipe 4, variable valve 5 and asepwirator pump 6, wherein switch valve 3 is tee ball valves, can realize the selection air inlet of two-way sample gas, reduce the temperature of sample gas by cooling coil pipe 4, to satisfy the condition of work of sensor, variable valve 5 is used for regulating the size of air inlet total amount, by the sample gas supercharging of asepwirator pump 6 with low pressure, makes it enter sample gas and measures gas circuit A2.Sample gas is measured gas circuit A2 and is detected air chamber 14, flowmeter 15 and four-way connection 16 and formed by four-way connection 7, gas admittance valve 8, micro amount of oxygen detection air chamber 9, flowmeter 10, tensimeter 11, flowmeter 12, gas admittance valve 13, minor amount of water, sample gas is divided into three branch roads by four-way connection 7: branch road one is that micro amount of oxygen detects gas circuit, sample gas is regulated laggardly to go into micro amount of oxygen and detect air chamber 9, the gas flow of flowmeter 10 these branch roads of indication by gas admittance valve 8; Branch road two is that minor amount of water detects gas circuit, and sample gas is regulated laggardly to go into minor amount of water and detect air chamber 14, the gas flow of flowmeter 15 these branch roads of indication by gas admittance valve 13; Branch road three is the bypasses of sample gas, the gas flow of flowmeter 12 these branch roads of indication, and tensimeter 11 indication sample gas are measured the air pressure of gas circuit A2; Article three, the eluting gas of branch road enters sample gas backflow gas circuit A3 by four-way connection 16.Sample gas backflow gas circuit A3 comprises switch valve 17, gas outlet 18 and gas outlet 19, and wherein switch valve 17 is tee ball valves, realizes the selection return-air of two-way sample gas.
Described telemetry circuit part B mainly comprises core control circuit C, minor amount of water testing circuit D, micro amount of oxygen testing circuit E and keyboard input and display circuit F.
Core control circuit C is made up of Single Chip Microcomputer (SCM) system C2, D/A converting circuit (adc circuit) C1 and I/O interface circuit C3, and Single Chip Microcomputer (SCM) system C2 is responsible for sequential control, data processing, logical operation and the interrupt response of telemetry circuit part B; The analog voltage signal of minor amount of water testing circuit D and micro amount of oxygen testing circuit E output converts the digital signal that Single Chip Microcomputer (SCM) system C2 can discern to by D/A converting circuit C1; I/O interface circuit C3 links to each other Single Chip Microcomputer (SCM) system C2 with keyboard input and display circuit part F.
Minor amount of water testing circuit D comprises water sensor D1 and signal processing circuit D2, the content value that the minor amount of water that will enter water sensor D1 detects water in the sample gas in the air chamber 14 is converted to electric signal, again through signal processing circuit D2 amplify with Filtering Processing after be input to D/A converting circuit C1.Micro amount of oxygen testing circuit E comprises lambda sensor E1 and signal processing circuit E2, the content value that the micro amount of oxygen that will enter lambda sensor E1 detects oxygen in the sample gas in the air chamber 9 is converted to electric signal, again through signal processing circuit E2 amplify with Filtering Processing after be input to D/A converting circuit C1.
Keyboard input and display circuit part F mainly comprise display driver circuit F1, the digital F2 of demonstration, keyboard treatment circuit F3, operation push-button F4, photoelectric isolating circuit F5 and sound and light alarm F6, display driver circuit F1 links to each other with Single Chip Microcomputer (SCM) system C2 by I/O interface circuit C3, is used for driving the digital F2 of demonstration; Keyboard treatment circuit F3 links to each other with Single Chip Microcomputer (SCM) system C2 by I/O interface circuit C3, is used for handling the action of operation push-button F4; Photoelectric isolating circuit F5 links to each other with Single Chip Microcomputer (SCM) system C2 by I/O interface circuit C3, is used for driving sound and light alarm F6.
Embodiment
A carbon dioxide laser resonator cavity leakage detector is selected a CO by switch valve 3
2Sample gas in the laser resonant cavity enters and detects air path part A, behind cooling coil pipe 4, the temperature of sample gas is reduced in the working range of water sensor D1 and lambda sensor E1, asepwirator pump 6 adopts membrane pump, with the supercharging of sample gas, adjust the flow of sample gas by regulating gas admittance valve 8, gas admittance valve 13 and variable valve 5.Water sensor D1 adopts capacitance type sensor, and lambda sensor E1 adopts the feulcell prototype sensor, and the signal of sensor output is transformed into the analog voltage signal of 0V to 10V through signal processing circuit D2 and E2; D/A converting circuit (adc circuit) C1 adopts 12 high-precision AD conversion chips, converts analog voltage signal to digital quantity; MCU among the Single Chip Microcomputer (SCM) system C2 adopts the 80C52 series monolithic, is responsible for sequential control, data processing, logical operation and the interrupt response of telemetry circuit part B; I/O interface circuit C3 adopts 8259 chips, realizes the expansion of parallel IO interface, and Single Chip Microcomputer (SCM) system C2 is linked to each other with keyboard input and display circuit part F; The numerical value of micro-water content and micro-oxygen content in 8 sections charactrons demonstrations of display driver circuit F1 employing 4N25 chip drives sample gas, the keyboard treatment circuit adopts 8279 keyboard managing chips to come the processing of complete operation button F4 action, and photoelectric isolating circuit F5 adopts TLP521 photoelectricity coupling chip to drive buzzing and the flashing light of sound and light alarm F6.
The utility model can online in real time detect the situation that carbon dioxide laser intra resonant cavity cooling line leaks and outside air leaks, and gets rid of for the fault of laser instrument to point the direction.
Claims (1)
1, a kind of carbon dioxide laser resonator cavity leakage detector is characterized in that: mainly comprise and detect air path part and telemetry circuit part;
Described detection air path part is extracted and is handled gas circuit by sample gas, sample gas measures gas circuit and sample gas backflow gas circuit is formed;
Sample gas extracts and handles gas circuit and comprises air intake opening, cooling coil pipe, variable valve and asepwirator pump, and air intake opening is two the tunnel, and pipeline taps into gas port, switch valve, cooling coil pipe, variable valve and asepwirator pump successively, and asepwirator pump output sample gas enters sample gas and measures gas circuit;
Sample gas is measured gas circuit and is detected air chamber, flowmeter and tensimeter and formed by four-way connection, gas admittance valve, micro amount of oxygen detection air chamber, minor amount of water, sample gas is divided into three branch roads by four-way connection: branch road one is that micro amount of oxygen detects gas circuit, and pipeline connects gas admittance valve successively, micro amount of oxygen detects air chamber, flowmeter; Branch road two is that minor amount of water detects gas circuit, and pipeline connects gas admittance valve successively, minor amount of water detects air chamber, flowmeter; Branch road three is the bypasses of sample gas, is connected to flowmeter and tensimeter in the bypass; Article three, the branch road outflow end enters sample gas backflow gas circuit by four-way connection;
Sample gas backflow gas circuit comprises switch valve and gas outlet, and wherein switch valve is a T-valve, and T-valve output connects two gas outlets;
Described telemetry circuit part mainly comprises core control circuit, minor amount of water testing circuit, micro amount of oxygen testing circuit and keyboard input and display circuit;
Core control circuit is made up of Single Chip Microcomputer (SCM) system, D/A converting circuit and I/O interface circuit, the analog voltage signal of minor amount of water testing circuit and the output of micro amount of oxygen testing circuit is by D/A converting circuit conversion back input Single Chip Microcomputer (SCM) system, and the I/O interface circuit links to each other Single Chip Microcomputer (SCM) system with keyboard input and display circuit;
The minor amount of water testing circuit comprises water sensor and signal processing circuit, the content value that the minor amount of water that will enter water sensor detects water in the sample gas in the air chamber is converted to electric signal, again through signal processing circuit amplify with Filtering Processing after be input to D/A converting circuit;
The micro amount of oxygen testing circuit comprises lambda sensor and signal processing circuit, the content value that the micro amount of oxygen that will enter lambda sensor detects oxygen in the sample gas in the air chamber is converted to electric signal, again through signal processing circuit amplify with Filtering Processing after be input to D/A converting circuit;
Keyboard input and display circuit mainly comprise display driver circuit, digital demonstration, keyboard treatment circuit, operation push-button, photoelectric isolating circuit and sound and light alarm, and display driver circuit links to each other with Single Chip Microcomputer (SCM) system by the I/O interface circuit, are used for driving digital the demonstration; The keyboard treatment circuit links to each other with Single Chip Microcomputer (SCM) system by the I/O interface circuit, is used for handling the action of operation push-button; Photoelectric isolating circuit links to each other with Single Chip Microcomputer (SCM) system by the I/O interface circuit, is used for driving sound and light alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820056752XU CN201188049Y (en) | 2008-03-31 | 2008-03-31 | Detector for leakage of carbon-dioxide laser resonant cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820056752XU CN201188049Y (en) | 2008-03-31 | 2008-03-31 | Detector for leakage of carbon-dioxide laser resonant cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201188049Y true CN201188049Y (en) | 2009-01-28 |
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ID=40311075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200820056752XU Expired - Fee Related CN201188049Y (en) | 2008-03-31 | 2008-03-31 | Detector for leakage of carbon-dioxide laser resonant cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201188049Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376188A (en) * | 2012-04-18 | 2013-10-30 | 天纳克-埃贝赫（大连）排气系统有限公司 | Apparatus for detecting airtight leakage detector by using airtight limit sample |
| CN104313238A (en) * | 2014-11-15 | 2015-01-28 | 新兴铸管股份有限公司 | Water leakage accident prevention system for oxygen lance of converter |
| CN106404311A (en) * | 2015-07-30 | 2017-02-15 | 苏州热工研究院有限公司 | Spent fuel assembly damage detection apparatus |
-
2008
- 2008-03-31 CN CNU200820056752XU patent/CN201188049Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376188A (en) * | 2012-04-18 | 2013-10-30 | 天纳克-埃贝赫（大连）排气系统有限公司 | Apparatus for detecting airtight leakage detector by using airtight limit sample |
| CN104313238A (en) * | 2014-11-15 | 2015-01-28 | 新兴铸管股份有限公司 | Water leakage accident prevention system for oxygen lance of converter |
| CN106404311A (en) * | 2015-07-30 | 2017-02-15 | 苏州热工研究院有限公司 | Spent fuel assembly damage detection apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090128 Termination date: 20140331 |