CN201075051Y - Apparatus for detecting leakage of sealing article - Google Patents

Apparatus for detecting leakage of sealing article Download PDF

Info

Publication number
CN201075051Y
CN201075051Y CNU2007200971114U CN200720097111U CN201075051Y CN 201075051 Y CN201075051 Y CN 201075051Y CN U2007200971114 U CNU2007200971114 U CN U2007200971114U CN 200720097111 U CN200720097111 U CN 200720097111U CN 201075051 Y CN201075051 Y CN 201075051Y
Authority
CN
China
Prior art keywords
measured piece
valve
tested
container
pipeline
Prior art date
Application number
CNU2007200971114U
Other languages
Chinese (zh)
Inventor
陈乃克
Original Assignee
博益(天津)气动技术研究所有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 博益(天津)气动技术研究所有限公司 filed Critical 博益(天津)气动技术研究所有限公司
Priority to CNU2007200971114U priority Critical patent/CN201075051Y/en
Application granted granted Critical
Publication of CN201075051Y publication Critical patent/CN201075051Y/en

Links

Abstract

A sealing product leakage detection device consists of a gas source, a pressure filling valve, a first balance valve, a second balance valve, a differential pressure sensor, a benchmark part, a benchmark part sealing container, a tested part and a tested part sealing container, the components are connected by a gas path pipeline, wherein, the pipeline of the tested part is connected with the pipeline of the benchmark part in parallel and the two are respectively connected with the differential pressure sensor, a big leak rate detection valve and a volume matching container are respectively arranged on the pipeline of the tested part and the pipeline of the benchmark part; the volume of the volume matching container is the same and is equal to the volume of the sealing container of the tested part which deducts the volume of the tested part; the volumes of the sealing container of the tested part and the sealing container of the benchmark part are equal and can be arranged in the tested part and the benchmark part. The utility model has the advantages that: the device has simple structure, convenient operation and low cost; as the detection gas path adopts a gas control valve, the utility model can not generate the heat during action, thereby ensuring the detection precision of the differential pressure; furthermore, the leakage detection process does not damage the tested part, so the utility model is especially applicable to the leakage detection of electronic chips and other sealing products.

Description

A kind of enclosed article leakage detection apparatus

(1) technical field

The utility model relates to a kind of leakage detection apparatus, particularly a kind of enclosed article leakage detection apparatus.

(2) background technology

At present the method used of enclosed article leakage detection apparatus mainly contains: dyestuff penetration leak detecting, intensification bubble emission leak detecting, take out infrabar bubble emission leak detecting, the two fluorocarbon oil bubbles emission of back pressure leak detecting, fluorine carbon gas leak detecting, weight and increase leak detecting, radioactive isotope leak detecting and optics leak detecting.These method complex process, efficient is low, cost is high, and the method that wherein has also belongs to the destructive test mode.Also has the airtight leak detecting of a kind of differential pressure type in addition, be mainly used in the Leak Detection of non-tight product such as automotive oil tank, air-conditioning duct etc., this device pressurizes tested device or vacuumizes by inflation inlet, whether observation has pressure reduction to judge whether leakage then, but can not be used for the leak detection of enclosed article such as electronic chip etc.

(3) utility model content

The purpose of this utility model is at the problems referred to above, and the airtight leakage detection apparatus of existing differential pressure type is improved, provide a kind of simple in structure, easy to operate, cost is low and do not destroy the enclosed article leakage detection apparatus of measured piece.

The technical solution of the utility model:

A kind of enclosed article leakage detection apparatus, by source of the gas, equalizer valve, first equalizing valve, second equalizing valve, the differential pressure pressure transducer, standard, the standard airtight container, measured piece is formed with the measured piece airtight container and is linked to each other by gas path pipe, first equalizing valve wherein, the pipeline and second equalizing valve that measured piece and measured piece airtight container constitute, the pipeline that standard and standard airtight container constitute is in parallel and link to each other with the differential pressure pressure transducer respectively, it is characterized in that: at first equalizing valve, first leak rate is set on the pipeline that measured piece and measured piece airtight container constitute detects the valve and the first complexion container; Second largest leak rate is set on the pipeline that second equalizing valve, standard and standard airtight container constitute detects the valve and the second complexion container; The volume of first, second complexion container equates and deducts for the volume of measured piece airtight container the volume of measured piece; The measured piece airtight container equate with the volume of standard airtight container and can put into measured piece, standard gets final product.

The utility model has the advantages that: this apparatus structure is simple, easy to operate, cost is low; All adopted Pneumatic valve owing to detect gas circuit, do not produced heat during action, avoided test error, guaranteed the accuracy of detection of pressure reduction because of the temperature variation generation; And the leak detection process is not destroyed measured piece, is specially adapted to the leak detection of enclosed articles such as electronic chip.

(4) description of drawings

Accompanying drawing 1: the pneumatic circuit synoptic diagram is put in sealing product examine neglected loading.

Accompanying drawing 2: pressure reduction and leakage rate corresponding relation curve map.

Among Fig. 1: 1. source of the gas 2. equalizer valves 3. first equalizing valves 4. second equalizing valves

5. the first complexion container, 6. first leak rates detect valve 7. differential pressure pressure transducers

8. second largest leak rate detects valve 9. second complexion containers 10. measured pieces

11. measured piece airtight container 12. standards 13. standard airtight containers

(5) embodiment

Embodiment: a kind of enclosed article leakage detection apparatus, by source of the gas 1, equalizer valve 2, first equalizing valve 3, second equalizing valve 4, differential pressure pressure transducer 7, standard 12, standard airtight container 13, measured piece 10 is formed with measured piece airtight container 11 and is linked to each other by gas path pipe, first equalizing valve 3 wherein, the pipeline and second equalizing valve 4 that measured piece 10 and measured piece airtight container 11 constitute, the pipeline that standard 12 and standard airtight container 13 constitutes is in parallel and link to each other with differential pressure pressure transducer 7 respectively, at first equalizing valve 3, on the pipeline that measured piece 10 and measured piece airtight container 11 constitute first leak rate is set and detects the valve 6 and the first complexion container 5; On the pipeline that second equalizing valve 4, standard 12 and standard airtight container 13 constitute, second largest leak rate is set and detects the valve 8 and the second complexion container 9; The first complexion container 5 and the volume of the second complexion container 9 equate and deduct for the volume of measured piece airtight container 11 volume of measured piece 10; Measured piece airtight container 11 equate with the volume of standard airtight container 13 and for can put into measured piece 10, standard 12 gets final product.

Detection method of the present utility model: at first with standard 12, promptly identical with the measured piece 10 and components and parts that do not leak are put into standard airtight container 13, and measured piece 10 is put into measured piece airtight container 11, detect and carry out in two steps.1) little leak rate detects: close big leak rate and detect valve 6,8, open equalizer valve 2, equalizing valve 3,4, source of the gas 1 is by equalizer valve 2, equalizing valve 3,4 pairs of two airtight containers 11 placing measured piece 10 and standard 12,13 inflations simultaneously, and 10 leak detections require to preestablish the pressurising time according to measured piece, close equalizing valve 3 then, 4, if measured piece 10 has smaller leakage, promptly the time bleed the gas flow rate of measured piece 10 inner chambers when slowly and not meeting the requirements of test pressure in inflation, the airtight container 11 interior pressure of then placing measured piece 10 will descend gradually, can detect airtight container 11 by differential pressure pressure transducer 7, pressure reduction between 13 concerns over time, just can calculate slip.If but the small opening of measured piece 10 is relatively very big, leak when very fast, the gas of measured piece 10 inner chambers of bleeding after inflation is finished just meets the requirements of test pressure, closes can not occur pressure again behind the equalizing valve 3,4 and change (is inequality but charge into the gaseous mass of two airtight containers 11,13 this moment).2) big leak rate detects: open big leak rate and detect valve 6,8, insert dividing potential drop symmetrically with complexion container 5,9, owing to the difference of gaseous mass, will make differential pressure pressure transducer 7 two ends produce pressure reduction after the dividing potential drop, differential pressure pressure transducer 7 can detect this pressure reduction.According to the pressure reduction that above-mentioned two steps detection obtains, just can calculate the leak rate of measured piece 10.The common practice is to make pressure reduction and leakage rate corresponding relation curve map in advance, as shown in Figure 2, be that each enclosed article is when differential pressure is hunted leak, must be by the different leak rates of simulation measured piece, draw above-mentioned curve map as the foundation of judging that enclosed article is whether qualified, the pressure reduction alarming value of unacceptable product correspondence when the pressure reduction permissible value of certified products correspondence and big leak rate detect when setting little leak rate and detecting.Solid line S-DET is the little leak rate curve when detecting among Fig. 2; Dotted line L-DET is the big leak rate curve when detecting.Generally when little leak rate detected, along with the increase of measured piece 10 leak rates, the pressure reduction of measuring also increased gradually; But measured piece 10 leak rates increase to after the certain numerical value, detected pressure reduction does not only increase on the contrary and diminishes, shown in the block curve among Fig. 2, promptly corresponding certain detected pressure reduction, the leak rate of measured piece 10 has two to separate, and this is because system just begins to have the gas cause of measured piece 10 of bleeding from inflation.When big leak rate detected, differential pressure pressure transducer 7 had pressure reduction to show, illustrates that measured piece 10 has leakage, but measures pressure reduction, and product might not be just defective.For example the permission leak rate of measured piece is 1 * 10 -4Pa.m 3/ s, when little leak rate detected, detected pressure reduction was equivalent to 310Pa, and the pressure reduction of 310Pa is also possible corresponding one 4 * 10 simultaneously -4Pa.m 3/ s than gross leak.If really there is one 4 * 10 -4Pa.m 3The big leakage of/s when doing that second step, big leak rate detected, just should have the pressure reduction demonstration of 460Pa (on little leak rate detection curve, to find 310Pa and 4 * 10 -4Pa.m 3The intersection point of/s is up done perpendicular line then and is intersected with big leak rate detection curve, is the crossing 460Pa that obtains of horizontal line and axis of ordinates then).So when big leak rate detected, pressure reduction was greater than 460Pa the time, just talkative product is defective.Under different leakage detecting instruments, different measured pieces, the different test condition, even identical leak rate, the pressure reduction that produces is also unequal, behind condition changings such as test pressure, pressurising time, little leak rate detection time and big leak rate detection time, need repaint pressure reduction and leakage rate corresponding relation curve map.

Be certain sealed relay of hunting leak, form this leakage detection apparatus, the solenoid valve of the Japanese SMC of equalizer valve 2 employings company, model VT317 by structure of the present utility model; First equalizing valve 3, second equalizing valve 4 all adopt the Pneumatic valve of Japanese FUKUDA company, model AV32B-040-NO; First leak rate detects valve 6, second largest leak rate and detects the Pneumatic valve that valve 8 all adopts Japanese FUKUDA company, model AV32B-040-NO; The differential pressure pressure transducer of the Japanese FUKUDA of differential pressure pressure transducer 7 employings company, model VR-55; The first complexion container 5, the second complexion container 9 adopt the copper materials self-control, and its volume is identical and deduct the volume of this relay for the volume of measured piece airtight container 11; The volume of measured piece airtight container 11, standard airtight container 13 equates, also adopts the copper material self-control, can put into this relay fully to get final product.The selection test pressure is 100kPa, pressurising time to be that 15 seconds, little leak rate are that 10 seconds, big leak rate detection time are 1 second detection time.Testing result is: the detected pressure reduction of little leak rate is that 2Pa, the big detected pressure reduction of leak rate are 1Pa, and promptly this relay does not leak.

Claims (1)

1. enclosed article leakage detection apparatus, by source of the gas, equalizer valve, first equalizing valve, second equalizing valve, the differential pressure pressure transducer, standard, the standard airtight container, measured piece is formed with the measured piece airtight container and is linked to each other by gas path pipe, first equalizing valve wherein, the pipeline and second equalizing valve that measured piece and measured piece airtight container constitute, the pipeline that standard and standard airtight container constitute is in parallel and link to each other with the differential pressure pressure transducer respectively, it is characterized in that: at first equalizing valve, first leak rate is set on the pipeline that measured piece and measured piece airtight container constitute detects the valve and the first complexion container; Second largest leak rate is set on the pipeline that second equalizing valve, standard and standard airtight container constitute detects the valve and the second complexion container; The volume of first, second complexion container equates and deducts for the volume of measured piece airtight container the volume of measured piece; The measured piece airtight container equate with the volume of standard airtight container and can put into measured piece, standard gets final product.
CNU2007200971114U 2007-08-16 2007-08-16 Apparatus for detecting leakage of sealing article CN201075051Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007200971114U CN201075051Y (en) 2007-08-16 2007-08-16 Apparatus for detecting leakage of sealing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007200971114U CN201075051Y (en) 2007-08-16 2007-08-16 Apparatus for detecting leakage of sealing article

Publications (1)

Publication Number Publication Date
CN201075051Y true CN201075051Y (en) 2008-06-18

Family

ID=39520310

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007200971114U CN201075051Y (en) 2007-08-16 2007-08-16 Apparatus for detecting leakage of sealing article

Country Status (1)

Country Link
CN (1) CN201075051Y (en)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288365A (en) * 2011-08-10 2011-12-21 苏州凌创电子系统有限公司 Leak test device
CN101701864B (en) * 2009-12-04 2012-05-23 天津市塑料研究所 Rheid leakage testing device
CN101738296B (en) * 2008-11-17 2013-06-19 北京卫星环境工程研究所 Method for detecting leakage of spacecraft cabin by differential pressure
CN103308254A (en) * 2013-05-06 2013-09-18 浙江银轮机械股份有限公司 Dry test method and dry test device for testing leak tightness of oil cooler
CN103364156A (en) * 2013-07-13 2013-10-23 中建钢构江苏有限公司 Multifunctional gas-tightness detecting device
CN105675235A (en) * 2016-03-16 2016-06-15 湖南科技大学 Container leakage detection device and method
CN105699026A (en) * 2016-01-22 2016-06-22 上海严复制药系统工程有限公司 Sealing test system and method
CN105935662A (en) * 2016-03-31 2016-09-14 珠海格力新元电子有限公司 Detecting equipment and method for online sealing property of thin-film capacitor
CN106040602A (en) * 2016-08-02 2016-10-26 苏州高通机械科技有限公司 Detection device for screening products
CN106040603A (en) * 2016-08-08 2016-10-26 苏州高通机械科技有限公司 Detection device for screening products
CN106076870A (en) * 2016-08-02 2016-11-09 苏州高通机械科技有限公司 Separate qualified products and the detector of substandard product
CN106269552A (en) * 2016-08-08 2017-01-04 苏州高通机械科技有限公司 Separate qualified products and the detector of substandard product
CN106441734A (en) * 2016-10-11 2017-02-22 重庆航天机电设计院 Sealing detection method and sealing detection equipment based on dry comparison method
CN108534963A (en) * 2018-03-16 2018-09-14 昆山丘钛微电子科技有限公司 A kind of water proofing property detection method and system
CN109060271A (en) * 2018-09-17 2018-12-21 昆山睿力得软件技术有限公司 A kind of car light air-tightness detection device
CN109060272A (en) * 2018-09-17 2018-12-21 昆山睿力得软件技术有限公司 A kind of car light air tightness detection equipment
CN109540408A (en) * 2017-09-21 2019-03-29 青海时代新能源科技有限公司 Air-tightness detection method and device
CN109556809A (en) * 2019-01-14 2019-04-02 中国工程物理研究院机械制造工艺研究所 A kind of indestructive leakage-check method and device based on differential pressure principle
CN109883616A (en) * 2019-03-28 2019-06-14 中国石油化工股份有限公司 A kind of shield grease special measuring of resistance to water tightness instrument and test method

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101738296B (en) * 2008-11-17 2013-06-19 北京卫星环境工程研究所 Method for detecting leakage of spacecraft cabin by differential pressure
CN101701864B (en) * 2009-12-04 2012-05-23 天津市塑料研究所 Rheid leakage testing device
CN102288365A (en) * 2011-08-10 2011-12-21 苏州凌创电子系统有限公司 Leak test device
CN103308254A (en) * 2013-05-06 2013-09-18 浙江银轮机械股份有限公司 Dry test method and dry test device for testing leak tightness of oil cooler
CN103308254B (en) * 2013-05-06 2016-04-13 浙江银轮机械股份有限公司 A kind of oil cooler dry test method for testing leak tightness and device thereof
CN103364156A (en) * 2013-07-13 2013-10-23 中建钢构江苏有限公司 Multifunctional gas-tightness detecting device
CN103364156B (en) * 2013-07-13 2015-07-29 中建钢构江苏有限公司 Multi-usage air-tightness detection device
CN105699026A (en) * 2016-01-22 2016-06-22 上海严复制药系统工程有限公司 Sealing test system and method
CN105675235A (en) * 2016-03-16 2016-06-15 湖南科技大学 Container leakage detection device and method
CN105935662B (en) * 2016-03-31 2018-11-30 珠海格力新元电子有限公司 Thin-film capacitor work seal detection device and detection method
CN105935662A (en) * 2016-03-31 2016-09-14 珠海格力新元电子有限公司 Detecting equipment and method for online sealing property of thin-film capacitor
CN106040602A (en) * 2016-08-02 2016-10-26 苏州高通机械科技有限公司 Detection device for screening products
CN106076870A (en) * 2016-08-02 2016-11-09 苏州高通机械科技有限公司 Separate qualified products and the detector of substandard product
CN106269552A (en) * 2016-08-08 2017-01-04 苏州高通机械科技有限公司 Separate qualified products and the detector of substandard product
CN106040603A (en) * 2016-08-08 2016-10-26 苏州高通机械科技有限公司 Detection device for screening products
CN106441734A (en) * 2016-10-11 2017-02-22 重庆航天机电设计院 Sealing detection method and sealing detection equipment based on dry comparison method
CN109540408A (en) * 2017-09-21 2019-03-29 青海时代新能源科技有限公司 Air-tightness detection method and device
CN108534963A (en) * 2018-03-16 2018-09-14 昆山丘钛微电子科技有限公司 A kind of water proofing property detection method and system
CN109060271A (en) * 2018-09-17 2018-12-21 昆山睿力得软件技术有限公司 A kind of car light air-tightness detection device
CN109060272A (en) * 2018-09-17 2018-12-21 昆山睿力得软件技术有限公司 A kind of car light air tightness detection equipment
CN109556809A (en) * 2019-01-14 2019-04-02 中国工程物理研究院机械制造工艺研究所 A kind of indestructive leakage-check method and device based on differential pressure principle
CN109883616A (en) * 2019-03-28 2019-06-14 中国石油化工股份有限公司 A kind of shield grease special measuring of resistance to water tightness instrument and test method

Similar Documents

Publication Publication Date Title
CN104266803B (en) Air tightness detecting system and airtight detection method
CN202008429U (en) Air tightness detector
CN101799349B (en) Device and method for detecting sealing property of sealing component
ES2638793T3 (en) Methods and systems for leak testing
CN102384825B (en) Air tightness detection device for gate valve
CN102269641B (en) Soft package article device for detecting sealability and detection method
DE102012200063A1 (en) Procedure for leak detection on a non-rigid specimen
CN101957294B (en) Saving type valve low temperature test system
CN203908741U (en) Leakage detection device
CN202793702U (en) Evacuating and pressurizing device for helium mass spectrometer leak detection
CN103712744B (en) Positive step force pilot system
CN101470016B (en) Apparatus for measuring volume by built-in method
CN103149118A (en) Carbonaceous shale isothermal adsorption/desorption experimental device
US20090277249A1 (en) Method and device for determining the quality of seal of a test object
CN205826241U (en) Air-tightness detection device
CN204314032U (en) High-temperature pipe flange compactedness test macro
CN103837311A (en) Method and device for detecting internal leakage of multi-cavity valve
CN201532292U (en) Pneumatic circuit of multifunctional gas-tightness detector
CN102494741B (en) Static sampling introduction device and method of calibrating pressure leak hole
CN103207054A (en) High temperature structure sealing performance ground-based simulation testing device and method
CN204924590U (en) A pressurization - evacuation experimental apparatus for leak hunting of helium mass spectrum
CN203643083U (en) Low temperature pressure sensor automatic calibration device
CN203043861U (en) Standard gas distribution device
CN101738296B (en) Method for detecting leakage of spacecraft cabin by differential pressure
JP2006177810A (en) Inspection device and inspection method

Legal Events

Date Code Title Description
GR01 Patent grant
C14 Grant of patent or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080618

Termination date: 20150816

EXPY Termination of patent right or utility model