CN201044553Y - Thermal control system of air-cooled microgroove group and thermoelectric combined laser - Google Patents
Thermal control system of air-cooled microgroove group and thermoelectric combined laser Download PDFInfo
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Abstract
本实用新型风冷式微槽群与热电组合激光器热控制系统涉及一种激光器器件的散热与热控制装置。它包括抽真空的微槽群蒸发器、蒸汽保温软管、冷凝器、热电致冷器、散热板、风扇、回液软管、导液微槽连接器。液体工质被吸入到微槽群蒸发器的蒸发微槽群中受热蒸发和沸腾,蒸汽通过蒸汽保温软管流入冷凝器中,并在冷凝器外壁上的热电致冷器的作用下,在冷凝器的凝结微槽中凝结放热。热电致冷器在进行温度控制的同时,将热量由其热面传导到散热板上,通过风扇的风冷最终将热量散失到外界中去;同时,冷凝器中的凝结液通过回液软管和导液微槽连接器流回到微槽群蒸发器中,从而完成一个取热和放热循环,达到使激光器器件冷却和进行热控制的目的。
The utility model relates to a thermal control system for an air-cooled microgroove group and a thermoelectric combined laser, which relates to a heat dissipation and thermal control device for a laser device. It includes vacuumized micro-groove group evaporator, steam insulation hose, condenser, thermoelectric cooler, heat sink, fan, liquid return hose, and liquid-conducting micro-groove connector. The liquid working medium is sucked into the evaporation micro-groove group of the micro-groove evaporator, evaporated and boiled under heat, and the steam flows into the condenser through the steam insulation hose, and is condensed under the action of the thermoelectric cooler on the outer wall of the condenser. Condensation releases heat in the condensation microgroove of the device. While controlling the temperature, the thermoelectric cooler conducts heat from its hot surface to the radiator plate, and finally dissipates the heat to the outside through the air cooling of the fan; at the same time, the condensate in the condenser passes through the liquid return hose And the fluid guide microgroove connector flows back to the microgroove group evaporator, thus completing a heat extraction and heat release cycle to achieve the purpose of cooling the laser device and performing thermal control.
Description
技术领域 technical field
本实用新型涉及冷却技术领域,是一种激光器器件、电子电气元器件和其它光电子器件的散热与热控制系统,特别是应用于各种小尺寸的、大功率的激光器器件、电子电气元器件和其它光电子器件的终极热沉采用强制风冷散热的毛细微槽群与热电致冷器(TEC)组合热控制系统。The utility model relates to the technical field of cooling, which is a heat dissipation and thermal control system for laser devices, electronic and electrical components and other optoelectronic devices, especially for various small-sized, high-power laser devices, electronic and electrical components and The ultimate heat sink for other optoelectronic devices adopts a combined thermal control system of capillary microgroove group and thermoelectric cooler (TEC) for forced air cooling.
背景技术 Background technique
大功率激光器是高精度机械加工必不可少的设备,是重要的武器装备,在激光加工、信息和军事等领域中有着广泛而重大的应用价值。然而激光器的激光输出功率的提高受到激光器散热性能与热控制性能优劣的严重制约。一般的闪光泵浦源激光器只有5%的输入能量可转变为激光输出,余者都要转变为热能和其他形式的能量,如输入1kw的电能,只有50w激光输出,而散热要达到900w左右。目前许多高性能大功率激光器器件的发热热流密度都大于106w/m2以上,因此能否解决好散热是大功率激光器发展的关键技术之一。另外一方面,提高激光器的功率除了散热问题外,还必须实现对部件的温度控制。避免激光工作介质的热效应引起光束质量及效率下降。例如,由于激光器工作时激光晶体的温度将升高,如果不进行控制,会引起工作物质发光特性发生变化,激光波长发生偏移,导致激光器阈值升高,效率和激光质量降低。另外,在激光器工作时,激光器器件温度分布的不均匀,将形成温度梯度,温度梯度的存在会使激光介质内部形成折射率梯度和应力分布,引起激光束产生聚焦P双折射和退偏振等热效应,从而降低激光器的光束质量和功率水平。因而在保证散热效果的基础上对激光器实施可靠的热控制手段同样至关重要。以上所述的激光器的散热和热控制问题可以归纳为激光技术中的热管理技术问题,是大功率激光器发展的瓶颈,必须加以解决。目前常规的方法是对器件进行空气或者液体冷却,但这些常规冷却技术根本无法解决上面提出的问题,必须采用新的冷却技术才能满足要求。High-power lasers are essential equipment for high-precision machining and important weapons and equipment. They have extensive and significant application values in laser processing, information and military fields. However, the improvement of the laser output power of the laser is severely restricted by the heat dissipation performance and thermal control performance of the laser. Generally, only 5% of the input energy of a general flash pump source laser can be converted into laser output, and the rest must be converted into heat energy and other forms of energy. For example, if 1kw of electric energy is input, only 50w of laser output is available, and the heat dissipation needs to reach about 900w. At present, the heating heat flux of many high-performance and high-power laser devices is greater than 10 6 w/m 2 , so whether heat dissipation can be solved is one of the key technologies for the development of high-power lasers. On the other hand, in addition to the problem of heat dissipation, increasing the power of the laser must also realize the temperature control of the components. Avoid the thermal effect of the laser working medium causing the beam quality and efficiency to decline. For example, because the temperature of the laser crystal will rise when the laser is working, if it is not controlled, it will cause changes in the luminescence characteristics of the working substance, and the laser wavelength will shift, resulting in an increase in the laser threshold, and a decrease in efficiency and laser quality. In addition, when the laser is working, the uneven temperature distribution of the laser device will form a temperature gradient. The existence of the temperature gradient will cause a refractive index gradient and stress distribution inside the laser medium, causing the laser beam to produce thermal effects such as focusing P birefringence and depolarization. , thereby reducing the beam quality and power level of the laser. Therefore, it is also very important to implement a reliable thermal control method for the laser on the basis of ensuring the heat dissipation effect. The above-mentioned heat dissipation and thermal control problems of lasers can be summarized as thermal management technical problems in laser technology, which is the bottleneck of the development of high-power lasers and must be solved. The current conventional method is to cool the device by air or liquid, but these conventional cooling technologies cannot solve the above-mentioned problems at all, and new cooling technologies must be used to meet the requirements.
另外,随着大规模集成电路(LSI)的发展,高集成度的电子电气元器件的体积发热热流密度的增大趋势非常迅猛。热量的累积将导致器件温度迅速升高,轻则使电子电气元器件功能丧失,重则器件被烧毁,整个电子设备崩溃。因此,配置强有力的散热与热控制系统对维持电子电气元器件的正常运行也至关重要。In addition, with the development of large-scale integrated circuits (LSI), the volume heating heat flux of highly integrated electronic and electrical components is increasing rapidly. The accumulation of heat will cause the temperature of the device to rise rapidly, which may cause the function of electronic and electrical components to be lost, or the device will be burned, and the entire electronic device will collapse. Therefore, it is also crucial to configure a strong heat dissipation and thermal control system to maintain the normal operation of electronic and electrical components.
目前,应用于激光器器件、电子电气元器件和其它光电子器件的散热与热控制方法主要有以下几种。At present, the heat dissipation and thermal control methods applied to laser devices, electronic and electrical components and other optoelectronic devices mainly include the following types.
(1)直接强制风冷(1) Direct forced air cooling
利用风扇进行直接强制气冷是目前使用最广泛的激光器器件、电子电气元器件和其它光电子器件的散热方式。通常利用铝或铜制散热片增加对流面积,再以风扇进行强制对流气冷而达到散热的效果。散热片的设计与风扇的配合决定了该方式散热效果的好坏。特点:装置简单,成本较低。其换热系数大致在20~100W/(m2·℃)之间。该种散热方式效率低、噪音大、功耗高、需占用较大的空间,热控制性能差,单独应用到小尺寸的大功率器件时该方式的散热能力不足。如用于个人电脑CPU散热的强制空气冷却方式,目前最多能处理60W的CPU芯片热量。其散热片与风扇的组合已接近极限负荷的状态。Direct forced air cooling using fans is currently the most widely used heat dissipation method for laser devices, electronic and electrical components and other optoelectronic devices. Aluminum or copper heat sinks are usually used to increase the convection area, and then fans are used for forced convection air cooling to achieve the effect of heat dissipation. The design of the heat sink and the cooperation of the fan determine the quality of the cooling effect of this method. Features: Simple device and low cost. Its heat transfer coefficient is roughly between 20~100W/(m 2 ·℃). This heat dissipation method has low efficiency, high noise, high power consumption, requires a large space, and poor thermal control performance. When applied to small-sized high-power devices alone, the heat dissipation capability of this method is insufficient. For example, the forced air cooling method used for CPU cooling of personal computers can handle up to 60W of CPU chip heat at present. The combination of its heat sink and fan is close to the state of the limit load.
(2)常规尺寸的液体单相直接强制对流冷却(2) Liquid single-phase direct forced convection cooling of conventional sizes
常规尺寸的液体单相强制对流冷却,是一种被证明了的可靠的传统冷却技术。该冷却方式利用冷却液、导热部件、泵、阀以及连通的循环管路,通过液体的单相强制对流换热方式将发热器件产生的热量,由流通于管路中的液体,携带转移到外部环境中去,以达到降低发热器件温度的效果。其对流换热系数的大致范围为1000~15000W/(m2·℃)。冷却较大功率的激光器器件、电子电气元器件和其它光电子器件其所耗泵功率也较大。其主要缺陷是热控制性能较差,装置复杂,必须克服水循环时的压降,管路易泄漏,易造成电路绝缘等级降低甚至短路等事故,密封性要求非常高。Conventional size liquid single phase forced convection cooling is a proven and reliable conventional cooling technique. This cooling method uses cooling liquid, heat-conducting components, pumps, valves, and connected circulation pipelines to carry and transfer the heat generated by the heating device to the outside by the liquid circulating in the pipeline through the single-phase forced convection heat exchange method of the liquid. In order to achieve the effect of reducing the temperature of the heating device. The approximate range of its convective heat transfer coefficient is 1000~15000W/(m 2 ·℃). Cooling higher power laser devices, electronic and electrical components and other optoelectronic devices consumes a lot of pump power. Its main disadvantages are poor thermal control performance, complex device, pressure drop during water circulation must be overcome, easy leakage of pipelines, easy to cause accidents such as lowered circuit insulation level or even short circuit, and the sealing requirements are very high.
(3)热管冷却(3) Heat pipe cooling
热管是目前已应用在一些激光器、电子电气和其它光电子设备中的一种较新的散热技术。发热元器件产生的热量使热管蒸发段的液体受热蒸发成蒸汽,蒸汽携带热量流向热管的冷凝段冷凝,再用冷却水或风扇对热管冷凝段进行强制液冷或风冷以带走热量。其主要优点在于:热控制性能好、传热能力强、等温性高、具有热流密度变换能力等。但是,普通热管由于蒸汽和液体处于同一空间,易产生挟带现象,使凝结液回流减少,造成蒸发段管壁温突然上升,使热管损毁或失效。一般来讲,氨水热管的散热能力低于6W/cm2,水热管的散热能力在25~100W/cm2之间。另外,由于热管管径较小,热管冷凝段冷凝面积有限,总凝结换热量很小,因而,尽管热管冷凝段的外管壁上布置有大量散热肋片,但热管的总散热量非常有限,难以满足小尺寸、大功率的电子、光电子和电气元器件的散热与热控制要求。Heat pipe is a relatively new heat dissipation technology that has been applied in some lasers, electronic appliances and other optoelectronic devices. The heat generated by the heating element causes the liquid in the evaporating section of the heat pipe to be heated and evaporated into steam, and the steam carries heat to flow to the condensing section of the heat pipe to condense, and then the condensing section of the heat pipe is forced to be liquid-cooled or air-cooled by cooling water or a fan to take away the heat. Its main advantages are: good thermal control performance, strong heat transfer capability, high isothermal performance, and heat flux conversion capability. However, because the steam and liquid are in the same space in ordinary heat pipes, it is easy to produce entrainment phenomenon, which reduces the reflux of condensate, causes the wall temperature of the evaporation section to rise suddenly, and damages or fails the heat pipe. Generally speaking, the heat dissipation capacity of the ammonia water heat pipe is lower than 6W/cm 2 , and the heat dissipation capacity of the water heat pipe is between 25-100W/cm 2 . In addition, due to the small diameter of the heat pipe, the condensation area of the condensation section of the heat pipe is limited, and the total condensation heat transfer is very small. Therefore, although a large number of cooling ribs are arranged on the outer tube wall of the condensation section of the heat pipe, the total heat dissipation of the heat pipe is very limited. , it is difficult to meet the heat dissipation and thermal control requirements of small-sized, high-power electronics, optoelectronics and electrical components.
(4)热电致冷(Thermoelectric Cooling)(4) Thermoelectric Cooling
热电致冷利用的是温差电效应(Peltier效应)。即当电流流经两个不同导体形成的接点时,接点处会产生放热和吸热现象。现在应用的热电材料多以掺杂Bi、Te半导体合金材料为主。因而热电冷却技术也被称为半导体冷却技术。热电致冷器的优点是没有滑动部件,应用在一些空间受到限制,可靠性要求高,无致冷剂污染的场合,可实现高精度的温度控制,热惯性非常小,致冷时间快。但由于受材料的限制,目前常规半导体致冷器的尺寸仍不够小,致冷效率不够高,散热热流密度低于10W/cm2的数量级。如单独使用,则无法满足小尺寸、大功率的激光器器件、电子电气元器件和其它光电子器件的散热与热控制要求。Thermoelectric cooling utilizes the thermoelectric effect (Peltier effect). That is, when the current flows through the joint formed by two different conductors, heat release and heat absorption will occur at the joint. Most of the thermoelectric materials currently used are doped Bi and Te semiconductor alloy materials. Therefore, thermoelectric cooling technology is also called semiconductor cooling technology. The advantage of the thermoelectric cooler is that it has no sliding parts, and it can be used in some occasions where the space is limited, the reliability is high, and there is no refrigerant pollution. It can achieve high-precision temperature control, very small thermal inertia, and fast cooling time. However, due to the limitation of materials, the size of conventional semiconductor refrigerators is still not small enough, the cooling efficiency is not high enough, and the heat dissipation heat flux density is lower than the order of 10W/cm 2 . If used alone, it cannot meet the heat dissipation and thermal control requirements of small-sized, high-power laser devices, electronic and electrical components, and other optoelectronic devices.
实用新型内容Utility model content
本实用新型的目的在于:解决现有散热技术存在的效率低、需占用较大的激光器、电子电气和其它光电子系统的有限功能空间、散热能力不足、热控制性能差的技术缺陷;从而提供一种无功耗的、微小面积的、高热流密度的取热模式,同时,满足发热元器件的低于环境温度的工作温度要求、能对发热元器件进行高精度温度控制和具有强散热能力的终极热沉采用强制风冷散热的毛细微槽群与热电致冷器(TEC)组合热控制系统。The purpose of this utility model is to: solve the technical defects of low efficiency existing in the existing heat dissipation technology, need to occupy relatively large lasers, limited functional space of electronic and electrical and other optoelectronic systems, insufficient heat dissipation capacity, and poor thermal control performance; thus providing a A heat extraction mode with no power consumption, small area, and high heat flux density. At the same time, it meets the operating temperature requirements of the heating components below the ambient temperature, and can perform high-precision temperature control on the heating components and has strong heat dissipation capabilities. The ultimate heat sink adopts a combined thermal control system of capillary microgroove group and thermoelectric cooler (TEC) for forced air cooling.
本实用新型的目的是这样实现的:The purpose of this utility model is achieved in that:
一种风冷式微槽群与热电组合激光器热控制系统,包括:微槽群蒸发器(3)、软管、冷凝器(6)、热电致冷器(7)、散热板(8)、风扇(9)、导液微槽连接器(11);其中,蒸发器(3)为一抽真空的空腔,且其内灌注少量液体工质,微槽群蒸发器(3)的一外表面与发热元器件或其次热沉(1)外表面紧贴相连,在微槽群蒸发器(3)接受发热元器件发热量的受热内表面上设有多数个开放式毛细微槽道,形成蒸发微槽群(2),用以将液体工质吸入到微槽中并使其发生高强度蒸发和沸腾变成蒸汽;其特征在于,还包括在微槽群蒸发器(3)的顶面上设有至少一个蒸汽出口(15),蒸汽出口(15)所在的微槽群蒸发器(3)的内壁面上设置有纵横交错的微槽(4),用来将蒸汽出口处的冷凝液迅速拉离蒸汽出口位置,避免冷凝液对蒸汽出口的堵塞,蒸发器(3)的下端与导液微槽连接器(10)的上端连通;至少一根保温软管(5)的一端与微槽群蒸发器(3)的蒸汽出口(15)相连,另一端与冷凝器(6)的蒸汽进口相接,蒸汽从微槽群蒸发器(3)的蒸汽出口(15)处流出,通过保温软管(5)由冷凝器(6)的蒸汽进口处流入冷凝器(6)中;冷凝器(6)为一抽真空的空腔,其上端有至少一个蒸汽进口,该冷凝器(6)的空腔内壁纵向分布多数个开放式凝结微槽(14),空腔内底部设置有斜坡面(13),斜坡面(13)上沿斜坡长度方向布置有多数个导流微槽(12),用以迅速收集凝结液,斜坡面(13)底端有至少一个凝结液出口;在冷凝器(6)的两侧外壁面上分别设置至少一个热电致冷器(7),每个热电致冷器(7)的冷面通过焊接或用导热性能好的粘合剂或导热硅脂与冷凝器(6)外表面紧密接触,热电致冷器(7)的热面则通过焊接或用导热性能好的粘合剂或导热硅脂与有肋片群的散热板(8)紧密接触,在热电致冷器(7)的作用下,蒸汽在冷凝器(6)的开放式凝结微槽(14)中凝结成凝结液并放热;热电致冷器将蒸汽在冷凝器(6)的开放式凝结微槽(14)中凝结所释放的热量以及自身产生的热量通过热电致冷器(7)的热面传导到散热板(8)上,在散热板(8)的顶部设有风扇(9),通过风扇的风冷,热量最终被散失到外界中去,而凝结液则经冷凝器(6)底部的斜坡面(13)被迅速汇集到冷凝器(6)的凝结液出口处;冷凝器(6)的凝结液出口与至少一根回液软管(10)的一端相连,回液软管(10)的另一端与至少有一个进液口的导液微槽连接器(11)的进液口相接,导液微槽连接器(11)为带状,其内设有多数根并行紧密排列的微管,微管上端与微槽群蒸发器(3)中的蒸发微槽群(2)相连通,下端与回液软管(10)相连通。冷凝器(6)的凝结液出口处的凝结液通过回液软管(10)和导液微槽连接器(11)最终流回到微槽群蒸发器(3)中,系统从而完成一个取热和放热的循环,达到使发热的激光器器件冷却和对其进行热控制的目的。An air-cooled micro-groove group and thermoelectric combination laser thermal control system, including: micro-groove group evaporator (3), hose, condenser (6), thermoelectric cooler (7), cooling plate (8), fan (9), liquid-conducting microgroove connector (11); wherein, the evaporator (3) is a vacuumized cavity, and a small amount of liquid working medium is poured into it, and an outer surface of the microgroove group evaporator (3) It is closely connected with the outer surface of the heating element or the second heat sink (1), and a plurality of open capillary channels are arranged on the heated inner surface of the microgroove group evaporator (3) to receive the heat generated by the heating element to form an evaporation The microgroove group (2) is used to suck the liquid working substance into the microgroove and make it undergo high-intensity evaporation and boiling to become steam; it is characterized in that it also includes the top surface of the microgroove group evaporator (3) Be provided with at least one steam outlet (15), the inner wall of the microgroove group evaporator (3) where the steam outlet (15) is located is provided with criss-cross microgrooves (4), used for the condensate at the steam outlet Pull away from the position of the steam outlet to avoid the blockage of the condensate on the steam outlet. The lower end of the evaporator (3) communicates with the upper end of the liquid guide micro-groove connector (10); one end of at least one insulation hose (5) is connected to the micro-groove The steam outlet (15) of the group evaporator (3) is connected, and the other end is connected with the steam inlet of the condenser (6). The steam flows out from the steam outlet (15) of the microgroove group evaporator (3), and is passed The pipe (5) flows into the condenser (6) from the steam inlet of the condenser (6); the condenser (6) is a vacuumized cavity with at least one steam inlet at its upper end, and the condenser (6) A plurality of open coagulation microgrooves (14) are longitudinally distributed on the inner wall of the cavity, a slope surface (13) is arranged on the bottom of the cavity, and a plurality of diversion microgrooves (12) are arranged on the slope surface (13) along the length direction of the slope, In order to quickly collect condensate, there is at least one condensate outlet at the bottom of the slope surface (13); at least one thermoelectric cooler (7) is respectively arranged on the outer walls of both sides of the condenser (6), and each thermoelectric cooler The cold surface of the condenser (7) is in close contact with the outer surface of the condenser (6) by welding or using an adhesive with good thermal conductivity or heat-conducting silicone grease, and the hot surface of the thermoelectric cooler (7) is welded or using heat-conducting silicone grease. A good adhesive or heat-conducting silicone grease is in close contact with the heat dissipation plate (8) of the rib group, and under the action of the thermoelectric cooler (7), the steam condenses in the open microgroove (14) of the condenser (6). ) condenses into condensate and releases heat; the thermoelectric cooler condenses the steam in the open condensation microgroove (14) of the condenser (6), and the heat released and the heat generated by itself pass through the thermoelectric cooler (7) The heat surface of the radiator is conducted to the radiator plate (8), and a fan (9) is installed on the top of the radiator panel (8). Through the air cooling of the fan, the heat is finally dissipated to the outside world, and the condensate is passed through the condenser ( 6) The slope surface (13) at the bottom is quickly collected at the condensate outlet of the condenser (6); the condensate outlet of the condenser (6) is connected to one end of at least one liquid return hose (10), and the liquid return The other end of the flexible pipe (10) is connected with the liquid inlet of the liquid guide microgroove connector (11) having at least one liquid inlet. Microtubes closely arranged in parallel, the upper end of the microtubes communicate with the evaporation microgroove group (2) in the microgroove group evaporator (3), and the lower end communicates with the liquid return hose (10). The condensate at the condensate outlet of the condenser (6) finally flows back to the microgroove group evaporator (3) through the liquid return hose (10) and the liquid guide microgroove connector (11), and the system thus completes a extraction process. The cycle of heat and heat release achieves the purpose of cooling and thermally controlling the heat-generating laser device.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述微槽群蒸发器(3)由导热金属材料制成,其内部受热壁面上设置的蒸发微槽道(2)横截面为矩形、三角形或梯形,该微槽道纵向分布排列,槽道的宽度和深度均在0.01-1mm范围内,微槽道之间的间距在0.01-1mm范围内,在微槽群蒸发器(3)的蒸汽出口(15)所在壁面上密布纵横交错的微槽(4),其横截面为矩形、三角形、梯形、U形几何形状,纵向和横向微槽的宽度和深度在0.01一1mm范围内,微槽道之间的间距在0.01一1mm范围内。In the thermal control system of the air-cooled micro-groove group and thermoelectric combined laser, the micro-groove group evaporator (3) is made of heat-conducting metal material, and the cross-section of the evaporation micro-groove (2) arranged on the inner heated wall surface is Rectangular, triangular or trapezoidal, the microchannels are distributed longitudinally, the width and depth of the channels are in the range of 0.01-1mm, the spacing between the microchannels is in the range of 0.01-1mm, in the microgroove group evaporator ( 3) The wall where the steam outlet (15) is located is densely covered with criss-cross microgrooves (4), the cross-section of which is rectangular, triangular, trapezoidal, or U-shaped, and the width and depth of the longitudinal and transverse microgrooves are in the range of 0.01 to 1 mm. Inside, the distance between the micro-channels is in the range of 0.01-1mm.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述冷凝器(6)由导热金属材料制成;冷凝器(6)内壁纵向密布有许多开放式凝结微槽(14),凝结微槽(14)的横截面为梯形、三角形或波浪形,凝结微槽(14)的宽度和深度在0.01-10mm范围内,凝结微槽(14)之间的间距在0.01-20mm范围内;冷凝器(6)的外表面为光滑平坦表面。In the thermal control system of the air-cooled micro-groove group and thermoelectric combined laser, the condenser (6) is made of a heat-conducting metal material; the inner wall of the condenser (6) is densely covered with many open condensation micro-grooves (14) longitudinally, The cross-section of the coagulation microgrooves (14) is trapezoidal, triangular or wavy, the width and depth of the coagulation microgrooves (14) are in the range of 0.01-10mm, and the spacing between the coagulation microgrooves (14) is in the range of 0.01-20mm ; The outer surface of the condenser (6) is a smooth flat surface.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述冷凝器(6)空腔内底部斜坡面上的矩形导流微槽道(12)的宽度和深度均在0.01-1mm范围内,微槽道之间的间距在0.01-1mm范围内。In the thermal control system of the air-cooled micro-groove group and thermoelectric combined laser, the width and depth of the rectangular guide micro-groove (12) on the bottom slope surface in the cavity of the condenser (6) are both 0.01-1mm In the range, the distance between the micro channels is in the range of 0.01-1 mm.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述导液微槽连接器(11)内的多数根并行紧密排列的微管,其单根微管内径大小在0.01-2mm的范围内,由塑料软管或软金属或能任意弯曲的材料制成。In the thermal control system of the air-cooled microgroove group and thermoelectric combined laser, the plurality of microtubes arranged in parallel and closely arranged in the fluid-conducting microgroove connector (11) have an inner diameter of 0.01-2mm It is made of plastic hose or soft metal or any material that can be bent freely.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述蒸汽保温软管(5)由能任意弯曲的材料制成,其内径在1-20mm的范围内。In the air-cooled microgroove group and thermoelectric combined laser thermal control system, the steam insulation hose (5) is made of arbitrarily bendable material, and its inner diameter is within the range of 1-20mm.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述回液软管(10)的内径在0.1-10mm的范围内,能形成毛细力驱动作用,由能任意弯曲的材料制成。In the thermal control system of the air-cooled microgroove group and thermoelectric combined laser, the inner diameter of the liquid return hose (10) is within the range of 0.1-10 mm, which can form a capillary force driving effect, and is made of a material that can be bent arbitrarily. become.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述回液软管(10)内沿管轴方向设有毛细芯,该毛细芯为单层或多层目数在50-450目之间的不锈钢或铜丝网芯。In the thermal control system of the air-cooled microgroove group and thermoelectric combined laser, the liquid return hose (10) is provided with a capillary core along the direction of the tube axis, and the capillary core is a single-layer or multi-layer mesh with a mesh size of 50- Stainless steel or copper mesh core between 450 mesh.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述热电致冷器(7)为利用热电效应(即Peltier效应)的一种片状半导体致冷装置,单个热电致冷器(7)的长度在1-500mm范围内,宽度在1-500mm范围内,厚度在0.5-100mm范围内,单个热电致冷器的最大致冷功率在0-500W范围内。In the thermal control system of the air-cooled microgroove group and thermoelectric combined laser, the thermoelectric cooler (7) is a chip-shaped semiconductor refrigeration device utilizing the thermoelectric effect (i.e. the Peltier effect), and a single thermoelectric cooler (7) The length is in the range of 1-500mm, the width is in the range of 1-500mm, the thickness is in the range of 0.5-100mm, and the maximum cooling power of a single thermoelectric cooler is in the range of 0-500W.
所述的风冷式微槽群与热电组合激光器热控制系统,其所述的有肋片群的散热板(8)上的单个肋片的高度在0.1-60mm的范围内,肋片厚度在0.1-10mm的范围内,肋片间距在0.1-10mm的范围内,所述的安装在散热板(8)顶部的风扇(9)的大小与散热板的外形尺寸相匹配,风扇功率在0.5-200W之间。In the thermal control system of the air-cooled microgroove group and thermoelectric combined laser, the height of a single fin on the heat sink (8) with the fin group is in the range of 0.1-60 mm, and the thickness of the fin is 0.1 mm. In the range of -10mm, the pitch of the ribs is in the range of 0.1-10mm, the size of the fan (9) installed on the top of the cooling plate (8) matches the external dimensions of the cooling plate, and the power of the fan is in the range of 0.5-200W between.
本实用新型的技术效果:Technical effect of the present utility model:
国内外的研究表明,微通道内的流动及传热的总体特性与大尺度通道内的结果有很大不同,微槽道内工质的蒸发和沸腾有着极高的强度,属于微空间尺度下的传热传质的超常现象,其相变蒸发热流密度的理论极限比目前大功率电子电气元器件例如高性能计算机芯片的最高发热热流密度还要高出约两个数量级,且传热过程具有很好的等温性,是一种高性能的冷却散热方式。另外,热电致冷器具有精确控温的特点,通过电流输入回馈计算,其冷端温度可以精确控制在±0.1℃以内。本实用新型中的本地取热元件(微槽群蒸发器3)由于采用了微槽道内工质的蒸发和沸腾换热原理,其尺寸可以小到与很小的激光器器件、电子电气元器件和其它光电子器件的发热面尺寸相匹配;本实用新型中的热量及流体输运器件采用了毛细泵两相抽吸回路原理,可以将本地取热元件所取的高热流密度的热量及时输运至远地。同时,本实用新型中的冷凝器布置在远离激光器、电子电气和其它光电子设备的功能系统以外的空间里,并且在冷凝器的外表面紧密粘贴着热电致冷器精确控制冷凝器外表面的温度。因此,本实用新型通过本地取热元件(微槽群蒸发器)、热量及流体输运器件、远程放热元件(冷凝器)、热电致冷器、散热板与风扇的组合可以将狭窄空间里尺寸微小的大功率激光器器件、电子电气元器件和其它光电子器件所产生的高热流密度的发热量及时地散失到异地的外界大环境空间里去,并且利用微槽群蒸发器的高强度、高等温能力的微尺度相变换热特性和热电致冷器的高精度温度控制特性实现对发热的激光器器件、电子电气元器件和其它光电子器件的温度控制。本实用新型无需像一些传统散热冷却方式那样,为强化对流换热冷却而必须在发热的激光器器件、电子电气元器件和其它光电子器件所处的有限空间里布置体积较大的肋片、电扇及相关散热与热控制部件,从而可以大幅度地节省激光器、电子电气和其它光电子设备系统的功能空间,实现整个散热系统的无功耗取热、远距离热输运、静音运行、高强度的散热冷却和对发热的激光器、电子电气和其它光电子设备进行高精度的远程热控制的目的。Studies at home and abroad have shown that the overall characteristics of flow and heat transfer in microchannels are very different from those in large-scale channels. The evaporation and boiling of working fluid in microchannels have extremely high intensity, which belongs to microspace scale The supernormal phenomenon of heat and mass transfer, the theoretical limit of the phase change evaporation heat flux is about two orders of magnitude higher than the current high-power electronic and electrical components such as high-performance computer chips. Good isothermal performance is a high-performance cooling and heat dissipation method. In addition, the thermoelectric cooler has the characteristics of precise temperature control. Through the current input feedback calculation, the temperature of the cold junction can be accurately controlled within ±0.1°C. The local heating element (micro-groove group evaporator 3) in the utility model adopts the principle of evaporation and boiling heat transfer of the working medium in the micro-groove, and its size can be as small as that of very small laser devices, electronic and electrical components and devices. The size of the heating surface of other optoelectronic devices matches; the heat and fluid transport device in the utility model adopts the principle of a two-phase suction circuit of a capillary pump, which can transport the heat of high heat flux taken by the local heating element to the far away. At the same time, the condenser in the utility model is arranged in a space away from the functional systems of lasers, electronic appliances and other optoelectronic equipment, and a thermoelectric cooler is closely attached to the outer surface of the condenser to accurately control the temperature of the outer surface of the condenser . Therefore, the utility model can combine the local heating element (micro-groove group evaporator), heat and fluid transport device, remote heat releasing element (condenser), thermoelectric cooler, cooling plate and fan in the narrow space. The high heat flux generated by tiny high-power laser devices, electronic and electrical components and other optoelectronic devices is dissipated in a timely manner to the external large environmental space in different places, and the high-intensity and high-efficiency of the microgroove group evaporator is used The micro-scale phase transformation thermal characteristics of temperature capability and the high-precision temperature control characteristics of thermoelectric coolers realize the temperature control of laser devices, electronic and electrical components and other optoelectronic devices that generate heat. The utility model does not need to arrange larger ribs, electric fans and other photoelectric devices in the limited space where the heat-generating laser devices, electronic and electrical components and other optoelectronic devices are located in order to strengthen convective heat transfer and cooling, as in some traditional cooling methods. Related heat dissipation and thermal control components, which can greatly save the functional space of lasers, electronic appliances and other optoelectronic equipment systems, and realize the heat extraction without power consumption, long-distance heat transport, silent operation, and high-intensity heat dissipation of the entire heat dissipation system Cooling and high-precision remote thermal control of heat-generating lasers, electronics, and other optoelectronic devices.
附图说明: Description of drawings:
图1是本实用新型中微槽群蒸发器中的蒸发微槽群的结构示意图;其中:Fig. 1 is the structural representation of the evaporation micro-groove group in the micro-groove group evaporator in the utility model; Wherein:
图1(a)蒸发微槽群表面;Fig. 1(a) surface of evaporation microgroove group;
图1(b)蒸发微槽群的微槽道剖面;Fig. 1 (b) microchannel profile of evaporation microgroove group;
图2是本实用新型中微槽群蒸发器内部蒸汽出口壁面上的纵横交错的微槽结构示意图;Fig. 2 is a schematic diagram of the criss-cross micro-groove structure on the internal steam outlet wall surface of the micro-groove group evaporator in the utility model;
图3是本实用新型中冷凝器及其内壁上凝结微槽结构示意图;其中:Fig. 3 is the structural representation of condensation microgroove on condenser and its inner wall in the utility model; Wherein:
图3(a)冷凝器的内部剖视图;Fig. 3 (a) internal sectional view of the condenser;
图3(b)竖直开放式梯形凝结微槽;Fig. 3 (b) vertical open trapezoidal coagulation microgroove;
图3(c)竖直开放式梯形凝结微槽道剖面;Fig. 3 (c) vertical open trapezoidal condensation microchannel profile;
图4是本实用新型中导液微槽连接器结构示意图;Fig. 4 is a structural schematic diagram of a liquid guiding microgroove connector in the utility model;
图5是本实用新型的风冷式微槽群与热电组合激光器热控制系统的结构示意图。Fig. 5 is a structural schematic diagram of the thermal control system of the air-cooled microgroove group and thermoelectric combined laser of the present invention.
具体实施方式 Detailed ways
本实用新型提供的终极热沉采用强制风冷散热的风冷式微槽群与热电组合激光器热控制系统,包括:一抽真空的空腔形成的蒸发器3,该蒸发器3的开放式微槽道设置在蒸发器空腔里的接受发热器件本身或发热器件的次热沉1的热量的受热内表面上,形成蒸发微槽群2;所述蒸发微槽群2的大小以适合形成毛细力,可将所述微槽道边的液体工质吸入到蒸发微槽群2内,如图1所示;其特征在于,还包括在蒸发器3的蒸汽出口15所在壁面设置纵横交错的微槽4,如图2所示;蒸发器3的进液口与导液微槽连接器11相连,如图4所示;以及一由导热金属材料制成的冷凝器6,该冷凝器6的内壁纵向分布开放式凝结微槽14,和内腔布置有迅速收集凝结液的斜坡面13,斜坡面13上沿斜坡长度方向布置有许多导流微槽12,可利用重力和毛细力的作用加速凝结液的汇集,如图3所示;在冷凝器6的两外壁面上分别设置一个或多个热电致冷器7,每个热电致冷器的冷面通过焊接或用导热性能较好的粘合剂或导热硅脂与冷凝器外表面紧密接触,热电致冷器的热面通过焊接或用导热性能较好的粘合剂或导热硅脂与有肋片群的散热板8紧密接触,在散热板8的顶部安装有风扇9,如图5所示。一根或一根以上保温软管5的一端与微槽群蒸发器3的蒸汽出口15相连,另一端与冷凝器6的蒸汽进口相接;另一根或一根以上回液软管10的一端与冷凝器6的凝结液出口处相连,另一端与导液微槽连接器11的进液口相接;回液软管10内可以加装毛细芯用来增加使冷凝液迅速流回到微槽群蒸发器3的毛细力。The ultimate heat sink provided by the utility model adopts the air-cooled micro-groove group and thermoelectric combination laser thermal control system which adopts forced air cooling to dissipate heat. The
所述微槽群蒸发器3由导热金属材料制成,例如金属铜,微槽群蒸发器3内部受热壁面上设置的蒸发微槽道为矩形、三角形或梯形槽道,该微槽道纵向分布排列,槽道的宽度和深度均在0.01-1mm范围内,微槽道之间的间距在0.01-1mm范围内,如图1所示;所述开放式微槽道的大小适合形成毛细力,以将所述微槽道边的液体工质吸入到微槽道内。如图2所示,所述纵横交错的微槽形成毛细引力作用,可以将出气口处的冷凝液迅速拉离蒸汽出口位置,避免蒸汽管中沿程冷凝液对出汽口的阻塞。所述蒸发器内部的蒸汽出口所在壁面上密布纵横交错的微槽,纵向和横向微槽的宽度和深度在0.01-1mm范围内,微槽道之间的间距在0.01-1mm范围内。这样的纵横交错的微槽与蒸发微槽微槽群热沉组成贯通槽道,能形成很好的连续毛细引力作用,可以避免蒸汽管中沿程冷凝液对出汽口的阻塞。The
上述微槽群蒸发器3内部受热壁面上设置的蒸发微槽优选为矩形槽道,该微槽道纵向分布排列,槽道的宽度和深度均在0.1-0.8mm范围内,微槽道之间的间距在0.1-0.8mm范围内,微槽群蒸发器3的取热能力较强。The evaporation micro-grooves arranged on the heated wall surface of the above-mentioned
所述冷凝器6由导热系数较高的金属材料制成,例如金属铜。冷凝器内壁纵向密布有许多开放式凝结微槽,凝结微槽的几何形状为梯形、三角形或波浪形,凝结微槽的宽度和深度在0.01-10mm范围内,凝结微槽之间的间距在0.01-20mm范围内。冷凝器6的外表面为光滑平坦表面。The
所述冷凝器内部的斜坡面上的矩形导流微槽道12的宽度和深度均在0.01-1mm范围内,微槽道之间的间距在0.01-1mm范围内。The width and depth of the rectangular guide microchannels 12 on the slope inside the condenser are both in the range of 0.01-1mm, and the distance between the microchannels is in the range of 0.01-1mm.
所述热电致冷器7为利用热电效应即Peltier效应的-种片状半导体致冷装置,单个热电致冷器7的长度在1-500mm范围内,宽度在1-500mm范围内,厚度在0.5-100mm范围内,单个热电致冷器的最大致冷功率在0-500W范围内。The
所述的有肋片群的散热板8上的单个肋片的高度在0.1-60mm的范围内,肋片厚度在0.1-10mm的范围内,肋片间距在0.1-10mm的范围内,单个肋片高度优选在1-50mm的范围内,肋片厚度在0.5-2mm的范围内,肋片间距在1-5mm的范围内。所述的安装在散热板8顶部的风扇9的大小与散热板的外形尺寸相匹配,风扇功率在0.5-200W之间。The height of the individual fins on the fin
所述的导液微槽连接器11为带状,由多根微管并行紧密排列组成。单根微管内径大小在0.01-2mm的范围内,由塑料软管或软金属或其他能任意弯曲的材料制成。单根微管内径大小在0.01-1mm的范围内时,所述的导液微槽连接器将回液软管中的凝结液稳定地输运到蒸发器中蒸发微槽中去的作用较强。The liquid-guiding
所述蒸汽保温软管5可以由聚氨酯管制作,该蒸汽保温软管的内径在1-20mm的范围内,直接由导热系数较小的能任意弯曲的材料制成,或采用较软的金属材料,并在管外加保温套管制成。该保温软管起着将本地的蒸发器中产生的蒸汽输运到远程的冷凝器中去的作用。The steam
所述回液软管10的-端与冷凝器的凝结液出口处相连,另一端与导液微槽连接器的进液口相接。回液软管10的内径在0.1-10mm的范围内,由能任意弯曲的材料例如:聚氨酯材料制成,能形成毛细力作用。回液软管可利用重力和毛细力的作用将远程的冷凝器中的凝结液输运至导液微槽连接器中。回液软管内可以加装毛细芯用来增加使凝结液迅速流回到蒸发器的毛细力。毛细芯为多孔的固体材料,例如:不锈钢丝网。One end of the
所述热控制系统是具有一定真空度的密封系统。系统内的绝对压力处于0.1~50kPa范围内时整个散热系统的散热冷却能力较强。The thermal control system is a sealed system with a certain degree of vacuum. When the absolute pressure in the system is in the range of 0.1-50kPa, the heat dissipation and cooling capacity of the entire heat dissipation system is relatively strong.
蒸汽保温软管5的内径在1-10mm的范围内,管外套有较好的保温材料时,整个散热系统有较好的散热效果。The inner diameter of the steam
实施例1Example 1
下面结合附图和实施例对本发明进行详细地说明:Below in conjunction with accompanying drawing and embodiment the present invention is described in detail:
参见图5,用导热性好的金属铜制成一长方形密封腔体的微槽群蒸发器3,也可以称为取热元件。其微槽群蒸发器3腔体受热面的内壁上开有矩形微槽道,形成蒸发微槽群2,该微槽道2的间距为0.4mm、微槽道2的宽度为0.3mm和槽道深度为0.8mm。所述矩形微槽道2的大小适合形成较强的毛细力,以将微槽群蒸发器3内的无水乙醇或蒸馏水等,具有较高的汽化潜热的液体工质,通过微槽道2吸入到微槽道2内受热区域里形成高强度的蒸发和沸腾,变成蒸汽以带走发热体产生的热量。本实施例微槽群蒸发器3腔体受热面的外表面,通过导热硅胶硅脂与发热器件或其次热沉1外表面紧贴在一起。Referring to Fig. 5, a microgroove group evaporator 3 with a rectangular sealed cavity made of metallic copper with good thermal conductivity can also be called a heat-taking element. The inner wall of the heating surface of the
一根直径为5mm的聚氨酯保温软管5的一端与微槽群蒸发器3的蒸汽出口相连,另一端与冷凝器6的蒸汽进口相接;另一根直径为3mm的聚氨酯回液软管10,其一端与冷凝器6的凝结液出口处相连,另一端与导液微槽连接器11的进液口相连通。蒸汽通过与微槽群蒸发器3相连的保温软管5流入到冷凝器6中。One end of a
本实施例的冷凝器6是一用导热性好的金属铝制成的一长方形密封腔体。冷凝器6的内壁布置有许多竖直开放式梯形凝结微槽14,凝结微槽14的宽度和深度均在1.5mm,凝结微槽之间的间距在0.5mm,如图3所示。在冷凝器内的底部区域做斜坡面13,斜坡的角度为45°,其上开出矩形导流微槽道12,导流微槽道12的宽度为1.5mm,深度为2mm,导流微槽道12之间的间距为1.5mm。在冷凝器6的两外壁面上分别设置一个热电致冷器7,每个热电致冷器7的冷面通过导热硅脂与冷凝器外表面紧密接触,热电致冷器7的热面通过导热硅脂与有肋片群的散热板8的底面紧密接触,在散热板8的顶部安装风扇9,散热板8上的矩形肋片的高度为20mm,肋片的厚度为1mm,肋片间距为1.5mm,风扇9的功率为30W。The
冷凝器6竖直放置在激光器、电子电气或其它光电子设备的机箱或机柜的外部,或者镶嵌在机箱或机柜壁面中。蒸汽主要在冷凝器6内壁开放式梯形凝结微槽槽顶处凝结放热,在表面张力的作用下,凝结液沿水平方向流向微槽槽谷区域,使槽顶处的液膜减薄,槽谷区域的凝结液则沿着槽谷自上而下地排泄到冷凝器6的底部,冷凝器6内部的底部布置有用以迅速收集凝结液的斜坡面13,斜坡面13上沿斜坡长度方向布置有矩形导流微槽12,可利用重力和毛细力的作用加速凝结液的汇集。蒸汽凝结所释放的热量由冷凝器6内壁传导到冷凝器6外表面上,被热电致冷器7的冷面吸收,热电致冷器7在进行温度控制的同时,将这些热量以及热电致冷器自身产生的热量由热电致冷器的热面传导到散热板8的肋片上,然后通过风扇9创造的空气强制对流换热条件与外界环境之间进行热量交换,最终将热量散失到外界环境中去。而冷凝器6底部的凝结液则通过回液软管10,借助于重力和由回液软管10、导液微槽连接器11以及蒸发微槽2所形成的较强的连续毛细引力作用及时回流到微槽群蒸发器3中,从而完成一个取热和放热的循环,达到使发热器件冷却和对其进行热控制的目的。The
实施例2:本实施例中,回液软管10内沿管轴方向加装毛细芯用来增加使凝结液迅速流回到蒸发器的毛细力。毛细芯为2层250目的不锈钢丝网芯。本实施例的其他部分同实施例1。Embodiment 2: In this embodiment, a capillary wick is installed in the
实施例3:本实施例中,四根直径为4mm的聚氨酯保温软管5的一端与微槽群蒸发器3的蒸汽出口相连,另一端与冷凝器的蒸汽进口相接;另三根直径为5mm的聚氨酯回液软管10,其一端与冷凝器的凝结液出口处相连,另一端与导液微槽连接器11的进液口相连通。本实施例的其他部分同实施例1。Embodiment 3: In the present embodiment, one end of four
实施例4:本实施例取热元件(微槽群蒸发器)中的受热面为发热器件或其次热沉的外表面。即直接将发热器件或其次热沉外表面与微槽群蒸发器做成一体,作为微槽群蒸发器内受热面并在其表面刻布矩形微槽道,形成微槽群。本实施例的其他部分同实施例1。Embodiment 4: The heat-receiving surface in the heat-taking element (microgroove group evaporator) of this embodiment is the outer surface of the heat-generating device or the second heat sink. That is to directly integrate the outer surface of the heating device or the second heat sink with the micro-groove group evaporator as the inner heating surface of the micro-groove group evaporator and engrave rectangular micro-grooves on its surface to form a micro-groove group. Other parts of this embodiment are the same as
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| CN102692002A (en) * | 2012-06-13 | 2012-09-26 | 华南理工大学 | Heat radiating device of high-power LED (light-emitting diode) |
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| CN103311799A (en) * | 2013-06-09 | 2013-09-18 | 沈阳海派激光科技有限公司 | Self-adaptive evaporative cooling semiconductor laser |
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| WO2023245360A1 (en) * | 2022-06-20 | 2023-12-28 | 北京小米移动软件有限公司 | Heat dissipation part and manufacturing method therefor, middle frame part, housing part, and terminal device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102692002A (en) * | 2012-06-13 | 2012-09-26 | 华南理工大学 | Heat radiating device of high-power LED (light-emitting diode) |
| CN103066038A (en) * | 2012-12-20 | 2013-04-24 | 华南理工大学 | Insulated gate bipolar translator (IGBT) module radiator based on loop circuit heat pipes and manufacturing method of the same |
| CN103066038B (en) * | 2012-12-20 | 2015-04-22 | 华南理工大学 | Insulated gate bipolar translator (IGBT) module radiator based on loop circuit heat pipes and manufacturing method of the same |
| CN103311799A (en) * | 2013-06-09 | 2013-09-18 | 沈阳海派激光科技有限公司 | Self-adaptive evaporative cooling semiconductor laser |
| CN103311799B (en) * | 2013-06-09 | 2018-03-06 | 沈阳海派激光科技有限公司 | A kind of adaptive evaporation cooling semiconductor laser |
| CN106604615A (en) * | 2017-01-03 | 2017-04-26 | 联想(北京)有限公司 | Electronic device |
| CN111240438A (en) * | 2020-04-27 | 2020-06-05 | 深圳市智微智能软件开发有限公司 | Wide-screen computer case capable of quickly adjusting temperature in case and use method thereof |
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