CN200988135Y - Quartz tube dismantling auxiliary tool - Google Patents
Quartz tube dismantling auxiliary tool Download PDFInfo
- Publication number
- CN200988135Y CN200988135Y CN 200620049663 CN200620049663U CN200988135Y CN 200988135 Y CN200988135 Y CN 200988135Y CN 200620049663 CN200620049663 CN 200620049663 CN 200620049663 U CN200620049663 U CN 200620049663U CN 200988135 Y CN200988135 Y CN 200988135Y
- Authority
- CN
- China
- Prior art keywords
- screw
- quartz ampoule
- intermediate layer
- auxiliary fixture
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 66
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 238000012423 maintenance Methods 0.000 claims abstract description 8
- 239000003708 ampul Substances 0.000 claims description 56
- 230000001105 regulatory effect Effects 0.000 claims description 21
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 230000002787 reinforcement Effects 0.000 claims description 15
- 210000002421 cell wall Anatomy 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 2
- 229910052755 nonmetal Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 8
- 239000012467 final product Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000003449 preventive effect Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Images
Landscapes
- Unwinding Of Filamentary Materials (AREA)
Abstract
The utility model discloses a dismounting auxiliary producing tool for quartz tubes, which comprises a pallet and a connection bracket, the utility model is characterized in that the pallet comprises a base, a middle layer and a supporting layer, the middle layer can slide in the lateral direction corresponding to the base, and the supporting layer can slide in the vertical direction corresponding to the middle layer. The middle layer is provided with a lateral adjustment hand wheel to control the lateral movement of the middle layer, and the supporting layer is provided with a vertical adjustment hand wheel to control the vertical movement of the supporting layer. The bottom part of the pallet is provided with three horizontal adjustment hand wheels to adjust the horizontality of the pallet. The dismounting auxiliary producing tool for quartz tubes of the utility model can adjust the relative position of the quartz tube in three directions of the horizontal, the vertical and the lateral in a movable manner, thus can better protect the quartz tubes and can improve the dismounting speed of the quartz tubes during the protection and maintenance procedure.
Description
[technical field]
The utility model relates to the auxiliary fixture field, relates in particular to a kind of quartz ampoule dismounting auxiliary fixture.
[background technology]
The boiler tube board needs quartz ampoule is pulled down replacing in the process of equipment preventive maintenance, at present the auxiliary fixture that uses as shown in Figure 1, this auxiliary fixture comprises pallet 1, supporting disk 6 and is connected support 2 three parts.The inside radius of supporting disk 6 is identical with the inside radius of pallet 1, and outer radius is less than the outer radius of pallet 1.Supporting disk 6 be connected support 2 by being welded to connect, and be connected the level that this horizontal set screw 3 is used for regulating this auxiliary fixture and quartz ampoule between the pallet 1 by three horizontal set screw 3 that are equally spaced.See also Fig. 2, Fig. 2 is the horizontal set screw structural representation in the existing quartz ampoule dismounting auxiliary fixture.As shown in Figure 2, this horizontal set screw 3 comprises a puller bolt 4 and two adjusting bolts 5 that lay respectively at its both sides.At first by tighten or loosening two regulate bolts 5 and regulate the distance of 6 of pallets 1 and supporting disks and make pallet 1 maintenance level, by puller bolt 4 spacing of 6 of pallet 1 and supporting disks is fixed then.This auxiliary fixture is installed on the board lift dismounting position that arrives pipe in the quartz ampoule or outer tube during use, utilizes the lifting of lift to finish dismounting or installation to quartz inner pipe or outer tube.Use this kind quartz ampoule dismounting auxiliary fixture in the process of quartz ampoule dismounting can only by horizontal set screw regulate its pallet and on the level of quartz ampoule, but because this auxiliary fixture and lift stiffness, the influence of factors such as the weight of inner and outer pipes and center of gravity, in the process that quartz ampoule descends or rises, quartz ampoule is easy to produce, this will exert an influence to the life-span of quartz ampoule and also can have influence on the speed of equipment being carried out preventive maintenance simultaneously as can not in time regulating the friction that then causes probably between the parts to the relative position of quartz ampoule inner and outer pipes this moment.
[utility model content]
It is a kind of simple to operate that the purpose of this utility model is to provide, can level and in length and breadth three directions move adjusting, can better protect quartz ampoule and can improve the quartz ampoule dismounting auxiliary fixture of quartz ampoule dismounting speed.
For achieving the above object, the utility model is by the following technical solutions:
A kind of quartz ampoule dismounting auxiliary fixture comprises pallet and is connected support, it is characterized in that, pallet be connected between support the level that connects and regulate the maintenance pallet by horizontal adjusting handle by horizontal adjusting handle.
Have two reinforcements on the above-mentioned connection support, above-mentioned horizontal adjusting handle has three, triangular in shapely is equally spaced and is fixed in reinforcement and tray bottom.Horizontal adjusting handle is made up of screw and the spring that is placed on the screw screw rod, and screw runs through the reinforcement that connects on the support and utilizes ring washer to be fixed in the tray bottom, and screw all has screw thread through the screw portion of reinforcement and the perforated portion of reinforcement.
Above-mentioned pallet is made up of pedestal, intermediate layer and supporting layer, can laterally slide with respect to pedestal in the intermediate layer, but supporting layer is with respect to the intermediate layer longitudinal sliding motion.The intermediate layer is equipped with laterally moving of a lateral adjustments handwheel control intermediate layer, and above-mentioned supporting layer is equipped with vertically moving of a vertical adjusting handle control supporting layer.
Said base upper surface cross central line place has the transverse slipway of dovetail groove shape, upper surface longitudinal centre line place, intermediate layer has the end slipway of dovetail groove shape, and the lower surface in intermediate layer is established trapezoidal rails shape projection corresponding to the lower surface of pedestal transverse slipway place and bearing bed corresponding to intermediate layer end slipway place and catered to respectively in transverse slipway and the end slipway.One side of transverse slipway and end slipway is equipped with the nonmetal bar of carving of regulating gap between slideway and trapezoidal conductor.The lateral adjustments handwheel is installed on the center of intermediate layer trapezoidal rails one side, described lateral adjustments handwheel is made up of screw and the spring that is placed on the screw screw rod, screw runs through the one side that a perpendicular type is regulated location-plate, utilize ring washer to be fixed on the technology cell wall in the trapezoidal rails, the another side of regulating location-plate utilizes screw to be fixed in the bottom of pedestal, and screw has screw thread through the perforated portion of the screw portion of regulating location-plate and adjusting location-plate.Vertically adjusting handle is installed on the center of supporting layer trapezoidal rails one side, described vertical adjusting handle is made up of screw and the spring that is placed on the screw screw rod, screw runs through the one side that a perpendicular type is regulated location-plate, utilize ring washer to be fixed on the technology cell wall in the trapezoidal rails, the another side of regulating location-plate utilizes screw to be fixed in a side in intermediate layer, and screw has screw thread through the perforated portion of the screw portion of regulating location-plate and adjusting location-plate.
Quartz ampoule dismounting auxiliary fixture of the present utility model in use can be simultaneously carries out the level and the position adjustments of three directions in length and breadth to quartz ampoule, even in the lifting process of quartz ampoule, also can carry out above-mentioned adjusting, can well be controlled at like this in the disassembly process of quartz ampoule quartz ampoule with respect to pipe in board and the quartz ampoule with respect to the position of outer tube, compensation is because centre-of gravity shift, the influence that lift and quartz ampoule dismounting auxiliary fixture strain are brought, avoid scuffing to quartz ampoule, the speed of raising equipment preventive maintenance, and make the operation of quartz ampoule dismounting auxiliary fixture easier.
[description of drawings]
Fig. 1 is the structural representation of existing quartz ampoule dismounting auxiliary fixture;
Fig. 2 is the horizontal set screw structural representation in the existing quartz ampoule dismounting auxiliary fixture;
Fig. 3 is a quartz ampoule dismounting auxiliary fixture structural representation of the present utility model;
Fig. 4 is the structural representation of horizontal adjusting handle of the present utility model;
Fig. 5 is the longitudinal sectional drawing of pallet of the present utility model;
Fig. 6 is the transverse cross-sectional view of pallet of the present utility model.
[specific embodiment]
Further specify the utility model below in conjunction with accompanying drawing and embodiment.
See also Fig. 3, Fig. 3 is a quartz ampoule dismounting auxiliary fixture structural representation of the present utility model.As shown in Figure 3, quartz ampoule dismounting auxiliary fixture of the present utility model is made up of pallet 7, connection support 8 two large divisions.Pedestal 18 bottoms of pallet 7 are equipped with the horizontal adjusting handle 10 of three equidistant arrangements triangular in shape, and horizontal adjusting handle 10 also is fixed on two reinforcements 9 that connect on the support 8 simultaneously.Please consult Fig. 3 and Fig. 4 simultaneously, Fig. 4 is a horizontal adjusting handle structural representation of the present utility model.As shown in Figure 4, screw 15 in the horizontal adjusting handle runs through the reinforcement 9 that connects on the support 8 and utilizes ring washer 17 to be fixed in pallet 7, screw 15 all has screw thread through the screw portion of reinforcement 9 and the perforated portion of reinforcement 9, and is positioned at the screw portion of pallet 7 inside and the perforated portion of pallet 7 does not have screw thread so that the rotation of horizontal adjusting handle.The screw portion of screw 15 between reinforcement 9 and pallet 7 is with spring 16, to strengthen the fastening effect of screw.Please consult Fig. 3, Fig. 5 and Fig. 6 simultaneously, Fig. 5 is the longitudinal sectional drawing of pallet of the present utility model, and Fig. 6 is the transverse cross-sectional view of pallet of the present utility model.Pallet 7 is made up of pedestal 18, intermediate layer 19 and bearing bed 20.Pedestal 18 upper surface cross central line places and 19 upper surface longitudinal centre line places, intermediate layer have the transverse slipway 14 and the end slipway 13 of mutually perpendicular dovetail groove shape, and the lower surface in intermediate layer 19 is established trapezoidal rails shape projection 21 and 22 corresponding to the lower surface of pedestal 18 upper surface transverse slipwaies, 14 places and bearing bed 20 corresponding to intermediate layer 19 upper surface end slipways 13 places and catered to respectively in transverse slipway 14 and the end slipway 13.Trapezoidal rails 21 and a side of 22 are fixed with one respectively and carve bar 23 in order to regulate the gap between trapezoidal rails and slideway with what lubricious material was made.The center of trapezoidal rails 21 1 sides is equipped with lateral adjustments handwheel 12.As shown in Figure 5, the sidetracking that trapezoidal rails 21 is equipped with lateral adjustments handwheel 12 has a technology groove 27, and screw 24 runs through regulates location-plate 25, utilizes ring washer to be fixed on the cell wall of this technology groove, regulates location-plate 25 and utilizes screw to be fixed in the bottom of pedestal 18.Screw 24 has screw thread through the perforated portion of the screw portion of regulating location-plate 25 and adjusting location-plate 25, and being positioned at the screw portion of fabrication hole pars intramuralis and the perforated portion of technology hole wall does not then have screw thread.Screw 24 is with spring at the screw portion of regulating between location-plate 25 and the technology hole wall.One side center of trapezoidal rails 22 also is equipped with a vertical adjusting handle 11.As shown in Figure 6, vertically the structure of adjusting handle 11 is very similar to lateral adjustments handwheel 12, the sidetracking that trapezoidal rails 22 is installed lateral adjustments handwheel 11 has a technology groove 28, screw 29 runs through regulates location-plate 30, utilize ring washer to be fixed on the cell wall of this technology groove, regulate location-plate 30 and utilize screw to be fixed in the outside in intermediate layer 19.Screw 29 has screw thread through the perforated portion of the screw portion of regulating location-plate 30 and adjusting location-plate 30, and being positioned at the screw portion of technology groove pars intramuralis and the perforated portion of technology cell wall does not then have screw thread.Screw 29 is with spring at the screw portion of regulating between location-plate 25 and the technology cell wall.
Quartz ampoule dismounting auxiliary fixture of the present utility model is installed on the board lift in use, afterwards, a circle center type level meter is placed on the pallet 7 of this auxiliary fixture, manually three horizontal adjusting handles 10 of pallet base bottom are regulated in rotation, make the pallet maintenance level of this auxiliary fixture.During the dismounting quartz ampoule, pipe is dismantled outer tube again in the dismounting earlier.During the dismounting quartz inner pipe, on on the pallet of this auxiliary fixture, place a round turntable, when quartz ampoule dismounting auxiliary fixture rises to the removed position of quartz inner pipe with lift, rotate round turntable and drive quartz inner pipe rotation disengaging quartz ampoule base, after interior pipe and base disengaging, lift is descended, quartz ampoule also descends with lift and breaks away from outer tube fully until interior pipe, and interior pipe is moved gets final product at last.During dismounting quartz ampoule outer tube, this quartz ampoule dismounting auxiliary fixture rises to the removed position of outer tube with lift, and the bolt of firm banking is unclamped, and base is descended together with outer tube leave the board heater fully up to outer tube, the outer tube set bolt of dismantling, outer tube moved to get final product.When quartz ampoule is installed, outer tube is installed earlier interior pipe is installed again, installation steps get final product according to the step inverted sequence of above-mentioned dismounting quartz ampoule outer tube or interior pipe.In the process of dismounting or installation quartz ampoule, if find that quartz ampoule departs from the center line of heater or the relative position of interior pipe of quartz ampoule and outer tube is offset, can regulate vertical adjusting handle 11 or lateral adjustments handwheel 12 on this auxiliary fixture pallet 7, make the intermediate layer 19 or the bearing bed 20 of pallet 7 move by transverse slipway 14 or end slipway 13 generations with respect to the position of pedestal 18, the position deviation that the compensation quartz ampoule occurs in rising or decline process, or three horizontal adjusting handles 10 of adjusting tray bottom, compensate the horizontal departure of quartz ampoule inner and outer pipes, thereby avoided scuffing quartz ampoule.
That more than introduces only is based on preferred embodiment of the present utility model, can not limit scope of the present utility model with this.Any device of the present utility model is done replacement, the combination, discrete of parts well know in the art, and the utility model implementation step is done well know in the art being equal to change or replace and all do not exceed exposure of the present utility model and protection domain.
Claims (10)
1. a quartz ampoule dismounting auxiliary fixture comprises pallet and is connected support, it is characterized in that, pallet be connected between support the level that connects and regulate the maintenance pallet by horizontal adjusting handle by horizontal adjusting handle.
2. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 1 is characterized in that: have two reinforcements on the described connection support, described horizontal adjusting handle has three, triangular in shapely is equally spaced and is fixed in reinforcement and tray bottom.
3. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 2, it is characterized in that: described horizontal adjusting handle is made up of screw and the spring that is placed on the screw screw rod, screw runs through the reinforcement that connects on the support and utilizes ring washer to be fixed in the tray bottom, and screw all has screw thread through the screw portion of reinforcement and the perforated portion of reinforcement.
4. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 1, it is characterized in that: described pallet is made up of pedestal, intermediate layer and supporting layer, and can laterally slide with respect to pedestal in the intermediate layer, but supporting layer is with respect to the intermediate layer longitudinal sliding motion.
5. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 4, it is characterized in that: described intermediate layer is equipped with laterally moving of a lateral adjustments handwheel control intermediate layer, and described supporting layer is equipped with vertically moving of a vertical adjusting handle control supporting layer.
6. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 4, it is characterized in that: described pedestal upper surface cross central line place has the transverse slipway of dovetail groove shape, upper surface longitudinal centre line place, described intermediate layer has the end slipway of dovetail groove shape, and the lower surface in described intermediate layer is established trapezoidal rails shape projection corresponding to the lower surface of described pedestal transverse slipway place and described bearing bed corresponding to end slipway place, described intermediate layer and catered to respectively in transverse slipway and the end slipway.
7. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 6 is characterized in that: a side of described transverse slipway and end slipway is equipped with the nonmetal bar of carving of regulating gap between slideway and trapezoidal conductor.
8. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 6 is characterized in that: the center of described intermediate layer trapezoidal rails one side is equipped with the lateral adjustments handwheel, and the center of described supporting layer trapezoidal rails one side is equipped with vertical adjusting handle.
9. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 8, it is characterized in that: described lateral adjustments handwheel is made up of screw and the spring that is placed on the screw screw rod, screw runs through the one side that a perpendicular type is regulated location-plate, utilize ring washer to be fixed on the technology cell wall in the trapezoidal rails, the another side of regulating location-plate utilizes screw to be fixed in the bottom of described pedestal, and screw has screw thread through the perforated portion of the screw portion of regulating location-plate and adjusting location-plate.
10. a kind of quartz ampoule dismounting auxiliary fixture as claimed in claim 8, it is characterized in that: described vertical adjusting handle is made up of screw and the spring that is placed on the screw screw rod, screw runs through the one side that a perpendicular type is regulated location-plate, utilize ring washer to be fixed on the technology cell wall in the trapezoidal rails, the another side of regulating location-plate utilizes screw to be fixed in a side in described intermediate layer, and screw has screw thread through the perforated portion of the screw portion of regulating location-plate and adjusting location-plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620049663 CN200988135Y (en) | 2006-12-27 | 2006-12-27 | Quartz tube dismantling auxiliary tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620049663 CN200988135Y (en) | 2006-12-27 | 2006-12-27 | Quartz tube dismantling auxiliary tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200988135Y true CN200988135Y (en) | 2007-12-12 |
Family
ID=38939179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620049663 Expired - Lifetime CN200988135Y (en) | 2006-12-27 | 2006-12-27 | Quartz tube dismantling auxiliary tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200988135Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104259835A (en) * | 2014-10-21 | 2015-01-07 | 萨驰华辰机械(苏州)有限公司 | Automatic steel ring grabbing system |
| CN108625062A (en) * | 2018-08-03 | 2018-10-09 | 东莞市司倍瑞机械设备有限公司 | A kind of high evenness spin coating device |
| CN109702683A (en) * | 2019-02-19 | 2019-05-03 | 德淮半导体有限公司 | Assembling fixture |
| CN112080801A (en) * | 2019-06-14 | 2020-12-15 | 北京北方华创微电子装备有限公司 | Lower hearth assembly, growth furnace and mounting method thereof |
| CN118876112A (en) * | 2024-07-03 | 2024-11-01 | 山东现代庆炀智能装备有限公司 | Display panel grabbing robot, robot maintenance method and display panel production line |
-
2006
- 2006-12-27 CN CN 200620049663 patent/CN200988135Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104259835A (en) * | 2014-10-21 | 2015-01-07 | 萨驰华辰机械(苏州)有限公司 | Automatic steel ring grabbing system |
| CN108625062A (en) * | 2018-08-03 | 2018-10-09 | 东莞市司倍瑞机械设备有限公司 | A kind of high evenness spin coating device |
| CN109702683A (en) * | 2019-02-19 | 2019-05-03 | 德淮半导体有限公司 | Assembling fixture |
| CN112080801A (en) * | 2019-06-14 | 2020-12-15 | 北京北方华创微电子装备有限公司 | Lower hearth assembly, growth furnace and mounting method thereof |
| CN118876112A (en) * | 2024-07-03 | 2024-11-01 | 山东现代庆炀智能装备有限公司 | Display panel grabbing robot, robot maintenance method and display panel production line |
| CN118876112B (en) * | 2024-07-03 | 2025-04-15 | 山东现代庆炀智能装备有限公司 | Display panel grabbing robot, robot maintenance method and display panel production line |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130115 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130115 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CX01 | Expiry of patent term |
Granted publication date: 20071212 |
|
| EXPY | Termination of patent right or utility model |