CN1987394A - Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit - Google Patents
Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit Download PDFInfo
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- CN1987394A CN1987394A CN 200510112000 CN200510112000A CN1987394A CN 1987394 A CN1987394 A CN 1987394A CN 200510112000 CN200510112000 CN 200510112000 CN 200510112000 A CN200510112000 A CN 200510112000A CN 1987394 A CN1987394 A CN 1987394A
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Abstract
The invention discloses method and device in use for sensing leak of manufacturing mechanism or from environment, which can cause significant damages. The sensor device includes following parts: at least a pair of electrode element, which senses leaking liquid based on whether two electrode elements is contacted or not; amplifier installation in use for receiving and amplifying signal from external sensing units; output unit is in use for generating the output signal based on amplified signal from the amplifier. In an implementing instance, the output unit can be an audio device capable of transmitting audio signal, and visual indicator can be LED or the LED connected to remote monitoring and controlling station. The sensor device also can include switch in use for changing two different sensing ranges of external sensing device.
Description
Background technology
The present invention generally relates to the manufacturing of integrated circuit and other electronic installation.More specifically, the invention provides a kind of method and apparatus that is used for monitoring the liquid of semiconductor mechanism (facility) environment.Only as an example, the present invention provides in clean room mechanism (for example 10 grades (Class 10)), but will understand this method and device can be applicable to other environment.
Since very early, the mankind have manufactured a product and utensil, are used for alleviating the demand for the carrying out that survives at harsh environment and live.For centuries, even non-all also have the product of many manufacturings all by manual generation.Manual skilled worker who often causes the inefficient of scale and also need highly to train and workman are to make required product.Skilled worker or the workman who trained are common with hand-made each product of making, and have therefore increased the time before can realizing complete operation to heavens.In addition, do not guarantee that each product quality will be unified.
The notion that mechanical technology by utilizing large-scale production or method manufacture a product is implemented in 19th century during the industrial revolution, and this notion has extremely increased the speed and the consistance of manufactured product.After Time Created, can have the product of similar quality with more efficient mode manufacturing to the initial outlay of machinery and equipment and factory.Owing to can come the much bigger product of production quantity by the method for large-scale production, following buyer needn't wait for that the workman carries out the arduous process of making product with hand-made again.
From then on the mankind develop into the more complicated product of current production such as automobile, personal computer and mobile phone from producing simple product such as cast iron kettle and home appliances.A particular instance of the current product of making is " IC " or integrated circuit, and it is mainly made on Silicon Wafer.The IC minority interconnect devices from the single silicon that is manufactured on develops millions of devices that are manufactured on the same chip.Current I C provides performance and the complicacy that surpasses the initial imagination far away, and as " brain " of most of current electronic installations.
The generation of integrated circuit and development are the processes of a complexity, can be divided into several different steps.At first, circuit is designed by the chip designer, and this chip designer obtains the initial specification of circuit and this specification is converted to the available design that is applicable to manufacturing.Implement this design and on wafer, make integrated circuit at maker then.The wafer of handling is got packaging and testing mechanism, and circuit that can each is independent in packaging and testing mechanism separates, is encapsulated into chip wafer and testing reliability and performance then.
The manufacturing that integrated circuit uses is through for many years differentiation, carries out complete product cycle of integrated circuit of design, manufacturing, packaging and testing its oneself independently to initial company's design chips, each company no factory mode (fabless model) of signing a contract and carrying out later step the production life cycle then from each chip companies.Although some companies still carry out the inner complete product cycle, some companies have changed to no factory mode.This transformation has some potential causes.At first, making the cost of the chip manufacturing mechanism reach the recent technological advances level now can the multi-million dollar meter.The second, company can often more effectively carry out by the different step in company's outsourcing production life cycle of special this step of execution.An example implementing the chip companies of foundry (foundry) service and manufacturing IC chip is the international manufacturing company (SMIC) of Chinese Shanghai semiconductor.
The particular instance of the peculiar problem of chip manufacturing mechanism is the how leakage and the uncontrolled release of material in the processing mechanism.Leak not only owing to directly threaten but also because unheeded potential leakage and common building to any kind of throws into question living or being operated in people in this building.This can have catastrophic consequence, but because leak trolley wire and cause catching fire in the building, if or leak undiscovered and handle then near article the corrosion gradually.Although leaking all is subject matter in the building of any kind of, aggravate widely in the importance of this problem of chip manufacturing mechanism.Chip manufacturing mechanism can comprise high voltage electricity equipment, hazardous chemicals and with approaching poisonous of a large amount of fluid tight that are used to cool off manufacturing equipment and cleaning and processing wafer or the gas of getting angry.Produced leak sensor detecting the spill-out of these liquid, but can implement a kind of novel designs that is used for leak sensor, this leak sensor provides previous unshowned additional capabilities.These and other restriction runs through this instructions and more specifically describes following.
As mentioned above, it is desired needing a kind of the improving one's methods of manufacturing integrated circuit.
Summary of the invention
According to the present invention, provide the technology of the manufacturing that is used for integrated circuit and other electronic installation.More specifically, the invention provides a kind of method and apparatus that is used at semiconductor mechanism environment monitoring liquid.Only as an example, the present invention provides in clean room mechanism (for example 10 grades), but will understand this method and device can be applicable to other environment.
A kind of new method and device that embodiments of the invention provide in the maker environment and be used to leak sensing in family or office environment.The Main Processor Unit that leaks sensing apparatus has can easily be transported to the potential compact size that is easy to leakage region, with the sensors coupled that is designed to the sensing leak fluid, and is powered with near the leakage the sensing.By cohesive material or other installation method that substitutes, the leakage sensing apparatus can be attached to the surface region in the zone for the treatment of sensed leakage.Should new leak sensing apparatus provides in processing and has had dirigibility under the dissimilar overflowing liquid situation of different resistance ranges.This allow to leak sensing apparatus can the untreated water of sensing and the leakage of deionized water.Can adopt to the distinct methods that leaks the sensing apparatus power supply, as battery supply or from the external power source of external power source, or battery and external power source are used in combination.Can comprise with sensor that the Main Processor Unit that leaks sensing apparatus is used in combination can be according to right with at least one electrode member that contacts the sensing leak fluid of two electrode members.Depend on embodiment, can realize the one or more of these benefits.
In a particular embodiment, the invention provides the portable chemical sensor device of the ultrapure water that a kind of mechanism's environment that is used in the integrated circuit manufacturing uses.This portable chemical sensor device comprises: portable shell has about 4 inches and littler length, about 1.5 inches and littler thickness and about 3 inches and littler width; Sensing ports is coupled to described shell and is coupled to and is the right outside sensing apparatus of at least one electrode member, each electrode member each other ground, space be provided with and can according to the fluid that contacts sensing to leak of two electrode members.Also comprise the amplifier installation that is coupled to sensing ports, this amplifier installation receives the one or more signals with first form from outside sensing apparatus, and can be with signal from first format conversion to second form.Used the output unit that is coupled to control device, wherein output unit can be exported the signal that be associated with the state of outside sensing apparatus based on the signal with second form.
In certain embodiments, outside sensing apparatus can be the flat element that comprises that an electrode member is right, and wherein said flat element can be attached to surface region.Can adhere to by glue or belt, and flat element can have 0.50mm or littler thickness, this prevents that it from being moved during operation easily.Output unit can have several different embodiment, scope from the audio alarm to the visual detector, or with being connected of supervisory system, shown in visual detector as having based on LED with at least two states of the signal of second form.Can adopt chemical sensor array, wherein the output from chemical sensor is sent to a multiplex machine and further is connected to the display screen that is used to monitor from the signal of chemical sensor array.Can use external power source or battery to come maybe external power source and battery to be used in combination with external power source, wherein external power source use battery and when externally power supply is unavailable as primary power to device power supply.Chemical sensor can be installed near the zone of being monitored by the erecting bed that is coupled to portable shell.Can also comprise switch in chemical sensor, it allows two different sensing ranges.
According to another embodiment of the present invention, a kind of method that the protection mechanism environment avoids one or more leakages that is used for is provided, this method comprises: the sensor device that is provided for monitoring leakage, this sensor device comprises sensing apparatus and processing unit, wherein sensing apparatus comprises that at least one electrode member is right, each electrode member is provided with on ground, space each other, this electrode member to can according to the fluid that contacts sensing to leak of two electrode members, and processing unit comprises portable shell, this portable shell has about 4 inches and littler length, about 1.5 inches and littler thickness and about 3 inches and littler width, amplifier installation, can receive from sensor with the signal of first form and with this conversion of signals to second form, and output unit, the signal that can be associated with the state of leak sensor based on signal output with second form; Sensing apparatus is attached to surface region in mechanism's environment in the zone of leakage to be monitored; Sensing apparatus is coupled to processing unit; And provide power supply to processing unit.
In certain embodiments of the invention, be used for the protection mechanism environment avoid one or more leakages method further comprise the step that one of a plurality of sensing ranges of providing by processing unit are provided based on detected kind of liquid.Sensing apparatus can be the flat element that comprises that an electrode member is right, and described flat element can be attached to surface region.The thickness of flat element can be 0.5mm or littler or 0.25mm or littler.Output unit in the processing unit can comprise audio alarm, have based on visual detector such as LED or supervisory system with at least two states of the signal of second form.The sensing apparatus array can be provided, and wherein supervisory system comprises and is used to handle from least one multiplex interface of the output of sensing apparatus array and is used to monitor display screen from the signal of sensing apparatus array.
According to another embodiment of the present invention, a kind of method that is used to operate maker is provided, wherein step comprises: the sensor device that is provided for monitoring leakage, this sensor device comprises sensing apparatus and processing unit, wherein comprise can be according to right with at least one electrode member that contacts the fluid that sensing leaks of two electrode members for sensing apparatus, and processing unit comprises portable shell, this portable shell has about 4 inches and littler length, about 1.5 inches and littler thickness, and about 3 inches and littler width, amplifier installation, its signal with first form that can receive from sensor also becomes second form with this conversion of signals, and output unit, the output signal that it can be associated with the state of leak sensor based on the signal output with second form; Sensor installation device in the zone in treating the maker of monitored leakage; And operation is used for the mechanism that SIC (semiconductor integrated circuit) is made.
In certain embodiments of the present invention, further comprise the step that sensor array is provided, wherein output unit comprises supervisory system, and the sensor device array is connected to the supervisory system that is used for pilot signal, and this signal is sent by the output unit in each sensor device in the array.Supervisory system can be positioned at the position away from the zone for the treatment of monitored leakage.Output signal can be a sound signal.The other step that one of a plurality of sensing ranges of providing by processing unit based on detected water type selecting can be provided.Sensor device can be the flat element that comprises that an electrode member is right, and described flat element can be attached to surface region.
With reference to following detailed description and accompanying drawing, can more fully understand various other purpose of the present invention, feature and advantage.
Description of drawings
Fig. 1 be exemplary leak sensor, its Main Processor Unit and with the high level schematic diagram of the simplification that is connected of sensor and output signal;
Fig. 2 is the process flow diagram of simplification that the work of exemplary leak sensor is shown;
Fig. 3 is the simplification vertical view of exemplary enforcement of the Main Processor Unit of leak sensor;
Fig. 4 is the simplification vertical view of exemplary enforcement of the Main Processor Unit of leak sensor, and this Main Processor Unit is attached with the electron device of lid with the protection Main Processor Unit;
Fig. 5 is the simplified side view of the Main Processor Unit of leak sensor, and exemplary erecting device is shown;
Fig. 6 is the simplification front elevation of the Main Processor Unit of leak sensor, and the Main Processor Unit that is installed to wall is shown;
Fig. 7 is a rough schematic view, illustrate illustrative sensors and with the vertical view of the interface of Main Processor Unit;
Fig. 8 be exemplary sense mechanism and with the simplified side view of the interface of leak sensor;
The exemplary installation diagram of Fig. 9 for simplifying illustrates leak sensor and can how to be implemented to surround device for example wafer fabrication tool or water heater; And
The illustrative diagram of Figure 10 for simplifying illustrates leak sensor is connected to the programmed logic interface so that many leak sensors can be multiplexed to single monitoring station.
Figure 11 is second illustrative diagram of simplifying, and illustrates leak sensor is connected to the programmed logic interface so that many leak sensors can be multiplexed to single monitoring station.
Figure 12 is a rough schematic view, and the setting and the ongoing leak supervision of leak sensor is shown.
Embodiment
According to the present invention, provide the technology of the manufacturing that is used for integrated circuit and other electronic installation.More specifically, the invention provides a kind of method and apparatus that is used for monitoring the liquid of semiconductor mechanism environment.Only as an example, the present invention is provided in clean room mechanism (for example 10 grades), but will understand this method and device can be applicable to other environment.
Fig. 1 be exemplary leak sensor, its Main Processor Unit and with the high level schematic diagram of the simplification that is connected of sensor and output signal.Leak sensor system 10 comprises sensor 4, Main Processor Unit 2 and output signal 14,16 and 18, and can be described better in conjunction with Fig. 2, and Fig. 2 is the simplified flow chart that the work of exemplary leak sensor is shown.Fig. 1 and Fig. 2 only are example, and it should exceedingly not limit the scope of claim here.Those skilled in the art should understand that many variations, modification and replacement.At first, sensor 4 arranges in the mode that is suitable for detecting leakage, if it can be near the equipment of application of high voltages power supply, in the position of liquid flow or leak and nearby take place then may make the people suffer the zone of personal injury.Sensor 4 is used for detecting the existence of leakage and can implements some different enforcements.In a certain embodiments, sensor 4 can be implemented by using thin plastic housing, and this thin plastic housing comprises a plurality of electrodes in shell.In step 22, the electricity ring forms and leaks detected when the liquid contact electrode.In step 24, leakage signal is transmitted through the length of sensor 4 to Main Processor Unit 2 by the connectivity port (not shown).In step 26, the amplitude of detection signal can increase by the amplifier 6 that is arranged in Main Processor Unit 2.Amplification can be necessary, because the signal that receives may not have enough values accurately to be received and be sent to further output stage.The Main Processor Unit 2 of leak sensor 10 is by power supply 8 power supplies, and power supply 8 can comprise multiple input power supply option.For example, Main Processor Unit can be powered by the internal cell that can replace easily, or receives from the power supply of external power source 12V mechanism input power supply for example.In step 28, the signal of reception is passed on the signal processing unit 12 then, and signal processing unit 12 comprises oscillator and two solid-state trigger (double solid state transmitter).In step 30, signal processing unit 12 is used for further handling input signal makes suitable alerting signal to be output.A plurality of alerting signals can be used.Three exemplary output signals that can be bonded to each other ground or use discretely are described below.Alerting signal can comprise the visual detector 14 that is installed on the Main Processor Unit, and when not sensing leakage, described visual detector flicker is used for certain color of device operate as normal, and when detecting another color of glimmering when leaking.Alerting signal can also comprise sound signal 16, and when detecting leakage, described sound signal is play alarm or alert message.The 3rd output signal 18 can be by programmed logic interface (PLI) circuit or other suitable interface by multiplexed, and making can be monitored a concentrated position from a plurality of output signals of a plurality of leak sensors.
Fig. 3 is the simplification vertical view of the exemplary enforcement of the Main Processor Unit 2 of the leak sensor that is removed of lid.This figure only is an example, and it should exceedingly not limit the scope of claim here.It will be understood by those skilled in the art that many variations, modification and replacement.The physical size of exemplary Main Processor Unit 2 can be about 4 inches and littler length, about 1.5 inches and littler thickness and about 3 inches and littler width.The compact yardstick of Main Processor Unit allows it easily to be carried and moves between different leakage sense position as required.For example, leak sensor can remain on a position and when needing Main Processor Unit be connected to different sensors, or each sensor can have and the Main Processor Unit of its permanent coupling.The compact yardstick of Main Processor Unit also allows when not required, and this unit is removed and easily deposits and treating that sensing region is mounted in not outstanding mode on every side.
Leak sensor can be the 12V battery at battery described in the exemplary enforcement by battery 32 power supplies.The battery that also can minimum modification uses other type and size is as AA, the AAA of routine, 9V, lithium ion, rechargeable and other battery with different voltages.The typical life of battery 32 made Main Processor Unit 2 lose the possibility of power supply owing to battery failure at least 12 months to minimize.Before can expiring in the life-span of battery, battery 32 periodically changes to keep the Leak Detection that continues of monitoring area.
Replacedly, the external power source (not shown) can be used to Main Processor Unit 2 power supplies to leak sensor, and this external power source is connected to Main Processor Unit 2 by connector 34.External power source can for mechanism power, from specialized designs with to the power supply of the generator of leak sensor power supply, from the power supply or any amount of different possibilities known in those skilled in the art of standard wall outlet.Connector 34 can also be modified with cooperation and be used for specific external power source to Main Processor Unit 2 power supply.In one particular embodiment of the present invention, the 12V external power source is supplied to Main Processor Unit 2.From battery 32 with can be combined from the power supply of external power source or separate use.External power source can be used to as primary power to Main Processor Unit 2 power supply, and battery 32 externally uses under the situation of power interruption.By two power supplys rather than a power supply are provided, the reliability of leak sensor is greatly improved, and this allows consistent power supply to send under the situation that one of power supply lost efficacy.
Sensor 4 is connected to Main Processor Unit 2 by the connector that is positioned at Main Processor Unit 2 sides.In one embodiment of the invention, this sensor can be (PVC) cable of flat Polyvinylchloride (polyvinylchloride), and this cable comprises a plurality of copper cash that function is an electrode.Two or more copper cash are exposed on and leak in the zone to be detected.Sensor detects potential liquid by the resistance between potential electrode and overflows.When not having liquid between the electrode, the resistance between the electrode is very high.Yet when liquid came in contact between electrode, the resistance between the electrode descended sharp.Resistance value between this electrode is measured by the internal electronic device in the Main Processor Unit, to determine whether to have taken place leakage.In normal work period, the resistance between two electrodes is very high, wherein has only air to be present between the electrode.As a result, low voltage signal is sent to Main Processor Unit 2.Yet when detecting leakage, high voltage signal is supplied to the master unit that is used to amplify.Sensor 4 can have 0.3mm or littler thickness and have low profile with respect to measured surface.In the monitoring leaking process, conventional sensors often has bigger thickness and therefore is easier to unexpectedly be destroyed or moves.For preparing the work of sensor, the copper cash in the PVC cable is exposed to a side of sensor, and exposed side is tied up (tape) to surface to be measured with being faced down.When leaking generation, liquid enters the space between the electrode by capillarity and gives the alarm.Replacedly, sensor can be installed to detect leakage faceup or in the side on surface to be measured.Yet processing unit is not limited to above-mentioned sensor type.To have also be seldom modification even if utilize, and sensors of various types or the different materials that is used for sensor can also be used with Main Processor Unit.For example, other conductive material can be used as the electrode that is used for Leak Detection, or different materials can be used for forming the cable shell that electrode is remained on the appropriate location.
Selector switch 38 is located in the Main Processor Unit 2 to allow the selectivity to a certain degree to detected kind of liquid.For example, depend on the initial source of water and the disposal route that is used for handling water, the different resistivity grade that dissimilar water has.Ultrapure (UPW) or deionized water be the good insulation performance body and the difference conductor, mean it well the conduction.Yet " normally " or untreated water typically comprise the solute composition that is dissolved in the water.When these solutes are separated in aqueous solution can be when the flowable free ion of its electric current, these solutes can cause resistivity of water to reduce.Thus, " normally " or untreated water conduct electricity.Exemplary Main Processor Unit 2 can comprise selector switch, and this selector switch allows Main Processor Unit to detect the water resistance rate of two scopes, detects the dirigibility that has the liquid of low-resistivity and have the liquid of high resistivity thereby provide.Two settings on selector switch 38 are set at 1M Ω cm and leak for example water to measure routine, and are set at 20M Ω cm measuring the more liquid of high resistivity, as have～deionized water of 18M Ω cm resistivity.When selecting switch 38 to be set at 1M Ω cm, the measurement range of leak sensor is between 0-1M Ω cm, and when selecting switch 38 to be set at 20M Ω cm, the measurement range of leak sensor is between 0-20M Ω cm.Using two different Another reason that are provided with is that the humidity of comparing with home in the clean room position is extremely low.If airborne Moisture Sensitivity Level is too high, then airborne humidity can unexpectedly cause the alarm in the clean separately.In addition, sensor is not limited to measure whether the water leakage has taken place.Whether it can also measure the overflowing of different liquids with the resistivity in the measurement range and take place near sensing.Different settings can also easily be implemented so that measure the resistivity of different range.For example, can easily revise sensor and have leakage greater than the liquid of the liquid resistivity of 20M Ω cm with monitoring.
Whether power lights 42 is suitably provided with the power supply that is determined to Main Processor Unit 2 with the button 44 combined uses that are used for testing power supply.When the button 44 that has been connected to Main Processor Unit 2 and has been used for testing power supply when battery 32 or external power source 34 was depressed, power lights 42 transmitted and is suitably powered with warning user Main Processor Unit.Needn't connect sensor or make to leak and present in the power supply that is given to checked unit.Power lights can be the signal such as the green of LED or particular color, exists with notifying operation person power supply.Second color or can not represent not exist power supply from the illumination of LED.In one particular embodiment of the present invention, when Main Processor Unit 2 is connected to external power source 34, as long as power supply is supplied then the just state of remaining on out of signal or LED.Yet if battery is used to Main Processor Unit 2 power supplies, power lights 42 is generally the pass, is depressed unless be used for the button 44 of testing power supply.This is carried out the battery life that is stored in the electric charge in the battery 32 and increases battery 32 to keep.
Whether warning review button 46 can be depressed is suitably connected with the circuit of determining to be used to launch warning in Main Processor Unit 2.When this circuit is suitably connected and the button that is used to check warning when being depressed, alarm lamp 14 can launch visible signal and warning horn 16 can audio signals just suitably be worked with this warning function of warning user.When Main Processor Unit is connected by outside tie point 18, signal can send to the outer monitoring point in addition and to notify them ann test rather than real the leakage taken place.In one particular embodiment of the present invention, the visible and sound signal of emission can be different from the signal of launching when taking place truly to leak during checking warning when button 46 is depressed, to help the generation of differentiation ann test and true leakage.The rhythmical sound that warning horn 16 can be launched enough loudness leaks near user and allows them to take suitable action with warning.The loudness of warning horn can be more than 60db reaches.The volume of warning horn can also easily be adjusted to the situation that more suitably is applicable to.For example, owing to the bigger potentiality of overflowing the negative consequence that is caused at hazardous chemical, the warning that rings can more be applicable to clean.The warning of less loudness can more be applicable to only needs the office or the home environment of stopping a leak.Then sensed when leaking, alarm lamp 14 can be launched red flicker or pulsed light and leak with signaling visually.
Outside tie point 18 is used to alternatively Main Processor Unit 2 is connected to outer monitoring equipment, and this equipment can be the long-range emergency-response center (ERC) of monitoring near the computing machine in place or being designed to monitor the whole state of maker.About the more details that Main Processor Unit is connected to outer monitoring equipment will be below at Figure 10 and 11 and discuss.
Fig. 4 is the simplification vertical view of exemplary enforcement of the Main Processor Unit of leak sensor, and described Main Processor Unit is attached with the electronics of lid with the protection Main Processor Unit.This figure only is an example, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.Lid 56 can be attached to Main Processor Unit 2 by trip bolt being set in the screw hole 54.Lid 56 prevents that the accident contact of user or liquid from moving or the inner electronic unit that comprises of breaking-up.As seen power lights 42, the button 44 that is used to check power supply, the button 46 that is used to check warning and alarm lamp 14 all pass through lid, and this allows user test to be connected with the power supply that authenticates to Main Processor Unit and warning function and needn't remove lid when needs are tested at every turn.Because multiple difference, descriptive label can be placed on and cover on 56.These reasons can comprise, but be not limited to, warn the function of leak sensor and be used for parts or to the user, as the audibility that is used to enter the 12V DC power supply of external power source of Main Processor Unit 2 or warning horn 16 can be adjusted to the value more than or equal to 60db as the particular value of input value.
Fig. 5 is the simplified side view of Main Processor Unit that the leak sensor of exemplary erecting device is shown, can be installed to adjacent surface so that easily visit and as seen during operation by this device leak sensor, and Fig. 6 is the simplification front elevation of the Main Processor Unit 2 of leak sensor, and the Main Processor Unit that is installed to wall 59 is shown.These figure only are examples, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.Although leak sensor can easily transport between the position, can advantageously make Main Processor Unit be attached to certain position and make and leak and to be monitored continuously in this position.Main Processor Unit can be attached and make it be installed near the position of the leakage to be monitored ground or surface level.This can be by applying the back of bonding agent to leak sensor, or realize by by screw, cable band or other device Main Processor Unit for good and all being attached to ground.In one embodiment of the invention, use two masters all the stick 60 of toughness material protect Main Processor Unit 2.One side of stick 60 to the surface of Main Processor Unit 2 and second side to surface to be installed.Main Processor Unit 2 can be placed on by the side with stick 60 on the surface of Main Processor Unit 2 and the opposite side of this bar is placed on the surface to be installed and install.When Main Processor Unit was transported between the position and can easily removes and is attached to stick, stick lid 62 can be used for covering and protecting stick.Main Processor Unit 2 also can be installed to vertical plane, the side of wall as shown in Figure 6.This is favourable, because Main Processor Unit is not easy to be moved from its position, more is not subject to enter and destroy the influence of the liquid of circuit, and can be to personnel under the situation of reporting to the police more addressable or as seen.Yet Main Processor Unit 2 also can be attached directly in the zone to be monitored, if zone especially to be monitored is that confined space is as in dynamo cradle or directly below containing water unit.
Fig. 7 is a rough schematic view, illustrate illustrative sensors and with the vertical view of the interface of Main Processor Unit.This figure only is an example, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.Sensor 4 can utilize any amount of method that is used to detect leakage, includes but not limited to that the mechanical float level changes, pressure descends or changes detection or ultrasonic or walkaway.Yet, in this embodiment of the present invention, measure resistance between two electrodes being included in the sensor 4 to determine whether to have taken place leakage.A plurality of electrodes 62 are comprised in the sensor 4 in the PVC cable 68, provide redundancy under this impaired during operation situation in electrode 62.PVC cable 68 is exposed to allow this cable to be electrically connected to sensor interface 70 at an end, and described sensor interface reception and explanation are from the signal of sensor 4.The part of PVC cable 68 or bar are removed the section 64 with exposed electrode 62, the detecting device of this section function for leaking.The exposed length 64 of electrode 62 can comprise section weak point, that expose of an arrangement in the flat sides of sensor 4, and perhaps the continuous segment of one electrode 62 in the flat sides of sensor 4 can be exposed as detecting medium.The side of sensor 4 with exposed length 64 of electrode 62 can be placed with facing down and with band (tape) or another adhesive attachment to zone to be monitored.
Fig. 8 is the simplified side view of illustrative sensors, and it illustrates the end of the sensor 4 that is connected to sensor interface 70.This figure only is an example, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.The part of electrode 62 is exposed electrode is electrically connected to sensor interface 70 at an end of PVC cable 66.In addition, sensor thickness can be 0.3mm or littler, and this prevents the unexpected during operation rolling of sensor or moves.The flatness of sensor 4 allows it to be trampled by accident and does not destroy its sensing work.
The exemplary installation diagram of Fig. 9 for simplifying illustrates leak sensor and can how to be implemented to surround device such as wafer fabrication tool or water heater.This figure only is an example, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.Installation diagram should be looked down from the top, because the article among the figure present in the x-y plane.Instrument 80 is positioned at the center of guarded region, and can be semiconductor processes instrument, water heater, groove (sink), air-conditioning unit or other any product that needs Leak Detection.Pipe 84 one of being connected to instrument 80 hold and provide water, gas, chemicals or are used to make the inflow of other required input of instrument 80 work.Sensor 4 be arranged on the device periphery around and may be attached to ground so that sensor 4 is kept in position.The Main Processor Unit 2 of leak sensor is connected to one of sensor end and can be placed on the ground, be installed in instrument originally or be placed on and be used near best wall of visiting on one's body.Can be included to prevent that at following dish 86 of the situation of leaking liquid dissemination from arriving greater than near the area the next-door neighbour, and encirclement instrument 80 and sensor 4.When leak taking place, signal 82 is from the Leak Detection regional spread, and wherein the exposed length 64 of electrode 62 contacts with leakage and signal is sent to Main Processor Unit 2, and wherein output signal may be sent out with the form of audio frequency or visual alarm.
Figure 10 and Figure 11 illustrative diagram for simplifying illustrates leak sensor is connected to the programmed logic interface so that many leak sensors can be multiplexed to single monitoring station.These figure only are examples, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.LS1-LS5 is the output port 90 from Main Processor Unit 2, and it can be connected to FPGA (Field Programmable Gate Array) control (PLC) unit 92.PLC unit 92 receives from five inputs of Main Processor Unit 2 and makes up these outputs and its other Main Processor Unit 2 from other leak sensor is outputed to the signal that sends to interface monitoring device 94.Interface monitoring device 94 can be near the monitored immediate area computing machine or at the computing machine in long-range place, as the emergency-response center (ERC) that the follow-up work of whole maker or building is responsible for.Interface monitoring device 94 is not limited to be computing machine and can to comprise the not supervisory system of appliance computer.Other output port 90 can also be multiplexed into PLC unit 92, and the interface monitoring device can also receive the input from a plurality of PLC unit.Although described here exemplaryly practiced five cables so that Main Processor Unit 2 is connected to PLC unit 92, other coupling arrangement also is possible.For example, in Figure 11, can be combined to an output cable 96 together from five output ports 90 of a Main Processor Unit 2, described output cable is connected to PLC unit 92 then.This will provide additional benefits, promptly have cable still less between PLC unit 92 and Main Processor Unit 2, thereby the complicacy that has reduced supervisory system keep its all function simultaneously.PLC unit 92 can receive from a plurality of cables 96 of Main Processor Unit 2 and with these outputs and be multiplexed in the signal that is sent to interface monitoring device 94, and described interface monitoring device can be positioned near monitored potential overflowing the place or at remote location such as ERC.Can use different enforcement will be multiplexed to interface monitoring device 94, as known to those skilled in the art from the signal of Main Processor Unit.For example, can use a plurality of cables to connect PLC unit 92 and interface monitoring device 94, maybe can use a plurality of interface monitoring devices with to not on the same group leak sensor inspection.
Other embodiments of the invention have been described the method for operation maker, wherein provide and leak sensor has been installed to leak to allow to detect in certain zone.In one aspect of the invention, having described the method that is used for operating maker provides thus and leak sensor is installed and leak to allow to detect in the zone of leakage to be monitored, and operating mechanism is to make integrated circuit.
Figure 12 illustrates the setting of leakage sensing apparatus and the rough schematic view of ongoing leak supervision.These figure only are examples, and it should excessively not limit the scope of claim here.It will be appreciated by those skilled in the art that more variation, modification and replacement.In step 100, leak sensor is brought to the zone of leakage to be monitored.Yet, zone that might leak sensor this leakage to be monitored Already in and needn't being transported.This leak sensor can comprise Main Processor Unit 2 and sensor 4.Main Processor Unit 2 is attached to sensor 4 in step 102 then.In one exemplary embodiment, this realizes by the sensor interface 70 that sensor 4 is coupled on the outside surface that is positioned at Main Processor Unit 2.If be desirably in time period of prolongation leak sensor is remained on zone to be monitored, then sensor 4 and Main Processor Unit 2 can be attached near the position of leakage to be monitored.If the required leakage sensing duration is short, leak sensor can be placed on given position simply or be maintained at user's possession.In step 106, power supply can be provided to Main Processor Unit then.Power supply can provide by some diverse ways, includes but not limited to supply battery or Main Processor Unit 2 is connected to external agency's power supply in Main Processor Unit 2.Power supply and can be alternatively in the tested suitable function of leaking sensing apparatus with checking of this point from the output signal of Main Processor Unit 2.Along with any test of carrying out, leaking sensing can begin in step 108, and continues up to detect leakage in step 110.Suitable then output signal is sent out in step 112, and this output signal can include but not limited to audio alarm, visual alarm or leakage indicator and have send to for example notification signal at ERC center of outer monitoring device.In step 14, leak sensor continues monitoring and whether has leakage.If leak sensor continue to send suitable output signal to notify suitable personnel to leak still to exist and still unresolved.Yet, being solved if leak, output signal stops and leaking sensing normally beginning once more in 108 in step 116.
Should also be understood that example as described herein and embodiment only are used for illustrative purposes, and various modifications in view of the above or change in the spirit and scope will occur to those skilled in the art and will be included in the application and in the scope of claims.
Claims (42)
1. the portable chemical sensor device of the ultrapure water that uses of the mechanism's environment that is used for the integrated circuit manufacturing, it comprises:
Portable shell, this portable shell have about 4 inches and littler length, about 1.5 inches and littler thickness and about 3 inches and littler width;
Sensing ports, be coupled to described shell and be coupled to outside sensing apparatus, this outside sensing apparatus is that at least one electrode member is right, and each described electrode member space ground each other is provided with, this electrode member to can according to described two electrode members contact the sensing leak fluid;
Amplifier installation is coupled to described sensing ports, and this amplifier installation can receive the one or more signals with first form from described outside sensing apparatus, and can be with described signal from described first format conversion to second form; And
Output unit, this output unit is coupled to described control device, the signal that this output unit can be associated with the state of described outside sensing apparatus based on the signal output with described second form.
2. the device of claim 1, wherein said outside sensing apparatus is a flat element, and this flat element comprises that described electrode member is right, and this flat element can be attached to surface region.
3. the device of claim 2 wherein uses glue-line to provide described and adheres to.
4. the device of claim 2 wherein uses belt to provide described and adheres to.
5. the device of claim 2, wherein said flat element has 0.50mm and littler or 0.25mm and littler thickness.
6. the device of claim 2, wherein said flat element is a flat cable.
7. the device of claim 1, wherein said output unit comprises audio alarm.
8. the device of claim 1, wherein said output unit comprises visual detector, this visual detector has at least two states based on the signal of described second form.
9. the device of claim 8, wherein said visual detector is LED.
10. the device of claim 1, wherein said output unit comprises supervisory system.
11. the device of claim 10 wherein provides chemical sensor array, each chemical sensor in the wherein said array is a chemical sensor as claimed in claim 1.
12. the device of claim 11, wherein said output unit comprises supervisory system, and this supervisory system comprises and is used to handle from least one multiplex interface of the output of described chemical sensor array and is used to monitor display screen from the signal of described chemical sensor array.
13. the device of claim 1 further comprises the power supply that is coupled to described portable shell.
14. the device of claim 1 further comprises the battery that is coupled to described portable shell.
Described battery is used as standby power supply 15. the device of claim 1 further comprises battery and the power supply that is coupled to described portable shell, and wherein said power supply is used as primary power.
16. the device of claim 1 further comprises the erecting bed that is coupled to described portable shell.
17. the device of claim 1, wherein said erecting bed comprises cohesive material, and this cohesive material is attached to described chemical sensing device and is attached to the surface of arriving to be installed in second side in a side.
18. the device of claim 1 further is included in the switch that changes the sensing range of described sensor at least between two different range.
19. the device of claim 1, one of wherein said scope is between 0-1M Ω cm.
20. the device of claim 1, one of sensing range of wherein said sensor is between 0-20M Ω cm.
21. one kind is used for the method that the protection mechanism environment avoids one or more leakages, this method comprises:
Be provided for monitoring the sensor device of leakage, this sensor device comprises sensing apparatus and processing unit, wherein
Described sensing apparatus comprises that at least one electrode member is right, and each described electrode member space ground each other is provided with, this electrode member to can according to two electrode members contact the sensing leak fluid, and
Described processing unit comprises: portable shell, this portable shell have about 4 inches and littler length, about 1.5 inches and littler thickness and about 3 inches and littler width; Amplifier installation, the signal with first form that can receive from described sensor also becomes second form with this conversion of signals; And output unit, the signal that can be associated with the state of described leak sensor based on signal output with described second form;
Described sensing apparatus is coupled to described processing unit; And
Provide the work of power supply to described processing unit with the described sensing apparatus of initialization.
22. the method for claim 21 further comprises the step of selecting one of a plurality of sensing ranges, this sensing range is provided by described processing unit based on the type of detected liquid.
23. the method for claim 21, wherein said sensing apparatus are flat element, this flat element comprises that described electrode member is right, and this flat element can be attached to surface region.
24. the method for claim 23, wherein said flat element have 0.5mm and littler or 0.25mm and littler thickness.
25. the method for claim 23, wherein said flat element are flat cable.
26. the method for claim 21, wherein said output unit comprises audio alarm.
27. the method for claim 21, wherein said output unit comprises visual detector, and this visual detector has based on two states with the signal of described second form at least.
28. the method for claim 27, wherein said visual detector are LED.
29. the method for claim 21, wherein said output unit comprises supervisory system.
30. the method for claim 21 wherein provides the sensing apparatus array, each sensing apparatus in the described array is a sensing apparatus as claimed in claim 20.
31. the method for claim 30, wherein said output unit comprises supervisory system, and this supervisory system comprises and is used to handle from least one multiplex interface of the output of described sensing apparatus array and is used to monitor display screen from the signal of described sensing apparatus array.
32. the method for claim 21, the zone of wherein said leakage to be monitored are the periphery of semiconductor processes instrument.
33. the method for claim 21 further is included in the zone of leakage to be monitored the surface region that described sensing apparatus is attached in the described mechanism environment;
34. a method that is used to operate maker, this method comprises:
Be provided for monitoring the sensor device of leakage, this sensor device comprises sensing apparatus and processing unit, wherein
Described sensing apparatus comprises that at least one electrode member is right, described this electrode member to can according to two electrode members contact the sensing leak fluid, and
Described processing unit comprises: portable shell, this portable shell have about 4 inches and littler length, about 1.5 inches and littler thickness and about 3 inches and littler width; Amplifier installation, the signal with first form that can receive from described sensor also becomes second form with this conversion of signals; And output unit, the signal that can be associated with the state of described leak sensor based on signal output with described second form;
Described sensor device is navigated to a zone in the described maker of leakage to be monitored;
Described processing unit is coupled to described sensor device;
Provide the work of power supply to described processing unit with the described sensing apparatus of initialization; And
Operation is used for the described mechanism that described SIC (semiconductor integrated circuit) is made.
35. the method for claim 34 further comprises the step that the sensor device array is provided, each sensor device in the wherein said array is the described sensor device of claim 31.
36. claim 35 method, wherein said output unit comprises supervisory system, and described sensor device array is connected to the supervisory system that is used for pilot signal, and this signal is sent by the output unit in each sensor device in the described array.
37. claim 36 method, wherein said supervisory system is positioned at the position away from the zone of described leakage to be monitored.
38. claim 34 method, wherein said output signal are sound signal.
39. claim 34 method further comprises the step of selecting one of a plurality of sensing ranges, this sensing range is provided by described processing unit based on the type of detected water.
40. claim 34 method, wherein said sensor device are flat element, this flat element comprises that described electrode member is right, and this flat element can be attached to surface region.
41. the method for claim 40, wherein said sensor device have 0.50mm and littler or 0.25mm and littler thickness.
42. the method for claim 40, wherein said flat element are flat cable.
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| CNB2005101120001A CN100483097C (en) | 2005-12-23 | 2005-12-23 | Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit |
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| CNB2005101120001A CN100483097C (en) | 2005-12-23 | 2005-12-23 | Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit |
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| CN100483097C CN100483097C (en) | 2009-04-29 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072799A (en) * | 2010-10-29 | 2011-05-25 | 中国原子能科学研究院 | Conductive liquid detecting device |
| CN101710100B (en) * | 2008-09-09 | 2014-02-05 | 霍尼韦尔国际公司 | Method and apparatus for low drift chemical sensor array |
| CN112710435A (en) * | 2020-12-18 | 2021-04-27 | 张家港宏昌钢板有限公司 | Regulator cubicle cooling water seepage detecting system |
-
2005
- 2005-12-23 CN CNB2005101120001A patent/CN100483097C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101710100B (en) * | 2008-09-09 | 2014-02-05 | 霍尼韦尔国际公司 | Method and apparatus for low drift chemical sensor array |
| CN102072799A (en) * | 2010-10-29 | 2011-05-25 | 中国原子能科学研究院 | Conductive liquid detecting device |
| CN112710435A (en) * | 2020-12-18 | 2021-04-27 | 张家港宏昌钢板有限公司 | Regulator cubicle cooling water seepage detecting system |
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| CN100483097C (en) | 2009-04-29 |
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