CN1974355A - Plate-like workpiece adsorption convey device and method - Google Patents

Plate-like workpiece adsorption convey device and method Download PDF

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Publication number
CN1974355A
CN1974355A CN 200610138736 CN200610138736A CN1974355A CN 1974355 A CN1974355 A CN 1974355A CN 200610138736 CN200610138736 CN 200610138736 CN 200610138736 A CN200610138736 A CN 200610138736A CN 1974355 A CN1974355 A CN 1974355A
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China
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mentioned
plate workpiece
axle sleeve
tubular
sorption
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CN 200610138736
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CN1974355B (en
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高木弘喜
松木健一
高野光正
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Nippon Mektron KK
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Nippon Mektron KK
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Publication of CN1974355A publication Critical patent/CN1974355A/en
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Publication of CN1974355B publication Critical patent/CN1974355B/en
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Abstract

The invention provides a sorption-transfer device and method for board-shaped workpiece. According the state of that the board-shaped workpiece deposits on the platform of the workpiece processing device provided with a plurality of protruding guiding pins, the board workpiece which is transferred by the sorption-kept of several vacuum pads vertically arranged on the support frame will not be hitched on the guiding pins and can be surely and safely sorption-kept. When the support frame declines and the flexible printed circuit substrate (FPC) is absorbed by the vacuum pads, the front end of the guiding pins is inosculated with a cylinder magnet which is vertically arranged on the support frame while the lower surface of the cylinder magnet contacts with the upper surface of the FPC, therefore, the FPC will not bend so as to be absorbed safely by the vacuum pads. If the FPC elevates to the predefined height, the cylinder shaft sleeve will be limited to rise and separates from the lower surface of the FPC and then comes back to the primary state, at the same time, the guiding holes of the FPC can be successfully pulled out of the guiding pins.

Description

The sorption conveyer of plate workpiece and transport method
Technical field
The present invention relates to the sorption conveyer of plate workpiece and transport method, particularly relate to the state from the pallet that is placed on the outstanding Workpiece processing apparatus that is provided with a plurality of guide pins, be located at a plurality of vacuum pad sorptions on the bracing frame by hanging down and keep the sorption conveyer that plate workpieces transport and transport method.
Background technology
For the device that keeps plate workpiece to transport with the sorptions on one side of a plurality of vacuum pads, all the time, mainly be widely used in (such as referring to patent documentation 1) such as transporting of the sheet metal that is stamping on one side.
In addition, flexible printed boards etc. have flexible plate workpiece as shown in Figure 8, in plate workpieces such as flexible printed board 1, opened pilot hole 2 in advance, above-mentioned pilot hole 2 is inserted from a plurality of guide pins 4 that the pallet 3 of Workpiece processing apparatus is given prominence to, and the state on plate workpiece 1 is positioned the placed side that is positioned over above-mentioned pallet 3 carries out processed.
In the occasion that the plate workpiece 1 after the processing is transported, the a plurality of vacuum pads 6 that vertically are located on the support 5 are descended from the top, as shown in Figure 9, plate workpiece 1 sorption is kept, under this state, make above-mentioned support 5 rise, transport with above-mentioned vacuum pad 6.
As the device that the object of easy deformation such as thin plate is carried out sorption, know following thin plate sucking device, this device is by the sucker of sorption thin plate, extension plate and above-mentioned sucker and extension plate are assembled into the mechanism that the structure of regulation keeps constitute, described extension plate is setovered by spring, at above-mentioned sucker with before thin plate as the sorption object contacts, push the part that does not have sucker of thin plate, be extended for plane (such as referring to patent documentation 2).
Patent documentation 1JP opens flat 4-39532 document in fact
Patent documentation 2JP opens clear 59-123038 document in fact
Summary of the invention
In the pallet 3 of Workpiece processing apparatus shown in Figure 8, insert the occasion that positions in the guide pin 4 at pilot hole 2 with flexible plate workpiece 1, guide pin 4 generally forms top and has the cylindric of fillet, and the profile of opening the above-mentioned guide pin 4 of pilot hole 2 its aperture efficiencies on plate workpiece 1 is big slightly.
The occasion that plate workpiece 1 is vertically mentioned with smooth state, there is not the interference of pilot hole 2 and guide pin 4, plate workpiece 1 is extracted from guide pin 4, successfully transported, but because that plate workpiece 1 has is flexible, so as shown in figure 10, near the rising earlier of vacuum pad 6, plate workpiece 1 bends, and the periphery of pilot hole 2 might hang on the guide pin 4.
In the time of such, by the elasticity of plate workpiece 1, the gap appears in the part at the position of vacuum pad 6 sorptions, enters air from this gap, and sorptive force reduces.Therefore, sorptive force reduces rapidly and so-called clamping mistake takes place, thereby causes and plate workpiece 1 can't be mentioned, or the unfavorable condition that drops of the plate workpiece 1 of mentioning.
In order to avoid this unfavorable condition, with being embedded in the enlarged diameter of pilot hole 2 of the plate workpiece 1 of guide pin 4, then can not hang on the guide pin 4, but owing to can lose accuracy of positioning, so can not pilot hole 2 Kai Detai are big.
Iff the bending that vacuum pad is followed have flexible plate workpiece, then as patent documentation 1, the ascending velocity that changes vacuum pad by the each several part at plate workpiece can realize, but can not prevent bending that cause with interference guide pin.
In addition,, keep, when plate workpiece rises,,, thereby the clamping mistake takes place so plate workpiece can produce bending because near the of vacuum pad earlier risen even correct crooked sorption afterwards by extending-board as patent documentation 2.
Therefore, the object of the present invention is to provide a kind of sorption conveyer and transport method, from being placed on the state on the pallet of giving prominence to the Workpiece processing apparatus that is provided with a plurality of guide pins, when keeping plate workpieces to transport by vertical a plurality of vacuum pad sorptions of being located on the bracing frame, plate workpiece can not be suspended on the guide pin, can be really and sorption successfully keep.
The present invention proposes in order to achieve the above object, scheme 1 described invention provides a kind of sorption conveyer of plate workpiece, it is by a plurality of vacuum pads on the bracing frame of being located at conveyer that hangs down, when the flexible plate workpiece with pilot hole being carried out the sorption maintenance, from above-mentioned pilot hole, extract and transport, the above-mentioned pilot hole of above-mentioned plate workpiece inserts a plurality of guide pins on the pallet that is based in Workpiece processing apparatus, be placed on the above-mentioned pallet, it is characterized in that, the sucking device of this plate workpiece constitutes in the following manner: the periphery that is based in the guide pin of above-mentioned pallet has been opened circular hole, will be by the tubular axle sleeve that can be made by the material of magnetic attraction according to its upper surface mode identical with the placed side height of above-mentioned pallet is embedded in the above-mentioned circular hole, simultaneously form this tubular axle sleeve according to the mode that can be raised to specified altitude from the placed side of above-mentioned pallet, in the above-mentioned bracing frame, the vertical tubular magnet that is provided with in the position relative with above-mentioned guide pin, this tubular magnet has the internal diameter bigger slightly than above-mentioned guide pin, and it is chimeric with above-mentioned guide pin, above-mentioned bracing frame descends, during with the above-mentioned plate workpiece of above-mentioned vacuum pad sorption, the chimeric above-mentioned tubular magnet of above-mentioned guide pin, above-mentioned tubular axle sleeve is by the magnetic attraction of tubular magnet simultaneously, plate workpiece is held between tubular magnet and the tubular axle sleeve, follow the rising of above-mentioned bracing frame, tubular axle sleeve by above-mentioned tubular attraction also rises to the afore mentioned rules height, continues the clamping plate workpiece.
According to this structure, bracing frame descends, and during by vacuum pad sorption plate workpiece, the front end of guide pin is fitted to hang down and is located in the tubular magnet of bracing frame, and the upper surface of the lower surface of tubular magnet contact plate workpiece.At this moment, the tubular axle sleeve is by the magnetic attraction of this tubular magnet, and plate workpiece is held between tubular magnet and the tubular axle sleeve.Therefore, plate workpiece at a plurality of positions by tubular magnet and the clamping of tubular axle sleeve, can be crooked, vacuum pad is the sorption plate workpiece positively.
Follow the rising of bracing frame, the tubular axle sleeve rises to specified altitude, will limit the rising of this tubular axle sleeve, separates with the lower surface of plate workpiece, and this tubular axle sleeve is got back to original state, and the pilot hole of plate workpiece is successfully extracted from above-mentioned guide pin.
Scheme 2 described inventions provide the sorption conveyer of scheme 1 described plate workpiece, it is characterized in that, constitute in the following manner: the lateral surface at above-mentioned tubular axle sleeve is provided with recess, medial surface at above-mentioned circular hole is provided with protuberance, and be based in the recess of above-mentioned tubular axle sleeve, when above-mentioned circular hole was mentioned, the protuberance card of above-mentioned circular hole ended in the recess of tubular axle sleeve with this tubular axle sleeve, with the rise limitation of tubular axle sleeve in specified altitude.
According to this structure, the tubular axle sleeve that is embedded in the circular hole of pallet is lifted, and the protuberance that is convexly set in the medial surface of circular hole is limited to the end of the recess that the lateral surface at the tubular axle sleeve is provided with, and the rising of tubular axle sleeve is limited in the specified altitude.
Scheme 3 described inventions provide the sorption conveyer of scheme 1 or 2 described plate workpieces, it is characterized in that, constitute in the following manner: the leading section of above-mentioned guide pin is front end that diameter reduces the gradually shape that attenuates, at vacuum pad sorption plate workpiece by above-mentioned bracing frame, when being lifted to specified altitude, the beginning taper portion of above-mentioned guide pin leading section is inserted in the pilot hole of the plate workpiece of clamping between above-mentioned tubular magnet and the tubular axle sleeve.
According to this structure, bracing frame descends, during with vacuum pad sorption plate workpiece, guide pin inserts and is embedded in the pilot hole of plate workpiece, the plate workpiece that is held between tubular magnet and the tubular axle sleeve is raised, and when the tubular axle sleeve was lifted to specified altitude, the beginning taper portion of guide pin leading section was inserted in the pilot hole, the interference of pilot hole and guide pin can not take place, and plate workpiece is extracted from guide pin.
Scheme 4 described inventions provide a kind of scheme 1 of having used, the method of transporting of the sorption conveyer of 2 or 3 described plate workpieces, this method is: by a plurality of vacuum pads on the bracing frame of being located at conveyer that hangs down, when above-mentioned plate workpiece is carried out the sorption maintenance, from above-mentioned pilot hole, extract and transport, the above-mentioned pilot hole of above-mentioned plate workpiece inserts a plurality of guide pins on the pallet that is based in Workpiece processing apparatus, be placed on the above-mentioned pallet, it is characterized in that, above-mentioned bracing frame descends, during with vacuum pad sorption plate workpiece, chimeric the hanging down of the front end of guide pin is located at the tubular magnet of bracing frame, simultaneously, the tubular axle sleeve of peripheral part that is embedded in guide pin in liftable mode is by the magnetic attraction of above-mentioned tubular magnet, clamping plate workpiece between tubular magnet and tubular axle sleeve, follow the rising of above-mentioned bracing frame, risen on one side by the tubular axle sleeve of the above-mentioned tubular attraction also plate workpiece of clamping on one side, the rising of tubular axle sleeve is limited at specified altitude, separate with plate workpiece, the tubular axle sleeve is got back to original state, simultaneously, the pilot hole of plate workpiece is successfully extracted from above-mentioned guide pin.
According to this structure, bracing frame descends, and during with vacuum pad sorption plate workpiece, the front end of guide pin and tubular magnet are chimeric, and the tubular axle sleeve is by above-mentioned tubular attraction, clamping plate workpiece.Plate workpiece rises from clamping up and down by tubular magnet and tubular axle sleeve, and when arriving specified altitude, the tubular axle sleeve separates with plate workpiece, and the pilot hole of plate workpiece is extracted from guide pin.
Scheme 5 described inventions provide the sorption of scheme 4 described plate workpieces to transport method, it is characterized in that, above-mentioned flexible plate workpiece is a flexible printed board.
According to this structure, by using above-mentioned sorption conveyer to transport flexible printed board, when mentioning, flexible base, board can be clamped between tubular magnet and the tubular axle sleeve with vacuum adsorption pad sorption flexible printed board, therefore flexible printed board can be not crooked, successfully extracts from guide pin.
The present invention is to above-mentioned such, inserted the pilot hole that is based in the guide pin on the pallet near, tubular magnet and tubular axle sleeve are mentioned with vacuum pad sorption plate workpiece simultaneously from clamping plate workpiece up and down, therefore plate workpiece can be not crooked, and vacuum pad is the sorption plate workpiece positively.And when plate workpiece was lifted to specified altitude, above-mentioned tubular axle sleeve separated with plate workpiece and restores, and the pilot hole of plate workpiece is successfully extracted from guide pin thus, thereby can positively transport plate workpiece.
Description of drawings
Fig. 1 is the sorption conveyer single-piece instruction diagram of expression plate workpiece of the present invention.
Fig. 2 (a) (b) is the enlarged drawing of the main portion of guide pin shown in Figure 1 and tubular axle sleeve.
Fig. 3 is the action of expression sorption conveyer shown in Figure 1, the instruction diagram after the sorption.
Fig. 4 is the action of expression sorption conveyer shown in Figure 1, the instruction diagram when mentioning.
Fig. 5 (a) (b) is the enlarged drawing of the main portion of guide pin, tubular axle sleeve and tubular magnet shown in Figure 4.
Fig. 6 is the action of expression sorption conveyer shown in Figure 1, the instruction diagram after the tubular axle sleeve separates.
Fig. 7 is the enlarged drawing of the main portion of the variation of expression guide pin shown in Figure 1 and tubular axle sleeve.
Fig. 8 is the instruction diagram of the sorption conveyer of the existing plate workpiece of expression.
Fig. 9 is the action of expression existing sorption conveyer shown in Figure 8, the instruction diagram after the sorption.
Figure 10 is the action of expression existing sorption conveyer shown in Figure 8, the instruction diagram when bending.
The specific embodiment
Below exemplifying suitable embodiment is described the sorption conveyer of plate workpiece of the present invention and the method for transporting.In order to reach following purpose, promptly from being placed on the state on the pallet of giving prominence to the Workpiece processing apparatus that is provided with a plurality of guide pins, when keeping plate workpieces to transport by vertical a plurality of vacuum pad sorptions of being located on the bracing frame, plate workpiece can not be suspended on the guide pin, can be really and the purpose that keeps of sorption successfully, the present invention realizes by following structure, this structure is: by a plurality of vacuum pads on the bracing frame of being located at conveyer that hangs down, when the flexible plate workpiece with pilot hole being carried out the sorption maintenance, from above-mentioned pilot hole, extract and transport, the above-mentioned pilot hole of above-mentioned plate workpiece inserts a plurality of guide pins on the pallet that is based in Workpiece processing apparatus, be placed on the above-mentioned pallet, it is characterized in that, the sucking device of this plate workpiece constitutes in the following manner: the periphery that is based in the guide pin of above-mentioned pallet has been opened circular hole, will be by the tubular axle sleeve that can be made by the material of magnetic attraction according to its upper surface mode identical with the placed side height of above-mentioned pallet is embedded in the above-mentioned circular hole, simultaneously form this tubular axle sleeve according to the mode that can be raised to specified altitude from the placed side of above-mentioned pallet, in the above-mentioned bracing frame, the vertical tubular magnet that is provided with in the position relative with above-mentioned guide pin, this tubular magnet has the internal diameter bigger slightly than above-mentioned guide pin, and it is chimeric with above-mentioned guide pin, above-mentioned bracing frame descends, during with the above-mentioned plate workpiece of above-mentioned vacuum pad sorption, the chimeric above-mentioned tubular magnet of above-mentioned guide pin, above-mentioned tubular axle sleeve is by the magnetic attraction of tubular magnet simultaneously, plate workpiece is clamped between tubular magnet and the tubular axle sleeve, follow the rising of above-mentioned bracing frame, tubular axle sleeve by above-mentioned tubular attraction also rises to specified altitude, continues the clamping plate workpiece.
Embodiment 1
Fig. 1 is all instruction diagrams of sorption conveyer 10 of expression plate workpiece of the present invention, in the present embodiment, as flexible plate workpiece, the sorption of flexible printed board 11 transported describes.
Opened pilot hole 12 in advance on this flexible printed board (hereinafter referred to as FPC) 11, above-mentioned pilot hole 12 is inserted a plurality of guide pins 14 of giving prominence to from the pallet 13 of Workpiece processing apparatus, carry out processed at the state that above-mentioned FPC 11 location is positioned over the placed side of above-mentioned pallet 13.FPC11 after the processing makes a plurality of vacuum pads 16 of being located at bracing frame 15 that hang down descend from the top, keeps FPC11 to transport with these vacuum pad 16 sorptions.
The periphery that is based in the guide pin 14 of above-mentioned pallet 13 has been opened circular hole 17, and tubular axle sleeve 18 is embedded in this circular hole 17.This tubular axle sleeve 18 be by can being formed by the material of magnetic attraction (such as iron etc.), is that the mode of sustained height is embedded in the circular hole 17 according to the placed side of its upper surface and above-mentioned pallet 13.
On the other hand, in the above-mentioned bracing frame 15, hanging down in the position relative with the guide pin 14 that is based in above-mentioned pallet 13 is provided with tubular magnet 19, and this tubular magnet 19 has than the large-sized slightly internal diameter of the external diameter of above-mentioned guide pin 14, and chimeric with above-mentioned guide pin 14.
As shown in Figure 2, above-mentioned tubular axle sleeve 18 is with respect to guide pin 14, and is chimeric according to the mode that direction up and down is free to slide, and forms according to the mode that can be lifted to specified altitude from the placed side of above-mentioned pallet 13.In addition, at the lateral surface of this tubular axle sleeve 18 recess 20 is set, and protuberance 21 is set, and be based in the recess 20 of tubular axle sleeve 18 at the medial surface of above-mentioned circular hole 17.
As shown in the figure, tubular axle sleeve 18 is embedded in the circular hole 17, and the surface is under the state of sustained height with the placed side of pallet 13 thereon, and raised part 21 is located at the position of the topmost of above-mentioned recess 20, and the below of this protuberance 21 is provided with the space of specified altitude H.
In addition, the leading section 22 of above-mentioned guide pin 14 is front end that diameter reduces the gradually shape that attenuates, be placed on the state of pallet 13 at FPC11, the front end of guide pin begins taper portion 23 and is present in position with the upper surface equal height of above-mentioned FPC11 or the position more outstanding than pilot hole 12.Therefore, inboard whole of the lateral surface of guide pin 14 and above-mentioned pilot hole 12 contacts, and FPC11 can be positioned on the pallet 13 accurately thus.In addition, for convenience of explanation, in each figure, put down in writing the gap of the lateral surface of the medial surface of pilot hole 12 and guide pin 14 bigger.
As shown in Figure 3, above-mentioned bracing frame 15 descends, and during with vacuum pad 16 sorption FPC11, the leading section 22 of guide pin 14 is embedded in the hole 24 of the tubular magnet 19 of being located at bracing frame 15 of hanging down, and the lower surface of tubular magnet 19 contacts with the upper surface of FPC11.At this moment, above-mentioned tubular axle sleeve 18 is by the magnetic attraction of this tubular magnet 19, and FPC11 is clamped between tubular magnet 19 and the tubular axle sleeve 18.Therefore, because many positions of FPC11 are by tubular axle sleeve 18 and 19 clampings of tubular magnet, so FPC11 can bending, vacuum available pad 16 sorption positively.
Bracing frame 15 rises at this state, and then as shown in Figure 4, the FPC11 of sorption on vacuum pad 16 separates with pallet 13 and rise.Follow the rising of bracing frame 15, the tubular axle sleeve 18 that is attracted by tubular magnet 19 also rises, and continues clamping FPC11.Like this, near the pilot hole 12 that guide pin 14 inserts, tubular magnet 19 and tubular axle sleeve 18 are from a plurality of positions of clamping FPC11 up and down, and therefore, FPC11 can be crooked, can and mention FPC11 by vacuum pad 16 sorption positively.
And, as shown in Figure 5, the words that the tubular axle sleeve 18 that is embedded in the circular hole 17 of pallet 13 is mentioned, the foot of above-mentioned recess 20 of then being located at the lateral surface of tubular axle sleeve 18 contacts with the raised part 21 of the medial surface that is based in circular hole 17 and is ended by card, thus with the rise limitation of tubular axle sleeve 18 within specified altitude H.
As shown in Figure 6, if bracing frame 15 further rises, then tubular axle sleeve 18 separates with the lower surface of the FPC11 of sorption on vacuum pad 16, this tubular axle sleeve 18 is got back to original state, and the pilot hole 12 of FPC11 is successfully extracted from above-mentioned guide pin 14, and FPC11 is transported to subsequent processing.
Like this, by vacuum pad 16, when carrying out sorption and transport to pilot hole 12 being inserted a plurality of guide pins 14 and being positioned FPC11 on the pallet 13, the front end of guide pin 14 is embedded in to hang down and is located in the tubular magnet 19 of bracing frame 15, and FPC11 is held between tubular magnet 19 and the tubular axle sleeve 18 and mentions, therefore this FPC11 can be not crooked, and vacuum available pad 16 sorption positively prevents the generation of clamping mistake.
In addition, the shape of above-mentioned tubular axle sleeve 18 is not limited to as described above, and upper surface and lower surface are same diameter, the vertical section C font of recess 20, the diameter that also can be upper surface as shown in Figure 7 is littler than the diameter of lower surface, and the vertical section of recess 20a is the tubular axle sleeve 18a of L font.To shape that should tubular axle sleeve 18a, at the medial surface of above-mentioned circular hole 17 protuberance 21a is set, and is based in the recess 20a of tubular axle sleeve 18a.This occasion also by with above-mentioned tubular axle sleeve 18 identical effects, FPC11 be held between tubular magnet 19 and the tubular axle sleeve 18a and mention, therefore can prevent the generation of clamping mistake.
Like this, only otherwise break away from spirit of the present invention, the present invention can do multiple change, and the present invention naturally relates to the content of this change.

Claims (5)

1. the sorption conveyer of a plate workpiece, it is by a plurality of vacuum pads on the bracing frame of being located at conveyer that hangs down, when the flexible plate workpiece with pilot hole being carried out the sorption maintenance, from above-mentioned pilot hole, extract and transport, the above-mentioned pilot hole of above-mentioned plate workpiece inserts a plurality of guide pins on the pallet that is based in Workpiece processing apparatus, be placed on the above-mentioned pallet, it is characterized in that, the sucking device of this plate workpiece constitutes in the following manner:
The periphery that is based in the guide pin of above-mentioned pallet has been opened circular hole, will be by the tubular axle sleeve that can be made by the material of magnetic attraction according to its upper surface mode identical with the placed side height of above-mentioned pallet is embedded in the above-mentioned circular hole, simultaneously form this tubular axle sleeve according to the mode that can be raised to specified altitude from the placed side of above-mentioned pallet
In the above-mentioned bracing frame, hanging down in the position relative with above-mentioned guide pin is provided with tubular magnet, and this tubular magnet has the internal diameter bigger slightly than above-mentioned guide pin, and chimeric with above-mentioned guide pin,
Above-mentioned bracing frame descends, during with the above-mentioned plate workpiece of above-mentioned vacuum pad sorption, the chimeric above-mentioned tubular magnet of above-mentioned guide pin, above-mentioned tubular axle sleeve is by the magnetic attraction of tubular magnet simultaneously, plate workpiece is held between tubular magnet and the tubular axle sleeve, follow the rising of above-mentioned bracing frame, also risen to specified altitude, continue the clamping plate workpiece by the tubular axle sleeve of above-mentioned tubular attraction.
2. the sorption conveyer of plate workpiece as claimed in claim 1 is characterized in that, constitutes in the following manner:
Lateral surface at above-mentioned tubular axle sleeve is provided with recess, and at the medial surface of above-mentioned circular hole protuberance is set, and is based in the recess of above-mentioned tubular axle sleeve,
When above-mentioned circular hole was mentioned, the protuberance card of above-mentioned circular hole ended in the recess of tubular axle sleeve with this tubular axle sleeve, with the rise limitation of tubular axle sleeve in specified altitude.
3. the sorption conveyer of plate workpiece as claimed in claim 1 or 2 is characterized in that, constitutes in the following manner:
The leading section of above-mentioned guide pin is front end that diameter reduces the gradually shape that attenuates, at vacuum pad sorption plate workpiece by above-mentioned bracing frame, when being lifted to specified altitude, the beginning taper portion of above-mentioned guide pin leading section is inserted in the pilot hole of the plate workpiece of clamping between above-mentioned tubular magnet and the tubular axle sleeve.
4. method of transporting of having used the sorption conveyer of claim 1,2 or 3 described plate workpieces, this method is: by a plurality of vacuum pads on the bracing frame of being located at conveyer that hangs down, when above-mentioned plate workpiece is carried out the sorption maintenance, from above-mentioned pilot hole, extract and transport, the above-mentioned pilot hole of above-mentioned plate workpiece inserts a plurality of guide pins on the pallet that is based in Workpiece processing apparatus, be placed on the above-mentioned pallet, it is characterized in that
Above-mentioned bracing frame descends, during with vacuum pad sorption plate workpiece, chimeric the hanging down of the front end of guide pin is located at the tubular magnet of bracing frame, simultaneously, the tubular axle sleeve of peripheral part that is embedded in guide pin in liftable mode is by the magnetic attraction of above-mentioned tubular magnet, clamping plate workpiece between tubular magnet and tubular axle sleeve
Follow the rising of above-mentioned bracing frame, risen on one side by the tubular axle sleeve of the above-mentioned tubular attraction also plate workpiece of clamping on one side, the rising of tubular axle sleeve is limited at specified altitude, separate with plate workpiece, the tubular axle sleeve is got back to original state, simultaneously, the pilot hole of plate workpiece is successfully extracted from above-mentioned guide pin.
5. method is transported in the sorption of plate workpiece as claimed in claim 4, it is characterized in that, above-mentioned flexible plate workpiece is a flexible printed board.
CN2006101387360A 2005-12-01 2006-11-13 Plate-like workpiece adsorption convey device and method Expired - Fee Related CN1974355B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005348458 2005-12-01
JP2005348458A JP4545681B2 (en) 2005-12-01 2005-12-01 Adsorption conveyance device and conveyance method for plate workpiece
JP2005-348458 2005-12-01

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CN1974355A true CN1974355A (en) 2007-06-06
CN1974355B CN1974355B (en) 2011-01-19

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JP (1) JP4545681B2 (en)
CN (1) CN1974355B (en)
TW (1) TW200723979A (en)

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TW200723979A (en) 2007-06-16
TWI326194B (en) 2010-06-11
JP4545681B2 (en) 2010-09-15

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