CN1955089B - 基板输送装置及包括该装置的基板处理装置 - Google Patents

基板输送装置及包括该装置的基板处理装置 Download PDF

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Publication number
CN1955089B
CN1955089B CN2006101499544A CN200610149954A CN1955089B CN 1955089 B CN1955089 B CN 1955089B CN 2006101499544 A CN2006101499544 A CN 2006101499544A CN 200610149954 A CN200610149954 A CN 200610149954A CN 1955089 B CN1955089 B CN 1955089B
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China
Prior art keywords
mentioned
upper plate
side buffer
outer side
buffer
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CN2006101499544A
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English (en)
Chinese (zh)
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CN1955089A (zh
Inventor
崔万寿
金正哲
朴镐胤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd.
DMS Co Ltd
Original Assignee
Display Manufacturing Services Co Ltd
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Publication date
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Publication of CN1955089A publication Critical patent/CN1955089A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN2006101499544A 2005-10-24 2006-10-19 基板输送装置及包括该装置的基板处理装置 Active CN1955089B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2005-0100238 2005-10-24
KR1020050100238A KR100674882B1 (ko) 2005-10-24 2005-10-24 기판 이송용 트랜스퍼
KR1020050100238 2005-10-24

Publications (2)

Publication Number Publication Date
CN1955089A CN1955089A (zh) 2007-05-02
CN1955089B true CN1955089B (zh) 2011-09-28

Family

ID=38014984

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006101499544A Active CN1955089B (zh) 2005-10-24 2006-10-19 基板输送装置及包括该装置的基板处理装置

Country Status (3)

Country Link
KR (1) KR100674882B1 (ko)
CN (1) CN1955089B (ko)
TW (1) TWI332930B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4450081B2 (ja) * 2008-02-13 2010-04-14 セイコーエプソン株式会社 部品試験装置
KR101105416B1 (ko) * 2009-07-23 2012-01-17 주식회사 디엠에스 기판 처리 장치
CN102136407B (zh) * 2009-12-31 2013-11-06 丽佳达普株式会社 基板处理装置的导引架
KR101331507B1 (ko) * 2010-08-09 2013-11-20 엘지디스플레이 주식회사 기판 세정/건조 장치와 이를 포함하는 기판 처리 장치, 그의 기판 세정/건조 방법, 및 디스플레이 패널의 제조 방법
CN103687795B (zh) * 2011-07-21 2016-05-11 蒂森克虏伯系统工程股份有限公司 用于在传送装置上停止和/或对准运输货物的器件和方法以及传送装置
CN108444265B (zh) * 2018-03-26 2020-06-16 东莞市银泰玻璃有限公司 一种玻璃板的转运晾干装置
KR102640243B1 (ko) 2023-07-31 2024-02-23 (주)템스코 동기식 개폐 구조를 갖는 실드형 oled 메탈 마스크제작용 픽업 이송장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2517701Y (zh) * 2001-09-20 2002-10-23 黄平尧 电路板的转向装置
CN1576199A (zh) * 2003-06-25 2005-02-09 显示器生产服务株式会社 在水平和垂直方向输送衬底的装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2517701Y (zh) * 2001-09-20 2002-10-23 黄平尧 电路板的转向装置
CN1576199A (zh) * 2003-06-25 2005-02-09 显示器生产服务株式会社 在水平和垂直方向输送衬底的装置

Also Published As

Publication number Publication date
TWI332930B (en) 2010-11-11
TW200716468A (en) 2007-05-01
KR100674882B1 (ko) 2007-01-29
CN1955089A (zh) 2007-05-02

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Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD.

Effective date: 20140225

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20140225

Address after: Gyeonggi Do, South Korea

Patentee after: Display Production Service Co., Ltd.

Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd

Address before: Gyeonggi Do, South Korea

Patentee before: Display Production Service Co., Ltd.

CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province

Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd.

Patentee after: DMS Co.,Ltd.

Address before: Gyeonggi Do, South Korea

Patentee before: DMS Co.,Ltd.

Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd.