CN1936495A

CN1936495A - Apparatus for detecting parallelism of two planes of platelike workpiece

Info

Publication number: CN1936495A
Application number: CN 200610117323
Authority: CN
Inventors: 赵晓银; 李伟; 刘占兵; 李迎伟
Original assignee: University of Shanghai for Science and Technology
Current assignee: University of Shanghai for Science and Technology
Priority date: 2006-10-19
Filing date: 2006-10-19
Publication date: 2007-03-28
Anticipated expiration: 2026-10-19
Also published as: CN100416218C

Abstract

The invention relates to a detection device for measuring the parallelism of two planes of a plate-shaped workpiece, comprising: a base on which a lateral movement mechanism is arranged, a laser sensor vertical movement mechanism is arranged on the lateral movement mechanism, and a grating is installed on the lateral movement mechanism At the same time, the movable part of the grating ruler is fixedly connected with the vertical movement mechanism of the laser sensor; a slide table is installed on the other side of the base, and a workpiece platform is installed on the slide table. When working, the two laser sensors installed up and down are located above and below the workpiece platform. , The device has simple structure, convenient operation, high speed and high measurement accuracy, and is suitable for industries such as radiation protection boards that need to accurately measure the parallelism of two planes of products.

Description

The pick-up unit of parallelism of two planes of platelike workpiece

Technical field

The present invention relates to the pick-up unit that a kind of plane parallel degree that flat panel workpieces (upper and lower surface is the plane) is carried out workpiece two planes carries out non-contact measurement, particularly a kind of at the special detection device of the exigent sheet-like workpieces of plane parallel degree up and down.

Background technology

The plane parallel degree technology of present known measuring workpieces is carried out at three dimensional coordinate measuring machine, this is not a kind of specialized equipment of the special measurement plane depth of parallelism, be characterized in contact type measurement, promptly realize measuring with the probe contact workpiece of three dimensional coordinate measuring machine, and in measuring process, can not gather the position data of putting on two planes to be measured of workpiece simultaneously, be to turn the survey another side again after workpiece must have been surveyed the position data that simultaneously goes up point, in computing machine, simulate two planes again according to these points again, further estimate the depth of parallelism on two planes, this measurement means costs dearly, and efficient is not high, only be strict with the measurement of the workpiece of plane parallel degree up and down for some, this measurement means is just not too practical.Develop a kind of special detection device of the contactless measurement plate level depth of parallelism, be that measure portion does not need contact workpiece can finish measurement, and can measure the special detection device of the plate level depth of parallelism to the position data that the collection point is carried out on workpiece two surfaces to be measured simultaneously, it can reduce some measurement expense to the single manufacturing enterprise of product measurement pattern requirement, improves the efficient of measuring.

Summary of the invention

The objective of the invention is to defective, a kind of measurement mechanism of parallelism of two planes of platelike workpiece is provided, improve efficiency of measurement, reduce cost at prior art.

For achieving the above object, the present invention adopts following technical proposals: a kind of parallelism of two planes of platelike workpiece pick-up unit, comprise base, work piece platform and laser sensor, it is characterized in that a side is installed a transverse moving mechanism by a fixing perpendicular side plate above the described base, laser sensor vertical movement mechanism of fixed installation fixedly mounts two described laser sensors respectively on the described transverse moving mechanism on the vertical moving frame of the upper and lower side of described laser sensor vertical movement mechanism; But opposite side is installed the vertically slide unit of positioning of a level above the described base, work piece platform of fixed installation on the described slide unit, and the centre of place work piece has a laterally long groove of wearing on the described work piece platform; During work, described two laser sensors are in the upper and lower of described work piece platform respectively and aim at described horizontal length and wear groove.

The upper side of the fixing base of above-mentioned transverse moving mechanism is installed a grating chi, the movable part of described grating chi is fixedly connected by web joint, and the vertical web joint that is connected transverse moving mechanism on described web joint and the laser sensor vertical movement mechanism is fixedly connected.

One side of above-mentioned base is equipped with two near switch bracket, and each is near respectively installing one near switch on the switch bracket, and be equipped with on the side of slide unit one corresponding to it switch block.

The structure of above-mentioned transverse moving mechanism is: a fixing base is fixedlyed connected with described perpendicular side plate, the vertical plane of described fixing base up and down both sides each fix a cross slide way, two cross slide waies slide with two traversing slide blocks respectively and mate, two traversing slide blocks are fixedlyed connected the cover plate of described laser sensor vertical movement mechanism with one fixedly connected, the fixedly connected end plate of one end of described fixing base, fixed installation one motor on this end plate; A horizontal drive screw makes the one end connect the output terminal of described motor by bearings, and the other end and a nut revolve joins, and described nut is fixedly installed on the inboard vertical plane of described fixing base.

The structure of above-mentioned laser sensor vertical mechanism is: a vertical substrate is fixedlyed connected with cover plate by described vertical web joint, vertically on the both sides, front and back of the vertical plane of substrate, by two vertical guide stem of block support fixation, there is up and down each two vertical slipper fixedly connected with each minor flaps up and down respectively, up and down the two minor flaps vertical moving frame of each fixedly connected installation laser sensor respectively; A vertical drive screw rod is arranged by bearings, make the one end connect an output shaft that is installed on the motor on the vertical substrate one end fixed charge method end plate, and the other end and two drive nuts revolve and join, and described two drive nuts are fixedly mounted on respectively up and down on two inboard vertical planes of minor flaps; One side of described vertical substrate is respectively installed one respectively near switch by two near switch bracket, correspondingly installs one near sensor block on the side of minor flaps on described.

Above-mentioned slide unit mechanism is: two horizontal longitudinal rails are fixedly mounted on the described base, four guide rail slide blocks slide with described two horizontal longitudinal rails respectively and mate, four fixedly connected supports of guide rail slide block, the described workbench of fixed installation above the support, a side of support is equipped with positive stop and near sensor block.

Electric mounting box is arranged under the above-mentioned base, the driver of two motors is housed in the electric mounting box, the power supply unit of two laser sensors and grating chi with and the input computing machine the data processing circuit, the communication line of the input computing machine of contact-making switch etc., and these data circuits are linked to each other with a control computer; This control computer internal configurations one blocks of data capture card, the signal of described electrical equipment except that the grating chi all links to each other with this data collecting card by above-mentioned communication line with data, and in compunication, accept computer control; Described grating chi carries out exchanges data by the corresponding interface and the computing machine of computing machine.

The beneficial effect of the special detection device of the plate workpiece surface plane depth of parallelism of the present invention is: because this device adopts two laser sensors simultaneously workpiece two parallel planes to be carried out the non-contact data collection, and can utilize computer controlled automatic, thereby improved efficient, reduced the measurement cost.This apparatus structure is simple, easy to operate, speed is fast, is applicable to the special plate workpiece production industries that tabular parallelism of two planes is had relatively high expectations such as radiation protection plate.

Description of drawings

Fig. 1 is the structural representation stereographic map of one embodiment of the invention;

Fig. 2 is the structural representation stereographic map of transverse moving mechanism in Fig. 1 example;

Fig. 3 is the structural representation stereographic map of laser sensor vertical movement mechanism in Fig. 1 example;

Fig. 4 is the structural representation stereographic map of slide unit in Fig. 1 example

Embodiment

A preferred embodiment of the present invention accompanying drawings is as follows:

Fig. 1 is the structural perspective of this parallelism of two planes of platelike workpiece pick-up unit, it comprises: base 1, it is provided with a perpendicular side plate 2, the side that this perpendicular side plate 2 is positioned at directly over the base 1 is equipped with a transverse moving mechanism 3, this transverse moving mechanism 3 is connected with laser sensor vertical movement mechanism 7 by vertical web joint 20, and driving laser sensor vertical movement mechanism 7 traverse motions, simultaneously, these transverse moving mechanism 3 tops are equipped with a grating chi 4, the movable part 6 of grating chi 4 is connected with vertical web joint 20 by web joint 5, thereby grating chi 4 can collect the shift values that laser sensor vertical movement mechanism 7 laterally moves; Described laser sensor vertical movement mechanism 7 is used for drive installation two

laser sensors

9,10 thereon and moves up and down, and the position data of gathering workpiece vertical direction of the point on two planes about in the of 11 by described two

laser sensors

9,10; With respect to the opposite side that perpendicular side plate 2 is installed one slide unit 14 is installed on the base 1, this slide unit 14 is used to place flat panel workpieces 11 and moves on the direction perpendicular to

laser sensor

9,10 direction of measurement and optical grating ruler measurement direction, laser sensor is moved, so that the position data of the point of a plurality of positions on the acquisition plane on this direction at the measurement point on the workpiece; One side of base 1 is equipped with two near switch bracket 17,18, near installing one on the switch bracket 17,18 respectively near switch 16,19, is used for detecting the position that slide unit 14 moves near switch 16,19 on base 1; The driver and the data communication apparatus of each motor can be installed in the box under the base 1, and these drivers are connected with a computing machine with data communication apparatus, and controlled by it, and this computing machine is handled coming on the self-test device data of each sensor.

Fig. 2 is the structural perspective of transverse moving mechanism 3 in Fig. 1 example, and this transverse moving mechanism 3 mainly is made up of end plate 27, motor 26, bearing 28, horizontal drive screw 24, nut 21, cover plate 22, two

horizontal moving sliders

31,23, two

cross slide waies

29,25 and fixing base 30.One end of fixing base 30 is installed vertical its positive end plate 27, a motor 26 is installed in the outside of end plate 27, these motor 26 main shafts link to each other with horizontal drive screw 24 1 ends, described horizontal drive screw 24 other ends are supported by bearing 28, laterally on the drive screw 24 nut 21 is installed, a cover plate 22 is installed in these nut 21 tops; Other two parallel sides of fixing base 30 are installed two

cross slide waies

29,25 respectively, and a supporting

traversing slide block

31 and 23 is installed respectively on two

cross slide waies

29,25, and traversing slide block 31 is all fixedlyed connected with cover plate 22 with 23; This cover plate 22 is to link to each other with laser sensor vertical movement mechanism 7 among Fig. 1 by the vertical web joint 20 of the middleware among Fig. 1.

Fig. 3 is the structural perspective of laser sensor vertical movement mechanism 7 in Fig. 1 example, this laser sensor vertical movement mechanism 7 is mainly by two

vertical guide stem

35,37, vertical drive screw rod 36,

vertical slipper

33,51,38,41,

drive nut

43,53, bearing 54,

block

40,32,52,

minor flaps

34,39, vertical

moving frame

8,15,

laser sensor

9,10,

near switch

45,48,

near switch bracket

46,49, near sensor block 50, motor 56, end plate 31, installing plate 20 and vertically substrate 42 form.Vertically on the one side of substrate 42 two pairs of identical

vertical slippers

33,51,38,41 are installed; One

vertical guide stem

35,37 respectively is installed between described two pairs of vertical slippers, and

vertical slipper

33,51,38,41 can slidably reciprocate along

guide rod

35,37; On the vertical substrate 42 between two pairs of

vertical guide stem

35,37, the bearing 54 of a parallel axes in two vertical guide stem axis is installed; One vertical drive screw rod 36 is installed in the bearing 54; Two

drive nuts

43,53 are installed on the vertical drive screw rod 36; One

minor flaps

39,34 is installed respectively on two

drive nuts

43,53; Described

minor flaps

39,34 is fixedly connected on respectively on two groups of

vertical slippers

33,51,38,41, and can move back and forth along the vertical guide stem axis direction together with these two groups of

vertical slippers

33,51,38,41 respectively; The vertical moving

frame

8,15 of two

laser sensors

9,10 is installed respectively above the

minor flaps

39,34; Two

laser sensors

9,10 are installed respectively above the vertical moving

frame

8,15, and

laser sensor

9,10 lays respectively at the inboard of vertical moving

frame

8,15, and it is opposite that the installation site should guarantee to send the laser radiation direction; Vertically be positioned at the outside of

vertical slipper

33,51,38,41 on the substrate 42, a

block

40,32,52 respectively is installed, thereby

block

40,32,52 is fixedlyed connected with

vertical guide stem

35,37 respectively

vertical guide stem

35,37 is fixed on the vertical substrate 42; Vertically on the end face of substrate 42 end plate 31 is installed, end plate 31 outsides are equipped with a motor 56, and motor 56 main shafts are fixedlyed connected with described vertical drive screw rod 36; Vertically install on the side of substrate 42 two near

switch bracket

46,49, two near installing one on the

switch bracket

46,49 respectively near

switch

45,48; In addition, vertically on the bottom surface of substrate 42 installing plate 20 is installed also, is used for whole laser sensor vertical movement mechanism 7 is fixed on described transverse moving mechanism 3; On slide block 51 outsides, install one near sensor block 50.

Fig. 4 is the structural perspective of slide unit 14 in Fig. 1 example, and this slide unit 14 is mainly by guide

rail slide block

57,58,62,64, horizontal

longitudinal rail

59,61, positive stop 63, form near sensor block 65, support 60 and work piece platform 13.Described support 60 bottom surfaces are installed the guide

rail slide block

57,58,62,64 of two pairs of mounting hole parallel axes respectively; Every pair of guide rail slide block is installed on the horizontal

longitudinal rail

59,61 and also can slides along this guide rail, also fix a positive stop 63 on horizontal longitudinal rail 61; A work piece platform 13 is installed in support 60 tops, has a laterally long groove 12 of wearing on the work piece platform 13, and workpiece 11 is placed on laterally long position of wearing directly over the groove 12 on the workbench 13.Support 60 lower end side are equipped with a positive stop 63.

During the work of present embodiment parallelism of two planes of platelike workpiece pick-up unit, the operator is placed on the workbench 13 laterally long position of wearing directly over the groove 12 to flat panel workpieces 11, and slide unit 14 push to laser detector under, make near sensor block 65 and face near switch 16, owing to adjust through installing in advance, at this moment, two

laser sensors

9,10 laser just in time can be got to workbench 13 upper flat plate workpiece 11 and be on the position of groove 12, simultaneously, computer acquisition is to the state near switch, judge that slide unit 14 positions are ready, start the computer testing program, motor 56 drives vertical drive screw rod 36 and rotates, vertical drive screw rod 36

drives drive nut

43,53 move to the direction of workpiece 11 together, drive

nut

43,53 drive fixed installation minor flaps 34 thereon, 39, and then drive is fixedly mounted on minor flaps 34, on 39

near switch bracket

49,46 are being with

laser sensor

9,10 move in the range ability of laser sensor, because

laser sensor

9,10 not need contact workpiece 11 be that detectable workpiece 11 is to its distance in beam direction, therefore, can realize non-contact measurement, at this moment, sense near sensor block 50 near switch 45, and pass to Computer signal by communication device, it is ready that computing machine judgement laser sensor begins the measuring position, computing machine is by

laser sensor

9,10 gather any position data (being designated as the Z directional data) of vertical direction of workpiece 11 upper and lower surfaces, write down the grating chi reading (being designated as the directions X data) of 4 this moments simultaneously, then, control motor 26 drives screw rod 24 and rotates, screw rod 24 drives nut 21, nut drives cover plate 22 motions, cover plate 22 drags a bit of fixing distance of whole laser sensor vertical movement mechanism mounted thereto 7 motions, this segment distance is by program setting, simultaneously, the reading of computer acquisition grating chi 4, obtain the size of actual motion distance, when this reaches setting value apart from size, control motor 26 stops, begin by

laser sensor

9,10 gather the position data of the vertical direction of second of flat panel workpieces 11 upper and lower surface, circulation is gone down, computing machine obtains one group of such data, and (this group is put under three-dimensional system of coordinate except top described X, Y directional data beyond the Z direction, all be designated as zero), at this moment, laser sensor vertical movement mechanism 7 moves to an end of transverse moving mechanism 3, then, the operator promotes slide unit 14 forward, make near sensor block 29 and face near switch 19, computing machine judges that slide unit 14 enters second measuring position, start next job step of computer program, computer control motor 26 motion in the other direction, and gather the Z directional data of the second row point, method is identical when gathering first group of point.The Y directional data all is designated as the poor of two positions in three-dimensional system of coordinate; Two row's directions X data are program settings and pass through control motor movement specific implementation.According to the data of each X, Y, Z direction, can simulate in the computing machine flat panel workpieces on lower plane, further can estimate out the depth of parallelism on two planes.

Claims

1. A device for detecting the parallelism of two planes of a plate-shaped workpiece, comprising a base [1], a workpiece platform [13] and laser sensors [9], [10], characterized in that the upper side of the base [1] passes A fixed vertical side plate [2] is equipped with a lateral movement mechanism [3], and a laser sensor vertical movement mechanism [7] is fixedly installed on the described lateral movement mechanism [3]. The laser sensor vertical movement mechanism [7] Two laser sensors [9], [10] are respectively fixedly installed on the vertical moving frames [8], [15] at the upper and lower ends of ]; a horizontal and longitudinal position-adjustable sensor is installed on the other side of the base [1]. The slide table [14], a workpiece platform [13] is fixedly installed on the slide table [14], and there is a long transverse groove [12] at the center of the workpiece [11] placed on the workpiece platform [13]; When working, the two laser sensors [9], [10] are respectively positioned above and below the workpiece platform and aligned with the long transverse groove [12].

2. The device for detecting parallelism between two planes of a plate-shaped workpiece according to claim 1, characterized in that a grating ruler [4] is installed on the upper side of the fixed substrate [30] of the lateral movement mechanism [3], and the grating The movable part [6] of the ruler [4] is fixedly connected through the connecting plate [5], and the vertical connecting plate [5] connected with the vertical moving mechanism [7] of the laser sensor on the horizontal moving mechanism [3] 20] Fixed connection.

3. The device for detecting parallelism between two planes of a plate-shaped workpiece according to claim 1, characterized in that two proximity switch brackets [17], [18] are installed on one side of the base 1, and each proximity switch A proximity switch [16], [19] is respectively installed on the support [17], [18], and a proximity switch block [65] corresponding thereto is housed on the side of the slide table [14].

4. The device for detecting the parallelism between two planes of a plate-shaped workpiece according to claim 1, wherein the structure of the lateral movement mechanism [3] is: a fixed base plate [30] and the vertical side plate [2] Fixedly connected, a horizontal guide rail [25], [29] is respectively fixed on both sides of the vertical surface of the fixed base plate [30], and the two horizontal guide rails [25], [29] are respectively connected with two transverse sliding slides. Blocks [23], [31] are slidingly matched, and two traversing sliders [23], [31] are fixedly connected to a cover plate [22] that is fixedly connected to the vertical movement mechanism [7] of the laser sensor, and the fixed One end of the base plate [30] is fixedly connected to an end plate [27], and a motor [26] is fixedly installed on the end plate; a horizontal drive screw is supported by a bearing [28] so that one end thereof is connected to the motor [26] The output end and the other end are screwed with a nut [21], and the nut [21] is fixedly installed on the inner vertical surface of the fixed base plate [30].

5. The device for detecting parallelism between two planes of a plate-shaped workpiece according to claim 1, characterized in that the vertical mechanism [7] of the laser sensor has the following structure: a vertical substrate [42] passes through the vertical connection Plate [20] is fixedly connected with cover plate [22], and on the front and rear sides of the vertical plane of vertical substrate [42], two vertical guide rods [ 37], [35] have two vertical slide blocks [33], [51], [38], [41] fixedly connected with each small cover plate [34], [39] up and down respectively. The small cover plate [34], [39] is respectively fixedly connected with a vertical mobile frame [8], [15] that installs a laser sensor [9], [10]; there is a vertical drive screw [36] driven by a bearing [54] support, one end of which is connected to an output shaft of a motor [56] mounted on one end of the vertical base plate [42] and one end of the fixed end plate [31], and the other end is screwed with two drive nuts [53], [43], The two driving nuts [53], [43] are respectively fixedly installed on the inner vertical surfaces of the upper and lower two small cover plates [34], [39]; one side of the vertical base plate [42] passes through two A proximity switch bracket [49], [46] respectively installs a proximity switch [48], [45] respectively, and a proximity sensing block [50] is installed correspondingly on the side of the described upper small cover plate [34].

6. The device for detecting the parallelism between two planes of a plate-shaped workpiece according to claim 1, characterized in that the structure of the sliding table mechanism [14] is: two horizontal longitudinal guide rails [59], [61] are fixedly installed On the base [1], four guide rail sliders [57], [58], [62], [64] slide and match with the two horizontal longitudinal guide rails [59], [61] respectively, and the four Block guide rail slide block [57], [58], [62], [64] is fixedly connected a support [60], above the support [60] fixedly installs described working platform [13], one side of support [60] Install limit stop [63] and proximity sensor [65].

7. The device for detecting the parallelism between two planes of a plate-shaped workpiece according to claim 1, characterized in that there is an electrical installation box under the base [1], and two motors [26], [56 ], the power supply unit of two laser sensors [9], [10] and grating scale [4] and its input data processing circuit of the computer; the contact switch [16], [19], [48], [45] Input the data communication lines of the computer, etc., and connect these data lines with a control computer; a data acquisition card is configured inside the control computer; the signals and data of the electrical components other than the grating ruler [4] are all passed through the The data line is connected with the data acquisition card, communicates with the computer, and is controlled by the computer; the grating ruler [4] exchanges data with the computer through the corresponding interface of the computer.