CN1830621A - Grinding equipment of plate material and grinding method - Google Patents

Grinding equipment of plate material and grinding method Download PDF

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Publication number
CN1830621A
CN1830621A CN 200610017648 CN200610017648A CN1830621A CN 1830621 A CN1830621 A CN 1830621A CN 200610017648 CN200610017648 CN 200610017648 CN 200610017648 A CN200610017648 A CN 200610017648A CN 1830621 A CN1830621 A CN 1830621A
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CN
China
Prior art keywords
grinding
workbench
plate
grinding head
glass substrate
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CN 200610017648
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Chinese (zh)
Inventor
贾伟
梁勇
李长俊
阎志勇
张魁东
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河南安彩高科股份有限公司
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Priority to CN 200610017648 priority Critical patent/CN1830621A/en
Publication of CN1830621A publication Critical patent/CN1830621A/en

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Abstract

A method for grinding on the plate object, especially the FPD glass substrate, features that the moving trace on the surface to be ground is programmed, and a novel loading-unloading technology for the plate object is used. Its grinder features that is grinding pressure and rotation speed is adjustable and its grinding mechanism can move longitudinally and transversely.

Description

The milling apparatus of plate object and Ginding process
Technical field
The invention belongs to the fine gtinding and the polishing technology field of plate object, relate in particular to a kind of milling apparatus and Ginding process that the FPD glass substrate is carried out the plate object of fine gtinding and polishing.
Technical background
The continuous change of FPD display size is big, bring the production difficulty that constitutes FPD critical piece-glass substrate more and more higher, particularly surface roughness (Roughness), percent ripple performance parameters such as (Waviness) require in glass ware forming technology more and more rareer to satisfying.Because glass substrate will be used for critical piece ITO and the colored filter that technological processes such as chemical deposition, physical deposition, photetching, array form FPD, if the surface property parameter can not be guaranteed, the output of glass substrate just is difficult to improve.
In addition, in the processing of glass substrate streamline, the change of glass substrate size is big, and the probability that makes various defectives occur also increases thereupon.If there is not " grinding " this auxiliary process flow process, it is useless that the appearance of blemish will directly cause declaring of glass substrate in these technological processes such as cut, adhesion, because glass substrate manufacturing cost costliness, the increasing of cost input is well imagined.
In the glass substrate production technology blemish glass substrate is within the specific limits kept, use assisted milling technology to remove blemish, this portioned product is called " regenerate ".The quantity of regenerate generally accounts for about 30 percent of production output.By grinding to regenerate, can save most defectiveness product, reduce the glass substrate quantity scrapped, thereby effectively control production cost; And by grinding surface propertys such as can improving the glass baseplate surface roughness greatly, for the processing of subsequent panel factory provides good condition, reduce the user and avenge a grievance, therefore " grinding " is very important together technological process for glass substrate manufacturer.
Figure one is the side diagrammatic sketch of disclosed a kind of glass substrate milling apparatus among the Japan Patent JP2001-347451 (denomination of invention GRINDING DEVICE is hereinafter to be referred as publication one).In the method for publication one, stretching out grinding head 110 to be lifted to revolve from horizontal level and turning 90 degrees of axle 150 makes the grinding head 110 that was horizontal originally change to vertical direction, putting up and unloading before and after in vertical direction glass being ground.Glass substrate 500 is adsorbed on the grinding head 110 by artificial method, motor 130 rotates by taken abrasive disk 160 of reduction box 131, cylinder 120 utilizes an axle front end of 130 to prop up the power of naming a person for a particular job and be applied on the grinding head 110 that has the self-adjusting bearing, make the relative motion of the grinding head 110 that is stained with glass substrate 500 and abrasive disk 160 generation levels, because the off-centre setting of glass substrate 500 and abrasive disk 160, make the servo-actuated of the grinding head 110 have the self-adjusting bearing than abrasive disk slower slightly and rotation, thereby the surface of glass substrate 500 is fully ground.But along with the increase of glass size, the above glass substrate of G5 needs the grinding head size at least more than 1.2 meters, like this equipment just need do very high, manufacturing cost is bigger; In addition, large-sized glass substrate 110 needs two people or the above carrying of two people glass substrate to be lifted to the vertical position of grinding head 110, the method that employing is looked up is carried out loading, unloading, loading and unloading difficulty and operating efficiency are low, therefore this kind milling apparatus is only applicable to the grinding of small size glass substrate, and the above glass substrate of G5 grinds difficult the realization on this milling apparatus.
Figure two discloses a kind of glass substrate milling apparatus canonical schema among the Japan Patent 2001-293656 (denomination of invention CONTINUOUS-TYPE POLISHINGDEVICE OF PLATE-LIKE BODY, AND ITS METHOD is hereinafter to be referred as publication 2).In the method for publication two, glass substrate 500 is adsorbed on the workbench 220, workbench 220 moves back and forth on the track on the base 230, grinding head 210 is installed on the support 240, and the reciprocating motion of workbench 220 makes glass substrate 500 contact with grinding head 210 surface of glass substrate 500 is ground.Grinding polylith glass substrate 500 simultaneously is greatly improved the efficient of equipment, but also there is following point in this kind method, figure three is schematic diagrames of institute's introduction method process of lapping in the publication 2, grinding head 210 rotations drive abrasive disk 211 rotations, workbench 220 drives glass substrate 500 and moves back and forth, grinding head is when a glass substrate milled border withdraws from and next piece glass substrate when grinding, grinding block 211 is in the process that withdraws from and begin to grind, problems such as it is too fast to cause abrasive disk 211 to damage, and the glass substrate edge grinding is too much.
In addition, above-mentioned two kinds of milling apparatus all exist such problem.The said equipment all is that glass substrate 500 is adsorbed in workbench 220 surfaces, manually uses aid that glass substrate is peeled off from workbench 220.Figure four is rough schematics of present institute's use glass substrate 500 stripping means on workbench 220.This kind method is peeled off quite difficulty of glass substrate 500, because the glass substrate that is used for FPD is as thin as a wafer, and the thinnest 0.5MM that reaches, the possibility that ground glass substrate 500 is damaged once more is very big, and inefficiency.The loading and unloading method of above-mentioned glass substrate can not adapt to the production efficiency of scale far away, and glass substrate is manufactured and pressed for a kind of high efficiency large-size glass substrate loading and unloading method and milling apparatus.
Summary of the invention
Based on above reason, the purpose of this invention is to provide a kind of milling apparatus that the FPD glass substrate is carried out the plate object of fine gtinding and polishing, milling apparatus is made of two parts: a part is that grinding pressure and grinding rotating speed are adjustable, along being installed on the workbench or the guider of both sides vertically moves back and forth, and the grinding mechanism that grinding head can traverse motion; Another part is the grinding mechanism guider to be installed and can conveniently to realize fixing and the workbench that separates the plate object anchor clamps.
Another object of the present invention provides a kind of by using the movement locus of programming lapped face; and the Ginding process of employing plate object loading and unloading technology; the plate object surface is ground fully; reduce plate object winding interval and equipment downtime; reduce the probability that the plate object edge fault produces; improve the quality of grinding plate object surface, back simultaneously greatly, realize the grinding of high efficiency.
The object of the present invention is achieved like this:
A kind of plate object milling apparatus, be used for the grinding and the polishing of plate object, having can horizontal and vertical reciprocating motion and the rotating speed of grinding head and the grinding mechanism of adjustable in pressure, and the workbench of corresponding grinding mechanism is provided with absorption, fixing and take out the glass substrate anchor clamps of glass substrate.
Described grinding mechanism comprises the rotating speed and the pressure mechanism of grinding head, the horizontal and vertical reciprocating mechanism of driving grinding head, control grinding head, and grinding mechanism is installed in the both sides or the top of workbench.
The horizontal and vertical reciprocating mechanism of described driving grinding head is: the traverse motion guide rail is installed on crossbeam, grinding head is installed on the traverse motion guide rail and by transmission mechanism and drives grinding head along the guide rail traverse motion, crossbeam is installed on the guider of workbench, and drives crossbeam vertically reciprocating action on guider by transmission mechanism.Grinding head drives grinding head by transmission mechanism and is meant that along the guide rail traverse motion realize along being slidingly matched of guide rail by motor-driven grinding head on the grinding head by being installed in for grinding head.Crossbeam is meant that by transmission mechanism driving vertical reciprocating action on guider guider is cooperated with screw by two pairs of leading screws that are separately fixed at crossbeam and workbench both sides, vertical reciprocating action of crossbeam drives the screw that is fixed on the crossbeam by the driven by servomotor leading screw that is installed in workbench one side, and rotation is advanced or setback.
The rotating speed and the pressure mechanism of control grinding head are: the cylinder assembly by pneumatic circuit control grinding head pressure is installed on the grinding mechanism, and the electric appliance component that drives the grinding head rotation is installed, on the grinding head gyroaxis splined shaft is installed, splined shaft is by gear and driver part engagement, driver part connects motor, between grinding head and cylinder, use relocation mechanism to be connected, relocation mechanism uses pair of planar self-adjusting bearing to realize floating, the grinding pressure of grinding head is installed in the cylinder control of grinding mechanism top by adjustment, grinding pressure can be adjusted by the pressure regulator valve in the control gas circuit, about the solenoid control grinding head, grind rotating speed and be installed on the grinding mechanism body by adjustment and drive the motor that grinding head rotates and realize.
The workbench of described corresponding grinding mechanism is provided with absorption, glass substrate anchor clamps fixing and the taking-up glass substrate are meant in workbench central authorities with the contacted surface design of glass substrate anchor clamps pore is arranged, fixing by vacuum in the connection pore between glass substrate anchor clamps and the workbench realizes, when anchor clamps need take off under workbench, the vacuum of breaking was promptly separable.
Be provided with the groove that matches with the glass substrate anchor clamps on workbench, the lower limb periphery of glass substrate anchor clamps is provided with and the corresponding boss of workbench groove, realizes and the relatively accurate location of workbench groove by the boss on the anchor clamps.
A kind of Ginding process of plate object is programmed by the movement locus of lapped face by using, and adopts the Ginding process of plate object loading and unloading technology.
Adopt following steps:
1) anchor clamps that will have a plate object are by boss and the corresponding location of the groove on the workbench around the anchor clamps lower limb, then vacuum by the pore of workbench and plate object anchor clamps centre with both firm being attached together,
2) grinding head is by the upper surface that stretches out the contact plate object of cylinder, and grinding mechanism grinds at the upper surface of glass substrate by the horizontal and vertical reciprocating motion of self,
3) milled-in current of grinding mechanism can be the combination of multiple grinding track and number of times by electrical design,
4) grind end back grinding mechanism and return initial position, block the vacuum in the pore, the anchor clamps that will have plate object take out,
5) anchor clamps that another piece had a plate object set by step 1 described method be installed on the workbench, carry out the grinding of next piece plate object.
Grinding mechanism provided by the invention can move back and forth by the guider that is installed in workbench top or both sides, and can adjust grinding pressure and grind rotating speed by electrical control.Guider is cooperated with screw by two pairs of leading screws, vertical reciprocating action of grinding mechanism drives the screw that is installed on the grinding mechanism by the driven by servomotor leading screw that is installed in workbench one side, rotation is advanced or setback, and two motors that also can be mounted in the workbench both sides move by belt or other transmission mechanism and realize vertical reciprocating motion of grinding mechanism; The traverse motion of grinding head slides by the cooperation of the motor on the grinding head on the guide rail that is installed on the grinding mechanism crossbeam and realizes.Grinding pressure is installed in the cylinder control of grinding mechanism top by adjustment, grinding pressure can use electric the adjustment by the pressure regulator valve of design control cylinder pressure in gas circuit, also can in the process of grinding, a plurality of grinding pressures be set as required, for example, grinding the grinding pressure different in early stage etc. with the later stage employing at the edge pressure different with central design.Grinding rotating speed is installed on the grinding mechanism body by adjustment and drives the motor that grinding head rotates and realize, motor can use variable-frequency motor or servomotor, use the electric difference of controlling rotating speed, for example adopt different rotating speeds with central authorities, grinding the grinding rotating speed different in early stage etc. with the later stage employing at the edge.Workbench provided by the invention can be realized the fixing of glass substrate anchor clamps and separate that workbench adopts the little thing of deflection to make, and design has the control button that is convenient to operation easily.Above workbench or both sides the motion guide rail of grinding mechanism is installed.The design of workbench surface has and the corresponding installation profile of glass substrate anchor clamps, makes things convenient for the glass substrate anchor clamps to be placed on it easily and to take out.There is pore in workbench central authorities with the contacted surface design of glass substrate anchor clamps, and fixing by vacuum in the connection pore between anchor clamps and the workbench realizes that when anchor clamps need take off, the vacuum of breaking was promptly separable under workbench.Therefore the present invention has the plate object surface is ground fully; reduce plate object winding interval and equipment downtime; reduce the probability that the plate object edge fault produces, improve the quality of grinding plate object surface, back simultaneously greatly, realize the advantage that high efficiency grinds.
Description of drawings:
Fig. 1 is the side diagrammatic sketch of milling apparatus among the Japan Patent JP2001-347451.
Fig. 2 is the canonical schema of milling apparatus among the Japan Patent JP2001-293656.
Fig. 3 is the view that milling apparatus grinds among the Japan Patent JP2001-293656.
Fig. 4 is a glass substrate manual removal schematic diagram.
Fig. 5 is the canonical schema of glass substrate anchor clamps used herein.
Fig. 6 is the canonical schema that the invention provides milling apparatus.
Fig. 7 is the principle schematic that the invention provides grinding head.
Fig. 8 is the gas circuit principle schematic diagram that the invention provides grinding head.
Fig. 9 is a specific embodiment of equation of linear regression that grinding track of the present invention adopts combination.
Figure 10 adopts this method to grind the comparison of the glass baseplate surface roughness of front and back.
Symbol description:
300, milling apparatus, 310, grinding head, 320, guide rail, 330, crossbeam, 340, guiding mechanism, 350, workbench, 500, glass substrate.
The specific embodiment
The glass substrate clamp structure that relates among the present invention is: glass substrate of the present invention has carried out independent right application.Fig. 5 is the canonical schema of glass substrate anchor clamps, the upper surface design of anchor clamps has special elasticity thing 410, by the vacuum principle of method such as rolling with glass substrate 500 and anchor clamps 400 firm being attached together, the lower limb periphery design of anchor clamps has and the corresponding boss 430 of workbench groove, can realize and the relatively accurate location of workbench groove by the boss on the anchor clamps 430.When grinding, glass substrate 500 is adsorbed on the glass substrate anchor clamps 400, and glass substrate anchor clamps 400 use vacuum to be fixed on the grinder workbench 350 by the pore on the workbench; After grinding end, the vacuum of the absorption glass substrate anchor clamps 400 that break, if the loading and unloading inconvenience also can use the pore of workbench to blow, the side takes off glass substrate anchor clamps 400 easily from workbench 350.After glass substrate anchor clamps 400 take off, use artificial or automatic mode to be transported on the special-purpose glass substrate anchor clamps separation stage, this table mask has certain radian, the separation of glass substrate 500 is different amounts of deflection of utilizing 410 of glass substrate 500 and elasticity things to have, and glass substrate 500 is separated with anchor clamps 400.Glass substrate 500 and glass substrate anchor clamps 400 after the separation clean on cleaning equipment, rinse out the mill base slurry that adheres on glass substrate 500 and the glass substrate anchor clamps 400 and chips of glass etc., then glass substrate 500 is delivered to the inspection process back packing of testing.Glass substrate anchor clamps 400 turn back to next process after utilizing the cleaning machine cleaning-drying, recycle.
Fig. 6 is an embodiment of milling apparatus concrete form provided by the present invention.Traverse motion guide rail 320 is installed on the crossbeam 330, and grinding head 310 is along guide rail 320 traverse motions.Crossbeam 330 vertically moves back and forth by the guider 340 that is installed on the workbench 350.Guider 340 is cooperated with screw by two pairs of leading screws that are separately fixed at crossbeam 330 and workbench 350 both sides, vertical reciprocating action of crossbeam 330 drives the screw that is fixed on the crossbeam 330 by the driven by servomotor leading screw that is installed in workbench 350 1 sides, rotation is advanced or setback, and two motors that also can be mounted in workbench 350 both sides move by belt or other transmission mechanism and realize vertical reciprocating motion of crossbeam 330; The traverse motion of grinding head 310 is realized by the slip that is installed in the guide rail 320 on the grinding mechanism crossbeam 330, also can be used belt drive or other transmission mechanism to move and realize the traverse motion of crossbeam 330.
Workbench 350 can realize the fixing of glass substrate anchor clamps 400 easily and separate, above workbench 350 or both sides the Guiding machine device 340 of grinding mechanism is installed.Workbench surface design has and the corresponding installation profile of glass substrate anchor clamps, makes things convenient for glass substrate anchor clamps 400 to be placed on it easily and takes out.In addition, 350 designs of workbench surface have a lot of pores, and vacuum realizes in the pore by connecting for fixing between anchor clamps and the workbench, when the needs anchor clamps separate with workbench, and the vacuum of can breaking or block vacuum.Workbench adopts the little thing of deflection to constitute, and design has the control button 341 that is convenient to operation on the workbench.
Fig. 7 is the structural representation that the invention provides milling apparatus grinding head 310.Use splined shaft to connect between grinding head 310 gyroaxises and motor 318, use relocation mechanism 312 is connected between grinding head 310 and cylinder 311.Relocation mechanism 312 uses pair of planar self-adjusting bearing 319 to realize floating.Avoid grinding head 310 the harmful effects in the moving process to glass substrate 500 generations while grinding.The grinding pressure of grinding head 310 is controlled by the cylinder 311 that adjustment is installed in the grinding mechanism top, and grinding pressure can be adjusted by the pressure regulator valve in the control gas circuit.In order to be suitable for the needs of various pressure, be provided with many combinations to adjuster and magnetic valve.
Fig. 8 is the pneumatic schematic diagram of grinding head 310, and pressure regulator valve 3111 is used to eliminate the deadweight of grinding head 311, and when no air pressure, in the time of can guaranteeing the milling apparatus abnormal power-down, grinding head 310 can stop at any position, and grinding head 310 is protected.Pressure regulator valve 3115,3116,3117 is used for being provided with the different pressures that process of lapping needs, utilize the size of the combination controlled pressure of magnetic valve 3113,3114, utilize magnetic valve 3112 control grinding heads about, also can utilize digital automatic pressure adjusting device to use the state of one road gas control system grinding head.In the process of grinding, a plurality of grinding pressures can be set as required,, grind the grinding pressure different in early stage etc. with the later stage employing for example at the edge pressure different with central design.Grinding rotating speed is installed on the grinding mechanism body by adjustment and drives the motor 318 that grinding head rotates and realize, motor 318 can use variable-frequency motor or servomotor, use the electric difference of controlling rotating speed, for example adopt different rotating speeds with central authorities, grinding the grinding rotating speed different in early stage etc. with the later stage employing at the edge.
Grinding head 317 is to be made by corrosion resistant metal, utilizes binding to paste grinding block at the lower surface of grinding head 317, according to ground glass surface quality situation, selects suitable grinding block.Grinding block adopts spongiform polyamine fat rubber-like thing, can select different things for use according to the abrading glass characteristic.Grinding head 317 can be the grinding head of 1-4, and 2 above grinding heads can be consistent the center of grinder main shaft and abradant surface center by the off-centre design of grinding head, and that also can realize by the off-centre rotation of public axle grinding is even.Carry out rotation by rotation during a plurality of grinding head and grind, each grinding head is realized the unification of rotation and revolution respectively by motor-driven separately.
Fig. 9 is a specific embodiment of equation of linear regression that grinding track of the present invention adopts combination, the number of times that A1, A2, the predetermined milled-in current of A3, A4 representative grind at glass baseplate surface among the figure, and M represents amount of grinding.For the glass substrate bight is fully ground, employing figure nine equation that provides grinds glass baseplate surface along desired trajectory, and experiment is found to reach splendid grinding effect.
Figure 10 adopts this method to grind the comparison of the glass baseplate surface roughness of front and back.Experiment is found, uses this equation that glass baseplate surface is ground, and can reduce the centre position of the grinding head radius that grinding head produces in process of lapping and the grinding inequality of two ends generations of grinding head radius greatly.
Workflow to milling apparatus is introduced below:
At first, every mechanism of milling apparatus 300 all is in initial position: grinding mechanism 310 is at the rear side of workbench, and grinding head 310 is in propradation, the electric control closed condition that all is in.
After the staff will be adsorbed with the anchor clamps 400 and the fixed-site on the workbench of glass plate, by the button on the guidance panel that the vacuum of workbench below is open-minded again, because between glass substrate anchor clamps 400 and the workbench 350 all are planes, so both will be fixed not easily separated under the effect of vacuum.The staff confirm anchor clamps 400 firm with stationary table after, on guidance panel, select to release the button, the PLC of lapping device starts working, the servomotor that drives grinding mechanism is started working, servomotor is under the control of PLC, accurate localization is to the middle position of workbench 350, grinding head 310 begins rotation by the motor-driven of design on grinding mechanism, the mill base slurry system starts working, the slip system other at grinder is pumped into slip on the grinding head by the through hole in the middle of the grinding mechanism, and slip is sprayed on the glass plate.At this moment, grinding head 310 begins to descend under the effect of cylinder, when reaching the other end of cylinder stroke (the cylinder stroke is adjusted to the position of suitable ground glass surface in advance), grinding head begins glass baseplate surface is ground according to the grinding pressure that pre-sets.
After grinding was finished, after grinding mechanism was got back to central authorities, grinding head stopped the rotation after promoting, and the slip system stops pumping then, and grinding mechanism is got back to initial position along guide rail, finishes the process of grinding.Then, the staff cancels vacuum by guidance panel, auxiliary bracket is taken off easily from workbench, and then loaded the ready prepd auxiliary bracket of next piece, carries out grinding technics operation next time.
Glass substrate after the taking-up carries out the separation of glass substrate again, and the anchor clamps after the separation are through cleaning the use that drops into again next time, and the grinding technics of the glass plate that the present invention introduced has also just been finished.

Claims (10)

1, a kind of milling apparatus of plate object, be used for the grinding and the polishing of plate object, it is characterized in that: having can horizontal and vertical reciprocating motion and the rotating speed of grinding head and the grinding mechanism of adjustable in pressure, and the workbench of corresponding grinding mechanism is provided with absorption, fixing and take out the glass substrate anchor clamps of glass substrate.
2, the milling apparatus of a kind of plate object according to claim 1, it is characterized in that: described grinding mechanism comprises the rotating speed and the pressure mechanism of grinding head, the horizontal and vertical reciprocating mechanism of driving grinding head, control grinding head, and grinding mechanism is installed in the both sides or the top of workbench.
3, the milling apparatus of a kind of plate object according to claim 2, it is characterized in that: the horizontal and vertical reciprocating mechanism of described driving grinding head is: the traverse motion guide rail is installed on crossbeam, grinding head is installed on the traverse motion guide rail and by transmission mechanism and drives grinding head along the guide rail traverse motion, crossbeam is installed on the guider of workbench, and drives crossbeam vertically reciprocating action on guider by transmission mechanism.
4, the milling apparatus of a kind of plate object according to claim 3 is characterized in that: grinding head drives grinding head by transmission mechanism and is meant that along the guide rail traverse motion realize along being slidingly matched of guide rail by motor-driven grinding head on the grinding head by being installed in for grinding head.
5, the milling apparatus of a kind of plate object according to claim 3, it is characterized in that: crossbeam is meant that by transmission mechanism driving vertical reciprocating action on guider guider is cooperated with screw by two pairs of leading screws that are separately fixed at crossbeam and workbench both sides, vertical reciprocating action of crossbeam drives the screw that is fixed on the crossbeam by the driven by servomotor leading screw that is installed in workbench one side, and rotation is advanced or setback.
6, the milling apparatus of a kind of plate object according to claim 2, it is characterized in that: the rotating speed and the pressure mechanism of control grinding head are: the cylinder assembly by pneumatic circuit control grinding head pressure is installed on the grinding mechanism, and the electric appliance component that drives the grinding head rotation is installed, on the grinding head gyroaxis splined shaft is installed, splined shaft is by gear and driver part engagement, driver part connects motor, between grinding head and cylinder, use relocation mechanism to be connected, relocation mechanism uses pair of planar self-adjusting bearing to realize floating, the grinding pressure of grinding head is installed in the cylinder control of grinding mechanism top by adjustment, grinding pressure can be adjusted by the pressure regulator valve in the control gas circuit, about the solenoid control grinding head, grind rotating speed and be installed on the grinding mechanism body by adjustment and drive the motor that grinding head rotates and realize.
7, the milling apparatus of a kind of plate object according to claim 1, it is characterized in that: the workbench of described corresponding grinding mechanism is provided with absorption, glass substrate anchor clamps fixing and the taking-up glass substrate are meant in workbench central authorities with the contacted surface design of glass substrate anchor clamps pore is arranged, fixing by vacuum in the connection pore between glass substrate anchor clamps and the workbench realizes, when anchor clamps need take off under workbench, the vacuum of breaking was promptly separable.
8, the milling apparatus of a kind of plate object according to claim 7, it is characterized in that: on workbench, be provided with the groove that matches with the glass substrate anchor clamps, the lower limb periphery of glass substrate anchor clamps is provided with and the corresponding boss of workbench groove, realizes and the relatively accurate location of workbench groove by the boss on the anchor clamps.
9, a kind of Ginding process of plate object is characterized in that: programme by the movement locus of lapped face by using, and adopt the Ginding process of plate object loading and unloading technology.
10, the Ginding process of a kind of plate object according to claim 9 is characterized in that: adopt following steps:
1) anchor clamps that will have a plate object are by boss and the corresponding location of the groove on the workbench around the anchor clamps lower limb, then vacuum by the pore of workbench and plate object anchor clamps centre with both firm being attached together,
2) grinding head is by the upper surface that stretches out the contact plate object of cylinder, and grinding mechanism grinds at the upper surface of glass substrate by the horizontal and vertical reciprocating motion of self,
3) milled-in current of grinding mechanism can be the combination of multiple grinding track and number of times by electrical design,
4) grind end back grinding mechanism and return initial position, block the vacuum in the pore, the anchor clamps that will have plate object take out,
5) anchor clamps that another piece had a plate object set by step 1 described method be installed on the workbench, carry out the grinding of next piece plate object.
CN 200610017648 2006-04-14 2006-04-14 Grinding equipment of plate material and grinding method CN1830621A (en)

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CN110421475A (en) * 2019-07-30 2019-11-08 南京昱晟机器人科技有限公司 A kind of machining metal plate polishing robot and its application method
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Publication number Priority date Publication date Assignee Title
CN100467225C (en) * 2007-08-18 2009-03-11 太原风华信息装备股份有限公司 LCD glass grinder
CN101823227B (en) * 2009-03-04 2012-08-29 中国印钞造币总公司 Engraved intaglio plate polishing equipment and polishing process
CN101823223A (en) * 2009-03-06 2010-09-08 株式会社Lg化学 Glass polishing system
CN101823232A (en) * 2009-03-06 2010-09-08 株式会社Lg化学 Glass polishing system
CN101823223B (en) * 2009-03-06 2015-04-29 株式会社Lg化学 Glass polishing system
CN101823232B (en) * 2009-03-06 2015-05-06 株式会社Lg化学 Glass polishing system
CN102019580B (en) * 2009-09-17 2015-01-21 旭硝子株式会社 Apparatus and method for locally polishing glass plate, and apparatus and method for producing glass product
CN102019580A (en) * 2009-09-17 2011-04-20 旭硝子株式会社 Apparatus and method for locally polishing glass plate, and apparatus and method for producing glass product
CN102666010A (en) * 2009-12-18 2012-09-12 旭硝子株式会社 Method and apparatus for polishing plate-like material
CN102554758A (en) * 2010-12-27 2012-07-11 旭硝子株式会社 Polishing device
CN102554758B (en) * 2010-12-27 2016-06-29 旭硝子株式会社 Lapping device
CN102922410B (en) * 2011-08-10 2015-02-11 劲耘科技股份有限公司 Method for treating surface of glass substrate
CN102922410A (en) * 2011-08-10 2013-02-13 劲耘科技股份有限公司 Method for treating surface of glass substrate
CN102328251A (en) * 2011-09-29 2012-01-25 黑旋风锯业股份有限公司 Intelligent surface grinding machine with horizontal spindle and rotary table
CN102328251B (en) * 2011-09-29 2014-07-02 黑旋风锯业股份有限公司 Intelligent surface grinding machine with horizontal spindle and rotary table
CN103317436A (en) * 2013-06-18 2013-09-25 浙江工业大学 Grinding mechanism based on Hilbert-Peano fractal path
CN106695477B (en) * 2015-02-13 2018-12-14 安徽金大进重工机床有限公司 A kind of polishing processing method of sheet metal surface
CN106695477A (en) * 2015-02-13 2017-05-24 安徽金大进重工机床有限公司 Grinding method for metal sheet surface
CN106078421A (en) * 2016-08-12 2016-11-09 无锡尊宝电动车有限公司 A kind of component of machine produces uses efficient sanding apparatus
CN106217153A (en) * 2016-08-19 2016-12-14 王建定 A kind of plate processing device
CN107932194A (en) * 2017-10-11 2018-04-20 郑州旭飞光电科技有限公司 Base plate glass Ginding process, system and device
CN108161740A (en) * 2017-12-26 2018-06-15 芜湖市恒浩机械制造有限公司 A kind of automatic grinding device
CN108161739A (en) * 2017-12-26 2018-06-15 芜湖市恒浩机械制造有限公司 A kind of rectangular steel plates automatic grinding equipment
CN108311902A (en) * 2018-01-26 2018-07-24 海宁杰盛新材料有限公司 A kind of coating composite material manufacturing and processing equipment
CN108188900A (en) * 2018-02-08 2018-06-22 张玲 Waste and old steel plate grinding attachment
CN110103127A (en) * 2019-04-16 2019-08-09 芜湖市恒浩机械制造有限公司 A kind of vehicle compressor support plate upper surface automatic polishing machine
CN110103127B (en) * 2019-04-16 2021-01-12 芜湖市恒浩机械制造有限公司 Automatic burnishing machine of car compressor backup pad upper surface
CN110421475A (en) * 2019-07-30 2019-11-08 南京昱晟机器人科技有限公司 A kind of machining metal plate polishing robot and its application method
CN110561265A (en) * 2019-08-27 2019-12-13 大连贝林轴承仪器有限公司 automatic end face grinding machine
CN110948305A (en) * 2019-11-29 2020-04-03 合肥工业大学 Passive smooth polishing robot for plane workpiece

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