CN1829015A - Laser diode array dual feedback external cavity laser - Google Patents
Laser diode array dual feedback external cavity laser Download PDFInfo
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- CN1829015A CN1829015A CN 200610025357 CN200610025357A CN1829015A CN 1829015 A CN1829015 A CN 1829015A CN 200610025357 CN200610025357 CN 200610025357 CN 200610025357 A CN200610025357 A CN 200610025357A CN 1829015 A CN1829015 A CN 1829015A
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Abstract
The present invention refers to laser diode array double feedback outer cavity laser. It contains making alignment to laser diode array output light by fast axis, transmitting in two ways in slow axis direction, spherical reflector dispersion element constructed double feed-back outer cavity respectively to proceed spatial filtering and mode selection to this two ways light, said spherical reflector and dispersion element constituting one resonant cavity. The present invention raises laser diode array output laser spectra and spatial character, capable of realizing high power, narrow linewidth, and high-brightness laser output.
Description
Technical field:
The present invention relates to outside cavity gas laser, particularly a kind of laser diode array dual feedback external cavity laser, this laser can obtain high power, narrow linewidth, high-brightness laser output.
Background technology
High power laser diode array is because it is cheap, and compact conformation, easy operating have obtained using widely.But because the typical live width 2-4nm of diode laser matrix, and beam quality is also poor, and many application are restricted.
Adopting exocoel to feed back the breadth of spectrum line that narrows, is a kind of effective method.Various exocoel designs are at single low-power laser diode [Opt.Lett.27 mostly, 1995 (2002)], exocoel to High power laser diode array substantially all adopts the feedback of dispersion element (grating) to realize [Opt.Lett.25,1352 (2000)].Single feedback of this employing dispersion element can only be improved the spectral characteristic of output laser, and can't improve its spatial character.
Summary of the invention
The technical problem to be solved in the present invention is to overcome above-mentioned the deficiencies in the prior art, and a kind of laser diode array dual feedback external cavity laser is provided, so that the diode laser matrix laser obtains the laser output of high power, high brightness and narrow linewidth.
Technical solution of the present invention is as follows:
A kind of laser diode array dual feedback external cavity laser, comprise diode laser matrix, it is characterized in that being provided with fast axis collimation mirror and lens at the quick shaft direction of described diode laser matrix, above after described lens plano-concave lens and grating, the below is a spherical reflector, the road optical convergence that these lens will be propagated downwards is in the focus of spherical reflector, and described lens and spherical reflector constitute the feedback cavity of the road light of propagating downwards; Described lens, plano-concave lens and optical grating constitution upwards propagate the feedback cavity of one road light, the road optical convergence that lens will upwards be broadcast is on the focus of plano-concave lens, be coupled on the grating behind the process plano-concave lens parallel beam, wherein 1 rank diffraction light of grating offers feedback, 0 rank diffraction light is as laser output, and the grating feedback realizes the function of modeling.
Described grating is a Littrow mounting.
Described fast axis collimation mirror is the cylindrical mirror of focal length less than the short focal length of 1mm, or aspherical mirror.
Described lens are the biconvex spherical lens.
The present invention is the double feedback external cavity that utilizes spherical reflector and dispersion element (grating) to constitute, and makes diode laser matrix realize high brightness, the laser output of narrow linewidth.
The course of work of the present invention:
The light that diode laser matrix sends at first through a fast axis collimation mirror, collimates to quick shaft direction.Through the light behind the fast axis collimation, divide two-way to propagate, upwards a road of propagation formed last far field lobe, a road of propagation formed time far field lobe downwards, lens and plano-concave lens have been formed a collimating optical system, and the road light of propagating on the subtend collimates, and couple light to grating behind the collimation, the single order diffraction of grating returns along former road feedback is provided, and the zeroth order diffraction of grating is exported as laser.On the focus of the optical convergence to that described lens will be propagated a downwards spherical reflector, returned along former road, and the injection diode laser matrix is exaggerated by spherical reflector.So just formed the double feedback external cavity of spherical reflector and optical grating constitution.
Technique effect of the present invention:
Compare with single feedback external cavity technology formerly, can improve the spatial character and the spectral characteristic of High power laser diode array laser simultaneously.Traditional technology can only realize wherein one raising.Or space and spectral characteristic that single low-power laser diode is realized simultaneously.
Utilize spherical reflector to make the feedback mirror, it is convenient to regulate, simple.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
See also Fig. 1 earlier, as seen from the figure, laser diode array dual feedback external cavity laser of the present invention, comprise a diode laser matrix 1, quick shaft direction at described diode laser matrix 1 is provided with fast axis collimation mirror 2 and lens 3, is concavees lens 4 and grating 5 above after described lens 3, and the below is a spherical reflector 6, described lens 3 and spherical reflector 6 constitute the feedback cavity of the road light of propagating downwards, and the road optical convergence that these lens 3 will be propagated downwards is in the focus of spherical reflector 6; Described lens 3, plano-concave lens 4 and grating 5 have constituted the feedback cavity of upwards propagating one road light, the road optical convergence that lens 3 will upwards be broadcast is on the focus of concavees lens 4, through being coupled on the grating 5 behind the concavees lens 4 parallel beams, wherein 1 rank diffraction light of grating 5 offers feedback, 0 rank diffraction light is as laser output, and the grating feedback realizes the function of modeling.
Described grating 5 Littrow mountings.Described fast axis collimation mirror 2 is focal length cylindrical mirrors less than the short focal length of 1mm, or aspherical mirror.Described lens 3 are the biconvex spherical lens.
The concrete parameter of one of embodiments of the invention is as follows: the centre wavelength of diode laser matrix 1 is 808nm, and the light that sends at first through a fast axis collimation mirror 2, collimates to quick shaft direction.Fast axis collimation mirror 2 is generally the cylindrical mirror of short focal length (focal length is less than 1mm), or aspherical mirror, and the laser of quick shaft direction (the y direction among the figure) can be collimated to diffraction limit, is approximately the angle of divergence about 1 degree.Through the light behind the fast axis collimation, propagate at slow-axis direction (x direction) branch two-way, upwards a road of propagation formed last far field lobe, as a among the figure, shown in the c light, a road of propagation formed time far field lobe downwards, as the b among the figure, shown in the d light.The angle of upper and lower light path and optical axis is:
Wherein: m=N ± 1, N is the number of the laser diode in the array, and the angle of departure of this moment is the optimum angle of departure, can obtain optimum efficiency along this direction feedback, and wherein D is the full aperture of the single surface of emission, and m is the mode step number.Lens 3 and spherical reflector 6 have constituted the feedback cavity of one road light of downward propagation, and the road optical convergence that lens 3 will be propagated downwards is in the focus of spherical reflector 6.Spherical reflector 6 returns it along former road, and injection diode laser matrix 1 is exaggerated.Lens 3, concavees lens 4 and grating 5 have constituted the feedback cavity of upwards propagating one road light, the road optical convergence that lens 3 will upwards be broadcast is on the focus of concavees lens 4, through being coupled on the grating 5 behind the concavees lens 4 parallel beams, grating 5 is Littrow mountings, groove is along the y direction, the single order diffraction of grating 5 returns along former road feedback is provided, and the zeroth order diffraction of grating 5 is exported as laser, and the feedback of grating 5 can realize the function of modeling.Adjust spherical reflector 6 and grating 5, make spherical reflector 6 separately the single-lobe output that obtains of the far field single-lobe that obtains of feedback and spherical reflector 6 and 5 pairs of feedbacks of grating coincide.Like this, spherical reflector 6 and grating 5 have formed a resonant cavity modeling.Will realize narrow linewidth, the high brightness output of diode laser matrix.Wherein, fast axis collimation mirror 2, lens 3, concavees lens 4 are coated with the anti-reflection film of wavelength 808nm, and grating 5, spherical reflector 6 are coated with the anti-film of increasing of wavelength 808nm.In the work of double feedback external cavity, wherein descend the road feedback cavity that hypovalve light is returned, make diode laser matrix have only single-lobe output, therefore its space divergence angle diminishes, brightness improves, and the 5 pairs of epivalve light of grating in the feedback of setting out on a journey have simultaneously carried out modeling, have made the spectral line narrowing of output, so just can obtain high brightness, the laser output of narrow linewidth.
Claims (5)
1, a kind of laser diode array dual feedback external cavity laser, comprise diode laser matrix (1), it is characterized in that being provided with fast axis collimation mirror (2) and lens (3) at the quick shaft direction of described diode laser matrix (1), in described lens (3) top afterwards is plano-concave lens (4) and grating (5), the below is spherical reflector (6), described lens (3) and spherical reflector (6) constitute the feedback cavity of the road light of propagating downwards, and the road optical convergence that these lens (3) will be propagated downwards is in the focus of spherical reflector (6); Described lens (3), plano-concave lens (4) and grating (5) have constituted the feedback cavity of upwards propagating one road light, the road optical convergence that lens (3) will upwards be broadcast is on the focus of plano-concave lens (4), through being coupled on the grating (5) behind the plano-concave lens (4) parallel beam, wherein 1 rank diffraction light of grating (5) offers feedback, 0 rank diffraction light is as laser output, and the grating feedback realizes the function of modeling.
2, laser diode array dual feedback external cavity laser according to claim 1 is characterized in that described grating (5) Littrow mounting.
3, laser diode array dual feedback external cavity laser according to claim 1 is characterized in that described fast axis collimation mirror (2) is the cylindrical mirror of focal length less than the short focal length of 1mm, or aspherical mirror.
4, laser diode array dual feedback external cavity laser according to claim 1 is characterized in that described lens (3) are the biconvex spherical lens.
5, according to each described laser diode array dual feedback external cavity laser of claim 1 to 4, it is characterized in that described fast axis collimation mirror (2), lens (3), concavees lens (4) are coated with the anti-reflection film of operation wavelength, and described grating (5), spherical reflector (6) are coated with the reflectance coating of operation wavelength.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100253570A CN100379104C (en) | 2006-03-31 | 2006-03-31 | Laser diode array dual feedback external cavity laser |
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| CNB2006100253570A CN100379104C (en) | 2006-03-31 | 2006-03-31 | Laser diode array dual feedback external cavity laser |
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| CN1829015A true CN1829015A (en) | 2006-09-06 |
| CN100379104C CN100379104C (en) | 2008-04-02 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100486066C (en) * | 2007-10-18 | 2009-05-06 | 中国科学院长春光学精密机械与物理研究所 | Diffraction grid array external cavity semiconductor laser linear array and method of producing the same |
| US8891579B1 (en) * | 2011-12-16 | 2014-11-18 | Nlight Photonics Corporation | Laser diode apparatus utilizing reflecting slow axis collimators |
| US9705289B2 (en) | 2014-03-06 | 2017-07-11 | Nlight, Inc. | High brightness multijunction diode stacking |
| US9720145B2 (en) | 2014-03-06 | 2017-08-01 | Nlight, Inc. | High brightness multijunction diode stacking |
| US10153608B2 (en) | 2016-03-18 | 2018-12-11 | Nlight, Inc. | Spectrally multiplexing diode pump modules to improve brightness |
| US10261261B2 (en) | 2016-02-16 | 2019-04-16 | Nlight, Inc. | Passively aligned single element telescope for improved package brightness |
| US10283939B2 (en) | 2016-12-23 | 2019-05-07 | Nlight, Inc. | Low cost optical pump laser package |
| US10761276B2 (en) | 2015-05-15 | 2020-09-01 | Nlight, Inc. | Passively aligned crossed-cylinder objective assembly |
| US10763640B2 (en) | 2017-04-24 | 2020-09-01 | Nlight, Inc. | Low swap two-phase cooled diode laser package |
| US10833482B2 (en) | 2018-02-06 | 2020-11-10 | Nlight, Inc. | Diode laser apparatus with FAC lens out-of-plane beam steering |
| CN112567294A (en) * | 2018-08-16 | 2021-03-26 | 索尼公司 | Light source device and projection display device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2003005507A1 (en) * | 2001-07-02 | 2004-10-28 | 古河電気工業株式会社 | Semiconductor laser module, method of manufacturing the same, and optical amplifier |
| EP1490934A2 (en) * | 2002-04-03 | 2004-12-29 | Esko-Graphics A/S | Laser system |
| JP2004071775A (en) * | 2002-08-05 | 2004-03-04 | Japan Science & Technology Corp | Coherence control method for broad-stripe semiconductor laser device |
| DE10240949A1 (en) * | 2002-09-02 | 2004-03-04 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg | Semiconducting laser device has at least one external reflection arrangement with concave reflective surface that can reflect at least some laser light back to influence laser light mode spectrum |
| ATE400911T1 (en) * | 2004-06-16 | 2008-07-15 | Univ Danmarks Tekniske | SEGMENTED DIODE LASER SYSTEM |
-
2006
- 2006-03-31 CN CNB2006100253570A patent/CN100379104C/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100486066C (en) * | 2007-10-18 | 2009-05-06 | 中国科学院长春光学精密机械与物理研究所 | Diffraction grid array external cavity semiconductor laser linear array and method of producing the same |
| US8891579B1 (en) * | 2011-12-16 | 2014-11-18 | Nlight Photonics Corporation | Laser diode apparatus utilizing reflecting slow axis collimators |
| US9455552B1 (en) | 2011-12-16 | 2016-09-27 | Nlight, Inc. | Laser diode apparatus utilizing out of plane combination |
| US9705289B2 (en) | 2014-03-06 | 2017-07-11 | Nlight, Inc. | High brightness multijunction diode stacking |
| US9720145B2 (en) | 2014-03-06 | 2017-08-01 | Nlight, Inc. | High brightness multijunction diode stacking |
| US10761276B2 (en) | 2015-05-15 | 2020-09-01 | Nlight, Inc. | Passively aligned crossed-cylinder objective assembly |
| US10261261B2 (en) | 2016-02-16 | 2019-04-16 | Nlight, Inc. | Passively aligned single element telescope for improved package brightness |
| US10564361B2 (en) | 2016-02-16 | 2020-02-18 | Nlight, Inc. | Passively aligned single element telescope for improved package brightness |
| US10418774B2 (en) | 2016-03-18 | 2019-09-17 | Nlight, Inc. | Spectrally multiplexing diode pump modules to improve brightness |
| US10153608B2 (en) | 2016-03-18 | 2018-12-11 | Nlight, Inc. | Spectrally multiplexing diode pump modules to improve brightness |
| US10283939B2 (en) | 2016-12-23 | 2019-05-07 | Nlight, Inc. | Low cost optical pump laser package |
| US10797471B2 (en) | 2016-12-23 | 2020-10-06 | Nlight Inc. | Low cost optical pump laser package |
| US11424598B2 (en) | 2016-12-23 | 2022-08-23 | Nlight, Inc. | Low cost optical pump laser package |
| US10763640B2 (en) | 2017-04-24 | 2020-09-01 | Nlight, Inc. | Low swap two-phase cooled diode laser package |
| US10833482B2 (en) | 2018-02-06 | 2020-11-10 | Nlight, Inc. | Diode laser apparatus with FAC lens out-of-plane beam steering |
| CN112567294A (en) * | 2018-08-16 | 2021-03-26 | 索尼公司 | Light source device and projection display device |
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| CN100379104C (en) | 2008-04-02 |
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Granted publication date: 20080402 Termination date: 20110331 |