CN1727978A - Mach-Zehnder light intensity modulator with annulet in non-equilibrium coupled structure - Google Patents

Mach-Zehnder light intensity modulator with annulet in non-equilibrium coupled structure Download PDF

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Publication number
CN1727978A
CN1727978A CN 200510050879 CN200510050879A CN1727978A CN 1727978 A CN1727978 A CN 1727978A CN 200510050879 CN200510050879 CN 200510050879 CN 200510050879 A CN200510050879 A CN 200510050879A CN 1727978 A CN1727978 A CN 1727978A
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China
Prior art keywords
structure
mach
zehnder
interference
light intensity
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CN 200510050879
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Chinese (zh)
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CN100350324C (en
Inventor
杨建义
王帆
江晓清
王明华
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浙江大学
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Abstract

A Mach - Zehnder light intensity modulator with microring in non - balance coupling type is prepared as connecting one end of two interference arms to one end of beam splitting couple structure with its one end being connected to input waveguide and another end of two said arms to one end of beam combining interference structure with its another end being connected to output waveguide; setting light microring on one side of any interference arm ; applying Y branch, X node, directional coupler or multimode interference coupler on two said structures separately.

Description

Adopt little ring Mach-Zehnder light intensity modulator of being with of lack of balance coupled structure

Technical field

The present invention relates to optical component, particularly a kind of little ring Mach-Zehnder light intensity modulator of being with of lack of balance coupled structure that adopts.

Background technology

Photomodulator is one of device important in the optical communication technique as the external modulation mode of light signal, and people utilize the multiple effect of multiple material, has successfully developed various photomodulators.In recent years, because the needs of the direct modulation transmissions of simulating signal have had specific demand to the light intensity modulator with highly linear modulating characteristic.As basic light intensity modulator structure, Mach-Zehnder (Mach-Zehnder) interfere type structure is a light intensity modulator structure the most commonly used, but, can't satisfy the requirement of highly linear simulating signal modulation because its modulation characteristics curve is typical sinusoidal curve.At sinusoidal curve is the sublinear curve, and the hyperline that is had with the all-pass filter phase response curve based on the optical micro-ring resonant device can carry out linear compensation to the strength characteristics of Mach-Zehnder interference structure.

Because the loss in the optical waveguide is inevitably, particularly the loss of at present main electric light optical waveguide material is all not little, and the all-pass filter that is made of the optical micro-ring resonant device can not be real " all-pass " also on the intensity response characteristic.Though adopt the little ring of light in the Mach-Zehnder photomodulator of the little ring of light to be operated in position away from tuning-points, and resonator cavity also is not required for high-quality-factor, therefore the influence of waveguide loss can not can be ignored the influence of modulating characteristic.The analysis showed that loss causes descending with the intrinsic depth of modulation of the adjustment curve of the Mach-Zehnder photomodulator of the little ring of light, effectiveness descends.

Summary of the invention

The object of the present invention is to provide a kind of little ring Mach-Zehnder light intensity modulator of being with of lack of balance coupled structure that adopts, its depth of modulation that loss is introduced descends and compensates, and can realize the high efficiency transmission of modulation signal.

The technical solution adopted for the present invention to solve the technical problems is: comprise the little ring of any closed loop shape light, the beam splitting coupled structure of Mach-Zehnder interference structure, the Mach-Zehnder interference structure close the beam interferometer structure, interfere arm, input waveguide and output waveguide for two of the Mach-Zehnder interference structure.One end of the beam splitting coupled structure of one termination Mach-Zehnder interference structure of two interference arms, one termination input waveguide of the beam splitting coupled structure of Mach-Zehnder interference structure, two ends that close the beam interferometer structure of interfering another termination Mach-Zehnder interference structure of arm, another termination output waveguide of closing the beam interferometer structure of Mach-Zehnder interference structure, the little ring of closed loop shape light is placed on the side that any one interferes arm arbitrarily, is coupled with interfering arm.

The beam splitting coupled structure of described Mach-Zehnder interference structure and close the beam interferometer structure and can adopt first, second Y branched structure respectively, perhaps X junction structure, perhaps directional coupling structure, perhaps multi-mode interference coupler structure.

The useful effect that the present invention has is: adopt the lack of balance coupled structure, can descend to the depth of modulation of the high linear Mach-Zehnder light intensity modulator of the little ring of employing that loss caused compensates, and realizes the high-efficiency transfer of modulation signal.And this lack of balance coupled structure only changes the beam splitting of Mach-Zehnder interference structure simply or closes the beam interferometer structure, or adjusts the loss of interfering arm, so still can make of plane integrated light guide technology, technology is simple.

Description of drawings

Fig. 1 is the little ring Mach-Zehnder light intensity modulator structural drawing of being with that adopts the lack of balance coupled structure;

Fig. 2 is that first kind of Fig. 1 implemented illustration;

Fig. 3 is that second kind of Fig. 1 implemented illustration;

Fig. 4 is the third enforcement illustration of Fig. 1;

Fig. 5 is that the 4th kind of Fig. 1 implemented illustration.

Among the figure: 1 is the little ring of any closed loop shape light, and 2 is the beam splitting coupled structure of Mach-Zehnder interference structure, and 3 close the beam interferometer structure for the Mach-Zehnder interference structure, 4 is the interference arm of Mach-Zehnder interference structure, and 5 is the interference arm of Mach-Zehnder interference structure, and 6 is input waveguide, 7 is output waveguide, and 12 is Y branch, and 13 is Y branch, 22 are the X knot, 23 are the X knot, and 32 is directional coupler, and 33 is directional coupler, 43 is multi-mode interference coupler, and 43 is multi-mode interference coupler.

Embodiment

As shown in Figure 1, the present invention includes the little ring 1 of any closed loop shape light, the beam splitting coupled structure 2 of Mach-Zehnder interference structure, the Mach-Zehnder interference structure close beam interferometer structure 3, interfere arm 4,5, input waveguide 6 and output waveguide 7 for two of the Mach-Zehnder interference structure.One end of the beam splitting coupled structure 2 of one termination Mach-Zehnder interference structure of two interference arms 4,5, the beam splitting coupled structure 2 of Mach-Zehnder interference structure) a termination input waveguide 6, two ends that close beam interferometer structure 3 of interfering another termination Mach-Zehnder interference structure of arm 4,5, another termination output waveguide 7 of closing beam interferometer structure 3 of Mach-Zehnder interference structure, the little ring 1 of closed loop shape light is placed on the side that any one interferes arm arbitrarily, is coupled with interfering arm.

The beam splitting power ratio R that the beam splitting coupled structure 2 of Mach-Zehnder interference structure is had s, close the beam power that closes that beam interferometer structure 3 had and compare R cAnd two interfered the optical power loss on the arm 4,5 to compare R aWhat institute's consolidated statement revealed interferes the lack of balance ImB=R of luminous power on the arm two of Mach-Zehnder interference structures sR cR aSatisfy the compensation to the maximum percentage modulation decline of modulator, the product that promptly requires lack of balance and modulator to go up the additional light loss Loss that introduces at little ring 1 of maximum percentage modulation time at the interference arm (being assumed to be 4 at this) that is coupled is 1:ImBLoss=1.

As shown in Figure 2, the beam splitting coupled structure of described Mach-Zehnder interference structure 2 and close beam interferometer structure 3 and adopt first, second Y branch 12,13 structures respectively, the beam splitting power ratio R of the lack of balance coupling that it had sOr close beam power and compare R cRealize by width difference, waveguide material structure difference or the waveguide drift angle of designing two fens support arms are different.

As shown in Figure 3, the beam splitting coupled structure of described Mach-Zehnder interference structure 2 and close beam interferometer structure 3 and adopt first, second X knot 22,23 structures, the beam splitting power ratio R of the lack of balance coupling that it had respectively sOr close beam power and compare R cBy design output with/different with the branch support arm width of exporting, the waveguide material structure is different or the waveguide drift angle is different realizes.

As shown in Figure 4, the beam splitting coupled structure of described Mach-Zehnder interference structure 2 and close beam interferometer structure 3 and adopt first, second directional coupler 32,33 structures respectively, the beam splitting power ratio R of the lack of balance coupling that it had sOr close beam power and compare R cBy designing two different realizations of interval difference, length difference or duct width difference, material structure between coupled waveguide.

As shown in Figure 5, the beam splitting coupled structure of described Mach-Zehnder interference structure 2 and close beam interferometer structure 3 and adopt first, second multi-mode interference coupler 42,43 structures respectively, the beam splitting power ratio R of the lack of balance coupling that it had sOr close beam power and compare R cLength by design multiple-mode interfence district realizes with the position in the corresponding multiple-mode interfence of output waveguide district with wide ratio or input.

In each embodiment shown in Fig. 2,3,4 and 5, interfere certain optical power loss of 4,5 on arm to compare R for two of the Mach-Zehnder interference structure aCan design two arm lengths according to the loss of optical waveguide and realize, also can on the interference arm, crooked equal loss's defective be set artificially and realize, or can on the interference arm, design and realize such as beam splitting structures such as Y branched structure, directional coupled structures.

Specific implementation of the present invention is a lot, at this with the electric light organic polymer as device material as an example, but only limits to this material example by no means.

What at first will carry out is the design of device architecture parameter.Mainly the loss value size that will be clear that the electric light organic polymer material that is adopted in device of the present invention, by the size of loss value and little ring 1 and and an arm of Mach-Zehnder light intensity modulator between coupling coefficient calculate two sizes of interfering luminous power lack of balance influence in the arms 4,5 of 1 pair of Mach-Zehnder light intensity modulator of little ring, to satisfy the requirement that depth of modulation is descended and compensates.On the basis of this lack of balance value, distribute the beam splitting coupled structure 2 of Mach-Zehnder light intensity modulator the beam splitting power ratio, close beam interferometer structure 3 close beam power than and two power attenuation ratios of interfering arms 4,5.By the beam splitting power ratio with close beam power than designing as the beam splitting coupled structure and closing the Y splitter 12,13 of beam interferometer structure, X ties 22,23, directional coupler 32,33 or multi-mode interference coupler 42,43.By power attenuation than designing two length, loss defective or beam splitting structures of interfering arms 4,5.

Designing little ring 1, beam splitting coupled structure 2, closing after bundle coupled structure 3 and two interfere arm 4,5, finish the design of input waveguide 6 and output waveguide 7 more as required, promptly design the optical waveguide part of Mach-Zehnder light intensity modulator.The modulator electrode of Mach-Zehnder light intensity modulator adopts traditional electrode design method.Optical waveguide part and electrode part will be produced on two reticle.

In the concrete manufacturing process with the Mach-Zehnder light intensity modulator of little ring, with silicon chip or glass is backing material, adopt spin coated film forming legal system to make lower limit layer, make sandwich layer again, and with photoetching and dry etching, produce by little ring 1, beam splitting coupled structure 2, close the optical waveguide part sandwich layer that bundle coupled structure 3 and two interfere the Mach-Zehnder light intensity modulator that arm 4,5, input waveguide 6 and output waveguide 7 form.Apply upper limiting layer after finishing sandwich layer.Be produced on the upper limiting layer on the modulator electrode of Mach-Zehnder light intensity modulator, adopt the method for metal coating, photoetching and metal erosion to make.Just can finish little ring Mach-Zehnder light intensity modulator of being with of employing lack of balance coupled structure thus with high linear characteristic and big depth of modulation.

Above-mentioned embodiment is used for the present invention that explains, rather than limits the invention, and in the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.

Claims (5)

1. adopt little ring Mach-Zehnder light intensity modulator of being with of lack of balance coupled structure, it is characterized in that: comprise the little ring of any closed loop shape light (1), the beam splitting coupled structure (2) of Mach-Zehnder interference structure, the Mach-Zehnder interference structure close beam interferometer structure (3), interfere arm (4,5), input waveguide (6) and output waveguide (7) for two of the Mach-Zehnder interference structure; One end of the beam splitting coupled structure (2) of one termination Mach-Zehnder interference structure of two interference arms (4,5), one termination input waveguide (6) of the beam splitting coupled structure (2) of Mach-Zehnder interference structure, two ends that close beam interferometer structure (3) of interfering another termination Mach-Zehnder interference structure of arm (4,5), another termination output waveguide (7) of closing beam interferometer structure (3) of Mach-Zehnder interference structure, the little ring of closed loop shape light (1) is placed on the side that any one interferes arm arbitrarily, is coupled with interfering arm.
2. employing lack of balance coupled structure according to claim 1 be with little ring Mach-Zehnder light intensity modulator, it is characterized in that: the beam splitting coupled structure (2) of described Mach-Zehnder interference structure and close beam interferometer structure (3) and adopt first, second Y branch (12,13) structure respectively.
3. employing lack of balance coupled structure according to claim 1 be with little ring Mach-Zehnder light intensity modulator, it is characterized in that: the beam splitting coupled structure (2) of described Mach-Zehnder interference structure and close beam interferometer structure (3) and adopt first, second X knot (22,23) structure respectively.
4. employing lack of balance coupled structure according to claim 1 be with little ring Mach-Zehnder light intensity modulator, it is characterized in that: the beam splitting coupled structure (2) of described Mach-Zehnder interference structure and close beam interferometer structure (3) and adopt first, second directional coupler (32,33) structure respectively.
5. employing lack of balance coupled structure according to claim 1 be with little ring Mach-Zehnder light intensity modulator, it is characterized in that: the beam splitting coupled structure (2) of described Mach-Zehnder interference structure and close beam interferometer structure (3) and adopt first, second multi-mode interference coupler (42,43) structure respectively.
CNB2005100508791A 2005-07-28 2005-07-28 Mach-Zehnder light intensity modulator with annulet in non-equilibrium coupled structure CN100350324C (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102323645A (en) * 2011-05-11 2012-01-18 上海大学 Mach-Zehnder interferometer-type optical trap filter based on dual-loop coupling structures
CN103344608A (en) * 2013-06-24 2013-10-09 哈尔滨工业大学 Refractive index sensor for non-symmetric high-sensitivity dual-optical fiber ring coupled M-Z (Mach-Zehnder) interferometer
WO2015021577A1 (en) * 2013-08-12 2015-02-19 上海交通大学 Mach-zehnder optical switch structure based on coupling of double resonant cavities
CN105404028A (en) * 2015-12-28 2016-03-16 上海交通大学 Silicon-based electro-optical modulator of micro-cavity coupling multimode interferometer
CN106483686A (en) * 2015-08-26 2017-03-08 意法半导体(克洛尔2)公司 With electric light(E/O)Electro-optical device of modulator and associated method
CN107111168A (en) * 2014-12-12 2017-08-29 思科技术公司 Electrooptic modulator is terminated
CN110456527A (en) * 2019-07-12 2019-11-15 上海交通大学 Mach zehnder modulators are coupled based on silicon-based micro ring

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW550432B (en) * 1999-09-10 2003-09-01 L3 Optics Inc Low drive voltage optical modulator
CN2807287Y (en) * 2005-07-28 2006-08-16 浙江大学 Mach-Zehnder light intensity modulator with micro-ring applying non-balanced coupling structure

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102323645A (en) * 2011-05-11 2012-01-18 上海大学 Mach-Zehnder interferometer-type optical trap filter based on dual-loop coupling structures
CN103344608A (en) * 2013-06-24 2013-10-09 哈尔滨工业大学 Refractive index sensor for non-symmetric high-sensitivity dual-optical fiber ring coupled M-Z (Mach-Zehnder) interferometer
CN103344608B (en) * 2013-06-24 2015-06-24 哈尔滨工业大学 Refractive index sensor for non-symmetric high-sensitivity dual-optical fiber ring coupled M-Z (Mach-Zehnder) interferometer
WO2015021577A1 (en) * 2013-08-12 2015-02-19 上海交通大学 Mach-zehnder optical switch structure based on coupling of double resonant cavities
CN107111168A (en) * 2014-12-12 2017-08-29 思科技术公司 Electrooptic modulator is terminated
CN106483686A (en) * 2015-08-26 2017-03-08 意法半导体(克洛尔2)公司 With electric light(E/O)Electro-optical device of modulator and associated method
CN105404028A (en) * 2015-12-28 2016-03-16 上海交通大学 Silicon-based electro-optical modulator of micro-cavity coupling multimode interferometer
CN105404028B (en) * 2015-12-28 2018-02-13 上海交通大学 A kind of silicon-based electro-optical modulator of microcavity coupling multimode interferometer
CN110456527A (en) * 2019-07-12 2019-11-15 上海交通大学 Mach zehnder modulators are coupled based on silicon-based micro ring

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