CN1716002A - First crystal cooling and bending mechanism of double crystal monochromator - Google Patents
First crystal cooling and bending mechanism of double crystal monochromator Download PDFInfo
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- CN1716002A CN1716002A CN 200410025142 CN200410025142A CN1716002A CN 1716002 A CN1716002 A CN 1716002A CN 200410025142 CN200410025142 CN 200410025142 CN 200410025142 A CN200410025142 A CN 200410025142A CN 1716002 A CN1716002 A CN 1716002A
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Abstract
The first crystal cooling and bending mechanism of precise double crystal monochromator includes two multiple-shaft flexible hinge combinations. The combinations have one common pedestal, and features that the mechanism includes two side boards on two sides and one pedestal on the upper part of the combinations, and that its two flexible hinge combinations are combined into one integral with the side boards and pedestals. The present invention provides one first crystal cooling and bending mechanism of precise double crystal monochromator and the mechanism has no mechanical friction and no need of lubrication, and thus has effectively lowered crystal temperature and greatly reduced surface deformation of the first crystal.
Description
Technical field
What the present invention relates to is a kind of precision optical machinery device, particularly a kind of cooling bending mechanism that is used for double-crystal monochromator first crystal.
Background technology
The high heat load that double-crystal monochromator first plane of crystal that uses in the synchrotron radiation light source light beam line is subjected to, to between its surface and inside, form a very big thermograde, produce very big thermal deformation, reduce the performance of optical element greatly, very big thermal stress even can destroy optical element.The existing method that solves only mainly is to realize the purpose cooling off and reduce to be out of shape by cooling off this single approach.Common cooling medium has water, liquid nitrogen, liquid metal gallium etc.Liquid gallium has fine qualities such as infrabar and high heat-transmission coefficient, be a kind of fabulous cooling medium, but cost is higher, and easy and other metal reaction; The sub-cooled effect of liquid nitrogen is remarkable, the numerical value of its thermal deformation and thermal stress is compared with water-cooled, can reduce by two orders of magnitude, its subcooled loop structure is similar to water-cooled, and its advantage is in that (1. silicon thermal expansivity under the 125K temperature is zero with the low-temperature characteristics that makes full use of silicon materials; 2. big during the thermal conductivity ratio normal temperature of silicon when low temperature, help reducing thermal strain and thermal stress; 3. the yield stress of silicon materials in-200～600 degrees centigrade of scopes is temperature independent); Water is the most frequently used cooling medium, and it is with low cost, have good chemical stability, and water cooling plant is simple, is easy to realize; So the monochromator in domestic and international most of synchrotron radiations all adopts liquid nitrogen and water-cooling method at present, reduces the temperature rise of crystal, reduces thermal deformation.But these methods are applied heat power density lower occasion, especially water (applied heat power density＜1W/mm only only
2), when thermal power density was higher, effect was just not satisfactory, showed as crystal and still had certain thermal deformation, can not satisfy the requirement of light beam line system.In other words, the method for this simple cooling does not reach the purpose of double gain, promptly solves the problem of cooling and distortion simultaneously preferably.
(Granted publication number is: CN2453467Y) disclose a kind of bending mechanism of accurate crystal, the multiaxis flexible hinge assembly and the push rod that comprise hold assembly, have two rotation platforms are formed for utility model patent that is called " bending mechanism of accurate crystal ".The hold assembly fixed crystal is on the rotation platform of flexible hinge assembly, and an end of push rod and the rotation platform fixed connection of hinge assembly are given the push rod application of force, and the rotation platform of flexible hinge assembly rotates, and drives hold assembly, and crystal is bent.Because hold assembly, flexible hinge assembly and push rod are not an integral body, physical dimension more greatly, complicated; Push rod one end is the rotation platform fixed connection with hinge assembly, its tie-point can not just in time be positioned at the press-bending crystal point of rotation under, if error is bigger, can cause the back crystal diffraction that bends evenly facial; Push rod is positioned at the centre of flexible hinge assembly, and the application of force is inconvenience also.So this patent can not satisfy double-crystal monochromator first crystal, should cool off again and bend, size is little, precision is high, the job requirement that vacuum performance is good.
Summary of the invention
In order further to reduce thermal deformation, the invention provides the friction of a kind of nothing machinery, non-lubricating double-crystal monochromator first crystal cooling bending mechanism, not only can effectively reduce crystal temperature effect, and utilize bending mechanism can significantly reduce the surface deformation of first crystal.
The technical solution adopted for the present invention to solve the technical problems is: a kind of cooling bending mechanism of accurate double-crystal monochromator first crystal, comprise two multiaxis flexible hinge assemblys, described assembly has a public base, it is characterized in that, described mechanism further comprises:
Biside plate respectively places the both sides of described assembly;
Base is arranged on the top of described assembly;
One end of described two flexible hinge assemblys and described side plate, described base are one.
The cooling bending mechanism here is made up of with the crystal base that has the flexible hinge assembly the pressing plate on fixed crystal both sides.Whole bending mechanism center symmetry, top is the base of laying crystal, and base is provided with external liquid coolant through hole, and respectively there is a side plate at the two ends of base; Respectively there are four identical flexible hinges its underpart, and their lower ends fuse, and maintain static.Crystal is installed on the base, is compressed by pressing plate.Intracrystalline cooling bath links to each other with the through hole of base, and liquid coolant can flow into from an end like this, and the other end flows out.To the free end application of force of biside plate, make the crystal two ends produce moment of flexure, drive crystal and produce the distortion opposite with thermal deformation.So, utilize the liquid coolant cooling on the one hand, reduce thermal deformation, utilizing on the other hand bends produces reversible deformation, further reduces thermal deformation.After external force was removed, flexible hinge was by the spring return of self.
Characteristics of the present invention are simple in structure, and cooling fuses with bending mechanism; Easy to process, whole cooling bending mechanism (comprising flexible hinge) adopts stainless steel 1Cr18Ni9Ti line of material cutting processing to form; Use flexibly, according to the height of heat load, whether decision uses press-bending.Flexible hinge have volume little, do not have characteristics such as machinery friction, no backlash, stability and autokinesis height.The equation of motion of this kind multiaxis flexible hinge is simpler, and side plate drives with the linear stepping motor of band scrambler, and driving force is big, and then the reversible deformation of crystal is just big, and vice versa, can reduce the thermal deformation of crystal greatly, and can realize that computing machine accurately controls.
Description of drawings
Below, with reference to accompanying drawing, for those skilled in the art that, from detailed description of the present invention, above-mentioned and other purposes of the present invention, feature and advantage will be apparent.
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the perspective view of one of flexible hinge assembly 3 among Fig. 1.
Embodiment
As shown in Figure 1, flexible hinge assembly 3 is to be combined by eight single shaft flexible hinges 6, and it has the top arm 8 of a public base 5 and two symmetries, and the structure of each single shaft flexible hinge 6 as shown in Figure 2.The crystal that has cooling bath is placed on the base 10, groove communicates with liquid coolant through hole 9 on the base 10, two crystal pressing plates 2 are connected with base 10 usefulness screws after pushing down crystal 1 crystal face edge, between pressing plate 2 and crystal face, realize the sealing of 10 of crystal 1 and mask patterns with synthetic rubber O shape circle 11.One end of biside plate 4 can not contact with stepper motor (marking among the figure).Flexible hinge assembly 3 has four hinge arms 7, and per two is one group, and symmetrically, the inclination alpha of hinge arms 7 is about 70～80 °.Flow through crystal cooling of liquid coolant during work, stepper motor gives two side plates 4 to external symmetry application of force F1, F2, applies moment of flexure directly for crystal 1, crystal 1 is bent the generation reversible deformation downwards.The center of rotation of crystal is the intersection point O (not marking among the figure) of flexible hinge assembly hinge arms 7 axis, the distance of intersection point O and crystal neutral surface is less than 2mm, driving equation according to the flexible hinge assembly, the moment of flexure loss of flexible hinge can be ignored, influence to crystal press-bending radius-of-curvature is very little, so the press-bending radius is little, press-bending is good, has advantages such as volume is little, simple in structure, highly sensitive, vacuum performance is good.Through experimental analysis, it only is 0.04 μ rad that the present invention can make the thermal deformation errors that is subjected to the high heat load crystal.With notification number is that the utility model of CN2453467Y is compared, and the latter is by giving the push rod application of force, the rotation platform of flexible hinge assembly is rotated, drive the rotation of crystal hold assembly again, just crystal is bent, complex structure, and the moment of flexure loss is big, and precision is not high.
The front provides the description to preferred embodiment, so that any technician in this area can use or utilize the present invention.Various modifications to these embodiment are conspicuous to those skilled in the art, can be applied to other embodiment to total principle described here and not use creativeness.Thereby, the embodiment shown in the present invention will be not limited to here, and the wide region of principle that should disclose and new feature according to meeting here.
Claims (2)
1. the cooling bending mechanism of accurate double-crystal monochromator first crystal comprises two multiaxis flexible hinge assemblys, and described assembly has a public base, it is characterized in that, described mechanism further comprises:
Biside plate respectively places the both sides of described assembly;
Base is arranged on the top of described assembly;
One end of described two flexible hinge assemblys and described side plate, described base are one.
2, the cooling bending mechanism of a kind of accurate double-crystal monochromator first crystal according to claim 1 is characterized in that, described mechanism further comprises:
The cooling duct is opened in described base upper surface;
Two crystal pressing plates are used to push down behind the first crystal crystal face edge and the base mechanical fixation;
O-ring seals is arranged at the top of described cooling duct, between the crystal face of the pressing plate and first crystal, realizes the sealing between first crystal and described base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410025142 CN1716002A (en) | 2004-06-14 | 2004-06-14 | First crystal cooling and bending mechanism of double crystal monochromator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410025142 CN1716002A (en) | 2004-06-14 | 2004-06-14 | First crystal cooling and bending mechanism of double crystal monochromator |
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| Publication Number | Publication Date |
|---|---|
| CN1716002A true CN1716002A (en) | 2006-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200410025142 Pending CN1716002A (en) | 2004-06-14 | 2004-06-14 | First crystal cooling and bending mechanism of double crystal monochromator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104900293A (en) * | 2015-06-04 | 2015-09-09 | 中国科学院上海应用物理研究所 | Double-drive pressure roller type bending device |
-
2004
- 2004-06-14 CN CN 200410025142 patent/CN1716002A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104900293A (en) * | 2015-06-04 | 2015-09-09 | 中国科学院上海应用物理研究所 | Double-drive pressure roller type bending device |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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