CN1672820A - 用于清洁平面显示板的装置 - Google Patents
用于清洁平面显示板的装置 Download PDFInfo
- Publication number
- CN1672820A CN1672820A CNA2005100555843A CN200510055584A CN1672820A CN 1672820 A CN1672820 A CN 1672820A CN A2005100555843 A CNA2005100555843 A CN A2005100555843A CN 200510055584 A CN200510055584 A CN 200510055584A CN 1672820 A CN1672820 A CN 1672820A
- Authority
- CN
- China
- Prior art keywords
- gas
- unit
- cleaning device
- cleaning agent
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 59
- 239000012459 cleaning agent Substances 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 claims abstract description 52
- 239000007921 spray Substances 0.000 claims abstract description 43
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 238000005507 spraying Methods 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 claims description 48
- 238000003860 storage Methods 0.000 claims description 26
- 238000000926 separation method Methods 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 113
- 239000012535 impurity Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F5/021—Fastening articles to the garment to the belt
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45C—PURSES; LUGGAGE; HAND CARRIED BAGS
- A45C11/00—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00
- A45C2011/002—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00 for portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F2005/025—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment
- A45F2005/027—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment with a horizontal and parallel rotation axis, i.e. the axis being parallel to the surface of the garment
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F2200/00—Details not otherwise provided for in A45F
- A45F2200/05—Holder or carrier for specific articles
- A45F2200/0516—Portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Liquid Crystal (AREA)
- Nozzles (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040019568A KR100591475B1 (ko) | 2004-03-23 | 2004-03-23 | 평판디스플레이용 세정장치 |
KR1020040019568 | 2004-03-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1672820A true CN1672820A (zh) | 2005-09-28 |
CN100455367C CN100455367C (zh) | 2009-01-28 |
Family
ID=35045738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100555843A Expired - Fee Related CN100455367C (zh) | 2004-03-23 | 2005-03-16 | 用于清洁平面显示板的装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4099488B2 (zh) |
KR (1) | KR100591475B1 (zh) |
CN (1) | CN100455367C (zh) |
TW (1) | TWI279259B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105068285A (zh) * | 2015-09-01 | 2015-11-18 | 武汉华星光电技术有限公司 | 传送装置及具有该传送装置的清洗装置 |
CN103537457B (zh) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | 一种液膜尾边堆积液体的清除装置 |
CN111799193A (zh) * | 2019-04-09 | 2020-10-20 | 显示器生产服务株式会社 | 基板处理装置和直列式基板处理系统 |
CN111921955A (zh) * | 2020-08-10 | 2020-11-13 | 哈尔滨工业大学 | 一种风刀装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100783763B1 (ko) | 2007-01-04 | 2007-12-07 | 주식회사 디엠에스 | 기판 세정장치 |
KR101328722B1 (ko) | 2007-04-02 | 2013-11-11 | 주식회사 디엠에스 | 기판 세정장치 |
KR100888190B1 (ko) * | 2007-09-28 | 2009-03-10 | 주식회사 디엠에스 | 유체분사장치 |
KR101303808B1 (ko) * | 2011-12-07 | 2013-09-04 | 주식회사 케이씨텍 | 오토 셔터 |
JP6841633B2 (ja) * | 2016-11-08 | 2021-03-10 | 東洋熱工業株式会社 | 気液除塵装置 |
JP2018089548A (ja) * | 2016-11-30 | 2018-06-14 | 独立行政法人国立高等専門学校機構 | 洗浄機のノズル機構 |
KR101894088B1 (ko) | 2017-03-23 | 2018-09-04 | 가천대학교 산학협력단 | 품질검사 관리장치, 품질검사 의뢰 시스템 및 그 방법 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3530270B2 (ja) * | 1995-04-27 | 2004-05-24 | 島田理化工業株式会社 | 精密洗浄装置 |
JP2003145064A (ja) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | 2流体ジェットノズル及び基板洗浄装置 |
KR100586239B1 (ko) * | 2002-04-19 | 2006-06-02 | 주식회사 디엠에스 | 평판 디스플레이 세정용 유체 혼합 분사 장치 |
JP2003332401A (ja) * | 2002-05-09 | 2003-11-21 | Hugle Electronics Inc | 基板用搬送除塵装置 |
JP2004074021A (ja) * | 2002-08-19 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板洗浄ユニット |
-
2004
- 2004-03-23 KR KR1020040019568A patent/KR100591475B1/ko active IP Right Grant
-
2005
- 2005-03-01 TW TW094106047A patent/TWI279259B/zh not_active IP Right Cessation
- 2005-03-16 CN CNB2005100555843A patent/CN100455367C/zh not_active Expired - Fee Related
- 2005-03-18 JP JP2005080440A patent/JP4099488B2/ja not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103537457B (zh) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | 一种液膜尾边堆积液体的清除装置 |
CN105068285A (zh) * | 2015-09-01 | 2015-11-18 | 武汉华星光电技术有限公司 | 传送装置及具有该传送装置的清洗装置 |
CN111799193A (zh) * | 2019-04-09 | 2020-10-20 | 显示器生产服务株式会社 | 基板处理装置和直列式基板处理系统 |
CN111799193B (zh) * | 2019-04-09 | 2024-03-01 | 显示器生产服务株式会社 | 基板处理装置和直列式基板处理系统 |
CN111921955A (zh) * | 2020-08-10 | 2020-11-13 | 哈尔滨工业大学 | 一种风刀装置 |
Also Published As
Publication number | Publication date |
---|---|
JP4099488B2 (ja) | 2008-06-11 |
CN100455367C (zh) | 2009-01-28 |
KR100591475B1 (ko) | 2006-06-20 |
TWI279259B (en) | 2007-04-21 |
TW200537181A (en) | 2005-11-16 |
JP2005279643A (ja) | 2005-10-13 |
KR20050094933A (ko) | 2005-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Assignor: DMS Co.,Ltd. Contract record no.: 2012990000113 Denomination of invention: Apparatus for cleaning planar display panel Granted publication date: 20090128 License type: Exclusive License Open date: 20050928 Record date: 20120316 |
|
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: DMS Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090128 |