CN1606128A - Semiconductor fabrication apparatus and pattern formation method using the same - Google Patents
Semiconductor fabrication apparatus and pattern formation method using the same Download PDFInfo
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- CN1606128A CN1606128A CNA200410080713XA CN200410080713A CN1606128A CN 1606128 A CN1606128 A CN 1606128A CN A200410080713X A CNA200410080713X A CN A200410080713XA CN 200410080713 A CN200410080713 A CN 200410080713A CN 1606128 A CN1606128 A CN 1606128A
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
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Abstract
The semiconductor fabrication apparatus of this invention includes an exposure section provided within a chamber for exposing a design pattern on a resist film applied on a wafer, and a liquid recycle section for supplying, onto the wafer, a liquid for use in immersion lithography for increasing the numerical aperture of exposing light during exposure while recycling the liquid. The liquid recycle section includes a liquid supply part for supplying the liquid onto the resist film of the wafer, a liquid discharge part for discharging and recovering the liquid from above the wafer, and an impurity removal part for containing the liquid and removing an impurity included in the liquid.
Description
Technical field
The present invention relates to a kind ofly be used for semiconductor-fabricating device, the semiconductor-fabricating device of manufacturing process and utilize this semiconductor-fabricating device to form method of patterning.
Background technology
Along with improving constantly of the integrated level of semiconductor integrated circuit and constantly dwindling of the volume of semiconductor device, just need to accelerate the research and development photoetching technique.At present, pattern-forming is to utilize the exposure light of mercury vapor lamp, KrF excimer laser, ArF excimer laser or like to finish by photoetching process, but also utilizes the F that can shine with shorter wavelength
2Laser is tested.But,, therefore utilize the exposure light of shorter wavelength to carry out the photoetching process of photoetching never by actual employing owing in exposure system and resistance material, also there being a large amount of problems.
Under these conditions, in recent years, someone has proposed to adopt the lithography process of traditional exposure light, so that pattern (is for example further processed, see M.Switkes and M.Rothschild " Immersion lithography at 157nm ", J.Vac.Sci.Technol., B19 volume, the 2353rd page (2001)).
In this lithography process; in exposure system; zone between a projecting lens and protective film that is arranged on the wafer has been full of the liquid that a kind of refractive index is n (wherein n＞1), and therefore, the NA of this exposure system (numerical aperture) is nNA just.Like this, just can improve the resolution of this protective film.
In a kind of traditional immersion-type exposure system, the steeping liq that is filled in the part between exposure portion and wafer surface can be supplied with by one of two kinds of methods, for example the method shown in Fig. 7 A and 7B.Exposure system shown in Fig. 7 A has adopted so-called drip, liquid 250 is fed in the part portion between wafer 200 and exposure portion 101 by local, thereby will cover with the corresponding wafer surface of at least one exposure range portion, wherein wafer 200 is placed on the platform.Particularly, when exposing, liquid 250 is fed on the surface of the wafer 200 that is positioned at an exposure range the place ahead just, after this by a liquid supply unit 110, before in platform 100 is shifted to next scope, liquid 250 is discharged from by a fluid discharge portion 112.Like this, just feeding and discharge of liquid 250 can be along with wafer 200 and platform 100 carry out corresponding to each exposure range repeatedly along the slip of scanning direction.
On the other hand, in the exposure system shown in Fig. 7 B, adopted a kind of so-called method of compiling, wafer 200 that is placed on the platform 100 is dipped in the treatment trough 120 that accommodates liquid 250, like this, just can expose to the entire wafer surface that is covered by liquid 250.In addition, when platform 100 when another exposure range that is positioned at an exposure range rear moves, exposure portion 101 will slide at the liquid level of liquid 250.
In adopting the photolithographic traditional exposure system of impregnated, after the exposure, no matter adopt which kind of method to feed liquid 250, the liquid 250 that is arranged between wafer 200 and the exposure portion 101 all will be eliminated.Particularly, in the exposure system that adopts the drip-injection method shown in Fig. 7 A,, therefore just need to consume a large amount of liquid 250 because liquid 250 all will be fed apace and discharge in each exposure range.
And, even utilize the exposure system of compiling method shown in Fig. 7 B to be used,, also to periodically change liquid 250 carrying out in the large-scale production process for every day carries out graph exposure on a hundreds of wafer 200, so also can consume a large amount of liquid 250.
Summary of the invention
The objective of the invention is to form the shape operation with low-cost execution graph and solve the problems referred to above by utilizing lithography process.
As mentioned above, a large amount of liquid are consumed, and the cost that therefore causes exposing increases.In addition, before discharge liquid, need carry out liquid waste processing, semi-conductive whole processing cost is increased liquid.
For achieving the above object; in the figure manufacturing process of a kind of semiconductor-fabricating device that adopts lithography process and the semiconductor-fabricating device of a kind of utilization according to the present invention, the liquid that is present between protective film and the exposure portion (projecting lens) can be used repeatedly.
Particularly, figure manufacturing process of the present invention comprises the steps: to process a protective film on a substrate; Carry out graph exposure by means of the liquid on the protective film by utilizing exposure light that protective film is carried out radiation selectively; Behind graph exposure, form a resist pattern by the mode that protective film is developed, and used liquid to use repeatedly in the graph exposure step.
In figure manufacturing process of the present invention, the liquid of Shi Yonging is used as the liquid that will be fed between protective film and the exposure portion in the graph exposure step repeatedly, the increase of the cost that therefore just can prevent to expose.
In figure manufacturing process of the present invention, liquid is especially used in the step that figure is shaped repeatedly.
In figure manufacturing process of the present invention, after finishing the graph exposure step, especially liquid is reclaimed and when next graph exposure, reuse.
In figure manufacturing process of the present invention, the step of graph exposure especially comprises the operation that the impurity that will be mixed in the liquid is removed.Like this, even when used liquid is used repeatedly in step of exposure, also can be eliminated from the impurity of semiconductor-fabricating device or protective film and the impurity of in exposure process, sneaking in the liquid.Therefore, by removing impurity, just can make the liquid that is repeated to utilize reach the basic purity identical with fresh liquid.Therefore, even when utilizing this withdrawal liquid to carry out step of exposure, protective film still can Accurate Shaping.
Figure manufacturing process of the present invention especially also comprises the step that the impurity that will sneak in the withdrawal liquid is removed.
Figure manufacturing process of the present invention especially also comprises: before or after the graph exposure step, remove the step of sneaking into the impurity in the liquid.
In this case, liquid especially can flow through a filter in the step of removing impurity.In addition, for example when with a chemical filter when the filter, even when the contacted alkalescence of liquid or acidic chemical material are in protective film enters liquid, also chemical substance effectively can be removed.In addition, figure manufacturing process of the present invention especially also comprises: after removing the step of impurity, to being included in the step that impurity component in the liquid or content detect.
In addition, figure manufacturing process of the present invention especially also comprises: after executing the graph exposure step, and the deaeration step that the gas that is included in the liquid is removed.Like this, the gas (bubble) that is included in the liquid just can be removed, therefore, and can be by the appearance that is included in the exposure light scattering problem that bubble caused in the liquid.Like this, just can form figure with suitable shape.
Semiconductor-fabricating device of the present invention comprises a graph exposure portion, and this graph exposure portion can utilize the liquid that is present between protective film and the exposure lens to expose, and wherein protective film is arranged on the substrate; A liquid supply unit, this one and graph exposure portion link together in the following manner: make liquid can flow to graph exposure portion and liquid is sent in the graph exposure portion; An Impurity removal portion, this one is connected with graph exposure portion in the following manner: the flow direction graph exposure portion and the impurity that will be included in the liquid are removed, and this Impurity removal portion is connected with the liquid supply unit in the following manner: make liquid can flow to the liquid supply unit and the liquid that will remove impurity is sent the liquid supply unit back to.
In semiconductor-fabricating device of the present invention, because steeping liq can recycle, therefore the liquid of removing impurity can be sent to the liquid supply unit, so just can prevent that the cost that utilizes steeping liq to expose from raising.In addition, owing to be provided with Impurity removal portion, therefore its purity of liquid that recycles is basic identical with the purity of fresh liquid.Therefore, even when utilizing this circulating fluid to expose, protective film still can accurately form pattern.
Semiconductor-fabricating device of the present invention especially also comprises a liquid test section that is arranged between Impurity removal portion and the liquid supply unit, and it is used for detecting being included in impurity component or the content that will be transported to the liquid in the liquid supply unit.
Semiconductor-fabricating device of the present invention especially also comprises one first control part, and it is used for the amount of liquid that is transported in the Impurity removal portion from graph exposure portion is controlled.
In semiconductor-fabricating device of the present invention, the liquid supply unit especially comprises an addition portion that is used for adding to liquid additive; With a mixing portion, it is used for feeding fresh liquid to graph exposure portion, the liquid of having removed the liquid of impurity or contained additive work having been overregulated.
In this case, this semiconductor-fabricating device especially also comprises one second control part, and this one is used for controlling the quantity that is joined the additive of the liquid that is positioned at mixing portion by addition portion.
Semiconductor-fabricating device of the present invention especially also comprises a degassing portion, and this degassing portion is arranged between liquid supply unit and the graph exposure portion and is used for removing and is included in the gas that is fed the liquid in the graph exposure portion.
In semiconductor-fabricating device of the present invention, Impurity removal portion comprises that especially one is used for and will be included in the filter of the Impurity removal of liquid.
The impurity of removing from semiconductor-fabricating device of the present invention especially is particle or chemical substance.
In this case, the chemical substance that need remove is amine, acid or low-molecular weight polymer.
Semiconductor-fabricating device of the present invention especially also comprises one the 3rd control part, and this one is used for by first monitor that is arranged between graph exposure portion and the Impurity removal portion amount of liquid being controlled.
Semiconductor-fabricating device of the present invention especially also comprises one the 4th control part, and this one is used for by second monitor that is arranged in the mixing portion additive capacity and the fresh liquid scale of construction that join in the mixing portion being controlled.
In figure manufacturing process of the present invention and semiconductor-fabricating device, liquid can be water or PFPE (perfluoropolyether).
In figure manufacturing process of the present invention and exposure system, exposure light can be KrF excimer laser, ArF excimer laser, F
2Laser, KrAr laser or Ar
2Laser.
Description of drawings
Figure 1A and 1B are for being used for the semiconductor-fabricating device of figure manufacturing process according to embodiments of the invention 1, wherein this figure manufacturing process adopts immersion lithography, particularly, Figure 1A is the cutaway view of the major part portion of semiconductor-fabricating device, and Figure 1B then is the perspective view of the liquids recovery portion of this semiconductor-fabricating device;
Fig. 2 is the cutaway view according to the major part portion of the semiconductor-fabricating device of the modified structure of the embodiment of the invention 1;
Fig. 3 A, 3B, 3C and 3D are cutaway view, there is shown the operation that comprises first step of exposure in as embodiment 1 described figure manufacturing process;
Fig. 4 A, 4B and 4C are cutaway view, there is shown the operation that comprises second step of exposure in as embodiment 1 described figure manufacturing process;
Fig. 5 is the block diagram that is used for the semiconductor-fabricating device of the embodiment of the invention 2 described lithography process;
Fig. 6 A is the block diagram of the liquid supply unit of the semiconductor-fabricating device among the embodiment 2, and Fig. 6 B is the block diagram of liquids recovery portion of the semiconductor-fabricating device of embodiment 2;
Fig. 7 A is the cutaway view that is used in the major part portion of the semiconductor-fabricating device in the traditional immersion lithography that adopts drip, and Fig. 7 B is the cutaway view that is used in the major part portion that adopts the semiconductor-fabricating device in the traditional immersion lithography that compiles method.
Embodiment
Embodiment 1
Below with reference to accompanying drawings embodiments of the invention 1 are illustrated.
(semiconductor-fabricating device)
Figure 1A and 1B show the semiconductor-fabricating device that is used to carry out the figure manufacturing process that adopts immersion lithography according to embodiments of the invention 1, particularly, Figure 1A is the cutaway view of the major part portion of semiconductor-fabricating device, and Figure 1B is the perspective view of the liquids recovery portion of this semiconductor-fabricating device.
Shown in Figure 1A, the semiconductor-fabricating device of embodiment 1 comprises: an exposure portion 30, this one are arranged in the cavity 10 and are used for forming a layout by exposure on a protective film (not shown) that is applied on the wafer 20; The liquid that a liquids recovery portion 40, this one will be used for immersion lithography and be used for improving the numerical aperture of exposure light is fed to wafer 20 at exposure process, and liquid 23 is circulated.
This exposure portion 30 is used for flat board 32 that wafer platform that wafer 20 is supported 31, one be used for fixing this wafer platform 31, top that is arranged on wafer 20 by one and constitutes at illuminator 33 and a projecting lens 34 that the offside of wafer platform 31 includes an exposure light source; wherein this projecting lens is used for will sending and pass an exposure light with mask (graticule) 22 of layout by illuminator 33 by liquid 23 and projects protective film, and wherein layout will be transferred on the protective film.
In this case, projecting lens 34 in exposure process, be maintained at can with the surperficial contacted position of liquid 23 on the protective film that is fed to wafer 20 on.
Although do not illustrate in the accompanying drawings, this Impurity removal portion 43 also is provided with one and is used for feed pump and one that liquid 23 is fed on the wafer 20 are used for from the recovery pump of the top withdrawal liquid 23 of wafer 20.
In addition; because the impurity that is included in the withdrawal liquid 23 is not only particle; for example; also have from the protective film upper punch to wash next chemical substance or analog, so this Impurity removal portion 43 also is provided with 431 and chemical filters 432 that chemical substance can be filtered out of a mechanical type filter (particulate filter) that particle filtration can be come out.
Chemical substance for example can be to wash the alkali (for example amine, ammonia and hexamethyldisiloxane) that comes and by being included in acid (for example trifluoromethanesulfonic acid or nonafluorobutanesulfonicacid) that the lip-deep sour generting element of protection forms, acidic materials (for example sulfuric acid) and by the gas of protective film generation from protective film and periphery upper punch thereof.
Like this; the semiconductor-fabricating device of this embodiment just comprises liquids recovery portion 40; the liquid 23 that this one will once be used for immersion lithographic technology reclaims; and not only remove the particle that is included in the withdrawal liquid 23; but also to remove chemical substance, for example in exposure process, wash next gas by the protective film upper punch.Therefore, just can keep the purity of liquid 23 (for example perfluoropolyether), thereby liquid 23 can be reclaimed.The cost that like this, just can prevent to expose in utilizing the process of immersion lithography raises.
Although mechanical type filter 4431 and chemical filter 432 all are arranged for removing the filter of impurity in this embodiment, also can only take wherein a kind of filter.But, keep high-purity in order to make liquid 23, especially still two kinds of above-mentioned filters.
(modified structure of semiconductor-fabricating device)
Fig. 2 shows the semiconductor-fabricating device according to the modified structure of embodiment 1.In Fig. 2, use the same reference numerals to represent and the same parts shown in Figure 1A and 1B, therefore omitted explanation to these same parts.
As shown in Figure 2, in the semiconductor-fabricating device behind this remodeling, the liquids recovery portion 40 that is used for feeding and be recovered in the used liquid 23 of immersion lithographic technology is arranged on the outside of cavity 10.When this liquids recovery portion 40 is arranged on cavity 10 outside in this manner, can make the cleannes in the cavity 10 keep higher.
(figure manufacturing process)
Now, with reference to Fig. 3 A to 3D and 4A to 4C the figure manufacturing process that adopts above-mentioned semiconductor-fabricating device is illustrated.
At first, prepare out a kind of positive chemical amplification protective material with following component:
Base polymer: poly (styrenehexafluoroisopropylalcohol) (40mol%)-(α-trifluoromethyl t-butylacrylate) (60mol%) ... 2g
Element is produced in acid: triphenylsulfonium triflate ... 0.08g
Solvent: propylene glycol monomethyl ether acetate ... 20g
Then, as shown in Figure 3A, above-mentioned chemical amplification protective material is coated on the wafer 20, with the protective film 21 that to form a thickness be 0.20 μ m.
Then, shown in Fig. 3 B, when being fed to perfluoropolyether liquid 23A between protective film 21 and the projecting lens 34, utilization is 0.60 F by NA
2Laser sends and passes the mode that 24 pairs of protective films 21 of exposure light of a mask (not shown) shine and carries out graph exposure.
Behind graph exposure; shown in Fig. 3 C; 100 ℃ hot plate is not to 60 seconds of this protective film 21 bakings with a temperature, and the protective film of making like this can develop with the aqueous solution (alkaline developer) of the tetramethylammonium hydroxide of 2.38wt%.Like this, constitute and linear width is the structure that the anticorrosion figure 21a of 0.06 μ m will be processed to have excellent in shape by unexposed on the protective film 21, shown in Fig. 3 D.
Then, for example by the fluid discharge portion shown in Figure 1B 42 will be in exposure process used liquid 23A be recovered in the Impurity removal portion 43, in this Impurity removal portion 43, particle and wash the chemical substance of coming from protective film 21 upper punches and just be removed.
Then, shown in Fig. 4 A, the liquid 23B that is flowed out by liquid supply unit 41 is present in projecting lens 34 and is arranged between the protective film 21 on the first type surface of another wafer 20, and then, utilizing by numerical aperture NA is 0.60 F
2Laser sends and passes the mode that 24 pairs of protective films 21 of exposure light of a mask (not shown) shine and carries out graph exposure.
After this graph exposure operation, shown in Fig. 4 B, utilize a temperature be 100 ℃ hot plate to 60 seconds of this protective film 21 bakings, the protective film of making like this can develop with the tetramethylammonium hydroxide developer of 2.38wt%.Like this, constitute and linear width is the structure that the anticorrosion figure 21a of 0.60 μ m will be processed to have excellent in shape by unexposed on the protective film 21, shown in Fig. 4 C.
As mentioned above,, impurity is removed from the liquid 23A that is recovered after exposure for the first time, be reused in the exposure process second time as liquid 23B with the liquid that will form according to embodiment 1.Like this, when forming meticulous figure, just can prevent owing to the cost that causes exposing of a large amount of consumable liquids in immersion lithographic technology increases the appearance of problem by lithography process.
Will be appreciated that exposure light that the light source from be included in illuminator 33 sends is not limited to the F among this embodiment
2Laser, suitably mode adopts KrF excimer laser, Xe
2Laser, ArF excimer laser and Ar
2Laser.
In addition, for the liquid 23,23A and the 23B that are used for lithography process, can also replace water with perfluoropolyether.
Embodiment 2
To be illustrated embodiment 2 below.
Shown in Fig. 7 B, compile in traditional exposure system of method in employing, need periodically to change in the manner described above dipping liquid 250.This is because protective film other mass part portion except exposure portion in exposure process that is deposited on the wafer 200 contacts with liquid 250 always, and the contact area between liquid 250 and the protective film is very big, and time of contact is also very long.
Generally speaking, protective film is made by multiple mixtures of material, and in exposure process, protective film can be produced acid.Therefore, even dissolve, but also be difficult to prevent fully protective film generation acid and prevent to be included in the interior component of protective film poured in the liquid 250 when steeping liq 250 is difficult to make protective film.In other words, when using liquid 250 continuously for a plurality of wafers 200 are exposed, the impurity that liquid 250 will be sneaked into wherein pollutes.When dipping with the purity of liquid 250 owing to existing impurity to descend, the exposure light that is sent by exposure portion 101 will be because of existing impurity to produce scattering or being absorbed by impurity portion, like this, be used for the exposure process that exposure portion to wafer 200 carries out radiation great variety will take place.Like this, just be difficult to accurately finish the graph exposure operation.
Therefore, under dipping situation about being recycled, need recover the initial purity of liquid 250 by the mode that will be included in impurity in the withdrawal liquid 250 and pollutant removal with liquid 250.
Below, with reference to the accompanying drawings the semiconductor-fabricating device according to the embodiment of the invention 2 is illustrated.
Fig. 5 is for finishing the block diagram of the semiconductor-fabricating device of immersion lithographic technology according to the embodiment of the invention 2.
As shown in Figure 5, the semiconductor-fabricating device of embodiment 2 comprises: a graph exposure portion 51, this one are used on the protective film that is deposited on the wafer required figure being exposed; A liquid supply unit 52, the liquid that this one is used for being present between protective film and the projection lens is fed in the graph exposure portion; With a liquids recovery portion 54, this one is used for and will reclaims at the used liquid of graph exposure operation and it is sent to liquid supply unit 52 once more.
This semiconductor-fabricating device also comprises: a degassing portion (de-bubble portion) 55, this one are used to remove the bubble in the liquid that is present between liquid supply unit 52 and the graph exposure portion 51; A control part 56, this one is used for the amount of feeding of liquid and yield are monitored and be used to monitor and control the purity that is recycled to the liquid in the liquids recovery portion 54.Graph exposure portion 51 is provided with one first floss hole 57, like this, just liquid used in the exposure process can be discharged.
The structure of liquid supply unit 52 and liquids recovery portion 54 is respectively shown in Fig. 6 A and the 6B.
As shown in Figure 6A, liquid supply unit 52 comprises a liquid mixing portion 521 and an addition portion 552, and this addition portion is used for adding the additive that can regulate the optics and the electrology characteristic of liquid to liquid.Be imported in the liquid mixing portion 521 with mistake and by the liquid that liquids recovery portion 54 sends with fresh liquid with in exposure process by feeding mouthful 58 dippings that feed, if desired, can also add the component that to regulate liquid refractive index or resistivity, for example cesium sulfide (CsSO by addition portion 522
4) or ethanol (C
2H
5OH).
Shown in Fig. 6 B, liquids recovery portion 54 comprises: an Impurity removal portion 541, this one are used for the impurity of sneaking into the liquid that is recovered in the graph exposure portion 51 is removed; With a liquid test section 542, this one is used for the purity of the liquid of removing impurity is detected.This Impurity removal portion 541 is provided with one second floss hole 59, and it is used for the testing result according to liquid test section 542 is shown the liquid discharge that is not suitable for reusing.
Now, will the operation of semiconductor-fabricating device with said structure be described.
(1) carry out by feeding mouth 58 feeds operation from liquid to liquid supply unit 52:
At first, as shown in Figure 6A, highly purified dipping with liquid for example water (pure water) or perfluoropolyether be imported in the liquid mixing portion 521 of liquid supply unit 52 by feeding mouthfuls 58, so that it is left in this part portion temporarily.Do not needing to add in liquid under the situation of additive, highly purified liquid is from feeding mouth 58 in liquid supply unit 52 is fed to graph exposure portion 51.
In liquid, adding under the situation of additive, can an amount of additive joined in the liquid that leaves in the liquid mixing portion 521 by addition portion 522.
At this moment, control part 56 shown in Figure 5 feeds (high-purities) dipping that 1 pair of first monitors M in mouthfuls 58 are imported in the liquid mixing portion 521 and regulates with the amount of fresh liquid by being arranged on.This control part 56 is also regulated by being arranged on the additive capacity that 2 pairs of second monitors M between addition portion 522 and the liquid mixing portion 521 join the liquid that is arranged in liquid mixing portion 521.
Adding under the situation of additive in liquid, the additive that liquid mixes in the portion 521 with liquid evenly mixes, and then, the liquid that forms in the manner described above is sent to graph exposure portion 51 by degassing portion 55.
(2) feed the operation of liquid to graph exposure portion 51 from liquid supply unit 52 and degassing portion 55:
As shown in Figure 5, the liquid of sending in the liquid supply unit 52 flow through degassing portion 55 before being admitted to graph exposure portion 51.This degassing portion 55 will be sent to bubble contained in the liquid of liquid supply unit 52 and remove.Bubble can be removed by known method like this, for example by solution-air separation method, nitrogen dissolution method and solution-air separating film method.Will be appreciated that degassing portion 55 is not essential all the time, but recommend to be provided with, the bubble that produces or sneak in the liquid in by liquid at exposure process is removed being used for.
Even in the exposure technology that adopts immersion lithographic, if dipping has comprised a large amount of bubbles with liquid, exposure light will be because of the bubble scattering so.And because the refractive index of these bubbles is different from liquid refractive index, therefore, liquid is in the part portion that has bubble and do not exist the ray refractive index between the part portion of bubble to change.Like this, graphic defects or similar problem will appear.
Therefore, before exposure, recommend liquid is carried out the bubble inspection, as far as possible bubble is removed from the liquid that is sent to graph exposure portion 51.But, although be difficult to bubble is removed from liquid, but can prevent to go wrong in exposure process because of bubble by satisfying following given datum mark: the size (diameter) that makes each bubble be 0.1 μ m or bigger, and bubble quantity and bubble is about and contains have an appointment 30 bubbles or bubble still less in per 100 milliliters of liquid.
Therefore, in embodiment 2, be provided with one the 3rd monitors M 3 and one the 4th monitors M 4 respectively at the entrance and exit place of degassing portion 55, so just can be before liquid being fed in the graph exposure portion 51, for example by adopting the laser scanning method to measure bubble quantity and bubble by means of the 3rd monitors M 3 by control part 56.In this embodiment, only when the size of bubble and quantity did not satisfy requiring of said reference point, liquid just can be subjected to the degassing and handle in degassing portion 55, to satisfy the requirement of datum mark.
After this, will flood be sent in the graph exposure portion 51 with liquid before, for example by adopting the laser scanning method once more by the state of 4 pairs of bubbles of the 4th monitors M, for example the size of bubble and quantity are measured.When finding that the result can satisfy requiring of datum mark, liquid is sent to graph exposure portion 51; And when requiring of datum mark do not satisfied in discovery, liquid can flow through degassing portion 55 once more, further to remove bubble.Will be appreciated that the mensuration structure that obtains by the 3rd monitors M 3 and the 4th monitors M 4 and be to carry out batch processing according to the control signal of control part 56 to the control of flow velocity and liquid flow direction.
(3) feed the operation of liquid to liquids recovery portion 54 by graph exposure portion 51:
As shown in Figure 5, graph exposure is finished with liquid by dipping in graph exposure portion 51, and if desired, dipping is with the liquid processing that can outgas in degassing portion 55.
Behind graph exposure, according to the quantity of impurities in the liquid, part portion liquid can be discharged by first floss hole 57, and remainder portion then is recycled in the liquids recovery portion 54.Particularly, detect by the impurity level that is included in the liquid after the 5 pairs of exposures of the 5th monitors M on the floss hole that is arranged on graph exposure portion 51.When impurity level surpassed setting, liquid was discharged by first floss hole 57, and that part of the liquid that impurity content does not surpass setting then is sent to liquids recovery portion 54.56 pairs of information by the relative substance content of the 5th monitors M 5 acquisitions of control part are handled, with the amount of liquid of control by 57 discharges of first floss hole.Thus, after the exposure, when the quantity of impurities in the liquid was lower than setting, all liq all was recycled in the liquids recovery portion 54, and need not by first floss hole, 57 discharge liquid.
For the exposure process that adopts immersion lithography, can adopt drip and compile method.And, when employing compiled method, after a plurality of wafer exposure, the liquid that is contained in the treatment trough may all be recovered in the liquids recovery portion 54, perhaps, the liquid that is contained in the treatment trough can circulate by graph exposure portion 51, liquids recovery portion 54 and liquid supply unit 52 always.
Below, will the operation of liquids recovery portion 54 be illustrated.
Shown in Fig. 6 B, at first in contaminant removal portion 541, will be recycled to dipping in the liquids recovery portion 54 with liquid in contained impurity remove.Particularly, be present in fine dust particles in the exposure system, in exposure process, generate and be dissolved in gas in the liquid, wash the solvent (for example quenching medium) of coming and low atomic weight polymer (for example exudant) and all will from the liquid of recovery, remove away by the acid that acid forming agent generates resemble amine from the protective film upper punch by protective film.
For removal of contamination, for example the filter that can adopt a sizing grid to be about 0.1 μ m comes particulate is filtered.In addition, can also adopt the pollutant of composition to generating of a chemical filter or column chromatography agent (for example silica gel) and active carbon or analog by protective film and discharge gas.
After this, that part of liquid having removed impurity can flow through liquid test section 542, whether equals initial purity with the purity of tracer liquid.
Particularly, to detect with the amount of particulate loading contained in the liquid and other impurity, the temperature of liquid, the resistivity and the refractive index of liquid dipping exactly, so just can with compare by the respective value that feeds mouth 58 fresh liquids of sending to.For example, for the quantity of particulate, the quantity of utilizing batch particle-counting system can determine that granularity is equal to or greater than the particle of 0.1 μ m is equal to or less than 30 in the liquid of every 100ml.And, can also utilize the chromatography of ions to measure and wash next impurity level by the protective film upper punch, so just can conclude that the content of amine is equal to or less than 1 μ g/m
3With regard to the temperature of liquid, can determine: its temperature equals room temperature (in 15 ℃ to 35 ℃ scope, for example can be 23 ℃), and more particularly, this temperature can be room temperature ± 0.01 ℃.The conductance of liquid can be measured with conductometer, and the conductance that so just can determine liquid is equal to or less than 0.06 μ S/cm.
Between the contaminant removal portion 541 and second floss hole 59, also be provided with one the 6th monitors M 6 and one the 7th monitors M 7.Testing result after detecting according to used liquid in to exposure process is found: the purity of liquid is not fully restored, and can conclude by the 6th monitors M 6: can not be when having made liquid flow through contaminant removal portion 541 once more to make its purity return to setting, such liquid will be discharged by second floss hole 59.
On the contrary, when determining that by the 6th monitors M 6 this liquid can reclaim, the 7th monitors M 7 will detect this liquid, to judge the purity whether its purity equals fresh liquid.Thus, if it is not enough to determine the purity of liquid, this liquid will be got back to contaminant removal portion 541 once more so, thus in contaminant removal portion 541 with contaminant removal.Control part 56 receive that impurity from the 6th monitors M 6 and the 7th monitors M 7 detects information and to the amount of liquid of discharging by second floss hole 59, sent back to amount of liquid in the contaminant removal portion 541, will be fed amount of liquid in the liquid supply unit 52 etc. and control.
After this, by making liquid circulate the purity of concluding liquid when having reached the purity that equals fresh liquid at contaminant removal portion 541 and liquid test section 542, the liquid that purity has obtained confirming will be transported in the liquid supply unit 52 from liquids recovery portion 54.
(4) liquid is sent to operation in the liquid supply unit 52 from liquids recovery portion 54:
As shown in Figure 5, the dipping that is transported to liquid supply unit 52 by liquids recovery portion 54 by 8 pairs of the 8th monitors M that are arranged between liquids recovery portion 54 and the liquid supply unit 52 detects with the amount of liquid.Handle by 56 pairs of amount of liquid information that are transported in the liquid supply unit 52 by liquids recovery portion 54 of control part, to determine needs according to the amount of withdrawal liquid by feeding mouthful 58 fresh liquid scale of constructions that additionally feed.After this, with reference to Fig. 6 A, the amount of liquid that control part 56 is determined needs the extra fresh liquid scale of construction of adding, send from liquids recovery portion 54 and being used to is regulated the additive capacity of refractive index etc., controls with the amount of fluid and the quality that needs are fed to graph exposure portion 51.
As mentioned above, in embodiment 2, liquids recovery portion 54 and graph exposure portion 51 link together in the following manner: make dipping can flow to this exposure portion with liquid, and can with in exposing operation used liquids recovery get up and the contaminant removal in the withdrawal liquid fallen; This liquids recovery portion 54 also be used for dipping is connected with the liquid supply unit 52 that liquid is sent to graph exposure portion 51.Like this, used dipping just can be transported in the liquid supply unit 52, so that it is reused with liquid in exposing operation; So just can prevent because of using liquid that the cost of semiconductor-fabricating device is increased.
In addition, owing to be provided with contaminant removal portion 541 in liquids recovery portion 54, the dipping that therefore needs to reclaim equates with the purity of fresh liquid substantially with its purity of liquid.Like this, even when withdrawal liquid is used for exposing operation, protective film still can form gratifying figure.
In embodiment 2, dipping can and compile method by drop method with liquid and be transported on the wafer.
Although the semiconductor-fabricating device among the embodiment 2 comprises eight monitors (first to the 8th monitors M 1-M8),, these monitors are optional, and some monitors can suitably be set.
The light source of exposure light can be from F
2Laser, KrF excimer laser, Xe
2Laser, ArF excimer laser, KrAr laser and Ar
2Choose in the laser F2 laser.
Like this, the present invention just can process the accurate precision graphic of shape at low cost by immersion lithography, and can in semiconducter process, be used as semiconductor-fabricating device and similar device, in addition, also semiconductor-fabricating device of the present invention can be applied in the figure manufacturing process.
Claims (41)
1, a kind of figure manufacturing process, it comprises the steps:
On a substrate, form a protective film;
Be provided with under the state of liquid on the described protective film, utilizing exposure light that described protective film is shone selectively, thereby finish graph exposure;
Behind graph exposure, described protective film is developed;
To in the graph exposure operation, used described liquids recovery get up.
2, according to the figure manufacturing process of claim 1, it is characterized in that: described liquid is recovered in carrying out the figure step of exposure.
3, according to the figure manufacturing process of claim 1, it is characterized in that: described liquid is recovered in next graph exposure step.
4, according to the figure manufacturing process of claim 1, it is characterized in that: described recycling step has the operation of a removal of contamination from liquid.
5, according to the figure manufacturing process of claim 4, it is characterized in that: described liquid flows through from a filter in the operation of removal of contamination.
6, according to the figure manufacturing process of claim 4, also comprise: after the operation of removal of contamination, the step that one of the composition that is included in the described impurity in the described liquid and content are detected at least.
7, according to the figure manufacturing process of claim 3, also comprise: after the graph exposure step, the step that the contaminant removal of sneaking in the described withdrawal liquid is fallen.
8, according to the figure manufacturing process of claim 7, it is characterized in that: described liquid flows through filter in the step of removal of contamination.
9, according to the figure manufacturing process of claim 7, also comprise: after the step of removal of contamination, the step that one of the composition that is included in the described impurity in the described liquid and content are detected at least.
10, according to the figure manufacturing process of claim 1, also comprise: before or after carrying out the figure step of exposure, the step that the contaminant removal of sneaking in the described liquid is fallen.
11, according to the figure manufacturing process of claim 10, it is characterized in that: described liquid flows through a filter after the step of removal of contamination.
12, according to the figure manufacturing process of claim 10, also comprise: after the step of removal of contamination, the step that one of the composition that is included in the described impurity in the described liquid and content are detected at least.
13, according to the figure manufacturing process of claim 1, also comprise: after carrying out the figure step of exposure, the degassing step that the gas that is included in the described liquid is removed.
14, according to the figure manufacturing process of claim 1, it is characterized in that: described liquid is water or perfluoropolyether.
15, according to the figure manufacturing process of claim 1, it is characterized in that: described exposure light is KrF excimer laser, X
2Laser, ArF excimer laser, F
2Laser, KrAr laser or Ar
2Laser.
16, a kind of semiconductor-fabricating device, it comprises:
One is arranged on unit between a protective film and the exposure lens with liquid, and wherein protective film is arranged on the substrate;
A liquid supply unit, this one is connected with described unit, so that described liquid is sent to described unit;
One is reclaimed the unit, and this recoverys unit is connected with described unit, with the described liquid of reception from described unit, and described liquid is purified;
It is characterized in that: described recovery unit is connected with described liquid supply unit, so that the liquid after the described purification is fed to described liquid supply unit.
17, according to the semiconductor-fabricating device of claim 16, also comprise: a detecting unit, this detecting unit is arranged between described recovery unit and the described liquid supply unit, and being provided with an analyzer, it can detect one of the quantity of impurity contained in the described decontaminating liquid by the output of described recovery unit and content at least.
18, according to the semiconductor-fabricating device of claim 16, also comprise: one first control part, this one is used to control the described scavenging solution scale of construction of being sent by the recovery unit and controls, and wherein said decontaminating liquid will be provided for the liquid supply unit.
19, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described liquid supply unit comprises:
An adding device, this adding device are used for adding additive to described liquid;
The described decontaminating liquid that a mixed cell, this unit are used for fresh liquid, having removed the described decontaminating liquid of impurity or having included described additive mixes.
20, according to the semiconductor-fabricating device of claim 19, also comprise: one second control part, this second control part are provided with a system control component that is used for determining to join from described adding device the described additive capacity of described decontaminating liquid.
21, according to the semiconductor-fabricating device of claim 16, also comprise: a degassing portion, this degassing portion are arranged between described liquid supply unit and the described graph exposure portion and are used for the contained gas clean-up of described liquid that needs are fed in the described unit is fallen.
22, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described contaminant removal unit is provided with the filter that a contaminant removal that is used for being included in described liquid falls.
23, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described impurity is particle or chemical substance.
24, according to the semiconductor-fabricating device of claim 23, it is characterized in that: described chemical substance is amine, acid or low-molecular-weight polymer.
25, according to the semiconductor-fabricating device of claim 16, also comprise: one the 3rd control part, this one is provided with a system that can control described amount of liquid by first monitor, and wherein first monitor is arranged between described graph exposure portion and the described contaminant removal unit.
26, according to the semiconductor-fabricating device of claim 19, also comprise: one the 4th control part, this one is provided with one can be by being arranged on second monitor in the described mixed cell to adding the system that the additive capacity in the described mixed cell and the described fresh liquid scale of construction are controlled.
27, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described liquid is water or perfluoropolyether.
28, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described exposure portion is with KrF excimer laser, X
2Laser, ArF excimer laser, F
2Laser, KrAr laser, Ar
2Laser or F2 laser are as exposure light.
29, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described unit is installed in the graph exposure portion.
30, a kind of semiconductor-fabricating device, it comprises:
One is arranged on unit between a protective film and the exposure lens with liquid, and wherein protective film is arranged on the substrate;
A liquid supply unit, this one is connected with described unit, thinks that described unit provides described liquid;
A degassing portion, this one are arranged between described liquid supply unit and the described unit, and contained gas in the liquid of being sent by described liquid supply unit can be removed;
A contaminant removal unit, it is connected with described unit, and contained contaminant removal in the described liquid that is flowed out by described unit can be fallen;
It is characterized in that: described contaminant removal unit is connected with described liquid supply unit, is sent to described liquid supply unit with the liquid that will remove behind the impurity.
31, according to the semiconductor-fabricating device of claim 30, also comprise: a detecting unit, this detecting unit is arranged between described contaminant removal unit and the described liquid supply unit, and being provided with an analyzer, it can detect the quantity and the content of the impurity that contains in the described liquid by the output of described unit.
32, according to the semiconductor-fabricating device of claim 30, it is characterized in that: described liquid supply unit comprises
An adding device that is used for adding additive to described liquid;
A mixed cell, this unit are used for fresh liquid, having removed the described liquid of impurity or be conditioned and the described liquid that contains described additive mixes.
33, according to the semiconductor-fabricating device of claim 30, it is characterized in that: described contaminant removal unit is provided with the filter that a described contaminant removal that is used for being included in described liquid falls.
34, according to the semiconductor-fabricating device of claim 30, also comprise: one the 3rd control part, this one is provided with a system that can control described amount of liquid by first monitor, and wherein first monitor is arranged between described unit and the described contaminant removal unit.
35, according to the semiconductor-fabricating device of claim 32, also comprise: one the 4th control part, this one is provided with one can be by being arranged on second monitor in the described mixed cell at least to adding the system that one of additive capacity in the described mixed cell and described fresh liquid scale of construction are controlled.
36, according to the figure manufacturing process of claim 1, it is characterized in that: the protective film that is made of substrate is immersed in the liquid in the graph exposure process fully.
37, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described substrate is immersed in the liquid in the exposure portion fully, wherein should exposure portion be provided with an exposure lens.
38, according to the semiconductor-fabricating device of claim 30, it is characterized in that: described substrate is immersed in the liquid in the exposure portion fully, wherein should exposure portion be provided with an exposure lens.
39, according to the figure manufacturing process of claim 1, it is characterized in that: in the graph exposure process, described liquid only is placed on the protective layer.
40, according to the semiconductor-fabricating device of claim 16, it is characterized in that: described liquid only is placed on the protective layer in exposure portion, and should exposure portion be provided with exposure lens.
41, according to the semiconductor-fabricating device of claim 30, it is characterized in that: described liquid only is placed on the protective layer in exposure portion, and should exposure portion be provided with exposure lens.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003346938 | 2003-10-06 | ||
| JP346938/2003 | 2003-10-06 | ||
| JP2004157011A JP2005136374A (en) | 2003-10-06 | 2004-05-27 | Semiconductor manufacturing apparatus and pattern formation method using the same |
| JP157011/2004 | 2004-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1606128A true CN1606128A (en) | 2005-04-13 |
| CN100355023C CN100355023C (en) | 2007-12-12 |
Family
ID=34315744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410080713XA Expired - Fee Related CN100355023C (en) | 2003-10-06 | 2004-10-08 | Semiconductor fabrication apparatus and pattern formation method using the same |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US20050074704A1 (en) |
| EP (1) | EP1522894A3 (en) |
| JP (1) | JP2005136374A (en) |
| CN (1) | CN100355023C (en) |
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| CN100477083C (en) * | 2004-10-13 | 2009-04-08 | 株式会社尼康 | Exposing device, exposing method, and assembly manufacturing method |
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| US7227615B2 (en) | 2003-12-26 | 2007-06-05 | Canon Kabushiki Kaisha | Exposure apparatus and method |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2005136374A (en) | 2005-05-26 |
| EP1522894A2 (en) | 2005-04-13 |
| US20050074704A1 (en) | 2005-04-07 |
| CN100355023C (en) | 2007-12-12 |
| US20070009841A1 (en) | 2007-01-11 |
| EP1522894A3 (en) | 2006-06-21 |
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