CN1517707A - Method of preparing capillary channel and its sampling method - Google Patents
Method of preparing capillary channel and its sampling method Download PDFInfo
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- CN1517707A CN1517707A CNA031015328A CN03101532A CN1517707A CN 1517707 A CN1517707 A CN 1517707A CN A031015328 A CNA031015328 A CN A031015328A CN 03101532 A CN03101532 A CN 03101532A CN 1517707 A CN1517707 A CN 1517707A
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- kapillary
- raceway groove
- sampling
- pdms
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Abstract
A technology for preparing the capillary channel and sampling it by use of novel polydimethyl siloxane (PDMS) and negative photoetching epoxy material (SU8) includes such steps as designing the capillary channel by software, preparing mask, coating SU8 on substrate, photoetching on SU8 to obtain open microchannel or microchannel model, using copy technique of PDMS to consitute flow way of capillary channel, and dripping the sample solution to one end of said channel until it is full of the sample solution. Its advantages are simple process, high repeatability and low cost.
Description
Technical field
The present invention relates to MEMS (micro electro mechanical system) (MEMS) technology and field of sensing technologies, particularly a kind of and PDMS and SU8 MEMS (micro electro mechanical system) (MEMS) process compatible prepare kapillary raceway groove and sampling method thereof.
Background technology
Can prepare biosensor array and sampling kapillary raceway groove thereof by MEMS (micro electro mechanical system) (MEMS) technology.Utilize capillarity, the sample that adds at kapillary one end can be covered with whole kapillary raceway groove fast, thereby the biosensor array in the kapillary raceway groove detects when realizing a plurality of parameter.Kapillary raceway groove or miniature stream are the preparation and one of the gordian technique of various biochemical sensor arrays, biochip and chip lab of taking a sample.
Utilizing MEMS (micro electro mechanical system) (MEMS) technology to prepare the kapillary raceway groove at present can be with silicon Si or silicon dioxide SiO
2Be matrix, adopt wet etching technique or dry etching technology to process open small raceway groove, adopt silocon-silicon linkage technology, constitute kapillary raceway groove or the stream that seals with silicon chip or glass.Because wet etching exists etching time long, obtain anisotropic etching difficulty etc., and there is apparatus expensive in dry etching, operating personnel is required problems such as height, has limited the development of biosensor array and biochip.Higher bonding temperature also is problem extremely to be solved in the processing of kapillary raceway groove in the Si-Si bonding in addition.
Summary of the invention
Purpose of the present invention just provides a kind of kapillary raceway groove preparation method commonly used of effectively fast and convenient, good reproducibility, this method can be widely used in the sampling of the solution example of biology sensor, biosensor array and biochip, do not need complicated process equipment, can under the common lab environment, realize the microstructure kapillary raceway groove of micron dimension.And with process compatibles such as MEMS (micro electro mechanical system) (MEMS) and integrated circuit (IC) manufacturing technology.
For achieving the above object, technical solution of the present invention provides a kind of method that is used to prepare kapillary raceway groove and sampling thereof, and this method may further comprise the steps: (1) layout design; (2) the high precision lithography process of miniature raceway groove or model; (3) water wettability on dimethyl silicone polymer (PDMS) surface is handled; (4) with PDMS and base substrate bonding; (5) dripping sample at the kapillary port takes a sample.
The described method that is used to prepare kapillary raceway groove and sampling thereof, its described base substrate can be glass, silicon dioxide SiO
2, silicon nitride Si
3N
4, material such as pottery, quartz.
The described method that is used to prepare kapillary raceway groove and sampling thereof, preparation of this kind kapillary raceway groove and sampling method thereof are applicable to the dimethyl silicone polymer (PDMS) of various kapillary raceway grooves or the preparation of novel epoxy negativity photoetching material (SU8) MEMS (micro electro mechanical system) (MEMS) technology.
The described method that is used to prepare kapillary raceway groove and sampling thereof, this kind sampling method is applicable to the application of sample of slightly soluble liquid samples such as various biology sensors, biochip.
Realize that technical method of the present invention can be summarized as follows: at first carry out the layout design of kapillary raceway groove, make mask plate with microelectric technique with software; With stand-by substrate spin coating SU8 photoresist, with it oven dry, with mask plate SU8 is carried out photoetching then, develop, prepare high-precision open capillaries raceway groove or PDMS kapillary raceway groove mould.After PDMS mould substrate processed, carry out the injection moulding of PDMS, oven dry is 50-90 minute under 60-80 ℃ of temperature, to the PDMS demoulding, PDMS is put into plasma chamber with the substrate that has sensor array carry out the plasma oxidation processing, effectively finish the cleaning of processing of PDMS surface hydrophilic and substrate fast, PDMS and substrate are taken out bonding, can finish the preparation of kapillary raceway groove.
Description of drawings
Fig. 1 is preparation method's flow diagram of PDMS kapillary raceway groove of the present invention; Wherein
Fig. 1 (a) is a Mold Making technology vertical view;
Fig. 1 (b) is a PDMS kapillary raceway groove manufacture craft cut-open view;
Fig. 2 is preparation method's flow diagram of SU8 kapillary raceway groove of the present invention; Wherein
The open SU8 raceway groove of Fig. 2 (a) technology vertical view;
Fig. 2 (b) PDMS thin-film package SU8 raceway groove technology cut-open view;
Fig. 3 is the whole blood biochemistry multiparameter on-line quick detection systematic sampling method synoptic diagram of the embodiment of the invention;
Fig. 4 is an A-A ' sectional view in the kapillary raceway groove; Wherein
Fig. 4 (a) is a PDMS kapillary raceway groove cut-open view;
Fig. 4 (b) is a SU8 kapillary raceway groove cut-open view.
Embodiment
Describe implementation of the present invention in detail in conjunction with example with reference to the accompanying drawings below:
Embodiment 1
Fig. 1 represents the preparation flow block scheme of the PDMS kapillary raceway groove of the embodiment of the invention; Fig. 1 (a) Mold Making technology vertical view wherein, Fig. 1 (b) PDMS kapillary raceway groove manufacture craft cut-open view.This process flow diagram is used to explain implementation of the present invention, but not is confined to descriptive system/device structure and parameter.Its preparation method is as follows: (1) designs the kapillary raceway groove with L-edit, makes the mask plate 1 of SU8 mould; (2) the glass surface spin coating SU8 photoresist 2 of cleaning; (3) carry out photoetching with 1 couple of SU8 of mould, that makes PDMS duplicates mould substrate 3; (4) mould 3 is carried out hydrophobic treatments; (5) PDMS injection moulding 4,4 on the mould 3 after the process hydrophobic treatments was dried 1 hour under 75 ℃ of temperature, to the PDMS demoulding, prepared open kapillary raceway groove 6; (6) PDMS4 and the substrate 5 that has a sensor array are sent into plasma chamber and vacuumize, under certain pressure and radio-frequency power, the oxygen or the oxygen/nitrogen that feed form rf (discharge) plasma in plasma chamber, short time (about 1 minute) is exposed the quick cleaning of effectively finishing processing of PDMS surface hydrophilic and substrate to the open air therein with sample.(7) PDMS 4 surface and substrate 5 bondings are prepared the required sensor array that has the kapillary raceway groove.
Base substrate can be glass, silicon dioxide SiO
2, silicon nitride Si
3N
4, material such as pottery, quartz.
Fig. 2 represents the preparation flow block scheme of the SU8 kapillary raceway groove of the embodiment of the invention, and wherein Fig. 2 (a) is open SU8 kapillary raceway groove manufacture craft vertical view, and Fig. 2 (b) is a PDMS thin-film package SU8 kapillary raceway groove manufacture craft cut-open view.This process flow diagram is used to explain implementation of the present invention, but not is confined to descriptive system/device structure and parameter.Its preparation method is as follows: (1) designs the kapillary raceway groove with L-edit, makes the mask plate 7 of SU8; (2) at substrate 8 surperficial spin coating SU8 photoresists 9; (3) carry out photoetching with 7 couples of SU8 of mould, can on substrate 8, prepare open kapillary raceway groove 6; (4) substrate 8 and PDMS film 10 are put into plasma chamber and vacuumize, under certain pressure and radio-frequency power, the oxygen or the oxygen/nitrogen that feed form rf (discharge) plasma in plasma chamber, short time (about 1 minute) is exposed the quick cleaning of effectively finishing processing of PDMS surface hydrophilic and substrate to the open air therein with sample; (5) since PDMS have elasticity, PDMS film 10 can with the glass bonding of substrate 8 marginal surfaces, prepare the required biosensor array that has the kapillary raceway groove.
According to the present invention, Fig. 3 is the sampling method synoptic diagram of biochemical multiparameter sensor array chip, with the port of sample solution 11 droppings at the kapillary raceway groove 6 of the biochemical multiparameter sensor array chip for preparing according to Fig. 1 or step shown in Figure 2, sample solution can be covered with whole kapillary raceway groove fast, wherein 12 is sensor electrode arrays, the 13rd, and sensor reaction chamber.Fig. 4 is the cut-open view of A-A ' section among Fig. 3, and wherein Fig. 4 (a) is a PDMS manufacture craft kapillary raceway groove A-A ' cut-open view, and Fig. 4 (b) is a SU8 manufacture craft kapillary raceway groove A-A ' cut-open view.
Claims (5)
1, a kind of method that is used to prepare kapillary raceway groove and sampling thereof is characterized in that, this method may further comprise the steps:
2, (1) layout design;
(2) the high precision lithography process of miniature raceway groove or model;
(3) water wettability on PDMS surface is handled;
(4) with PDMS and base substrate bonding;
(5) dripping sample at the kapillary port takes a sample.
3, the method that is used to prepare kapillary raceway groove and sampling thereof as claimed in claim 1 is characterized in that, described base substrate can be glass, silicon dioxide SiO
2, silicon nitride Si
3N
4, material such as pottery, quartz.
4, the method that is used to prepare kapillary raceway groove and sampling thereof as claimed in claim 1 is characterized in that, preparation of this kind kapillary raceway groove and sampling method thereof are applicable to the PDMS of various kapillary raceway grooves or the preparation of SU8 MEMS (micro electro mechanical system) technology.
5, the method that is used to prepare kapillary raceway groove and sampling thereof as claimed in claim 1 or 2 is characterized in that, this kind sampling method is applicable to the application of sample of slightly soluble liquid samples such as various biology sensors, biochip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA031015328A CN1517707A (en) | 2003-01-16 | 2003-01-16 | Method of preparing capillary channel and its sampling method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA031015328A CN1517707A (en) | 2003-01-16 | 2003-01-16 | Method of preparing capillary channel and its sampling method |
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| Publication Number | Publication Date |
|---|---|
| CN1517707A true CN1517707A (en) | 2004-08-04 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA031015328A Pending CN1517707A (en) | 2003-01-16 | 2003-01-16 | Method of preparing capillary channel and its sampling method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102016570A (en) * | 2007-10-01 | 2011-04-13 | 南加利福尼亚大学 | Methods of using and constructing nanosensor platforms |
| CN1648663B (en) * | 2005-02-06 | 2011-04-20 | 中国科学院上海微系统与信息技术研究所 | Glass microflow control chip and producing method |
| CN102555384A (en) * | 2011-12-09 | 2012-07-11 | 嘉善德智医疗器械科技有限公司 | Diversion film for quickly detecting test paper as well as preparation method and use method thereof |
| CN105016632A (en) * | 2015-06-12 | 2015-11-04 | 哈尔滨工业大学深圳研究生院 | Method of cryogenic surface activation direct bonding for preparation of quartz glass capillary tube |
-
2003
- 2003-01-16 CN CNA031015328A patent/CN1517707A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1648663B (en) * | 2005-02-06 | 2011-04-20 | 中国科学院上海微系统与信息技术研究所 | Glass microflow control chip and producing method |
| CN102016570A (en) * | 2007-10-01 | 2011-04-13 | 南加利福尼亚大学 | Methods of using and constructing nanosensor platforms |
| CN102555384A (en) * | 2011-12-09 | 2012-07-11 | 嘉善德智医疗器械科技有限公司 | Diversion film for quickly detecting test paper as well as preparation method and use method thereof |
| CN105016632A (en) * | 2015-06-12 | 2015-11-04 | 哈尔滨工业大学深圳研究生院 | Method of cryogenic surface activation direct bonding for preparation of quartz glass capillary tube |
| CN105016632B (en) * | 2015-06-12 | 2018-10-26 | 哈尔滨工业大学深圳研究生院 | A kind of method that low-temperature surface activation Direct Bonding prepares quartz glass capillary |
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