CN1464969A - Coordinate detector - Google Patents
Coordinate detector Download PDFInfo
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- CN1464969A CN1464969A CN02802275A CN02802275A CN1464969A CN 1464969 A CN1464969 A CN 1464969A CN 02802275 A CN02802275 A CN 02802275A CN 02802275 A CN02802275 A CN 02802275A CN 1464969 A CN1464969 A CN 1464969A
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- luminophor
- emitting component
- emitting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
Abstract
The invention provides a coordinate detector, comprising a light emitting body (70) having a plurality of, for example, four coordinate display panels (72) with a plurality of light emitting elements (71) arranged in a row at equal intervals connected in series to each other in the same direction as the arranged direction of the plurality of light emitting elements (71), wherein the light emitting body (70) is moved over a glass substrate (3). Thereby, can detect: surface defect of semiconducting glass such as glass substrate used in flat panel display (FPD) such as LCD or organic EL diaplay etc.
Description
Technical field
The present invention relates to a kind ofly when the surface defects detection of the glass substrate that is used for LCD, use, detect the grade coordinate detecting device of coordinate of privileged site of defective part on the glass substrate face.
Background technology
The substrate detection apparatus of the glass substrate that uses in the known LCD.This substrate detection apparatus, illumination light is shone on the glass baseplate surface, observe this catoptrical optical change, and detect adhering to of the scar of glass baseplate surface and dirt, dust etc. defect part macroscopic observation and amplify by the detected defect part of this macroscopic observation to carry out microscopic observation.
On this substrate detection apparatus,, adopted coordinate detecting device in order to detect the coordinate of the privileged site that defective part grades by macroscopic observation.
Figure 15 is a structural drawing of opening the coordinate detecting device of record among the 2002-82067 (unexposed in application fashion of the present invention) the spy.Holder 2 is set on retaining member 1.On this holder 2, keep the glass substrate 3 that uses in the LCD.Guide rail 4,5 is set respectively on the both sides of this holder 2.The moving part 6,7 that respectively leads is set respectively on these guide rails 4,5 movably.
In addition, on each vertical plane 8 of the both sides of holder 2, each belt pulley 9,10 and 11,12 is set.Between one group of belt pulley 9,10, belt 13 is set, simultaneously, between another group belt pulley 11,12, belt 14 is set.The turning axle 16 of motor 15 is connected on the belt pulley 9.Couple together by coupling shaft 17 between opposed each belt pulley 10 and 12 mutually.
Each moving part 6,7 that leads is fixed with respect to each belt 13,14.On these guiding moving parts 6,7, via each pillar 18,19 scale projection plate 20 is set respectively.
On the edge of the X-direction of holder 2, guide rail 21 is set.Guiding moving part 22 is set on this guide rail 21 movably.In addition, each belt pulley 23,24 is set on the edge of same holder 2.Between these belt pulleys 23,24, be provided with belt 25.The turning axle of motor 26 is connected on the belt pulley 24.
Guiding moving part 22 is fixed with respect to belt 25.On this guiding moving part 22, be provided with reflective mirror 27.LASER Light Source 28 is set on the bight of holder 2.The laser 29 that sends from this LASER Light Source 28 is reflected by reflective mirror 27, shines on the scale projection plate 20.
Adopt this structure, when rotation drive motor 15, this rotation drives via belt 13 and passes to guiding moving part 6, meanwhile, also passes to another guiding moving part 7 via belt 13, coupling shaft 17, belt 14.Therefore, two guiding moving parts 6,7 move to Y direction simultaneously, and scale projection plate 20 is located in the top of the defect part of glass substrate 3.
On the other hand, the laser 29 that sends from LASER Light Source 28 is reflected by reflective mirror 27, shines on the scale projection plate 20.When rotation drive motor 26, this rotation drives and passes to the guiding moving part 22 that is provided with reflective mirror 27 via belt 25, thereby reflective mirror 27 moves to X-direction.Therefore, scan along scale projection plate 20 by reflective mirror 27 laser light reflected 29.And the irradiation position of laser 29 is positioned in the defect part top of glass substrate 3.
As a result, the coordinate Q (X, Y) that detects the defect part of glass substrate 3 to the amount of movement and the amount of movement of laser 29 on scale projection plate 20 of Y direction by scale projection plate 20.
Therefore, in the structure of said apparatus, the drive system that is necessary to be provided for LASER Light Source 28 and reflective mirror 27 are moved to X-direction, be guide rail 21, guiding moving part 22, each belt pulley 23,24, belt 25 and motor 26, it is essential that it is provided with the space.And then, for LASER Light Source 28 and drive system are set, cost is increased.
In addition, be used for laser 29 is shone the adjusting of the optical system on the scale projection plate 20, for example the adjusting of the shooting angle (optical axis) of the adjusting that angle and its height and position are set of reflective mirror 27, laser 29 and the aperture adjusting of laser 29 etc. are necessary.
The purpose of this invention is to provide a kind of coordinate detecting device of saving the space and needn't carrying out the adjusting of optical system.
Summary of the invention
According to main points of view of the present invention, a kind of coordinate detecting device is provided, this device has: linearlyly regularly dispose the luminophor of a plurality of light-emitting components and make the luminous light-emitting actuating device of specific light-emitting component on this luminophor.
According to main points of view of the present invention, a kind of coordinate detecting device is provided, and this device has: the linearly regularly luminophor that disposes a plurality of light-emitting components, make the luminous light-emitting actuating device of specific light-emitting component on this luminophor and make luminophor along travel mechanism that the direction with the configuration direction quadrature of light-emitting component moves.
The simple declaration of accompanying drawing
Fig. 1 is the stereographic map of employing as the substrate detection apparatus of the coordinate detecting device of a form of implementation of the present invention.
Fig. 2 is the side view of substrate detection apparatus.
Fig. 3 is the structural drawing as the coordinate detecting device of a form of implementation of the present invention.
Fig. 4 is the structural drawing of coordinate display board.
Fig. 5 is the diagram that is used to illustrate the location recognition effect under the situation that a plurality of coordinate display boards are connected in series.
Fig. 6 is the side view of the installed surface of denotation coordination display board.
Fig. 7 A is the side view of another installed surface of denotation coordination display board.
Fig. 7 B is the side view of another installed surface of denotation coordination display board.
Fig. 8 is the structural drawing of the control-driven system of expression luminophor.
Fig. 9 is the diagram that the border of the light emitting region of the light-emitting component in the expression luminophor is set.
Figure 10 is the diagram of keeping out of the way in the groove of keeping out of the way of expression luminophor.
Figure 11 is the diagram of the effect of lighting a lamp of expression columns of light elements.
Figure 12 is the diagram of two row configurations of expression columns of light elements.
Figure 13 is the diagram of another example of the lighting control method thereof of expression columns of light elements.
Figure 14 is the diagram of variation of the glow color of expression light-emitting component.
Figure 15 is the structural drawing of coordinate detecting device.
The optimised form that carries out an invention
Below, with reference to accompanying drawing a form of implementation of the present invention is described.In addition, the part identical with Figure 15 adopts identical symbol, and omits detailed description thereof.
Fig. 1 and Fig. 2 are the one-piece construction figure that adopts the substrate detection apparatus of coordinate detecting device of the present invention, and Fig. 1 is a skeleton view, and Fig. 2 is a side view.The holder 2 that keeps glass substrate 3 is set on apparatus main body 40.This holder 2, as shown in Figure 2, its base end part by back shaft 41 can rotate freely with respect to apparatus main body 40 ground supported.Belt pulley 42 is set around back shaft 41.
On apparatus main body 40, is furnished with motor 43.Be provided with the belt 45 of annular between the turning axle 44 of this motor 43 and the belt pulley 42.The rotary driving force of this motor 43 passes to belt pulley 42 from turning axle 44 via belt 45.Keeper 2 serves as that axle is inclined upward to for example by the predetermined angular θ shown in the double dot dash line from horizontality with back shaft 41.
Holder 2 forms shaped as frames, mounting and keep large-scale glass substrate 3 on its periphery.Center on vacant quadrangularly shape of the periphery of this holder 2.The area of this vacant portion forms more smallerly than the area of glass substrate 3.
On holder 2, a plurality of substrate orientation member (reference pins) 46a and pressing member (pressing pad) 46b are set on X-direction and Y direction along periphery.These reference pins 46a and to press pad 46b outstanding slightly from the surface of holder 2.Reference pins 46a is positioned glass substrate 3 on the reference position on the holder 2.Push glass substrate 3 by pad 46b towards reference pins 46a.Thereby glass substrate 3 contacts with the sidepiece of each reference pins 46a by its both sides and is positioned on the holder 2.
In addition, on the edge part of holder 2, not shown a plurality of holes (absorption layer) are set along whole periphery.Utilize the sucking action absorption glass substrate 3 of a plurality of absorption layers, keep it can not come off from holder 2.
On apparatus main body 1, along the both sides of the edge of holder 2 towards Y direction configured in parallel pair of guide rails 47,48.On guide rail 47,48, the observation assembly support portion 49 that disposes a type in the mode of crossing over holder 2.This observation assembly support portion 49 just can move to along guide rail 47,48 towards Y direction glass substrate 3 the top, be the top of holder 2.
Observe on the assembly support portion 49 at this, it is supported movably to observe assembly 50 guide rail not shown in the X-direction upper edge.And then, observing on the assembly support portion 49, the opposed radioparent lighting source 51 of portable cord with the object lens 56 of observing assembly 50 is set.
The inner panel 52 upper edge X-directions of the support portion 49 of this incident line lighting source 51 below the holder 2 by keeping horizontality are configured.This radioparent lighting source 51 carries out the transillumination of wire from the below of glass substrate 3, can move along Y direction with observing assembly support portion 49.
Observing assembly 50 has: macroscopic observation is with the macroscopical lighting source 53 of part and be furnished with the microscopic observation assembly 55 of object lens 54 of the multiple extremely low (for example about 0.5～2 times) of the illumination of can projection given defect position scale using.
Above apparatus main body 1, comprehensive macroscopical lighting source (not shown) of whole of the glass substrate 3 on the irradiation holder 2 is set.
Fig. 3 is mounted in the structural drawing of the coordinate detecting device on the aforesaid substrate testing fixture.Be provided with luminophor 70 on each pillar 18,19 of the moving part 6,7 that respectively leads in the upper and lower sides of holder 2.This luminophor 70, polyphone connects a plurality of, four luminophor assemblies 72 (being designated hereinafter simply as the coordinate representation plate) for example on the direction identical with the orientation of as shown in Figure 4 a plurality of light-emitting components 71, and described luminophor assembly is with a plurality of light-emitting components 71, for example formation is uniformly-spaced installed on 71 one-tenths one row ground of 128 light-emitting components.The number that is arranged on the light-emitting component 71 in the luminophor assembly 72 is not limited to 128, can be arbitrary number, makes the luminophor assembly 72 of various sizes according to its number.
A plurality of luminophor assemblies 71 adopt for example light emitting diode (LED).The glow color of these light emitting diodes is preferably color with respect to macroscopical illumination light (for example green, the orange) redness of identification easily, but so long as the color that can differentiate with the macroscopic view illumination adopts other color also passable.In addition, the glow color of light emitting diode adopts redness and cyan as the example of multiple color, and the light emitting diode of these glow colors can alternate configurations, can dispose other color by certain interval (for example 10mm).
On this coordinate display board 72, install and be used for driving circuit 73 that at least one light-emitting component 71 of a plurality of light-emitting components 71 is lighted.This driving circuit 73 is lighted any one light-emitting component 71 according to the control signal of lighting a lamp (pulse signal) of input by the described control basal plate 84 in back, moves to X-direction simultaneously with the input of pulse signal and controls the position that lights a lamp.For example, driving circuit 73, when lighting a lamp during control signal of 1 pulse of input, left end from a plurality of light-emitting components 71 shown in Figure 4 is lighted the 1st light-emitting component 71, when lighting a lamp during control signal of 2 pulses of input, light from the 2nd light-emitting component 71 of left end,, light from the 3rd light-emitting component 71 of left end when lighting a lamp during control signal of 3 pulses of input.
In addition, driving circuit 73, under the situation that a plurality of coordinate display board 72 polyphones are connected, identification is assigned to the positional information of the light-emitting component 71 in this coordinate display board 72, has the function that the light-emitting component 71 of permission corresponding configuration position is lighted during control signal of lighting a lamp that meets the umber of pulse of this positional information when input.
Specifically, as shown in Figure 5, a plurality of coordinate display board 72 polyphones connect.The number of each light-emitting component 71 in each coordinate display board 72 for example is 128.At this, the leftmost side coordinate display board 72 among Fig. 5 is the 1st coordinate display board 72, and then, the order that connects by polyphone is the 2nd, the 3rd, a n coordinate display board 72.The 1st coordinate display board 72 when lighting a lamp during control signal of 1～128 pulse of input, is confirmed as and is lighted the light-emitting component 71 that is configured in from one's body, will light corresponding to the light-emitting component 71 of the allocation position of this umber of pulse.
Thereby, the driving circuit 73 of the first coordinate display board 72 is discerned 1～128 pulse as ID number, when lighting a lamp during control signal that this ID of input feels the pulse and dashes, the light-emitting component 71 of corresponding configuration position is lighted in permission, when lighting a lamp during control signal of input umber of pulse in addition, do not allow light-emitting component 71 is lighted.
Equally, the 2nd coordinate display board 72 when lighting a lamp during control signal of input 129～256 pulses, is confirmed as and is lighted the light-emitting component 71 that is configured in from one's body, lights corresponding to the light-emitting component on the allocation position of this umber of pulse 71.
Thereby, the driving circuit 73 of the 2nd coordinate display board 72,129～256 pulses are discerned as ID number, when lighting a lamp during control signal that this ID of input feels the pulse and dashes, the light-emitting component 71 of corresponding configuration position is lighted in permission, when lighting a lamp during control signal of input umber of pulse in addition, do not allow light-emitting component 71 is lighted.
Below, similarly, the driving circuit 73 of n coordinate display board 72 is discerned 128 * n pulse as ID number, when lighting a lamp during control signal that this ID of input feels the pulse and dashes, the light-emitting component 71 of corresponding configuration position is lighted in permission, when lighting a lamp during control signal of input umber of pulse in addition, do not allow light-emitting component 71 is lighted.
The light a lamp control and have the function (detection method of lighting a lamp) that light-emitting component 71 is lit a lamp and detected of 73 pairs of each light-emitting components 71 of each driving circuit of the 1st～the n coordinate display board 72.
The detection method of lighting a lamp is, the energising of for example carrying out each light-emitting component 71 detects, and automatically carries out the detection of lighting a lamp to each light-emitting component 71 by having, does not have to switch on.
In addition, the detection method of lighting a lamp also adopts can be for example lights the light-emitting component 71 of even number or odd number from the light-emitting component 71 of the left end of luminophor 70 or right-hand member, by the visual detection of lighting a lamp.The method that detects of lighting a lamp for example can also adopt lights a lamp (scanning of lighting a lamp) from the left end of luminophor 70 or light-emitting component 71 orders of right-hand member, and then, whole light-emitting components 71 are lighted simultaneously, by the visual detection etc. of lighting a lamp.
In addition, each driving circuit 73 has following function, promptly, there is the light-emitting component of not lighting in the result who detects if light a lamp automatically, then expression is had by control basal plate 84 ID number of coordinate display board 72 of this light-emitting component 71 and corresponding coordinate display board 72 in the error message e of position (for example from which number of left end) of light-emitting component 71 send to higher level's personal computer 80.
The contiguous block number of coordinate display board 72 can change according to the size of glass substrate 3 or holder 2.
Coordinate display board 72, as shown in Figure 6, its installed surface 72a that disposes a plurality of light-emitting components 71 is provided with the cap K of triangular prism with respect to the surperficial established practice constant inclination rake angle of glass substrate 3, about 45 ° mode for example.In addition, light-emitting component 71 shown in Fig. 7 A or Fig. 7 B, can be installed on the chamfered part that forms with the end face of 45 ° of cutting coordinate display boards 72 roughly or the bend with the end face of the crooked coordinate display board 72 of predetermined angular.This installed surface forms the pitch angle (for example about 45 °) of regulation with respect to the surface of glass substrate 3.
Coordinate display board 72 is under the illumination of macroscopic view when macroscopic observation, with indirect illumination light and do not hinder the mode of the extraction of defect part to be installed in antireflection to cover.This antireflection lid forms triangular prism shaped, has improved physical strength, can be not crooked owing to own wt.
Fig. 8 is the structural drawing of the control-driven system of expression luminophor 70.On higher level's personal computer 80, be connected with drive-pulse generator 81.On this drive-pulse generator 81, connect by operating portions such as lever 83 via operating portion controller 82.This operating portion 83 is not limited to lever, if can indicate glass substrate 3 lip-deep light-emitting components 71 to light coordinate (X, Y) just passable, for example can be 2 dimension coordinate assigned switch such as tracking ball, cross key.
In addition, in operating portion 83, is furnished with foot-switch 86, as the stop position of the X-direction that is used for writing down glass substrate 3 lip-deep luminophors 70 and the luminophor 70 record switch of the position that lights a lamp of the Y direction of a light-emitting component 71 for example.As the record switch, also can pushbutton switch be set in the upper end of the control lever of lever.
Drive-pulse generator 81 has following function: receive X-direction driving pulse output indication and Y direction driving pulse output indication from operation control 82 outputs, utilize the driving pulse output indication of X-direction to send the X-direction driving pulse, utilize the driving pulse output of Y direction to indicate the driving pulse that sends Y direction to control basal plate 84 to motor driver 85.
Control basal plate 84 has following function: receive from drive-pulse generator 81 and the driving pulse of the Y direction of coming, to this pulse frequency division, this fractional frequency signal is sent to the driving circuit 73 of coordinate display board 72 with the frequency dividing ratio of regulation as the control signal of lighting a lamp.
Higher level's personal computer 80 has the various functions of coordinate detecting device 87, border setting device 88, initial point variset 89.Coordinate detecting device 87, when the foot-switch 86 of operative configuration in operating portion 83 when importing this switching signal, export the coordinate (X, Y) that index gauge is calculated lighting elements 71 by the driving pulse output indication of the directions X of at this moment operating portion controller 82 and the driving pulse of Y direction.
Thereby border setting device 88 stops the scope Y direction driving pulse output in addition of border Re with respect to the Y direction driving pulse that drive-pulse generator 81 only sends in the Re scope of border to control basal plate 84.This border Re can set according to for example size (width l) of glass substrate 3 such as 4 chamferings or 6 chamferings with changing.
Higher level's personal computer 80 has following function: make luminophor 70 when X-direction moves when the rotation by motor 15 drives, because the movable sensor 30 or 31 of luminophor 70 detects luminophor 70, and when this sensor output signal of input, stop the output of X-direction driving pulse with respect to drive-pulse generator 81, stop to move of luminophor 70.
As shown in Figure 3, on the retaining member 1 at the edge of holder 2, form and keep out of the way groove 90.This keeps out of the way groove 90, is that the bottom surface is formed by the edge surface of holder 2 and the edge surface of supporting member 91 with retaining member 1.This keeps out of the way groove 90, and when adopting microscopic observation assembly 55 to carry out the microscopic observation of glass substrate 3, shown in the synoptic diagram of Figure 10, luminophor 70 is kept out of the way in the groove 90.
Below, the effect of the device that constitutes according to said structure is described.
Under the situation of carrying out macroscopic observation, by tester's rotation drive motor 43.The driving of this motor 43 passes to the back shaft 41 of belt pulley 42 via turning axle 44 and belt 45.Holder 2 is the angle θ of centroclinal regulation with back shaft 41, and θ is preferably 0～45 °, and is static then.
Then, whole of the glass substrate on the holder 23 or a part are carried out the macroscopic view illumination, carry out macro check by the examiner.In this macro check, the angle of the regulation that not only holder 2 can be tilted also can make the sense of rotation of motor 43 periodically change, so that holder 2 is swung in the angle of specialized range.
When on glass substrate 3 surfaces, detecting defect part by macroscopic observation, operate 2 dimension coordinate assigned switch, the end of luminophor 71 is moved to the top of this defect part, simultaneously, light-emitting component 71 is lighted, is moved, and overlaps with defective locations.Promptly, during by the operating portion 83 of examiner's operating operation handle etc., operating portion 83 moves luminophor 70 according to direction of operating and its operational ton of lever etc. in the surperficial upper edge of glass substrate 3 X-direction, simultaneously, output is illustrated on the luminophor 70 electric signal of the 2 dimension coordinate information that the light-emitting component 71 lighted moves along Y direction.
Drive-pulse generator 81, reception is from the driving pulse output indication of the X-direction of operating portion controller 82 outputs and the driving pulse output indication of Y direction, utilize the driving pulse output indication of X-direction that the X-direction driving pulse is sent to motor driver 85, utilize the driving pulse output indication of Y direction that the Y direction driving pulse is sent to control basal plate 84.
The rotation of this motor 15 drives, and passes to belt 13 from turning axle 16 via belt pulley 9.This belt 13 moves between each belt pulley 8,9.By moving of this belt 13, guiding moving part 6 moves to X-direction along guide rail 4.
Meanwhile, the rotation of motor 15 drives from turning axle 16 via belt pulley 9, belt 13, belt pulley 10, further pass to belt 14 from coupling shaft 17 via belt pulley 12.Whereby, belt 14 moves between each belt pulley 11,12, and by like this, guiding moving part 7 moves along X-direction along guide rail 5 and guiding moving part 6 simultaneously.
By these guiding moving parts 6,7 to the moving of X-direction, luminophor 70 moves to the top of glass substrate 3 along X-direction.And luminophor 70 by by the adjusted of examiner to operating portion 83, is moved the top of the defect part that is configured to glass substrate 3 surfaces.
On the other hand, control basal plate 84 receives from drive-pulse generator 81 and the driving pulse of the Y direction of coming, with the regulation frequency dividing ratio with this pulse frequency division, this fractional frequency signal is sent in the driving circuit 73 of the coordinate display board 72 that is arranged on the leftmost side in the luminophor 70 as the control signal of lighting a lamp.Utilize this luminophor 70, as shown in Figure 5, under the situation that a plurality of coordinate display board 72 tandems connect, when the coordinate display board 72 of the leftmost side as the 1st coordinate display board 72, then be the 2nd, the 3rd, during n coordinate display board 72, the driving circuit 73 of the 1st coordinate display board 72 is discerned 1～128 pulse as ID number, when control signal is lit a lamp in the pulse of importing this ID number, can light the light-emitting component 71 of corresponding configuration position.
Meanwhile, the driving circuit 73 of the 2nd coordinate display board 72,129～256 pulses are discerned as ID number, when lighting a lamp during control signal that this ID of input feels the pulse and dashes, can light the light-emitting component 71 of corresponding configuration position, below, similarly, the driving circuit 73 of n coordinate display board 72 is discerned 128 * n pulse as ID number, when control signal is lit a lamp in the pulse of importing this ID number, can light the light-emitting component 71 of corresponding configuration position.
By operating portion 83 being operated by the examiner, from control basal plate 84 with for example 1,2,3 ..., the mode of n pulse is exported the control signal of lighting a lamp that umber of pulse increases in proper order.
The driving circuit 73 of the 1st coordinate display board 72, import the control signal of lighting a lamp of 1～128 pulse along with order, for example as shown in figure 11, at first, secondly the light-emitting component 71-1 of the leftmost side from be configured in the 1st coordinate display board 72 begins to light a lamp, and, light-emitting component 71-1 extinguished and lights the adjacent light-emitting component 71-2 in its right side, then, extinguish light-emitting component 71-2 and light the adjacent light-emitting component 71-3 in its right side.And when from the lighting a lamp during control signal of control basal plate 84 output 129 pulses, the driving circuit 73 of the 1st coordinate display board 72 is judged as not in ID number of the 1st coordinate display board 72, does not allow lighting elements 71-1～71-128.
The driving circuit 73 of the second coordinate display board 72, along with the control signal of lighting a lamp of importing 129～256 pulses in proper order, the same with the 1st coordinate display board 72, at first, light-emitting component 71-129 from the leftmost side lights according to the order of each light-emitting component 71-130,71-131.When from control basal plate 84 output lighting a lamp during control signal of 150 pulses for example, stop to light a lamp in the position of the light-emitting component 71-1～71-150 of the 2nd coordinate display board 72.
In addition, if examiner's reverse operation operating portion 83, then move to the left from the right side of luminophor 70 position of lighting of each light-emitting component 71.
When the position that lights a lamp of the light-emitting component 7 on operating operation portion 83 and the luminophor 70 arrives the top of lip-deep defect part of glass substrate 3, the examiner is by stopping the operation to operating portion 83, can termination to light mobile light-emitting component in proper order mobile from the lighting a lamp of starting position to 150 light-emitting component 71-150 of lighting a lamp.
At this moment, each coordinate display board 72, as shown in Figure 6, because the face of each light-emitting component 71 forms the pitch angle, for example about 45 ° of regulation with respect to the surface of glass substrate 3, even so also can determine lighting of light-emitting component 71 clearly by the angle θ (=100～60 °) that glass substrate 3 tilts to stipulate because of holder 2 makes.
In addition, when operating foot-switch 86 by the examiner, higher level's personal computer 80 is from foot-switch 86 input switch signals, at this moment from the driving pulse output indication of operating portion controller 82 input X-directions and the driving pulse output indication of Y direction, export the coordinate Q (X, Y) that index gauges are calculated the defect part top of lighting elements 71, the line item of going forward side by side (storage) by these driving pulses.
The calculating of coordinate Q (X, Y) is carried out glass substrate 3 lip-deep each defect part.Each coordinate Q (X, Y) of these defect parts is stored in higher level's personal computer 80.
When macroscopic observation finished, by examiner's reverse operating motor 43, holder 2 turned back to original horizontality.
Then, by by the examiner to the operation that operating portion 83 carries out, luminophor 70 is moved to keeps out of the way in the groove 90.Utilize this operation, drive-pulse generator 81 is indicated the driving pulse that sends X-direction to motor driver 85 according to the driving pulse output of X-direction, thereby luminophor 70 moves to keeping out of the way groove 90 as shown in figure 10.
When luminophor 70 arrived the side nearby of the predetermined distance of keeping out of the way groove 90, each pillar 18,19 of support luminophor 70 contacted with not shown lug boss and stops, and is rotated simultaneously, and luminophor 70 is kept out of the way in the groove 90.
In addition,, can make holder 2 automatically return to horizontality, then, luminophor 70 is kept out of the way in the groove 90 automatically by in operating portion 83, specifying the micro pattern.
In microscopic observation, read coordinate Q (X, Y) by each defect part of macroscopic observation appointment by higher level's personal computer 80.Observe assembly support portion 49 and move each guide rail 47,48 along Y direction, meanwhile, observe assembly 50 and move to X-direction along above-mentioned not shown guide rail according to this coordinate Q (X, Y).Therefore, the observation axle of object lens 56 is configured on the coordinate Q (X, Y) in the microscopic observation assembly 55.
At this moment, because luminophor 70 is kept out of the way in the groove 90, can not collide luminophor 70 so observe assembly 50.
The examiner can utilize the microscope microscopic observation via the defect part on the glass substrate 3 of object lens 56 acquisitions by spying on the eyepiece of microscopic observation assembly 55.
In addition, 58 pairs of defect parts by glass substrate 3 surfaces of object lens 56 acquisitions of TV camera are photographed.This looks like to be presented on the TV Monitor 60.The examiner utilizes this monitoring picture to carry out microscopic observation.
As mentioned above, in above-mentioned form of implementation, tandem connects a plurality of on the direction identical with the orientation of a plurality of light-emitting components 71, for example four coordinate display boards 72 constitute luminophor 70, described coordinate display board 72 is with 71 one-tenth one uniformly-spaced configuration formations of row ground of a plurality of light-emitting components, described luminophor 70 is moved above glass substrate 3, thereby, compared with prior art, needn't be provided for drive system that LASER Light Source 28 and reflective mirror 27 are moved along X-direction, it is guide rail 21, guiding moving part 22, each belt pulley 23,24, belt 25 and motor 26 can be saved the space that is used to be provided with these LASER Light Source 28 and its drive system.And then, can reduce and be used to be provided with these LASER Light Source 28 and its driving is necessary cost.
In addition, if in the past,, be necessary optical system is adjusted, and the adjustment for optical system also is unnecessary among the present invention in order will correctly to shine on the scale projection plate 20 from the laser 29 that LASER Light Source 28 is sent.
Thereby, adopt device of the present invention, can obtain luminophor 70 simply, its adjustment is also very simple, and then, can reduce the number of motor, when can saving the space, can reduce cost.
The coordinate Q (X, Y) of the defect part on 3 of the glass substrates determines, can be by at operating portions 83 such as operating operation handles and make luminophor 70 when X-direction moves, the luminous position of light-emitting component 71 is moved along Y direction, press the such simple operations of record switch (foot-switch 86) and carry out.
Coordinate display board 72, because the face of each light-emitting component 71 forms the pitch angle, for example 45 ° of regulation with respect to the surface of glass substrate 3, so, even because the inclination of holder 2 makes glass substrate 3 tilt and swing with the angle θ (=30～45 °) of regulation, also can confirm lighting of light-emitting component 71, can make the defect part on the face of light a lamp position and glass substrate 3 consistent.
Because luminophor 70 is set on the direction of holder 2 upper and lower sides, so when microscopic observation, can not cause shade owing to luminophor 70 blocks the macroscopic view illumination, even and holder 2 tilts, each light-emitting component 71 can be confirmed the position of lighting of light-emitting component 71 clearly also always towards examiner's side.
And, since the glow color of light-emitting component 71 adopt can be on 3 of glass substrates with macroscopic view illumination phase region other, for example redness or cyan etc., so can identify the position that lights a lamp of light-emitting component 71 significantly.
And, the light emitting control of the light-emitting component 71 of coordinate display board 72 owing to be electronic ballast control, shown in mechanical hysteresis etc. can not be created in defect part and detect the time.
In addition, owing in luminophor, set the border Re of the light emitting region that is used to limit light-emitting component 71, so can set border Re corresponding to the size variable ground of glass substrate 3, can in the light emitting region of this border Re, move back and forth the luminous position of light-emitting component 71, scanning needn't be carried out, operating performance can be improved useless luminous position.
In moving range, also can utilize each sensor 30,31 to limit, needn't make luminophor 70 carry out useless moving along directions X with respect to the X-direction of luminophor 70.
In addition, when microscopic observation,,, luminophor 70 do not observe assembly 50 so can not colliding because luminophor 70 is kept out of the way in the groove 90.
Thereby the detection of lighting a lamp of light-emitting component 71 is carried out in control because 73 pairs of each light-emitting components 71 of each driving circuit of the 1st～the n coordinate display board 72 are lit a lamp, so in the 1st～the n coordinate display board 72, can detect bad light-emitting component 71.Automatically the result who lights a lamp and detect, owing to reported higher level's personal computer 80 as error message e, thus can utilize ID number of coordinate display board 72 with bad light-emitting component 71 and this coordinate display board 72 in the position of light-emitting component 71 to the management etc. of lighting a lamp of the 1st～the n coordinate display board 72.
Because what send from drive-pulse generator 81 is identical pulse signal for the X-direction driving pulse of motor driver 85 with Y direction driving pulse for control basal plate 84, so the Y direction driving pulse that also is used on the control basal plate 84 also can carry out motor driven.Thereby, only be replaced by the simple operations of control basal plate 84 and coordinate display board 72 by the motor driven that Y direction is in the past carried out, just can use the demonstration of coordinate display board 72 replacement Y directions.
In addition, the invention is not restricted to above-mentioned form of implementation, when implementing, can in the scope that does not break away from its purport, carry out various changes.
For example, in above-mentioned form of implementation, a plurality of light-emitting components 71 are configured to row, still, as shown in figure 12, a plurality of light-emitting components 71 are configured to two row and are that half of light-emitting component 71 disposed mutually with staggering the allocation position of each row light-emitting component 71.Utilize the allocation position of this light-emitting component 71 to improve 1/2nd resolution characteristic of defect part coordinate on 3 of 71 pairs of glass substrates of light-emitting component.
The lighting control method thereof of light-emitting component 71, also by to the lighting a lamp an of light-emitting component 71, adjacent lighting a lamp of two light-emitting components 71 made up mutually as shown in figure 13, can determine the coordinate of the defect part on 3 of the glass substrates with 1/2nd resolution characteristiies of light-emitting component 71.
The glow color of light-emitting component 71 also can with red and blue light emitting diode alternate configurations, easily be distinguished the luminous position of light-emitting component 17 as shown in figure 14.In addition, also can be in a plurality of luminous element disposed 71 for example with the regulation number, for example per 10 be set to red light-emitting component 71.Whereby, can go out the luminous position of light-emitting component 71 by visual identity.
In addition, be not limited to adopt a plurality of light-emitting components 71, also the liquid crystal announcer can be formed shaft-like the use, the configuration of light-emitting component 71 can be disposed along X-direction, also can dispose along Y direction.
Industrial utilizability
The present invention can be to flat-panel monitors such as liquid crystal display or OLED display When the blemish that the semiconducting glass substrates such as glass substrate that use (FPD) carry out checks Use.
Claims
(according to the modification of the 19th of treaty)
1, (after revising) a kind of coordinate detecting device is characterized in that having:
The holder that keeps object to be detected;
Near the aforementioned detected material surface that is maintained on the aforementioned holder, and the luminophor of a plurality of light-emitting components of linearly configuration;
Aforementioned a plurality of light-emitting components are lighted the driving circuit of lighting of driving along the configuration direction;
Aforementioned luminophor is disposed the drive division that moves on the direction of direction quadrature along the linearity with aforementioned a plurality of light-emitting components;
The aforementioned driving circuit of lighting is specified and to be lighted positional information, and aforementioned drive division is specified the coordinate assigned operation portion of mobile location information;
According to aforementioned positional information and the aforementioned mobile location information lighted that sends from aforementioned coordinate assigned operation portion, the aforementioned control part of lighting each drive signal of driving circuit and aforementioned drive division is controlled in output respectively;
The defective part of corresponding aforementioned detected material surface is obtained the coordinate detection unit of 2 dimension coordinates of aforementioned disadvantages portion from the mobile stop position information of lighting stop position information and aforementioned luminophor of aforementioned light-emitting component.
2, (after revising) coordinate detecting device as claimed in claim 1 is characterized in that:
Aforementioned coordinate assigned operation portion has: 2 dimension coordinate assigned switch, this 2 dimension coordinate assigned switch are for the aforementioned aforementioned positional information of lighting of lighting driving circuit, and export as 2 dimension coordinate information for the aforementioned mobile location information of aforementioned drive division;
Aforementioned control part is divided into the aforementioned drive signal of directions X and the aforementioned drive signal of Y direction to the aforementioned 2 dimension coordinate information from aforementioned 2 dimension coordinate assigned switch input, and outputs to aforementioned some lamp drive circuit and aforementioned drive division respectively.
3, (after revising) coordinate detecting device as claimed in claim 1 or 2 is characterized in that:
Outputing to aforementioned lighting control circuit respectively from aforementioned control part is identical pulse signal with aforementioned each drive signal on the aforementioned drive division.
4, (after revising) coordinate detecting device as claimed in claim 1 is characterized in that:
Aforementioned coordinate detection unit has the true origin variset that the true origin of aforementioned luminophor and the coordinate basis position that is maintained at the aforementioned object to be detected on the aforementioned holder are coincided.
5, (after revising) coordinate detecting device as claimed in claim 1 is characterized in that:
Have the record switch of record from 2 dimension coordinates of the aforementioned disadvantages portion that aforementioned coordinate detection unit is tried to achieve.
6, (after revising) coordinate detecting device as claimed in claim 1 is characterized in that:
Aforementioned luminophor is by the luminophor assembly with a plurality of given sizes, and this luminophor assembly is that a plurality of aforementioned light-emitting component by linearly configuration forms, and these luminophor assemblies are connected and composed.
7, (after revising) coordinate detecting device as claimed in claim 6 is characterized in that:
Aforementioned a plurality of luminophor assembly is equipped with a plurality of Drive and Control Circuit of lighting that control respectively is configured in the aforementioned a plurality of light-emitting components on each luminophor assembly;
Aforementioned a plurality of Drive and Control Circuit has respectively lighting of the aforementioned a plurality of light-emitting components in the aforementioned luminophor assembly is driven the function of permitting.
8, (after revising) coordinate detecting device as claimed in claim 7 is characterized in that:
Aforementioned a plurality of Drive and Control Circuit has following function:
The positional information of distributing to the aforementioned a plurality of light-emitting components in aforementioned each luminophor assembly is respectively discerned as ID number.
9, (after revising) coordinate detecting device as claimed in claim 8 is characterized in that:
Aforementioned a plurality of Drive and Control Circuit, has following function: automatically detect lighting of aforementioned each light-emitting component respectively, send error message information with the position of the aforementioned light-emitting component that has the corresponding aforementioned ID of aforementioned luminophor assembly number of the aforementioned light-emitting component of not lighting and do not light.
10, (after revising) claim 1 or 6 described coordinate detecting devices is characterized in that:
Aforementioned luminophor is that aforementioned a plurality of light-emitting components are become two row configurations, Yi Bian listing aforementioned each light-emitting component that disposes the another side row between aforementioned a plurality of light-emitting components of configuration respectively;
The resolution characteristic that the coordinate of comparing with the situation of aforementioned a plurality of light-emitting component one row configurations detects becomes 1/2nd.
11, (revising the back) as claim 1 or 6 described coordinate detecting devices, is characterized in that:
Aforementioned luminophor is that aforementioned a plurality of light-emitting component becomes a row configuration, and 2 aforementioned light-emitting components are lighted alternately in the configuration direction adjacent to one another, compares the resolution characteristic that coordinate detects with the situation that 1 aforementioned light-emitting component is lighted and becomes 1/2nd.
12, (after revising) coordinate detecting device as claimed in claim 1 is characterized in that:
Aforementioned luminophor is: in aforementioned a plurality of light-emitting components of a row configuration, allow the glow color difference of aforementioned light-emitting component of every predetermined distance configuration.
13, (after revising) coordinate detecting device as claimed in claim 1 is characterized in that:
Aforementioned holder has from the rotary driving part of horizontality with the angle of inclination rotation of regulation;
Macroscopical illumination light of aforementioned object to be detected being carried out visualization from top irradiation macro inspection apparatus with the defective part of checking aforementioned object to be detected;
Aforementioned luminophor is provided with the aforementioned object to be detected of clamping on aforementioned holder, the pair of guide rails that parallel laid can move thereon.
14, (after revising) coordinate detecting device as claimed in claim 13 is characterized in that:
On aforementioned holder, be provided with retaining member near aforementioned detected material dignity and one-tenth triangular column;
Aforementioned luminophor, the end of this luminophor be designed to along aforementioned retaining member vertically;
The photograph set direction of vertical and aforementioned macroscopical illumination light of aforementioned retaining member is consistent.
15, (deletion)
16, (deletion)
17, (deletion)
18, (deletion)
19, (deletion)
Claims (19)
1, a kind of coordinate detecting device is characterized in that, has: a plurality of light-emitting components of linearly regularly configuration and the luminophor that forms and make the specific luminous light-emitting actuating device of aforementioned light-emitting component on the aforementioned luminophor.
2, a kind of coordinate detecting device, it is characterized in that, have: a plurality of light-emitting components of linearly regularly configuration and the luminophor that forms, the luminous light-emitting actuating device and make aforementioned luminophor with making specific aforementioned light-emitting component on the aforementioned luminophor along travel mechanism that the direction with respect to the configuration direction quadrature of aforementioned light-emitting component moves.
3, a kind of coordinate detecting device, it is characterized in that, have: a plurality of light-emitting components of linearly regularly configuration and the luminophor that forms, make aforementioned luminophor along travel mechanism that the direction with respect to the configuration direction quadrature of aforementioned light-emitting component moves, the luminous position information of aforementioned light-emitting component is made the command generating device of instruction, according to the instruction of sending from aforementioned command generating device, send the emission control device of control signal, this control signal is indicated the luminous position of aforementioned light-emitting component specific on the aforementioned luminophor and is received the aforementioned control signal of sending from aforementioned emission control device, utilize aforementioned control signal aforementioned light-emitting component to be carried out the drive unit of light emitting drive corresponding to indicated luminous position.
4, a kind of coordinate detecting device, it is characterized in that, have: a plurality of light-emitting components of linearly regularly configuration and the luminophor that forms, make aforementioned luminophor along travel mechanism that the direction with respect to the configuration direction quadrature of aforementioned light-emitting component moves, the coordinate assigned operation device that the luminous position information that makes mobile message that aforementioned travel mechanism moves and aforementioned light-emitting component is made instruction, aforementioned mobile message in the instruction of sending according to aforementioned coordinate assigned operation device, send the mobile controller of the control signal that drives aforementioned travel mechanism, the aforementioned control signal that reception is sent from aforementioned mobile controller, drive the luminophor mobile drive deivce of aforementioned travel mechanism, according to the aforementioned location information in the instruction of aforementioned coordinate assigned operation device, send the emission control device of control signal, this control signal is indicated the luminous position of the specific aforementioned light-emitting component on the aforementioned luminophor, receives the aforementioned control signal of sending from aforementioned emission control device, make the luminous light-emitting actuating device of aforementioned light-emitting component corresponding to the luminous position of indicating by aforementioned control signal.
5, coordinate detecting device as claimed in claim 4 is characterized in that, the aforementioned control signal of sending from aforementioned mobile controller is identical pulse signal with the aforementioned control signal of sending from aforementioned emission control device.
As any one described coordinate detecting device in the claim 1 to 4, it is characterized in that 6, aforementioned luminophor has a plurality of aforementioned light-emitting component of linearly rule configuration, and by constituting by interconnective luminophor assembly.
7, coordinate detecting device as claimed in claim 6 is characterized in that, connects aforementioned luminophor assembly and linearly configuration.
8, coordinate detecting device as claimed in claim 6, it is characterized in that, have following function: aforementioned luminophor component recognition is configured in the positional information of the aforementioned light-emitting component in the corresponding luminophor assembly, when the control signal with corresponding luminous position is input in this positional information, can carry out the light emitting drive of aforementioned light-emitting component.
9, coordinate detecting device as claimed in claim 6 is characterized in that, has following function: aforementioned luminophor module sets ID number, when identifying corresponding ID, can carry out light emitting drive to the aforementioned light-emitting component that is configured in the corresponding luminophor assembly.
10, any one described coordinate detecting device in the claim 1 to 4, it is characterized in that, aforementioned luminophor has: will closely be configured to first columns of light elements of row between a plurality of light-emitting components mutually, and on corresponding to the position between aforementioned each light-emitting component of aforementioned first columns of light elements, dispose a plurality of light-emitting components respectively and between these light-emitting components, closely be configured to second columns of light elements that row form mutually, and aforementioned first columns of light elements and second columns of light elements are two row and are configured side by side.
11, coordinate detecting device as claimed in claim 4, it is characterized in that, have aforementioned mobile message and aforementioned luminous position information that the aforementioned coordinate assigned operation device of reception sends, calculate the coordinate detecting device of the coordinate of aforementioned light-emitting component luminous in aforementioned luminophor.
12, as any one described coordinate detecting device in the claim 1 to 4, it is characterized in that having the border setting device, this border setting device is set the border of the light emitting region of a plurality of aforementioned light-emitting components that limit the shape configuration that is in line in the aforementioned luminophor.
13, as any one described coordinate detecting device in the claim 1 to 4, it is characterized in that having the initial point variset of setting origin position when the aforementioned light-emitting component of designated coordinate in a plurality of aforementioned light-emitting components in the aforementioned luminophor is luminous, changeably.
As any one described coordinate detecting device in the claim 1 to 4, it is characterized in that 14, the installed surface of a plurality of aforementioned light-emitting components of configuration of aforementioned luminophor forms the angle of inclination of regulation with respect to coordinate detected object face.
As any one described coordinate detecting device in the claim 1 to 4, it is characterized in that 15, aforementioned light-emitting component is a light emitting diode.
As any one described coordinate detecting device in the claim 1 to 4, it is characterized in that 16, aforementioned light-emitting component has the good glow color of identity.
As any one described coordinate detecting device in the claim 1 to 4, it is characterized in that 17, aforementioned light-emitting component has redness or blue glow color.
As any one described coordinate detecting device in the claim 1 to 4, it is characterized in that 18, each light-emitting component that aforementioned luminophor will have red and blue each glow color is configured on the optional position.
19, as any one described coordinate detecting device in the claim 1 to 4, it is characterized in that, carry out the pick-up unit of lighting a lamp that lighting a lamp of aforementioned light-emitting component detected thereby have to a plurality of aforementioned light-emitting components in the aforementioned luminophor control of lighting a lamp.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP200144/01 | 2001-06-29 | ||
| JP2001200144 | 2001-06-29 | ||
| JP200144/2001 | 2001-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1464969A true CN1464969A (en) | 2003-12-31 |
| CN1314940C CN1314940C (en) | 2007-05-09 |
Family
ID=19037317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028022750A Expired - Fee Related CN1314940C (en) | 2001-06-29 | 2002-06-28 | Coordinate detector |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4222934B2 (en) |
| KR (1) | KR100908520B1 (en) |
| CN (1) | CN1314940C (en) |
| TW (1) | TWI221190B (en) |
| WO (1) | WO2003002934A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100445749C (en) * | 2004-12-06 | 2008-12-24 | 飞而康公司 | Plate supply device for testing unit of plate display and sub-working table thereof |
| CN102393576A (en) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | Visual checking machine of glass baseplate in liquid crystal display and checking method thereof |
| CN101718828B (en) * | 2008-12-24 | 2012-08-08 | 四川虹欧显示器件有限公司 | Defect confirmation device for flat-panel display and operation method thereof |
| CN103075970A (en) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | Method of compensating orthogonal degree of length measuring device and length measuring device using the same |
| CN103604815A (en) * | 2013-11-26 | 2014-02-26 | 上海海事大学 | Glass wafer detection device and calibration method |
| US8854616B2 (en) | 2011-08-03 | 2014-10-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004015326A1 (en) * | 2004-03-30 | 2005-10-20 | Leica Microsystems | Apparatus and method for inspecting a semiconductor device |
| US7297972B2 (en) * | 2005-08-26 | 2007-11-20 | Electro Scientific Industries, Inc. | Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target |
| JP2008070238A (en) * | 2006-09-14 | 2008-03-27 | Olympus Corp | Substrate inspection device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6179107A (en) | 1984-09-26 | 1986-04-22 | Canon Inc | Original size detecting device |
| JPH07128013A (en) * | 1993-11-08 | 1995-05-19 | Sony Corp | Optical position detector |
| JP2529094B2 (en) * | 1994-08-23 | 1996-08-28 | サン電子株式会社 | Object position sensor |
| JP4166340B2 (en) * | 1997-09-24 | 2008-10-15 | オリンパス株式会社 | Board inspection equipment |
| US6671041B2 (en) * | 1997-09-24 | 2003-12-30 | Olympus Optical Co., Ltd. | Apparatus for inspecting a substrate |
-
2002
- 2002-06-27 TW TW091114230A patent/TWI221190B/en not_active IP Right Cessation
- 2002-06-28 JP JP2003508873A patent/JP4222934B2/en not_active Expired - Fee Related
- 2002-06-28 WO PCT/JP2002/006565 patent/WO2003002934A1/en active Application Filing
- 2002-06-28 KR KR1020037002517A patent/KR100908520B1/en not_active IP Right Cessation
- 2002-06-28 CN CNB028022750A patent/CN1314940C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100445749C (en) * | 2004-12-06 | 2008-12-24 | 飞而康公司 | Plate supply device for testing unit of plate display and sub-working table thereof |
| CN101718828B (en) * | 2008-12-24 | 2012-08-08 | 四川虹欧显示器件有限公司 | Defect confirmation device for flat-panel display and operation method thereof |
| CN102393576A (en) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | Visual checking machine of glass baseplate in liquid crystal display and checking method thereof |
| US8854616B2 (en) | 2011-08-03 | 2014-10-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof |
| CN103075970A (en) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | Method of compensating orthogonal degree of length measuring device and length measuring device using the same |
| CN103075970B (en) * | 2012-12-27 | 2015-07-01 | 深圳市华星光电技术有限公司 | Method of compensating orthogonal degree of length measuring device and length measuring device using the same |
| CN103604815A (en) * | 2013-11-26 | 2014-02-26 | 上海海事大学 | Glass wafer detection device and calibration method |
| CN103604815B (en) * | 2013-11-26 | 2016-01-13 | 上海海事大学 | Chip glass pick-up unit and scaling method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI221190B (en) | 2004-09-21 |
| JPWO2003002934A1 (en) | 2004-10-21 |
| KR100908520B1 (en) | 2009-07-20 |
| WO2003002934A1 (en) | 2003-01-09 |
| JP4222934B2 (en) | 2009-02-12 |
| CN1314940C (en) | 2007-05-09 |
| WO2003002934B1 (en) | 2003-03-06 |
| KR20030042455A (en) | 2003-05-28 |
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