CN1234144C - 静电微型继电器、无线电器件和测量器件及触点切换方法 - Google Patents

静电微型继电器、无线电器件和测量器件及触点切换方法 Download PDF

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Publication number
CN1234144C
CN1234144C CNB021082308A CN02108230A CN1234144C CN 1234144 C CN1234144 C CN 1234144C CN B021082308 A CNB021082308 A CN B021082308A CN 02108230 A CN02108230 A CN 02108230A CN 1234144 C CN1234144 C CN 1234144C
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CN
China
Prior art keywords
substrate
contact
fixed
holding wire
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB021082308A
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English (en)
Chinese (zh)
Other versions
CN1378225A (zh
Inventor
积知范
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
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Omron Corp
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Publication date
Application filed by Omron Corp filed Critical Omron Corp
Publication of CN1378225A publication Critical patent/CN1378225A/zh
Application granted granted Critical
Publication of CN1234144C publication Critical patent/CN1234144C/zh
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Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

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  • Micromachines (AREA)
CNB021082308A 2001-03-27 2002-03-27 静电微型继电器、无线电器件和测量器件及触点切换方法 Expired - Fee Related CN1234144C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置
JP089900/2001 2001-03-27

Publications (2)

Publication Number Publication Date
CN1378225A CN1378225A (zh) 2002-11-06
CN1234144C true CN1234144C (zh) 2005-12-28

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB021082308A Expired - Fee Related CN1234144C (zh) 2001-03-27 2002-03-27 静电微型继电器、无线电器件和测量器件及触点切换方法

Country Status (5)

Country Link
EP (1) EP1246216B1 (https=)
JP (1) JP3651404B2 (https=)
KR (1) KR100455949B1 (https=)
CN (1) CN1234144C (https=)
TW (1) TW550616B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100410165C (zh) * 2002-11-19 2008-08-13 宝兰微系统公司 小型继电器和相应的用途
DE102004010150B9 (de) 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
JP4540443B2 (ja) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
JP2006147540A (ja) 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
JP2014130767A (ja) * 2012-12-28 2014-07-10 Omron Corp 静電マイクロリレーおよびその製造方法
KR101595456B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 가변식 차광기구
KR101595453B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 고정식 차광기구

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2072199C (en) * 1991-06-24 1997-11-11 Fumihiro Kasano Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP3852224B2 (ja) * 1998-10-08 2006-11-29 オムロン株式会社 静電マイクロリレー
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー

Also Published As

Publication number Publication date
KR100455949B1 (ko) 2004-11-08
TW550616B (en) 2003-09-01
EP1246216B1 (en) 2014-06-04
EP1246216A2 (en) 2002-10-02
KR20020076131A (ko) 2002-10-09
CN1378225A (zh) 2002-11-06
JP2002289081A (ja) 2002-10-04
JP3651404B2 (ja) 2005-05-25
EP1246216A3 (en) 2004-07-21

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20051228

Termination date: 20210327

CF01 Termination of patent right due to non-payment of annual fee