CN1225653C - Gas sensor array for detecting indoor gas pollution - Google Patents

Gas sensor array for detecting indoor gas pollution Download PDF

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Publication number
CN1225653C
CN1225653C CN 200310108469 CN200310108469A CN1225653C CN 1225653 C CN1225653 C CN 1225653C CN 200310108469 CN200310108469 CN 200310108469 CN 200310108469 A CN200310108469 A CN 200310108469A CN 1225653 C CN1225653 C CN 1225653C
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CN
China
Prior art keywords
gas
indium
sensor array
tin
present invention
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Application number
CN 200310108469
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Chinese (zh)
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CN1542444A (en
Inventor
季振国
孙兰侠
何振杰
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浙江大学
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Priority to CN 200310108469 priority Critical patent/CN1225653C/en
Publication of CN1542444A publication Critical patent/CN1542444A/en
Application granted granted Critical
Publication of CN1225653C publication Critical patent/CN1225653C/en

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Abstract

The present invention relates to a gas sensor array for detecting indoor gas pollution, which is composed of a plurality of gas sensors of indium-tin oxide films with different ratios of indium to tin, wherein the ratio of indium atoms and tin atoms ranges from 0 to 1.0. The present invention utilizes the indium-tin oxide films of different ratios of the indium to the tin to form the sensor array, and each sensor responds differently to gas so as to greatly enhance the selectivity of the sensor array on the gas. The present invention can conveniently discriminate a plurality of kinds of common indoor pollution gas such as benzene, toluene, xylene, formaldehyde, etc.

Description

The gas sensor array of gaseous contamination in a kind of sensing chamber

Technical field

The present invention relates to detect the gas sensor and the array of indoor harmful gas.

Background technology

Tin oxide is a kind of broad-spectrum semiconductor material, is obtaining more application aspect gas sensor, nesa coating etc. and other photoelectric devices.The gas sensor that uses uses tin ash as sensitive material mostly at present, but exists selectivity not high, and problems such as false alarm take place easily.According to retrieval, also find no the report that constitutes gas sensor array with the indium and tin oxide film gas sensor of a plurality of different indium tin ratios.

Summary of the invention

The gas sensor array that the purpose of this invention is to provide several gaseous contaminations in a kind of selectivity height, the energy sensing chamber.

The gas sensor array of gaseous contamination in the sensing chamber of the present invention is characterized in that this array is to be made of than different indium and tin oxide film gas sensors several indium tin, and wherein the scope of indium/tin atom ratio is 0.1-1.0.

Because indium is an III family element, tin is IV family element, and therefore the Fermi level of the indium and tin oxide film of different indium tin ratios, charge carrier kind, carrier concentration etc. will change with indium tin ratio.For example, the film that the many tin of indium are few tends to p type conduction, easily from the gas molecule electron gain; And the many films of the few tin of indium tend to n type conduction, easily provide electronics to gas molecule.Therefore have nothing in common with each other by the response of each sensor in this sensor array that constitutes by p type and n type gas sensor, make this sensor array will improve greatly the selectivity of gas to gas.

The present invention utilizes the indium and tin oxide film of different indium tin ratios to constitute a sensor array, can differentiate several frequently seen indoor polluted gas easily, comprises benzene,toluene,xylene, formaldehyde etc.Its ultimate principle is the Fermi level difference of the indium tin oxide of different indium tin ratios, and a plurality of such thin film gas sensors constitute the sensor array that Fermi level is different.When on gas absorption each sensor in this array, because Fermi level difference, electric charge between gas molecule and each sensor shifts also inequality, causes in the array different sensors also different to the response of same gas, realizes the discriminating to gaseous species to be measured thus.

Description of drawings

Fig. 1 is a gas sensor array synoptic diagram of the present invention;

Fig. 2 is that electric charge shifts synoptic diagram between gas molecule and colorimetric sensor films;

Fig. 3 is the response diagram that gas sensor array of the present invention detects 4 kinds of common indoor polluted gas.

Embodiment

Shown in Figure 1, be the gas sensor array of gaseous contamination in the sensing chamber that constitutes than different indium and tin oxide film gas sensors by 5 indium tin, their indium/tin atom ratio is respectively 0.10,0.20,0.40,0.60,0.70.

The indium and tin oxide film of different indium tin ratios is prepared by sol-gel process.With SnCl 22H 2O and InCl 34H 2O is a raw material, and raw material is dissolved in a certain amount of absolute ethyl alcohol, adds a certain amount of glacial acetic acid simultaneously, the solution 2h that heats while stirring, and the agitating heating temperature is controlled at 60 ℃, at room temperature deposits then 1-2 days, obtains the solution of homogeneous transparent at last.The solution that will obtain with said method is made gold electrode before pre-hollow ceramic post plates one deck wet film, through obtaining indium tin oxide film on the hollow ceramic post through 500 degree high-temperature heat treatment again after 80 degree, the two step pre-service of 180 degree.

Fig. 2 shifts synoptic diagram for electric charge between the Fermi level different sensors among the present invention, and LUMO represents the minimum molecular orbit that is not occupied by electronics among the figure, and HOMO is the highest molecular orbit that is occupied by electronics.The amount that electric charge shifts is relevant with the Fermi level of direction and colorimetric sensor films.

Use gaseous contamination in the gas sensor array shown in Figure 1 sensing chamber, the result as shown in Figure 3,5 indium tin are obviously more different to the response that 4 kinds of common indoor polluted gas provide than different indium and tin oxide film sensor arraies.(gas concentration is 100ppm).Be not difficult to find out, utilize this sensor array can clearly distinguish gases such as benzene,toluene,xylene and formaldehyde.

Claims (1)

1. gas sensor array during gaseous contamination in the sensing chamber is characterized in that this array is to be made of than different indium and tin oxide film gas sensors several indium tin, and wherein the scope of indium/tin atom ratio is 0.1-1.0.
CN 200310108469 2003-11-04 2003-11-04 Gas sensor array for detecting indoor gas pollution CN1225653C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200310108469 CN1225653C (en) 2003-11-04 2003-11-04 Gas sensor array for detecting indoor gas pollution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200310108469 CN1225653C (en) 2003-11-04 2003-11-04 Gas sensor array for detecting indoor gas pollution

Publications (2)

Publication Number Publication Date
CN1542444A CN1542444A (en) 2004-11-03
CN1225653C true CN1225653C (en) 2005-11-02

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CN 200310108469 CN1225653C (en) 2003-11-04 2003-11-04 Gas sensor array for detecting indoor gas pollution

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CN (1) CN1225653C (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2359204B1 (en) * 2009-11-09 2012-03-26 Centre De Recherche Public - Gabriel Lippmann Device for the selective detection of gas benzene, procedure for obtaining and detection of gas with the same.
DE102010027070A1 (en) * 2010-07-13 2012-01-19 Eberhard-Karls-Universität Tübingen Gas sensor and method for its production
CN104677950B (en) * 2015-02-15 2018-03-06 南京益得冠电子科技有限公司 Formaldehyde sensitive material and semiconductor formaldehyde sensor for semiconductor formaldehyde sensor

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Publication number Publication date
CN1542444A (en) 2004-11-03

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