CN121514986A - An ion beam polishing machine for large optical components - Google Patents

An ion beam polishing machine for large optical components

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Publication number
CN121514986A
CN121514986A CN202610066619.5A CN202610066619A CN121514986A CN 121514986 A CN121514986 A CN 121514986A CN 202610066619 A CN202610066619 A CN 202610066619A CN 121514986 A CN121514986 A CN 121514986A
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CN
China
Prior art keywords
vacuum chamber
rail
frame
module
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202610066619.5A
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Chinese (zh)
Other versions
CN121514986B (en
Inventor
请求不公布姓名
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Changsha Aifusi Technology Co ltd
Original Assignee
Changsha Aifusi Technology Co ltd
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Publication date
Application filed by Changsha Aifusi Technology Co ltd filed Critical Changsha Aifusi Technology Co ltd
Priority to CN202610066619.5A priority Critical patent/CN121514986B/en
Publication of CN121514986A publication Critical patent/CN121514986A/en
Application granted granted Critical
Publication of CN121514986B publication Critical patent/CN121514986B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/0031—Machines having several working posts; Feeding and manipulating devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005—Blocking means, chucks or the like; Alignment devices
    • B24B13/0055—Positioning of lenses; Marking of lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/007—Weight compensation; Temperature compensation; Vibration damping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

本申请涉及光学零件超精密加工技术领域，尤其是涉及一种大型光学零件离子束抛光机，包括翻转送入装置和真空室，所述翻转送入装置设置于真空室的一侧，所述真空室靠近翻转送入装置的一侧并设有侧门，所述真空室内活动安装有驱动机构；所述翻转送入装置包括横移模组。本技术方案应用期间，通过合理布局驱动结构、设置多重限位、滚动送料、自动化驱动及模块化布局等结构，可保障大型光学零件顺畅进料、翻转稳定无晃动，大幅降低径向作用力、简化操作流程，优化设备布局并提升定位精度、扩大适配范围，全面解决现有技术中的中心驱动挡料、底部驱动晃动、作用力大、操作不便、尺寸过大及适配精度不足等问题。

This application relates to the field of ultra-precision machining technology for optical components, and in particular to an ion beam polishing machine for large optical components, including a flip-feed device and a vacuum chamber. The flip-feed device is located on one side of the vacuum chamber, and the vacuum chamber has a side door on the side close to the flip-feed device. A drive mechanism is movably installed inside the vacuum chamber. The flip-feed device includes a transverse module. During the application of this technical solution, through the reasonable layout of the drive structure, the setting of multiple limiters, rolling feeding, automated drive, and modular layout, it can ensure smooth feeding and stable flipping of large optical components without shaking, significantly reduce radial force, simplify the operation process, optimize equipment layout and improve positioning accuracy, expand the adaptability range, and comprehensively solve the problems of center drive material blocking, bottom drive shaking, large force, inconvenient operation, excessive size, and insufficient adaptability accuracy in the prior art.

Description

Large-scale optical part ion beam polishing machine
Technical Field
The application relates to the technical field of ultra-precise machining of optical parts, in particular to an ion beam polishing machine for large-sized optical parts.
Background
Along with the rapid development of high technical fields such as space detection, laser weapons and the like, the application requirements of large optical parts with diameters exceeding 1.5m are increasingly urgent, the index requirements of machining precision, surface quality and the like are continuously improved, a large ion beam polishing machine becomes an indispensable core equipment for machining the parts by virtue of a unique machining principle and excellent performance, and because ion beam polishing needs to be carried out in a vacuum environment, in order to ensure consistent machining and detection states and machining precision, the large optical parts need to be installed and positioned in a vacuum chamber in an side-by-side manner, but the working surface faces upwards vertically when the parts are transported, and therefore, before entering a vacuum chamber, key procedures are required to be completed, namely the large optical parts are precisely turned from a transportation state to a side-by-side state and are stably fed into a preset position in the vacuum chamber.
The large optical part has the remarkable characteristics of huge size and extremely large weight, the stability, the accuracy and the safety of the overturning motion are critical to the whole processing flow, the design rationality of the overturning mechanism directly influences the processing quality and the production efficiency, and currently, the overturning mode for the large optical part mainly comprises a center driving mode and a bottom driving mode, however, the two existing overturning modes have obvious defects, and the actual functional requirements in the processing flow of the large ion beam polishing machine are difficult to meet.
At present, in order to avoid overlarge overturning moment, a driving structure for center-driven overturning is positioned in a central area of a part, can shield a channel for feeding the side surface of a large optical part into a vacuum chamber, collides with the feeding layout of the vacuum chamber, leads to the incapability of normal feeding and installation of the part, violates the functional requirement of a processing flow, is limited by the lack of an effective side surface, easily shakes left and right due to gravity center deviation during overturning, influences positioning precision and possibly collides with a surface, and meanwhile, needs to additionally arrange an additional transmission part, so that the unstable gesture is aggravated by larger radial acting force, the problems of complex operation and overlarge height dimension of the overturning mechanism are solved, the layout difficulty of equipment is increased, and the problem is contradicted with the compact and efficient design requirement, so that the improvement design is needed.
Disclosure of Invention
In order to improve the processing convenience of large-scale optical parts during application of the prior art, the application provides an ion beam polishing machine for large-scale optical parts.
The application provides a large-sized optical part ion beam polishing machine, which adopts the following technical scheme that the large-sized optical part ion beam polishing machine comprises a turnover feeding device and a vacuum chamber, wherein the turnover feeding device is arranged on one side of the vacuum chamber;
the overturning and feeding device comprises a traversing module, the traversing module is fixedly arranged at the lower end of one side of the vacuum chamber, the overturning module is fixedly arranged at the movable end of the top of the traversing module, and the feeding module is movably arranged in the overturning module;
The feeding module comprises a part placing frame, the part placing frame is welded and installed at the top overturning moving end of the overturning module, an optical part clamp is connected to the part placing frame in a sliding mode, the front side of the optical part clamp is uniformly and linearly arranged and fixedly connected with a concave frame, the inner side of the concave frame is rotationally connected with a driving roller, the rear side of the concave frame at the two ends is fixedly provided with a first motor, the output end of the first motor is connected with the rear side of the driving roller through a coupler, the concave frame and the driving roller of the optical part clamp are located at the bottom after the overturning module overturns, the driving roller is stably attached to the bottom in the part placing frame after overturning under the action of gravity and a guiding mechanism, the driving roller is started to drive the driving roller to rotate at the moment, the optical part clamp can be driven to transversely slide in the part placing frame, a large optical part can be placed in the inner side of the optical part clamp before overturning during use, and the driving roller can enter the inside of a vacuum chamber through the side door after the driving of the driving roller is started after the optical part clamp rotates.
Optionally, fixed mounting has the rail that holds around the vacuum chamber lower extreme, it sets up in the side door in the below to accept the rail, the drive roller rolls in the top of accepting the rail after entering the vacuum chamber, accepts the rail and is used for accepting the drive roller, and drive roller drive, cooperation accept rail and roll steadily this moment, make the inside entering vacuum chamber that optical part anchor clamps can be stable.
Optionally, the sideslip module includes the bottom support, bottom support fixed mounting is in one side lower extreme of vacuum chamber, one side fixed mounting that the vacuum chamber was kept away from to the bottom support has the second motor, the inside rotation of bottom support is connected with first lead screw, the surface threaded connection of first lead screw has movable framework, movable framework sliding connection is in the top of bottom support, upset module fixed mounting is in the top of movable framework.
Optionally, the bottom both sides of movable frame body are all fixed mounting has the movable frame, the top both ends of bottom support are all fixed mounting has the solid rail of a branch, movable frame sliding connection is in the inboard of the solid rail of a branch.
Optionally, the equidistant rotation that is of bottom in the movable frame is connected with the roll deflector roll, the roll deflector roll is located the inboard of the solid rail of branch and bottom and the interior top laminating roll connection of the solid rail of branch, the cross-sectional shape of the interior chamber way of the solid rail of branch and movable frame all sets up to the protruding font.
Optionally, the upset module includes the support body frame, the support body frame welds in the top of movable frame body, the equal fixed mounting in inside both sides of support body frame has the arcuation rail, the inside roll-on connection of arcuation rail has the arcuation slide, rear side fixed mounting has drive assembly in the support body frame, drive assembly is used for driving the rolling upset of arcuation slide in the arcuation rail, the frame welding is placed in the inboard of arcuation slide to the part.
Optionally, the drive assembly includes side seat, arcuation rack and pivot, side seat fixed mounting is in top one side of supporting the body frame, the pivot rotates and connects in the rear side upper end of supporting the body frame, arcuation rack welded mounting is in one side that arcuation slide is close to each other, the equal fixedly connected with gear in both ends of pivot, gear and arcuation rack meshing are connected, the outside fixed mounting of side seat has the third motor, the output of third motor is connected through the one end of shaft coupling and pivot.
Optionally, the equal interval in both sides is linear arrangement fixedly connected with first support frame around the bottom of bottom support, the fixed orifices has been seted up in the outside of first support frame, the fixed orifices sets up to the counter bore, the equal fixed mounting in bottom four corners of vacuum chamber has the second support frame, the side shape of second support frame is isosceles trapezoid setting.
Optionally, the top fixed mounting of standing rail has the fourth motor, the inside rotation of standing rail is connected with the second lead screw, the top of second lead screw is connected through the output of shaft coupling and fourth motor, the surface threaded connection of second lead screw has indulges and moves the slider, it has the sideslip subassembly to indulge the front fixed mounting of moving the slider.
Optionally, sideslip subassembly includes the rail, rail fixed mounting is in the front of indulging the slider, the one end fixed mounting of rail has the fifth motor, the inside rotation of rail is connected with the third lead screw, the tip of third lead screw is connected through the output of shaft coupling and fifth motor, the surface threaded connection of third lead screw has the sideslip slider, the front fixed mounting of sideslip slider has the mount pad, the ion source is installed through threaded connection spare to the lower extreme of mount pad, and during this device application, utilize fourth motor drive second lead screw can drive ion source longitudinal movement, and cooperation fifth motor drive third lead screw can drive ion source lateral shifting simultaneously, and the flexible displacement of horizontal longitudinal overall of adjustable ion source can be nimble adaptation back optical part anchor clamps in place the optional position of large-scale optical part, the side door specifically is the electrically operated gate, can carry out automatic switch and realize sealing.
In summary, the application has the following beneficial technical effects:
1. During the application of the technical scheme, the driving structure is reasonably arranged at the outer side of the part placement frame, the supporting main frame and other positions by arranging the overturning feeding device and the side door matched layout, so that the driving structure can be prevented from occupying the part side feeding channel during the use period, the effects of ensuring smooth feeding and installation of parts are further achieved, the problem that the feeding channel is blocked by a center driving type overturning manner in the prior art is solved, meanwhile, the multiple limiting structures formed by the arc-shaped rail, the part placement frame and the driving roller are arranged, the precise guiding and limiting can be formed on the optical part clamp and the large optical part during the use period, the stable and shake-free effect of the overturning process is further achieved, and the problem that the parts are easy to shake left and right during the bottom driving overturning in the prior art is solved;
2. during the application of the technical scheme, the rolling feeding mechanism of the driving roller is arranged, so that rolling friction can be adopted to replace sliding friction to transmit feeding power during the use, meanwhile, through the structure of arranging a motor reducer to directly drive a coupler, an additional transmission part is not required to be additionally arranged, the overturning module is directly meshed with the arc-shaped rack through a gear to drive the acting force to be evenly distributed along an arc surface, the effect of greatly reducing radial acting force is achieved, the problem that the bottom driving generates larger radial acting force in the prior art is solved, meanwhile, through the automatic structure of arranging multiple motors to cooperatively drive, each action can be automatically connected through motor driving during the use, and an operator only needs to finish initial placement and motor starting control, so that the effect of simplifying an operation flow is achieved, and the problem of inconvenient bottom driving operation in the prior art is solved;
3. During the application of the technical scheme, the transverse moving module, the overturning module and the feeding module are arranged in a horizontal and longitudinal compact mode through the modularized layout structure, the arc-shaped rail, the arc-shaped sliding plate attaching type overturning structure and the convex-shaped matched transverse moving structure are matched, so that the height direction size of the overturning mechanism can be effectively controlled during the use period, the effect of optimizing the whole layout of equipment is achieved, the problem of the increase of the height direction size of the bottom driving overturning mechanism in the prior art is solved, meanwhile, the ion source transverse and longitudinal displacement mechanism and the optical part clamp with strong suitability are arranged, the processing requirements of large optical parts with different sizes can be adapted during the use period, the in-situ detection and compensation structure of the three-coordinate measuring head is matched, the effects of improving the positioning precision and expanding the use range are achieved, and the problems of poor equipment suitability and insufficient positioning precision in the prior art are solved.
Drawings
FIG. 1 is a schematic view of the overall structure of an embodiment of the present application;
FIG. 2 is a schematic rear view of an embodiment of the present application;
FIG. 3 is a schematic view of the structure of the vacuum chamber and the internal driving mechanism thereof according to the embodiment of the present application;
FIG. 4 is a schematic view of the whole structure of the turning feeding device according to the embodiment of the present application;
FIG. 5 is a schematic view showing a bottom view of the inverting input device according to the embodiment of the application;
FIG. 6 is a schematic diagram showing a front view of a turnover state of an optical part fixture in a turnover feeding device according to an embodiment of the present application;
FIG. 7 is a schematic view showing a rear view of a turnover state of an optical part holder in a turnover feeding device according to an embodiment of the present application;
FIG. 8 is a schematic diagram of a split state structure of a traversing module according to an embodiment of the present application;
FIG. 9 is a schematic bottom view of a split status of a sending module according to an embodiment of the present application;
FIG. 10 is a schematic diagram of a driving mechanism according to an embodiment of the present application.
The device comprises a1, a turnover feeding device, a 11, a traversing module, a 111, a bottom bracket, a 112, a second motor, a 113, a first screw rod, a 114, a movable frame, a 115, a movable frame, a 116, a support rail, a 117, a rolling guide roller, a 118, a first supporting frame, a 119, a fixed hole, a 12, a turnover module, a 121, a supporting frame, a 122, an arc rail, a 123, an arc slide plate, a 124, a driving assembly, a 1241, a side seat, a 1242, an arc rack, a 1243, a rotating shaft, 1244, a gear, 1245, a third motor, a 13, a feeding module, a 131, a part placing frame, a 132, an optical part clamp, a 133, a concave frame, a 134, a driving roller, a 135, a first motor, a 136, a bearing rail, a2, a vacuum chamber, a3, a side door, a 4, a driving mechanism, a 41, a vertical rail, a 42, a fourth motor, a 43, a second screw rod, a 44, a longitudinal moving slide block, a 45, a traversing assembly, a 451, a transverse rail, 452, a fifth motor 453, a third screw rod, a 454, a traversing slide block, a 455, an ion, a mounting seat, a5, a second supporting frame.
Detailed Description
The application is described in further detail below with reference to fig. 1-10.
The embodiment of the application discloses an ion beam polishing machine for large optical parts. As shown in fig. 1-10, the device comprises a turnover feeding device 1 and a vacuum chamber 2, wherein the turnover feeding device 1 is arranged on one side of the vacuum chamber 2, a side door 3 is arranged on one side of the vacuum chamber 2 close to the turnover feeding device 1, and a driving mechanism 4 is movably arranged in the vacuum chamber 2;
the overturning and feeding device 1 comprises a traversing module 11, wherein the traversing module 11 is fixedly arranged at the lower end of one side of the vacuum chamber 2, an overturning module 12 is fixedly arranged at the mobile end of the top of the traversing module 11, and a feeding module 13 is movably arranged in the overturning module 12;
The feeding module 13 comprises a part placing frame 131, the part placing frame 131 is welded and installed at the top overturning moving end of the overturning module 12, an optical part clamp 132 is connected in the part placing frame 131 in a sliding manner, the front side of the optical part clamp 132 is fixedly connected with a concave frame 133 in a linear arrangement at equal intervals, the inner side of the concave frame 133 is rotationally connected with a driving roller 134, the rear side of the concave frame 133 positioned at the two most ends is fixedly provided with a first motor 135, the output end of the first motor 135 is connected with the rear side of the driving roller 134 through a coupler, during the application of the device, the overturning and feeding device 1 is matched with a vacuum chamber 2 through the arrangement of the overturning and feeding device, so that the overturning and feeding functions of large optical parts can be realized when the device is used, the large-sized optical parts are clamped in the optical part clamp 132 firstly, and then the overturning module 12 and the feeding module 13 can be driven to integrally move by means of the module 11, the feeding module 13 is aligned with the side door 3, then the overturning module 12 drives the part placing frame 131 and the internal optical part clamp 132 to overturn, so that the adjustment of the posture of the large optical part is realized, after the overturning is finished, the first motor 135 is started, the first motor 135 drives the driving roller 134 to rotate through the coupler, the friction force generated by the rotation of the driving roller 134 can drive the optical part clamp 132 to slide along the inside of the part placing frame 131, and further the large optical part is stably fed into the vacuum chamber 2, the feeding module has the advantages that the orderly connection from the posture adjustment to the feeding of the large optical part into the vacuum chamber 2 can be realized through the cooperative cooperation of the traversing module 11, the overturning module 12 and the feeding module 13, the frequent manual intervention is not needed, the continuity of the operation is improved, and meanwhile, the feeding process is more stable through the sliding cooperation of the driving roller 134 and the optical part clamp 132, the large optical part can be effectively prevented from being collided and damaged in the feeding process, the driving roller 134 is directly driven by the first motor 135 to be structurally designed, the power transmission is direct and efficient, the accuracy of feeding operation can be guaranteed, the overturning feeding device 1 and the side door 3 are matched, the large optical part can be ensured to smoothly enter the vacuum chamber 2, and the guarantee is provided for the smooth development of the subsequent processing flow.
Referring to fig. 1 to 3 and 10, the driving mechanism 4 includes a vertical rail 41, the vertical rail 41 is fixedly installed in the middle of the rear side in the vacuum chamber 2, a fourth motor 42 is fixedly installed at the top of the vertical rail 41, a second screw 43 is rotatably connected in the vertical rail 41, the top end of the second screw 43 is connected with the output end of the fourth motor 42 through a coupling, a longitudinal moving slide block 44 is screwed on the outer surface of the second screw 43, a lateral moving assembly 45 is fixedly installed on the front surface of the longitudinal moving slide block 44, the lateral moving assembly 45 includes a transverse rail 451, the transverse rail 451 is fixedly installed on the front surface of the longitudinal moving slide block 44, a fifth motor 452 is fixedly installed at one end of the transverse rail 451, a third screw 453 is rotatably connected in the interior of the transverse rail 451, the end of the third screw 453 is connected with the output end of the fifth motor 452 through a coupling, a lateral moving slide block 454 is screwed on the outer surface of the third screw 453, a mounting seat 455 is fixedly installed on the front surface of the lateral moving slide block 454, the lower end of the mounting seat 455 is provided with an ion source 456 through a screw, during the application of the device, the second screw rod 43 is driven by the fourth motor 42 to drive the ion source 456 to longitudinally move, meanwhile, the third screw rod 453 is driven by the fifth motor 452 to drive the ion source 456 to transversely move, so that the transverse and longitudinal overall flexible displacement of the ion source 456 can be regulated, any position of a large optical part placed in the optical part clamp 132 after overturning can be flexibly adapted, the side door 3 is particularly an electric door, and automatic opening and closing can be carried out, during the application of the device, the device can realize flexible displacement regulation of the ion source 456 and automatic opening and closing sealing of the side door 3 through the arrangement of the longitudinal and transverse displacement structure of the driving mechanism 4 and the electric side door 3, and when in use, the side door 3 can be automatically opened to provide a channel for feeding the large optical part, the automatic sealing device can automatically close after the parts are fed into the vacuum chamber 2 to realize sealing and sealing, the sealing environment of the vacuum chamber 2 is guaranteed, when the position of the ion source 456 is regulated, the fourth motor 42 is started, the second screw 43 in the vertical rail 41 is driven to rotate through the coupler, the second screw 43 is in threaded connection with the vertical moving slide 44, the rotation of the screw is converted into the longitudinal movement of the vertical moving slide 44 along the vertical rail 41, and further, the transverse moving assembly 45 in the front of the vertical moving slide 44 is driven to synchronously move longitudinally, meanwhile, the fifth motor 452 is started, the third screw 453 is in threaded connection with the transverse moving slide 454, the rotation of the screw is converted into the transverse movement of the transverse moving slide 454 along the transverse rail 451 through the coupler, the ion source 456 is fixed in the front of the slide 454 through the mounting seat 455, and accordingly, the transverse moving slide 456 can be synchronously and transversely moved along with the transverse moving slide 454, and through the matched driving of the fourth motor 42 and the fifth motor 452, the transverse moving slide 456 can realize the full-face flexible displacement of the ion source, the transverse moving flexible displacement of the ion source can be accurately matched with the transverse moving slide 44, meanwhile, the transverse moving flexible displacement of the ion source can accurately adapt to the transverse moving slide side door 45, the position of the optical part 132 after the turnover optical part is accurately matched with the optical part, the automatic sealing device can be accurately moved, the automatic sealing device can be accurately and stably processed, the vacuum chamber can be accurately processed, the vacuum chamber can be processed, the vacuum condition can be accurately and stably has no need to be realized, and the vacuum condition is accurately and can be accurately processed, and stably and has the vacuum processing conditions and can be realized.
Referring to fig. 4-9, the turnover module 12 includes a supporting main frame 121, the supporting main frame 121 is welded to the top of the movable frame 114, two inner sides of the supporting main frame 121 are fixedly provided with arc rails 122, an arc slide plate 123 is slidably connected to the inner side of the arc rails 122, a driving assembly 124 is fixedly installed at the rear side of the supporting main frame 121, the driving assembly 124 is used for driving the arc slide plate 123 in the arc rails 122 to slide and turn, the part placement frame 131 is welded to the inner side of the arc slide plate 123, the driving assembly 124 includes a side seat 1241, The arc-shaped rack 1242 and the rotating shaft 1243, the side seat 1241 is fixedly installed on one side of the top of the supporting main frame 121, the rotating shaft 1243 is rotatably connected to the upper end of the rear side of the supporting main frame 121, the arc-shaped rack 1242 is welded and installed on one side of the arc-shaped sliding plate 123, which is close to each other, the two ends of the rotating shaft 1243 are fixedly connected with the gear 1244, the gear 1244 is meshed and connected with the arc-shaped rack 1242, the outer side of the side seat 1241 is fixedly provided with the third motor 1245, the output end of the third motor 1245 is connected with one end of the rotating shaft 1243 through a coupler, the front side and the rear side of the bottom bracket 111 are uniformly and fixedly connected with the first supporting frame 118 in a linear arrangement, the outer side of the first supporting frame 118 is provided with a fixing hole 119, the fixing hole 119 is set as a countersink, the four corners of the bottom of the vacuum chamber 2 are fixedly provided with the second supporting frame 5, the side shape of the second supporting frame 5 is isosceles trapezoid, and the driving assembly 124 of the turnover module 12 is arranged during the application of the device, The matching structure of the arc-shaped rail 122 and the arc-shaped slide plate 123, and the supporting structure of the bottom bracket 111 and the vacuum chamber 2, so that stable overturning of large optical parts and stable installation of the whole equipment can be realized during use, when the vacuum chamber is used, the third motor 1245 is started, the rotating shaft 1243 is driven to rotate by the third motor 1245 through the coupler, the gears 1244 at two ends of the rotating shaft 1243 synchronously rotate along with the rotating shaft 1243, as the gears 1244 are meshed with the arc-shaped racks 1242 at the inner side of the arc-shaped slide plate 123, the rotation of the gears 1244 can drive the arc-shaped racks 1242 to drive the arc-shaped slide plate 123 to slide along the arc-shaped rails 122 at two sides inside the supporting main frame 121, and further, the part placing frame 131 welded at the inner side of the arc-shaped slide plate 123 is driven to finish overturning, meanwhile, the first supporting frame 118 at the bottom of the bottom bracket 111 realizes fixation of the device and the installation surface through the fixing hole 119, and the second supporting frame 5 at the bottom of the vacuum chamber 2 plays a stable supporting role on the vacuum chamber 2; the arc rail 122 and the arc slide plate 123 are fit and slide, so that the friction resistance in the overturning process is reduced, the overturning action is smoother and smoother, the power loss is reduced, the countersunk head hole design of the first support frame 118 can avoid the exposed interference of the head of the fixing bolt with other structure movements, the regularity of installation is improved, the isosceles trapezoid structure of the second support frame 5 can enhance the stability of the support of the vacuum chamber 2, the weight of equipment is dispersed, the equipment is prevented from tilting or swaying in the use process, and structural guarantee is provided for the stable development of the whole overturning and feeding process.
Referring to fig. 1-8, a support rail 136 is fixedly mounted at the front and rear of the inner lower end of the vacuum chamber 2, the support rail 136 is disposed at the inner lower side of the side door 3, the driving roller 134 rolls on the top of the support rail 136 after entering the vacuum chamber 2, the traversing module 11 comprises a bottom bracket 111, the bottom bracket 111 is fixedly mounted at the lower end of one side of the vacuum chamber 2, a second motor 112 is fixedly mounted at the side of the bottom bracket 111 away from the vacuum chamber 2, a first screw 113 is rotatably connected to the inner side of the bottom bracket 111, a movable frame 114 is screwed on the outer surface of the first screw 113, the movable frame 114 is slidably connected to the top of the bottom bracket 111, the overturning module 12 is fixedly mounted at the top of the movable frame 114, movable frames 115 are fixedly mounted at both sides of the bottom of the movable frame 114, support rails 116 are fixedly mounted at both ends of the top of the bottom bracket 111, the movable frames 115 are slidably connected to the inner sides of the support rails 116, the bottom of the movable frame 115 is in equidistant linear arrangement and is rotationally connected with a rolling guide roller 117, the rolling guide roller 117 is positioned at the inner side of the support rail 116, the bottom of the rolling guide roller is in joint rolling connection with the inner top of the support rail 116, the inner cavity of the support rail 116 and the section shape of the movable frame 115 are both arranged in a convex shape, during the application of the device, the relative structure of the traversing module 11 and the bearing rail 136 in the vacuum chamber 2 are arranged, so that smooth movement and accurate butt joint in the transferring process of large optical parts can be realized during the use, the second motor 112 is started, the second motor 112 drives the first screw 113 to rotate, the rotation of the screw is converted into the movement of the movable frame 114 along the top of the bottom bracket 111 due to the threaded connection of the first screw 113 and the movable frame 114, the movable frames 115 at the two sides of the bottom of the movable frame 114 slide along the inner side of the support rail 116 during the movement of the movable frame 114, meanwhile, the rolling guide roller 117 at the bottom of the movable frame 115 can be attached to the bottom of the supporting and fixing rail 116 for rolling, friction resistance between the movable frame 115 and the supporting and fixing rail 116 is reduced, when the driving roller 134 drives the optical part clamp 132 to enter the vacuum chamber 2, the driving roller 134 can roll on the top of the bearing rail 136, smooth movement is achieved by means of the support of the bearing rail 136, the movable frame 114 can be accurately moved by means of the transmission mode of the first screw 113 driven by the second motor 112, the overturning module 12 and the feeding module 13 are driven to be accurately aligned with the side door 3, accurate butt joint of subsequent feeding actions is guaranteed, the movable frame 115 and the convex-shaped section of the supporting and fixing rail 116 can be effectively prevented from shifting in the moving process of the movable frame 114, stability of movement is improved, friction force when the rolling guide roller 117 is arranged greatly reduced, movement is smooth, structural abrasion can be reduced, service life of equipment is prolonged, stable support is provided for movement of the driving roller 134 after entering the vacuum chamber 2, the driving roller 134 is prevented from moving in the vacuum chamber 2, large-scale optical parts are prevented from being damaged in the whole moving process of the bump and risk of moving parts is reduced.
In order to facilitate the operations of installing and detaching large optical parts, the large optical parts ion beam polishing machine is provided with the device as a turnover and feeding mechanism for the operations of clamping, turnover, transferring and the like of the large optical parts, the processing surface can be turned over from a horizontal state to a side standing state and transported to a processing position in a vacuum chamber 2, the device can do linear motion along a support fixed rail 116 of a traversing module 11 and can also stay at a preset position, an optical parts clamp 132 is used for clamping the large optical parts, in an initial operation stage, firstly, a part placing frame 131 of the turnover module 12 is adjusted to a horizontal position, limit and safety protection are made, then the optical parts clamp 132 is hoisted to the part placing frame 131, the back of the optical parts clamp 132 is supported by a plurality of Teflon blocks, the outer side is protected by a stop, the photovoltaic parts clamp is a mature product clamped by the photovoltaic parts in the prior art, the photovoltaic parts has a clamping and positioning function, therefore, the device is not described in detail, then, the large optical parts are hoisted at the center position of the optical parts clamp 132 by adopting a crane, a motor, the traversing module 11 is clamped at the center position of the optical parts clamp 132, the motor is carried out, the second end of the traverse module 11 is clamped by the inner bottom of the movable frame 114, the movable frame 114 is matched with a movable frame 114, the movable frame 114 is rotated, the movable frame 114 is matched with the movable frame 114, the movable frame 114 is rotated and the movable frame 114 is rotated, the movable frame 114 is matched with the movable frame 114, and the movable frame 114 is rotated and the movable frame 114, and the movable frame 114 is rotated, and the movable frame 114, and the movable frame is matched with the movable frame 114, and the movable frame is rotated and the movable frame. The cross section of the supporting and fixing rail 116 and the cross section of the movable frame 115 are in a convex shape, the vertical deflection of the movable frame 114 in the moving process can be prevented, the moving track is accurate, the part placing frame 131 can be manually turned in an electric turning mode when power failure, mechanical or electric faults are met, the second supporting frame 5 at the bottom of the vacuum chamber 2 realizes the supporting and fixing of the whole equipment, the cross section of the second supporting frame is in an isosceles trapezoid structural design, the supporting stability is improved, the first supporting frame 118 at the bottom of the bottom support 111 is connected with a mounting surface through the fixing hole 119, the fixed mounting of the transverse moving module 11 is realized, and the fixing hole 119 is a countersunk hole, so that the head of a connecting bolt is not exposed, and other structural movements are prevented from being interfered.
After the optical part clamp 132 and the large optical part are clamped, a third motor 1245 in the turnover module 12 is started to perform turnover operation, the output end of the third motor 1245 drives a rotating shaft 1243 at the rear side of the support main frame 121 to rotate through a coupler, gears 1244 at two ends of the rotating shaft 1243 synchronously rotate along with the rotating shaft 1243, as the gears 1244 are meshed with arc racks 1242 welded at the inner side of the arc slide 123, the gears 1244 rotate to drive the arc racks 1242 to drive the arc slide 123 to slide along arc rails 122 at two sides inside the support main frame 121, so that turnover movement of the arc slide 123 is realized, the support main frame 121 provides installation support for each part of the turnover module 12, the arc rails 122 play a role in guiding and limiting the arc slide 123, the turnover movement track is ensured to be fixed, the part placing frame 131 welded at the inner side of the arc slide 123 is synchronously turned over along with the arc slide 123, and then the inner optical part clamp 132 and the large optical part are turned over 90 degrees from a horizontal state to a vertical (side-standing) state, after the turnover is completed, the bottom of the optical part clamp 132 is driven to be attached to the driving roller 134 at the bottom of the part clamp 132, and the bottom of the part placing frame is placed at the bottom of the driving roller 134, and the bottom of the driving roller is stably placed at the bottom of the driving roller and the driving roller is influenced by the driving roller and the bottom of the driving roller 133 after the turnover movement is finished, and the turnover movement is finished.
After the overturning action is finished, the second motor 112 of the traversing module 11 is started again, the traversing module 11 drives the upper overturning module 12, the feeding module 13, the optical part clamp 132 and the large optical part to be conveyed to the side door 3 of the vacuum chamber 2 along the supporting and fixing rail 116, the side door 3 is in an open state at the moment, the driving roller 134 of the device is consistent with the supporting structure height and specification of the supporting rail 136 on the base in the vacuum chamber 2, after the driving roller 134 and the supporting structure are aligned, the first motor 135 in the feeding module 13 is started, the output end of the first motor 135 drives the driving roller 134 on the inner side of the concave frame 133 to rotate through a coupler, as the driving roller 134 is attached to the inner bottom part overturned by the part placing frame 131, and the guide rail of the optical part clamp 132 falls on the driving roller 134, the friction force generated by the rotation of the driving roller 134 drives the optical part clamp 132 and the large optical part to transversely slide along the inside of the part placement frame 131, the optical part clamp 132 and the large optical part are conveyed into the vacuum chamber 2 through the driving roller 134, the supporting rail 136 supporting structure in the vacuum chamber 2 is used for supporting the entered driving roller 134 and the optical part clamp 132, when the driving roller 134 moves to the side door 3 along with the optical part clamp 132, the driving roller 134 rolls to the top of the supporting rail 136 supporting structure, the supporting rail 136 supporting structure provides support for the driving roller 134, so that the driving roller 134 can stably roll along the driving roller, the optical part clamp 132 and the large optical part are driven to be stably conveyed to the inner side of the vacuum chamber 2, and the overturning and conveying flow of the large optical part is completed.
After the photoelectric sensor in the vacuum chamber 2 detects that the large optical part and the optical part clamp 132 are conveyed in place, the optical part clamp 132 is limited to the right through two spring ejector rods on the inner side of a guide rail of the optical part clamp 132, a limiting pin on the outer side is rotated upwards and screwed towards a bottom plate on the left side of the optical part clamp 132 to realize left limit, after limiting fixation is completed, the large optical part reaches a target position, the processing flow of ion beam polishing is carried out, after the part is conveyed in place, the position of a driving mechanism 4 can be adjusted according to processing requirements, a fourth motor 42 in the driving mechanism 4 is started, the output end of the fourth motor 42 drives a second screw rod 43 in the vertical rail 41 to rotate through a coupler, and as the second screw rod 43 is connected with a longitudinal moving slide block 44 in a threaded manner, the rotary motion of the screw rod is converted into the longitudinal linear motion of the longitudinal moving slide block 44 along the vertical rail 41, and a transverse moving assembly 45 is fixedly arranged on the front surface of the longitudinal moving slide block 44, so that the transverse moving assembly 45 can synchronously complete longitudinal displacement along with the longitudinal moving slide block 44; the fifth motor 452 in the traversing assembly 45 is started again, the output end of the fifth motor 452 drives the third screw rod 453 in the transverse rail 451 to rotate through a coupler, and similarly, the third screw rod 453 is in threaded connection with the traversing slide block 454, the rotary motion of the third screw rod 453 is converted into the transverse linear motion of the traversing slide block 454 along the transverse rail 451, the ion source 456 is fixed on the mounting seat 455 on the front surface of the traversing slide block 454, the ion source 456 realizes the transverse displacement along with the traversing slide block 454, the ion source 456 can be driven to complete the transverse and longitudinal flexible displacement through the cooperative control of the fourth motor 42 and the fifth motor 452, the whole processing area of the large optical part in the optical part clamp 132 can be covered, the whole surface polishing processing requirement is further adapted, the ion source 456 can be accurately aligned with any processing position of the large optical part, the processing requirement is met, during application, the ion source 456 can generate a high-energy ion beam, the surface of a large optical part is bombarded by the ion beam, and trace removal of materials is realized, so that the polishing effect is achieved, in addition, the three-coordinate measuring head is arranged on the Z-axis motion mechanism of the ion beam polishing machine, the installation position of the large optical part can be detected in place, the processing coordinates are compensated according to the detection value, the requirement of the installation process on mechanical positioning precision is greatly reduced, when the optical part clamp 132 is transported in place and positioned by a limiting block, the requirement can be met only by roughly positioning the large optical part on the optical part clamp 132, the repeated precision of mechanical clamping positioning is usually within 0.1mm, the repeated precision of the positioning of the large optical part can be improved to within 0.02mm through the three-coordinate measuring head, the optical part clamp 132 of the device can adapt to different diameters, The clamping requirement of large optical parts with appearance and thickness is met, the mirror surface is in a side standing state during processing, the mirror surface is fixed reliably without looseness, the impact caused by vacuum pumping can be resisted, clamping stress is not generated on the large optical parts, the device is matched with the side door 3 through the overturning feeding device 1, the driving structures are uniformly distributed at the outer side of the part placing frame 131, the positions of the supporting main frame 121 and the like, the side feeding channels of the parts are not occupied, the problem that the feeding channels are blocked by a central driving overturning mode in the background art is solved, and in the overturning process, the arc-shaped sliding plate 123 is guided and limited through the arc-shaped rail 122, the part placement frame 131 is used for transversely limiting the optical part clamp 132 and limiting the bottom support after the driving roller 134 is turned over, and the multi-structure cooperation enables the large optical part to always keep a stable posture when turned over, so that the problem of left and right shaking of the part when the bottom is driven to turn over is solved; the feeding module 13 adopts a rolling feeding mode of the driving roller 134, the rolling friction is used for replacing sliding friction, feeding power is directly transmitted through a motor and a coupler, additional transmission parts are not needed to be additionally arranged, the overturning module 12 is directly meshed and transmitted with the arc-shaped rack 1242 through the gear 1244, acting force is evenly distributed along an arc surface, radial acting force is greatly reduced, the problem that larger radial acting force is generated by bottom driving is solved, all actions are automatically operated through motor driving, all motors are directly or indirectly transmitted with power through the coupler to realize flow connection, operators only need to complete initial placement of parts and motor starting control, operation flow is simplified, the problem of inconvenience in bottom driving operation is solved, the modules are arranged in a modularized layout in a horizontal and longitudinal compact mode, the overturning module 12 adopts an arc-shaped rail 122 and arc-shaped sliding plate 123 laminating overturning structure, the height dimension of the overturning module 11 is reduced through a convex matching structure, the overall structure is compact, the height dimension of the overturning mechanism is effectively controlled, the problem of the increase of the height dimension of the bottom driving overturning mechanism is solved, the combination of longitudinal displacement of the driving mechanism 4 and the adaptive design of the optical part fixture 132 enable the device to adapt to different dimensions, the requirements of the coordinate positioning device is further enlarged, the requirements of the positioning precision of the device are met, and the positioning precision is further improved, and the stability of the positioning device is guaranteed.
The technical scheme is that Siemens S7-1200 series PLC is selected as a main controller, the model ranges from S7-1214C to S7-1217C, the controller is arranged in an independent electrical control cabinet outside the vacuum chamber 2, the controller integrates a 5.7-10.4 inch TFT color display screen, and the main electronic components and the model specifications are as follows, namely a first electronic component, a second electronic component, a third electronic component, a fourth electronic component and a third electronic component, The fifth motor 452 is an alternating current servo motor, the model ranges from 1FL6042-1AF61-0AA1 to 1FL6064-1AF61-0AA1, the power range is 0.75-5.5kW, the rated rotation speed is 1000-3000rpm, each motor is provided with a worm gear reducer, the reduction ratio range is 5-50:1, the output shaft end of the motor is integrated with an incremental encoder, the resolution ratio of the encoder ranges from 1024 to 4096 lines, and the functions of flexibly adjusting rotation and stepless speed regulation can be realized; the photoelectric sensor selects a diffuse reflection type photoelectric switch with the model range of E3Z-LS63 to E3Z-LS83 and the detection distance of 5-30cm, the pressure sensor selects a miniature pressure transmitter with the model range of PT124G-111 to PT124G-121 and the measurement range of 0-10MPa, the linear displacement sensor selects a KTC series with the model range of KTC-250 to KTC-1000, the measurement stroke of 250-1000mm, the inductive proximity switch selects a model range of NI10-G18-AP6X to NI15-G30-AP6X and the detection distance of 10-15mm, the power module selects a PS1207 series, the input voltage of 380V three-phase alternating current is 24V direct current, the output current of 10-20A, the motor driver selects a Siemens V90 series, the circuit system is connected with and the power supply mode that 380V three-phase alternating current is connected with a power module in an electrical control cabinet, and the power module is converted into 24V direct current respectively, and the model is a PLC after the power module is converted into 24V direct current respectively, The PLC controller establishes communication connection with the motor drivers and the display screen through a Profinet bus, the motor drivers are connected with corresponding motors through power cables, encoders matched with the motors feed back rotating speed and position signals to the motor drivers through signal cables, the motors transmit the signals to the PLC controller to form a motor closed-loop control loop, accurate starting and stopping, rotating speed adjustment and stepless speed regulation of the motors are achieved, the mentioned photoelectric sensor is connected to a digital quantity input port of the PLC controller through the signal cables to transmit detection signals to the controller, a pressure sensor can be installed at a clamping position of an optical part clamp 132 according to specific application requirements during use, the pressure sensor is connected to an analog quantity input port of the PLC controller through the signal cables to feed back clamping pressure conditions, a sensor is connected to a connecting position of a movable frame 114 of a traversing module 11 and a bottom bracket 111, The arc slide plate 123 of the turnover module 12 is connected with the supporting main frame 121, a linear displacement sensor is arranged at the joint of the arc slide plate 123 and the supporting main frame 121, the linear displacement sensor is connected with an analog input port of a PLC controller through a signal cable and used for detecting the transverse movement distance and the turnover angle, an inductive proximity switch is arranged at the limit position of the clamp 132 of the optical part and connected with the edge of the side door 3, the digital input port of the PLC controller through the signal cable and used for detecting the on-off state of the side door 3 and the limit position of the clamp, the mountable sensors are all auxiliary automatic operation or auxiliary manual operation setting and can be used for selecting and installing application according to requirements, the whole circuit system takes the PLC controller as a core, carries out logic judgment by receiving signals transmitted by the sensors, and sends out corresponding control instructions to drive the motor drivers to act so as to control the motor operation, and the controller drives the equipment to operate state, The parameter data are transmitted to the display screen for display, and an operator can set parameters and send out control instructions through the display screen to complete automatic or semiautomatic operation control of the equipment.
During application, the front and back moving module can be arranged at the ion source 456 in the vacuum chamber 2 according to the use requirement, the front and back driving assembly 124 and the lateral moving module 11 are driven by a vacuum linear motor and a guide rail, and the longitudinal moving module is driven by a vacuum servo motor, a ball screw and a guide rail (two rows of left and right rows are arranged, and the two ends are connected to reduce the deformation of the cross beam and have synchronism during two rows of movement).
Meanwhile, during application, the second motor 112 and the third motor 1245 are connected with the worm gear reducer firstly and then connected with the coupler and the screw rod, so that driving torque is increased, moving speed is reduced, overturning and traversing safety of large optical parts is improved, and the worm gear reducer has a mechanical self-locking function, and safety accidents can not be caused when power is suddenly cut off and a system fails.
The above embodiments are not intended to limit the scope of the application, so that the equivalent changes of the structure, shape and principle of the application are covered by the scope of the application.

Claims (10)

1. The ion beam polishing machine for the large-sized optical parts is characterized by comprising a turnover feeding device (1) and a vacuum chamber (2), wherein the turnover feeding device (1) is arranged at the lower end of one side of the vacuum chamber (2), one side, close to the turnover feeding device (1), of the vacuum chamber (2) is provided with a side door (3), and a driving mechanism (4) is movably arranged in the vacuum chamber (2);
The overturning and feeding device (1) comprises a traversing module (11), the traversing module (11) is fixedly arranged on one side of the vacuum chamber (2), an overturning module (12) is fixedly arranged at the top moving end of the traversing module (11), and a feeding module (13) is movably arranged in the overturning module (12);
Send into module (13) including part and place frame (131), part place frame (131) welded mounting is in the top upset removal end of upset module (12), the inside sliding connection of part place frame (131) has optical part anchor clamps (132), the front side equidistant fixedly connected with concave frame (133) that are linear arrangement of optical part anchor clamps (132), the inboard rotation of concave frame (133) is connected with drive roller (134), is located concave frame (133) rear side fixed mounting at both ends first motor (135).
2. The ion beam polisher for large optical parts of claim 1 wherein the vacuum chamber (2) is fixedly provided with a bearing rail (136) at the front and rear of the inner lower end, the bearing rail (136) is arranged below the side door (3), and the driving roller (134) rolls on the top of the bearing rail (136) after entering the vacuum chamber (2).
3. The ion beam polisher of a large optical part as set forth in claim 2, wherein the traversing module (11) comprises a bottom bracket (111), the bottom bracket (111) is fixedly mounted at the lower end of one side of the vacuum chamber (2), a second motor (112) is fixedly mounted at one side of the bottom bracket (111) far away from the vacuum chamber (2), a first screw (113) is rotatably connected to the inside of the bottom bracket (111), a movable frame (114) is screwed to the outer surface of the first screw (113), the movable frame (114) is slidably connected to the top of the bottom bracket (111), and the overturning module (12) is fixedly mounted at the top of the movable frame (114).
4. The ion beam polisher of claim 3 wherein the movable frame (114) is fixedly mounted on two sides of the bottom of the movable frame (115), the support rails (116) are fixedly mounted on two ends of the top of the bottom support (111), and the movable frame (115) is slidably connected to the inner sides of the support rails (116).
5. The ion beam polisher for large optical parts of claim 4 wherein the inner bottom of the movable frame (115) is in equidistant linear arrangement and rotationally connected with rolling guide rollers (117), the rolling guide rollers (117) are positioned on the inner side of the support rail (116) and the bottom of the rolling guide rollers are in fit rolling connection with the inner top of the support rail (116), and the inner cavity of the support rail (116) and the section of the movable frame (115) are in convex shapes.
6. The ion beam polisher of a large optical part as set forth in claim 3, wherein the turnover module (12) comprises a supporting main frame (121), the supporting main frame (121) is welded at the top of the movable frame body (114), arc-shaped rails (122) are fixedly installed on two sides of the inside of the supporting main frame (121), arc-shaped sliding plates (123) are slidably connected to the inside of the arc-shaped rails (122), a driving assembly (124) is fixedly installed on the rear side of the inside of the supporting main frame (121), the driving assembly (124) is used for driving the arc-shaped sliding plates (123) in the arc-shaped rails (122) to slide and turn over, and the part placement frame (131) is welded on the inner sides of the arc-shaped sliding plates (123).
7. The ion beam polisher of claim 6 wherein the driving assembly (124) comprises a side seat (1241), an arc-shaped rack (1242) and a rotating shaft (1243), the side seat (1241) is fixedly mounted on one side of the top of the supporting main frame (121), the rotating shaft (1243) is rotatably connected to the upper end of the rear side of the supporting main frame (121), the arc-shaped rack (1242) is welded and mounted on one side of the arc-shaped slide plate (123) close to each other, two ends of the rotating shaft (1243) are fixedly connected with gears (1244), the gears (1244) are in meshed connection with the arc-shaped rack (1242), a third motor (1245) is fixedly mounted on the outer side of the side seat (1241), and the output end of the third motor (1245) is connected with one end of the rotating shaft (1243) through a coupling.
8. The ion beam polisher for large optical parts of claim 3 wherein the bottom of the bottom support (111) is fixedly connected with first support frames (118) in a linear arrangement at equal intervals on the front side and the rear side, fixing holes (119) are formed in the outer sides of the first support frames (118), the fixing holes (119) are countersunk holes, second support frames (5) are fixedly arranged at four corners of the bottom of the vacuum chamber (2), and the side faces of the second support frames (5) are isosceles trapezoids.
9. The large-scale optical part ion beam polisher of claim 1, wherein the driving mechanism (4) comprises a vertical rail (41), the vertical rail (41) is fixedly installed in the middle of the rear side in the vacuum chamber (2), a fourth motor (42) is fixedly installed at the top of the vertical rail (41), a second screw rod (43) is rotatably connected to the inside of the vertical rail (41), the top end of the second screw rod (43) is connected with the output end of the fourth motor (42) through a coupler, a longitudinally moving sliding block (44) is connected to the outer surface of the second screw rod (43) in a threaded mode, and a transversely moving assembly (45) is fixedly installed on the front face of the longitudinally moving sliding block (44).
10. The ion beam polisher of claim 9, wherein the traverse assembly (45) comprises a transverse rail (451), the transverse rail (451) is fixedly mounted on the front surface of the longitudinal sliding block (44), a fifth motor (452) is fixedly mounted at one end of the transverse rail (451), a third screw rod (453) is rotatably connected to the inside of the transverse rail (451), the end of the third screw rod (453) is connected to the output end of the fifth motor (452) through a coupler, a traverse sliding block (454) is in threaded connection with the outer surface of the third screw rod (453), a mounting seat (455) is fixedly mounted on the front surface of the traverse sliding block (454), and an ion source (456) is mounted at the lower end of the mounting seat (455) through a screw.
CN202610066619.5A 2026-01-19 2026-01-19 Large-scale optical part ion beam polishing machine Active CN121514986B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202610066619.5A CN121514986B (en) 2026-01-19 2026-01-19 Large-scale optical part ion beam polishing machine

Applications Claiming Priority (1)

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