CN120507291B - An AOI inspection equipment for copper-clad ceramic substrate inspection - Google Patents
An AOI inspection equipment for copper-clad ceramic substrate inspectionInfo
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- CN120507291B CN120507291B CN202511002387.9A CN202511002387A CN120507291B CN 120507291 B CN120507291 B CN 120507291B CN 202511002387 A CN202511002387 A CN 202511002387A CN 120507291 B CN120507291 B CN 120507291B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- Chemical & Material Sciences (AREA)
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- Immunology (AREA)
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- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses AOI (automated optical inspection) equipment for detecting a copper-clad ceramic substrate, which belongs to the technical field of AOI equipment and comprises a base, wherein a detection chamber is arranged on the base, a plurality of cover plates are arranged on the outer side of the base, and heat dissipation openings are formed in the cover plates. Through setting up panel turnover mechanism, utilize the linkage of linkage box, after the sucking disc adsorbs the copper-clad ceramic base plate, can automatic lifting cover copper ceramic base plate makes it be in the state of erectting, when carrying out optical detection to the copper-clad ceramic base plate like this, realize two-sided synchronous detection, in order to improve its detection efficiency, in the aspect of optical detection system, be provided with light filling mechanism, through setting up sunflower banks, realize multispectral illumination, sunflower banks integration RGBW four-color LED and ultraviolet, infrared special light source, realize multi-angle dynamic illumination under high-speed rotation state, when sunflower banks moves at a high speed, polychrome light source cooperation multi-angle illumination, compare in traditional white light, can discern ultraviolet apparent crackle more easily, infrared copper thickness of seeing.
Description
Technical Field
The invention belongs to the technical field of AOI detection equipment, and particularly relates to AOI detection equipment for detecting a copper-clad ceramic substrate.
Background
The AOI detection equipment for detecting the copper-clad ceramic substrate is an automatic detection system based on an optical imaging and artificial intelligent algorithm and is specially used for detecting surface defects of the copper-clad ceramic substrate (such as DCB and AMB substrates) including copper layer scratches, cracks, uneven thickness, alignment deviation, ceramic cracks, pollutants and the like. The core technology comprises high-resolution optical imaging (such as linear array CCD or multispectral imaging), a deep learning defect classification algorithm, a precise motion control system and a three-dimensional morphology reconstruction technology. Compared with the traditional manual visual inspection or two-dimensional AOI, the device can adapt to the high reflection surface characteristics of a ceramic substrate, enhance the defect recognition rate by combining an infrared or confocal sensing technology, achieve the detection accuracy of micron level, integrate an SPC statistical analysis function, meet the high-reliability property inspection requirement before packaging a power semiconductor module, and be widely applied to the high-end electronic manufacturing fields such as new energy vehicles, photovoltaic inverters and IGBT modules.
The existing copper-clad ceramic substrate AOI detection technology mainly has the following technical defects:
The traditional horizontal placement detection mode can finish double-sided detection only by two independent detections, the detection efficiency is low, and the average time consumption is increased by more than 40%;
The fixed angle white light illumination system has obvious detection blind areas, the omission ratio of microcracks (< 10 mu m) is up to 18%, and the quantitative detection of key parameters such as copper thickness cannot be realized;
The static illumination mode causes the illumination attenuation of the edge area of the substrate to reach 35%, and the detection consistency is seriously affected;
The mechanical conveying system adopts a horizontal turn-over design, the breakage rate of the substrate is generally more than 0.1%, and positioning accumulated errors exist.
Disclosure of Invention
In order to overcome the defects, the invention provides AOI detection equipment for detecting the copper-clad ceramic substrate, which solves the problems in the prior art.
In order to achieve the above purpose, the invention provides the following technical scheme that the AOI detection equipment for detecting the copper-clad ceramic substrate comprises:
The device comprises a foundation base, wherein a detection chamber is arranged on the foundation base, a plurality of cover plates are arranged on the outer side of the foundation base, heat dissipation openings are formed in the cover plates, a discharging cabinet door and a feeding cabinet door are arranged on the outer wall of the detection chamber, two groups of heat dissipation ports are formed in the top of the detection chamber, an operation panel and a plurality of groups of operation knobs are arranged on one side of the detection chamber, a light-shading observation window is further arranged on the outer wall of the detection chamber, and a turning plate mechanism and a light supplementing mechanism are arranged in the detection chamber;
The light supplementing mechanism comprises two vertical partition boards fixedly connected in a detection chamber, the two vertical partition boards are used as AOI detection operation areas, a reciprocating threaded rod is rotationally connected to the vertical partition boards, a servo motor is arranged in the vertical partition boards and used for controlling and driving the reciprocating threaded rod, two matched sliding rods are fixedly connected to the vertical partition boards, the matched sliding rods are distributed on two sides of the reciprocating threaded rod and are symmetrical with each other along the axis of the reciprocating threaded rod, wing-shaped nuts are connected to the reciprocating threaded rod in a threaded mode, sliding sleeves are welded to two ends of the wing-shaped nuts, the sliding sleeves are connected to the matched sliding rods on one side in a sliding mode, a high-speed motor is arranged on the wing-shaped nuts, and a sunflower lamp set is arranged on the high-speed motor.
As a further scheme of the invention, four LED light supplementing plates are arranged on the vertical partition plate, and the four LED light supplementing plates are positioned at two sides of the reciprocating threaded rod and are biased towards two ends of the reciprocating threaded rod.
According to the further scheme, fixed rails are arranged on two sides of the vertical partition board, a light shielding plate is connected in the fixed rails in a sliding mode, three-stage electric telescopic rods are arranged in the detection chamber corresponding to the light shielding plate, and the output ends of the three-stage electric telescopic rods are fixedly connected with the light shielding plate.
As a further scheme of the invention, the sunflower lamp group is integrated on the rotary annular structure by the multicolor LED and is connected with the high-speed motor, and the sunflower lamp group is powered by the slip ring so as to realize continuous rotation at any angle.
The invention further provides a turnover plate mechanism which comprises two sliding clamping plates fixedly connected in a detection chamber, wherein sliding blocks are connected in the sliding clamping plates in a sliding manner, a linkage box is fixedly connected to one side, close to each other, of each sliding block, a sector plate is fixedly connected to one side, close to each other, of each linkage box, an arc-shaped groove is formed in each sector plate, a swing arm is rotatably connected to the geometric rotation center of each sector plate, a limit button is arranged on each swing arm, the limit buttons are connected in the arc-shaped grooves in a sliding manner, a sucker plate is fixedly connected between the two swing arms, and a plurality of suckers are arranged at the bottoms of the sucker plates.
According to the invention, one side of the linkage box is provided with a reversible synchronous motor, the linkage box is rotationally connected with a worm wheel, the output end of the reversible synchronous motor penetrates through the linkage box and is coaxially and fixedly connected with a worm, the worm is meshed with the worm wheel, and a worm wheel rotating shaft penetrates through the linkage box and the sector plate and is coaxially and fixedly connected with the swing arm.
According to the invention, the worm gear is coaxially and fixedly connected with the driving bevel gear, the driven bevel gear is rotatably connected with the inner bottom of the linkage box, the driving bevel gear is meshed with the driven bevel gear, the driving bevel gear is rotatably connected with the bottom of the linkage box, the driven bevel gear is coaxially and fixedly connected with the driving gear, the sliding clamping plate is internally provided with a matched toothed plate, and the matched toothed plate is meshed with the driving gear on the corresponding side.
Compared with the prior art, the invention has the beneficial effects that:
Through setting up panel turnover mechanism, utilize the linkage of linkage box, the sucking disc is after adsorbing the copper-clad ceramic base plate, can automatic lifting cover copper ceramic base plate makes it be in the state of erectting, when carrying out optical detection to the copper-clad ceramic base plate like this, realize the synchronous detection of two sides, in order to improve its detection efficiency, in the aspect of optical detection system, be provided with light filling mechanism, through setting up sunflower banks, realize multispectral illumination, integrated RGBW four-color LED of sunflower banks and ultraviolet, infrared special light source, realize multi-angle dynamic illumination under high-speed rotation (2400 RPM) state, when sunflower banks high-speed removal, the polychrome light source cooperates multi-angle illumination, can discern ultraviolet demonstration crackle more easily, infrared copper thickness of seeing than traditional white light.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic diagram showing the internal structure of a detection chamber according to the present invention;
FIG. 3 is a schematic perspective view of a vertical bulkhead portion of the invention;
FIG. 4 is a schematic perspective view of a panel turnover mechanism part of the present invention;
FIG. 5 is a schematic view of another perspective view of a panel turnover mechanism portion of the present invention;
FIG. 6 is a schematic perspective view of a sliding card portion of the present invention;
FIG. 7 is a schematic perspective view of a linkage box according to the present invention;
fig. 8 is a schematic view showing a three-dimensional internal structure of the interlocking box of the present invention.
The device comprises a base, a detection chamber, a cover plate, a discharging cabinet door, a feeding cabinet door, a heat dissipation port, a 7, an operation panel, an 8, an operation knob, a9, a shading observation window, a 10, a vertical partition plate, a 11, a reciprocating threaded rod, a 12, a matched sliding rod, a 13, a wing nut, a 14, a high-speed motor, a 15, a sunflower lamp group, a 16, an LED light supplementing plate, a 17, a fixed track, a 18, a shading plate, a 19, a three-stage electric telescopic rod, a 20, a sliding clamping plate, a 21, a sliding block, a 22, a linkage box, a 23, a sector plate, a 24, an arc groove, a 25, a swing arm, a 26, a limiting button, a 27, a sucker plate, a 28, a sucker, a 29, a reversible synchronous motor, a 30, a worm gear, a 31, a worm, a 32, a driving bevel gear, a 33, a driven bevel gear, a 34, a driving gear and a 35.
Detailed Description
The technical scheme of the patent is further described in detail below with reference to the specific embodiments.
Example 1
As shown in fig. 1, in a first embodiment of the present invention, an AOI device for detecting a copper-clad ceramic substrate is provided in this embodiment, which can implement functions such as basic device monitoring, autonomous heat dissipation, substrate observation operation, etc., and includes a base 1, a detection chamber 2 disposed on the base 1, a plurality of cover plates 3 disposed on the outer side of the base 1, heat dissipation openings disposed on the cover plates 3, a discharge cabinet door 4 and a feed cabinet door 5 disposed on the outer wall of the detection chamber 2, two sets of heat dissipation ports 6 disposed on the top of the detection chamber 2, an operation panel 7 and multiple sets of operation knobs 8 disposed on one side of the detection chamber 2, a light-shielding observation window 9 disposed on the outer wall of the detection chamber 2, and a flap mechanism and a light-compensating mechanism disposed in the detection chamber 2.
Specifically, the base 1 provides the whole support of the equipment, integrates the core transmission and control system, ensures the stability and the precision in the detection process, the detection chamber 2 provides a closed optical detection environment, integrates imaging, illumination and auxiliary mechanisms, ensures the detection safety and consistency, and the plurality of cover plates 3 on the base 1 correspond to the positions of the transmission system and the control system and provide heat dissipation and access positions for the transmission system and the control system, the heat dissipation port 6 at the inner top of the detection chamber 2 mainly provides heat dissipation for the power supply part in the detection chamber 2, the detection personnel can open and close the equipment and the monitoring parameters through the operation panel 7 and the operation knob 8, the light-shielding observation window 9 is provided with optical glass and is plated with an infrared/ultraviolet cut-off film so as to avoid the interference of stray light on the imaging of the camera, and meanwhile, the slidable light shielding plate 18 is arranged to be closed during the detection so as to avoid the influence of ambient light.
Example 2
As shown in fig. 2-3, in a second embodiment of the present invention, unlike the previous embodiment, the present invention provides a light supplementing function of an AOI detection device for copper-clad ceramic substrate detection, which implements multi-angle dynamic illumination of the copper-clad ceramic substrate through a sunflower lamp set 15 that rotates at a high speed and reciprocates, and includes two vertical partition plates 10 fixedly connected in a detection chamber 2, an area between the two vertical partition plates 10 is used as an AOI detection operation area, the vertical partition plates 10 are rotatably connected with a reciprocating threaded rod 11, a servo motor is built in the vertical partition plates 10 and is used for controlling and driving the reciprocating threaded rod 11, two matching slide rods 12 are fixedly connected with the vertical partition plates 10, the two matching slide rods 12 are distributed on two sides of the reciprocating threaded rod 11 and are axisymmetric with the reciprocating threaded rod 11, two ends of the wing nuts 13 are welded with sliding sleeves, the sliding sleeves are slidably connected to the matching slide rods 12 on the corresponding sides, a high-speed motor 14 is arranged on the wing nuts 13, and the high-speed motor 14 is provided with the sunflower lamp set 15.
RGBW four-color LEDs and ultraviolet and infrared special light sources are integrated in a sunflower lamp group 15 in the device, a static multi-angle light source is used in a traditional illumination mode, a camera shoots a synthetic image for multiple times, time is consumed, imaging detection of the device is complex, high-speed autorotation scanning of the sunflower lamp group 15 is utilized, multiple times of shooting is carried out, all illumination angles can be covered in a single exposure period by high-speed rotation of the light source, and effectiveness is greatly improved.
The rotation speed of the sunflower lamp set 15 is limited to 1200RPM to 2400RPM, and the camera exposure is triggered every 5 degrees, namely 72 times/rotation, by the encoder, the specified light source in the sunflower lamp set 15 is used at different angles, so that the surface defects of different types of copper-clad ceramic substrates can be detected, for example, at the angle of 90-180 degrees, the light source mode is adjusted to infrared light and diffuse light, and whether the thickness of the copper layer is uniform or not can be detected.
The servo motor in the vertical partition plate 10 drives the reciprocating threaded rod 11 to rotate, wing-shaped nuts 13 on the reciprocating threaded rod 11 can move along the axial direction of the reciprocating threaded rod 11, sliding sleeves are arranged on two sides of each wing-shaped nut 13, the purpose of the sliding sleeves is to match with sliding rods 12, stability of the wing-shaped nuts 13 in movement is guaranteed, and mechanical vibration to the whole equipment caused by high-speed rotation of a sunflower lamp set 15 is relieved to a certain extent.
The rest of the structure is the same as in example 1.
Example 3
As shown in fig. 2-3, in a third embodiment of the present invention, unlike the previous embodiment, the present embodiment provides a main purpose of the light shielding plate 18 of the AOI device for detecting copper-clad ceramic substrate and a power supply mode of the sunflower lamp set 15, so that the sunflower lamp set 15 can still ensure stable power supply when rotating at high speed, the light shielding plate 18 can shield ambient light when the sunflower lamp set 15 commutates to avoid stray light from polluting images, the present invention includes, both sides of the vertical partition 10 are provided with a fixed rail 17, the fixed rail 17 is slidably connected with the light shielding plate 18, a three-stage electric telescopic rod 19 is disposed in the detection chamber 2 corresponding to the position of the light shielding plate 18, an output end of the three-stage electric telescopic rod 19 is fixedly connected with the light shielding plate 18, the sunflower lamp set 15 is integrated on a rotary ring structure by a multicolor LED, and is connected with the high-speed motor 14, so that the sunflower lamp set 15 can realize continuous rotation at any angle, in order to reduce wear of parts caused by mechanical impact, the sunflower lamp set 15 needs to slow down when moving to a unidirectional stroke end, the light is stopped when the speed of the sunflower lamp set 15 is stopped, the light is stopped at the same time, and the three-stage LED is stopped, and the light is stopped from rotating at a fast speed, and the LED is stopped, and the light is stopped.
The rest of the structure is the same as in embodiment 2.
Example 4
As shown in fig. 4 to 8, which are different from the previous embodiment, this embodiment provides an automatic turning plate function of an AOI inspection apparatus for inspecting a copper-clad ceramic substrate, which can automatically turn over the copper-clad ceramic substrate to be in an upright state before the AOI inspection is performed, and includes a turning plate mechanism including two sliding clamping plates 20 fixedly connected in an inspection chamber 2, a sliding block 21 is slidably connected in the sliding clamping plates 20, one sides of the two sliding blocks 21 close to each other are fixedly connected with a linkage box 22, one sides of the two linkage boxes 22 close to each other are fixedly connected with a sector plate 23, an arc slot 24 is formed on the sector plate 23, a swing arm 25 is rotatably connected at a geometric rotation center of the sector plate 23, a limit button 26 is provided on the swing arm 25, the limit button 26 is slidably connected in the arc slot 24, the suction cup plates 27 are fixedly connected between the two swing arms 25, a plurality of suction cups 28 are arranged at the bottoms of the suction cup plates 27, a reversible synchronous motor 29 is arranged on one side of the linkage box 22, a worm wheel 30 is connected in a rotating mode in the linkage box 22, an output end of the reversible synchronous motor 29 penetrates through the linkage box 22 and is coaxially and fixedly connected with a worm 31, the worm 31 is meshed with the worm wheel 30, a rotating shaft of the worm wheel 30 penetrates through the linkage box 22 and the sector plate 23 and is coaxially and fixedly connected with the swing arms 25, a driving bevel gear 32 is coaxially and fixedly connected with the worm wheel 30, a driven bevel gear 33 is rotationally connected with the inner bottom of the linkage box 22, the driving bevel gear 32 is meshed with the driven bevel gear 33, a driving gear 34 is rotationally connected with the bottom of the linkage box 22, a matched toothed plate 35 is arranged in the sliding clamping plate 20, and the matched toothed plate 35 is meshed with the driving gear 34 on the corresponding side.
In the initial state, sucking disc board 27 and swing arm 25 are in the horizontality, sucking disc board 27 provides stable suction for sucking disc 28 through the inside negative pressure interface of junction device, sucking disc 28 can be to covering copper ceramic substrate and adsorb stably, adopt sucking disc 28 absorption's control method to compare in ordinary centre gripping operation, can avoid the circumstances such as copper ceramic substrate fracture that the centre gripping atress is uneven to lead to, the back is adsorbed to sucking disc 28, reversible synchronous motor 29 can drive worm 31 rotation, the worm wheel 30 with worm 31 meshing will take place the rotation, when worm wheel 30 rotates, swing arm 25 with coaxial fixed connection just can rotate, owing to offer arc wall 24 on the sector plate 23, limit button 26 on the swing arm 25 is located arc wall 24, owing to arc wall 24's biggest angular deflection is 90, so swing arm 25's biggest rotation angle is 90, at worm wheel 30 rotation, and make swing arm 25, sucking disc board 27 rotate, copper ceramic substrate will be in vertical state.
Because the drive bevel gear 32 is arranged at one end of the worm 31, the drive bevel gear 32 rotates along with the rotation of the worm 31, the driven bevel gear 33 meshed with the drive bevel gear 32 rotates, the driving gear 34 positioned at the bottom of the linkage box 22 is fixedly connected with the driven bevel gear 33 coaxially, the driving gear 34 is synchronously driven, and the whole linkage box 22 and the copper-clad ceramic substrate move towards the middle part of the sliding clamping plate 20 due to the meshing of the driving gear 34 and the matching toothed plate 35 in the sliding clamping plate 20, so that the copper-clad ceramic substrate can move towards the middle part of the sliding clamping plate 20 when rotating to a vertical state, and the aim of the driving bevel gear is to ensure that the distance between the copper-clad ceramic substrate and the sunflower lamp groups 15 at two sides is the same when detecting.
The rest of the structure is the same as in embodiment 3.
In conclusion, the two sides of the vertical substrate are piled into a detection mode of arranging light sources to be matched with a camera, double-sided detection can be completed through single clamping, and compared with a traditional detection mode, the detection efficiency is greatly improved.
While the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.
Claims (4)
1. An AOI inspection apparatus for inspecting a copper-clad ceramic substrate, comprising:
The device comprises a foundation base (1), wherein a detection chamber (2) is arranged on the foundation base (1), a plurality of cover plates (3) are arranged on the outer side of the foundation base (1), heat dissipation openings are formed in the cover plates (3), a discharging cabinet door (4) and a feeding cabinet door (5) are arranged on the outer wall of the detection chamber (2), two groups of heat dissipation ports (6) are formed in the top of the detection chamber (2), an operation panel (7) and a plurality of groups of operation knobs (8) are arranged on one side of the detection chamber (2), a light-shielding observation window (9) is further arranged on the outer wall of the detection chamber (2), and a turning plate mechanism and a light supplementing mechanism are arranged in the detection chamber (2);
The light supplementing mechanism comprises two vertical partition plates (10) fixedly connected in a detection chamber (2), wherein the area between the two vertical partition plates (10) is used as an AOI detection operation area, a reciprocating threaded rod (11) is rotationally connected to the vertical partition plates (10), a servo motor is arranged in the vertical partition plates (10) and used for controlling and driving the reciprocating threaded rod (11), two matched sliding rods (12) are fixedly connected to the vertical partition plates (10), the two matched sliding rods (12) are distributed on two sides of the reciprocating threaded rod (11) and are symmetrical with each other along the axis of the reciprocating threaded rod (11), wing nuts (13) are connected to the threads on the reciprocating threaded rod (11), sliding sleeves are welded at two ends of each wing nut (13), the sliding sleeves are connected to the matched sliding rods (12) on one side correspondingly, a high-speed motor (14) is arranged on each wing nut (13), and a sunflower lamp group (15) is arranged on each high-speed motor (14);
The turnover plate mechanism comprises two sliding clamping plates (20) fixedly connected in a detection chamber (2), sliding blocks (21) are connected in the sliding clamping plates (20), a plurality of sucking discs (28) are fixedly connected to one sides of the sliding blocks (21) which are close to each other, fan-shaped plates (23) are fixedly connected to one sides of the two sliding blocks (22) which are close to each other, arc-shaped grooves (24) are formed in the fan-shaped plates (23), swing arms (25) are rotatably connected to the geometric rotation center of the fan-shaped plates (23), limit buttons (26) are arranged on the swing arms (25), sucking disc plates (27) are fixedly connected between the limit buttons (26) in the arc-shaped grooves (24), a plurality of sucking discs (28) are arranged at the bottoms of the sucking disc plates (27), a reversible synchronous motor (29) is arranged on one side of the sliding block (22), worm wheels (30) are connected in a rotating mode, output ends of the reversible synchronous motor (29) penetrate through the worm wheels (22) and are connected with the worm wheels (31) in a coaxial mode, and the worm wheels (30) are fixedly connected with the worm wheels (23) in a penetrating mode, and the worm wheels (30) are fixedly meshed with the swing arms (25), the worm gear (30) is coaxially and fixedly connected with a drive bevel gear (32), a driven bevel gear (33) is rotationally connected to the inner bottom of the linkage box (22), the drive bevel gear (32) is meshed with the driven bevel gear (33) mutually, a driving gear (34) is rotationally connected to the bottom of the linkage box (22), the driven bevel gear (33) is coaxially and fixedly connected with the driving gear (34), a matched toothed plate (35) is arranged in the sliding clamping plate (20), and the matched toothed plate (35) is meshed with the driving gear (34) on the corresponding side.
2. The AOI detection device for copper-clad ceramic substrate detection according to claim 1, wherein four LED light supplementing plates (16) are arranged on the vertical partition plate (10), and the four LED light supplementing plates (16) are positioned on two sides of the reciprocating threaded rod (11) and are biased towards two ends of the reciprocating threaded rod (11).
3. The AOI detection device for copper-clad ceramic substrate detection according to claim 2, wherein fixed rails (17) are arranged on two sides of the vertical partition board (10), a light shielding plate (18) is connected in a sliding mode in the fixed rails (17), a three-stage electric telescopic rod (19) is arranged in the detection chamber (2) corresponding to the position of the light shielding plate (18), and the output end of the three-stage electric telescopic rod (19) is fixedly connected with the light shielding plate (18).
4. The AOI detection device for copper-clad ceramic substrate detection according to claim 3, wherein the sunflower lamp group (15) is integrated on a rotary ring structure by multicolor LEDs and is connected with a high-speed motor (14), and the sunflower lamp group (15) is powered by slip rings to realize continuous rotation at any angle.
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| CN202511002387.9A CN120507291B (en) | 2025-07-21 | 2025-07-21 | An AOI inspection equipment for copper-clad ceramic substrate inspection |
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| CN202511002387.9A CN120507291B (en) | 2025-07-21 | 2025-07-21 | An AOI inspection equipment for copper-clad ceramic substrate inspection |
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| CN120507291B true CN120507291B (en) | 2025-10-17 |
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| CN218726743U (en) * | 2022-11-01 | 2023-03-24 | 常州凯得新材料科技有限公司 | Foreign matter detection device is used in polyethylene film production |
| CN219891123U (en) * | 2023-03-13 | 2023-10-24 | 杭州闻创电子有限公司 | Automatic optical detection device |
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