CN120184066A - A semiconductor packaging fixture calibration device - Google Patents
A semiconductor packaging fixture calibration device Download PDFInfo
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- CN120184066A CN120184066A CN202510666795.8A CN202510666795A CN120184066A CN 120184066 A CN120184066 A CN 120184066A CN 202510666795 A CN202510666795 A CN 202510666795A CN 120184066 A CN120184066 A CN 120184066A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0438—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of calibration equipment, and provides a semiconductor packaging jig calibration equipment which can be matched with a semiconductor packaging jig to form calibration, and adopts a mode of filling a positioning hole in the semiconductor packaging jig to simulate the semiconductor packaging jig to form auxiliary positioning simulation on a packaged semiconductor product, so that on one hand, the position test of the positioning hole on the semiconductor packaging jig can be realized, on the other hand, the size detection of the positioning hole on the semiconductor packaging jig can be also realized, the calibration detection data is richer and the practicality is better, including loading board and encapsulation tool frame, still include the mounting structure, fixedly connected with main part frame on the loading board is provided with the storage supply system in the main part frame, is provided with low temperature wax oil in the storage supply system, and the mounting structure includes the installing frame, and installing frame fixed connection is provided with the centre gripping subassembly that is used for the location of encapsulation tool frame in the installing frame, and sliding connection has the lifting ring in the installing frame.
Description
Technical Field
The invention relates to the technical field of calibration equipment, in particular to semiconductor packaging jig calibration equipment.
Background
As is well known, a semiconductor packaging jig is a tool used in a semiconductor packaging process, and is mainly used as a tool for assisting in controlling a position, because the semiconductor packaging jig has a certain error, and the error changes with the passage of time, the jig is required to be calibrated regularly, the calibration plays a key role in ensuring the precision and the performance of the semiconductor packaging jig and further ensuring the quality of a semiconductor product, and in order to facilitate the calibration of the jig, a semiconductor packaging jig calibration device is provided.
Through retrieval, the patent with the Chinese patent publication number of CN215578455U and the patent with the Chinese patent publication number of CN222562665U respectively disclose a pressure calibration jig and a calibration jig for chip mounting equipment and semiconductor processing equipment, wherein the pressure calibration jig and the semiconductor processing equipment are approximately described as comprising a lower bottom plate, a sensor protection seat and an upper bottom plate, wherein the lower bottom plate, the sensor protection seat and the upper bottom plate form a detachable connection structure, the sensor protection seat is positioned between the lower bottom plate and the upper bottom plate, a pressure sensor is arranged on the lower bottom plate and is positioned in the sensor protection seat, an opening matched with the pressure sensor is formed in the middle part of the upper bottom plate, the upper part of the pressure sensor extends into the opening, the upper surface of the pressure sensor is not higher than the upper edge of the opening, and when the pressure sensor is used, the lower bottom plate, the sensor protection seat and the upper bottom plate are combined together, the pressure sensor is just packaged in the inside, the sensor can be effectively protected from external force except the pressure to be tested when testing the pressure, the testing accuracy is improved, the suction nozzle pressure can be effectively calibrated when different chips are mounted and switched, the suction nozzle pressure can be roughly described as comprising a first calibration piece, the first calibration piece comprises a bearing plate and a connecting part positioned at the first side of the bearing plate, a notch part and a first clamping part are arranged on the bearing plate, the connecting part is used for being detachably connected to a wafer bearing table, the notch part corresponds to the first groove position on the wafer bearing table, a second calibration piece comprises a second clamping part and a third clamping part, the second clamping part is used for being detachably clamped to the first clamping part, the third clamping part is used for being detachably clamped to a mechanical arm, and when the calibration piece is used, the calibration piece and the semiconductor processing equipment, the position calibration between the wafer bearing table and the mechanical arm can be realized.
Although the above-mentioned prior art solution can perform auxiliary calibration on the positions and movement patterns of the chip and the semiconductor in the preparation process, the targets of the alignment of the chip and the wafer carrier and the mechanical arm are the positions between the chip and the wafer carrier, respectively, and the jig used for positioning cannot form effective and clear calibration measures, so that the jig is difficult to be applied to the detection of the jig, and the size of the jig is the core for determining the packaging quality of the semiconductor product.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the calibration equipment for the semiconductor packaging jig, which can be matched with the semiconductor packaging jig to form calibration, and the auxiliary positioning simulation is formed for the packaged semiconductor product by adopting a mode of simulating the filling of the semiconductor packaging jig relative to the positioning holes in the semiconductor packaging jig, so that the position test of the positioning holes on the semiconductor packaging jig can be realized, the size detection can be formed on the positioning holes on the semiconductor packaging jig, and the calibration detection data is richer and better in practicability.
The semiconductor packaging jig calibration device comprises a bearing plate and a packaging jig frame, and further comprises a placement structure, wherein a main body frame is fixedly connected to the bearing plate, a storage supply system is arranged in the main body frame, low-temperature wax oil is arranged in the storage supply system, the placement structure comprises a mounting frame, the mounting frame is fixedly connected to the top end of the main body frame, a clamping assembly used for positioning the packaging jig frame is arranged in the mounting frame, a lifting ring is slidably connected in the mounting frame, the lifting ring is used for supporting the packaging jig frame, two lifting vertical frames are slidably connected to the main body frame, driving rings are slidably connected to the top ends of the two lifting vertical frames, two elastic springs are fixedly connected to the two lifting vertical frames, the four elastic springs are fixedly connected with the driving rings, a driving system and a transmission system are respectively arranged in the main body frame and the mounting frame, the driving system is used for driving the storage supply system, the transmission system is used for driving the driving ring between the driving assembly and the clamping assembly, and the lifting ring is arranged below the two lifting rings, and the two lifting rings are arranged in a linkage detecting device.
Preferably, the clamping assembly comprises two first clamping rotating frames and two second clamping rotating frames, the two first clamping rotating frames and the two second clamping rotating frames are both connected with the installation frame in a rotating mode, two first driving screws and two second driving screws are connected in the installation frame in a sliding mode, spiral plates are fixedly connected in the two first clamping rotating frames and the two second clamping rotating frames respectively, and the four spiral plates are matched with the two first driving screws and the two second driving screws respectively.
Preferably, the transmission system comprises two synchronous plates, wherein the synchronous plates are fixedly connected with guide sleeves, the guide sleeves are fixedly connected with the mounting frame in a sliding manner, the guide sleeves are fixedly connected with vertical springs, pushing columns are fixedly connected with the tops of the vertical springs, the pushing columns are respectively and slidably connected with the synchronous plates, two synchronous plates are fixedly connected with two reset springs, the reset springs are fixedly connected with the tops of the mounting frame, and the pushing columns are matched with the driving ring.
Preferably, the storage supply system comprises an elastic storage bag and a two-way temperature-regulating pipe, wherein the elastic storage bag is fixedly connected with a mounting plate, the mounting plate is fixedly connected in the main body frame through a plurality of assembly bolts, a plurality of normal heating rings are fixedly connected outside the elastic storage bag, the two-way temperature-regulating pipe is arranged in the mounting frame, a plurality of wax through holes are formed in the mounting frame, the wax through holes and the two-way temperature-regulating pipe are arranged in a staggered manner, a sedimentation tank is formed in the main body frame, a central hole is formed in the sedimentation tank, and the central hole is matched with the elastic storage bag.
Preferably, the driving system comprises a bottom supporting plate and two transmission connecting frames, the top end of the bottom supporting plate is fixedly connected with the bottom end of the elastic storage bag, the bottom supporting plate is slidably connected in the main body frame, two transmission rods are fixedly connected at two ends of the bottom supporting plate and are respectively connected with the two transmission connecting frames, the two transmission connecting frames are respectively connected with the main body frame in a rotating mode, and the two transmission connecting frames are respectively connected with the two lifting vertical frames.
Preferably, the two lifting vertical frames are internally and respectively connected with a mounting cylinder in a rotating manner, the two optical detectors are respectively connected with the two mounting cylinders, threaded rings are externally and respectively connected with the two mounting cylinders in a threaded manner, and the two threaded rings are respectively fixedly connected with the lifting vertical frames.
Preferably, the linkage system comprises two driving bars and two transmission bars, wherein the driving bars are respectively and fixedly connected with the two driving bars in the lifting vertical frames, the two driving bars are externally and fixedly connected with guiding overhanging frames, the two guiding overhanging frames are fixedly connected with the main body frame, the two guiding overhanging frames are internally and rotatably connected with the two linkage bars, the two linkage bars are respectively connected with the two driving bars, the two transmission bars are respectively connected with the two linkage bars, the two transmission bars are respectively and fixedly connected with supporting lifting columns, the two supporting lifting columns are respectively and fixedly connected with lifting rings, connecting springs are respectively and fixedly connected with the two supporting lifting columns, and the two connecting springs are respectively connected with the two transmission bars.
Preferably, the spiral plate in the first clamping rotating frame and the spiral plate in the two second clamping rotating frames are opposite in spiral direction.
Preferably, the supporting lifting column is made of transparent materials, an inner driving strip port and an outer driving strip port are formed in the linkage strip frame, and transmission columns are arranged in the inner driving strip port and the outer driving strip port and are respectively fixedly connected with the driving strip rod and the transmission strip rod.
Preferably, the main body frame is fixedly connected with the bearing plate through a plurality of connecting bolts, and the four corners of the bearing plate are fixedly connected with fixed mounting lugs.
Compared with the prior art, the invention provides the semiconductor packaging jig calibration equipment, which has the following beneficial effects:
(1) According to the invention, through the arrangement of the placement structure, the matched packaging jig frame forms a corresponding bracket and a positioning structure, so that the subsequent calibration and detection of the packaging jig frame are convenient.
(2) According to the invention, through the design of the storage supply system, the wax oil can be extruded and injected by the matched packaging jig frame, so that the wax oil can be filled into the positioning holes on the packaging jig frame for subsequent corresponding detection.
(3) According to the invention, through the arrangement of the optical detector, wax oil formed by injection molding relative to the packaging jig frame can be correspondingly detected, so that the purpose of detecting and calibrating the packaging jig frame is achieved.
Drawings
FIG. 1 is a schematic view of a partially sectioned perspective structure of the present invention;
FIG. 2 is a schematic view of a partial enlarged structure of the present invention at A in FIG. 1;
FIG. 3 is a schematic view of a partially enlarged structure of the present invention at B in FIG. 1;
FIG. 4 is a schematic perspective view of the driving bar, the guiding overhanging frame and the linkage bar of the invention;
FIG. 5 is a schematic exploded perspective view of the drive bar, guide outrigger, linkage bar, etc. of the present invention;
FIG. 6 is a schematic perspective view of the whole structure of the present invention;
FIG. 7 is a schematic perspective view of the whole structure of the present invention after the placement of the packaging jig frame;
FIG. 8 is a schematic structural view of a body frame of the present invention;
FIG. 9 is a schematic perspective view of the mounting frame, first clamping turret and second clamping turret of the present invention;
FIG. 10 is a schematic perspective view of the mounting frame, spiral plate, second clamping turret, etc. of the present invention;
FIG. 11 is a schematic perspective view of another angle of the whole of the present invention;
FIG. 12 is a schematic perspective view of the whole bottom view of the present invention;
FIG. 13 is a schematic view of a vertical lifting frame and spring engaged arrangement of the present invention;
FIG. 14 is a schematic cross-sectional perspective view of the mounting frame and the bi-directional temperature tube of the present invention mated;
fig. 15 is a schematic view of a partially sectioned perspective view of the cooperation of the synchronizing plate, guide sleeve, standing spring, etc. of the present invention.
In the figure, 1, a bearing plate; 2, a packaging jig frame, 3, a main body frame, 4, a mounting frame, 5, a lifting ring, 6, a lifting vertical frame, 7, a driving ring, 8, an elastic spring, 9, an optical detector, 10, a first clamping rotating frame, 11, a second clamping rotating frame, 12, a first driving screw, 13, a second driving screw, 14, a spiral plate, 15, a synchronous plate, 16, a guide sleeve, 17, an upright spring, 18, a pushing column, 19, a reset spring, 20, an elastic storage bag, 21, a bidirectional temperature regulating tube, 22, a mounting plate, 23, an assembly bolt, 24, a normal heating ring, 25, a wax passing hole, 26, a settling tank, 27, a central hole, 28, a bottom supporting plate, 29, a transmission connecting frame, 30, a transmission rod, 31, a mounting cylinder, 32, a threaded ring, 33, a driving rod, 34, a transmission rod, 35, a guiding overhanging frame, 36, a linkage rod, 37, a supporting lifting column, 38, a connecting bolt, 39, a fixed mounting lug, 40 and a transmission column.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-15, a semiconductor packaging jig calibration apparatus includes a carrier plate 1 and a packaging jig frame 2, and further includes a placement structure, wherein a main body frame 3 is fixedly connected to the carrier plate 1, a storage and supply system is provided in the main body frame 3, a low-temperature wax oil is provided in the storage and supply system, the storage and supply system includes an elastic storage bag 20 and a bidirectional temperature-adjusting tube 21, a mounting plate 22 is fixedly connected to the elastic storage bag 20, the mounting plate 22 is fixedly connected to the main body frame 3 through a plurality of mounting bolts 23, a plurality of normal heating rings 24 are fixedly connected to the outside of the elastic storage bag 20, the bidirectional temperature-adjusting tube 21 is mounted in the mounting frame 4, a plurality of wax through holes 25 are provided in the mounting frame 4 and are staggered with the bidirectional temperature-adjusting tube 21, a sedimentation tank 26 is provided in the main body frame 3, a center hole 27 is provided in the sedimentation tank 26, the central hole 27 is matched with the elastic storage bag 20, the design of the storage supply system can be matched with the packaging jig frame 2 to form wax oil extrusion injection, and then the wax oil can be used for filling the positioning holes on the packaging jig frame 2 so as to facilitate subsequent corresponding detection, the placement structure comprises a mounting frame 4, the mounting frame 4 is fixedly connected to the top end of the main body frame 3, a clamping component used for positioning the packaging jig frame 2 is arranged in the mounting frame 4, the clamping component comprises two first clamping rotating frames 10 and two second clamping rotating frames 11, the two first clamping rotating frames 10 and the two second clamping rotating frames 11 are respectively connected with the mounting frame 4 in a rotating way, two first driving screws 12 and two second driving screws 13 are respectively connected in the mounting frame 4 in a sliding way, spiral plates 14 are respectively fixedly connected in the two first clamping rotating frames 10 and the two second clamping rotating frames 11, four screw plates 14 match with two first drive screw rods 12 and two second drive screw rods 13 respectively, the screw direction of screw plates 14 in the first centre gripping revolving stage 10 and the screw plates 14 in two second centre gripping revolving stages 11 are opposite, sliding connection has lift ring 5 in the installing frame 4, lift ring 5 is used for the support of encapsulation tool frame 2, through the equipment of lay the structure, supporting encapsulation tool frame 2 forms corresponding support and location structure to make things convenient for the calibration detection of follow-up encapsulation tool frame 2.
It should be further noted that, the main body frame 3 is slidably connected with two lifting vertical frames 6, the top ends of the two lifting vertical frames 6 are slidably connected with a driving ring 7, the two lifting vertical frames 6 are fixedly connected with two elastic springs 8, the four elastic springs 8 are fixedly connected with the driving ring 7, a driving system and a transmission system are respectively installed in the main body frame 3 and the installation frame 4, the driving system is used for operating and driving the storage and supply system, the driving system comprises a bottom supporting plate 28 and two transmission connecting frames 29, the top end of the bottom supporting plate 28 is fixedly connected with the bottom end of the elastic storage bag 20, the bottom supporting plate 28 is slidably connected in the main body frame 3, the two ends of the bottom supporting plate 28 are fixedly connected with transmission rods 30, the two transmission rods 30 are respectively connected with two transmission connecting frames 29, the two transmission connecting frames 29 are respectively connected with the main body frame 3 in a rotating way, the two transmission connecting frames 29 are respectively connected with the two lifting vertical frames 6, the transmission system is used for driving the transmission between the driving ring 7 and the clamping assembly, the transmission system comprises two synchronous plates 15, the two synchronous plates 15 are fixedly connected with guide sleeves 16, the two guide sleeves 16 are in sliding connection with the mounting frame 4, standing springs 17 are fixedly connected in the two guide sleeves 16, pushing posts 18 are fixedly connected at the top ends of the two standing springs 17, the two pushing posts 18 are respectively in sliding connection with the two synchronous plates 15, the two synchronous plates 15 are fixedly connected with two reset springs 19, the four reset springs 19 are respectively fixedly connected with the top ends of the mounting frame 4, the two pushing posts 18 are matched with the driving ring 7, two optical detectors 9 are arranged below the lifting ring 5, mounting barrels 31 are respectively connected in the two lifting vertical frames 6 in a rotating manner, threaded rings 32 are respectively connected with the two optical detectors 9 in a threaded manner outside the two mounting barrels 31, the two threaded rings 32 are fixedly connected with the lifting vertical frame 6, and can correspondingly detect wax oil which is formed by injection molding relative to the packaging jig frame 2 through the arrangement of the optical detector 9, so that the purpose of detecting and calibrating the packaging jig frame 2 is achieved.
The main body frame 3 is internally provided with a linkage system matched with the lifting ring 5, the linkage system comprises two driving bar rods 33 and two transmission bar rods 34, the two driving bar rods 33 are fixedly connected in the two lifting vertical frames 6 respectively, the two driving bar rods 33 are externally and fixedly connected with guide overhanging frames 35, the two guide overhanging frames 35 are fixedly connected with the main body frame 3, the two guide overhanging frames 35 are internally and rotatably connected with a linkage bar frame 36, the two linkage bar frames 36 are respectively connected with the two driving bar rods 33, the two transmission bar rods 34 are respectively connected with the two linkage bar frames 36, the two transmission bar rods 34 are respectively connected with supporting lifting columns 37 in a sliding manner, the two supporting lifting columns 37 are respectively fixedly connected with the lifting ring 5, connecting springs are respectively connected with the two transmission bar rods 34, the supporting lifting columns 37 are made of transparent materials, an inner driving bar port and an outer driving bar port are formed in the linkage bar frame 36, the inner driving bar port and the outer driving bar port are respectively connected with the two driving bar rods 40 through the two supporting lifting columns 37, the two supporting lifting columns 40 are respectively connected with the four corner plates 1, and the two driving bar rods 34 are fixedly connected with the four corners 1, and the two driving bar frames 40 are fixedly connected with the two driving bar frames 1, and the four corner plates are fixedly connected with the supporting bars 1.
The optical detector 9, the normal heating ring 24, the electric switching valve and the control host in this embodiment are all conventional devices known to those skilled in the art and purchased in the market, and the configuration and the function of the optical detector are not improved, and the setting mode, the installation mode and the electrical connection mode of the optical detector are only required to be debugged according to the requirements of the application specification of the optical detector, so that the optical detector is not described in detail herein.
In summary, the working principle of the semiconductor packaging jig calibration device is that, when in use, the semiconductor packaging jig calibration device is firstly installed at a place where the semiconductor packaging jig calibration device is required to be used, a control power supply is connected to a normal heating ring 24, the normal heating ring 24 adopts a resistance wire which is heated in a constant temperature and a constant resistance state, external refrigerating gas and heating gas are connected to a bidirectional temperature regulating tube 21, an electric switching valve is correspondingly installed on the bidirectional temperature regulating tube 21, the operation control of the internal refrigerating and heating of the bidirectional temperature regulating tube 21 is realized, a control host is installed for an optical detector 9 in a matched manner, analysis and storage of information acquired by the optical detector 9 are formed through the control host, then a packaging jig frame 2 to be detected is placed on a lifting ring 5, then a downward pressure is applied to a driving ring 7, the driving ring 7 is forced to fall down to push two lifting vertical frames 6 to fall down synchronously through an elastic spring 8, the two falling lifting vertical frames 6 respectively drive the two transmission connecting frames 29 to move, the two transmission connecting frames 29 rotate relative to the main body frame 3 and respectively drive the two transmission rods 30 to move, the two transmission rods 30 move and drive the bottom supporting plate 28 to lift in the main body frame 3, the elastic spring 8 forms the driving ring 7 and the lifting vertical frames 6 to be elastically compressed at the initial stage of the transmission action due to the elastic action of the elastic storage bag 20 and the gravity action of the bottom supporting plate 28, namely the driving ring 7 falls down while the lifting vertical frames 6 keep the original height unchanged until the compression amount of the elastic spring 8 can correspondingly generate enough force to realize the compression of the elastic storage bag 20 and the lifting of the bottom supporting plate 28, the driving ring 7 can drive the threaded ring 32 to form synchronous falling when being pressed down, the mounting cylinder 31 can be driven to rotate relative to the lifting vertical frames 6 under the threaded connection action between the threaded ring 32 and the mounting cylinder 31, then the detection area of the optical detector 9 is rotationally adjusted, when the screw thread action between the screw thread ring 32 and the mounting cylinder 31 moves relatively to the limit state, the force accumulation of the elastic spring 8 is also completed, after that, the driving ring 7 is continuously pushed to fall to form the falling pushing of the lifting vertical frames 6, the two lifting vertical frames 6 continuously fall to realize the upward lifting of the bottom supporting plate 28, then the extrusion of the elastic storage bag 20 is realized, the wax oil in the elastic storage bag 20 is in a liquid state after the normal state heating ring 24 is electrified, the wax oil in the elastic storage bag 20 is extruded into the central hole 27, the wax oil flows into the settling tank 26 after the wax oil is filled into the central hole 27, and the wax oil in the settling tank 26 flows into the upper side of the mounting frame 4 through the wax through hole 25 after the wax oil is filled.
Further, since the driving bar 33 in the lifting vertical frame 6 is also formed to fall when falling down, under the transmission action of the driving bar 33, the linkage bar 36 and the transmission bar 34, namely, the driving bar 33 falls down to drive the linkage bar 36 to rotate relative to the linkage bar 36, the driving bar 34 is driven to fall by the rotating falling linkage bar 36, the falling driving bar 33 realizes the falling of the driving bar 34 in the process, the rising driving bar 34 drives the supporting lifting column 37 to form a height reduction, and the falling speed of the supporting lifting column 37 is faster than the falling speed of the driving bar 33 due to the variable speed transmission of the linkage bar 36, so that the lifting ring 5 can fall into the mounting frame 4 quickly, when the lifting ring 5 falls into the mounting frame 4, the driving ring 7 is pushed down further, the connecting spring forms compression, to facilitate the further downward movement of the driving ring 7, the driving ring 7 pushed down further contacts with the pushing post 18, the pushing post 18 is pushed to drive the synchronous plate 15 to fall, the first driving screw 12 and the second driving screw 13 connected with the synchronous plate 15 form synchronous falling, the corresponding first clamping rotating frame 10 and the second clamping rotating frame 11 form relative rotation under the transmission action of the spiral plate 14 and the first driving screw 12 and the transmission action of the second driving screw 13 and the spiral plate 14, the rotating first clamping rotating frame 10 and the second clamping rotating frame 11 are matched with the packaging jig frame 2 entering the mounting frame 4 to form clamping and positioning, then the elastic storage bag 20 is further compressed by continuously pushing down the driving ring 7 due to reasonable space arrangement of the central hole 27 and the sedimentation tank 26, the driving ring 7 is continuously pushed down after the packaging jig frame 2 forms clamping and positioning in the mounting frame 4, wax oil in the elastic storage bag 20 can be upwelled through the wax passing holes 25, wax oil upwelled to the upper side of the mounting frame 4 can be filled into the packaging jig frame 2, after the wax oil is properly filled into the packaging jig frame 2, the downward pressing driving of the driving ring 7 is stopped, the height of the driving ring 7 is kept, then external refrigerating gas is led into the bidirectional temperature regulating tube 21 through controlling the electric switching valve, the wax oil in the wax passing holes 25 and the wax oil upwelled to the upper side of the mounting frame 4 are controlled to be cooled, the wax oil is solidified, then the downward pressure acted on the driving ring 7 is gradually reduced, the movement of the driving ring 7 is recovered to be raised, in the process, the positioning clamping effect of the packaging jig frame 2 is firstly failed and then is raised and separated relative to the wax oil, the optical detector 9 can swing reversely to detect the corresponding size of the solidified wax oil, and because the solidified wax oil forms a reverse die to the positioning holes on the packaging jig frame 2, the appearance of the structure formed by the solidified wax oil is detected, namely, the size and shape of the packaging jig can be analyzed, the aim of calibrating and checking the packaging jig is achieved, finally, the packaging jig frame 2 is taken down from the lifting ring 5, and external heating gas is led into the bidirectional temperature regulating tube 21 by controlling the electric switching valve so as to heat and melt the wax oil on the upper side of the mounting frame 4, and the melted wax oil flows back into the elastic storage bag 20 under the action of self gravity for next use.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
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| CN202510666795.8A CN120184066B (en) | 2025-05-22 | 2025-05-22 | Semiconductor packaging jig calibration equipment |
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| CN202510666795.8A CN120184066B (en) | 2025-05-22 | 2025-05-22 | Semiconductor packaging jig calibration equipment |
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| CN120184066A true CN120184066A (en) | 2025-06-20 |
| CN120184066B CN120184066B (en) | 2025-08-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN121223553A (en) * | 2025-11-28 | 2025-12-30 | 英泰特精密科技(泰州)有限公司 | A metal mold processing for tooling fixture device |
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| CN217305214U (en) * | 2021-12-30 | 2022-08-26 | 立芯科技(昆山)有限公司 | Positioning device for testing packaged product |
| CN220533402U (en) * | 2023-08-14 | 2024-02-27 | 山东斯力微电子有限公司 | IGBT welding positioning jig |
| CN118969675A (en) * | 2024-08-01 | 2024-11-15 | 昆山明创电子科技有限公司 | A semiconductor packaging fixture calibration device |
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- 2025-05-22 CN CN202510666795.8A patent/CN120184066B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN217305214U (en) * | 2021-12-30 | 2022-08-26 | 立芯科技(昆山)有限公司 | Positioning device for testing packaged product |
| CN220533402U (en) * | 2023-08-14 | 2024-02-27 | 山东斯力微电子有限公司 | IGBT welding positioning jig |
| CN118969675A (en) * | 2024-08-01 | 2024-11-15 | 昆山明创电子科技有限公司 | A semiconductor packaging fixture calibration device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN121223553A (en) * | 2025-11-28 | 2025-12-30 | 英泰特精密科技(泰州)有限公司 | A metal mold processing for tooling fixture device |
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| CN120184066B (en) | 2025-08-08 |
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