CN119952858A - Integrated processing device for precise chip strip cutting - Google Patents

Integrated processing device for precise chip strip cutting Download PDF

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Publication number
CN119952858A
CN119952858A CN202510136656.4A CN202510136656A CN119952858A CN 119952858 A CN119952858 A CN 119952858A CN 202510136656 A CN202510136656 A CN 202510136656A CN 119952858 A CN119952858 A CN 119952858A
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CN
China
Prior art keywords
plate
cutting
rotating
processing device
integrated processing
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Pending
Application number
CN202510136656.4A
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Chinese (zh)
Inventor
顾梦甜
张驰
陈浩
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Anhui Jixin Microelectronics Technology Co ltd
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Anhui Jixin Microelectronics Technology Co ltd
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Priority to CN202510136656.4A priority Critical patent/CN119952858A/en
Publication of CN119952858A publication Critical patent/CN119952858A/en
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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Abstract

The invention discloses a precise cutting bar integrated processing device for a chip strip, which relates to the technical field of microelectronics and comprises a bottom plate; two support plates are connected to the bottom plate, one end, far away from the bottom plate, of each support plate is connected with a mounting plate, and each mounting plate is connected with a rotating mechanism. According to the invention, the rotating plate can be pushed to move through the action of the electric telescopic rod, so that the position of the rotating plate is changed, a workpiece to be processed is placed in the two clamping plates, the screw is driven to rotate through the rotation of the handle, so that the screw pushes the connector to move, the workpiece can be accurately fixed between the two clamping plates through the rotation of the screw by the handle, the stability of the workpiece in the processing process is ensured, the connector pushes the pushing plate to move, the pushing plate is pushed to extrude the spring, the workpiece between the two clamping plates is fixed, the workpiece can be ensured not to move or vibrate in the processing process through the accurate fixing of the workpiece, and the processing precision and the surface quality are improved.

Description

Chip strip accurate cutting bar integrated processing device
Technical Field
The invention relates to the technical field of microelectronics, in particular to a precise cutting bar integrated processing device for a chip strip.
Background
The chip strip accurate cutting rib integrated processing device is special equipment used in the manufacturing process of a semiconductor chip, is used for cutting a semiconductor wafer into single chips, is called a cutting rib, is the last step of chip manufacturing, is also a key step for ensuring independence and completeness of each chip, can realize accurate cutting of the chip strip through the integrated processing device, ensures the straightness of a cutting edge and the accuracy of a cutting size, is crucial for subsequent chip packaging and testing, can maximally utilize wafer materials through accurate cutting, reduces waste materials generated in the production process, and is an indispensable part in the semiconductor manufacturing process, and the chip strip accurate cutting rib integrated processing device plays a key role in improving the production efficiency and the product quality of the chip;
The Chinese patent grant publication number is CN111730771B, the name is a wafer cutting machine, the wafer cutting machine comprises a machine base, a cutting tool, a clamp and an objective table, the clamp is fixedly arranged on the machine base and used for clamping and fixing a silicon rod, the objective table is arranged right below the clamp and comprises an outer ring part and a central part, the upper end face of the central part is horizontally arranged, the silicon rod is abutted against the upper end face of the central part, and the projection of the silicon rod in the vertical direction falls outside the central part. Compared with the prior art, the wafer cutter can be used for stably clamping, so that chips are prevented from being broken and curled;
The defects of the scheme are that the scheme can avoid the chip breaking and curling, but can not cut different chips when in use, can not adapt to the chips with different sizes, shapes or thicknesses, limits the application of the device in diversified production environments, needs to purchase or customize special cutting equipment for each chip with different specifications, increases the production cost, can only cut in one direction, limits the cutting diversity and flexibility, and can reduce the material utilization rate if the chip or the wafer needs to be overturned to adapt to the cutting path in the cutting process because the cutting line can not fully utilize the technical problem of the area of the wafer.
Disclosure of Invention
The invention aims to provide a precise cutting bar integrated processing device for a chip strip, which aims to solve the problems that different wafers cannot be cut when the device is used in the prior art, the device cannot adapt to wafers with different sizes, shapes or thicknesses, the application of the device in diversified production environments is limited, special cutting equipment is required to be purchased or customized for each wafer with different specifications, the production cost is increased, the cutting can only be performed in one direction, the diversity and the flexibility of the cutting are limited, and in the cutting process, if the wafer or the chip needs to be overturned to adapt to a cutting path, the equipment which cannot be overturned possibly causes the reduction of the material utilization rate because the cutting line possibly cannot fully utilize the technical problem of the area of the wafer.
The technical problems to be solved by the invention can be realized by the following technical scheme:
The integrated processing device for the accurate cutting of the chip strip comprises a bottom plate;
The device comprises a base plate, and is characterized in that two supporting plates are connected to the base plate, one end, far away from the base plate, of each supporting plate is connected with a mounting plate, each mounting plate is connected with a rotating mechanism, each rotating mechanism comprises a driving gear and a toothed ring, each mounting plate is connected with a motor, each driving gear is connected to the driving end of each motor, each toothed ring is connected to the periphery of each driving gear in a meshed mode, one side, far away from each driving gear, of each toothed ring is connected with a rotating disc, each rotating disc is connected with two connecting shafts, one end, far away from each rotating disc, of each connecting shaft is connected with an electric telescopic rod, the telescopic end of each electric telescopic rod is connected with a rotating plate, each rotating plate is connected with a clamping mechanism, and the clamping mechanisms are symmetrically arranged;
The bottom plate is connected with a fixed plate, two groups of limiting strips are connected to the fixed plate, and lifting mechanisms are connected to the two groups of limiting strips;
The cutting mechanism comprises a plurality of groups of sliding rails and a plurality of cutting knives, wherein the sliding rails are connected between the two groups of limiting bars, each sliding rail is provided with a sliding groove, an electric sliding block is connected in the sliding groove in a sliding manner, a connecting plate is connected to the electric sliding block, and the cutting knives are connected to the connecting plate.
In a further aspect of the present invention, the connecting shaft is a steel structure.
As a further scheme of the invention, each side of the clamping mechanism comprises a pushing plate and a clamping plate, a fixing frame is connected to the rotating plate, a screw rod is connected to the fixing frame in a rotating mode, one end, far away from the handle, of the screw rod is provided with the pushing plate, a connector is connected between the pushing plate and the screw rod, and one end, far away from the handle, of the pushing plate is provided with the clamping plate.
As a further scheme of the invention, the screw is connected with a handle.
As a further scheme of the invention, anti-skid patterns are distributed on the handle.
As a further scheme of the invention, the inner side of the clamping plate is connected with an anti-slip pad.
As a further scheme of the invention, the lifting mechanism comprises a rack and a rotating gear, the rack is connected to the limiting bar, the rotating gear is meshed with the rack, a connecting rod is connected to the bottom plate, one end of the connecting rod, far away from the bottom plate, is connected with a driving motor, and the rotating gear is connected to the driving end of the driving motor.
As a further scheme of the invention, a plurality of springs are connected between the pushing plate and the clamping plate.
As a further scheme of the invention, a lubricant is smeared between the electric sliding block and the sliding groove.
As a further scheme of the invention, the cutting knife is an ultrasonic cutting knife.
The invention has the beneficial effects that:
1. According to the invention, the rotating plate can be pushed to move through the action of the electric telescopic rod, so that the position of the rotating plate is changed, a workpiece to be processed is placed in the two clamping plates, the screw is driven to rotate through the rotation of the handle, so that the screw pushes the connector to move, the workpiece can be accurately fixed between the two clamping plates through the rotation of the screw by the handle, the stability of the workpiece in the processing process is ensured, the connector pushes the pushing plate to move, the pushing plate is pushed to extrude the spring, the workpiece between the two clamping plates is fixed, the workpiece can be ensured not to move or vibrate in the processing process through the accurate fixing of the workpiece, and the processing precision and the surface quality are improved.
2. According to the invention, the motor drives the driving gear to rotate, the power of the motor is transmitted to the driving gear, the periphery of the driving gear is connected with the toothed ring, the toothed ring is meshed with the driving gear, the toothed ring drives the rotating disc to rotate, the rotating disc drives the connecting shaft to rotate, the connecting shaft drives the rotating plate to rotate through the electric telescopic rod, the rotating plate can drive a workpiece between clamping mechanisms to rotate, a cutting knife on the connecting plate can cut a sample on the clamping mechanisms, the cutting knife can accurately cut ribs along the sliding rail, the position of the cutting mechanism can be accurately adjusted through the cooperation of the limiting strips and the lifting mechanism, the rotating disc and the connecting shaft rotate, the workpiece can stably rotate, cutting and processing from different angles are facilitated, and the cutting knife can accurately cut ribs along the sliding rail.
3. According to the invention, the driving motor drives the rotating gear to rotate, the rotating gear drives the engaged racks to move, and the racks drive the limiting strips to move, so that the cutting mechanism on the limiting strips moves up and down to adjust the position, and the position of the cutting mechanism can be accurately adjusted through the cooperation of the limiting strips and the lifting mechanism, so that the cutting precision is ensured.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an enlarged schematic view of the structure of FIG. 1 at A;
FIG. 3 is a schematic view of the front view of the support plate and mounting plate of the present invention;
FIG. 4 is a schematic side elevational view of FIG. 3;
Fig. 5 is a perspective view of fig. 3.
The device comprises a base plate 1, a supporting plate 2, a supporting plate 3, a mounting plate 4, a fixing plate 5, a limiting bar 6, a sliding rail 7, a rack 8, a connecting rod 9, a driving motor 10, a rotating gear 12, an electric sliding block 13, a cutting knife 14, a connecting plate 15, a sliding groove 16, a rotating disc 17, a toothed ring 18, a driving gear 19, a fixing frame 20, a screw rod 21, a handle 22, a clamping plate 24, an electric telescopic rod 25, a spring 26, a connecting shaft 27, a connecting head 28, a rotating plate 29 and a pushing plate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-5, the accurate integrated processing device for cutting the chip strip comprises a bottom plate 1, two support plates 2 are connected to the bottom plate 1, one end, far away from the bottom plate 1, of each support plate 2 is connected with a mounting plate 3, each mounting plate 3 is connected with a rotating mechanism, the rotating mechanism comprises a driving gear 18 and a toothed ring 17, a motor is connected to the mounting plate 3, the driving gear 18 is connected to the driving end of the motor, the toothed ring 17 is meshed and connected to the periphery of the driving gear 18, one side, far away from the driving gear 18, of the toothed ring 17 is connected with a rotating disc 16, two connecting shafts 26 are connected to the rotating disc 16, the connecting shafts 26 are of steel structures, one end, far away from the rotating disc 16, of each connecting shaft 26 is connected with an electric telescopic rod 24, the telescopic ends of the electric telescopic rods 24 are connected with rotating plates 28, the rotating plates 28 are connected with clamping mechanisms, the clamping mechanisms are symmetrically arranged, each clamping mechanism comprises a pushing fixed frame 29 and a clamping plate 22, the rotating plates 28 are connected with a pushing plate 19, the rotating plates 19 are meshed and are connected to the rotating plates 19, one end, far away from the rotating plates 20 is connected with a plurality of screws 21, one end, which is connected with a plurality of screws 21, 20 are connected with a clamping plates 20, one end, which is connected with a handle 20, and one end, which is connected with a plurality of screws 20, 20 is connected with a clamping plates 20, and one end, 20 is connected with a connecting rod 20, a connecting rod 20 is connected with a connecting rod 20 through a connecting rod, and a connecting rod 20 is connected with a threaded rod 20 through a connecting rod, and a connecting rod 20 is connected through a connecting rod, and a connecting rod 20, the workpiece can be accurately fixed between the two clamping plates 22, so that the stability of the workpiece in the machining process is ensured;
The bottom plate 1 is connected with a fixed plate 4, two groups of limit bars 5 are connected to the fixed plate 4, lifting mechanisms are connected to the two groups of limit bars 5, each lifting mechanism comprises a rack 7 and a rotating gear 10, the racks 7 are connected to the limit bars 5, the rotating gears 10 are connected with the racks 7 in a meshed mode, the bottom plate 1 is connected with a connecting rod 8, one end, far away from the bottom plate 1, of the connecting rod 8 is connected with a driving motor 9, and the rotating gears 10 are connected to the driving end of the driving motor 9;
The cutting mechanism comprises a plurality of groups of sliding rails 6 and a plurality of cutting knives 13, wherein the sliding rails 6 are connected between the two groups of limiting rails 5, sliding grooves 15 are formed in each sliding rail 6, an electric sliding block 12 is connected in each sliding groove 15 in a sliding manner, a lubricant is smeared between the electric sliding block 12 and each sliding groove 15, a connecting plate 14 is connected to the electric sliding block 12, the cutting knives 13 are connected to the connecting plates 14, and the cutting knives 13 are ultrasonic cutters.
The working principle of the invention is that a workpiece to be processed is placed in two clamping plates 22, the screw rod 20 is driven to rotate through the rotation of the handle 21, so that the screw rod 20 pushes the connector 27 to move, the screw rod 20 is driven to rotate through the rotation of the handle 21, the workpiece can be accurately fixed between the two clamping plates 22, the stability of the workpiece in the processing process is ensured, the connector 27 pushes the pushing plate 29 to move, the pushing plate 29 is pushed to extrude the spring 25, the workpiece between the two clamping plates 22 is fixed, the motor rotates through the driving gear 18, the power of the motor is transmitted to the driving gear 18, the periphery of the driving gear 18 is connected with the toothed ring 17, the toothed ring 17 is meshed with the driving gear 18, the toothed ring 17 is driven to rotate through the driving gear 18, the toothed ring 17 drives the rotating disc 16 to rotate, the connecting shaft 26 is driven by the electric telescopic rod 24 to drive the rotating plate 28 to rotate, the rotating plate 28 can drive the workpiece between the clamping mechanisms to rotate, the rotating plate 28 can be pushed by the electric telescopic rod 24 to move, so that the position of the rotating plate 28 can be flexibly adjusted through the electric telescopic rod 24 and the rotating disc 16, and the workpiece with different sizes and shapes can be flexibly adjusted;
The bottom plate 1 is connected with the fixed plate 4, the fixed plate 4 is connected with two groups of limit bars 5, each group of limit bars 5 is connected with a lifting mechanism, the positions of the cutting mechanisms can be easily adjusted through the limit bars 5 and the lifting mechanisms on the bottom plate 1, the lifting mechanisms adapt to different processing demands, the lifting mechanisms comprise racks 7 and rotating gears 10, the racks 7 are connected to the limit bars 5, the rotating gears 10 are meshed with the racks 7, one end of each connecting rod 8 is connected with a driving motor 9, the rotating gears 10 are connected to the driving ends of the driving motors 9, the rotating gears 10 are driven to rotate through the driving motors 9, the rotating gears 10 drive the meshed racks 7 to move, the racks 7 drive the limit bars 5 to move, so that the cutting mechanisms on the limit bars 5 move up and down to adjust positions, the sliding rails 6 are provided with sliding grooves 15, the electric sliding blocks 12 are slidably connected in the sliding grooves 15, the electric sliding blocks 12 drive the connecting plates 14 to move, the cutting blades 13 on the connecting plates 14 can cut samples on the clamping mechanisms, accurate bar cutting operations can be carried out on the sliding rails 6, the accurate bar cutting operations can be carried out on the samples on the clamping mechanisms through the connecting plates 14, the accurate bar cutting operations can be accurately matched with the cutting blades 13, and the accurate cutting operations can be carried out along the sliding rails 6 through the accurate position adjusting mechanisms, and accurate cutting operations of the sliding rails 13 can be accurately matched with the cutting mechanisms, and the accurate cutting operations can be adjusted along the sliding rails 6;
The device can adapt to the work piece processing of different grade type, has improved the commonality and the suitability of equipment, and holistic design and function make the course of working more high-efficient, have reduced non-production time, have improved holistic production efficiency, have improved machining precision, efficiency, degree of automation, have reduced the operation degree of difficulty and maintenance cost simultaneously, are applicable to the industrial field that needs high accuracy processing.
The foregoing describes one embodiment of the present invention in detail, but the disclosure is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.

Claims (10)

1. The accurate rib cutting integrated processing device for the chip strips comprises a bottom plate (1) and is characterized in that:
The novel electric telescopic device is characterized in that two supporting plates (2) are connected to the bottom plate (1), one end, far away from the bottom plate (1), of each supporting plate (2) is connected with a mounting plate (3), each mounting plate (3) is connected with a rotating mechanism, each rotating mechanism comprises a driving gear (18) and a toothed ring (17), each mounting plate (3) is connected with a motor, each driving gear (18) is connected to the driving end of each motor, each toothed ring (17) is connected to the periphery of each driving gear (18) in a meshed mode, one side, far away from each driving gear (18), of each toothed ring (17) is connected with a rotating disc (16), one end, far away from each rotating disc (16), of each connecting shaft (26) is connected with an electric telescopic rod (24), the telescopic ends of each electric telescopic rod (24) are connected with rotating plates (28), and clamping mechanisms are symmetrically arranged on the rotating plates (28).
The base plate (1) is connected with a fixed plate (4), two groups of limit strips (5) are connected to the fixed plate (4), and lifting mechanisms are connected to the two groups of limit strips (5);
Two sets of spacing (5) between be connected with cutting mechanism, cutting mechanism includes multiunit slide rail (6) and a plurality of cutting knife (13), multiunit slide rail (6) all connect between two sets of spacing (5), every all be equipped with spout (15) on slide rail (6), sliding connection has electronic slider (12) in spout (15), be connected with connecting plate (14) on electronic slider (12), cutting knife (13) are connected on connecting plate (14).
2. The precise cutting bar integrated processing device for chip strips according to claim 1, wherein the connecting shaft (26) is a steel structure.
3. The precise chip strip rib cutting integrated processing device according to claim 1, wherein each side of the clamping mechanism comprises a pushing plate (29) and a clamping plate (22), a fixing frame (19) is connected to the rotating plate (28), a screw rod (20) is connected to the fixing frame (19) in a rotating mode, one end, far away from the handle (21), of the screw rod (20) is provided with the pushing plate (29), a connector (27) is connected between the pushing plate (29) and the screw rod (20), and one end, far away from the handle (21), of the pushing plate (29) is provided with the clamping plate (22).
4. The precise chip strap cutting integrated processing device according to claim 3, wherein a handle (21) is connected to the screw (20).
5. The precise chip strap cutting integrated processing device according to claim 4, wherein anti-skid patterns are distributed on the handle (21).
6. The precise strip cutting integrated processing device of claim 5, wherein the inner side of the clamping plate (22) is connected with an anti-slip pad.
7. The precise chip strip rib cutting integrated processing device according to claim 1, wherein the lifting mechanism comprises a rack (7) and a rotating gear (10), the rack (7) is connected to a limiting strip (5), the rotating gear (10) is connected with the rack (7) in a meshed mode, a connecting rod (8) is connected to the bottom plate (1), one end, far away from the bottom plate (1), of the connecting rod (8) is connected with a driving motor (9), and the rotating gear (10) is connected to the driving end of the driving motor (9).
8. A device for precisely cutting and integrating chip strips according to claim 3, characterized in that a plurality of springs (25) are connected between the pushing plate (29) and the clamping plate (22).
9. The integrated processing device for precise cutting of chip strips according to claim 1, wherein a lubricant is smeared between the electric sliding block (12) and the sliding groove (15).
10. The integrated processing device for precise cutting of chip strips according to claim 1, wherein the cutting blade (13) is an ultrasonic cutting blade.
CN202510136656.4A 2025-02-07 2025-02-07 Integrated processing device for precise chip strip cutting Pending CN119952858A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202510136656.4A CN119952858A (en) 2025-02-07 2025-02-07 Integrated processing device for precise chip strip cutting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202510136656.4A CN119952858A (en) 2025-02-07 2025-02-07 Integrated processing device for precise chip strip cutting

Publications (1)

Publication Number Publication Date
CN119952858A true CN119952858A (en) 2025-05-09

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CN202510136656.4A Pending CN119952858A (en) 2025-02-07 2025-02-07 Integrated processing device for precise chip strip cutting

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111015982A (en) * 2019-11-25 2020-04-17 大同新成新材料股份有限公司 Combined special cutting tool for chip silicon production and its use method
CN212498392U (en) * 2020-05-12 2021-02-09 太湖达名欣盖板制造有限公司 Glass apron production cutting device
CN218535194U (en) * 2022-07-13 2023-02-28 深圳市英锐芯电子科技有限公司 Cutting and welding integrated equipment for chip
WO2023119685A1 (en) * 2021-12-22 2023-06-29 坂東機工株式会社 Cutting jig and cutting method
CN219562228U (en) * 2023-03-08 2023-08-22 大连诚鑫冶金机械制造有限公司 Annular cutting device of metallurgical piece

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111015982A (en) * 2019-11-25 2020-04-17 大同新成新材料股份有限公司 Combined special cutting tool for chip silicon production and its use method
CN212498392U (en) * 2020-05-12 2021-02-09 太湖达名欣盖板制造有限公司 Glass apron production cutting device
WO2023119685A1 (en) * 2021-12-22 2023-06-29 坂東機工株式会社 Cutting jig and cutting method
CN218535194U (en) * 2022-07-13 2023-02-28 深圳市英锐芯电子科技有限公司 Cutting and welding integrated equipment for chip
CN219562228U (en) * 2023-03-08 2023-08-22 大连诚鑫冶金机械制造有限公司 Annular cutting device of metallurgical piece

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