CN119836392A - 输送装置以及保管装置 - Google Patents

输送装置以及保管装置 Download PDF

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Publication number
CN119836392A
CN119836392A CN202380064192.XA CN202380064192A CN119836392A CN 119836392 A CN119836392 A CN 119836392A CN 202380064192 A CN202380064192 A CN 202380064192A CN 119836392 A CN119836392 A CN 119836392A
Authority
CN
China
Prior art keywords
arm
driving
driving unit
base
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380064192.XA
Other languages
English (en)
Chinese (zh)
Inventor
伊藤宣之
矢河一马
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of CN119836392A publication Critical patent/CN119836392A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
CN202380064192.XA 2022-09-27 2023-09-11 输送装置以及保管装置 Pending CN119836392A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022153344 2022-09-27
JP2022-153344 2022-09-27
PCT/JP2023/033029 WO2024070630A1 (ja) 2022-09-27 2023-09-11 搬送装置及び保管装置

Publications (1)

Publication Number Publication Date
CN119836392A true CN119836392A (zh) 2025-04-15

Family

ID=90477474

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380064192.XA Pending CN119836392A (zh) 2022-09-27 2023-09-11 输送装置以及保管装置

Country Status (4)

Country Link
JP (1) JP7831619B2 (https=)
CN (1) CN119836392A (https=)
TW (1) TW202421548A (https=)
WO (1) WO2024070630A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (ja) * 1982-06-10 1983-12-14 株式会社シマノ 作業用ロボツト
JPS60238286A (ja) * 1984-05-10 1985-11-27 ダイキン工業株式会社 組立て作業用ロボツト
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (ja) * 1989-03-13 1990-09-20 Hitachi Ltd 産業用ロボット
JP2004071925A (ja) * 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP6024720B2 (ja) * 2014-09-10 2016-11-16 村田機械株式会社 移載装置

Also Published As

Publication number Publication date
JPWO2024070630A1 (https=) 2024-04-04
JP7831619B2 (ja) 2026-03-17
TW202421548A (zh) 2024-06-01
WO2024070630A1 (ja) 2024-04-04

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