CN119217555A

CN119217555A - Slicing unit production line and its control method, medium and equipment

Info

Publication number: CN119217555A
Application number: CN202310800793.4A
Authority: CN
Inventors: 吴广忠; 滕宁; 刘鹏飞; 于国超; 刘绪军
Original assignee: Qingdao Gaoce Technology Co Ltd
Current assignee: Qingdao Gaoce Technology Co Ltd
Priority date: 2023-06-30
Filing date: 2023-06-30
Publication date: 2024-12-31

Abstract

The invention relates to the technical field of processing of hard and brittle materials, and particularly provides a slicing unitized production line, a control method thereof, a computer readable storage medium and computer equipment, wherein the slicing unitized production line comprises a transfer mechanism, a connection tool and at least one slicer, and the control method of the slicing unitized production line comprises the steps of enabling the transfer mechanism to send a target position matched with the slicer or remove a workpiece from the target position, and enabling the connection tool to send the workpiece to a cutting area of the slicer or remove the workpiece from the cutting area. With such a configuration, the work piece can be conveyed to the cutting area of any one of the slicing machines to perform the slicing operation, thereby realizing the slicing unitized production by a plurality of machines.

Description

Slicing unitized production line and control method, medium and equipment thereof

Technical Field

The invention relates to the technical field of processing of hard and brittle materials, and particularly provides a slicing unitized production line, a control method of the slicing unitized production line, a computer readable storage medium and computer equipment.

Background

Taking a hard and brittle material as a silicon rod as an example, a device for processing the silicon rod generally comprises a cutting machine for cutting a bar stock (round rod) according to a length specification, an squaring machine for cutting the round rod with a certain length into square rods, a grinding machine for grinding (a grinding surface and a chamfering) the square rod (such as rough grinding and fine grinding are usually included), and a slicing machine for slicing the square rod with the precision reaching the standard after the grinding, wherein the working principle of the slicing machine is that after the square rod is adhered to a crystal support, slicing operation is carried out on the square rod along the radial direction of the silicon rod by a wire mesh of the cutting machine in a wire saw cutting mode (the silicon rod is fed along the radial direction of the silicon rod and the wire mesh is reciprocated between adjacent cutting rollers), and silicon wafers (such as silicon wafers) are produced, and each complete slicing operation corresponding to the wire mesh is called one-cutter cutting operation of the slicing machine.

Taking the slicing operation as an example, the slicing operation of the existing slicing machine is concentrated near the slicing station, and each cutting operation is a single operation performed on a single silicon rod, since each cutting operation usually comprises several tens of operation steps and is usually completed by one to two operators. Such a processing mode often has the problems that the operation of the slicing machine has high requirements on the expertise and the proficiency of operators, the operation of the slicing machine is easy to make mistakes by operators due to more steps, and cutting anomalies with different degrees can be caused once the operators make mistakes.

Taking the photovoltaic industry as an example, which is one of the application fields of silicon wafers, along with the rapid development of the photovoltaic industry, the continuous production expansion requirement is necessarily put forward for the silicon wafer processing chain including slicing operation. As described above, this has led to a continuous increase in the gap of operators who have had a gap, and thus, the stand-alone products (slicers) corresponding to stand-alone operations have been gradually unable to meet the market demands. In view of this, the inventors have made intensive studies and analyses on the operation of the microtome, and have aimed at providing a unitized structure frame capable of realizing simultaneous operation of a plurality of microtomes.

Disclosure of Invention

The invention aims to provide a production line for slicing unitization operation completed by a plurality of slicers and an implementation mode of unitization operation.

In a first aspect, the invention provides a slicing unitized production line comprising a production line body, at least one slicer, wherein the slicer can form an avoidance space, and a transfer mechanism comprising a ground rail robot, wherein the ground rail robot can carry a workpiece and at least can convey the workpiece to a position of the slicer corresponding to the avoidance space.

By this construction, a possible construction of the dicing line is given.

It is understood that a person skilled in the art can determine the specific structural form and number of the ground track robot, the specific mode of carrying the workpiece to the transfer mechanism, what motion the transfer mechanism can drive the workpiece to move to, and where, according to actual requirements. For example, the transfer mechanism can have one or more degrees of freedom to realize movement in corresponding directions, the workpiece can be directly or by means of a certain intermediate component carried on the transfer mechanism, the transfer mechanism can realize carrying of the workpiece by means of bonding, abutting, accommodating and the like, and the number of the transfer mechanism and the number of the slicing machines can be one-to-one, one-to-many or many-to-many.

It will be appreciated that the specific form, orientation, manner of formation, etc. of the avoidance space may be determined by those skilled in the art based on actual requirements, such as being formed within an existing component of the microtome, between different existing components, between an existing component of the microtome and other components that are newly added, etc.

For the above slicing unitized production line, in one possible implementation, the production line body is configured with a feeding component and a discharging component, and the transfer mechanism is capable of moving between a feeding area corresponding to the feeding component and a discharging area corresponding to the discharging component.

By means of this construction, a movement pattern of the workpiece is provided, which is realized by means of the ground rail robot as a transfer mechanism.

For the above slicing unitized production line, in one possible embodiment, the transfer mechanism is movable in a manner approaching/separating from the slicer at a position between the loading area and the unloading area.

By means of this construction, a movement of the workpiece by means of the transfer mechanism is provided.

For the above slicing unitizing production line, in one possible embodiment, the relay mechanism is movable in a vertical direction in a manner to approach/separate from the slicer.

For the above slicing unitized production line, in one possible implementation manner, the production line main body is configured with a joining tool, the joining tool can be set up in the transfer mechanism, and the workpiece can be carried to the joining tool.

With this configuration, the work can be mounted on the transfer mechanism by the joining tool.

It is understood that, a person skilled in the art may determine the structural form and number of the joining tool, the manner in which the workpieces are mounted on the joining tool, the manner in which the workpieces are configured in the transfer mechanism, and the like according to actual requirements. The connecting tool comprises two connecting tools, wherein workpieces are carried through the approach of the two connecting tools in the vertical direction or the horizontal direction, the connecting tool comprises one connecting tool, and a space capable of accommodating space is formed in the connecting tool.

For the slicing unitized production line, in one possible implementation mode, the linking tool comprises a first movable part capable of moving in a direction approaching to/separating from a cutting chamber of the slicing machine, and at least one abutting structure capable of fixedly connecting the first movable part with a workpiece is arranged on the first movable part.

By such a construction, a possible structural form of the joining tool is given.

It will be appreciated that the person skilled in the art can determine the structural form of the first movable part and the way in which it is realized the movement towards/away from the cutting chamber, according to the actual requirements, e.g. manually or by means of a reasonable driving transmission or the like. The first movable portion may be a plate-like structure, a block-like structure, a structure having an accommodation space, or the like, for example.

In addition, it is understood that those skilled in the art can determine the structural form, number and specific manner of implementing the fastening of the docking structure and the workpiece according to actual requirements. For example, the butt joint structure can be butt joint with the original structure of the workpiece (or the original configuration structure of the workpiece) to realize the fixedly connection, or a structure matched with the butt joint structure is added to realize the fixedly connection, and the fixedly connection mode can be bonding, butt joint, lap joint, clamping connection, grafting connection, screwing connection and the like.

For the above slicing unitized production line, in one possible implementation, the workpiece is carried on a crystal holder, and the docking structure can cooperate with the crystal holder and thus achieve the fixation of the workpiece to the first movable portion.

By such a construction, a possible form of achieving the work-piece fixation by the docking structure is given. For example, the butt joint structure can be matched with the existing part/structure or the newly added part/structure of the crystal support in the modes of bonding, abutting, lapping, clamping, inserting, screwing and the like to realize the fixedly connection of the workpiece and the first movable part.

For the slicing unitized production line, in one possible implementation manner, the crystal support comprises an operation end, and the docking structure can be fixedly connected with the crystal support in a manner of extending into the operation end.

By means of the structure, a mode of realizing fixedly connection of the butt joint structure is provided, for example, the handle with the middle part being hollow at the operation end. Accordingly, the abutting structure may be a protruding end of a block structure, a columnar structure, a hook structure, or the like. For example, the docking structure can drive the docking structure to extend into/withdraw from the handle through the movement of the transit structure along the vertical direction.

For the slicing unitized production line, in one possible implementation manner, the first movable portion is a strip-shaped structure, and a plurality of the abutting structures are arranged on the strip-shaped structure along the length direction of the strip-shaped structure.

By means of this construction, a possible construction of the first movable part is given.

It is understood that, a person skilled in the art may determine the number of the docking structures and the distribution form thereof on the strip structure according to the actual requirement, for example, the structure forms of the plurality of docking structures may be the same or different, and the plurality of docking structures may be uniformly or unevenly distributed along the length direction of the strip structure, etc.

For the slicing unitizing production line, in one possible implementation manner, the strip-shaped structure has a first end and a second end, the strip-shaped structure is provided with the docking structure at the first end or a position close to the first end, and the strip-shaped structure is provided with the docking structure at the second end or a position close to the second end.

With this configuration, the feeding and discharging operation for the single microtome can be realized by the cooperation of the two butting structures.

For the slicing unitized production line, in one possible implementation manner, the linking tool comprises a first driving component, and the first driving component can drive the first movable part to move along a mode of approaching to/separating from the cutting chamber.

By such a construction, a possible way of the first movable part to achieve its movement is given.

It will be appreciated that the configuration of the first driving member and the specific manner in which it drives the first movable part to move closer to/further from the cutting chamber may be determined by one skilled in the art based on actual requirements. For example, the first driving component can be a motor, a power cylinder (such as a cylinder, an electric cylinder and a hydraulic cylinder), a rotary module, a linear module and the like, and the first driving component can directly drive and also can indirectly drive the first movable part to move close to/far from the cutting chamber through a transmission component such as a gear set, a gear rack mechanism, a screw nut mechanism and the like.

For the slicing unitized production line, in one possible implementation manner, the linking tool comprises a first screw nut mechanism, and the first driving component can drive the first movable part to move along a mode of approaching/separating from the cutting chamber through the first screw nut mechanism.

By such a constitution, a specific form of the drive transmission mechanism corresponding to the first movable portion is given.

With the slicing unitized production line, in one possible implementation, the joining tool comprises a carrying part capable of carrying the workpiece, so that the carrying part and the workpiece move along with the movement of the first movable part under the condition that the workpiece is carried on the carrying part.

It is understood that the structural form, number and specific manner of carrying the work pieces can be determined by those skilled in the art according to actual requirements. For example, the mounting portion may have a static mounting space or may form a dynamic mounting space.

For the above slicing unitizing production line, in one possible embodiment, the carrying portion includes a second movable portion including a first portion and a second portion, the first portion and the second portion being capable of relative movement therebetween in a direction approaching/separating from each other to hug the workpiece.

With this configuration, a possible configuration of the mounting portion is given.

It will be appreciated that the person skilled in the art can determine the form of construction of the first/second part, the manner of relative movement between the two, the manner of generation of the forces by means of which this movement is achieved, etc. according to the actual requirements. As may be the case where both the first and second portions are movable or only one of them is movable and the other stationary. The relative movement between the two can be achieved by manpower or by means of a reasonable driving transmission mechanism or the like.

For the slicing unitized production line, in one possible implementation manner, the linking tool comprises a second driving component, and the second driving component can drive the first part and/or the second part to move.

By such a construction, a possible way of the second movable part to achieve its movement is given.

Similar to the first drive member described above, it will be appreciated that the configuration of the second drive member and the particular manner in which it drives the first/second portions to effect relative movement therebetween will be determined by one skilled in the art based on actual requirements. For example, the second driving component can be a motor, a power cylinder (such as a cylinder, an electric cylinder and a hydraulic cylinder), a rotary module, a linear module and the like, and the second driving component can directly drive or indirectly drive the first part and the second part to generate relative movement through a transmission component such as a gear set, a gear rack mechanism, a screw nut mechanism and the like.

For the slicing unitized production line, in one possible implementation, the engagement tool comprises a second screw-nut mechanism, wherein a screw of the second screw-nut mechanism is provided with two threaded sections with opposite screwing directions, and the second driving component can drive the first part and the second part to move along a way of approaching/separating from each other through the second screw-nut mechanism.

By such a constitution, a specific form of the drive transmission mechanism corresponding to the second movable portion is given.

For the above slicing unitized production line, in one possible implementation manner, the engagement tool includes a tool base, and the first movable portion is disposed on the tool base.

By such a construction, a possible structural form of the joining tool is given. For example, the tool base body is mainly used as a mounting carrier, and thus, the first movable part and the second movable part are directly or indirectly arranged on the mounting base body. In addition, the tool substrate can be fixedly connected to the transfer mechanism, so that the connection tool is adapted to the production line. For example, the tool matrix can be a mounting rack, a mounting table board and the like.

For the slicing unitization production line, in one possible implementation mode, the slicing machine comprises a slicing machine body, a liquid path part and an electric control part, wherein the slicing machine body is provided with a cutting chamber, the liquid path part and the electric control part are arranged outside the cutting chamber, and in an assembled state, the arrangement mode of the liquid path part and the electric control part can enable the slicing machine to form an avoidance space so that a workpiece can realize feeding operation and/or discharging operation through the avoidance space.

By means of this construction, a possible design of the microtome is provided.

It is understood that the structural form of the liquid path portion and the electric control portion, the arrangement position of each relative to the cutting chamber, the relative position therebetween, and the like can be determined by those skilled in the art according to actual requirements. For example, the liquid path part/the electric control part can be arranged in a concentrated mode or in a split mode. The two can be arranged in a concentrated way or separated way.

It will be appreciated that a person skilled in the art may determine the specific form, orientation, etc. of the avoidance space according to the actual loading and unloading requirements, for example, the avoidance space allows the member to be loaded from the front end, the rear end, or the side of the cutting chamber.

For the slicing unitized production line, in one possible implementation manner, the electric control part comprises a first electric control cabinet and a second electric control cabinet, and the first electric control cabinet and the second electric control cabinet are arranged in a centralized manner or in a split manner.

By means of this construction, possible configurations of the electrical control unit are provided.

It will be appreciated that a person skilled in the art may determine the distribution manner of the first/second electric control cabinets according to actual requirements, e.g. according to a high voltage and a low voltage division, e.g. one of the first electric control cabinet and the second electric control cabinet is a high voltage electric control cabinet and the other is a low voltage electric control cabinet.

For the slicing unitized production line, in one possible implementation manner, the liquid path portion includes a liquid path system, and the liquid path system includes a first liquid path unit and a second liquid path unit, where the first liquid path unit and the second liquid path unit are set in a centralized manner or set separately.

By this construction, a possible configuration of the liquid passage portion is given.

It is understood that the manner of distribution of the first/second fluid path units may be determined by those skilled in the art according to actual needs, for example, according to the circulation division of the cutting fluid, such as that one of the first fluid path unit and the second fluid path unit is an outer circulation fluid path unit and the other is an inner circulation fluid path unit.

For the slicing unitizing production line, in one possible embodiment, the liquid path portion includes a liquid supply cylinder disposed at a position adjacent to the first liquid path unit or the second liquid path unit.

For the slicing unitized production line, in one possible implementation manner, the first liquid path unit and the second liquid path unit are respectively arranged at two sides of a cutting chamber of the slicing machine, and the first electric control cabinet and the second electric control cabinet are respectively arranged above the first liquid path unit and the second liquid path unit, so that the avoidance space is formed between the first electric control cabinet and the second electric control cabinet.

By this construction, a possible design of the avoidance space is provided.

For the slicing unitized production line, in one possible implementation manner, a reserved space is formed below the first liquid path unit, and the liquid supply cylinder is disposed in the reserved space.

By this construction, a possible arrangement of the supply cylinders is given.

For the slicing unitized production line, in one possible implementation manner, the first liquid path unit and the second liquid path unit are arranged in a centralized manner to form a first assembly, the first electric control cabinet and the second electric control cabinet are arranged in a centralized manner to form a second assembly,

The first and second components are disposed on both sides of the cutting chamber and thus form the escape space therebetween.

By this construction, a possible design of the avoidance space is provided.

For the above slicing unitizing production line, in one possible embodiment, the supply cylinder is disposed between the second assembly and the second assembly.

By this construction, a possible arrangement of the supply cylinders is given.

For the slicing unitized production line, in one possible implementation manner, the first liquid path unit and the second liquid path unit are arranged in a centralized manner to form a first component, the first electric control cabinet and the second electric control cabinet are arranged in a centralized manner to form a second component, and the first component and the second component are arranged on one side of the cutting chamber along the feeding and discharging direction of the workpiece in a longitudinally stacked manner, and therefore an open avoidance space is formed between the cutting chamber and one side of the cutting chamber.

By this construction, a possible design of the avoidance space is provided.

For the slicing unitizing production line, in one possible implementation manner, the liquid supply cylinder is arranged beside a structure formed by longitudinally stacking the first component and the second component, and projects toward a cutting chamber along the feeding and discharging direction of the workpiece, and the cutting chamber and the liquid supply cylinder are at least partially overlapped.

By this construction, a possible arrangement of the supply cylinders is given. It is possible, for example, to provide a portion on the other side of the cutting chamber so as not to overlap the cutting chamber, to provide a portion entirely between the two sides so as to overlap the cutting chamber, and to provide a portion between the two sides and another portion on the other side so as to overlap the cutting chamber.

For the slicing unitized production line, in one possible implementation manner, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly, and the second assembly is configured in the cutting chamber in a suspension manner.

By this construction, a possible design of the avoidance space is provided.

It can be understood that the suspended setting mode and setting position of the second component can be arbitrarily selected according to actual requirements.

In a second aspect, the invention provides a control method of a slicing unitization production line, the slicing unitization production line comprises a transfer mechanism, an engagement tool and at least one slicing machine, the transfer mechanism comprises a ground rail robot, the control method comprises the steps of enabling the ground rail robot to send a target position matched with the slicing machine or remove a workpiece from the target position, and enabling the engagement tool to send the workpiece to a cutting area of the slicing machine or remove the workpiece from the cutting area.

With such a construction, a possible implementation of the dicing singulation line is given.

It will be appreciated that the person skilled in the art may determine the orientation of the target position and its specific form of adaptation to the microtome according to the actual requirements, as long as such adaptation can be accurately and reliably achieved by means of the determined structure, the set logic, etc.

It should be noted that the structural forms of the relevant components mentioned herein and in the control method below may include, but are not limited to, the specific forms in the slicing singulation line mentioned above.

In one possible implementation manner of the control method of the slicing unitized production line, the slicing machine can construct an avoidance space, and in the step of enabling the ground track robot to reach a target position matched with the slicing machine or removing a workpiece from the target position, the workpiece at the target position can realize feeding and/or discharging operation for a cutting area of the slicing machine through the avoidance space.

By such a construction, a possible form of adaptation is given.

In one possible implementation manner of the control method of the slicing unitized production line, the slicing machine comprises a liquid path portion and an electric control portion, and the liquid path portion and the electric control portion are configured in a manner that the slicing machine can create an avoidance space.

By this construction, a possible design of the avoidance space is provided.

For the control method of the slicing unitization production line, in one possible implementation mode, the electric control part comprises a first electric control cabinet and a second electric control cabinet, the first electric control cabinet and the second electric control cabinet are arranged in a centralized manner or are arranged in a split manner, the liquid path part comprises a liquid path system, the liquid path system comprises a first liquid path unit and a second liquid path unit, the first liquid path unit and the second liquid path unit are arranged in a centralized manner or are arranged in a split manner, the first liquid path unit and the second liquid path unit are arranged on two sides of the cutting chamber in a split manner, and the first electric control cabinet and the second electric control cabinet are respectively arranged above the first liquid path unit and the second liquid path unit, so that the avoidance space is formed between the first electric control cabinet and the second electric control cabinet; the first liquid path unit and the second liquid path unit are arranged in a concentrated manner to form a first component, the first electric control cabinet and the second electric control cabinet are arranged in a concentrated manner to form a second component, the first component and the second component are arranged on two sides of the cutting chamber in a separated manner and form the avoidance space between the two components, the first liquid path unit and the second liquid path unit are arranged in a concentrated manner to form a first component, the first electric control cabinet and the second electric control cabinet are arranged in a concentrated manner to form a second component, the first component and the second component are arranged on one side of the cutting chamber along the feeding and discharging direction of a workpiece in a longitudinal stacking manner and form an open avoidance space between the cutting chamber and one side of the cutting chamber, the first liquid path unit and the second liquid path unit are arranged in a concentrated manner to form the first component, the first electric control cabinet and the second electric control cabinet are arranged in a concentrated manner to form the second component, the first component is arranged on one side of the cutting chamber along the feeding and discharging directions of the workpiece, and the second component is movably arranged in the cutting chamber, so that an open avoidance space is formed above the first component.

With this configuration, a possible implementation of the configuration of the escape space by the electric control section and the liquid passage section is given.

In one possible implementation mode, the connection tool comprises a first movable part, at least one abutting structure is arranged on the first movable part, and the step of enabling the connection tool to send workpieces to a cutting area of the slicing machine or remove workpieces from the cutting area comprises the steps of enabling the abutting structure to be fixedly connected with the workpieces, and enabling the first movable part to move in a direction approaching to/separating from a cutting chamber of the slicing machine, so that the workpieces can be sent to the cutting area of the slicing machine or removed from the cutting area.

By such a construction, a possible implementation of the movement of the workpiece in the projection plane of the horizontal plane between the target position and the cutting position by the engagement tool is given.

In one possible implementation manner, the workpiece is carried on a crystal holder, and in the step of 'fixing the abutting structure to the workpiece and moving the first movable part in a direction approaching/separating from a cutting chamber of the slicing machine so as to send the workpiece to the cutting area of the slicing machine or remove the workpiece from the cutting area', the 'fixing the abutting structure to the workpiece' comprises the step of enabling the abutting structure to be matched with the crystal holder and enabling the abutting structure to be fixedly connected to the workpiece.

By such a construction, a possible implementation of the fastening of the joining tool comprising the first movable part to the workpiece is given.

In one possible implementation manner, the crystal support comprises an operation end, and the step of enabling the docking structure to be matched with the crystal support and enabling the docking structure to be fixedly connected with a workpiece comprises enabling the transfer mechanism to drive the docking structure to move downwards and extend into the operation end so as to be matched with the crystal support and enabling the docking structure to be fixedly connected with the workpiece.

With such a construction, a specific implementation of the fastening is given.

In one possible implementation manner, the first movable part is a strip structure, a plurality of abutting structures are arranged on the strip structure along the length direction of the strip structure, and the step of enabling the abutting structures to be matched with the crystal support and enabling the abutting structures to be fixedly connected with the workpiece comprises the step of enabling the first movable part to move in a direction approaching to/separating from a cutting chamber of the slicing machine so that one of the abutting structures is matched with the crystal support.

With the structure, the loading operation or the unloading operation matched with the butt joint structure at different positions can be realized through the cooperation of the butt joint structure.

In one possible implementation manner, the engagement tool comprises a first driving component, and in the step of enabling the abutting structure to be fixedly connected with a workpiece and enabling the first movable part to move in a direction approaching to/separating from a cutting chamber of the slicing machine so as to convey the workpiece to the cutting area of the slicing machine or remove the workpiece from the cutting area, the step of enabling the first movable part to move in the direction approaching to/separating from the cutting chamber of the slicing machine comprises enabling the first driving component to drive the first movable part to move in a mode approaching to/separating from the cutting chamber of the slicing machine.

In one possible implementation manner, the connection tool comprises a carrying part, and in the step of 'fixing the abutting structure to the workpiece and enabling the first movable part to move in a direction approaching/separating from a cutting chamber of the slicing machine so as to send the workpiece to the cutting area of the slicing machine or remove the workpiece from the cutting area', the step of 'enabling the first movable part to move in a direction approaching/separating from the cutting chamber of the slicing machine' comprises that the carrying part and the workpiece move along with the movement of the first movable part under the condition of carrying the workpiece to the carrying part.

With this construction, a possible implementation of the cooperation of the work piece with the joining tool is given.

With the control method of the slicing unitization line described above, in one possible embodiment, the mounting portion includes a second movable portion including a first portion and a second portion, and in the step of "in the case of mounting the workpiece to the mounting portion, the mounting of the workpiece to the mounting portion" includes causing relative movement between the first portion and the second portion in a direction approaching/separating from each other so as to hug the workpiece.

With this configuration, a possible implementation of mounting the work on the joining tool is given.

In one possible implementation manner, the engagement tool comprises a second driving component, and the step of enabling the first part and the second part to generate relative motion along the direction of approaching/separating from each other so as to tightly hold the workpiece comprises enabling the second driving component to drive the first part and/or the second part to move so as to enable the first part and the second part to generate relative motion along the direction of approaching/separating from each other so as to tightly hold the workpiece.

By this construction, a possible implementation of the second movable part holding the workpiece tightly is given.

For the control method of the slicing unitizing production line, in one possible implementation, the engagement fixture comprises a second screw nut mechanism, a screw of the second screw nut mechanism has two threaded sections with opposite directions, and the "making the second driving part drive the first portion and/or the second portion to move" comprises making the second driving part move in a manner of approaching/moving away from each other by driving the second screw nut mechanism and thus making the first portion and the second portion matched with the threaded sections with opposite directions of rotation of the two sections.

By this construction, a specific implementation is given in which the workpiece is held tightly by the second movable part.

In one possible implementation manner, the control method of the slicing unitized production line comprises a feeding assembly and a discharging assembly, and the control method comprises the step that the ground rail robot drives a workpiece to move between a feeding area corresponding to the feeding assembly and a discharging area corresponding to the discharging assembly.

With such a constitution, a possible implementation of slicing unitization operation corresponding to the production line is given. For example, a plurality of slicers share a loading area and a unloading area, so that a walking path corresponding to one-time slicing operation of a workpiece approximately comprises loading area to target position, target position to cutting area, cutting area to target position, target position to unloading area.

In a third aspect, the invention provides a computer readable storage medium comprising a memory adapted to store a plurality of program codes adapted to be loaded and executed by a processor to perform the method of controlling a slice singulation line of any of the preceding claims.

It can be appreciated that the computer readable storage medium has all technical effects of the control method of the slicing and unitizing production line described in any one of the foregoing, and will not be described herein.

It will be appreciated by those skilled in the art that the present invention may implement all or part of the control method of the slicing and unitizing production line, and may be implemented by a computer program for instructing relevant hardware, where the computer program may be stored in a computer readable storage medium, and the computer program may implement the steps of the above-described method embodiments when executed by a processor. Wherein the computer program comprises computer program code, it being understood that the program code comprises, but is not limited to, program code for performing the control method of the slicing unitized production line described above. For convenience of explanation, only parts relevant to the present invention are shown. The computer program code may be in the form of source code, object code, executable files, or in some intermediate form. The computer readable storage medium may include any entity or device capable of carrying the computer program code, a medium, a U disk, a removable hard disk, a magnetic disk, an optical disk, a computer memory, a read-only memory, a random access memory, an electrical carrier wave signal, a telecommunication signal, a software distribution medium, etc. It should be noted that the computer readable storage medium may include content that is subject to appropriate increases and decreases as required by jurisdictions and by jurisdictions in which such computer readable storage medium does not include electrical carrier signals and telecommunications signals.

In a fourth aspect, the invention provides a computer device comprising a memory and a processor, the memory being adapted to store a plurality of program codes, the program codes being adapted to be loaded and executed by the processor to perform the control method of the slice singulation line of any of the preceding claims.

It will be appreciated that the apparatus has all technical effects of the control method of the slicing and unitizing production line described in any one of the foregoing, and will not be described in detail herein. The device may be a computer controlled device formed from a variety of electronic devices.

Drawings

The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, in which the workpiece is a silicon rod (hereinafter referred to as a silicon rod, including a silicon rod including a wafer holder to be processed and a processed silicon wafer including a wafer holder), and the transfer mechanism includes a ground rail robot (the ground rail robot has the obvious advantages that the apparatus is disposed on the ground, so that inspection and maintenance are easy, but there are also disadvantages such as high safety risks, and a need to enclose an operation space), and in which:

FIG. 1 shows a schematic diagram of a slicing unitizing production line according to one embodiment of the present invention;

Fig. 2 shows a schematic structural diagram of a joining tool in a slicing and unitizing production line according to an embodiment of the present invention;

fig. 3 shows a second schematic structural diagram of a joining tool in a slicing and unitizing production line according to an embodiment of the present invention;

fig. 4 shows a third schematic structural diagram of a joining tool in a slicing and unitizing production line according to an embodiment of the present invention;

fig. 5 shows a schematic diagram of a state of a joining tool for feeding operation of a single microtome in a microtome unit production line (a ground rail robot is in place) according to an embodiment of the present invention;

fig. 6 shows a second schematic state diagram of a joining tool for feeding operation of a single machine of a slicing machine (a handle of a tail end of a crystal support is hooked by an extending end at a rear part of the joining tool) in a slicing unitized production line according to an embodiment of the invention;

Fig. 7 shows a third schematic view of a state of a joining tool for feeding operation of a single machine of a slicer in a slicing unitized production line according to an embodiment of the present invention (the whole material exits from the inside of the fixture and is joined to an inner rail of the cutting chamber);

Fig. 8 shows a fourth schematic state diagram of a joining tool for feeding operation of a single machine of a slicing machine (a first movable part of the joining tool extends out to hook a handle at the tail end of a crystal support) in a slicing unitized production line according to an embodiment of the invention;

fig. 9 shows a fifth state diagram of a feeding operation of the joining tool for a single slicer in the slicing and unitizing production line according to one embodiment of the present invention (pushing the whole material into the cutting chamber);

fig. 10 shows a schematic diagram of a state of a joining tool for a single-machine blanking operation of a slicer in a slicing unitized production line (a ground rail robot is in place) according to an embodiment of the present invention;

FIG. 11 shows a second schematic view of a state of a joining tool (a first movable portion of the joining tool extends to hook a handle at a tail end of a crystal support) for a single machine blanking operation of a slicing machine in a slicing unitized production line according to an embodiment of the present invention;

Fig. 12 shows a third schematic view of a state of a joining tool for a single-machine blanking operation of a slicer (pulling the whole material out of a cutting chamber) in a slicing unitized production line according to an embodiment of the present invention;

Fig. 13 shows a fourth schematic view of a state of a joining tool for a single-machine blanking operation of a slicing machine in a slicing and unitizing production line according to an embodiment of the present invention (a first movable portion of the joining tool stretches out again, and a stretching end at a rear portion thereof hooks a handle at a tail end of a crystal support);

Fig. 14 shows a fifth state diagram of a joining tool for a single-machine blanking operation of a slicer (pulling the whole material into the interior of the jig) in a slicing unitized production line according to an embodiment of the present invention;

FIG. 15 is a schematic view showing the structure of a single microtome in a microtome unit production line according to one embodiment of the present invention;

FIG. 16 is a schematic view showing a single microtome in a microtome unit production line according to an embodiment of the present invention, and

Fig. 17 shows a third schematic view of the structure of a single microtome in a microtome unit process line according to an embodiment of the present invention.

List of reference numerals:

1. A production line main body;

21. The feeding area, 22, the blanking area;

3. a ground rail robot;

4. a connecting tool;

40. a mounting substrate;

41. the first movable part 411, the extending end 412, the first servo motor 413, the first screw nut mechanism;

421. first part 422, second part 423, second servo motor 424, second screw nut mechanism 425, second linear guide rail 426, clamping plate 427, protrusion;

5. A slicer;

51. 52, cutting chamber 53, cutting mechanism;

54. The device comprises a liquid path system, 541 an internal circulation liquid path unit, 542 an external circulation liquid path unit, 55 a liquid supply cylinder;

57. 571, the low voltage control cabinet, 572, the high voltage control cabinet;

61. Silicon rod 62, crystal support.

Detailed Description

Preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present invention, and are not intended to limit the scope of the present invention.

It should be noted that, in the description of the present invention, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In addition, it should be noted that, in the description of the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, directly connected, indirectly connected through an intermediate medium, or communicating between two members. The specific meaning of the above terms in the present invention can be understood by those skilled in the art according to the specific circumstances.

Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, it will be appreciated by those skilled in the art that the present invention may be practiced without some of these specific details. In some instances, principles of microtomes, rail robots, etc., well known to those skilled in the art, have not been described in detail in order to highlight the gist of the present invention. The present invention will be explained below with reference to all or part of fig. 1 to 17.

A microtome is a form of apparatus of a wire cutting machine, and is mainly used for cutting a silicon rod (commonly called a square rod) having a grinding accuracy reaching the standard by using a wire net composed of cutting wires (such as diamond wires, etc.) to obtain a silicon wafer. In general, the slicing operation is performed by fixing the crystal support on the feeding mechanism after the sticking of the stick is completed (the square stick to be sliced is stuck to the crystal support) in a sticking workshop, and in the process of reciprocating the wire mesh between the cutting main rollers of the cutting mechanism, the wire mesh can slice the square stick by a wire saw cutting manner by driving the silicon stick to approach the wire mesh by the feeding mechanism. If the slicing machine comprises a slicing machine body, a cutting chamber is formed on the slicing machine body, an operation door is arranged on the left side and the right side of the cutting chamber respectively, and a cutting mechanism is arranged in the cutting chamber. In this example, the cutting mechanism constituted by the plurality of main cutting rollers is constructed in such a manner that a single operation is a single-station structure capable of slicing one silicon rod.

In one possible embodiment, the present invention provides a slicing production line capable of realizing multi-machine automated production, and the production line mainly includes a production line main body 1, for example, the production line main body may include, but is not limited to, a necessary working table, an end allowing manual intervention, a part needing manual operation, a control end configured at an operation site, an acquisition end capable of acquiring an operation on site (such as a visual signal, an audio signal, etc.), a central control end capable of analyzing and controlling the slicing operation on site, and a reminding end capable of sending reminding information such as voice broadcasting, alarm, etc. if necessary. The production line includes a plurality of slicers 5 (single machines) disposed on the main body of the production line, on the basis of which, it is expected that the plurality of slicers simultaneously slice a silicon rod to be processed (a square rod after grinding) or select a part of the silicon rod to slice the silicon rod, for example, the plurality of single machines are disposed on the production line in a removable manner, so that the scale of the production line can be flexibly adjusted and the single machines can be replaced or overhauled after being removed. The configuration of the plurality of single units, the slicing operation mode, and the mode of arrangement thereof in the production line main body may be the same or different. Illustratively, the production line body includes a plurality of zones, wherein a single unit of a certain zone is mainly used for processing silicon wafers requiring more severe requirements, and thus the single unit corresponding to the zone has better processing accuracy.

In one possible embodiment, the production line body is provided with a loading assembly and a discharging assembly, wherein the loading assembly is connected with a glue shop or a glue area, and the silicon rods (bonded to the crystal trays) which are discharged from a curing warehouse of the glue shop can be transferred to the loading area 21 corresponding to the loading assembly by manual and/or automatic operation, and the trolley carrying the silicon rods is manually transferred to the loading area. The blanking assembly is connected with a degumming workshop or a degumming area, and the degumming workshop mainly carries out degumming treatment on silicon rods (a plurality of silicon wafers in a shape) which are adhered to the crystal support and are subjected to slicing operation. Similar to the previously described engagement between the glue shop and the loading operation, the silicon rods corresponding to the blanking area 22 of the blanking assembly may also be transferred to the degumming shop or degumming area by means of manual and/or automatic operations, for example, by manually transferring the trolley carrying the silicon rods to the degumming shop or degumming area. The up/down assembly typically includes an up/down cart or up/down rack, etc.

In one possible embodiment, the aforementioned multiple units share a single loading assembly and a single unloading assembly and employ similar loading and unloading control logic for the units. It is obvious that the structure of the feeding/discharging assembly can be adjusted according to actual requirements, for example, the method can include, but is not limited to, configuring a plurality of feeding assemblies and discharging assemblies for a plurality of slicing machines, such as configuring one feeding assembly and one discharging assembly for one or a plurality of single machines according to azimuth, priority, product model, attribute of a product to be processed (such as specificity or importance degree of a batch of products, etc.), and for one single machine or a plurality of single machines in the same row, for example, configuring one feeding assembly and one discharging assembly for a single machine, configuring one feeding assembly and one discharging assembly for a plurality of single machines, and configuring separate feeding and discharging control logic for one single machine or a plurality of single machines (such as also according to the azimuth, priority, product model, attribute of a product to be processed, etc.).

Taking a group of feeding components and a group of discharging components for example, the production line comprises a transfer mechanism, and the transfer mechanism is mainly used for realizing the transfer among the silicon rod to be sliced and the cut silicon wafer between the feeding components, the slicing machine and the discharging components and the transfer among the feeding components and the discharging components respectively, such as the transfer (feeding operation) of the silicon rod to be sliced, the transfer (discharging operation) of the silicon wafer after the cut between the slicing machine and the discharging components, the corresponding operation in the feeding/discharging components, the connection operation such as material taking and discharging in the area between the feeding/discharging components and the two, and the like.

In one possible embodiment, the transfer mechanism includes a manipulator/robot capable of traveling at least in a direction between the feeding component, the discharging component, and different slicers, as in this embodiment, the transfer mechanism manipulator is a ground rail robot 3, and the ground rail robot is configured to travel between the feeding component and the discharging component (as in a length direction corresponding to the slicing unitized production line, may be referred to as a length direction) by cooperation with a ground rail disposed on the production line main body, travel in a direction of moving into/out of a cutting area of a single machine (as in a width direction corresponding to the slicing unitized production line, may be referred to as a width direction), and a movement requirement in a vertical direction (as may be referred to as a longitudinal direction). For example, the corresponding single machine quantity can be calculated according to the logic beat of the group control system, so that the silicon rod can be used for loading and unloading operation of the single machine (moving in/out from a cutting area of the single machine) and the production line (entering a loading area of the production line or moving out of a discharging area of the production line) by walking of the ground rail robot in the corresponding dimension.

The production line is mainly operated in such a way that, for example, a group control system can be combined with the number of silicon rods to be processed, the equipment state of the single machine, the state of a ground rail robot and the like to match a proper single machine for the silicon rods to be processed at present, and based on the group control system, the ground rail robot conveys the silicon rods to be processed to a preset target position which can be connected with the single machine of the slicing machine through running cooperation along the length direction and the width direction of the ground rail from a feeding area corresponding to the feeding assembly according to the control instruction of the group control system. In the case where the silicon rod arrives at the target position, the group control system reconfirms the state information of the single microtome, such as state information including but not limited to in operation, in debugging, in maintenance, in fault processing, in standby, corresponding to the current arrival job, based on, for example, equipment management information, etc. After the local rail robot fails, the feeding of a single machine of the current slicing machine can be realized by replacing the local rail robot on the front wall of the cutting chamber in a manual feeding mode. After the single machine of the slicing machine completes slicing operation on the silicon rod, the ground rail robot moves the cut silicon wafer containing the crystal support to a blanking area corresponding to the blanking component through a walking path similar to the feeding operation path.

It can be seen that in the whole slicing unitized production line of the invention, the functional area mainly comprises a feeding area corresponding to the feeding assembly, a slicing area corresponding to a plurality of single slicing machines, a discharging area corresponding to the discharging assembly and a temporary storage area for temporarily storing the carrying trolley. Based on this, by means of walking of the ground rail robot on the ground rail, the movement of the silicon rod between different microtome units can be achieved.

In one possible embodiment, the production line body is provided with a joining tool 4, which can be arranged on a robot, and a silicon rod or wafer containing a wafer support can be mounted to the joining tool. The connecting tool is mainly used for moving a silicon rod containing a crystal support into a single cutting area through matching with the mechanical arm so as to realize slice feeding operation for the single machine, or moving a silicon wafer containing the crystal support out of the single cutting area so as to realize slice discharging operation for the single machine.

In one possible embodiment, the engagement fixture 4 includes a fixture base 40 as a mounting carrier, and a first movable portion 41 and a second movable portion provided on the fixture base, such as a robot arm, on which the engagement fixture can be mounted by being engaged with the fixture base. Illustratively, the tooling substrate is generally a plate-like structure. The first movable part can move along the direction of moving in/out from the cutting area of the single machine so as to drive the silicon rod containing the crystal support to move along the direction, and the second movable part can form a clamping space for tightly holding the silicon rod containing the crystal support. Therefore, on the basis that the silicon rod containing the crystal support is held tightly by the second movable part, the loading and unloading operation of the silicon rod containing the crystal support on a single machine can be realized by means of the first movable part.

In one possible embodiment, the first movable portion 41 generally comprises a strip-like structure disposed along the aforesaid direction of insertion/removal from the cutting area of the single machine, the strip-like structure being provided or formed along its length with a docking structure capable of cooperating with the operating end of the crystal holder so as to achieve a rigid connection between the first movable portion and the crystal holder by means of the docking structure. Illustratively, the docking structure is a protruding end 411 extending downward from the strip structure, the protruding end being capable of mating with a handle at the end of the wafer support as one of the operating ends to effect a secure connection between the first movable portion and the wafer support. Therefore, under the driving of the servo motor, the strip-shaped structure can freely slide in the groove on the upper surface of the crystal support, the connecting tool is driven to move downwards/upwards by the manipulator, and the extending end is matched with the handle at the tail end of the crystal support, so that the crystal support is clamped or released, and the strip-shaped structure is loosened. In the present invention, two protruding ends are provided at substantially two ends of the strip-like structure, respectively.

Illustratively, the first movable portion includes a first servo motor 412 that moves the strip-like structure in a direction of moving in/out from the cutting area of the single machine via a first lead screw nut mechanism 413. For example, to ensure that the movement of the first movable part is more stable, a first linear guide (not shown) may be arranged on the second movable part along the direction of the first movable part, and in this example, one first linear guide is arranged on each of two sides of the strip-shaped structure, and correspondingly, a sliding groove or a sliding hole capable of being matched with the linear guide is arranged at the end of the strip-shaped structure.

In one possible embodiment, the second movable portion includes oppositely disposed first and second portions 421 and 422 for holding or releasing the workpiece by moving the first and/or second portions in a direction toward/away from each other. Illustratively, if the second movable portion is configured with a second servo motor 423, the second servo motor is connected with a second screw-nut mechanism 424, and the screw of the second screw-nut mechanism includes two threaded sections with opposite rotation directions, and nuts adapted to the threaded sections with opposite rotation directions are fixedly connected with the first portion and the second portion, respectively. In this way, approaching/separating between the two parts can be achieved. For example, in order to ensure a more stable approaching/separating movement between the two clamping portions, a second linear guide 425, which is adapted to a second spindle nut mechanism, may be arranged between the first and the second portion.

In one possible embodiment, in order to ensure that the two clamping portions can clamp the silicon rod containing the crystal support more reliably, the first/second portions are formed with clamping structures on sides close to each other, for example, the first/second portions have vertically arranged clamping plates 426 on the portions close to each other, and a plurality of protrusions 427 with buffering function are arranged on the clamping plates, so that the reliability of clamping can be ensured by multi-point clamping. Of course, the protrusion 427 may be directly fixed to the first and second portions. As in the present example, the first/second portions can be mated with a pair of sides of the wafer support, respectively, to clasp a silicon rod containing the wafer support within a clamping space formed by the first and second portions. Illustratively, the clamping plate includes a transverse portion and a vertical portion, the clamping plate being disposed inboard of the vertical portion, and reinforcing structures such as reinforcing ribs, reinforcing plates, etc. being disposed between the transverse portion and the vertical portion.

Referring mainly to fig. 5 to 9, as based on the above-described structure, after the ground rail robot conveys the silicon rod (in the length direction and the width direction) in place (fig. 5), the slice feeding work flow for the single-machine cutting chamber mainly includes the following steps:

S11, enabling the ground rail robot to drive the connection tool to move downwards, enabling the extending end of the tail end (the right end in fig. 5) of the strip-shaped structure to move downwards so as to hook the handle of the tail end of the crystal support, and therefore the rear end of the strip-shaped structure is fixedly connected with the silicon rod containing the crystal support.

S12, the first servo motor 412 drives the strip-shaped structure to move (extend) towards the direction of the cutting chamber, so that the whole material (silicon rod containing the crystal support) is pushed out of the connecting tool, and the crystal support enters the feeding guide rail of the slicing machine.

S13, the ground rail robot drives the connection tool to move upwards, so that the extending end at the rear end of the strip-shaped structure moves upwards to leave the handle at the tail end of the crystal support. The first servo motor 412 drives the strip-shaped structure to move (retract) towards the direction of the engagement tool, and the ground track robot drives the engagement tool to move downwards, so that the extending end of the front end (the left end in fig. 5) of the strip-shaped structure moves downwards, and the extending end of the front end of the strip-shaped structure hooks the handle of the tail end of the crystal support, so that the front end of the strip-shaped structure is fixedly connected with the silicon rod containing the crystal support.

S14, the first servo motor 412 drives the strip structure to move (extend) towards the cutting chamber, so that the strip structure moves (extends) again towards the cutting chamber, and the whole material is pushed into the single cutting chamber.

S15, the ground rail robot drives the connection tool to move upwards, so that the extending end at the front end of the strip-shaped structure moves upwards to leave the handle at the tail end of the crystal support. The first servo motor 412 then drives the bar-like structure to move (retract) into the interior of the engagement tool in a direction toward the engagement tool.

Similarly, still based on the above structure, after the manipulator conveys the silicon rod (in the length direction and the width direction) in place (fig. 10), the dicing and blanking operation flow for the single-machine cutting chamber mainly refers to fig. 10 to 14, and as in the state shown in fig. 14, the strip-shaped structure moves in the direction away from the cutting chamber (gradually into the interior of the joining tool), so that the whole material (silicon rod including the crystal support) is pulled into the space below the joining tool.

It can be seen that the arrangement of the two extending ends of the front end and the tail end of the strip-shaped structure and the cooperation of the strip-shaped structure and the crystal support and the corresponding movement mode thereof are combined, so that the feeding and discharging operation of the single-machine cutting chamber is reliably realized.

In one possible implementation, a rear loading and unloading port may be disposed on a rear wall of the cutting chamber (near a feeding position of the unitized production line), a rear automatic loading and unloading door may be disposed at a position corresponding to the rear loading and unloading port, an automatic loading and unloading auxiliary rail may be disposed between the crystal support and the rear automatic loading and unloading door, and the orientation and structure of the automatic loading and unloading auxiliary rail and the crystal support may be adapted (e.g., the height is approximately level).

In one possible implementation manner, a front-end manual feeding and discharging door can be arranged on the front wall of the cutting chamber, a manual feeding and discharging auxiliary guide rail is arranged between the front-end manual feeding and discharging door and the crystal support, and the direction and structure of the manual feeding and discharging auxiliary guide rail and the crystal support can be adapted (such as the height is approximately level). Therefore, the silicon rod containing the crystal support can be fed through the front end manual feeding and discharging door and the manual feeding and discharging auxiliary guide rail by means of carrying equipment such as a feeding trolley, so that forearm feeding is realized, or the silicon wafer containing the crystal support is discharged after slicing operation is finished. For example, when the slicing machine is used as a minimum unit sold separately, the front-end manual feeding and discharging door can be used for feeding and discharging the slicing machine which is separated from the slicing unitized production line scene. And, if the feeding failure occurs in the slicing unitized production line, the feeding and discharging operation of the corresponding single slicer machine can be realized by means of the front-end feeding and discharging port.

On the one hand, the process of serial connection among the transfer mechanism, the feeding/discharging assembly, the connecting tool and the single machine of a plurality of slicing machines can be realized to unitize and automate slicing operation. On the other hand, the traditional manual feeding and discharging operation in the scene of separating from unitization and automation operation can be realized in a manual feeding and discharging mode. In this way, the single microtome unit as the basic microtome unit in the slicing unitized production line of the present invention is expected to be sold in a form of an element of a product constituting the production line, or can be sold in a separate form after being directly or through acceptable adjustment (for example, the structural form and the arrangement orientation of a liquid path system, an electric control cabinet, a liquid supply cylinder, etc. are adjusted to an acceptable degree on the premise of being allowed, for example, the restriction set for adapting to the scene of the unitized production line can be removed to a certain extent on the basis of the adjustment, and the microtome unit as the basic microtome unit in the slicing unitized production line of the present invention is more friendly to adapt to different application scenes according to actual demands, and has good commercial prospects.

Embodiment one:

Referring mainly to fig. 15, in one possible embodiment, the slicer 5 includes, in addition to the aforementioned slicer body 51 (including a frame and the like), a cutting chamber 52, a cutting mechanism 53 around which a cutting line is provided and which forms a cutting wire net, a liquid path portion including, for example, a liquid path system 54, a liquid supply cylinder 55, and a cutting liquid charging cart (not shown), and an electric control portion including, for example, an electric control cabinet 57, the main functions of the cutting liquid continuously supplied by the liquid path system including cooling, lubrication, and taking away silicon powder and the like generated at a kerf during slicing operation. As in the present embodiment, the fluid path system includes an inner circulation fluid path unit 541 and an outer circulation fluid path unit 542 which are separately provided, and the electric control cabinet 57 is provided in two according to low pressure and high pressure (e.g., respectively denoted as a low pressure electric control cabinet 571 and a high pressure electric control cabinet 572), and a fluid supply cylinder capable of supplying and recovering the cutting fluid is provided in a bottom space of the fluid path system.

In order to adapt to the necessary coordination of the single microtome, the engagement tool and the transfer mechanism required in the slicing and unitizing production line, in this embodiment, the liquid path system is disposed at the rear side of the cutting chamber, and the inner circulation liquid path unit and the outer circulation liquid path unit are disposed at the rear position of the cutting chamber and on both sides. The low-voltage control cabinet and the high-voltage control cabinet are respectively arranged above the inner circulation liquid path unit and the outer circulation liquid path unit. Therefore, the space between the two electric control cabinets can form a necessary avoiding space for feeding operation from the rear end (the position close to the feeding and discharging opening on the rear end of the single slicer) to the front end (the position close to the ground rail), so that the avoiding space for automatic feeding and discharging operation of the single slicer can be formed.

The base of the internal circulation liquid path unit rises to reserve space for the liquid supply cylinder, so that the liquid supply cylinder can be arranged below the internal circulation liquid path unit. Because the dead weight of the high-voltage control cabinet is heavier than that of the low-voltage control cabinet, the base of the external circulation liquid path unit directly falls to the ground. The cutting fluid adding trolley can be arranged on one side close to the external circulation fluid path unit.

It can be understood that, under the premise of ensuring that the slicing machine single machine can be adapted to a slicing unitized operation production line, a person skilled in the art can flexibly adjust elements of the slicing machine single machine and relative positions among the elements according to actual conditions. For example, the single microtome may also be (including but not limited to) the following constitution modes:

Embodiment two:

referring mainly to fig. 16, unlike the first embodiment, in this embodiment, the fluid path system and the electric control cabinet are separately disposed at positions behind the cutting chamber and on both sides, and the fluid supply cylinder is disposed at a position between the fluid path system and the electric control cabinet. Therefore, a space between the liquid path system and the electric control cabinet forms an avoidance space capable of ensuring automatic feeding and discharging operation of a single machine of the slicing machine.

Embodiment III:

Referring mainly to fig. 17, unlike the second embodiment, in this embodiment, the fluid path system and the electric control cabinet are disposed at one side behind the cutting chamber of the single microtome in a longitudinally stacked manner, wherein the fluid path system is located below the electric control cabinet. The liquid supply cylinder is arranged beside the liquid path system and the electric control cabinet, and has no overlapping or a certain overlapping part with the cutting chamber in space if observed along the automatic feeding and discharging direction. Therefore, the liquid path system and the electric control cabinet are arranged without interference due to the lower height of the liquid supply cylinder, so that the formation of an avoidance space for automatic feeding and discharging operation of a single slicer can be ensured.

Embodiment four:

In this embodiment, the electric control cabinet is adjusted to be a hanging cabinet which is arranged in a hanging manner, so that a space between two liquid path units of the liquid path system forms an avoidance space capable of ensuring automatic feeding and discharging operations of a single machine of the slicing machine. It can be understood that the suspended setting mode and setting position of the hanging cabinet can be arbitrarily selected according to actual requirements.

In the slicing unitized production line of the invention, the single slicer is better adapted to the production line by making necessary adjustments to the conventional slicer. Based on the above, the silicon rod containing the crystal support before slicing and the silicon wafer containing the crystal support after slicing can be connected between the feeding component and the discharging component through the configuration of the transfer mechanism such as a ground track robot. Through the configuration of the connection tool, the silicon rod before slicing and the monocrystalline silicon rod containing the crystal support after slicing can be flexibly and smoothly connected between the ground track robot and any single machine. On the basis, the single machine operation, the operation between the single machine and the ground rail robot and the operation between the feeding assembly and the discharging assembly are analyzed, and corresponding control logic is provided (for example, the control logic can be a group control system comprising field control and remote central control), so that the unitized production of slicing operation can be realized. On the basis of unitization of slicing operation, the method is expected to better meet the market development requirements of sliced products such as silicon wafers and the like, and better caters to the development trend of the photovoltaic industry.

Thus far, the technical solution of the present invention has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present invention is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present invention, and such modifications and substitutions will fall within the scope of the present invention.

Claims

1. A slicing unitized production line, characterized in that the production line comprises:

A production line main body;

At least one microtome disposed on the production line body and capable of forming an avoidance space, and

And the transfer mechanism comprises a ground rail robot, wherein the ground rail robot can carry a workpiece and at least can convey the workpiece to a position of the slicer corresponding to the avoidance space.

2. The slicing and unitizing production line of claim 1, wherein the production line body is configured with a loading assembly and a blanking assembly,

The transfer mechanism can move between a feeding area corresponding to the feeding assembly and a discharging area corresponding to the discharging assembly.

3. The slicing and unitizing production line of claim 2, wherein the relay mechanism is movable toward/away from the slicer at a position between the loading area and the unloading area.

4. The slicing and unitizing production line of claim 1, wherein the relay mechanism is movable in a vertical direction toward/away from the slicer.

5. The slicing unitized production line of claim 1, wherein the production line body is configured with a joining tool, the joining tool can be disposed in the transfer mechanism, and a workpiece can be carried to the joining tool.

6. The slicing unitized production line of claim 5, wherein the engagement tooling comprises:

A first movable portion movable in a direction toward/away from a cutting chamber of the microtome, and

At least one butt joint structure capable of fixedly connecting the first movable part with a workpiece is arranged on the first movable part.

7. The slicing unitized production line of claim 6, wherein the workpiece is carried on a wafer carrier, the docking structure being capable of mating with the wafer carrier and thereby effecting a secure attachment of the workpiece to the first movable portion.

8. The slicing and unitizing production line of claim 7, wherein the crystal holder comprises an operating end, and the docking structure is fixedly connected with the crystal holder by extending into the operating end.

9. The slicing and unitizing production line of claim 8, wherein the first movable portion is a strip-like structure having a plurality of the abutting structures disposed thereon along a length thereof.

10. The slicing and unitizing line of claim 9, wherein the strip structure has a first end and a second end,

The strip-shaped structure is provided with the abutting structure at the first end or a position close to the first end, and the strip-shaped structure is provided with the abutting structure at the second end or a position close to the second end.

11. The slicing unitized production line of claim 6, wherein the engagement tooling comprises:

A first driving part capable of driving the first movable part to move in a manner of approaching/separating from the cutting chamber.

12. The slicing unitized production line of claim 11, wherein the engagement tooling comprises:

the first driving part can drive the first movable part to move along a mode of approaching/separating from the cutting chamber through the first lead screw nut mechanism.

13. The slicing unitized production line of claim 6, wherein the engagement tooling comprises:

a carrying portion capable of carrying a workpiece so as to:

In the case of loading a workpiece onto the loading portion, the loading portion and the workpiece move with the movement of the first movable portion.

14. The slicing and unitizing production line of claim 13, wherein the carry-on portion includes a second movable portion,

The second movable portion includes a first portion and a second portion between which relative movement in a direction toward/away from each other can be produced to hug a workpiece.

15. The slicing unitized production line of claim 14, wherein the engagement tooling comprises:

A second drive member capable of driving movement of the first portion and/or the second portion.

16. The slicing unitized production line of claim 15, wherein the engagement tooling comprises:

a second screw-nut mechanism, the screw of which has two threaded sections with opposite screwing directions, the second driving member being capable of driving the first portion and the second portion to move in a manner approaching/moving away from each other by the second screw-nut mechanism.

17. The slicing unitized production line of claim 6, wherein the engagement tooling comprises a tooling base, and the first movable portion is disposed on the tooling base.

18. The slicing and unitizing production line of any one of claims 1 to 17, wherein the slicer comprises:

A microtome body formed with a cutting chamber:

Liquid path part and

An electric control part;

Wherein the liquid path part and the electric control part are arranged outside the cutting chamber, and

In the assembled state, the arrangement mode of the liquid path part and the electric control part can enable the slicing machine to create an avoidance space so as to:

The workpiece can realize feeding operation and/or discharging operation through the avoidance space.

19. The slicing unitized production line of claim 18, wherein the electrical control portion comprises a first electrical control cabinet and a second electrical control cabinet, and the first electrical control cabinet and the second electrical control cabinet are arranged in a centralized manner or in a split manner.

20. The slicing and unitizing production line of claim 19, wherein the liquid path portion comprises a liquid path system comprising a first liquid path unit and a second liquid path unit, the first liquid path unit and the second liquid path unit being centrally disposed or separately disposed.

21. The slicing and unitizing production line of claim 20, wherein the fluid circuit portion includes a fluid supply cylinder disposed adjacent to either the first fluid circuit unit or the second fluid circuit unit.

22. The slicing unitized production line of claim 21, wherein the first liquid path unit and the second liquid path unit are disposed on two sides of a cutting chamber of the slicer, and the first electric control cabinet and the second electric control cabinet are disposed above the first liquid path unit and the second liquid path unit, respectively, such that:

And the avoidance space is formed between the first electric control cabinet and the second electric control cabinet.

23. The slicing and unitizing production line of claim 22, wherein a headspace is formed below the first liquid path unit, and the liquid supply cylinder is disposed in the headspace.

24. The slicing unitized production line of claim 21, wherein the first fluid path unit and the second fluid path unit are collectively configured to form a first assembly, the first electrical control cabinet and the second electrical control cabinet are collectively configured to form a second assembly,

25. The slicing and unitizing production line of claim 24, wherein the supply cylinder is disposed between the second assembly and the second assembly.

26. The slicing unitized production line of claim 21, wherein the first fluid path unit and the second fluid path unit are collectively configured to form a first assembly, the first electrical control cabinet and the second electrical control cabinet are collectively configured to form a second assembly,

The first component and the second component are arranged on one side of the cutting chamber along the feeding and discharging direction of the workpiece in a longitudinally stacked mode, and therefore an open avoidance space is formed between the cutting chamber and one side.

27. The slicing and unitizing line of claim 26, wherein the supply cylinder is disposed beside a structure formed by the longitudinal stacking of the first and second assemblies, and

And projecting the workpiece to a cutting chamber along the feeding and discharging direction of the workpiece, wherein the cutting chamber and the liquid supply cylinder are at least partially overlapped.

28. The slicing and unitizing production line of claim 21, wherein the first and second electrical cabinets are centrally disposed to form a second assembly, the second assembly being configured in a suspended manner in the cutting chamber.

29. The control method of the slicing unitized production line is characterized in that the slicing unitized production line comprises a transfer mechanism, a connection tool and at least one slicing machine, the transfer mechanism comprises a ground rail robot, and the control method comprises the following steps:

Causing the ground track robot to reach a target position compatible with the microtome or to remove a workpiece from the target position;

And enabling the engagement tool to convey the workpiece to a cutting area of the slicing machine or remove the workpiece from the cutting area.

30. The control method according to claim 29, wherein the slicer is capable of constructing an avoidance space through which a workpiece can be fed and/or discharged to a cutting area of the slicer in the step of causing the earth-moving robot to be brought to or removed from a target position adapted to the slicer.

31. The method of claim 30, wherein the microtome includes a fluid path portion and an electrical control portion configured to create an avoidance space.

32. The control method according to claim 31, wherein the electric control section includes a first electric control cabinet and a second electric control cabinet, the first electric control cabinet and the second electric control cabinet are provided in a concentrated or separate arrangement, the liquid path section includes a liquid path system including a first liquid path unit and a second liquid path unit, the first liquid path unit and the second liquid path unit are provided in a concentrated or separate arrangement,

The structural mode of the avoidance space comprises the following steps:

the first liquid path unit and the second liquid path unit are respectively arranged at two sides of the cutting chamber, and the first electric control cabinet and the second electric control cabinet are respectively arranged above the first liquid path unit and the second liquid path unit, so that an avoidance space is formed between the first electric control cabinet and the second electric control cabinet;

the first liquid path unit and the second liquid path unit are arranged in a concentrated manner to form a first component, the first electric control cabinet and the second electric control cabinet are arranged in a concentrated manner to form a second component, and the first component and the second component are respectively arranged at two sides of the cutting chamber and form the avoidance space between the first component and the second component;

The first liquid path unit and the second liquid path unit are arranged in a concentrated manner to form a first component, the first electric control cabinet and the second electric control cabinet are arranged in a concentrated manner to form a second component, and the first component and the second component are arranged on one side of the cutting chamber along the feeding and discharging direction of the workpiece in a longitudinal stacking manner, so that an open avoidance space is formed between the cutting chamber and one side of the cutting chamber;

The first liquid path unit and the second liquid path unit are arranged in a concentrated mode to form a first component, the first electric control cabinet and the second electric control cabinet are arranged in a concentrated mode to form a second component, the first component is arranged on one side of the cutting chamber along the feeding and discharging direction of the workpiece, and the second component is movably arranged in the cutting chamber and forms an open avoidance space above the first component.

33. The method of claim 29, wherein the engagement tool comprises a first movable portion having at least one docking structure disposed thereon,

The "causing the engagement tool to deliver or remove a workpiece to or from a cutting zone of the microtome" includes:

the docking structure is fixedly connected with the workpiece, and the first movable part is moved in a direction approaching/moving away from a cutting chamber of the slicer, so that the workpiece is delivered to or removed from the cutting area of the slicer.

34. The control method according to claim 33, wherein the workpiece is carried on a susceptor, and in the step of "fixing the docking structure to the workpiece and moving the first movable portion in a direction toward/away from the cutting chamber of the microtome so as to bring the workpiece to or remove the workpiece from the cutting region of the microtome", the step of "fixing the docking structure to the workpiece" includes:

the docking structure is mated with the wafer support and thereby fixedly secured to the workpiece.

35. The method of claim 34, wherein the wafer carrier includes an operative end, and wherein said engaging the docking structure with the wafer carrier and thereby securing the docking structure to the workpiece comprises:

The ground rail robot drives the docking structure to move downwards to extend into the operation end, so that the docking structure is matched with the crystal support and fixedly connected with a workpiece.

36. The control method according to claim 34, wherein the first movable portion is a bar-like structure provided with a plurality of the abutting structures along a length direction thereof,

The "mating the docking structure with the wafer support and thereby securing the docking structure to the workpiece" includes:

The first movable portion is moved in a direction toward/away from a cutting chamber of the microtome so that one of the plurality of docking structures mates with the wafer support.

37. The method of claim 33, wherein the engagement tool comprises a first drive member,

In the step of "fixedly connecting the docking structure to the workpiece and moving the first movable portion in a direction approaching/moving away from the cutting chamber of the slicer to thereby bring the workpiece to/from the cutting region of the slicer", the "moving the first movable portion in a direction approaching/moving away from the cutting chamber of the slicer" includes:

Causing the first drive member to drive the first movable portion in a manner that moves toward/away from the cutting chamber of the microtome.

38. The control method according to claim 33, wherein the joining tool includes a carrying portion that moves the first movable portion in a direction toward/away from a cutting chamber of the slicer in the step of "fixedly joining the docking structure to the workpiece and moving the first movable portion in a direction toward/away from the cutting chamber of the slicer to thereby bring the workpiece to/from the cutting zone of the slicer", the step of "moving the first movable portion in a direction toward/away from the cutting chamber of the slicer" includes:

39. The control method according to claim 38, wherein the mounting portion includes a second movable portion including a first portion and a second portion,

In the step of "the carrying portion and the workpiece move with the movement of the first movable portion in the case of carrying the workpiece to the carrying portion", the step of "carrying the workpiece to the carrying portion" includes:

causing relative movement between the first and second portions in a direction toward/away from each other to hug the workpiece.

40. The method of claim 39, wherein the engagement tool includes a second drive member,

The "causing relative movement between the first portion and the second portion in the direction approaching/moving away from each other to hug the workpiece" includes:

Causing the second drive member to drive the first and/or second portions in motion such that relative movement between the first and second portions in a direction toward/away from each other occurs to hug a workpiece.

41. The method of claim 40, wherein the engagement tool comprises a second screw nut mechanism having a screw with two threaded segments of opposite threads,

Said "causing said second drive member to drive said first portion and/or said second portion" comprises:

the second drive member is caused to move in a manner approaching/moving away from each other by driving the second lead screw nut mechanism and thereby causing the first portion and the second portion to mate with the threaded sections of the two segments that are oppositely threaded.

42. The control method of claim 29, wherein the production line comprises a loading assembly and a blanking assembly,

The control method comprises the following steps:

The ground rail robot drives the workpiece to move between a feeding area corresponding to the feeding assembly and a discharging area corresponding to the discharging assembly.

43. A computer readable storage medium comprising a memory adapted to store a plurality of program codes, wherein the program codes are adapted to be loaded and executed by a processor to perform the control method of the slicing unitized line of any one of claims 29 to 42.

44. A computer device comprising a memory and a processor, the memory being adapted to store a plurality of program codes, characterized in that the program codes are adapted to be loaded and executed by the processor to perform the control method of the slice unitizing production line of any one of claims 29 to 42.