CN119164790B

CN119164790B - A glass fiber mesh performance testing device for semiconductor wafer cutting wheels

Info

Publication number: CN119164790B
Application number: CN202411623004.5A
Authority: CN
Inventors: 顾建冬; 顾华
Original assignee: Nantong Gubang Fibreglass Products Co ltd
Current assignee: Nantong Gubang Fibreglass Products Co ltd
Priority date: 2024-11-14
Filing date: 2024-11-14
Publication date: 2025-04-01
Anticipated expiration: 2044-11-14
Also published as: CN119164790A

Abstract

The invention relates to the field of performance detection of glass fiber meshes, in particular to glass fiber mesh performance detection equipment for a semiconductor wafer cutting grinding wheel, which comprises a detection round table, a round through hole is formed at the center of the detection round table, the inside heating unit that is used for heating the glass fiber net piece that is provided with of circular through-hole detects the round platform upper end and is provided with the tensile unit that is used for tensile glass fiber net piece, detects the upper and lower both sides of round platform and all is provided with the bending unit that is used for making glass fiber net piece crooked. The invention can detect the tensile property and bending property of the glass fiber net sheet, has two purposes, saves detection time and detection cost, can improve the test precision and consistency, is beneficial to the improvement of detection efficiency, and can simulate the high-temperature environment encountered by the glass fiber net sheet in the use process by heating so as to detect the tensile property and bending property of the glass fiber net sheet in the high-temperature environment.

Description

Glass fiber mesh performance detection equipment for semiconductor wafer abrasive cutting wheel

Technical Field

The invention relates to the field of performance detection of glass fiber meshes, in particular to glass fiber mesh performance detection equipment for a semiconductor wafer cutting grinding wheel.

Background

A semiconductor wafer dicing wheel is a precision dicing tool that is specially used for dicing a semiconductor wafer into a plurality of small pieces. In order to improve the strength and stability of the abrasive cutting wheel and simultaneously maintain good processing performance, one or more layers of glass fiber meshes are generally paved on the abrasive cutting wheel, and the glass fiber meshes can remarkably increase the overall structural strength of the abrasive cutting wheel, so that the abrasive cutting wheel is more stable and reliable when rotating at a high speed and bearing a larger cutting force, and the risk of deformation or fracture is reduced. In order to ensure the quality of the abrasive cut-off wheel and the reliability in the production process, the necessary tensile properties of the glass fiber mesh sheet need to be checked.

However, in the conventional performance test of a glass fiber mat, there are problems in that (1) the data obtained by performing the tensile property test on only the glass fiber mat is low in representativeness, and the bending property test on the glass fiber mat is ignored, and at the same time, the temperature change occurs during the dicing operation of the semiconductor wafer dicing wheel, so that the tensile and bending test data obtained in the normal temperature environment are not easily and effectively reflected in the performance of the glass fiber mat in practical use.

(2) The detection results obtained by stretching and bending the glass fiber mesh sheet in the fixed point position and the fixed direction are single, and the limited detection conditions can cause certain errors or deviations of the detection results, so that the authenticity and accuracy of the detection results are required to be improved.

Therefore, in order to solve the problem of the glass fiber mesh in the performance detection process, the invention provides glass fiber mesh performance detection equipment for the semiconductor wafer abrasive cutting wheel.

Disclosure of Invention

The invention provides glass fiber mesh performance detection equipment for a semiconductor wafer cutting grinding wheel, which comprises a detection round table, wherein a circular through hole is formed in the circle center of the detection round table, a heating unit for heating glass fiber meshes is arranged in the circular through hole, a stretching unit for stretching the glass fiber meshes is arranged at the upper end of the detection round table, bending units for bending the glass fiber meshes are arranged at the upper side and the lower side of the detection round table, the stretching unit comprises a fixing ring which is arranged at the upper end of the detection round table and concentric with the circular through hole, clamping assemblies which are uniformly distributed circumferentially are arranged at the inner side of the fixing ring, the clamping assemblies comprise 匚 templates, a threaded rod which is connected with the upper horizontal section of the 匚 templates in a vertically sliding mode is arranged between the upper horizontal section and the lower horizontal section of the 匚 template in a rotating mode, a stretching assembly for pulling the clamping assemblies to move outwards synchronously is arranged at the upper end of the detection round table, sleeves are arranged at the upper side and lower side of the detection round table, the bending units comprise mounting circular plates which are mounted close to one end of the detection round table, a pressing rod which is uniformly distributed circumferentially is arranged at one end of the corresponding circular plate, the mounting circular plate is arranged at one end of the circular plate, the circular plate is correspondingly arranged at the upper side of the circular plate, two semicircular pressing rods are symmetrically arranged, the mounting positions of the circular plates are used for adjusting the circular plates are symmetrically arranged, and the two semicircular pressing rods are used for driving the heating plates to move, and the semicircular heating plates are correspondingly arranged, and the semicircular plates are correspondingly, and the heating plates are matched, and the two heating plates are arranged.

In a possible implementation mode, the vertical guide rails are all installed on the left and right sides of detecting the round platform, the baffle is all installed between the upper end of two vertical guide rails about, between the lower extreme, be located the auxiliary rod that runs through circular through-hole of baffle upper end mid-mounting of below, the auxiliary rod cooperatees with the installation round hole of glass fiber net piece centre of a circle department, the auxiliary rod is upper and lower sliding connection with sleeve, install the plectane, the slot of dodging of auxiliary rod has been seted up to semicircular heating plate's centre of a circle department, about slidable mounting has about detecting two diaphragms that the round platform distributes about between two vertical guide rails about, the sleeve of diaphragm center department installation, the electric slide with corresponding vertical guide rail sliding connection is installed to one side that the diaphragm kept away from detecting the round platform.

In a possible implementation manner, the stretching assembly comprises a plurality of tension rods which are arranged on one sides of the vertical sections of the 匚 templates close to the fixed ring, racks are arranged on the tension rods after the tension rods radially slide along the detection round table and penetrate through the fixed ring, one sides of the racks are meshed with gear columns connected with the rotation of the detection round table, circumferentially arranged gear columns are meshed with an inner gear ring which is positioned below the racks and connected with the rotation of the detection round table, one ends of the racks, far away from the fixed ring, are slidably connected with guide blocks arranged at the upper ends of the detection round table and positioned at the outer sides of the inner gear ring, one lower ends of the gear columns, far away from the corresponding racks, are meshed with toothed plates connected with the front and back of the detection round table in a sliding mode, and the front ends of the toothed plates are connected with pushing ends of electric push rods arranged on the detection round table.

In one possible implementation mode, the movable assembly comprises a built-in groove which is formed in the position of the semicircular heating disc corresponding to the inner part of the detection round table and is used for avoiding the semicircular heating disc, the built-in groove is communicated with a circular through hole, a support plate is mounted on one side of the left semicircular heating disc and the right semicircular heating disc, which is far away from each other, a lower end of one side of the support plate, which is far away from the semicircular heating disc, is connected with the telescopic end of the electric telescopic rod, and a strip-shaped through groove which penetrates through the detection round table and is connected with the fixing section of the electric telescopic rod in a left-right sliding mode is formed in the bottom wall of the built-in groove.

In one possible implementation mode, the lower end of the detection round table is rotatably provided with an outer toothed ring, an arc-shaped through groove which is in sliding connection with a fixed section of a corresponding electric telescopic rod is formed in the outer toothed ring, a rotating gear which is rotatably arranged at the lower end of the detection round table is meshed with the front side of the outer toothed ring, the lower end face of the rotating gear is connected with an output shaft of a motor, and the motor is arranged at the lower end of the detection round table through a support.

In a possible implementation mode, the runner is installed to the threaded rod upper end, and the draw-in groove of circumference evenly arranging is seted up to the runner outer loop surface, and the riser is installed to the upside horizontal segment upper end of 匚 template, and the riser is provided with the cardboard with draw-in groove matched with near one side of runner, and the spliced pole that runs through the riser in the slip is installed to one side that the runner was kept away from to the cardboard, is connected with the cover between cardboard and the riser and establishes at the outside extension spring of spliced pole.

In one possible implementation mode, the adjusting component comprises a movable plate which is arranged on one side, close to the installation circular plate, of the supporting pressing rod, the movable plate is connected with the installation circular plate in a sliding mode around the circumference of the installation circular plate, jacks which are uniformly distributed in the circumference are formed in one side, close to the corresponding transverse plate, of the installation circular plate, a control plate which is connected with the installation circular plate in a sliding mode is arranged on one side, away from the circle center of the installation circular plate, of the movable plate, and the control plate is in plug-in connection with the corresponding jacks through the inserting rod.

In a possible implementation manner, the moving plate is provided with side through grooves along two sides of the circumferential direction of the mounting circular plate, one side of the moving plate, which is close to the pressing rod, is provided with a sliding through groove, one end, which is close to the moving plate, of the pressing rod is provided with an adjusting block which is movably matched with the sliding through groove, and the adjusting block is provided with a bolt and the bolt thread penetrates through the side through groove and then is provided with a nut.

In one possible implementation mode, one side of the movable plate, which is far away from the corresponding installation circular plate, is provided with two arc-shaped guide frames, the two arc-shaped guide frames are radially connected with the movable plate in a sliding mode along the installation circular plate and symmetrically distributed with respect to the pressing rod, guide posts which are connected with the corresponding arc-shaped guide frames in a sliding mode are arranged on two sides of the pressing rod fixing section, and square plates which are sleeved outside the bolts in a rotating mode are arranged on the side faces of the arc-shaped guide frames.

In one possible implementation manner, the pressing rod is a threaded telescopic rod, and the end part of the telescopic section of the pressing rod is provided with a pressing head.

The invention has the beneficial effects that 1, the invention can detect the tensile property of the glass fiber net sheet and the bending property of the glass fiber net sheet, has two purposes, saves the detection time and the detection cost, can improve the test precision and consistency, is beneficial to improving the detection efficiency, can heat the glass fiber net sheet required by detection to a certain temperature in advance, can simulate the high-temperature environment encountered by the glass fiber net sheet in the use process by heating, can detect the tensile property and the bending property of the glass fiber net sheet in the high-temperature environment, simulate the real use environment of the glass fiber net sheet, further accurately evaluate the performance of the glass fiber net sheet and improve the accuracy of the detection result.

2. The stretching units adopted by the invention can stretch the glass fiber mesh in different points, different numbers and different directions, so that various stretching conditions possibly encountered by the glass fiber mesh in actual use are further simulated, the accuracy and comparability of detection results are ensured, and the stretching performance of the glass fiber mesh is more comprehensively evaluated.

3. The bending unit adopted by the invention can press the glass fiber mesh at different points, different numbers and different angles so as to change the bending load born by the glass fiber mesh, so that the glass fiber mesh is bent and deformed at different degrees, and the bending state possibly existing in the actual use process of the glass fiber mesh is simulated, thereby obtaining richer and real bending performance detection data and better evaluating the reliability and safety of the glass fiber mesh in the actual application.

In addition to the technical problems, the technical features constituting the technical solutions, and the beneficial effects caused by the technical features of the technical solutions described above, other technical problems that can be solved by the glass fiber web performance detection device for a semiconductor wafer cutting grinding wheel provided by the embodiment of the present application, other technical features included in the technical solutions, and beneficial effects caused by the technical features will be further described in detail in the detailed description.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a schematic perspective view of a heating unit according to the present invention.

Fig. 3 is a schematic perspective view of a moving assembly according to the present invention.

Fig. 4 is a schematic perspective view of a stretching unit according to the present invention.

Fig. 5 is a schematic perspective view of a clamping assembly according to the present invention.

Fig. 6 is a schematic perspective view of the cross plate, the auxiliary rod and the bending unit according to the present invention.

Fig. 7 is a schematic perspective view of a bending unit according to the present invention.

Fig. 8 is a schematic perspective view of the mounting disc, the insert rod and the jack of the present invention.

Fig. 9 is a schematic perspective view of an adjusting assembly according to the present invention.

The device comprises a detection round table 1, a round through hole 11, a vertical guide rail 111, a baffle plate 113, an auxiliary rod 114, a transverse plate 115, an electric sliding block 2, a heating unit 211, a semicircular heating disc 213, a built-in groove 214, a supporting plate 215, an electric telescopic rod 216, a strip-shaped through plate 217, an external tooth ring 218, an arc-shaped through groove 219, a rotary gear 220, a motor 3, a stretching unit 311, a fixed ring 312, a 匚 template 313, a clamping plate 314, a threaded rod 315, a rotating wheel 316, a clamping groove 317, a clamping plate 318, a connecting column 319, a telescopic spring 321, a pull rod 322, a rack 323, a gear column 324, an inner tooth ring 325, a toothed plate 326, an electric push rod 4, a bending unit 411, a sleeve 412, a mounting circular plate 414, an abutting rod 415, an abutting pressure head 416, a moving plate 417, a jack 418, a plug rod 419, a square through groove 421, a regulating block 422, an arc-shaped guide frame 423 and a plate.

Detailed Description

In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The invention may be embodied in many other forms than described below and similarly modified by those skilled in the art without departing from the spirit or scope of the invention, which is therefore not limited to the specific embodiments disclosed below.

Referring to fig. 1, a glass fiber mesh performance detection device for a semiconductor wafer cutting grinding wheel comprises a detection round table1, a round through hole 11 is formed in the center of the detection round table1, a heating unit 2 for heating a glass fiber mesh is arranged in the round through hole 11, a stretching unit 3 for stretching the glass fiber mesh is arranged at the upper end of the detection round table1, and bending units 4 for bending the glass fiber mesh are arranged on the upper side and the lower side of the detection round table 1.

Referring to fig. 1,4 and 5, the stretching unit 3 includes a fixing ring 311 concentrically disposed with the circular through hole 11 and mounted at the upper end of the detecting bench 1, a clamping assembly circumferentially and uniformly disposed at the inner side of the fixing ring 311, the clamping assembly includes 匚 plates 312, a clamping plate 313 slidably connected to the vertical section up and down is disposed between the upper and lower horizontal sections of the 匚 plates 312, a threaded rod 314 screwed to the upper horizontal section of the 匚 plates 312 is rotatably mounted at the upper end of the clamping plate 313, a rotating wheel 315 is mounted at the upper end of the threaded rod 314, a clamping groove 316 circumferentially and uniformly disposed is formed at the outer ring surface of the rotating wheel 315, a vertical plate is mounted at the upper end of the upper horizontal section of the 匚 plates 312, the riser is close to runner 315 one side be provided with draw-in groove 316 matched with cardboard 317, cardboard 317 keep away from runner 315 one side install slip run through riser's spliced pole 318, be connected with between cardboard 317 and the riser and overlap establish the flexible spring 319 outside spliced pole 318, the clamping assembly can be connected with current universal material testing machine (this universal material testing machine is not shown in the figure), the universal material testing machine can monitor the tensile properties parameters such as breaking strength, yield strength of glass fiber mesh in tensile direction, can also monitor performance index such as bending strength, bending modulus of glass fiber mesh, record glass fiber mesh's stress-strain curve in tensile or bending process.

When the glass fiber reinforced plastic abrasive disc cutting machine works, the glass fiber mesh used for manufacturing the cutting abrasive disc is in a circular shape, and the circle center of the glass fiber mesh is provided with the mounting round hole matched with the abrasive disc, so that the glass fiber mesh with the mounting round hole is used as a detection object.

The glass fiber mesh sheet is horizontally placed at the upper end of the lower horizontal section of the circumferentially arranged 匚 template 312, the circumferentially arranged 匚 template 312 can provide stable support for the glass fiber mesh sheet, then the rotating wheel 315 and the threaded rod 314 can be rotated, the threaded rod 314 can drive the clamping plate 313 to move downwards along the vertical section of the 匚 template 312 while moving downwards in a spiral manner until the clamping plate 313 abuts against the glass fiber mesh sheet, the glass fiber mesh sheet is stably and forcefully clamped under the action of the lower horizontal section of the 匚 template 312 and the clamping plate 313, the corresponding connecting column 318 can be shifted to the direction far away from the threaded rod 314 in the rotating process of the rotating wheel 315 to enable the telescopic spring 319 to be in a compressed state, so that the clamping plate 317 is far away from the corresponding rotating wheel 315, the rotating wheel 315 can smoothly rotate, after the clamping plate 313 clamps the glass fiber mesh sheet, the connecting column 318 can be loosened, the clamping plate 317 can abut into the clamping groove 316 corresponding to the outer ring surface of the rotating wheel 315 under the action of the telescopic spring 317, the clamping plate 317 can be circumferentially limited by the cooperation between the clamping plate 317 and the clamping groove 316, and the effect of the clamping plate 317 can be prevented from influencing the stability of the glass fiber mesh sheet due to the fact that the rotation is influenced by the external force of the rotating rod 314.

In addition, the glass fiber mesh sheet can be clamped by clamping assemblies in different numbers or different positions, the number of the clamping assemblies determines the number of the stretching forces applied to the glass fiber mesh sheet in the subsequent stretching detection process, and the positions of the clamping assemblies determine the direction of the stretching forces applied to the glass fiber mesh sheet in the subsequent stretching detection process.

Referring to fig. 1, fig. 2 and fig. 3, the heating unit 2 includes two semicircular heating plates 211 distributed symmetrically left and right, the upper end of the semicircular heating plate 211 is provided with a matching groove for avoiding 匚 a template 312, the lower end of the detection round table 1 is provided with a moving component for driving the two semicircular heating plates 211 to move reversely synchronously, the moving component includes a built-in groove 213 for avoiding the semicircular heating plate 211, which is formed by detecting the position of the corresponding semicircular heating plate 211 inside the round table 1, the built-in groove 213 is communicated with the circular through hole 11, the side, away from the left and right, of the semicircular heating plate 211 is provided with a support plate 214, the lower end, away from the semicircular heating plate 211, of the support plate 214 is connected with the telescopic end of the electric telescopic rod 215, the bottom wall of the built-in groove 213 is provided with a strip-shaped through groove 216 penetrating the detection round table 1 and being connected with the fixed section of the electric telescopic rod 215 in a left and right sliding manner, the lower end of the detection round table 1 is rotatably provided with an outer toothed ring 217, the outer toothed ring 217 is provided with an arc-shaped through groove 218 which is connected with the fixed section of the corresponding electric telescopic rod 215 in a sliding manner, the front side of the outer toothed ring 217 is meshed with a gear 219, the outer toothed ring is rotatably arranged at the front side of the detection round table 21, the lower end of the detection round table is rotatably provided with the output shaft 219, and the output shaft is rotatably connected with the lower end of the detection round table 220 through the rotary table 1.

When the glass fiber mesh fixing device is in operation, the left semicircular heating plate 211 and the right semicircular heating plate 211 in the initial state are in a close fit state and form a complete circular shape, the glass fiber mesh is arranged between the upper end faces of the left semicircular heating plate 211 and the right semicircular heating plate 211, the 匚 templates 312 which are circumferentially arranged are all arranged in the corresponding matched grooves, after the fixation of the glass fiber mesh is completed, the glass fiber mesh can be subjected to contact rapid heating treatment through the semicircular heating plate 211 so as to heat the glass fiber mesh to a certain temperature, the high-temperature environment encountered by the glass fiber mesh in the using process can be simulated through heating, whether the glass fiber mesh deforms under the high-temperature condition or not can be observed, the thermal stability of the glass fiber mesh can be detected, the stretching and bending performance detection can be carried out on the glass fiber mesh under the high-temperature environment, the real use environment of the glass fiber mesh can be simulated, the performance quality of the glass fiber mesh can be further estimated, and the real effectiveness of the detection result can be increased. The semicircular heating plate 211 is an existing electric control heating plate.

After heating, before detection, the electric telescopic rods 215 on the left side and the right side simultaneously drive the corresponding support plates 214 to move downwards to be attached to the bottom wall of the built-in groove 213, the semicircular heating plates at the moment synchronously move downwards along with the support plates 214 to be far away from the glass fiber mesh and the 匚 template 312, then the motor 220 drives the rotating gear 219 to rotate, the external tooth ring 217 synchronously rotates along with the rotating gear 219, the electric telescopic rods 215 are driven to move outwards along the strip-shaped through grooves 216 while the external tooth ring 217 rotates, the support plates 214 drive the semicircular heating plates 211 to synchronously move along with the electric telescopic rods 215 into the built-in groove 213 until the semicircular heating plates 211 are far away from the glass fiber mesh and the clamping assembly, the semicircular heating plates 211 are prevented from interfering with the detection of the stretching and bending properties of the follow-up glass fiber mesh, and the semicircular heating plates 211 can be used again for heating the glass fiber mesh in the same way in the follow-up detection process.

Referring to fig. 4, the upper end of the detecting round table 1 is provided with a stretching assembly for pulling the clamping assembly to move outwards synchronously, the stretching assembly includes a plurality of tension rods 321 installed on one side of the vertical section of the 匚 template 312, which is close to the fixing ring 311, racks 322 are installed after the tension rods 321 radially slide along the detecting round table 1 and penetrate through the fixing ring 311, one side of each rack 322 is meshed with a gear column 323 rotationally connected with the detecting round table 1, circumferentially arranged gear columns 323 are meshed with an inner gear ring 324 which is located below the racks 322 and rotationally connected with the detecting round table 1, one end of each rack 322, which is far away from the fixing ring 311, is slidingly connected with a guide block installed on the upper end of the detecting round table 1 and located outside the inner gear ring 324, one side lower end of each rack 323, which is located on the front side, is far away from the corresponding rack 322, is meshed with a toothed plate 325 which is slidingly connected with the front and back sides of the detecting round table 1, and the pushing ends of electric push rods 326 installed on the detecting round table 1.

When the glass fiber mesh sheet heating device works, after the semicircular heating disc 211 is heated and far away from the glass fiber mesh sheet, the toothed plate 325 can be pushed by the electric push rod 326 to move backwards along the detection round table 1, the gear column 323 positioned at the front side synchronously rotates anticlockwise, the rack 322 meshed with the gear column 323 synchronously moves forwards along the guide block, the rack 322 circumferentially arranged synchronously moves outwards along the corresponding guide block under the cooperation of the inner toothed ring 324 and the gear column 323, the rack 322 drives the corresponding pull rod 321 to move outwards along the radial direction of the fixed ring 311, the pull rod 321 drives the clamping assembly to synchronously move through the 匚 template 312, at the moment, the clamping assembly for clamping the glass fiber mesh sheet can pull the glass fiber mesh sheet outwards, the clamping assembly which is not clamped is gradually far away from the glass fiber mesh sheet until the glass fiber mesh sheet breaks, at the moment, the universal material testing machine can record and display the obtained detection result, and the stretching detection result of the glass fiber mesh sheet can be obtained.

In order to obtain a more comprehensive detection result and ensure the accuracy and comparability of the detection result, the same stretching point position and the same direction stretching detection can be performed on a plurality of glass fiber meshes under the same temperature or different temperature conditions, and the different stretching point positions or the different directions stretching detection can be performed on a plurality of glass fiber meshes under the same temperature or different temperature conditions.

Referring to fig. 1, fig. 2, fig. 6, fig. 7, fig. 8 and fig. 9, the left and right sides of the detecting round table 1 are respectively provided with a vertical guide rail 111, a baffle 112 is respectively installed between the upper ends and the lower ends of the left and right vertical guide rails 111, an auxiliary rod 113 penetrating through the circular through hole 11 is installed in the middle of the upper end of the baffle 112 below, a avoiding groove for avoiding the auxiliary rod 113 is formed in the center of the semicircular heating plate 211, two transverse plates 114 distributed up and down with respect to the detecting round table 1 are vertically and slidably installed between the left and right vertical guide rails 111, an electric sliding block 115 in sliding connection with the corresponding vertical guide rail 111 is installed on one side of the transverse plates 114 far away from the detecting round table 1, a sleeve 411 is installed on the center of the transverse plates 114, a mounting circular plate 412 is installed on one end of the sleeve 411 close to the detecting round table 1, the auxiliary rod 113 is in sliding connection with the sleeve 411, a pressing rod 414 which is uniformly circumferentially arranged is arranged on one end of the mounting circular plate 412 far away from the corresponding transverse plate 114, the pressing rod 414 is a telescopic rod, and the end 415 of the pressing rod 414 is provided with a telescopic rod.

During operation, in the process of placing and clamping the glass fiber mesh, the installation round hole at the center of the glass fiber mesh passes through the auxiliary rod 113, the auxiliary rod 113 can be utilized to position and clamp the glass fiber mesh, the subsequent up-and-down movement of the transverse plate 114, the sleeve 411 and the installation round plate 412 can also be supported and guided, when the glass fiber mesh is stretched in a single point position or multiple points, the installation round hole of the glass fiber mesh is under the blocking of the auxiliary rod 113, and the stretching performance and the bending performance near the installation round hole of the glass fiber mesh can be detected at the moment.

Before the glass fiber meshes are subjected to bending detection, the glass fiber meshes can be selectively clamped according to the same mode, so that the glass fiber meshes are kept in a horizontal and straight state, the glass fiber meshes can be stabilized, meanwhile, the glass fiber meshes can be heated to a certain temperature, then, the telescopic end of the pressing rod 414 can be rotated to enable the pressing rod 415 to move towards the direction close to the glass fiber meshes, in the process, one or more positions of the pressing rod 415 can be selectively adjusted, so that bending stress points of the following glass fiber meshes are changed, the stress points and the stress quantity of the glass fiber meshes can be adjusted, after the adjustment of the positions of the pressing rods 415 is completed, the transverse plates 114 can be driven by the electric sliding blocks 115 to move towards the direction close to the detection round table 1, the installation round plates 412 can be synchronously moved along with the transverse plates 114 through the sleeves 411, the installation round plates 412 can drive the pressing rods 414 to move towards the direction where the glass fiber meshes are located, the pressing rods 415 after the adjustment of elongation are gradually pressed against the glass fiber meshes, the rest of the pressing rods 415 are not adjusted, the bending deformation is caused, the stress points of the glass fiber meshes can not be adjusted, after the rest of the pressing rods 415 are in contact with the glass fiber meshes, the glass fiber meshes are not contacted with the glass fiber meshes, the bending deformation can be detected, the situation of the glass fiber meshes can be detected, and the glass fiber meshes can be deformed, and the glass fiber meshes can be subjected to the situation can be detected, and the situation can not be analyzed, and the situation that the glass fiber meshes can be broken, and the fiber meshes can be broken when the fiber meshes are subjected to the situation.

In addition, the pressing head 415 can be rotated to be detached from the pressing rod 414 through threads, and replaced by pressing heads 415 with different sizes, so that the larger the pressing head 415 is, the larger the stress area of the glass fiber mesh sheet is, and the bending deformation degree of the whole glass fiber mesh sheet is correspondingly increased, and vice versa. The two bending units 4 can respectively perform comprehensive bending detection on the glass fiber mesh from the upper side and the lower side of the glass fiber mesh, and can also act on the glass fiber mesh at the same time to enable the glass fiber mesh to bend towards two directions at the same time, but the pressing rods 414 and the pressing heads 415 in the upper bending unit 4 and the lower bending unit 4 need to be distributed in a staggered manner at the moment.

Referring to fig. 7, 8 and 9, an adjusting component for adjusting the position of the pressing rod 414 is provided on the mounting circular plate 412, the adjusting component comprises a moving plate 416 disposed on one side of the pressing rod 414 near the mounting circular plate 412, the moving plate 416 is in sliding connection with the mounting circular plate 412 around the circumference of the mounting circular plate 412, a jack 417 uniformly distributed circumferentially is provided on one side of the mounting circular plate 412 near the corresponding transverse plate 114, a control plate in sliding connection with the mounting circular plate 412 is mounted on one side of the moving plate 416 far away from the center of the mounting circular plate 412, the control plate is in plug-in fit with the corresponding jack 417 through a plug rod 418, side through grooves 419 are provided on two sides of the moving plate 416 distributed along the circumferential direction of the mounting circular plate 412, a sliding through groove 421 is provided on one side of the moving plate 416 near the pressing rod 414, an adjusting block 421 movably matched with the sliding through groove is mounted on one end of the pressing rod 414, a bolt is mounted on the adjusting block 421, a nut is mounted on one side of the moving plate 416 far away from the corresponding mounting circular plate 412 through the corresponding side through the side through groove, two arc-shaped guide frames 422 are mounted on one side of the moving plate 416, the two arc-shaped guide frames 422 are in sliding connection with the moving plate 416 along the radial direction of the mounting circular plate 412, the moving plate 414 is in sliding connection with the corresponding arc-shaped guide frames 422 are symmetrically distributed on the two sides of the moving guide frames, and the arc-shaped guide frames are correspondingly connected with the guide rods 422 in a sliding guide frame.

Before the glass fiber mesh sheet is subjected to bending performance detection, the pressing rod 414 can be adjusted to different positions and different states, in the process, the control plate can circumferentially rotate the moving plate 416 around the mounting circular plate 412, the moving plate 416 drives the corresponding pressing rod 414 and the pressing head 415 to synchronously move, after the moving plate 416 moves to a proper position, the control plate and the moving plate 416 can be fixed on the mounting circular plate 412 through the cooperation between the inserting rod 418 and the corresponding inserting hole 417, so that the positions of the pressing rod 414 and the pressing head 415 in the circumferential direction of the mounting circular plate 412 can be changed.

Meanwhile, the pressing rod 414 and the pressing head 415 can be moved to different positions along the radial direction of the mounting circular plate 412 through the cooperation between the adjusting block 421 and the sliding through groove, the adjusting block 421 drives the adjusting block 421 to synchronously move along the side through groove 419, and the adjusting block 421 drives the two arc-shaped guide frames 422 to synchronously move along the moving plate 416 through the cooperation between the bolt and the square plate 423, so that the positions of the pressing rod 414 and the pressing head 415 in the radial direction of the mounting circular plate 412 are changed.

In addition, still rotatable regulating block 421, the bolt is driven by regulating block 421 and is synchronous rotation on square board 423, arc leading truck 422 centre of a circle and bolt axis collineation, press the pole 414 through the guide pillar along arc leading truck 422 synchronous rotation, with press the pole 414 with press the pressure head 415 to adjust to tilt state, the arc leading truck 422 can support the direction for the rotation of press pole 414, ensure to press the pole 414 and keep stable when pressing the glass fiber net piece in the follow-up, wait to press the pole 414 and press the pressure head 415 to adjust to suitable position after, the cooperation of accessible bolt and nut is fixed regulating block 421, arc leading truck 422 on movable board 416, through above-mentioned mode can be to press the pressure head 415 to act on the glass fiber net piece circumference with radial direction's point and the angle of action is adjusted, thereby detect the glass fiber net piece and receive the bending deformation condition when different positions, the different direction press the glass fiber net piece is pressed, simulation glass fiber net piece is in the bending state that in-use in-service use, and then obtain richer, true bending performance testing result.

In addition, bending detection under different clamping points and under the same bending condition can be carried out on different glass fiber meshes, the clamping points of the glass fiber meshes influence the bending deformation degree of the glass fiber meshes, and whether the positions of the pressing force, the direction of the pressing force or the quantity of the pressing force borne by the glass fiber meshes are changed, multiple times of comparison bending detection is carried out on a plurality of glass fiber meshes, so that the authenticity of a detection result is ensured, the detection result is enriched, the accuracy and the contrast of the detection result are further improved, and the performance of the glass fiber meshes is evaluated more comprehensively.

In embodiments of the invention, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "connected," "mounted," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, slidably connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intermediate medium, or in communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

The embodiments of the present invention are all preferred embodiments of the present invention, and are not limited in scope by the present invention, so that all equivalent changes according to the structure, shape and principle of the present invention are covered by the scope of the present invention.

Claims

1. The glass fiber mesh performance detection device for the semiconductor wafer cutting grinding wheel comprises a detection round table (1), wherein a round through hole (11) is formed in the center of the detection round table (1), and the device is characterized in that a heating unit (2) for heating a glass fiber mesh is arranged in the round through hole (11), a stretching unit (3) for stretching the glass fiber mesh is arranged at the upper end of the detection round table (1), and bending units (4) for bending the glass fiber mesh are arranged on the upper side and the lower side of the detection round table (1);

The stretching unit (3) comprises a fixed ring (311) which is arranged at the upper end of the detecting round table (1) and is concentric with the circular through hole (11), clamping assemblies which are uniformly distributed circumferentially are arranged at the inner side of the fixed ring (311), each clamping assembly comprises a 匚 template (312), a clamping plate (313) which is connected with the vertical section in a vertical sliding manner is arranged between the upper horizontal section and the lower horizontal section of the 匚 template (312), a threaded rod (314) which is connected with the upper horizontal section of the 匚 template (312) in a threaded manner is rotatably arranged at the upper end of the clamping plate (313), and a stretching assembly which is used for pulling the clamping assemblies to synchronously move outwards is arranged at the upper end of the detecting round table (1);

The upper side and the lower side of the detection round table (1) are both provided with sleeves (411), the bending unit (4) comprises a mounting circular plate (412) which is arranged at one end of the sleeve (411) close to the detection round table (1), one end of the mounting circular plate (412) far away from the corresponding transverse plate (114) is provided with a pressing rod (414) which is uniformly distributed in the circumferential direction, and an adjusting component for adjusting the position of the pressing rod (414) is arranged on the mounting circular plate (412);

The heating unit (2) comprises two semicircular heating plates (211) which are symmetrically distributed left and right, a matching groove for avoiding a 匚 template (312) is formed in the upper end of each semicircular heating plate (211), and a moving assembly for driving the two semicircular heating plates (211) to synchronously and reversely move is arranged at the lower end of the detection round table (1);

The movable assembly comprises an inner groove (213) which is arranged at the inner part of the detection round table (1) and corresponds to the position of the semicircular heating disc (211) and is used for avoiding the semicircular heating disc (211), the inner groove (213) is communicated with the circular through hole (11), a support plate (214) is arranged at one side, far away from the semicircular heating disc (211), of the left semicircular heating disc and the right semicircular heating disc, the lower end, far away from the semicircular heating disc (211), of the support plate (214) is connected with the telescopic end of the electric telescopic rod (215), and a strip-shaped through groove (216) which penetrates through the detection round table (1) and is connected with the fixed section of the electric telescopic rod (215) in a left-right sliding mode is formed in the bottom wall of the inner groove (213);

An outer toothed ring (217) is rotatably arranged at the lower end of the detection round table (1), an arc-shaped through groove (218) which is in sliding connection with a fixed section of a corresponding electric telescopic rod (215) is formed in the outer toothed ring (217), a rotary gear (219) rotatably arranged at the lower end of the detection round table (1) is meshed with the front side of the outer toothed ring (217), the lower end face of the rotary gear (219) is connected with an output shaft of a motor (220), and the motor (220) is arranged at the lower end of the detection round table (1) through a support;

the adjusting assembly comprises a movable plate (416) arranged on one side of a pressing rod (414) close to the mounting circular plate (412), the movable plate (416) is connected with the mounting circular plate (412) in a sliding manner around the circumference of the mounting circular plate (412), insertion holes (417) which are uniformly distributed in the circumference are formed in one side of the mounting circular plate (412) close to the corresponding transverse plate (114), a control plate which is connected with the mounting circular plate (412) in a sliding manner is arranged on one side of the movable plate (416) away from the center of the mounting circular plate (412), and the control plate is in plug-in fit with the corresponding insertion holes (417) through plug rods (418);

Side through grooves (419) are formed in two sides of the moving plate (416) which are distributed along the circumferential direction of the mounting circular plate (412), a sliding through groove is formed in one side of the moving plate (416) close to the pressing rod (414), an adjusting block (421) which is movably matched with the sliding through groove is mounted at one end of the pressing rod (414) close to the moving plate (416), a bolt is mounted on the adjusting block (421), and a nut is mounted on the bolt after the bolt threads penetrate through the side through grooves (419);

One side of the movable plate (416) far away from the corresponding installation circular plate (412) is provided with two arc-shaped guide frames (422), the two arc-shaped guide frames (422) are radially connected with the movable plate (416) in a sliding mode along the installation circular plate (412) and symmetrically distributed relative to the pressing rod (414), guide posts which are connected with the corresponding arc-shaped guide frames (422) in a sliding mode are installed on two sides of the fixing section of the pressing rod (414), and square plates (423) which are sleeved outside the bolts are installed on the side faces of the arc-shaped guide frames (422).

2. The glass fiber mesh performance detection device for the semiconductor wafer cutting grinding wheel is characterized in that vertical guide rails (111) are arranged on the left side and the right side of the detection round table (1), a baffle plate (112) is arranged between the upper ends and the lower ends of the left and the right vertical guide rails (111), an auxiliary rod (113) penetrating through a circular through hole (11) is arranged in the middle of the upper end of the baffle plate (112) below, the auxiliary rod (113) is matched with a mounting round hole at the center of the glass fiber mesh, the auxiliary rod (113) is in up-down sliding connection with a sleeve (411) and a mounting round plate (412), an avoidance groove for avoiding the auxiliary rod (113) is formed at the center of the semicircular heating disc (211), two transverse plates (114) which are distributed up and down relative to the detection round table (1) are arranged between the left and the right vertical guide rails (111), a sleeve (411) is arranged at the center of the transverse plate (114), and an electric sliding block (115) which is in sliding connection with the corresponding vertical guide rails (111) is arranged on one side of the transverse plate (114) away from the detection round table (1).

3. The glass fiber mesh performance detection device for the semiconductor wafer cutting grinding wheel is characterized in that the stretching assembly comprises a plurality of tension rods (321) which are arranged on one sides, close to the fixed ring (311), of vertical sections of the 匚 templates (312), racks (322) are arranged on the lower ends, close to the upper ends of the detection circular tables (1), of the tension rods (321) in a sliding mode along the radial direction of the detection circular tables (1) and penetrate through the fixed ring (311), gear columns (323) which are in rotary connection with the detection circular tables (1) are meshed on one sides of the racks (322), the circumferentially arranged gear columns (323) are meshed with an inner gear ring (324) which is arranged below the racks (322) and in rotary connection with the detection circular tables (1), one end, far away from the fixed ring (311), of each rack (322) is in sliding connection with a guide block which is arranged on the outer side of the inner gear ring (324), one side lower end, far away from the corresponding rack (322), of each rack (325) is meshed with a toothed plate (325) which is in front-back sliding connection with the detection circular tables (1), and the front end of each rack (325) is connected with an electric push rod (326) which is arranged on the detection circular tables (1).

4. The glass fiber mesh performance detection device for the semiconductor wafer cutting grinding wheel is characterized in that a rotating wheel (315) is installed at the upper end of the threaded rod (314), clamping grooves (316) which are circumferentially and uniformly distributed are formed in the outer annular surface of the rotating wheel (315), a vertical plate is installed at the upper end of the upper horizontal section of the 匚 template (312), a clamping plate (317) matched with the clamping grooves (316) is arranged on one side, close to the rotating wheel (315), of the vertical plate, a connecting column (318) which penetrates through the vertical plate in a sliding mode is installed on one side, far away from the rotating wheel (315), of the clamping plate (317), and an extension spring (319) sleeved outside the connecting column (318) is connected between the clamping plate (317) and the vertical plate.

5. The glass fiber mesh performance detection device for the semiconductor wafer cutting grinding wheel of claim 1, wherein the pressing rod (414) is a threaded telescopic rod, and a pressing head (415) is arranged at the end part of a telescopic section of the pressing rod (414).