CN119124049B - Flexible substrate detection device - Google Patents

Flexible substrate detection device Download PDF

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Publication number
CN119124049B
CN119124049B CN202411620253.9A CN202411620253A CN119124049B CN 119124049 B CN119124049 B CN 119124049B CN 202411620253 A CN202411620253 A CN 202411620253A CN 119124049 B CN119124049 B CN 119124049B
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Prior art keywords
detection
fixedly connected
fixedly installed
plate
box
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CN202411620253.9A
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CN119124049A (en
Inventor
石超
李成明
杨少延
刘祥林
崔草香
朱瑞平
郭柏君
陈兆显
李晓东
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Guojing Technology Guangdong Hengqin Guangdong Macao Deep Cooperation Zone Co ltd
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Guojing Technology Guangdong Hengqin Guangdong Macao Deep Cooperation Zone Co ltd
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Priority to CN202411620253.9A priority Critical patent/CN119124049B/en
Publication of CN119124049A publication Critical patent/CN119124049A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G01B11/043—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G01B11/046—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring width
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2817—Environmental-, stress-, or burn-in tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001—Type of application of the stress
    • G01N2203/0003—Steady
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014—Type of force applied
    • G01N2203/0016—Tensile or compressive
    • G01N2203/0019—Compressive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/067—Parameter measured for estimating the property
    • G01N2203/0676—Force, weight, load, energy, speed or acceleration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides a flexible substrate detection device, which relates to the technical field of flexible substrate detection and comprises a detection table, a feeding mechanism, a conveying mechanism, a first detection mechanism, a second detection mechanism, a third detection mechanism and a controller, wherein the feeding mechanism is fixedly arranged at the top of the left rear part of the detection table, the conveying mechanism is fixedly arranged at the top of the detection table, the first detection mechanism is fixedly arranged at the rear side of the conveying mechanism on the detection table, the second detection mechanism is fixedly arranged at the right side of the conveying mechanism on the detection table, the third detection mechanism is fixedly arranged in front of the conveying mechanism on the detection table, and the conveying mechanism, the first detection mechanism, the second detection mechanism and the third detection mechanism are respectively and electrically connected with the controller; the flexible substrate detection device has the advantages of improving the detection efficiency and accuracy of the flexible substrate, reducing the manual intervention degree, improving the automation level, flexibly adjusting the detection flow according to the actual requirements due to the relative independence among the detection mechanisms, and enhancing the adaptability and the flexibility.

Description

Flexible substrate detection device
Technical Field
The invention relates to the technical field of flexible substrate detection, in particular to a flexible substrate detection device.
Background
With the rapid development of flexible display, wearable equipment and the Internet of things technology, the quality detection of a flexible substrate serving as a core component becomes a key for guaranteeing the performance of products, and the flexible substrate plays an important role in an integrated circuit industrial chain, and the quality and the performance of the flexible substrate have a critical influence on the overall performance of electronic products.
However, with the development of high integration and light weight of semiconductors, defects on flexible substrates are increasingly difficult to detect by conventional manual visual inspection methods;
the traditional detection method and device are often limited to the detection of a two-dimensional plane, manual operation detection is needed, time and labor are consumed, the subjectivity exists in the detection result, the high requirements of modern industrial production on quality and efficiency are difficult to meet, the deformation of a flexible substrate caused by material characteristics is difficult to adapt, the detection efficiency is low, and the precision is limited.
Disclosure of Invention
The present invention provides a flexible substrate detection device, which is used for solving at least one of the technical problems set forth in the background art.
In order to solve the technical problems, the invention provides a flexible substrate detection device which comprises a detection table, a feeding mechanism, a conveying mechanism, a first detection mechanism, a second detection mechanism, a third detection mechanism and a controller, wherein the feeding mechanism is fixedly arranged at the top of the left rear part of the detection table, the conveying mechanism is fixedly arranged at the top of the detection table, the first detection mechanism is fixedly arranged on the detection table and positioned at the rear side of the conveying mechanism, the second detection mechanism is fixedly arranged on the detection table and positioned at the right side of the conveying mechanism, the third detection mechanism is fixedly arranged in front of the conveying mechanism, and the conveying mechanism, the first detection mechanism, the second detection mechanism and the third detection mechanism are respectively and electrically connected with the controller.
Preferably, the feeding mechanism comprises a storage box, wherein the storage box is fixedly arranged on the left side of the top of the detection table, a portal frame is arranged on the top of the storage box and fixedly connected with the top of the detection table, a first screw sliding table sliding along the left-right direction is fixedly arranged on the top of the portal frame, a first vertical lifting cylinder I is fixedly arranged at the movable end of the first screw sliding table, a first push rod end at the bottom of the lifting cylinder I is fixedly connected with an adsorption plate I, and a plurality of vacuum suction nozzles I are fixedly arranged at the bottom of the adsorption plate I.
Preferably, the conveying mechanism comprises a rotary conveying mechanism and a translational conveying mechanism;
The rotary conveying mechanism comprises a rotary base, a rotary disc, four double-shaft cylinders, a bearing plate and a rotary disc, wherein the rotary base is fixedly arranged at the top of the right side of the detection table, the top of the rotary base is rotationally connected with the rotary disc, the center of the top of the rotary disc is symmetrically and fixedly provided with the four double-shaft cylinders, the movable end of each double-shaft cylinder is fixedly connected with the bearing plate, and the bearing plate is radially and slidably connected with the top of the rotary disc along the rotary disc;
The translation conveying mechanism comprises a guide rail base, wherein the top of the detection table is positioned in front of the portal frame and is fixedly provided with the guide rail base, a pair of first guide rails in the front-rear direction are symmetrically and fixedly arranged on the top of the guide rail base in a left-right mode, the top of the first guide rail is connected with a first sliding seat in a front-rear sliding mode, the bottom end of the first sliding seat is connected with a synchronous belt conveying device, and the synchronous belt conveying device is used for providing sliding force of the first sliding seat.
Preferably, the first detection mechanism comprises a first upright post, the top end of a detection table at the right rear of the rotary disc is fixedly provided with a first upright post, the top end of the first upright post is fixedly provided with a second screw sliding table sliding along the front-rear direction, the left movable end of the second screw sliding table is fixedly provided with a vertical lifting cylinder II, the bottom end of the lifting cylinder II is fixedly connected with a first detection box, the middle part in the first detection box is fixedly connected with a first partition plate in the horizontal direction, the center of the top of the first partition plate is fixedly provided with a downward extrusion cylinder, the bottom push rod end of the extrusion cylinder is fixedly connected with a pressing plate in the horizontal direction, the top end of the pressing plate is fixedly connected with a plurality of vertical guide rods, the guide rods are in vertical sliding connection with the first partition plate, the bottom of the front half section of the pressing plate is fixedly provided with a plurality of optical fiber sensors, and the bottom end of the rear half section of the pressing plate is fixedly provided with a plurality of flexible pressure sensors.
Preferably, the second detection mechanism comprises a second stand column, the second stand column is fixedly arranged at the top of the right side of the detection table, a third screw rod sliding table which slides along the front-back direction is fixedly arranged at the top end of the second stand column, a vertical lifting cylinder III is fixedly arranged at the sliding end of the left side of the third screw rod sliding table, the three bottom ends of the lifting cylinder III are fixedly connected with a second detection box, an electric lifting column is fixedly arranged at the center of the inner side of the top wall of the second detection box, the lifting end of the bottom end of the electric lifting column is fixedly connected with a horizontal mounting plate, a plurality of electronic probes are fixedly arranged at the bottom of the horizontal mounting plate and are electrically connected with a controller, an electronic atomizer is fixedly arranged on the left side wall and the right side wall of the second detection box, a storage power supply is fixedly arranged at the bottom of the second detection box, and the electronic probes are respectively electrically connected with the electronic atomizer and the storage power supply.
Preferably, the third detection mechanism comprises a column III, the top end of a detection table in front of the rotary disc is fixedly provided with the column III, the top end of the column III is fixedly provided with a fourth screw sliding table sliding along the left-right direction, the sliding end of the rear end of the fourth screw sliding table is fixedly provided with a vertical lifting cylinder IV, the bottom of the lifting cylinder IV is fixedly provided with a third detection box, the inner side of the top wall of the third detection box is fixedly provided with a plurality of industrial cameras I, the center of the top of the third detection box is fixedly provided with a photoelectric distance sensor, the inner wall of the third detection box is fixedly provided with a plurality of illuminating lamps, and the peripheral side wall of the bottom of the third detection box is fixedly provided with two groups of opposite-shooting photoelectric sensors.
Preferably, the multifunctional detection mechanism comprises a box body IV, a clamp mechanism, a bending and driving mechanism and an adsorption and leveling mechanism, wherein the box body IV is fixedly arranged at the top end of the left front part of the detection table, a material opening I is formed in the rear side wall of the box body IV, the adsorption and leveling mechanism is fixedly arranged at the top of the box body IV, two groups of clamp mechanisms are symmetrically arranged at the left and right sides of the bottom of the box body IV, the bottom end of the clamp mechanism is connected with the bending and driving mechanism, and a pair of partition boards II in the horizontal direction are symmetrically arranged at the left and right sides of the bottom of the box body IV.
Preferably, the left clamp mechanism comprises a sliding block, the top of the second partition plate is connected with the sliding block in a left-right sliding mode, the left end of the left sliding block is fixedly connected with the left side wall of the box body through a first spring, the bottom of the left end of the sliding block is fixedly connected with a first horizontal clamping plate in the left-right direction, a vertical mounting groove is formed in the sliding block, the mounting groove is rotationally connected with a clamping screw rod, the top end of the clamping screw rod is fixedly connected with the output shaft end of the clamping motor, the clamping motor is fixedly connected with the top end of the sliding block, a second horizontal clamping plate in the left-right direction is connected with the clamping screw rod in a threaded mode, the second horizontal clamping plate is connected with the sliding block in an up-down sliding mode, and the first horizontal clamping plate and the second horizontal clamping plate are fixedly connected with rubber blocks.
Preferably, the bending and driving mechanism comprises a vertical screw rod II which is rotationally connected with the center of the bottom of the box body II, the bottom end of the screw rod II is fixedly connected with the output shaft end of a servo motor III, the servo motor III is fixedly connected with the outer side of the bottom wall of the box body II, the middle part of the screw rod II is in threaded connection with a threaded sleeve, the top end of the threaded sleeve is fixedly connected with a group of support rods in bilateral symmetry, the top end of the support rod is fixedly connected with a support plate in the horizontal direction, the bottom of the support plate is fixedly provided with an electric heating device, the threaded sleeve is in bilateral symmetry and hinged connection with a pair of first connecting rods, one end of the first connecting rod far away from the threaded sleeve is hinged with an L-shaped supporting rod, the top end of the L-shaped supporting rod is fixedly connected with a sliding block, the top end of the L-shaped supporting rod penetrates through the partition plate II in a bilateral sliding manner, and the bottom of the end of the first connecting rod far away from the threaded sleeve is fixedly provided with a spring II.
The adsorption and leveling mechanism comprises a screw rod IV, a screw rod IV is rotationally arranged on the top wall of a box body IV, the left end of the screw rod IV is fixedly connected with the output shaft end of a servo motor IV, the servo motor IV is fixedly connected with the top wall of the box body IV, the screw rod IV is in threaded connection with a sliding table IV, the bottom end of the sliding table IV is fixedly connected with a C-shaped mounting plate, a motor V is fixedly mounted on the top of the C-shaped mounting plate, a lifting cylinder V is fixedly mounted on the top of the C-shaped mounting plate, a second adsorption plate is fixedly connected with the bottom of the lifting cylinder V, a plurality of vacuum suction nozzles II are fixedly arranged at the bottom end of the second adsorption plate, the front end of an output shaft of the motor V is fixedly connected with a rotating rod, the other end of the rotating rod is hinged with a first connecting rod, the bottom of the connecting rod II is hinged with a first connecting sleeve, the bottom of the first connecting rod is connected with the inner wall of the sleeve in an up-down sliding mode, the bottom of the first connecting rod is rotationally connected with a rolling roller along the front-back direction, and the left side of the bottom of the C-shaped mounting plate is fixedly mounted with a vertical distance sensor IV and a second industrial camera.
Compared with the prior art, the flexible substrate detection device has the beneficial effects that the flexible substrate is automatically fed into the detection area through the feeding mechanism, then the substrate is conveyed to each detection mechanism for detection through the conveying mechanism, and the first detection mechanism, the second detection mechanism and the third detection mechanism respectively bear different detection tasks, so that each performance index of the substrate can be comprehensively detected. The controller is responsible for receiving the detection data of each detection mechanism, and processing and analyzing the detection data. The technical scheme obviously improves the detection efficiency and accuracy of the flexible substrate, reduces the manual intervention degree and improves the automation level, meanwhile, the detection flow can be flexibly adjusted according to the actual requirements due to relative independence among the detection mechanisms, and the adaptability and the flexibility of the device are enhanced.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a three-dimensional schematic view of a flexible substrate inspection apparatus of the present invention;
FIG. 2 is a schematic front view of a flexible substrate inspection apparatus according to the present invention;
FIG. 3 is a schematic top view of the flexible substrate inspection apparatus of the present invention;
FIG. 4 is a schematic left-cut view of a first test cassette of the present invention;
FIG. 5 is a schematic front cross-sectional view of a second test cassette of the present invention;
FIG. 6 is a schematic front cross-sectional view of a third test cassette of the present invention;
FIG. 7 is a schematic front cross-sectional view of the multifunctional inspection mechanism of the present invention;
Fig. 8 is an enlarged partial schematic view at a in fig. 7.
Reference numerals:
1. A detection table; 2, a feeding mechanism; 201, a storage box; 202, portal frame, 203, first lead screw sliding table, 204, lifting cylinder I, 205, adsorption plate I, 206, vacuum suction nozzle I, 3, conveying mechanism, 301, rotary conveying mechanism, 3011, rotary base, 3012, rotary disc, 3013, double-shaft cylinder, 3014, carrier plate, 3015, column I, 3016, spur gear II, 3017, rotary motor, 302, translational conveying mechanism, 3021, guide rail base, 3022, first lead screw sliding table, 3023, sliding seat I, 3024, synchronous belt conveying device, 4, first detecting mechanism, 401, column I, 402, second lead screw sliding table, 403, lifting cylinder II, 404, first detecting box, 405, partition I, 406, squeeze cylinder, 407, pressurizing plate, 408, guide rod, 409, optical fiber sensor, 410, flexible pressure sensor, 5, second detecting mechanism, 501, column II, 502, third lead screw, 503, lifting cylinder III, 504, second detecting box, 505, electric lifting column, 506, horizontal mounting plate, electrical sensor, 509, electronic mounting plate, 509, electric sensor, 508, 80 clamp, 80, 46, 80, 46, 80, top, the device comprises a threaded sleeve, an 8054, a supporting rod, an 8055, a supporting plate, an 8056, an electric heating device, an 8057, a first connecting rod, an 8058, an L-shaped supporting rod, an 8059, a second spring, an 806, an adsorption and leveling mechanism, an 8061, a fourth screw rod, an 8062, a fourth servo motor, an 8063, a fourth sliding table, an 8064, a C-shaped mounting plate, an 8065, a fifth motor, an 8066, a fifth lifting cylinder, an 8067, a second adsorption plate, an 8068, a second vacuum suction nozzle, an 8069, a rotating rod, an 8610, a second connecting rod, an 8611, a first vertical rod, an 8612, a sleeve, an 8613, a rolling roller, an 8615, a fourth distance sensor, an 8615 and a second industrial camera.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustration and explanation of the present invention only, and are not intended to limit the present invention.
In addition, the descriptions of the "first," "second," and the like, herein are for descriptive purposes only and are not intended to be specifically construed as order or sequence, nor are they intended to limit the invention solely for distinguishing between components or operations described in the same technical term, but are not to be construed as indicating or implying any relative importance or order of such features. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, technical solutions and technical features between the embodiments may be combined with each other, but it is necessary to base that a person skilled in the art can implement the combination of technical solutions, when the combination of technical solutions contradicts or cannot be implemented, should be considered that the combination of technical solutions does not exist, and is not within the scope of protection claimed by the present invention.
The invention provides the following examples
Example 1
The embodiment of the invention provides a flexible substrate detection device, which is shown in figures 1-3, and comprises a detection table 1, a feeding mechanism 2, a conveying mechanism 3, a first detection mechanism 4, a second detection mechanism 5, a third detection mechanism 6 and a controller 7, wherein the feeding mechanism 2 is fixedly arranged at the top of the left rear part of the detection table 1, the conveying mechanism 3 is fixedly arranged at the top of the detection table 1, the first detection mechanism 4 is fixedly arranged on the detection table 1 and positioned at the rear side of the conveying mechanism 3, the second detection mechanism 5 is fixedly arranged on the detection table 1 and positioned at the right side of the conveying mechanism 3, the third detection mechanism 6 is fixedly arranged on the detection table 1 and positioned in front of the conveying mechanism 3, and the conveying mechanism 3, the first detection mechanism 4, the second detection mechanism 5 and the third detection mechanism 6 are respectively and electrically connected with the controller 7.
The flexible substrate detection device has the advantages that the flexible substrate is automatically fed into the detection area through the feeding mechanism 2, then the substrate is conveyed to each detection mechanism for detection through the conveying mechanism 3, and the first detection mechanism 4, the second detection mechanism 5 and the third detection mechanism 6 respectively bear different detection tasks, so that each performance index of the substrate can be comprehensively detected. The controller 7 is responsible for receiving the detection data of each detection mechanism, and processing and analyzing the detection data. The technical scheme obviously improves the detection efficiency and accuracy of the flexible substrate, reduces the manual intervention degree and improves the automation level, meanwhile, the detection flow can be flexibly adjusted according to the actual requirements due to relative independence among the detection mechanisms, and the adaptability and the flexibility of the device are enhanced.
Example 2
On the basis of the embodiment 1, as shown in fig. 1-3, the feeding mechanism 2 comprises a storage box 201, wherein the storage box 201 is fixedly installed on the left side of the top of the detection table 1, a portal frame 202 is arranged on the top of the storage box 201, the portal frame 202 is fixedly connected with the top of the detection table 1, a first screw sliding table 203 sliding along the left-right direction is fixedly arranged on the top of the portal frame 202, a first vertical lifting cylinder 204 is fixedly installed at the movable end of the first screw sliding table 203, an adsorption plate 205 is fixedly connected with the push rod end at the bottom of the first lifting cylinder 204, and a plurality of vacuum suction nozzles 206 are fixedly installed at the bottom of the adsorption plate 205.
The conveying mechanism 3 includes a rotary conveying mechanism 301 and a translational conveying mechanism 302;
The rotary conveying mechanism 301 comprises a rotary base 3011, wherein the rotary base 3011 is fixedly arranged at the top of the right side of the detection table 1, the top of the rotary base 3011 is rotationally connected with a rotary disc 3012, four double-shaft air cylinders 3013 are symmetrically and fixedly arranged at the center of the top of the rotary disc 3012, the movable end of each double-shaft air cylinder 3013 is fixedly connected with a bearing plate 3014, and the bearing plates 3014 are in radial sliding connection with the top of the rotary disc 3012 along the rotary disc 3012;
The first adsorption plate 205 further comprises a first spur gear 3015, the bottom end of the axis of the rotary disc 3012 is fixedly connected with the first spur gear 3015, the first spur gear 3015 is in meshed connection with a second spur gear 3016, the top end of the second spur gear 3016 is fixedly connected with the output shaft end of the rotary motor 3017, and the rotary motor 3017 is fixedly connected with the inner wall of the right side of the rotary base 3011;
The translation conveying mechanism 302 includes a rail base 3021, a rail base 3021 is fixedly disposed at the top of the detection table 1 and located in front of the gantry 202, a pair of first rails 3022 are symmetrically and fixedly mounted on the top of the rail base 3021, the top of the first rails 3022 is slidably connected to a first sliding seat 3023 in front of and behind the first sliding seat, a bottom end of the first sliding seat 3023 is connected to a synchronous belt conveying device 3024, and the synchronous belt conveying device 3024 is used for providing sliding force for the first sliding seat 3023.
The technical scheme has the advantages that the feeding mechanism 2 and the conveying mechanism 3 are designed in detail on the basis of the embodiment 1;
When the feeding mechanism 2 works, the controller 7 controls the first screw sliding table 203 to run, drives the lifting cylinder I204, the adsorption plate I205 and the like to slide above the storage box 201, then the lifting cylinder I204 pushes the adsorption plate I205 and the vacuum suction nozzle I206 to descend until the flexible substrate to be tested is adsorbed, then the adsorption plate I205 slides to a target position of the bearing plate 3014 on the rotary disc 3012 to release the flexible substrate to be tested, the double-shaft cylinder 3013 is responsible for pushing the bearing plate 3014 to a proper detection position;
When the translation conveying mechanism 302 operates, the controller 7 controls the synchronous belt conveying device 3024 at the bottom to be round, and the sliding seat is pulled to slide back and forth on the first guide rail 3022 through the rotation of the synchronous belt conveying device 3024;
And the storage box 201 is used for storing the flexible substrate to be detected.
The portal frame 202 is used as a supporting structure of the feeding mechanism 2, and the automatic feeding of the flexible substrate is realized by the components such as a screw sliding table, a lifting cylinder and the like.
The first screw sliding table 203 slides on the top of the portal frame 202 along the left-right direction and is used for adjusting the position of the first adsorption plate 205.
And the lifting cylinder I204 drives the adsorption plate I205 to move up and down so as to realize the adsorption and release of the flexible substrate.
The first adsorption plate 205 and the first vacuum suction nozzle 206 firmly adsorb the flexible substrate by vacuum suction to prevent falling off in the conveying process.
The feeding mechanism 2 realizes automatic feeding and accurate positioning of the flexible substrate through the synergistic effect of the portal frame 202, the first screw sliding table 203, the lifting cylinder I204, the adsorption plate I205 and other components. The transfer mechanism 3 includes a rotary transfer mechanism 301 and a translational transfer mechanism 302, and smooth transfer and positioning of the substrate are achieved by the rotary motion of the rotary disk 3012 and the biaxial cylinder 3013, and the translational motion of the timing belt transfer device 3024. According to the technical scheme, the feeding and conveying efficiency is improved, and the stability and the accuracy of the substrate in the detection process are guaranteed.
Example 3
On the basis of the embodiment 1, as shown in fig. 1-4, the first detection mechanism 4 comprises a first upright post 401, a first upright post 401 is fixedly arranged at the top end of a detection table 1 at the right rear part of the rotary disc 3012, a second screw sliding table 402 sliding along the front-rear direction is fixedly arranged at the top end of the first upright post 401, a second vertical lifting cylinder 403 is fixedly arranged at the left movable end of the second screw sliding table 402, the bottom end of the second lifting cylinder 403 is fixedly connected with a first detection box 404, the middle part in the first detection box 404 is fixedly connected with a first partition plate 405 in the horizontal direction, a downward extrusion cylinder 406 is fixedly arranged at the top center of the first partition plate 405, a push rod end at the bottom of the extrusion cylinder 406 is fixedly connected with a pressurizing plate 407 in the horizontal direction, a plurality of vertical guide rods 408 are fixedly connected at the top ends of the pressurizing plate 407, a plurality of optical fiber sensors 409 are fixedly arranged at the bottom of the front half section of the pressurizing plate 407, and a plurality of flexible pressure sensors 410 are fixedly arranged at the bottom end of the rear half section of the pressurizing plate 407.
The working principle of the technical scheme has the beneficial effects that the first detection mechanism 4 is designed in detail on the basis of the embodiment 1;
When the first detection mechanism 4 works, firstly the rotary disc 3012 of the conveying mechanism 3 rotates to the position of the first detection mechanism 4, then the controller 7 controls the second screw sliding table 402 to move forward to a first designated position, then the lifting cylinder II 403 pushes the first detection box 404 to descend, then the extrusion cylinder 406 presses down to enable the optical fiber sensor 409 to be close to the surface of the flexible substrate and keep a certain gap for detecting the flatness;
The pressure detection and the flatness detection of the flexible substrate are realized through the synergistic effect of the first upright post 401, the second screw sliding table 402, the second lifting cylinder 403, the first detection box 404 and other parts; the optical fiber sensor 409 on the pressurizing plate 407 is responsible for detecting the flatness of the flexible substrate, and the flexible pressure sensor 410 can monitor the deformation and stress condition of the substrate in the pressurizing process in real time, so that the performance indexes such as the strength and toughness of the flexible substrate are judged, and the technical scheme not only improves the detection accuracy, but also provides powerful support for the quality control of the flexible substrate.
Example 4
On the basis of the embodiment 1, as shown in fig. 1-3 and 5, the second detection mechanism 5 comprises a second upright post 501, wherein the second upright post 501 is fixedly arranged at the top of the right side of the detection platform 1, a third screw sliding table 502 sliding along the front-back direction is fixedly arranged at the top end of the second upright post 501, a vertical lifting cylinder III 503 is fixedly arranged at the left sliding end of the third screw sliding table 502, the bottom end of the lifting cylinder III 503 is fixedly connected with a second detection box 504, an electric lifting column 505 is fixedly arranged at the center of the inner side of the top wall of the second detection box 504, the lifting end of the bottom end of the electric lifting column 505 is fixedly connected with a horizontal mounting plate 506, a plurality of electronic probes 507 are fixedly arranged at the bottom of the horizontal mounting plate 506, the electronic probes 507 are electrically connected with a controller 7, an electronic atomizer 508 is fixedly arranged on the left side wall and the right side wall of the second detection box 504, a saving power supply 509 is fixedly arranged at the bottom of the second detection box 504, and the electronic probes 507 are respectively electrically connected with the electronic atomizer 508.
The working principle of the technical scheme has the beneficial effects that the second detection mechanism 5 is designed in detail on the basis of the embodiment 1;
When the second detection mechanism 5 works, when the rotary disc 3012 of the conveying mechanism 3 rotates below the position of the second detection mechanism 5, the double-shaft air cylinder 3013 pushes the bearing plate 3014 to move rightwards, then the controller 7 controls the lifting air cylinder three 503 to push the second detection box 504 and other components to descend, so that the second detection box 504 buckles the flexible substrate to be detected on the bearing plate 3014, then the electric lifting column 505 pushes the horizontal mounting plate 506 and the electronic probe 507 to descend for electrically detecting the flexible substrate to be detected,
Through the synergistic effect of the second upright post 501, the third screw rod sliding table 502, the third lifting cylinder 503, the second detection box 504 and other components, the detection of the electronic probe 507 of the flexible substrate and the detection of the electrical change of the flexible substrate under the condition of electronic atomization and humidity are realized. The electronic probe 507 can penetrate into the substrate to detect the electric property and microstructure of the substrate, the electronic atomizer 508 can simulate the performance of the substrate in a wet environment, and the technical scheme not only improves the comprehensiveness and accuracy of detection, but also provides an important basis for evaluating the performance of the substrate in a specific environment.
Example 5
On the basis of the embodiment 1, as shown in fig. 1-3 and 6, the third detection mechanism 6 comprises a column III 601, wherein the column III 601 is fixedly arranged at the top end of the detection table 1 in front of the rotary disc 3012, a fourth screw sliding table 602 sliding along the left-right direction is fixedly arranged at the top end of the column III 601, a vertical lifting cylinder IV 603 is fixedly arranged at the sliding end of the rear end of the fourth screw sliding table 602, a third detection box 604 is fixedly arranged at the bottom of the lifting cylinder IV 603, a plurality of industrial cameras I605 are fixedly arranged at the inner side of the top wall of the third detection box 604, a photoelectric distance sensor 606 is fixedly arranged at the center of the top of the third detection box 604, a plurality of illuminating lamps 607 are fixedly arranged on the inner wall of the third detection box 604, and two groups of opposite photoelectric sensors 608 are fixedly arranged on the side wall at the periphery of the bottom of the third detection box 604.
The working principle and the beneficial effects of the technical scheme are as follows:
When the third detection mechanism 6 works, when the rotary disc 3012 of the conveying mechanism 3 rotates to the position below the third detection mechanism 6, the double-shaft air cylinder 3013 pushes the bearing plate 3014 to move forwards, then the controller 7 controls the lifting air cylinder four 603 to push the parts such as the third detection box 604 to descend, so that the third detection box 604 buckles the flexible substrate to be detected on the bearing plate 3014, the photoelectric distance sensor 606 is responsible for providing accurate data of descending height, then the illuminating lamp 607 is lightened, the industrial camera one 605 captures images of the flexible substrate to be detected and analyzes and senses the shape, the size, the position and other information of the flexible substrate to be detected, and meanwhile, whether the surface of the flexible substrate to be detected is defective, scratched, polluted and the like is detected, and the two groups of opposite-irradiation photoelectric sensors 608 are responsible for detecting the length and width data of the flexible substrate to be detected.
Based on the embodiment 1, the embodiment designs the third detection mechanism 6 in detail, and realizes visual detection and photoelectric detection on the flexible substrate through the synergistic effect of the third upright post 601, the fourth screw sliding table 602, the fourth lifting cylinder 603, the third detection box 604 and other components. The industrial camera can capture the surface image of the substrate and process and analyze the image; the photoelectric distance sensor 606 and the photoelectric sensor 608 can monitor the information such as the position and the size of the substrate in real time, and the technical scheme not only improves the detection efficiency and accuracy, but also provides powerful support for the size control and the quality control of the substrate.
Example 6
On the basis of the embodiment 1, as shown in fig. 1-2 and 7-8, the multifunctional detecting mechanism 8 further comprises a multifunctional detecting mechanism 8, wherein the multifunctional detecting mechanism 8 comprises a box body IV 801, a clamp mechanism 804, a bending and driving mechanism 805 and an adsorption and leveling mechanism 806, the box body IV 801 is fixedly arranged at the top end of the left front side of the detecting table 1, a first material inlet 802 is formed in the rear side wall of the box body IV 801, the adsorption and leveling mechanism 806 is fixedly arranged at the top of the box body IV 801, two groups of clamp mechanisms 804 are symmetrically arranged at the bottom of the box body IV 801, the bottom end of the clamp mechanism 804 is connected with the bending and driving mechanism 805, and a pair of second partition plates 803 in the horizontal direction are symmetrically arranged on the left side wall and the right side wall of the bottom of the box body IV 801.
The left clamp mechanism 804 comprises a sliding block 8041, the top of the second partition plate 803 is connected with the sliding block 8041 in a left-right sliding manner, the left end of the left sliding block 8041 is fixedly connected with the left side wall of the fourth box 801 through a first spring 8042, the bottom of the left end of the sliding block 8041 is fixedly connected with a first horizontal clamping plate 8043 in the left-right direction, a vertical mounting groove 8044 is formed in the sliding block 8041, the mounting groove 8044 is rotationally connected with a clamping screw 8045, the top end of the clamping screw 8045 is fixedly connected with the output shaft end of the clamping motor 8046, the clamping motor 8046 is fixedly connected with the top end of the sliding block 8041, the clamping screw 8045 is connected with a second horizontal clamping plate 8047 in the left-right direction in a threaded manner, the second horizontal clamping plate 8047 is connected with the sliding block 8041 in an up-down sliding manner, and the first horizontal clamping plate 8043 and the second horizontal clamping plate 8047 are fixedly connected with the rubber block 8048.
The bending and driving mechanism 805 comprises a vertical screw rod II 8051 which is rotationally connected with the center of the bottom of the box body IV 801, the bottom end of the screw rod II 8051 is fixedly connected with the output shaft end of a servo motor III 8052, the servo motor III 8052 is fixedly connected with the outer side of the bottom wall of the box body IV 801, the middle part of the screw rod II 8051 is in threaded connection with a threaded sleeve 8053, the top end of the threaded sleeve 8053 is fixedly connected with a group of support rods 8054 in a bilateral symmetry manner, the top end of the support rods 8054 is fixedly connected with a support plate 8055 in the horizontal direction, the bottom of the support plate 8055 is fixedly provided with an electric heating device 8056, the threaded sleeve 8053 is hinged with a pair of first connecting rods 8057 in bilateral symmetry manner, one end of each first connecting rod 8057 far from the threaded sleeve 8053 is hinged with an L-shaped supporting rod 8058, the top end of each L-shaped supporting rod 8058 is fixedly connected with a sliding block 8041, and the top end of each L-shaped supporting rod 8058 horizontally slides through a partition plate II 803, and the first connecting rod 8057 is far from the bottom of the threaded sleeve 8053.
The adsorption and leveling mechanism 806 comprises a screw rod four 8061, a screw rod four 8061 in the left-right direction is rotationally arranged in the top wall of the box body four 801, the left end of the screw rod four 8061 is fixedly connected with the output shaft end of a servo motor four 8062, the servo motor four 8062 is fixedly connected with the top wall of the box body four 801, the screw rod four 8061 is in threaded connection with a sliding table four 8063, the bottom end of the sliding table four 8063 is fixedly connected with a C-shaped mounting plate 8064, a motor five 8065 is fixedly arranged at the top of the C-shaped mounting plate 8064, a lifting cylinder five 8066 is fixedly arranged at the top of the C-shaped mounting plate 8064, the bottom of the lifting cylinder five 8066 is fixedly connected with an adsorption plate two 8067, a plurality of vacuum suction nozzles two 8068 are fixedly arranged at the bottom end of the adsorption plate two 8067, the front end of an output shaft of the motor five 8065 is fixedly connected with a rotating rod 8069, the other end of the rotating rod 8069 is hinged with a connecting rod two 8610, the bottom end of the connecting rod two 8610 is hinged with a first 8611, the bottom end of the C-shaped mounting plate 8064 is fixedly connected with a sleeve 8612, the inner wall of the sleeve 8611 is vertically and slidingly connected with the first 8611, the bottom of the first 8611 is rotationally connected with the bottom of the C-shaped mounting plate 8064, the bottom of the lifting rod is fixedly arranged along the front-back direction, and the left end of the C-shaped mounting plate is fixedly arranged at the left end of the C-shaped mounting plate 8612, and the left end of the left end 8612 is fixedly arranged in front end of the left end of the industrial sensor 8611, and the left end of the left sensor 8613 and the industrial sensor 8611 is fixedly arranged in front and the left sensor 8613 and the left end of the left sensor of the left and 8613 and front and right side of the industrial sensor of the left and 8613.
The working principle and the beneficial effects of the technical scheme are as follows:
When the multifunctional detection mechanism 8 works, when the feeding mechanism 2 adsorbs and conveys the flexible substrate detected by the third detection mechanism 6 to the first sliding seat 3023 of the translation conveying mechanism 302, the synchronous belt conveying device 3024 operates and pulls the sliding seat to slide forwards into the fourth box 801, then the controller 7 controls the servo motor four 8062 to operate, the servo motor four 8062 drives the screw four 8061 to rotate so as to enable the sliding table four 8063 to move above the sliding seat, then the lifting cylinder five 8066 pushes the second adsorption plate 8067 and the second vacuum suction nozzle 8068 downwards to be tightly attached to the flexible substrate, then the flexible substrate is adsorbed, the sliding seat is withdrawn from the fourth box 801 from the first material opening 802 backwards, the controller 7 controls the lifting cylinder five 8066, the second adsorption plate 8067 and the second vacuum suction nozzle 8068 to enable the flexible substrate to be placed on the fourth box 8055, then the clamping motor 8046 on the left side and the right side works to drive the clamping screw 8045 to rotate, the second horizontal clamping plate 8047 and the first rubber block 8048 at the top are enabled to be drawn down and finally clamped together with the first horizontal clamping plate 8043 to form a flexible substrate, then the third servo motor 8052 is operated to drive the second screw rod 8051 to rotate, the second screw rod 8051 is rotated to drive the threaded sleeve 8053 to move down, the threaded sleeve 8053 drives the support rod 8054 and the support plate 8055 to synchronously descend, the first connecting rod 8057 is driven to descend, the L-shaped support rod 8058 is enabled to be drawn down towards the center, the fifth motor 8065 at the top is operated to drive the rotating rod 8069 to rotate, the rotating rod 8069 drives the second connecting rod 8610, the first vertical rod 8611 and the rolling roller 8613 to slide up and down, the flexible substrate is enabled to bend in a reciprocating manner, the first spring 8042 and the second spring 8059 provide resetting elastic force for the sliding block 8041, meanwhile the fourth distance sensor 8614 and the second industrial camera 8615 observe and record bending changes and image data of the flexible substrate, the fifth motor 8065 is stopped after the bending reaches a designated time, and then the support plate 8055 jacks up the flexible substrate, the electric heating device 8056 works, the change of the flexible substrate at different temperatures is detected, and finally the flexible substrate is smoothed by rolling left and right through the rolling roller 8613.
Based on embodiment 1, the multifunctional detection mechanism 8 is added in this embodiment, and comprises a fourth box 801, a clamp mechanism 804, a bending and driving mechanism 805, an adsorption and leveling mechanism 806 and other components, wherein the clamp mechanism 804 and the bending and driving mechanism 805 cooperate to clamp and drive the flexible substrate, and the adsorption and leveling mechanism 806 can perform reciprocating bending detection and leveling treatment on the flexible substrate to simulate the stress condition of the flexible substrate in practical application. Meanwhile, the multifunctional detection mechanism is further provided with detection components such as an industrial camera II 8615 and a distance sensor IV 8614, deformation conditions of the substrate in the bending and leveling processes can be monitored in real time, the technical scheme not only improves the comprehensiveness and accuracy of detection, but also provides important basis for performance evaluation of the substrate in practical application, and in addition, the multifunctional detection mechanism 8 has higher flexibility and adaptability, and can be customized and adjusted according to practical requirements.
It should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present invention, and not for limiting the same, and although the present invention has been described in detail with reference to the above-mentioned embodiments, it should be understood by those skilled in the art that the technical solution described in the above-mentioned embodiments may be modified or some technical features may be equivalently replaced, and these modifications or substitutions do not make the essence of the corresponding technical solution deviate from the spirit and scope of the technical solution of the embodiments of the present invention.

Claims (6)

1.一种柔性基板检测装置，其特征在于，包括：检测台(1)、上料机构(2)、传送机构(3)、第一检测机构(4)、第二检测机构(5)、第三检测机构(6)和控制器(7)，所述检测台(1)左后方顶部固定设有上料机构(2)，所述检测台(1)顶部固定设有传送机构(3)，所述检测台(1)上位于所述传送机构(3)后侧固定设有第一检测机构(4)，检测台(1)上位于所述传送机构(3)右侧固定设有第二检测机构(5)，检测台(1)上位于所述传送机构(3)前方固定设有第三检测机构(6)，所述传送机构(3)、第一检测机构(4)、第二检测机构(5)和第三检测机构(6)与控制器(7)分别电连接；1. A flexible substrate detection device, characterized in that it comprises: a detection platform (1), a feeding mechanism (2), a conveying mechanism (3), a first detection mechanism (4), a second detection mechanism (5), a third detection mechanism (6) and a controller (7), wherein a feeding mechanism (2) is fixedly provided at the top of the left rear of the detection platform (1), a conveying mechanism (3) is fixedly provided at the top of the detection platform (1), a first detection mechanism (4) is fixedly provided on the detection platform (1) at the rear side of the conveying mechanism (3), a second detection mechanism (5) is fixedly provided on the detection platform (1) at the right side of the conveying mechanism (3), a third detection mechanism (6) is fixedly provided on the detection platform (1) at the front side of the conveying mechanism (3), and the conveying mechanism (3), the first detection mechanism (4), the second detection mechanism (5) and the third detection mechanism (6) are electrically connected to the controller (7) respectively; 所述上料机构(2)包括：储料箱(201)、龙门架(202)；The feeding mechanism (2) comprises: a material storage box (201) and a gantry (202); 传送机构(3)包括：旋转输送机构(301)和平移输送机构(302)；The conveying mechanism (3) comprises: a rotating conveying mechanism (301) and a translation conveying mechanism (302); 所述旋转输送机构(301)包括：旋转底座(3011)，所述检测台(1)右侧顶部固定安装旋转底座(3011)，所述旋转底座(3011)顶部转动连接旋转圆盘(3012)，旋转圆盘(3012)顶部中心对称固定安装四个双轴气缸(3013)，每个双轴气缸(3013)的活动端均连固定连接一个承载板(3014)，承载板(3014)与旋转圆盘(3012)顶端沿旋转圆盘(3012)径向滑动连接；The rotary conveying mechanism (301) comprises: a rotary base (3011), the rotary base (3011) is fixedly installed on the top right side of the detection platform (1), the top of the rotary base (3011) is rotatably connected to a rotary disc (3012), four double-axis cylinders (3013) are fixedly installed on the top of the rotary disc (3012) in a centrally symmetrical manner, the movable end of each double-axis cylinder (3013) is fixedly connected to a bearing plate (3014), and the bearing plate (3014) is slidably connected to the top of the rotary disc (3012) in a radial direction of the rotary disc (3012); 所述平移输送机构(302)包括：导轨基座(3021)，所述检测台(1)顶部位于所述龙门架(202)前方固定设有导轨基座(3021)，导轨基座(3021)顶部左右对称固定安装一对沿前后方向的第一导轨(3022)，第一导轨(3022)顶部前后滑动连接滑动座一(3023)，滑动座一(3023)底端连接同步带传送装置(3024)，同步带传送装置(3024)用于提供滑动座一(3023)的滑动力；The translation conveying mechanism (302) comprises: a guide rail base (3021), the top of the inspection platform (1) is located in front of the gantry (202) and is fixedly provided with the guide rail base (3021), a pair of first guide rails (3022) along the front-back direction are fixedly installed on the top of the guide rail base (3021) in a left-right symmetrical manner, the top of the first guide rail (3022) is connected to a sliding seat (3023) in a front-back sliding manner, the bottom end of the sliding seat (3023) is connected to a synchronous belt conveyor (3024), and the synchronous belt conveyor (3024) is used to provide a sliding force for the sliding seat (3023); 第一检测机构(4)包括：立柱一(401)，所述旋转圆盘(3012)的右后方的检测台(1)顶端固定安装立柱一(401)，立柱一(401)顶端固定安装沿前后方向滑动的第二丝杠滑台(402)，第二丝杠滑台(402)的左侧活动端固定安装竖向的升降气缸二(403)，升降气缸二(403)底端固定连接第一检测箱(404)，第一检测箱(404)内中部固定连接水平方向的隔板一(405)，隔板一(405)顶部中心固定安装向下的挤压气缸(406)，挤压气缸(406)底部推杆端固定连接水平方向的加压板(407)，加压板(407)顶端固定连接若干竖向的导引杆(408)，导引杆(408)与隔板一(405)上下滑动连接，所述加压板(407)前半段底部固定安装若干光纤传感器(409)，所述加压板(407)后半段底端固定安装若干柔性压力传感器(410)；The first detection mechanism (4) comprises: a column (401), a column (401) is fixedly installed on the top of the detection platform (1) to the right rear of the rotating disk (3012), a second screw slide (402) sliding in the front-back direction is fixedly installed on the top of the column (401), a vertical lifting cylinder (403) is fixedly installed on the left movable end of the second screw slide (402), the bottom end of the lifting cylinder (403) is fixedly connected to the first detection box (404), and a horizontal partition (404) is fixedly connected to the middle of the first detection box (404). 05), a downward extrusion cylinder (406) is fixedly installed at the center of the top of the partition (405), the push rod end at the bottom of the extrusion cylinder (406) is fixedly connected to a horizontal pressure plate (407), the top of the pressure plate (407) is fixedly connected to a plurality of vertical guide rods (408), the guide rods (408) are slidably connected to the partition (405) up and down, a plurality of optical fiber sensors (409) are fixedly installed at the bottom of the front half of the pressure plate (407), and a plurality of flexible pressure sensors (410) are fixedly installed at the bottom of the rear half of the pressure plate (407); 第二检测机构(5)包括：立柱二(501)，所述检测台(1)右侧顶部固定安装立柱二(501)，立柱二(501)为顶端固定安装沿前后方向滑动的第三丝杠滑台(502)，所述第三丝杠滑台(502)的左侧滑动端固定安装竖向的升降气缸三(503)，所述升降气缸三(503)底端固定连接第二检测箱(504)，第二检测箱(504)的顶壁内侧中心固定安装电动升降柱(505)，所述电动升降柱(505)的底端的升降端固定连接水平安装板(506)，水平安装板(506)底部固定设有若干电子探针(507)，电子探针(507)均与控制器(7)电连接，所述第二检测箱(504)左右侧壁固定设有电子雾化器(508)，所述第二检测箱(504)底部固定安装储蓄电源(509)，所述电子探针(507)与电子雾化器(508)与储蓄电源(509)分别电连接；The second detection mechanism (5) comprises: a second column (501), the second column (501) is fixedly installed on the top right side of the detection platform (1), the third screw slide (502) sliding along the front-back direction is fixedly installed on the top of the second column (501), the left sliding end of the third screw slide (502) is fixedly installed with a vertical lifting cylinder (503), the bottom end of the lifting cylinder (503) is fixedly connected to the second detection box (504), and the electric lifting column (505) is fixedly installed at the inner center of the top wall of the second detection box (504). The lifting end of the bottom end of the electric lifting column (505) is fixedly connected to a horizontal mounting plate (506), a plurality of electronic probes (507) are fixedly provided at the bottom of the horizontal mounting plate (506), and the electronic probes (507) are all electrically connected to the controller (7); electronic atomizers (508) are fixedly provided on the left and right side walls of the second detection box (504); a storage power supply (509) is fixedly installed at the bottom of the second detection box (504), and the electronic probes (507), the electronic atomizer (508) and the storage power supply (509) are electrically connected respectively; 第三检测机构(6)包括：立柱三(601)，所述旋转圆盘(3012)前方的检测台(1)顶端固定安装立柱三(601)，所述立柱三(601)顶端固定安装沿左右方向滑动的第四丝杠滑台(602)，所述第四丝杠滑台(602)的后端滑动端固定安装竖向的升降气缸四(603)，所述升降气缸四(603)的底部固定安装第三检测箱(604)，所述第三检测箱(604)顶壁内侧固定安装若干工业相机一(605)，所述第三检测箱(604)顶部中心固定安装光电距离传感器(606)，所述第三检测箱(604)内壁固定设有若干照明灯(607)，所述第三检测箱(604)底部四周侧壁固定设有两组对射的光电传感器(608)。The third detection mechanism (6) comprises: a column three (601), a column three (601) is fixedly installed on the top of the detection platform (1) in front of the rotating disk (3012), a fourth screw slide (602) sliding in the left and right directions is fixedly installed on the top of the column three (601), a vertical lifting cylinder four (603) is fixedly installed on the rear sliding end of the fourth screw slide (602), a third detection box (604) is fixedly installed on the bottom of the lifting cylinder four (603), a plurality of industrial cameras one (605) are fixedly installed on the inner side of the top wall of the third detection box (604), a photoelectric distance sensor (606) is fixedly installed at the top center of the third detection box (604), a plurality of lighting lamps (607) are fixedly provided on the inner wall of the third detection box (604), and two groups of oppositely projecting photoelectric sensors (608) are fixedly provided on the side walls around the bottom of the third detection box (604). 2.根据权利要求1所述的一种柔性基板检测装置，其特征在于，所述上料机构(2)包括：储料箱(201)，所述检测台(1)顶部左侧固定安装储料箱(201)，储料箱(201)顶部设有龙门架(202)，龙门架(202)与检测台(1)顶端固定连接，龙门架(202)的顶部固定设有沿左右方向滑动的第一丝杠滑台(203)，第一丝杠滑台(203)的活动端固定安装竖向的升降气缸一(204)，升降气缸一(204)底部的推杆端固定连接吸附板一(205)，吸附板一(205)底部固定安装若干真空吸嘴一(206)。2. A flexible substrate detection device according to claim 1, characterized in that the feeding mechanism (2) comprises: a material storage box (201), the material storage box (201) is fixedly installed on the left side of the top of the detection platform (1), a gantry (202) is provided on the top of the material storage box (201), the gantry (202) is fixedly connected to the top of the detection platform (1), a first screw slide (203) sliding along the left and right directions is fixedly provided on the top of the gantry (202), a vertical lifting cylinder (204) is fixedly installed on the movable end of the first screw slide (203), a push rod end at the bottom of the lifting cylinder (204) is fixedly connected to an adsorption plate (205), and a plurality of vacuum suction nozzles (206) are fixedly installed on the bottom of the adsorption plate (205). 3.根据权利要求1所述的一种柔性基板检测装置，其特征在于，还包括多功能检测机构(8)，多功能检测机构(8)包括：箱体四(801)、夹具机构(804)、弯曲与驱动机构(805)和吸附与平整机构(806)，所述检测台(1)的左前方顶端固定安装箱体四(801)，箱体四(801)的后侧壁开设有料口一(802)，箱体四(801)顶部固定设有吸附与平整机构(806)，箱体四(801)底部固定左右对称的设置两组夹具机构(804)，所述夹具机构(804)底端连接弯曲与驱动机构(805)，所述箱体四(801)底部左右侧壁左右对称设有一对水平方向的隔板二(803)。3. A flexible substrate detection device according to claim 1, characterized in that it also includes a multifunctional detection mechanism (8), the multifunctional detection mechanism (8) includes: a box body (801), a clamping mechanism (804), a bending and driving mechanism (805) and an adsorption and leveling mechanism (806), the box body (801) is fixedly installed at the top left front of the detection platform (1), the rear side wall of the box body (801) is provided with a material inlet (802), the top of the box body (801) is fixedly provided with an adsorption and leveling mechanism (806), the bottom of the box body (801) is fixedly provided with two sets of clamping mechanisms (804) symmetrically arranged, the bottom end of the clamping mechanism (804) is connected to the bending and driving mechanism (805), and the left and right side walls of the bottom of the box body (801) are symmetrically provided with a pair of horizontal partitions (803). 4.根据权利要求3所述的一种柔性基板检测装置，其特征在于，左侧的夹具机构(804)包括：滑动块(8041)，所述隔板二(803)顶部左右滑动连接滑动块(8041)，左侧的滑动块(8041)左端与箱体四(801)左侧壁之间通过弹簧一(8042)固定连接，滑动块(8041)的左端底部固定连接左右方向的水平夹板一(8043)，所述滑动块(8041)内开设有竖向的安装槽(8044)，安装槽(8044)转动连接夹紧丝杠(8045)，夹紧丝杠(8045)顶端与夹紧电机(8046)输出轴端固定连接，夹紧电机(8046)与滑动块(8041)顶端固定连接，夹紧丝杠(8045)上螺纹连接左右方向的水平夹板二(8047)，所述水平夹板二(8047)与滑动块(8041)上下滑动连接，所述水平夹板一(8043)和水平夹板二(8047)上均固定连接橡胶块(8048)。4. A flexible substrate detection device according to claim 3, characterized in that the clamp mechanism (804) on the left side comprises: a sliding block (8041), the top of the partition plate 2 (803) is slidably connected to the sliding block (8041) on the left side, the left end of the sliding block (8041) on the left side is fixedly connected to the left side wall of the box body 4 (801) through a spring 1 (8042), the bottom of the left end of the sliding block (8041) is fixedly connected to a horizontal clamp plate 1 (8043) in the left and right directions, and a vertical mounting groove (8044) is provided in the sliding block (8041). ), the mounting groove (8044) is rotatably connected to the clamping screw (8045), the top end of the clamping screw (8045) is fixedly connected to the output shaft end of the clamping motor (8046), the clamping motor (8046) is fixedly connected to the top end of the sliding block (8041), the clamping screw (8045) is threadedly connected to the horizontal clamping plate 2 (8047) in the left and right directions, the horizontal clamping plate 2 (8047) is slidably connected to the sliding block (8041) up and down, and the horizontal clamping plate 1 (8043) and the horizontal clamping plate 2 (8047) are fixedly connected to the rubber block (8048). 5.根据权利要求4所述的一种柔性基板检测装置，其特征在于，弯曲与驱动机构(805)包括：所述箱体四(801)底部中心转动连接的竖向的丝杠二(8051)，丝杠二(8051)底端与伺服电机三(8052)输出轴端固定连接，伺服电机三(8052)与箱体四(801)底壁外侧固定连接，丝杠二(8051)上中部螺纹连接螺纹套(8053)，螺纹套(8053)顶端左右对称固定连接一组支撑杆(8054)，支撑杆(8054)顶端固定连接水平方向的支撑板(8055)，支撑板(8055)底部固定安装有电加热装置(8056)，所述螺纹套(8053)左右对称铰连接一对连杆一(8057)，所述连杆一(8057)远离螺纹套(8053)的一端铰连接L型支杆(8058)，L型支杆(8058)顶端固定连接滑动块(8041)，L型支杆(8058)顶端左右滑动贯穿隔板二(803)，所述连杆一(8057)远离螺纹套(8053)端底部固定安装弹簧二(8059)。5. A flexible substrate detection device according to claim 4, characterized in that the bending and driving mechanism (805) comprises: a vertical lead screw 2 (8051) rotatably connected to the center of the bottom of the box body 4 (801), the bottom end of the lead screw 2 (8051) is fixedly connected to the output shaft end of the servo motor 3 (8052), the servo motor 3 (8052) is fixedly connected to the outer side of the bottom wall of the box body 4 (801), the upper middle part of the lead screw 2 (8051) is threadedly connected to the threaded sleeve (8053), the top of the threaded sleeve (8053) is symmetrically fixedly connected to a group of support rods (8054), the top of the support rods (8054) is fixedly connected to the bottom of the servo motor 3 (8052), and the top of the servo motor 3 (8052) is fixedly connected to the outer side of the bottom wall of the box body 4 (801). A support plate (8055) is fixedly connected to the horizontal direction, and an electric heating device (8056) is fixedly installed at the bottom of the support plate (8055). The threaded sleeve (8053) is symmetrically hinged to a pair of connecting rods (8057) on the left and right sides. The end of the connecting rod (8057) away from the threaded sleeve (8053) is hinged to an L-shaped support rod (8058). The top of the L-shaped support rod (8058) is fixedly connected to a sliding block (8041). The top of the L-shaped support rod (8058) slides left and right to penetrate the partition plate (803). The bottom of the end of the connecting rod (8057) away from the threaded sleeve (8053) is fixedly installed with a spring (8059). 6.根据权利要求5所述的一种柔性基板检测装置，其特征在于，吸附与平整机构(806)包括：丝杠四(8061)，箱体四(801)的顶壁内转动设有沿左右方向的丝杠四(8061)，丝杠四(8061)左端与伺服电机四(8062)输出轴端固定连接，伺服电机四(8062)与箱体四(801)的顶壁固定连接，所述丝杠四(8061)螺纹连接滑台四(8063)，滑台四(8063)底端固定连接C型安装板(8064)，C型安装板(8064)顶部固定安装电机五(8065)，C型安装板(8064)顶部固定安装升降气缸五(8066)，升降气缸五(8066)底部固定连接吸附板二(8067)，吸附板二(8067)底端固定设有若干真空吸嘴二(8068)，所述电机五(8065)的输出轴前端固定连接转动杆(8069)，转动杆(8069)另一端铰连接连杆二(8610)，连杆二(8610)底端铰连接竖杆一(8611)，C型安装板(8064)底部右端固定连接套管(8612)，竖杆一(8611)与套管(8612)的内壁上下滑动连接，竖杆一(8611)底部转动连接沿前后方向的滚动辊(8613)，C型安装板(8064)底部左侧固定安装竖向的距离传感器四(8614)和工业相机二(8615)。6. A flexible substrate detection device according to claim 5, characterized in that the adsorption and leveling mechanism (806) comprises: a lead screw four (8061), a lead screw four (8061) is rotatably provided in the top wall of the box body four (801) along the left and right directions, the left end of the lead screw four (8061) is fixedly connected to the output shaft end of the servo motor four (8062), the servo motor four (8062) is fixedly connected to the top wall of the box body four (801), the lead screw four (8061) is threadedly connected to the slide table four (8063), the bottom end of the slide table four (8063) is fixedly connected to the C-type mounting plate (8064), the top of the C-type mounting plate (8064) is fixedly installed with a motor five (8065), the top of the C-type mounting plate (8064) is fixedly installed with a lifting cylinder five (8066), and the lifting cylinder five (806 6) The bottom is fixedly connected to the adsorption plate 2 (8067), and a plurality of vacuum suction nozzles 2 (8068) are fixedly provided at the bottom end of the adsorption plate 2 (8067). The front end of the output shaft of the motor 5 (8065) is fixedly connected to the rotating rod (8069), and the other end of the rotating rod (8069) is hinged to the connecting rod 2 (8610). The bottom end of the connecting rod 2 (8610) is hinged to the vertical rod 1 (8611). The right end of the bottom of the C-shaped mounting plate (8064) is fixedly connected to the sleeve (8612), and the vertical rod 1 (8611) is slidably connected to the inner wall of the sleeve (8612) up and down. The bottom of the vertical rod 1 (8611) is rotatably connected to the rolling roller (8613) along the front and rear directions. The left side of the bottom of the C-shaped mounting plate (8064) is fixedly installed with a vertical distance sensor 4 (8614) and an industrial camera 2 (8615).
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