CN119092448A - Resin loading mechanism and semiconductor packaging equipment - Google Patents

Resin loading mechanism and semiconductor packaging equipment Download PDF

Info

Publication number
CN119092448A
CN119092448A CN202411401556.1A CN202411401556A CN119092448A CN 119092448 A CN119092448 A CN 119092448A CN 202411401556 A CN202411401556 A CN 202411401556A CN 119092448 A CN119092448 A CN 119092448A
Authority
CN
China
Prior art keywords
base
resin
moving
movable
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202411401556.1A
Other languages
Chinese (zh)
Other versions
CN119092448B (en
Inventor
陆宁宁
饶治鹏
田杰锋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mifan Technology Nantong Co ltd
Original Assignee
Mifan Technology Shanghai Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mifan Technology Shanghai Co ltd filed Critical Mifan Technology Shanghai Co ltd
Priority to CN202411401556.1A priority Critical patent/CN119092448B/en
Publication of CN119092448A publication Critical patent/CN119092448A/en
Application granted granted Critical
Publication of CN119092448B publication Critical patent/CN119092448B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302Mechanical parts of transfer devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402Mechanical parts of transfer devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

本发明属于半导体封装技术领域,提供一种树脂装载机构,包括第三基座,能够做往复直线移动;第四移动层,设有第四移动基板,第四移动层通过第四移动基板相对第三基座活动设置;托盘搬运机构,设置于所述第四移动基板上,托盘搬运机构用于树脂的传输以及空的树脂托盘的回收;托盘搬运机构包括第二主夹机构和第二副夹机构,其中第二主夹机构用于树脂托盘的托取搬运,第二副夹机构用于薄膜的固定。本发明通过设置第二主夹机构和第二副夹机构,将树脂托盘的搬运和薄膜的固定分开设置,在保证树脂托盘能够完全采用自动化上料,还能够使树脂托盘往复回收利用,且通过第二副夹机构控制薄膜与树脂托盘的分离,无需复杂的操作流程,提高封装上料效率。

The present invention belongs to the field of semiconductor packaging technology, and provides a resin loading mechanism, including a third base capable of reciprocating linear movement; a fourth moving layer, provided with a fourth moving substrate, the fourth moving layer is movably arranged relative to the third base through the fourth moving substrate; a tray transport mechanism, arranged on the fourth moving substrate, the tray transport mechanism is used for the transmission of resin and the recovery of empty resin trays; the tray transport mechanism includes a second main clamping mechanism and a second auxiliary clamping mechanism, wherein the second main clamping mechanism is used for the support and transportation of the resin tray, and the second auxiliary clamping mechanism is used for the fixation of the film. The present invention separates the transportation of the resin tray and the fixation of the film by arranging the second main clamping mechanism and the second auxiliary clamping mechanism, while ensuring that the resin tray can be fully automatically loaded, and the resin tray can also be recycled and reused, and the separation of the film and the resin tray is controlled by the second auxiliary clamping mechanism, without the need for complicated operating procedures, thereby improving the efficiency of packaging loading.

Description

Resin loading mechanism and semiconductor packaging equipment
Technical Field
The invention relates to the field of semiconductor chip substrate packaging, in particular to a resin loading mechanism and semiconductor packaging equipment.
Background
With the progress of semiconductor technology over time, more complex semiconductor devices such as integrated circuits, large scale integrated circuits, etc. have evolved. The development of these technologies has greatly advanced the fields of computers, communications, medical treatment, etc., so that our lives are more convenient and efficient.
The compression encapsulation of chip substrate is the essential step, and traditional chip substrate's compression encapsulation equipment needs to carry out the manual work and carries out the resin material loading, and the manual work material loading resin on the one hand lays the precision low, and manual operation danger coefficient increases, and production efficiency is low simultaneously, therefore how to realize the automated transmission of resin is the problem that the field personnel need to solve urgently.
Disclosure of Invention
The invention provides a resin loading mechanism, which solves the problems of safety, precision, low packaging efficiency and automatic resin transmission caused by the need of manual feeding assistance of traditional packaging equipment in the technical background.
In order to solve the technical problems, the invention adopts the following technical scheme:
a resin loading mechanism comprising:
the third base can do reciprocating linear movement;
the fourth moving layer is provided with a fourth moving substrate, and the fourth moving layer is movably arranged relative to the third base through the fourth moving substrate;
And the tray conveying mechanism is arranged on the fourth movable substrate and is used for conveying resin and recovering empty resin trays.
In some embodiments, the device further comprises a third moving layer, a third moving substrate is arranged, the third moving substrate is movably arranged on the third base, the fourth moving layer is movably arranged on the third moving layer, and the moving directions of the fourth moving layer and the third moving layer are consistent and perpendicular to the moving direction of the third base.
In some embodiments, a fourth guide rail is disposed on the third base, a fourth slider is disposed on the fourth guide rail, the third moving substrate is disposed on the fourth slider, and an axial direction of the fourth guide rail is consistent with a moving direction of the fourth moving layer.
In some embodiments, a fifth guide rail is disposed on the third translation substrate, a fifth slider is disposed on the fifth guide rail, and an axial direction of the fifth guide rail is consistent with an axial direction of the fourth guide rail.
In some embodiments, the number of the fourth guide rails is at least two, at least two fourth guide rails are arranged in parallel at intervals, and at least one fourth sliding block is arranged on each fourth guide rail;
The number of the fifth guide rails is at least two, the fifth guide rails are arranged in parallel at intervals, and at least one fifth sliding block is arranged on each fifth guide rail.
In some embodiments, the device further comprises a fourth driving assembly, the fourth driving assembly comprises a fourth driving motor, a fourth driving belt wheel, a fourth driven belt wheel and a fourth synchronous belt, the fourth driving motor is arranged on the third movable base plate, the fourth driving belt wheel is arranged on an output shaft of the fourth driving motor, the fourth driven belt wheel is rotatably arranged on the fourth movable base plate, and the fourth synchronous belt is wound on the fourth driving belt wheel and the fourth driven belt wheel;
The third base is provided with a third connecting block, the fourth moving substrate is provided with a fourth connecting block, the third connecting block is fixedly connected with the fourth synchronous belt, and the fourth connecting block is connected with the fourth synchronous belt.
In some embodiments, in the initial position, the third connection block is proximate to the fourth driven pulley, the fourth connection block is proximate to the fourth driving pulley, and when the third moving layer and the fourth moving layer are fully extended, the third connection block is proximate to the fourth driving pulley, and the fourth connection block is proximate to the fourth driven pulley.
In some embodiments, the tray handling mechanism comprises a second upper base and a second lower base which are mutually connected from top to bottom, wherein the second upper base is connected to the lower side of the second translation substrate, and a second main clamping mechanism and a second auxiliary clamping mechanism are arranged on the second lower base;
the second main clamping mechanism comprises two second main clamping connecting rods which are arranged in parallel, the second main clamping connecting rods are movably arranged on the second lower base, and two ends of each second main clamping connecting rod are provided with second main clamping jaws which can be opened and closed;
the second auxiliary clamping mechanism comprises two auxiliary moving seats which are arranged relative to the second lower base, and a first main clamping block capable of lifting and a second auxiliary clamping block fixedly arranged are arranged on the auxiliary moving seats;
The first main clamping block can move up and down relative to the first auxiliary clamping block, so that the first main clamping block and the first auxiliary clamping block can be opened and closed;
The two auxiliary moving seats can move back to back or opposite to each other, so that the second auxiliary clamping block is driven to open and close.
In some embodiments, the present invention also provides a semiconductor packaging apparatus, including:
the resin loading mechanism as described in the above embodiments;
The second installation platform is provided with at least one third guide rail, a third sliding block is arranged on the third guide rail, and the third base is arranged on the third sliding block;
and the third driving assembly is used for driving the resin loading mechanism to reciprocate linearly along the third guide rail.
In some embodiments, the third driving assembly includes a third driving motor disposed on the third base, a second gear is disposed at an output end of the third driving motor, a second rack is disposed on the second mounting platform, the second rack is disposed in parallel with the third guide rail, and the second gear is meshed with the second rack.
Compared with the prior art, the invention has the beneficial effects that:
Through set up reciprocating motion's resin loading mechanism on second mounting platform, set up tray transport mechanism on resin loading mechanism for the transmission of resin and the secondary recycle of tray need not to carry out artifical material loading, simultaneously, combine second owner on the tray transport mechanism to press from both sides mechanism and second auxiliary clamp mechanism, press from both sides the transport fixed to the tray through the second owner and press from both sides the mechanism, cooperate the second auxiliary clamp mechanism again and carry out the fixed of the film of resin tray below to guarantee the stable transmission of resin, avoid separating between film and the resin tray, lead to the resin to spill.
Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
Drawings
FIG. 1 is a first perspective view of the resin loading mechanism of the present invention;
FIG. 2 is a top view of the resin loading mechanism of the present invention;
FIG. 3 is an exploded view of the resin state machine of the present invention;
FIG. 4 is another schematic view of FIG. 3;
FIG. 5 is an exploded view of the tray handling mechanism of the present invention;
FIG. 6 is a schematic view of another alternative construction of the tray handling mechanism of the present invention;
FIG. 7 is a cross-sectional view of H-H of FIG. 2;
fig. 8 is a schematic view of a resin loading mechanism according to the present invention disposed on a second mounting platform.
Detailed Description
The present application will be described in further detail with reference to the accompanying drawings. In the description of the present embodiment, unless otherwise indicated, the terms "left", "right", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the present application must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
In one embodiment, as shown in fig. 1, the resin loading mechanism 800 includes a third base 801, a third moving layer and a fourth moving layer, wherein the third base 801 is slidably disposed on the second mounting platform 102, the third moving layer can protrude to one side with respect to the third base 801, the fourth moving layer can protrude to one side with respect to the third moving layer and is consistent with the protruding direction of the third moving layer, meanwhile, the moving directions of the third moving layer and the fourth moving layer are perpendicular to the moving direction of the third base 801, and the tray handling mechanism 4034 is disposed on the fourth moving substrate for handling the resin tray.
Further, as shown in fig. 3 and 4, the third moving layer includes a third moving substrate 802, the third moving substrate 802 is slidably disposed on a third base 801, a fourth driving motor 8021 is disposed on the third moving substrate 801, an output shaft of the fourth driving motor 8021 is connected to a fourth driving pulley 8022, a rotating fourth driven pulley 8024 is disposed on the third moving substrate 802, and the third moving substrate 802 and the fourth driving pulley 8024 are connected in a winding manner through a fourth synchronous belt 8025;
Further, the fourth moving layer includes a fourth moving substrate 803, and a tray conveying mechanism 8031 for conveying an empty resin tray 80344 or conveying a resin tray 80344 on which a film and a resin are to be laid is provided on the fourth moving substrate 803. In this embodiment, in order to reduce the driving device, as shown in fig. 7, a fourth connection block 8033 is disposed on the fourth moving substrate 803, the fourth connection block 8033 is fixedly connected with the fourth synchronous belt 8025, in the initial position, the third connection block 8014 is close to the fourth driven pulley 8024, the fourth connection block 8033 is close to the fourth driving pulley 8022, and when the fourth driving motor 8021 rotates, the third moving layer and the fourth moving layer are driven to move relative to the third connection block 8014 on the third base 801, and meanwhile, the fourth connection block 8033 is fixedly connected with the fourth synchronous belt 8025, and the fourth movement substrate 803 and the third moving substrate 802 synchronously move due to the fixed connection of the fourth connection block 8033.
Alternatively, the fourth moving substrate 803 may be driven by a separate driving device, such as a motor lead screw slider structure, a motor combined with a synchronous wheel synchronous belt structure, or a cylinder structure with a push rod.
In one embodiment, as shown in fig. 5, the tray handling mechanism includes a second upper base 40341 and a second lower base 40342 that are fixedly connected from top to bottom, a preset distance is provided between the second upper base 40341 and the second lower base 40342, the second upper base 40341 is fixedly connected to the second moving substrate 403, and the second tray clamping assembly 4034 further includes a second main clamping mechanism and a second sub clamping mechanism, which are specifically as follows;
Referring to fig. 5 again, the second main clamping mechanism includes four second main clamping jaws 403424, two second main clamping connecting rods 403423 arranged in parallel with each other, two main clamping cylinders 403433 with two open and close free ends, the two free ends can move back to back or move opposite to each other to open and close the second main clamping jaws 303424, two main clamping push rods 403422, wherein the four second main clamping jaws 403424 are divided into two groups, each group is fixedly arranged at two ends of the second main clamping connecting rods 403423, the second main clamping jaws 403424 are matched with clamping grooves 403441 on a resin tray 40344, the main clamping cylinders 403433 are fixed on a second lower base 40342, the two main clamping push rods 403422 are respectively fixed at two open and close free ends of the main clamping cylinders 403433, and the two free ends of the main clamping cylinders 403433 move opposite to each other to drive the four second main clamping jaws 403424 to open and close so as to grasp or put down the resin tray 40344, and in this embodiment, the second main clamping jaw 403424 is a hook type structure.
Further, four second main guide rails 403426 are disposed on the second lower base 40342, four corresponding second main sliders 403425 are disposed on the four second main guide rails 403426, the axial direction of the second main guide rails 403426 is consistent with the opening and closing direction of the free ends of the main clamping cylinder 403433, and the four second main sliders 403425 are respectively and fixedly disposed at two ends of the corresponding two main clamping connecting rods 403423, so as to support the second main clamping connecting rods 403423.
Optionally, as shown in fig. 6, the second main clamping jaw 403424 may be further configured to be in a rotating structure, the two parallel second main clamping links 403434 are rotatably disposed on the second lower base 40342, specifically, four rotating brackets 403435 are disposed on the second lower base 40342, the second main clamping link 403434 is rotatably disposed on the four rotating brackets 403425 through bearings, a second main clamping rocker 403436 is disposed between two free ends of the main clamping cylinder 403433 and two corresponding second main clamping links 403434, one end of the second main clamping rocker 403436 is fixedly connected with the second main clamping link 40344, the other end of the second main clamping rocker 403436 is movably connected with one free end of the main clamping cylinder 403433, for example, a first connecting rod with a first connecting slot with a long strip structure is movably connected with one free end of the main clamping cylinder 403433, one end of the first connecting rod with the first connecting slot is disposed on a side far away from the second lower base 40342, so that the first connecting slot moves vertically, and the first connecting rod can move vertically to avoid interference with the first connecting slot to form a first connecting slot 962, so that the first clamping jaw can be opened and closed or closed by the first connecting slot is configured to avoid interference with the first connecting slot to move in the first connecting slot. For example, when the two free ends of the main clamp cylinder 403433 are opened and separated, the second main clamp jaw 403424 is not engaged with the resin tray 40344, and when the two free ends of the main clamp cylinder 403433 are closed and close, the second main clamp jaw 403424 is in mating abutment with the clamp groove 403441 of the resin tray.
As shown in fig. 5, the second sub-clamping mechanism includes a sub-clamping cylinder 403421, a sub-clamping cylinder 403421 is provided with two free ends capable of moving toward or away from each other, a sub-moving seat 403428 provided at the free end of the sub-clamping cylinder 403421, a first sub-clamping block 403431 provided on the sub-moving seat 403428, the first sub-clamping block 403431 capable of clamping and coating one side edge of the resin tray 40344, a first lifting/lowering block 403430 provided on the sub-moving seat 403428, specifically, a second lifting/lowering cylinder 403429 provided on the sub-moving seat 403428, the second lifting/lowering cylinder 403429 connecting the free end of the cylinder 403429 with the first main clamping block 403430, closing and opening the first sub-clamping block 403431 by lifting/lowering the first main clamping block 403430, clamping and fixing the film, and combining the sub-clamping cylinder 403421 to bring the sub-moving seat 403428 close to each other, thereby fixing the edge of the film carrying the resin with respect to the resin tray 40344. In this embodiment, the two sets of the auxiliary moving seat 403428, the first auxiliary clamping block 40341 and the first main clamping block 40340 and the second lifting cylinder 403429 are symmetrically arranged with respect to the second upper base 40341, so as to clamp and fix the film at the edge of the resin tray 40344, and keep the resin tray 40344 and the film moving synchronously.
Further, a second sub rail 403411 is provided on the second upper base 40341, a second sub slider 403432 is provided on the second sub rail 403411, and the second sub slider 403432 is connected to the sub moving seat 403428, so as to provide support for the sub moving seat 403428, and an axial direction of the second sub rail 403411 is consistent with an opening and closing moving direction of the free end of the sub chuck cylinder 403421.
In this embodiment, as shown in fig. 5, the first secondary clamping block 403431 and the first primary clamping block 403430 are located on opposite sides of the resin tray 40344 and the second primary clamping jaw 403424 is located on the other two opposite sides of the resin tray 40344.
In one embodiment, as shown in fig. 8, the present invention further provides a semiconductor package apparatus, which mainly includes the resin loading mechanism in each of the above embodiments, the second mounting platform 102 having at least one third rail 1025 thereon, the third rail 1025 having a third slider 8013 thereon, the third base 801 being fixedly disposed on the third slider 8013, and a third driving assembly for driving the resin loading mechanism 800 to reciprocate linearly along the third rail 8013. Specifically, in the embodiment, the third driving assembly includes a third driving motor 8011 disposed on a third base 801, an output end of the third driving motor 8011 is provided with a second gear 8012, a second straight rack 1026 is disposed on the second mounting platform 102, the second straight rack 1026 is parallel to the third guide rail 1025, and the second gear 8012 and the second straight rack 1026 are in meshed transmission.
Alternatively, the transmission manner of the second gear 8012 and the second straight rack 1026 may be replaced by a screw slider structure, or a transmission structure of a synchronous belt synchronous wheel is adopted, where the third driving motor 8011 needs to be disposed on the second mounting platform.
Optionally, the third driving assembly may be replaced by a straight push rod cylinder, and the third base is fixedly connected with the free end of the straight push rod cylinder.
The foregoing is merely a preferred embodiment of the invention, and it should be noted that modifications and enhancements can be made by those skilled in the art without departing from the principles of the present invention. Such modifications and variations are also considered to be a departure from the scope of the invention.

Claims (9)

1.一种树脂装载机构,其特征在于,包括:1. A resin loading mechanism, comprising: 第三基座,能够做往复直线移动;The third base is capable of reciprocating linear movement; 第四移动层,设有第四移动基板,所述第四移动层通过所述第四移动基板相对所述第三基座活动设置;A fourth moving layer is provided with a fourth moving substrate, and the fourth moving layer is movably arranged relative to the third base via the fourth moving substrate; 托盘搬运机构,设置于所述第四移动基板上,所述托盘搬运机构用于树脂的传输以及空的树脂托盘的回收;A tray transport mechanism, disposed on the fourth movable base plate, the tray transport mechanism being used for transporting resin and recovering empty resin trays; 所述托盘搬运机构包括由上至下相互连接的第二上基座和第二下基座,所述第二上基座连接于所述第二平移基板下侧,所述第二下基座上设有第二主夹机构和第二副夹机构;The pallet transport mechanism comprises a second upper base and a second lower base connected to each other from top to bottom, the second upper base is connected to the lower side of the second translation base plate, and the second lower base is provided with a second main clamping mechanism and a second auxiliary clamping mechanism; 所述第二主夹机构包括两个相互平行设置的第二主夹连杆,所述第二主夹连杆活动设置于所述第二下基座上,所述第二主夹连杆的两端设置可开合的第二主夹爪;The second main clamping mechanism comprises two second main clamping connecting rods arranged in parallel with each other, the second main clamping connecting rods are movably arranged on the second lower base, and second main clamping claws that can be opened and closed are arranged at both ends of the second main clamping connecting rods; 所述第二副夹机构包括两个相对所述第二下基座设置的副移动座,所述副移动座上设有能够升降的第一主夹块以及固定设置的第二副夹块;The second secondary clamping mechanism comprises two secondary movable seats arranged relative to the second lower base, and the secondary movable seats are provided with a first main clamping block capable of being raised and lowered and a second secondary clamping block arranged in a fixed manner; 所述第一主夹块能够相对所述第一副夹块进行升降移动,从而实现第一主夹块和第一副夹块之间的开合;The first main clamping block can be lifted and lowered relative to the first auxiliary clamping block, thereby realizing the opening and closing of the first main clamping block and the first auxiliary clamping block; 两个所述副移动座能够相背或相向移动,从而带动位于所述第二副夹块进行开合。The two auxiliary movable seats can move away from or towards each other, thereby driving the second auxiliary clamping block to open and close. 2.根据权利要求1所述的一种树脂装载机构,其特征在于,还包括第三移动层,设有第三移动基板,所述第三移动基板活动设置于所述第三基座上,所述第四移动层活动设置于所述第三移动层上,所述第四移动层和所述第三移动层的移动方向一致且与所述第三基座移动方向垂直。2. A resin loading mechanism according to claim 1, characterized in that it also includes a third movable layer, which is provided with a third movable substrate, the third movable substrate is movably arranged on the third base, the fourth movable layer is movably arranged on the third movable layer, and the moving directions of the fourth movable layer and the third movable layer are consistent and perpendicular to the moving direction of the third base. 3.根据权利要求2所述的一种树脂装载机构,其特征在于,所述第三基座上设有第四导轨,所述第四导轨上设有第四滑块,所述第三移动基板设置于所述第四滑块上,所述第四导轨的轴线方向与所述第四移动层的移动方向一致。3. A resin loading mechanism according to claim 2, characterized in that a fourth guide rail is provided on the third base, a fourth slider is provided on the fourth guide rail, the third movable substrate is arranged on the fourth slider, and the axial direction of the fourth guide rail is consistent with the moving direction of the fourth movable layer. 4.根据权利要求3所述的一种树脂装载机构,其特征在于,所述第三平移基板上设置第五导轨,所述第五导轨上设有第五滑块,所述第五导轨的轴线方向与所述第四导轨的轴线方向一致。4. A resin loading mechanism according to claim 3, characterized in that a fifth guide rail is provided on the third translation substrate, a fifth slider is provided on the fifth guide rail, and an axial direction of the fifth guide rail is consistent with an axial direction of the fourth guide rail. 5.根据权利要求4所述的一种树脂装载机构,其特征在于,所述第四导轨至少为两条,至少两条所述第四导轨平行间隔设置,每一条所述第四导轨上至少设有一个第四滑块;5. A resin loading mechanism according to claim 4, characterized in that there are at least two fourth guide rails, at least two of which are arranged in parallel and spaced apart, and each of the fourth guide rails is provided with at least one fourth slider; 所述第五导轨至少为两条,至少两条所述第五导轨平行间隔设置,每一条所述第五导轨上至少设有一个第五滑块。There are at least two fifth guide rails, and at least two of the fifth guide rails are arranged in parallel and spaced apart, and each of the fifth guide rails is provided with at least one fifth sliding block. 6.根据权利要求4所述的一种树脂装载机构,其特征在于,还包括第四驱动组件,所述第四驱动组件包括第四驱动电机、第四主动带轮、第四从动带轮以及第四同步带,第四驱动电机设置于第三移动基板上,第四主动带轮设置于所述第四驱动电机的输出轴上,第四从动带轮转动设置于所述第四移动基板上,所述第四同步带绕设于所述第四主动带轮和第四从动带轮上;6. A resin loading mechanism according to claim 4, characterized in that it also includes a fourth driving assembly, the fourth driving assembly includes a fourth driving motor, a fourth driving pulley, a fourth driven pulley and a fourth synchronous belt, the fourth driving motor is arranged on the third movable base plate, the fourth driving pulley is arranged on the output shaft of the fourth driving motor, the fourth driven pulley is rotatably arranged on the fourth movable base plate, and the fourth synchronous belt is wound around the fourth driving pulley and the fourth driven pulley; 其中,在第三底座上设置第三连接块,在第四移动基板上设置第四连接块,所述第三连接块与所述第四同步带固定连接,所述第四连接块与所述四同步带连接。Among them, a third connecting block is arranged on the third base, and a fourth connecting block is arranged on the fourth movable base plate. The third connecting block is fixedly connected to the fourth synchronous belt, and the fourth connecting block is connected to the fourth synchronous belt. 7.根据权利要求6所述的一种树脂装载机构,其特征在于,初始位置时,所述第三连接块靠近所述第四从动带轮,所述第四连接块靠近所述第四主动带轮,当所述第三移动层和所述第四移动层完全伸展时,所述第三连接块靠近所述第四主动带轮,所述第四连接块靠近所述第四从动带轮。7. A resin loading mechanism according to claim 6, characterized in that, in the initial position, the third connecting block is close to the fourth driven pulley, and the fourth connecting block is close to the fourth driving pulley; when the third moving layer and the fourth moving layer are fully extended, the third connecting block is close to the fourth driving pulley, and the fourth connecting block is close to the fourth driven pulley. 8.半导体封装设备,其特征在于,包括:8. A semiconductor packaging device, comprising: 如权利要求1-7中任一项所述的树脂装载机构;The resin loading mechanism according to any one of claims 1 to 7; 第二安装平台,其上设有至少一条第三导轨,所述第三导轨上设有第三滑块,所述第三基座设置于所述第三滑块上;A second mounting platform, on which at least one third guide rail is provided, on which a third slider is provided, and on which the third base is provided; 第三驱动组件,用于带动所述树脂装载机构沿所述第三导轨进行往复直线移动。The third driving assembly is used to drive the resin loading mechanism to move back and forth linearly along the third guide rail. 9.根据权利要求8所述的一种半导体封装设备,其特征在于,所述第三驱动组件包括设置于所述第三基座上的第三驱动电机,所述第三驱动电机的输出端设有第二齿轮,所述第二安装平台上设有第二直齿条,所述第二直齿条相对于所述第三导轨平行设置,所述第二齿轮与所述第二直齿条啮合。9. A semiconductor packaging device according to claim 8, characterized in that the third driving component includes a third driving motor arranged on the third base, the output end of the third driving motor is provided with a second gear, the second mounting platform is provided with a second spur rack, the second spur rack is arranged parallel to the third guide rail, and the second gear is meshed with the second spur rack.
CN202411401556.1A 2024-10-09 2024-10-09 Resin loading mechanism and semiconductor packaging equipment Active CN119092448B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202411401556.1A CN119092448B (en) 2024-10-09 2024-10-09 Resin loading mechanism and semiconductor packaging equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202411401556.1A CN119092448B (en) 2024-10-09 2024-10-09 Resin loading mechanism and semiconductor packaging equipment

Publications (2)

Publication Number Publication Date
CN119092448A true CN119092448A (en) 2024-12-06
CN119092448B CN119092448B (en) 2025-06-27

Family

ID=93662373

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202411401556.1A Active CN119092448B (en) 2024-10-09 2024-10-09 Resin loading mechanism and semiconductor packaging equipment

Country Status (1)

Country Link
CN (1) CN119092448B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014148857A1 (en) * 2013-03-22 2014-09-25 (주)에스티아이 Device and method for transferring substrate and substrate-transferring tray
WO2022116514A1 (en) * 2020-12-04 2022-06-09 苏州天准科技股份有限公司 Intelligent silicon wafer sorting machine
CN116978841A (en) * 2023-07-05 2023-10-31 深圳市捷佳伟创新能源装备股份有限公司 Vehicle handling device and carrier handling method
CN118125051A (en) * 2024-03-07 2024-06-04 铜陵富仕三佳机器有限公司 A resin double-row feeding device and process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014148857A1 (en) * 2013-03-22 2014-09-25 (주)에스티아이 Device and method for transferring substrate and substrate-transferring tray
WO2022116514A1 (en) * 2020-12-04 2022-06-09 苏州天准科技股份有限公司 Intelligent silicon wafer sorting machine
CN116978841A (en) * 2023-07-05 2023-10-31 深圳市捷佳伟创新能源装备股份有限公司 Vehicle handling device and carrier handling method
CN118125051A (en) * 2024-03-07 2024-06-04 铜陵富仕三佳机器有限公司 A resin double-row feeding device and process

Also Published As

Publication number Publication date
CN119092448B (en) 2025-06-27

Similar Documents

Publication Publication Date Title
TWI255252B (en) Substrate accommodating tray pallet and substrate transfer system
CN207174883U (en) A kind of flow channel type is layered upper trigger
CN107293803B (en) Material stacking production line
CN111842035A (en) A kind of multi-channel lamination assembly equipment for mobile phone camera module
CN111564526A (en) Solder strip laying device, stacking equipment and stacking method
CN111867800B (en) Resin casting device
CN107039324B (en) A fully automatic tubular PECVD loading and unloading machine and method
CN118597818A (en) An electronic paper material taking system with integrated loading and unloading
CN119092448B (en) Resin loading mechanism and semiconductor packaging equipment
CN223273237U (en) Resin loading mechanism and semiconductor packaging equipment
CN220786306U (en) Film pulling device
CN110040523A (en) Device is moved away from a kind of layering of overlapping runner plate
CN223273235U (en) Layered chip substrate, resin conveying structure and semiconductor packaging equipment
CN119381313B (en) Chip substrate loading mechanism and semiconductor packaging equipment
CN223273236U (en) Novel chip substrate loading mechanism and semiconductor packaging equipment
CN219216789U (en) Marshalling equipment and palletizing system
CN117817072A (en) Inductance tin dipping transfer steering swinging plate workstation
CN223273234U (en) A fully automatic loading and unloading mechanism for semiconductor chip substrates
TWI800830B (en) Method for controlling stacking device to automatically adjust stacking height
CN222785877U (en) Automatic feeding and discharging device for tray of motor magnet assembly production line
CN109094883B (en) Box pushing machine
CN222260996U (en) Lifting and transferring device for high-density integrated circuit lead frame electroplating production line
CN220664170U (en) Material conveying equipment
CN222497593U (en) Magnetic core material loading and transfer device
CN223665427U (en) Feeding mechanism of high-density integrated circuit lead frame

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right

Effective date of registration: 20250609

Address after: 226007 Jiangsu Province, Chongchuan District, Nantong City, No. 688 Xingfu Road, Building 4, 1st and 2nd floors

Applicant after: Mifan Technology (Nantong) Co.,Ltd.

Country or region after: China

Address before: Building 3, No. 1239 Chunli Road, Jinshan District, Shanghai, June 2015

Applicant before: Mifan Technology (Shanghai) Co.,Ltd.

Country or region before: China

TA01 Transfer of patent application right
GR01 Patent grant
GR01 Patent grant