CN1189923C - Structure of grid medium with high dielectric and its preparation method - Google Patents
Structure of grid medium with high dielectric and its preparation method Download PDFInfo
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- CN1189923C CN1189923C CN 02137198 CN02137198A CN1189923C CN 1189923 C CN1189923 C CN 1189923C CN 02137198 CN02137198 CN 02137198 CN 02137198 A CN02137198 A CN 02137198A CN 1189923 C CN1189923 C CN 1189923C
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CN 02137198 CN1189923C (en) | 2002-09-27 | 2002-09-27 | Structure of grid medium with high dielectric and its preparation method |
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CN 02137198 CN1189923C (en) | 2002-09-27 | 2002-09-27 | Structure of grid medium with high dielectric and its preparation method |
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CN1416156A CN1416156A (en) | 2003-05-07 |
CN1189923C true CN1189923C (en) | 2005-02-16 |
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CN 02137198 Expired - Fee Related CN1189923C (en) | 2002-09-27 | 2002-09-27 | Structure of grid medium with high dielectric and its preparation method |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100376017C (en) * | 2003-05-15 | 2008-03-19 | 上海集成电路研发中心有限公司 | High dielectric grid medium and preparation process thereof |
US7037849B2 (en) * | 2003-06-27 | 2006-05-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Process for patterning high-k dielectric material |
JP2005085822A (en) * | 2003-09-04 | 2005-03-31 | Toshiba Corp | Semiconductor device |
US7332439B2 (en) | 2004-09-29 | 2008-02-19 | Intel Corporation | Metal gate transistors with epitaxial source and drain regions |
CN101752237B (en) * | 2008-12-16 | 2012-08-08 | 国际商业机器公司 | Formation of high-K gate stacks in semiconductor devices |
JP5359642B2 (en) * | 2009-07-22 | 2013-12-04 | 東京エレクトロン株式会社 | Deposition method |
CN102194685B (en) * | 2011-04-08 | 2012-07-25 | 南京大学 | Method for regulating energy band compensation between Ge substrate and TixAlyO film |
CN103400890A (en) * | 2013-07-08 | 2013-11-20 | 浙江晶科能源有限公司 | Reworking technology for striping re-plating of crystal silicon solar cell PECVD (plasma enhanced chemical vapor deposition) chromatic aberration slice |
CN107331607B (en) * | 2017-06-27 | 2020-06-26 | 中国科学院微电子研究所 | Gallium oxide substrate field effect transistor and preparation method thereof |
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Owner name: SHANGHAI HUAHONG (GROUP) CO., LTD.; SHANGHAI IC R Free format text: FORMER OWNER: SHANGHAI HUAHONG (GROUP) CO., LTD. Effective date: 20060922 |
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Effective date of registration: 20060922 Address after: 201203 No. 177 blue wave road, Zhangjiang hi tech park, Shanghai, Pudong New Area Co-patentee after: Shanghai integrated circuit research and Development Center Co., Ltd. Patentee after: Shanghai Huahong (Group) Co., Ltd. Address before: 18, Huaihai Road, Shanghai, No. 200020, building 918 Patentee before: Shanghai Huahong (Group) Co., Ltd. |
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