CN118951300B - Adaptive focusing device and method for laser processing and processing system and method - Google Patents
Adaptive focusing device and method for laser processing and processing system and method Download PDFInfo
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- 230000003044 adaptive effect Effects 0.000 title claims abstract description 27
- 238000001514 detection method Methods 0.000 claims abstract description 113
- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 239000006185 dispersion Substances 0.000 claims abstract description 20
- 230000008569 process Effects 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 238000003754 machining Methods 0.000 claims description 6
- 238000003466 welding Methods 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 description 8
- 238000003672 processing method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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Abstract
本发明公开了一种激光加工的自适应调焦装置与方法以及加工系统和方法，属于激光焊接技术领域。该激光加工的自适应调焦装置包括对应激光加工组件设置的检测组件和调节组件，检测组件通过第二光路使得由检测光模块发出的检测光可在通过色散镜处理后分成波长不同的单色检测光并在经过分光模块后与加工光束同轴射入振镜模块，进而同轴射向加工工位，通过第三光路使得经由加工工位反射回的特定波长的单色检测光可传输至光电传感器并生成相应的电信号，最后调节组件根据该电信号控制调焦模块完成激光加工组件的自适应调焦。本发明激光加工的自适应调焦装置可以精确获取加工工位的位置数据，完成激光加工组件的自适应调焦，使加工光束达到最佳工作状态。
The present invention discloses an adaptive focusing device and method for laser processing, as well as a processing system and method, and belongs to the field of laser welding technology. The adaptive focusing device for laser processing includes a detection component and an adjustment component arranged corresponding to the laser processing component. The detection component uses a second optical path so that the detection light emitted by the detection light module can be divided into monochromatic detection lights with different wavelengths after being processed by a dispersion mirror, and after passing through the spectroscopic module, it is coaxially emitted into the galvanometer module with the processing light beam, and then coaxially emitted to the processing station. Through the third optical path, the monochromatic detection light of a specific wavelength reflected back from the processing station can be transmitted to the photoelectric sensor and generate a corresponding electrical signal. Finally, the adjustment component controls the focusing module according to the electrical signal to complete the adaptive focusing of the laser processing component. The adaptive focusing device for laser processing of the present invention can accurately obtain the position data of the processing station, complete the adaptive focusing of the laser processing component, and make the processing light beam reach the best working state.
Description
Technical Field
The invention belongs to the technical field of laser welding, and particularly relates to a self-adaptive focusing device and method for laser processing, and a processing system and method.
Background
Along with the development of automatic manufacturing, the laser equipment gradually replaces the traditional equipment to carry out production operation, and has the characteristics of high operation precision, high speed, high power and the like, so that the production efficiency is greatly improved.
When the laser equipment works, the focal point needs to be quickly adjusted in a short time due to the characteristics of short welding working time, high complexity of welding parts and the like. Therefore, whether the laser equipment can carry out self-adaptive focusing on different workpieces in the working process is important, meanwhile, the power of the laser equipment can be greatly influenced by the precision of the self-adaptive focusing of the laser equipment, the processing quality of the workpieces is influenced, and the mass production and manufacturing are greatly influenced. Traditional focusing mode mainly relies on operating personnel to carry out unified focusing or set up single procedure and focus to laser equipment according to batch machined part, and manual focusing process is loaded down with trivial details, inefficiency, and single procedure focusing can not adapt to various machined parts fast and has higher requirement to the location of machined part.
Chinese patent 202310976258.4 discloses a self-adaptation focusing cutting head for laser cutting machine, including base, last guard glass, collimating mirror, focusing mirror, guard glass, lower guard glass, laser head fixed mounting is in the bottom of base, the ring channel has been seted up respectively to the top surface and the bottom surface of base inner wall, and the both ends of a vertical tube are located corresponding ring channel respectively, fixed mounting has the lens cone in the vertical tube, fixed mounting has the focusing mirror in the lens cone, the vertical tube passes through displacement module and is connected with the base, be equipped with the cooling device who is used for the focusing mirror cooling between vertical tube and the lens cone. The device can realize the automatic adjustment of the position of the focusing lens through the displacement module when in use, thereby replacing manual adjustment, having high adjustment precision and high adjustment speed and greatly improving the working efficiency of a user. The device only uses one laser displacement sensor and one target, is arranged on one side of the inner wall of the base and is in paraxial arrangement with a laser light path, mechanical coaxiality errors exist, single sensors are poor in precision and close to the laser light path and are easy to damage or interfere at high temperature, the upper and lower adjusting ranges are limited by the detecting ranges of the sensors, the device cannot acquire the change of a focus in the processing process in real time, and the device cannot feed back the position of the focus in real time and adjust the focus in the working process of laser equipment, so that a self-adaptive closed-loop system is formed.
Most of laser devices in the market at present use a laser displacement sensor or a laser proofing comparison mode to judge the focus position, wherein the mode of using the laser displacement sensor needs to keep the sensor consistent or coaxial with an optical path in the laser device, the trend of the optical path in the laser device is limited, the sensor is easily interfered or damaged by excessive laser energy, the mode of using the laser proofing comparison cannot feed back the real-time focus position in the working process of the laser device, the focus offset in each working process of the laser device is irregular, proofing comparison adjustment needs to be carried out before the laser device is operated, the process is very complicated, and the efficiency is low.
Disclosure of Invention
In view of one or more of the above-mentioned drawbacks or improvements in the prior art, the present invention provides an adaptive focusing apparatus and method for laser processing, and a processing system and method, which can accurately obtain position data of a processing station, complete adaptive focusing of a laser processing assembly, and enable a processing beam to reach an optimal working state.
In order to achieve the above purpose, the invention provides an adaptive focusing device for laser processing, which is arranged corresponding to a laser processing assembly, wherein the laser processing assembly comprises a laser, a focusing module, a beam splitting module and a galvanometer module which are sequentially arranged along a first light path, and a processing light beam emitted by the laser is transmitted along the first light path and is emitted to a processing station through the galvanometer module;
The self-adaptive focusing device comprises a detection component and an adjustment component;
The detection assembly comprises a detection optical module, a coupler, a dispersion mirror and a photoelectric sensor, wherein the detection optical module, the coupler and the dispersion mirror are sequentially arranged, and the photoelectric sensor is arranged corresponding to the coupler;
The detection light module, the coupler, the dispersion mirror, the light splitting module and the galvanometer module are sequentially arranged on a second light path, so that the detection light emitted by the detection light module can be split into monochromatic detection light with different wavelengths after being processed by the dispersion mirror and is coaxially injected into the galvanometer module with the processing light beam after passing through the light splitting module;
the vibrating mirror module, the light splitting module, the dispersing mirror, the coupler and the photoelectric sensor are sequentially arranged on a third light path, so that monochromatic detection light with specific wavelength after being reflected by the processing station can be transmitted to the photoelectric sensor along the third light path, and the photoelectric sensor generates corresponding electric signals according to the specific wavelength;
The adjusting component comprises a numerical control unit which is respectively connected with the photoelectric sensor and the focusing module in a signal way, and the numerical control unit is used for receiving the electric signal of the photoelectric sensor and controlling the focusing module to finish the self-adaptive focusing of the laser processing component.
As a further improvement of the present invention, the detection light is white light;
And/or the number of the groups of groups,
The detection light emitted by the detection light module is formed by combining light emitted by a plurality of light sources.
As a further improvement of the present invention, the detection light is light of a specific wavelength band, or a filter mirror is disposed at any position between the detection light module and the light splitting module along the second light path, for transmitting light of a specific wavelength band in the detection light.
As a further improvement of the present invention, a magnifying glass is provided at any position between the detection light module and the light splitting module along the second light path for increasing the light intensity of each single-color detection light to increase the farthest distance detectable by each single-color detection light.
In another aspect of the present invention, there is also provided an adaptive focusing method for laser processing, based on the adaptive focusing device for laser processing, the adaptive focusing method including:
s1, placing a workpiece to be processed on the processing station;
s2, controlling the detection assembly to detect the position of the workpiece to be processed;
And S3, controlling the focusing module to finish self-adaptive focusing of the laser processing assembly by the adjusting assembly according to the detection result.
The invention also provides a processing system for laser processing, which comprises the self-adaptive focusing device for laser processing and a laser processing assembly, wherein the laser processing assembly comprises a laser, a focusing module, a beam splitting module and a galvanometer module which are sequentially arranged along a first optical path, and processing light beams emitted by the laser are transmitted along the first optical path and are emitted to a processing station through the galvanometer module;
The processing platform is arranged corresponding to the galvanometer module and/or the station to be processed, the processing platform comprises a displacement module, and the displacement module can drive the galvanometer module and/or the station to be processed to move so that the relative position between the galvanometer module and the station to be processed is changed.
As a further improvement of the invention, the laser and the focusing module are arranged above the beam splitting module along the vertical direction, and the processing station is arranged below the galvanometer module.
In another aspect, the present invention further provides a laser processing method, which is implemented by using the processing system for laser processing, and is characterized by comprising the following steps:
(1) Focusing the laser processing assembly on the workpiece to be processed by using S1-S3 in the self-adaptive focusing method of laser processing;
(2) And controlling the laser processing assembly to process the workpiece to be processed, and simultaneously performing steps S2-S3 in the self-adaptive focusing method for laser processing.
As a further improvement of the present invention, the method of laser processing further includes the following process:
(3) And (2) driving the vibrating mirror module and/or the station to be processed to move by the displacement module, changing the processing part of the workpiece to be processed, and simultaneously performing the step (2) until all the processing parts of the workpiece to be processed are completely processed.
As a further improvement of the present invention, the method of laser processing further includes the following process:
(4) The laser processing assembly stops emitting processing light beams, the displacement module drives the galvanometer module and/or the station to be processed to move again along the processing track, the detection assembly detects all processing parts of the processed workpiece, and the position values of all processing parts are recorded to the numerical control unit;
(5) The numerical control unit compares and analyzes each position value with real-time position data acquired in the processing process to obtain an error value of each processing part;
(6) And judging whether the error value of each processing part exceeds an error threshold value, and if so, correcting the processing process of the next workpiece by the numerical control unit.
The above-mentioned improved technical features can be combined with each other as long as they do not collide with each other.
In general, the above technical solutions conceived by the present invention have the beneficial effects compared with the prior art including:
(1) The invention discloses a self-adaptive focusing device for laser processing, which is characterized in that a detection light module, a coupler, a dispersion mirror, a light splitting module and a galvanometer module are sequentially arranged along a second light path, so that detection light emitted by the detection light module can be divided into monochromatic detection light with different wavelengths after being processed by the dispersion mirror, and the monochromatic detection light and processing light beam coaxially enter the galvanometer module after passing through the light splitting module, and then coaxially irradiate to a processing station, the monochromatic detection light with specific wavelengths after being reflected by the processing station can be transmitted to a photoelectric sensor along a third light path through the galvanometer module, the dispersion mirror, the coupler and the photoelectric sensor, corresponding electric signals are generated by the photoelectric sensor according to the specific wavelengths, and finally, the electric signals of the photoelectric sensor are received by a numerical control unit in an adjusting assembly and the focusing module are controlled to complete the self-adaptive focusing of the laser processing assembly. According to the self-adaptive focusing device for laser processing, provided by the invention, the detection light is arranged to be coaxially irradiated to the processing station with the processing light beam, so that the position data of the processing station can be accurately obtained, the focus position of the focusing module can be controlled to be more accurately adjusted through the position data, the self-adaptive focusing of the laser processing assembly is completed, and the processing light beam reaches the optimal working state.
(2) According to the self-adaptive focusing device for laser processing, the detection light is set to be white light or light with a special wave band, and the filter mirror or the multiplying mirror is arranged at any position between the detection light module and the light splitting module along the second light path, so that the self-adaptive focusing device is suitable for detection focusing of different processing workpieces and different processing distances, and the adaptability of the self-adaptive focusing device for laser processing is improved.
(3) According to the self-adaptive focusing method for laser processing, the focusing of the laser processing assembly on the workpiece to be processed is completed through the self-adaptive focusing device for laser processing, and the focal position of the laser processing assembly can be adjusted to be consistent with the real-time position of the workpiece to be processed.
(4) The processing system for laser processing comprises the self-adaptive focusing device for laser processing and the laser processing component, wherein the processing platform is arranged, and the displacement module is correspondingly arranged, so that the relative position between the vibrating mirror module and the processing station can be changed, the position of the processing light beam on the processing station is changed, and the processing light beam can be used for processing different processing parts of a workpiece to be processed, so that the processing system is suitable for various complex processing workpieces.
(5) The laser processing method is realized by utilizing the processing system for laser processing, firstly, the self-adaptive focusing method for laser processing is used for focusing, then the laser processing assembly is controlled to process the workpiece to be processed, and the detection light and the processing light beam are still coaxial in real time in the processing process to detect the processing part and focus in real time, so that the real-time property and the accuracy of focus adjustment in the complex workpiece processing process are greatly improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of the overall structure of a laser processing system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a dispersive mirror splitting detection light in an embodiment of the present invention;
FIG. 3 is a schematic diagram of a coupler optical path channel in an embodiment of the invention;
FIG. 4 is a flow chart of an adaptive focusing method for laser processing in an embodiment of the invention;
fig. 5 is a flow chart of a laser processing method in an embodiment of the invention.
Like reference numerals denote like technical features throughout the drawings, in particular:
1. An adaptive focusing device; 11, a detection assembly, 111, a detection light module, 112, a coupler, 1121, a second light path, 1122, a third light path, 113, a dispersion mirror, 114, a photoelectric sensor, 12, an adjustment assembly, 121, a numerical control unit, 2, a laser processing assembly, 201, a laser, 202, a focusing module, 203, a light splitting module, 204, a galvanometer module, 3, a processing station, 4, detection light, 401, first monochromatic detection light, 402, second monochromatic detection light, 403 and third monochromatic detection light.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, directly connected, indirectly connected through an intervening medium, or in communication between two elements or in an interaction relationship between two elements, unless otherwise explicitly specified. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Examples:
Referring to fig. 1, an adaptive focusing apparatus 1 for laser processing in a preferred embodiment of the present invention is disposed corresponding to a laser processing assembly 2, and the laser processing assembly 2 for laser processing includes a laser 201, a focusing module 202, a beam splitting module 203, and a galvanometer module 204 sequentially disposed along a first optical path, and a processing beam emitted by the laser 201 is transmitted along the first optical path and is directed to a processing station 3 via the galvanometer module 204. The adaptive focusing apparatus 1 includes the adaptive focusing apparatus 1 including a detection assembly 11 and an adjustment assembly 12.
Specifically, the detection assembly 11 includes a detection optical module 111, a coupler 112 and a dispersion mirror 113, which are sequentially arranged, and a photoelectric sensor 114 corresponding to the coupler 112, the coupler 112 includes a first interface connected with the detection optical module 111 and a second interface connected with the photoelectric sensor 114, the detection optical module 111, the coupler 112, the dispersion mirror 113, the light splitting module 203 and the vibration mirror module 204 are sequentially arranged on a second optical path, so that the detection light emitted by the detection optical module 111 can be divided into monochromatic detection lights with different wavelengths after being processed by the dispersion mirror 113 and coaxially injected into the vibration mirror module 204 with the processing light beam after passing through the light splitting module, the vibration mirror module 204, the light splitting module 203, the dispersion mirror 113, the coupler 112 and the photoelectric sensor 114 are sequentially arranged on a third optical path, so that the monochromatic detection light with a specific wavelength after being reflected by the processing station 3 can be transmitted to the photoelectric sensor 114 along the third optical path, corresponding electric signals are generated by the photoelectric sensor 114 according to the specific wavelength, the adjustment assembly 12 includes a numerical control unit 121 respectively connected with the photoelectric sensor 114 and the numerical control unit 202, and the numerical control unit 121 is used for receiving the numerical control unit 202 and controlling the laser unit 121 to complete the self-adaptive focusing of the laser assembly 2.
In this embodiment, the detection light emitted by the detection light module 111 is dispersed into monochromatic detection light with different wavelengths along the second light path by the dispersing mirror 113, each monochromatic detection light can be coaxially emitted to the vibrating mirror module 204 with the processing light beam of the first light path after passing through the light splitting module 203, and coaxially emitted to the processing station 3 by the vibrating mirror module 204, because the monochromatic detection light with different wavelengths has different focal lengths, the positions corresponding to the focal points are different, as shown in fig. 2, only the monochromatic detection light with the characteristic wavelength, of which the focal point is just on the processing station 3, can be reflected back along the reverse direction of the original second light path, and is transmitted to the photoelectric sensor 114 through the third light path, the photoelectric sensor 114 converts the acquired light signal (the wavelength of the reflected monochromatic detection light) into an electrical signal and then inputs the electrical signal to the numerical control unit 121, and the numerical control unit 121 can rapidly and accurately acquire the distance value between the processing station 3 and the vibrating mirror module 204 through analyzing the monochromatic detection light with the reflected specific wavelength, and each wavelength corresponds to a fixed distance value, and the distance value precision can reach 10 nanometers, which is far away from the conventional laser beam measuring position sensor 500 nanometers, so that the laser beam can be processed by the laser beam can be more accurately and the laser beam can be adjusted, and the laser beam can be processed by the best.
Preferably, as shown in fig. 3, the coupler 112 is provided with two optical path channels, a second optical path channel 1121 and a third optical path channel 1122, respectively. The two ends of the second optical path 1121 are respectively connected with the detecting optical module 111 and the dispersing mirror 113 coaxially through optical fibers, and provide a path for the detecting light emitted by the detecting optical module 111 to go to the dispersing mirror 113 along the second optical path for transmitting the detecting light, so as to ensure the stability of the output of the detecting optical module 111, and the two ends of the third optical path 1122 are respectively connected with the dispersing mirror 113 and the photoelectric sensor 114 through optical fibers, and provide a path for the monochromatic detecting light with a specific wavelength reflected from the processing station 3 to go to the photoelectric sensor 114 along the third optical path, so as to change the transmitting direction of the monochromatic detecting light with a specific wavelength reflected from the processing station 3, and enable the monochromatic detecting light with a specific wavelength to be stably and reliably transmitted to the photoelectric sensor 114.
Preferably, the dispersing mirror 113 disperses the detection light emitted from the detection light module 111 into a plurality of kinds of monochromatic detection light with different wavelengths, and may be 3 kinds, 5 kinds, 7 kinds, or the like of monochromatic detection light with different wavelengths.
As shown in fig. 2, the detected light 4 is decomposed into 3 kinds of single-color detected light with different wavelengths after passing through the dispersing mirror 113, and is respectively a first single-color detected light 401, a second single-color detected light 402, and a third single-color detected light 403, where the focal point of the second single-color detected light 402 is exactly located on the processing station 3, so that the second single-color detected light 402 in this embodiment is single-color detected light with a specific wavelength, and may be reflected back along the reverse direction of the second optical path, and transmitted into the photoelectric sensor 114 along the third optical path, where the wavelength is acquired by the photoelectric sensor 114, and the first single-color detected light 401 and the third single-color detected light 403 cannot be reflected back along the reverse direction of the second optical path.
Preferably, the detection light 4 is white light, the white light is mixed light of various colored lights, the white light can be dispersed into various monochromatic detection lights with different wavelengths, and various detection distances are corresponding to the monochromatic detection lights, so that the detection light is suitable for detecting and focusing a complex structure.
Preferably, the detection light 4 emitted by the detection light module 111 is formed by combining light emitted by a plurality of light sources, so that the light intensity of the detection light 4 can be increased.
Preferably, the detection light 4 is light with a special wavelength band, or a filter lens is disposed at any position between the detection light module 111 and the light splitting module 203 along the second optical path, so as to transmit light with a special wavelength band in the detection light, and the filter lens is suitable for detecting and focusing with a slightly simple structure corresponding to a special detection distance.
Preferably, a doubling mirror is disposed at any position between the detection optical module 111 and the beam splitting module 203 along the second optical path, and is used for increasing the light intensity of each single-color detection light so as to increase the detectable farthest distance of each single-color detection light, and the device is suitable for detection focusing with the vibrating mirror module 204 being further away from the processing station 3.
As shown in fig. 4, the present invention further provides an adaptive focusing method for laser processing, where the adaptive focusing method is based on the adaptive focusing device for laser processing, and includes the following steps:
S1, placing a workpiece to be processed on a processing station 3;
s2, controlling the detection assembly 11 to detect the position of a workpiece to be processed;
Specifically, the detection light module 111 emits detection light to the workpiece to be processed through the second optical path, the workpiece to be processed reflects monochromatic detection light with a specific wavelength to the photoelectric sensor 114, and the photoelectric sensor 114 generates a corresponding electrical signal.
And S3, controlling the focusing module 202 to finish the self-adaptive focusing of the laser processing assembly by the adjusting assembly 12 according to the detection result.
Specifically, the numerical control unit 121 obtains the real-time position of the workpiece to be processed from the received electric signal, and controls the focusing module 202 to adjust the focal position of the laser processing assembly 2 to coincide with the real-time position of the workpiece to be processed.
As shown in fig. 1, the present invention further provides a processing system for laser processing, where the processing system includes the adaptive focusing device 1 for laser processing and the laser processing assembly 2, and the laser processing assembly 2 includes a laser 201, a focusing module 202, a beam splitting module 203, and a galvanometer module 204 sequentially disposed along a first optical path, and a processing light beam emitted by the laser 201 is transmitted along the first optical path and is emitted to the processing station 3 through the galvanometer module 204.
Preferably, a processing platform is disposed corresponding to the galvanometer module 204 and/or the processing station 3, and the processing platform includes a displacement module, where the displacement module can drive the galvanometer module 204 and/or the processing station 3 to move, so that a relative position between the galvanometer module 204 and the processing station 3 is changed, and a position of a processing beam on the processing station 3 is changed.
In practice, the laser 201 and the focusing module 202 are preferably arranged above the beam splitting module, and the processing station 3 is preferably arranged below the galvanometer module 204, in which case fig. 1 is a layout in the vertical plane of the processing system for the laser processing.
As shown in fig. 5, the present invention further provides a laser processing method, implemented by using the processing system for laser processing, including the following steps:
(1) Focusing the laser processing assembly 2 on the workpiece to be processed by using S1-S3 in the self-adaptive focusing method of laser processing;
(2) And controlling the laser processing assembly to process the workpiece to be processed, and simultaneously performing steps S2-S3 in the self-adaptive focusing method of laser processing.
The laser processing method in the embodiment improves the real-time performance of focus adjustment, when a workpiece to be processed appears on a processing station, the distance measurement speed of the device and the method can reach thousands of times per second measurement or even tens of thousands of times per second measurement, and particularly under the application scene of continuous measurement, compared with the traditional laser triangulation distance measurement, the device and the method have obvious advantages, and greatly improve the real-time performance of focus adjustment in the processing process.
Further preferably, the method of laser processing further comprises the following process:
(3) The displacement module drives the galvanometer module 204 and/or the station to be processed 3 to move, changes the processing part of the workpiece to be processed, and simultaneously carries out the step (2) until all the processing parts of the workpiece to be processed are completely processed.
In the embodiment, the laser processing method synchronously adjusts the focus when changing the processing part of the workpiece to be processed, can adapt to the processing workpieces with various complex structures, reduces the focusing time of equipment and greatly improves the processing efficiency.
Further, the laser processing method further comprises the following steps:
(4) The laser processing assembly 2 stops emitting processing light beams, the displacement module drives the galvanometer module 204 and/or the station 3 to be processed to move again along the processing track, the detection assembly 11 detects each processing part of the processed workpiece, and the position value of each processing part is recorded into the numerical control unit;
(5) The numerical control unit 121 performs comparison analysis on each position value and real-time position data acquired in the processing process to obtain an error value of each processing part;
(6) Whether the error value of each machining portion exceeds the error threshold value is determined, and if so, the numerical control unit 121 corrects the machining process of the next workpiece.
In this embodiment, by not emitting the processing beam, only emitting the detection beam to go through the same processing track, rechecking is performed on each processing position of the processed workpiece, so that the position value of each processing position can be obtained, and by combining with real-time position data obtained in real time in the processing process, a comparison analysis is performed to obtain an error value of each processing position, and whether each error value exceeds an error threshold value is determined, if the error value of each processing position exceeds the error threshold value, the numerical control unit corrects the same workpiece to be processed when the workpiece is processed next time, and the focusing precision of the processing system can be effectively improved by multiple times of circulation.
The invention discloses an adaptive focusing device for laser processing, which is characterized in that detection light emitted by the detection light module 111 can be divided into monochromatic detection light with different wavelengths after being processed by the dispersion mirror 113 through a detection light module 111, a coupler 112, a dispersion mirror 113, a light splitting module 203 and a galvanometer module 204 which are arranged on a second light path, the monochromatic detection light with the specific wavelength after being reflected by the processing station 3 can be transmitted to the photoelectric sensor 114 along the third light path through the galvanometer module 204, the light splitting module 203, the dispersion mirror 113, the coupler 112 and the photoelectric sensor 114, corresponding electric signals are generated by the photoelectric sensor 114 according to the specific wavelength, and finally, the electric signals of the photoelectric sensor 114 are received through a numerical control unit 121 in an adjusting assembly 12 and the focusing module 202 is controlled to complete the adaptive focusing of the laser processing assembly 2. According to the self-adaptive focusing device for laser processing, provided by the invention, the detection light is arranged to be coaxially irradiated to the processing station 3 with the processing light beam, so that the position data of the processing station 3 can be accurately obtained, the focusing module 202 can be controlled to more accurately adjust the focus position according to the position data, the self-adaptive focusing of the laser processing assembly 2 is completed, and the processing light beam reaches the optimal working state.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (6)
1. The self-adaptive focusing device for laser processing is arranged corresponding to a laser processing assembly, the laser processing assembly comprises a laser, a focusing module, a beam splitting module and a galvanometer module which are sequentially arranged along a first light path, a processing light beam emitted by the laser is transmitted along the first light path and is emitted to a processing station through the galvanometer module,
The self-adaptive focusing device comprises a detection component and an adjustment component;
The detection assembly comprises a detection optical module, a coupler, a dispersion mirror and a photoelectric sensor, wherein the detection optical module, the coupler and the dispersion mirror are sequentially arranged, and the photoelectric sensor is arranged corresponding to the coupler;
The detection light module, the coupler, the dispersion mirror, the light splitting module and the galvanometer module are sequentially arranged on a second light path, so that the detection light emitted by the detection light module can be split into monochromatic detection light with different wavelengths after being processed by the dispersion mirror and is coaxially injected into the galvanometer module with the processing light beam after passing through the light splitting module;
the vibrating mirror module, the light splitting module, the dispersing mirror, the coupler and the photoelectric sensor are sequentially arranged on a third light path, so that monochromatic detection light with specific wavelength after being reflected by the processing station can be transmitted to the photoelectric sensor along the third light path, and the photoelectric sensor generates corresponding electric signals according to the specific wavelength;
the adjusting component comprises a numerical control unit which is respectively connected with the photoelectric sensor and the focusing module in a signal way, and the numerical control unit is used for receiving the electric signal of the photoelectric sensor and controlling the focusing module to finish the self-adaptive focusing of the laser processing component;
the detection light is white light, light emitted by a plurality of light sources is fused to form light with a special wave band;
a filter mirror is arranged at any position between the detection light module and the light splitting module along the second light path and is used for transmitting light with a special wave band in the detection light;
And a doubling mirror is arranged at any position between the detection light module and the light splitting module along the second light path and is used for increasing the light intensity of each single-color detection light so as to increase the detectable furthest distance of each single-color detection light.
2. An adaptive focusing method for laser processing, characterized in that the focusing method is implemented based on the adaptive focusing apparatus for laser processing described in claim 1, the focusing method comprising:
s1, placing a workpiece to be processed on the processing station;
s2, controlling the detection assembly to detect the position of the workpiece to be processed;
And S3, controlling the focusing module to finish self-adaptive focusing of the laser processing assembly by the adjusting assembly according to the detection result.
3. A processing system for laser processing, which is characterized in that the processing system comprises the self-adaptive focusing device for laser processing and a laser processing assembly, wherein the self-adaptive focusing device for laser processing and the laser processing assembly are disclosed in claim 1, the laser processing assembly comprises a laser, a focusing module, a beam splitting module and a galvanometer module, the laser, the focusing module, the beam splitting module and the galvanometer module are sequentially arranged along a first optical path, and a processing light beam emitted by the laser is transmitted along the first optical path and is emitted to a processing station through the galvanometer module;
The processing platform is arranged corresponding to the galvanometer module and/or the processing station, the processing platform comprises a displacement module, and the displacement module can drive the galvanometer module and/or the processing station to move so that the relative position between the galvanometer module and the processing station is changed.
4. A processing system for laser processing according to claim 3, wherein the laser and the focusing module are disposed above the spectroscopic module in a vertical direction, and the processing station is disposed below the galvanometer module.
5. A method of laser machining implemented using the machining system of laser machining as claimed in claim 3 or 4, characterized by comprising the following process:
(1) Focusing the laser processing assembly on the workpiece to be processed by using S1-S3 in the self-adaptive focusing method of laser processing in claim 2;
(2) Controlling the laser processing assembly to process the workpiece to be processed, and simultaneously performing steps S2-S3 in the adaptive focusing method of laser processing as set forth in claim 2;
(3) And (2) driving the galvanometer module and/or the processing station to move by the displacement module, changing the processing part of the workpiece to be processed, and simultaneously performing the step (2) until all the processing parts of the workpiece to be processed are completely processed.
6. The method of laser machining according to claim 5, further comprising the process of:
(4) The laser processing assembly stops emitting processing light beams, the displacement module drives the galvanometer module and/or the processing station to move again along the processing track, the detection assembly detects all processing parts of the processed workpiece, and the position values of all the processing parts are recorded to the numerical control unit;
(5) The numerical control unit compares and analyzes each position value with real-time position data acquired in the processing process to obtain an error value of each processing part;
(6) And judging whether the error value of each processing part exceeds an error threshold value, and if so, correcting the processing process of the next workpiece by the numerical control unit.
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| CN220178394U (en) * | 2022-03-23 | 2023-12-15 | 广州德擎光学科技有限公司 | Focusing device |
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| CN211669428U (en) * | 2019-12-31 | 2020-10-13 | 武汉华工激光工程有限责任公司 | Automatic focusing device based on inner coaxial vision |
| CN113305418A (en) * | 2021-05-20 | 2021-08-27 | 苏州科韵激光科技有限公司 | Coaxial focus searching device for laser processing and laser processing method |
| CN113231732A (en) * | 2021-05-26 | 2021-08-10 | 广东炬森智能装备有限公司 | Laser processing system and control method thereof |
| CN113511823B (en) * | 2021-07-28 | 2023-03-31 | 西安中科光凝科技有限公司 | Glass material micro-welding device and method with self-focusing function |
| CN116423045A (en) * | 2023-04-24 | 2023-07-14 | 深圳市杰普特光电股份有限公司 | Laser welding head, laser welding device and quality control method |
| CN117644306B (en) * | 2024-01-30 | 2024-05-03 | 武汉新耐视智能科技有限责任公司 | Focus detection device and method for robot laser remote welding equipment |
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| CN220178394U (en) * | 2022-03-23 | 2023-12-15 | 广州德擎光学科技有限公司 | Focusing device |
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