CN118899364B - Photovoltaic cell oxidation equipment and oxidation process - Google Patents
Photovoltaic cell oxidation equipment and oxidation process Download PDFInfo
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- CN118899364B CN118899364B CN202410979631.6A CN202410979631A CN118899364B CN 118899364 B CN118899364 B CN 118899364B CN 202410979631 A CN202410979631 A CN 202410979631A CN 118899364 B CN118899364 B CN 118899364B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- Microelectronics & Electronic Packaging (AREA)
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- Photovoltaic Devices (AREA)
Abstract
本发明属于光伏电池片加工技术领域，具体的说是一种光伏电池片氧化设备及氧化工艺，包括氧化箱，所述氧化箱的上方设置有固定盘，所述氧化箱内部的底端安装有高温加热板，所述氧化箱的一侧安装有注氧组件，所述固定盘的外部设置有用于多工位切换的翻转组件，所述氧化箱远离注氧组件的一侧设置有用于清洁的冲洗组件；通过固定盘设置多组，可便于同时对多组光伏电池片进行氧化，安装时通过翻转架带动固定盘翻转可便于将光伏电池片安装进不同工位，清洗后固定盘进入到氧化箱的内部，通过翻转架带动固定盘翻转可对光伏电池片烘干同时进行预热，在对光伏电池片氧化时通过翻转架可带动固定盘翻转切换工位，可通过设置多工位固定盘提高氧化的效率。
The present invention belongs to the technical field of photovoltaic cell processing, and specifically is a photovoltaic cell oxidation device and oxidation process, comprising an oxidation box, a fixed disk is arranged above the oxidation box, a high-temperature heating plate is installed at the bottom end of the oxidation box, an oxygen injection component is installed on one side of the oxidation box, a flip component for multi-station switching is arranged outside the fixed disk, and a flushing component for cleaning is arranged on the side of the oxidation box away from the oxygen injection component; by arranging multiple groups of fixed disks, it is convenient to oxidize multiple groups of photovoltaic cells at the same time, and when installing, the fixed disk is driven to flip by a flip frame, so that the photovoltaic cells can be installed in different stations, and after cleaning, the fixed disk enters the interior of the oxidation box, and the fixed disk is driven to flip by the flip frame to dry the photovoltaic cell and preheat it at the same time. When oxidizing the photovoltaic cell, the fixed disk can be driven to flip and switch stations by the flip frame, and the oxidation efficiency can be improved by arranging a multi-station fixed disk.
Description
Technical Field
The invention belongs to the technical field of photovoltaic cell processing, and particularly relates to a photovoltaic cell oxidation device and an oxidation process.
Background
The photovoltaic cell is a semiconductor slice made of silicon chips, the surface of the photovoltaic cell is required to be oxidized in the production process, an oxide film can be formed on the surface of the photovoltaic cell through an oxidation process, the surface of the photovoltaic cell can be protected by the oxide film, and the use of the photovoltaic cell can be prevented from being influenced by pollution and the like on the surface of the photovoltaic cell in the use process.
The surface of the photovoltaic cell possibly adheres to dirt in the production process, the dirt can cause shielding to the surface of the photovoltaic cell in the oxidation process, the oxidization effect of the shielded area can be influenced, the stability of the photovoltaic cell is influenced when the photovoltaic cell is used, the photovoltaic cell is heated for a long time in the oxidation process, and the processing efficiency is low.
Therefore, the invention provides a photovoltaic cell oxidation device and an oxidation process.
Disclosure of Invention
In order to overcome the deficiencies of the prior art, at least one technical problem presented in the background art is solved.
The photovoltaic cell oxidation equipment comprises an oxidation box, a fixed disc is arranged above the oxidation box, a high-temperature heating plate is arranged at the bottom end inside the oxidation box, an oxygen injection component is arranged on one side of the oxidation box, a temperature sensor is arranged at the top end inside the oxidation box, an oxygen concentration sensor is arranged on one side of the temperature sensor, the oxygen concentration sensor is arranged at the top end inside the oxidation box, an exhaust hole is formed in one side, far away from the temperature sensor, of the oxygen concentration sensor, a rotary disc is arranged below the exhaust hole, an air outlet hole is formed in the rotary disc, a first motor is arranged at the top end of the oxidation box, the end part of a rotating shaft of the first motor is fixedly connected with the top end of the rotary disc, a turnover component for switching is arranged outside the fixed disc, and a flushing component for cleaning is arranged on one side, far away from the oxygen injection component, of the oxidation box.
Preferably, the turnover assembly comprises side support rollers rotatably connected to two sides of the inside of the fixed disc, and a bottom support roller is rotatably connected to the lower side of the inside of the fixed disc.
Preferably, one side of the fixed disc is hinged with a baffle, the outside of the rotating shaft at two sides of the baffle is fixedly provided with a coil spring, two sides of the inside of the fixed disc are provided with turnover holes matched with the outer diameters of the coil springs, and the outer sides of the coil springs are fixedly connected with the inner sides of the turnover holes of the fixed disc.
Preferably, the fixed disk is provided with six groups, is fixed with the roll-over stand between six groups of fixed disks, the fixed disk is at the outside equidistant distribution of roll-over stand, the top of roll-over stand is provided with the apron, the both ends of roll-over stand are all rotated and are connected with the link, the top and the apron fixed connection of link, the one end of roll-over stand is fixed with the driving disk, the second motor is installed on the top of apron, the pivot end fixing of second motor has the output dish, the outside cover of the output dish of driving disk and second motor is equipped with metal chain, metal chain comprises metal rope and a plurality of metal spheroid, and a plurality of metal spheroid equidistant fixing is in the outside of metal rope.
Preferably, the top of oxidation case has been seted up and has been imported and exported, the both ends of import and export all are provided with first support frame, the bottom of first support frame and the top fixed connection of oxidation case, one of them the third motor is installed on the top of first support frame, the pivot end fixing of third motor has first threaded rod, another the inside of first support frame is fixed with the direction slide bar, the apron is close to the one end of third motor and is fixed with first elevating block, threaded connection between first elevating block and the first threaded rod, the apron is kept away from the one end of third motor and is fixed with the guide block, the outside at the direction slide bar is established to the guide block cover.
Preferably, the outer diameter of the bottom end of the cover plate is matched with the inner diameter of the inlet and the outlet.
Preferably, the flushing assembly comprises a water tank fixed on one side of the oxidation tank, which is far away from the oxygen injection assembly, a water pump is installed at the top end of the water tank, a water suction pipe is fixed at the water inlet end of the water tank, the water suction pipe is communicated with the inside of the water tank, a water outlet pipe is fixed at the water outlet end of the water pump, and a water spraying frame is fixed at one end of the water outlet pipe, which is far away from the water pump.
Preferably, the water spray frame comprises a plurality of pipe bodies, and a plurality of spray heads are fixed at equal intervals on the top end of the water spray frame.
Preferably, the top of oxidation case is provided with the water receiving tank, the inside of water receiving tank is fixed with the otter board, the both sides of water receiving tank all are fixed with the movable block, the inside threaded connection of movable block has the second threaded rod, one side that the oxygen subassembly was kept away from on the oxidation case top is fixed with two sets of second support frames, the fourth motor is installed to one side that the second threaded rod was kept away from to the second support frame, the pivot tip and the one end fixed connection of second threaded rod of fourth motor, the other end of second threaded rod passes through the supporting shoe and rotates the top of connection at the oxidation case.
The invention provides a photovoltaic cell oxidation process, which comprises the following steps:
cleaning the silicon wafer, namely cleaning the surface of the photovoltaic cell piece through a flushing assembly, and removing pollutants such as metal impurities, organic matters, oxides and the like attached to the surface of the photovoltaic cell piece;
drying the silicon wafer, namely drying the cleaned photovoltaic cell by using the heat of a high-temperature heating plate, and removing the residual moisture on the surface of the rinsed photovoltaic cell;
Pre-treating, namely pre-heating the photovoltaic cell, raising the temperature of the photovoltaic cell and reducing the heating time in the oxidation process
And (3) an oxidation process, namely placing the cleaned photovoltaic cell into an oxidation box, and forming a layer of compact silicon dioxide oxide film on the surface of the photovoltaic cell under the reaction of the photovoltaic cell and oxygen at high temperature.
The beneficial effects of the invention are as follows:
1. according to the photovoltaic cell oxidation equipment, multiple groups of photovoltaic cells can be conveniently oxidized simultaneously through the arrangement of the fixing plates, the photovoltaic cells can be conveniently installed into different stations by driving the fixing plates to turn over through the turn-over frame during installation, the fixing plates enter the oxidation box after being cleaned, the photovoltaic cells can be dried and preheated simultaneously through driving the fixing plates to turn over through the turn-over frame, the fixing plates can be driven to turn over and switch stations when the photovoltaic cells are oxidized, and the oxidation efficiency can be improved through arranging the multi-station fixing plates.
2. According to the photovoltaic cell oxidation equipment, the water mist sprayed by the water spraying frame can be used for conveniently cleaning dirt on the surface of the photovoltaic cell, meanwhile, the washed water flow can be recovered through the water receiving groove, dirt in the water can be filtered out by the screen plate, the recovered water can be returned to the inside of the water tank through the recovery pipe, the water in the water tank can be recycled, the fourth motor drives the water receiving groove to move and can be moved away from the lower part of the fixed disc after the water spraying frame is washed, and the water receiving groove is prevented from affecting the lifting of the fixed disc.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
FIG. 4 is a schematic view of a structure of a fixed disk in the present invention;
FIG. 5 is a schematic view of a partial cross-sectional structure of a fixed disk in the present invention;
FIG. 6 is an enlarged view of a portion of FIG. 5 at B;
FIG. 7 is a schematic view of the structure of the water tank in the present invention;
FIG. 8 is a schematic view of a water spray stand according to the present invention;
Fig. 9 is a schematic view of the structure of the water receiving tank in the present invention.
The device comprises a box 1, an oxidation tank 11, an inlet and outlet 12, a temperature sensor 14, an exhaust hole 141, a turntable 142, an exhaust hole 143, a first motor 2, a fixed disc 21, a turnover frame 211, a transmission disc 212, a metal chain 22, a second motor 23, a cover plate 231, a first lifting block 232, a guide block 233, a connection frame 24, a third motor 241, a first supporting frame 242, a first threaded rod 243, a guide sliding rod 25, a side supporting roller 251, a bottom supporting roller 252, a baffle plate 253, a coil spring 3, a high-temperature heating plate 4, an oxygen injection assembly 5, a water tank 51, a water pump 511, a water outlet pipe 512, a water pumping pipe 52, a water spraying frame 521, a spray head 53, a water receiving tank 531, a moving block 532, a water tank 533, a recycling pipe 54, a fourth motor 541, a second threaded rod 542 and a second supporting frame.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
As shown in fig. 1 to 3, the photovoltaic cell oxidation apparatus according to the embodiment of the present invention includes an oxidation tank 1, a fixed disk 2 is disposed above the oxidation tank 1, a high-temperature heating plate 3 is mounted at the bottom end inside the oxidation tank 1, an oxygen injection component 4 is mounted at one side of the oxidation tank 1, a temperature sensor 12 is mounted at the top end inside the oxidation tank 1, an oxygen concentration sensor 13 is disposed at one side of the temperature sensor 12, the oxygen concentration sensor 13 is mounted at the top end inside the oxidation tank 1, an exhaust hole 14 is disposed at one side of the oxygen concentration sensor 13 far from the temperature sensor 12, a turntable 141 is disposed below the exhaust hole 14, an air outlet hole 142 is disposed inside the turntable 141, a first motor 143 is mounted at the top end of the oxidation tank 1, a rotating shaft end of the first motor 143 is fixedly connected with the top end of the turntable 141, a turnover component for multi-station switching is disposed at the outside of the fixed disk 2, and a flushing component for cleaning is disposed at one side of the oxidation tank 1 far from the oxygen injection component 4;
In order to make the photovoltaic cell more durable during production, the surface of the photovoltaic cell needs to be subjected to oxidation treatment, the formed oxidation layer can protect the photovoltaic cell, the photovoltaic cell is placed into the fixed disc 2 during oxidation, the surface of the photovoltaic cell is cleaned through the flushing component, then the fixed disc 2 is placed into the oxidation tank 1 through the overturning component, oxygen is input into the oxidation tank 1 through the oxygen injection component 4 at the moment, the first motor 143 is started to drive the rotary table 141 to rotate in the oxygen input process so as to align the air outlet holes 142 with the air outlet holes 14, the gas in the oxidation tank 1 is extruded from the air outlet holes 142 and the air outlet holes 14 to the outside, the oxygen concentration in the oxidation tank 1 is monitored in real time through the oxygen concentration sensor 13, the oxygen injection component 4 stops oxygen input after the set oxygen concentration is reached, the first motor 143 drives the rotary table 141 to rotate so as to separate the air outlet holes 142 from the air outlet holes 14, then the high-temperature heating plate 3 is electrified to generate heat, the heat generated by the high-temperature heating plate 3 can heat the photovoltaic cell inside the fixed disc 2 in advance, meanwhile, the turnover assembly drives the fixed disc 2 to continuously turn over, the moisture on the surface of the photovoltaic cell inside the fixed disc 2 is evaporated by heating, then the rotation of the fixed disc 2 is stopped, one of the fixed discs 2 faces the high-temperature heating plate 3, the high-temperature heating plate 3 toasts the photovoltaic cell inside the current fixed disc 2 to oxidize the photovoltaic cell, the temperature sensor 12 can monitor the temperature condition inside the oxidation box 1 in real time, the oxygen concentration sensor 13 monitors the oxygen consumption condition inside the oxidation box 1, the oxygen filling assembly 4 is timely provided for oxygen filling during oxygen lack, the surface of the photovoltaic cell inside the fixed disc 2 can generate an oxidation layer by the roasting of the oxygen and the high-temperature heating plate 3, and then, the photovoltaic cell pieces inside the other fixed discs 2 are switched through the overturning assembly to oxidize, and the photovoltaic cell pieces inside the fixed discs 2 are taken out after the oxidization is finished.
As shown in fig. 4 to 5, the turnover assembly includes side support rollers 25 rotatably connected to both sides of the inside of the fixed tray 2, and a bottom support roller 251 rotatably connected to the lower side of the inside of the fixed tray 2;
when the photovoltaic cell panel is fixed, the photovoltaic cell panel is inserted from the opening at one side of the fixed disc 2, at the moment, the side support roller 25 can guide the photovoltaic cell, meanwhile, the bottom support roller 251 can support the bottom of the photovoltaic cell, the photovoltaic cell inside the fixed disc 2 can only move left and right due to the limitation of the rotation direction of the side support roller 25, and the photovoltaic cell inside the fixed disc 2 can be prevented from falling off in the overturning process.
As shown in fig. 4 to 6, a baffle 252 is hinged to one side of the fixed disc 2, a coil spring 253 is fixed to the outer parts of rotating shafts on two sides of the baffle 252, turnover holes matched with the outer diameters of the coil spring 253 are formed on two sides of the inner part of the fixed disc 2, and the outer sides of the coil spring 253 are fixedly connected with the inner sides of the turnover holes of the fixed disc 2;
The baffle 252 is turned over inside the opening of the fixed disc 2, when the photovoltaic cell is placed inside the fixed disc 2, the baffle 252 is turned over and parallel to the fixed disc 2, after the photovoltaic cell is placed inside the fixed disc 2, the baffle 252 is loosened, the coil spring 253 can drive the baffle 252 to reset automatically, the baffle 252 can be supported by the elasticity of the coil spring 253 in the turning process to keep a stable state, and the photovoltaic cell can be prevented from falling off from the inside of the fixed disc 2 in the turning process.
As shown in fig. 4 to 5, six groups of fixed discs 2 are provided, a roll-over stand 21 is fixed between the six groups of fixed discs 2, the fixed discs 2 are distributed at equal intervals outside the roll-over stand 21, a cover plate 23 is arranged above the roll-over stand 21, two ends of the roll-over stand 21 are both rotationally connected with a connecting frame 233, the top end of the connecting frame 233 is fixedly connected with the cover plate 23, one end of the roll-over stand 21 is fixed with a driving disc 211, the top end of the cover plate 23 is provided with a second motor 22, the end part of a rotating shaft of the second motor 22 is fixed with an output disc, the driving disc 211 and the output disc of the second motor 22 are sleeved with a metal chain 212, the metal chain 212 is composed of a metal rope and a plurality of metal spheres, and the metal spheres are fixed at equal intervals outside the metal rope;
When the photovoltaic cell is used, the photovoltaic cell is arranged in the fixed disc 2, the second motor 22 is started after the photovoltaic cell is arranged, the driving disc 211 is driven to rotate through the metal chain 212, the driving disc 211 drives the turnover frame 21 to turn over, the turnover frame 21 drives the fixed disc 2 to turn over, the photovoltaic cell is arranged in the fixed disc 2 of other stations through turning over and switchable different station fixed discs 2, when the fixed disc 2 is arranged in the oxidation box 1, the turnover frame 21 drives the fixed disc 2 to turn over, the high-temperature heating plate 3 can rotate when the photovoltaic cell in the fixed disc 2 is dried, the photovoltaic cell can be dried more uniformly, meanwhile, the photovoltaic cell can be preheated, the subsequent heating time is reduced, the station of the fixed disc 2 can be switched over after oxidation, the photovoltaic cell of other stations can be oxidized conveniently and rapidly, and the metal chain 212 is arranged to enable the inside high-temperature state of the oxidation box 1 to be unaffected when the turnover frame 21 is turned over.
As shown in fig. 4 to 5, an inlet and outlet 11 is formed in the top end of the oxidation tank 1, first supporting frames 241 are arranged at two ends of the inlet and outlet 11, the bottom end of the first supporting frame 241 is fixedly connected with the top end of the oxidation tank 1, a third motor 24 is installed at the top end of one first supporting frame 241, a first threaded rod 242 is fixed at the end part of a rotating shaft of the third motor 24, a guide sliding rod 243 is fixed in the other first supporting frame 241, a first lifting block 231 is fixed at one end of a cover plate 23 close to the third motor 24, the first lifting block 231 is in threaded connection with the first threaded rod 242, a guide block 232 is fixed at one end of the cover plate 23 far away from the third motor 24, and the guide block 232 is sleeved outside the guide sliding rod 243;
After all photovoltaic cells are arranged in the fixed disc 2, the third motor 24 is started to drive the first threaded rod 242 to rotate, the first threaded rod 242 drives the first lifting block 231 to move downwards, at the moment, the first lifting block 231 drives the cover plate 23, the cover plate 23 simultaneously drives the fixed disc 2 to extend into the oxidation box 1, the guide block 232 slides outside the guide slide rod 243 in the descending process of the cover plate 23, the other end of the cover plate 23 can be supported, and when the photovoltaic cells in the fixed disc 2 are oxidized, the third motor 24 is started to rotate reversely, so that the fixed disc 2 can ascend from the inside of the oxidation box 1.
As shown in fig. 1 to 4, the outer diameter of the bottom end of the cover plate 23 is matched with the inner diameter of the inlet/outlet 11;
When the fixed disc 2 descends, the cover plate 23 descends along with the fixed disc 2, the fixed disc 2 enters the inside of the oxidation box 1, the rear cover plate 23 covers the top end of the inlet and outlet 11, the bottom end of the cover plate 23 is clamped into the inside of the inlet and outlet 11, the inlet and outlet 11 can be sealed to a certain extent, outside air can be prevented from entering the inside of the oxidation box 1 in the use process, oxidation of photovoltaic cells is affected, and the outside of oxygen leakage in the oxidation box 1 can be reduced.
As shown in fig. 1 to 9, the flushing assembly comprises a water tank 5 fixed at one side of the oxidation tank 1 far away from the oxygen injection assembly 4, a water pump 51 is installed at the top end of the water tank 5, a water suction pipe 512 is fixed at the water inlet end of the water tank 5, the water suction pipe 512 is communicated with the interior of the water tank 5, a water outlet pipe 511 is fixed at the water outlet end of the water pump 51, and a water spraying frame 52 is fixed at one end of the water outlet pipe 511 far away from the water pump 51;
before the oxidation of the photovoltaic cell, the surface of the photovoltaic cell needs to be washed, at the moment, the water pump 51 is started to pump water in the water tank 5 through the water pumping pipe 512, then the water pump 51 is conveyed to the water spraying frame 52 through the water outlet pipe 511, the surface of the photovoltaic cell can be washed through the water spraying frame 52, the fixed disc 2 is driven to overturn by the cooperation of the overturning frame 21 in the washing process, and the photovoltaic cell at different stations can be cleaned.
As shown in fig. 1 to 9, the water spray frame 52 is composed of a plurality of pipe bodies, and a plurality of spray heads 521 are fixed at equal intervals to the top end of the water spray frame 52;
when the surface of the photovoltaic cell is washed, water flow is input into the water spraying frame 52 through the water outlet pipe 511, the water flow is sprayed out through the spray heads 521, and the water mist sprayed out by the spray heads 521 can cover the surface of the photovoltaic cell, so that the photovoltaic cell can be cleaned more quickly.
As shown in fig. 1 to 9, a water receiving tank 53 is arranged above the oxidation tank 1, a screen 532 is fixed in the water receiving tank 53, moving blocks 531 are fixed on both sides of the water receiving tank 53, second threaded rods 541 are connected to the inner threads of the moving blocks 531, two groups of second supporting frames 542 are fixed on one side, far away from the oxygen injection assembly 4, of the top end of the oxidation tank 1, a fourth motor 54 is installed on one side, far away from the second threaded rods 541, of the second supporting frames 542, the end part of a rotating shaft of the fourth motor 54 is fixedly connected with one end of the second threaded rods 541, and the other end of the second threaded rods 541 is rotatably connected to the top end of the oxidation tank 1 through supporting blocks;
In the process of cleaning the photovoltaic cell by the water spray frame 52, dirt on the surface of the photovoltaic cell is washed and shed through water mist, at the moment, the water receiving tank 53 can store the water flowing down from the surface of the photovoltaic cell and the fallen dirt, at the moment, dirt and water flow can be separated through the screen 532, the inside of the water tank 5 is in a sealed state when the water pump 51 pumps water through the water suction pipe 512, negative pressure can be generated in the water tank 5 when the water pump 51 pumps water through the water suction pipe 512, therefore, the water flow filtered in the water receiving tank 53 can be sucked into the water tank 5 through the recovery pipe 533, the washed water flow can be recycled, when the photovoltaic cell in the fixed disc 2 is cleaned, the fourth motor 54 is started to drive the second threaded rod 541 to rotate, the movable block 531 is started to drive the water receiving tank 53 to move to the lower part of the fixed disc 2, the fourth motor 54 is started to reversely rotate after the cleaning is finished, the water receiving tank 53 is moved from the lower part of the fixed disc 2, and the high-temperature heating plate 3 can be prevented from affecting the use of the fixed disc 2.
An integrated molding process of a hardware die casting, comprising:
cleaning the silicon wafer, namely cleaning the surface of the photovoltaic cell piece through a flushing assembly, and removing pollutants such as metal impurities, organic matters, oxides and the like attached to the surface of the photovoltaic cell piece;
Drying the silicon wafer, namely drying the cleaned photovoltaic cell by using the heat of the high-temperature heating plate 3, and removing the residual moisture on the surface of the rinsed photovoltaic cell;
Pre-treating, namely pre-heating the photovoltaic cell, raising the temperature of the photovoltaic cell and reducing the heating time in the oxidation process
And (3) an oxidation process, namely placing the cleaned photovoltaic cell into an oxidation box 1, and reacting with oxygen at high temperature to form a layer of compact silicon dioxide oxide film on the surface of the photovoltaic cell.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. The photovoltaic cell oxidation equipment is characterized by comprising an oxidation box (1), wherein a fixed disc (2) is arranged above the oxidation box (1), a high-temperature heating plate (3) is arranged at the bottom end inside the oxidation box (1), an oxygen injection assembly (4) is arranged at one side of the oxidation box (1), a temperature sensor (12) is arranged at the top end inside the oxidation box (1), an oxygen concentration sensor (13) is arranged at one side of the temperature sensor (12), the oxygen concentration sensor (13) is arranged at the top end inside the oxidation box (1), an exhaust hole (14) is formed in one side, far away from the temperature sensor (12), a rotary disc (141) is arranged below the exhaust hole (14), an air outlet hole (142) is formed in the rotary disc (141), a first motor (143) is arranged at the top end of the oxidation box (1), a rotary shaft end of the first motor (143) is fixedly connected with the top end of the rotary disc (141), an oxygen injection assembly (4) is arranged at one side, far away from the rotary disc (2), and the oxygen injection assembly (4) is used for cleaning the multi-station switching assembly;
the overturning assembly comprises side support rollers (25) rotatably connected to two sides of the inside of the fixed disc (2), and a bottom support roller (251) is rotatably connected to the lower part of the inside of the fixed disc (2);
One side of the fixed disc (2) is hinged with a baffle plate (252), a coil spring (253) is fixed outside a rotating shaft at two sides of the baffle plate (252), two sides of the inside of the fixed disc (2) are provided with turnover holes matched with the outer diameter of the coil spring (253), and the outer side of the coil spring (253) is fixedly connected with the inner side of the turnover hole of the fixed disc (2);
The fixed disc (2) is provided with six groups, a roll-over stand (21) is fixed between the six groups of fixed discs (2), the fixed discs (2) are distributed at equal intervals outside the roll-over stand (21), a cover plate (23) is arranged above the roll-over stand (21), two ends of the roll-over stand (21) are rotationally connected with a connecting frame (233), the top end of the connecting frame (233) is fixedly connected with the cover plate (23), one end of the roll-over stand (21) is fixedly provided with a transmission disc (211), the top end of the cover plate (23) is provided with a second motor (22), the end part of a rotating shaft of the second motor (22) is fixedly provided with an output disc, a metal chain (212) is sleeved outside the output disc of the transmission disc (211) and the second motor (22), the metal chain (212) is composed of a metal rope and a plurality of metal spheres, and the plurality of metal spheres are fixed at equal intervals outside the metal rope;
The utility model discloses a novel oxidation oven, including oxidation oven (1), including first support frame (231), apron (23), second support frame (242), third motor (24) are installed on the top of first support frame (241), import and export (11) have been seted up on the top of oxidation oven (1), the both ends of import and export (11) all are provided with first support frame (241), the bottom of first support frame (241) is fixed with on the top of oxidation oven (1), one of them third motor (24) are installed on the top of first support frame (241), the pivot end fixing of third motor (24) has first threaded rod (242), and another the inside of first support frame (241) is fixed with direction slide bar (243), the one end that apron (23) is close to third motor (24) is fixed with first elevating block (231), threaded connection between first elevating block (231) and the first threaded rod (242), the one end that apron (23) kept away from third motor (24) is fixed with guide block (232), the outside at direction slide bar (243) is established to guide block (232).
2. The photovoltaic cell oxidation apparatus according to claim 1, wherein the outer diameter of the bottom end of the cover plate (23) is matched with the inner diameter of the inlet/outlet (11).
3. The photovoltaic cell oxidation equipment of claim 2, wherein the flushing assembly comprises a water tank (5) fixed on one side, far away from the oxygen injection assembly (4), of the oxidation tank (1), a water pump (51) is installed at the top end of the water tank (5), a water suction pipe (512) is fixed at the water inlet end of the water tank (5), the water suction pipe (512) is communicated with the inside of the water tank (5), a water outlet pipe (511) is fixed at the water outlet end of the water pump (51), and a water spraying frame (52) is fixed at one end, far away from the water pump (51), of the water outlet pipe (511).
4. The photovoltaic cell oxidation apparatus according to claim 3, wherein the water spraying frame (52) is composed of a plurality of pipe bodies, and a plurality of spray heads (521) are fixed at equal intervals on the top end of the water spraying frame (52).
5. The photovoltaic cell oxidation equipment of claim 4, wherein a water receiving tank (53) is arranged above the oxidation box (1), a screen plate (532) is fixed in the water receiving tank (53), moving blocks (531) are fixed on two sides of the water receiving tank (53), second threaded rods (541) are connected to the inner threads of the moving blocks (531), two groups of second supporting frames (542) are fixed on one side, far away from the oxygen injection assembly (4), of the top end of the oxidation box (1), a fourth motor (54) is arranged on one side, far away from the second threaded rods (541), of the second supporting frames (542), the rotating shaft end portion of the fourth motor (54) is fixedly connected with one end of each second threaded rod (541), and the other end of each second threaded rod (541) is connected to the top end of the oxidation box (1) through a supporting block in a rotating mode.
6. An oxidation process using the photovoltaic cell oxidation apparatus of any one of claims 1 to 5, characterized by comprising the steps of:
Cleaning the silicon wafer, namely cleaning the surface of the photovoltaic cell piece through a flushing assembly, and removing metal impurities, organic matters and oxide pollutants attached to the surface of the photovoltaic cell piece;
Drying the silicon wafer, namely placing the cleaned photovoltaic cell into an oxidation box (1), drying the cleaned photovoltaic cell by the heat of a high-temperature heating plate (3), and removing the residual moisture on the surface of the cleaned photovoltaic cell;
pre-treating, namely pre-heating the photovoltaic cell, raising the temperature of the photovoltaic cell and reducing the heating time in the oxidation process;
And oxidizing, namely forming a layer of compact silicon dioxide oxide film on the surface of the photovoltaic cell under the condition of reacting with oxygen at high temperature.
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| CN202410979631.6A CN118899364B (en) | 2024-07-22 | 2024-07-22 | Photovoltaic cell oxidation equipment and oxidation process |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111370351A (en) * | 2020-03-20 | 2020-07-03 | 胡艺可 | Silicon wafer thermal oxidation device for optical communication equipment |
| CN115831856A (en) * | 2022-12-14 | 2023-03-21 | 江苏东海半导体股份有限公司 | Thermal oxidation growth process and device for MOSFET preparation |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN201804848U (en) * | 2010-09-08 | 2011-04-20 | 北京七星华创电子股份有限公司 | Oxidation unit used for manufacturing semiconductor device |
| CN218447945U (en) * | 2022-09-07 | 2023-02-03 | 苏州斯玛图智能设备有限责任公司 | Battery piece oxidation unit |
| KR20240108847A (en) * | 2022-12-30 | 2024-07-10 | 세메스 주식회사 | Apparatus for treating a substrate |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111370351A (en) * | 2020-03-20 | 2020-07-03 | 胡艺可 | Silicon wafer thermal oxidation device for optical communication equipment |
| CN115831856A (en) * | 2022-12-14 | 2023-03-21 | 江苏东海半导体股份有限公司 | Thermal oxidation growth process and device for MOSFET preparation |
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