CN118833920A - Waste liquid recovery system in wafer rod multi-wire cutting process - Google Patents

Abstract

The invention belongs to the technical field of wafer processing, and discloses a waste liquid recovery system in a wafer bar multi-wire cutting process, which comprises a base, wherein the left side of the base is provided with an arc notch, the front fixedly connected with connecting plate of base, the lower surface fixedly connected with of connecting plate down spliced pole, the middle part rotation of spliced pole is connected with the collection chamber down. According to the invention, the stirring plate rotates to drive the waste liquid and the acid leaching solution in the middle of the reaction shell to upwards kick, and drive the waste liquid and the acid leaching solution at the edge of the reaction shell to downwards kick so as to form circulation, the waste liquid and the acid leaching solution in a layered state are fully mixed and contacted, so that the acid leaching speed is accelerated, when the stirring plate does not work, a large amount of solid particles can be leached in the acid leaching process, and can fall on the upper surface of the sealing plate, so that the solid particles slide into the collecting cavity, and the problems that silicon particles precipitated at the bottom are driven into the solution again, collide with the stirrer and are easy to crack, and the quality of leached silicon is reduced are solved.

Description

A waste liquid recovery system in a wafer bar multi-wire cutting process

Technical Field

The invention belongs to the technical field of wafer processing, and in particular relates to a waste liquid recovery system in a wafer rod multi-wire cutting process.

Background Art

The wafer bar multi-wire cutting process will generate a certain amount of waste liquid during the production process. These waste liquids mainly come from the coolant and lubricant used in the cutting process, as well as the tiny silicon powder and other impurities that fall off the wafer surface and wire saw after cutting. The wafer bar multi-wire cutting process will generate a large amount of cutting waste liquid. The silicon content in the waste liquid is extremely high and the powder particle size is fine. If it is directly discharged without treatment, it will not only cause a waste of silicon resources, but also cause serious pollution to the environment.

The existing method for recovering silicon from waste liquid usually uses the acid leaching impurity removal method, which uses different single acids or mixed acids to remove metal impurities in the waste liquid, and then uses the leaching solution to leach the suspended silicon. However, due to the different densities of the waste liquid and the acid leaching solution, solution stratification will occur. In order to speed up the acid leaching rate and avoid the rupture of silicon and the generation of bubbles, intermittent stirring is often performed to mix them. However, the existing method will bring the silicon particles precipitated at the bottom of the intermittent process into the solution again, and they will easily break when they collide with the agitator, which reduces the quality of the leached silicon and greatly increases the time it takes for the silicon particles to settle to the bottom when the reaction is complete.

Summary of the invention

The object of the present invention is to provide a waste liquid recovery system in a wafer rod multi-wire cutting process to solve the problems raised in the above-mentioned background technology.

In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a waste liquid recovery system in a wafer rod multi-wire cutting process, comprising a base, an arc-shaped notch is opened on the left side of the base, a connecting plate is fixedly connected to the front side of the base, a lower connecting column is fixedly connected to the lower surface of the connecting plate, a collecting chamber is rotatably connected to the middle part of the lower connecting column, a pull ring is fixedly connected to the right side of the curved surface of the collecting chamber, an electromagnet is fixedly installed at the bottom of the collecting chamber, a driving motor is fixedly installed at the middle part of the connecting plate, a driving bevel gear is fixedly installed on the output shaft of the driving motor, and the top of the connecting plate is fixedly connected to An upper connecting column is connected, the middle part of the upper connecting column is rotatably connected with a cover plate, the top of the base is fixedly connected with a reaction shell, the bottom of the reaction shell is provided with a through hole, the bottom of the through hole is fixedly connected with a plurality of circular sleeves arranged equidistantly in a circumference, the inside of the circular sleeve is fixedly connected with a tension spring, the lower ends of the plurality of tension springs are fixedly connected with a sealing plate, a permanent magnet is fixedly installed on the bottom surface of the sealing plate, a gear ring is rotatably installed on the outer curved surface of the reaction shell, a plurality of circumferentially arranged mounting holes are provided in the middle part of the curved surface of the reaction shell, and a plurality of circumferentially arranged tumbling mechanisms are fixedly connected to the middle part of the inner curved surface of the reaction shell.

Preferably, the tumbling mechanism includes two supporting columns, the inner ends of the two supporting columns are rotatably mounted with a connecting shaft, the middle part of the connecting shaft is rotatably mounted with a rectangular column, an installation cavity is opened inside the rectangular column, a rotating gear is arranged inside the installation cavity, the outer side of the rotating gear is meshed with a driven gear, the middle part of the driven gear is fixedly connected with a transmission rod, the outer end of the transmission rod is fixedly mounted with a transmission gear, a rotating sleeve fixedly connected to the connecting shaft is arranged between the rectangular column and the two supporting columns, and a plurality of circumferentially arranged shifting plates are fixedly connected to the curved surface of the rotating sleeve.

Preferably, the thickness of the collecting chamber is equal to that of the arc-shaped notch and is in the same horizontal plane, the upper surface of the collecting chamber contacts the lower surface of the reaction shell with good sealing performance, and the lower surface of the reaction shell is flush with the upper surface of the arc-shaped notch.

Preferably, the driving bevel gear is meshed with a ring gear, and the ring gear is meshed with a plurality of transmission gears.

Preferably, the transmission rod is rotatably connected to the mounting hole, and the transmission rod is rotatably connected to the mounting cavity.

Preferably, the outer end of the rectangular column is fixedly connected to the reaction shell, and the outer end of the support column is fixedly connected to the reaction shell.

Preferably, the upper surface of the sealing plate is a conical surface, and the sealing plate is adapted to the through hole.

The beneficial effects of the present invention are as follows:

1. The present invention drives the motor to work intermittently, and drives the connecting shaft to rotate through the transmission. The rotation of the connecting shaft will drive the rotating sleeve and the paddle on the curved surface of the rotating sleeve to rotate. The rotation of the paddle will drive the waste liquid and the acid leaching solution in the middle of the reaction shell to surge upward, and drive the waste liquid and the acid leaching solution at the edge of the reaction shell to surge downward to form a cycle, so that the waste liquid and the acid leaching solution in a stratified state are fully mixed and contacted, and the rate of acid leaching is accelerated. When the paddle is not working, a large amount of solid particles will be leached during the acid leaching process, and will fall on the upper surface of the sealing plate, and then slide into the inside of the collecting chamber, thereby solving the problem that the silicon particles precipitated at the bottom are driven into the solution again, collide with the agitator and are easily broken, thereby reducing the quality of the leached silicon.

2. When the paddle plate is not working, a large amount of solid particles will be leached during the acid leaching process, and will fall on the upper surface of the sealing plate, and then slide into the interior of the collection chamber. The paddle plate will not rotate to drive the silicon particles that have settled at the bottom into the solution again, making full use of the intermittent time to collect the silicon particles, greatly shortening the time to wait for the silicon particles to be leached after the existing method is completely reacted. Moreover, the existing method is to remove the upper solution to obtain the silicon particles at the bottom, which is a relatively cumbersome method. The present invention isolates the solution layer from the bottom silicon particles, and the bottom silicon particles can be directly taken out, which is more convenient and quick.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of the structure appearance of the present invention;

FIG2 is a half-section schematic diagram of a base of the present invention;

FIG3 is a half-section schematic diagram of a reaction shell of the present invention;

FIG4 is an enlarged schematic diagram of point A in FIG3 of the present invention;

FIG. 5 is a schematic diagram of the reaction shell structure of the present invention.

In the figure: 1. base; 2. arc-shaped notch; 3. connecting plate; 4. lower connecting column; 5. collecting chamber; 6. pull ring; 7. electromagnet; 8. driving motor; 9. driving bevel gear; 10. upper connecting column; 11. cover plate; 12. reaction shell; 13. through hole; 14. round sleeve; 15. tension spring; 16. sealing plate; 17. permanent magnet; 18. gear ring; 19. mounting hole; 20. tumbling mechanism; 201. supporting column; 202. connecting shaft; 203. rectangular column; 204. mounting chamber; 205. rotating gear; 206. driven gear; 207. transmission rod; 208. transmission gear; 209. rotating sleeve; 2010. dial plate.

DETAILED DESCRIPTION

The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

As shown in Figures 1 to 5, an embodiment of the present invention provides a waste liquid recovery system in a wafer rod multi-wire cutting process, including a base 1, an arc-shaped notch 2 is opened on the left side of the base 1, a connecting plate 3 is fixedly connected to the front of the base 1, a lower connecting column 4 is fixedly connected to the lower surface of the connecting plate 3, a collecting chamber 5 is rotatably connected to the middle of the lower connecting column 4, a pull ring 6 is fixedly connected to the right side of the curved surface of the collecting chamber 5, an electromagnet 7 is fixedly installed at the bottom of the collecting chamber 5, a driving motor 8 is fixedly installed at the middle of the connecting plate 3, a driving bevel gear 9 is fixedly installed on the output shaft of the driving motor 8, an upper connecting column 10 is fixedly connected to the top of the connecting plate 3, a cover plate 11 is rotatably connected to the middle of the upper connecting column 10, a reaction shell 12 is fixedly connected to the top of the base 1, a through hole 13 is opened at the bottom of the reaction shell 12, and a plurality of circumferentially equidistantly arranged gears are fixedly connected to the bottom of the through hole 13 A circular sleeve 14 is arranged in series, and a tension spring 15 is fixedly connected inside the circular sleeve 14. A sealing plate 16 is fixedly connected to the lower end of multiple tension springs 15, and a permanent magnet 17 is fixedly installed on the bottom surface of the sealing plate 16. A gear ring 18 is rotatably installed on the outer curved surface of the reaction shell 12, and a plurality of circumferentially arranged mounting holes 19 are opened in the middle of the curved surface of the reaction shell 12. A plurality of circumferentially arranged tumbling mechanisms 20 are fixedly connected to the middle of the inner curved surface of the reaction shell 12, and its function is to pour an appropriate amount of waste liquid generated in the multi-wire cutting process of the wafer rod into the interior of the reaction shell 12. During the process, the electromagnet 7 is energized to generate a magnetic field that attracts the permanent magnet 17, thereby driving the permanent magnet 17 and the sealing plate 16 to move downward, and making the tension spring 15 in a stretched state. The downward movement of the sealing plate 16 will cause a gap between the sealing plate 16 and the through hole 13 to be no longer sealed, and the waste liquid will enter the interior of the collection chamber 5.

The tumbling mechanism 20 includes two support columns 201, the inner ends of the two support columns 201 are rotatably mounted with a connecting shaft 202, the middle part of the connecting shaft 202 is rotatably mounted with a rectangular column 203, the interior of the rectangular column 203 is provided with an installation cavity 204, the interior of the installation cavity 204 is provided with a rotating gear 205, the outer side of the rotating gear 205 is meshed with a driven gear 206, the middle part of the driven gear 206 is fixedly connected with a transmission rod 207, the outer end of the transmission rod 207 is fixedly mounted with a transmission gear 208, a rotating sleeve 209 fixedly connected to the connecting shaft 202 is provided between the rectangular column 203 and the two support columns 201, a plurality of circumferentially arranged dial plates 2010 are fixedly connected to the curved surface of the rotating sleeve 209, the outer end of the rectangular column 203 is fixedly connected to the reaction shell 12, and the outer end of the support column 201 is fixedly connected to the reaction shell 1 2 is fixedly connected, and its function is that the present invention drives the connecting shaft 202 to rotate through the drive motor 8 intermittently, and the rotation of the connecting shaft 202 will drive the rotating sleeve 209 and the dial plate 2010 on the curved surface of the rotating sleeve 209 to rotate, and the rotation of the dial plate 2010 will drive the waste liquid and the acid leaching solution in the middle of the reaction shell 12 to surge upward, and drive the waste liquid and the acid leaching solution at the edge of the reaction shell 12 to surge downward to form a cycle, so that the waste liquid and the acid leaching solution in the stratified state are fully mixed and contacted, and the acid leaching rate is accelerated. When the dial plate 2010 is not working, a large amount of solid particles will be leached during the acid leaching process, and will fall on the upper surface of the sealing plate 16, and then slide into the inside of the collecting chamber 5, thereby solving the problem that the silicon particles precipitated at the bottom are driven into the solution again, collide with the agitator and are easily broken, thereby reducing the quality of the leached silicon.

Among them, the thickness of the collecting chamber 5 is equal to the thickness of the arc-shaped notch 2 and is on the same horizontal plane. The upper surface of the collecting chamber 5 contacts the lower surface of the reaction shell 12 and has good sealing performance. The lower surface of the reaction shell 12 is flush with the upper surface of the arc-shaped notch 2. Its function is that after a period of acid leaching, all solid particles are leached out and collected inside the collecting chamber 5. The electromagnet 7 is powered off, and the tension spring 15 pulls the sealing plate 16 to move upward. The sealing plate 16 will contact and seal with the through hole 13, and the pull ring 6 is pulled to rotate the collecting chamber 5, thereby obtaining the solid particles inside the collecting chamber 5.

Among them, the driving bevel gear 9 is meshed with the ring gear 18, and the ring gear 18 is meshed with multiple transmission gears 208. The transmission rod 207 is rotatably connected with the mounting hole 19. The transmission rod 207 is rotatably connected with the mounting cavity 204. Its function is that the driving motor 8 works intermittently to drive the driving bevel gear 9 to rotate, and the driving bevel gear 9 drives the rotation of the meshing ring gear 18 above. The rotation of the ring gear 18 will drive the transmission gear 208 below to rotate, and the rotation of the transmission gear 208 will drive the transmission rod 207 and the driven gear 206 to rotate. The rotation of the driven gear 206 will drive the rotating gear 205 and the connecting shaft 202 to rotate. The rotation of the connecting shaft 202 will drive the rotating sleeve 209 and the dial plate 2010 on the curved surface of the rotating sleeve 209 to rotate. The rotation of the dial plate 2010 will drive the waste liquid and the acid leaching solution in the middle of the reaction shell 12 to surge upward, and drive the waste liquid and the acid leaching solution at the edge of the reaction shell 12 to surge downward to form a cycle, so that the waste liquid and the acid leaching solution in the stratified state are fully mixed and contacted, and the acid leaching rate is accelerated.

Among them, the upper surface of the sealing plate 16 is a conical surface, and the sealing plate 16 is adapted to the through hole 13. Its function is that when the paddle 2010 is not working, a large amount of solid particles will be leached during the acid leaching process, and will fall on the upper surface of the sealing plate 16, and then slide into the interior of the collecting chamber 5. The paddle 2010 rotates and the silicon particles that will not be precipitated at the bottom are driven into the solution again, making full use of the intermittent time to collect the silicon particles, greatly shortening the time for waiting for the silicon particles to be leached after the existing method is completely reacted.

Working principle:

Before the present invention is used, the collecting chamber 5 is located directly below the reaction shell 12 and the sealing performance therebetween is good, the cover plate 11 is not located above the reaction shell 12, the tension spring 15 is in the shortest state, and the sealing plate 16 is pulled deep into the through hole 13;

When the present invention is used, an appropriate amount of waste liquid generated in the wafer rod multi-wire cutting process is poured into the interior of the reaction shell 12. During the process, the electromagnet 7 is energized to generate a magnetic field that attracts the permanent magnet 17, thereby driving the permanent magnet 17 and the sealing plate 16 to move downward, and the tension spring 15 is in a stretched state. The downward movement of the sealing plate 16 will cause a gap to be generated between the sealing plate 16 and the through hole 13, which is no longer sealed, and the waste liquid will enter the interior of the collection chamber 5;

An appropriate amount of pickling solution is added to the interior of the reaction shell 12, and the cover plate 11 is rotated to cover the top of the reaction shell 12. The driving motor 8 works intermittently to drive the driving bevel gear 9 to rotate, and the driving bevel gear 9 drives the rotation of the meshing ring gear 18 above. The rotation of the ring gear 18 drives the transmission gear 208 below to rotate, and the rotation of the transmission gear 208 drives the transmission rod 207 and the driven gear 206 to rotate. The rotation of the driven gear 206 drives the rotating gear 205 and the connecting shaft 202 to rotate. The rotation of the connecting shaft 202 drives the rotating sleeve 209 and the dial plate 2010 on the curved surface of the rotating sleeve 209 to rotate. The rotation of the dial plate 2010 drives the waste liquid and the pickling solution in the middle of the reaction shell 12 to surge upward, and drives the waste liquid and the pickling solution at the edge of the reaction shell 12 to surge downward from A circulation is formed to fully mix and contact the waste liquid in a stratified state with the acid leaching solution, thereby accelerating the rate of acid leaching. A large amount of solid particles will be leached during the acid leaching process. When the paddle 2010 is not working, the solid particles will fall on the upper surface of the sealing plate 16, and then slide into the interior of the collecting chamber 5. When the paddle 2010 is working, the paddle 2010 cannot drive the solid particles inside the collecting chamber 5 to surge, so that the solid particles are stored in the collecting chamber 5. After a period of acid leaching, all the solid particles are leached out and collected in the collecting chamber 5. The electromagnet 7 is powered off, and the tension spring 15 pulls the sealing plate 16 to move upward. The sealing plate 16 will contact and seal the through hole 13, and the pull ring 6 is pulled to rotate the collecting chamber 5, thereby obtaining the solid particles inside the collecting chamber 5.

It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims (7)

1. The utility model provides a waste liquid recovery system in multi-wire saw of wafer stick technology, includes base (1), arc breach (2) have been seted up in the left side of base (1), its characterized in that: the utility model discloses a sealing device for the reaction of the electric motor, which comprises a base (1), a connecting plate (3) fixedly connected with the front of base (1), lower fixed surface of connecting plate (3) is connected with lower spliced pole (4), the middle part of lower spliced pole (4) is rotated and is connected with collection chamber (5), the curved surface of collection chamber (5) has right side fixedly connected with pull ring (6), the bottom fixed mounting of collection chamber (5) has electro-magnet (7), the middle part fixed mounting of connecting plate (3) has driving motor (8), the output shaft fixed mounting of driving motor (8) has drive bevel gear (9), the top fixedly connected with of connecting plate (3) goes up spliced pole (10), the middle part rotation of going up spliced pole (10) is connected with apron (11), the top fixedly connected with reaction shell (12) of base (1), through-hole (13) have been seted up to the bottom of reaction shell (12), the bottom fixedly connected with a plurality of circumference equidistance range round cover (14) of through-hole (13), the inside fixedly connected with extension spring (15) of round cover (14), a plurality of extension spring (15) lower extreme (16) are connected with permanent magnet (16) and sealing plate (16) are installed outside the curved surface (16), a plurality of circumferentially arranged mounting holes (19) are formed in the middle of the curved surface of the reaction shell (12), and a plurality of circumferentially arranged kick mechanisms (20) are fixedly connected to the middle of the inner curved surface of the reaction shell (12).

2. The waste liquid recovery system in a multi-wire cutting process of a wafer bar according to claim 1, wherein: the utility model provides a kick mechanism (20) including two support column (201), two connecting axle (202) are installed in the rotation of the inner of support column (201), rectangular post (203) are installed in the middle part rotation of connecting axle (202), install chamber (204) have been seted up to the inside of rectangular post (203), the inside of installing chamber (204) is provided with rotation gear (205), the outside meshing of rotation gear (205) has driven gear (206), the middle part fixedly connected with transfer line (207) of driven gear (206), the outer fixed mounting of transfer line (207) has drive gear (208), all be provided with between rectangular post (203) and two support column (201) with connecting axle (202) fixed connection's rotating sleeve (209), curved surface fixedly connected with of rotating sleeve (209) dials board (2010) of a plurality of circumference ranges.

3. The waste liquid recovery system in a multi-wire cutting process of a wafer bar according to claim 2, wherein: the thickness of collecting cavity (5) equals and is in same horizontal plane with the thickness value of arc breach (2), the upper surface of collecting cavity (5) and the lower surface contact and the leakproofness of reaction shell (12) are good, the lower surface of reaction shell (12) and the upper surface parallel and level of arc breach (2).

4. A waste liquid recovery system in a multi-wire sawing process for wafer bars according to claim 3, wherein: the drive bevel gear (9) is meshed with a gear ring (18), and the gear ring (18) is meshed with a plurality of transmission gears (208).

5. The waste liquid recovery system in a multi-wire sawing process for wafer bars according to claim 4, wherein: the transmission rod (207) is rotationally connected with the mounting hole (19), and the transmission rod (207) is rotationally connected with the mounting cavity (204).

6. The waste liquid recovery system in a multi-wire sawing process for wafer bars according to claim 5, wherein: the outer end of the rectangular column (203) is fixedly connected with the reaction shell (12), and the outer end of the support column (201) is fixedly connected with the reaction shell (12).

7. The waste liquid recovery system in a multi-wire sawing process for wafer bars according to claim 6, wherein: the upper surface of the sealing plate (16) is a conical surface, and the sealing plate (16) is matched with the through hole (13).