CN118770930A - Photonic chip detection mechanism and detection machine - Google Patents

Abstract

The present invention discloses a photon chip detection mechanism and a detection machine, which relates to the field of chip detection technology, and also includes a transfer seat, the transfer seat is installed on the table of the detection table, and a support plate is vertically slidably installed in the transfer seat, a chip placement tray is embedded on the top of the support plate, and an adjustment fixture is installed between the support plate and the chip placement tray, a frame is fixed to the top of the detection table, and a driving member and a positioning lifting frame that is unidirectionally transmitted with the driving member are installed in the frame, and a detection head is installed on the top of the frame. The present invention transfers the support plate to the frame by setting a transfer seat. When the support plate is located on the positioning lifting frame and pushes the positioning lifting frame, the positioning lifting frame is forced to be connected to the driving member in transmission, and the driving member is used to drive the positioning lifting frame to rise smoothly. During the rising process, the adjustment fixture firmly fixes the chip placement tray and the support tray to prevent the chip placement tray from shaking and loosening, and the detection head detects the chip surface.

Description

Photonic chip detection mechanism and detection machine

Technical Field

The present invention relates to the technical field of chip detection, and in particular to a photon chip detection mechanism and a detection machine.

Background Art

Photonic chips use light waves (electromagnetic waves) as a carrier for information transmission or data calculation. They generally rely on dielectric optical waveguides in integrated optics or silicon-based optoelectronics to transmit guided-mode optical signals, integrating the modulation, transmission, and demodulation of optical and electrical signals on the same substrate or chip. Photonic chips need to undergo multiple complex tests before leaving the factory. One step is to observe the physical characteristics of the chip to determine whether the quality and performance of the chip meet the requirements. The main physical detection methods include optical microscopy, scanning electron microscopy, atomic force microscopy, X-ray diffraction, etc. These detection methods are used to observe the morphology, structure, and defects of the chip surface.

The patent publication number of the existing patent application is: CN112114247B, and the publication date is March 29, 2024. The name of the patent is "A chip detection device". The patent includes a base and a placement seat. A positioning plate is installed inside the base, and a workbench is placed above the positioning plate. A support block is welded to the bottom of the workbench, and a card slot is provided on the left and right surfaces of the support block. A positioning rod is provided on the outside of the card slot, and a card seat is slidably connected to the outside of the positioning rod. A dust cover is provided above the card seat, and a turntable is installed on both sides of the left and right sides of the workbench. The chip detection device is provided with a positioning plate, and the positioning plate and the support block cooperate with each other to position and guide the moving direction of the support block. The setting between the belt and the rotating shaft can use the rotational relationship between the two to move the support block by pulling the belt, so that it is convenient to take the workbench out of the dust cover, thereby taking out the chip to be tested, which is beneficial to prevent dust from falling into the inside of the dust cover.

The above application has shortcomings. In the general detection process, the chip needs to be raised to a height that can be detected by a microscope. Generally, the lifting and lowering are driven by a driving member, and the lifting and lowering speeds are the same. If the speed is too fast, the accuracy of the detection during the lifting cannot be guaranteed. If the speed is too slow, the time for descending and resetting is longer, affecting the overall detection effect. In addition, staff are generally required to fix the chip placement plate, otherwise its stability during the lifting process cannot be guaranteed.

Summary of the invention

The purpose of the present invention is to provide a photonic chip detection mechanism and a detection machine to solve the deficiencies in the above-mentioned prior art.

In order to achieve the above object, the present invention provides the following technical solutions:

A photon chip detection mechanism comprises a detection platform and a transfer seat, wherein the transfer seat is installed on the table surface of the detection platform, and a supporting plate is vertically slidably installed in the transfer seat, a chip placement tray is embedded in the top of the supporting plate, an adjustment fixture is installed between the supporting plate and the chip placement tray, and a frame is fixed to the top of the detection platform, and a driving member and a positioning lifting frame that is unidirectionally transmitted with the driving member are installed in the frame, and a detection head is installed on the top of the frame. When the transfer seat pushes the positioning lifting frame with the supporting plate, the driving member drives the positioning lifting frame to rise, and the adjusting fixture fixes the chip placement tray on the supporting plate. When the positioning lifting frame is lifted to the detection height, it is reset under the action of gravity, and the adjusting fixture releases the chip placement tray.

Preferably, a linear motor is installed between the transfer seat and the detection platform, plug rods are fixedly connected to both sides of the support plate, and through grooves matching the plug rods are vertically opened on both sides of the transfer seat.

Preferably, a receiving groove matching the chip placement plate is formed on the top surface of the supporting plate, and openings are formed on both sides of the inner wall of the receiving groove, and the openings are communicated with the receiving groove.

Preferably, the adjustment fixture comprises a clamping frame elastically mounted on the inner side of the opening, and an abutting frame is fixedly connected to the inner side wall of the transfer seat below the clamping frame, and the abutting frame is inclined against the clamping frame.

Preferably, the driving member includes a connecting frame slidably installed on the top of the frame, a screw rod threadably connected to the connecting frame is rotatably installed in the frame, an electric shaft rod is rotatably installed in the connecting frame, driving gears are symmetrically installed on the electric shaft rod, and a guide plate is symmetrically installed in the frame, and a guide groove for the electric shaft rod to translate is opened on the guide plate.

Preferably, a slide groove is vertically opened on the outer side of the positioning lifting frame, a plug-in slider is slidably installed in the slide groove, a guide rail matching the plug-in slider is horizontally opened on the guide plate, a top spring is fixedly connected between one side of the inner wall of the guide rail and the plug-in slider, a transmission rack matching the driving gear is fixedly connected to one side of the positioning lifting frame, a first cam is provided on the outer fixed sleeve of the screw rod, and the top of the positioning lifting frame abuts and cooperates with the protrusion of the first cam.

Preferably, the outer fixed sleeve of the screw rod is provided with a second cam, and the raised portion of the second cam is in the opposite direction to the raised portion of the first cam, a push rod is vertically slidably installed on the outer side of the guide plate, a wedge-shaped stop block is fixedly connected to the end of the plug-in slider, the bottom of the push rod is against the wedge-shaped stop block, and the top is against the raised portion of the second cam.

Preferably, a pair of dust covers are slidably installed inside the frame, the detection head is located between the pair of dust covers, an adjusting gear ring is rotatably sleeved outside the detection head, and the two dust covers are respectively fixed with adjusting racks that mesh with the adjusting gear rings, and a connecting bracket is fixedly connected to the bottom of one of the dust covers, and the connecting bracket is slidably connected to the two positioning lifting frames.

Preferably, a stopper is fixedly connected to the bottom of the inner wall of the positioning lifting frame, and a slot matching the insertion rod is provided in the stopper.

A detection machine comprises the above-mentioned photonic chip detection mechanism.

In the above technical scheme, a transfer seat is provided to transfer the support plate to the rack. When the support plate is located on the positioning lifting frame and the positioning lifting frame is pushed, the positioning lifting frame is forced to be connected to the driving member for transmission. The driving member is used to drive the positioning lifting frame to rise smoothly. During the rising process, the clamp is adjusted to firmly fix the chip placement tray and the support tray to prevent the chip placement tray from shaking and loosening. Then, after the positioning lifting frame lifts the support plate to a height that the detection head can detect, the detection head detects the surface of the chip. At the same time, the positioning lifting frame will disconnect the transmission of the driving member from it after reaching the detection height, so that the reset and descent of the positioning lifting frame depends on its own gravity, thereby realizing rapid reset. After the complete reset, the adjustment clamp will also release the chip placement tray. When the transfer seat sends the support plate out of the rack, it is convenient to grab the chip placement tray, thereby improving the efficiency of detection.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

FIG1 is a schematic diagram of the overall structure of a photon chip detection mechanism of the present invention;

FIG2 is a bottom view of the overall structure of a photon chip detection mechanism of the present invention;

FIG3 is a side sectional view of a photonic chip detection mechanism of the present invention;

FIG4 is an enlarged view of point A of a photonic chip detection mechanism of the present invention;

FIG5 is a schematic diagram of the internal structure of a frame in a photon chip detection mechanism of the present invention;

FIG6 is a schematic structural diagram of a supporting plate and a chip placement plate in a photon chip detection mechanism of the present invention;

FIG7 is a schematic diagram of the internal structure of a transfer seat and a support plate in an adjustment assembly in a photon chip detection mechanism of the present invention;

FIG8 is an enlarged view of point B of a photon chip detection mechanism of the present invention;

FIG. 9 is a schematic diagram of the structure of a driving component in a photonic chip detection mechanism of the present invention.

Description of reference numerals:

1. Test table; 101. Linear motor; 2. Transfer seat; 201. Support plate; 202. Chip placement plate; 203. Insertion rod; 204. Through slot; 205. Accommodation slot; 206. Opening; 3. Adjustment fixture; 301. Card holder; 302. Abutment frame; 303. Positioning rod; 304. Compression spring; 4. Frame; 401. Guide plate; 402. Guide slot; 403. Guide rail; 404. Top spring; 405. Top rod; 406. Guide Rod; 5. Driving member; 501. Connecting frame; 502. Screw rod; 503. Electric shaft rod; 504. Driving gear; 505. First cam; 506. Second cam; 6. Positioning lifting frame; 601. Slide groove; 602. Plug-in slider; 603. Transmission rack; 604. Wedge-shaped block; 605. Block; 606. Slot; 7. Detection head; 701. Adjusting gear ring; 8. Dust cover; 801. Adjusting rack; 802. Connecting bracket.

DETAILED DESCRIPTION

In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

Please refer to Figures 1-9. A photonic chip detection mechanism provided by an embodiment of the present invention includes a detection platform 1 and a transfer seat 2. The transfer seat 2 is installed on the table top of the detection platform 1, and a supporting plate 201 is vertically slidably installed in the transfer seat 2. A chip placement tray 202 is embedded on the top of the supporting plate 201. An adjustment fixture 3 and a frame 4 are installed between the supporting plate 201 and the chip placement tray 202. The frame 4 is fixed to the top of the detection platform 1, and a driving member 5 and a positioning lifting frame 6 that is unidirectionally driven by the driving member 5 are installed in the frame 4. A detection head 7 is installed on the top of the frame 4. When the transfer seat 2 pushes the positioning lifting frame 6 with the supporting plate 201, the driving member 5 drives the positioning lifting frame 6 to lift, and the adjusting fixture 3 fixes the chip placement tray 202 on the supporting plate 201. When the positioning lifting frame 6 is lifted to the detection height, it is reset under the action of gravity, and the adjusting fixture 3 releases the chip placement tray 202.

Specifically, the transfer seat 2 moves back and forth on the detection table 1 to send the chip placement tray 202 on the supporting plate 201 into the rack 4, so as to facilitate the detection head 7 to detect the chips on the chip placement tray 202. Multiple chips are respectively fixed in the chip placement tray 202, and the chip placement tray 202 is embedded in the supporting plate 201. The supporting plate 201 can move up and down in the transfer seat 2. When the supporting plate 201 is at the bottom of the up and down movable range, the adjustment clamp 3 releases the chip placement tray 202. At this time, the chip placement tray 202 can be easily placed on the supporting plate 201 or removed from the supporting plate 201. When the supporting plate 201 leaves the bottom of the up and down movable range, the adjustment clamp 3 will firmly fix the chip placement tray 202 on the supporting plate 201. Since the supporting plate 201 can move up and down, when the transfer seat 2 enters the rack 4 with the supporting plate 201, the position of the transfer seat 2 is not changed. The positioning lifting frame 6 will be adjusted again to always press the positioning lifting frame 6 against the driving member 5, so that transmission is carried out between the driving member 5 and the positioning lifting frame 6, and then the driving member 5 is used to drive the positioning lifting frame 6 to slowly lift vertically, and the supporting plate 201 is moved up in the transfer seat 2 by lifting the positioning lifting frame 6, and the adjusting fixture 3 is always clamped on the chip placement disk 202 on the supporting plate 201 to prevent the chip placement disk 202 from loosening and shaking during the lifting or lowering process of the supporting plate 201. When the positioning lifting frame 6 reaches the detection height with the chip, after the detection head 7 has completed the detection, the transmission between the driving member 5 and the positioning lifting frame 6 is cancelled, so that the positioning lifting frame 6 is quickly moved down and reset under the action of its own gravity and the gravity of the supporting plate 201. At the same time, after the supporting plate 201 is completely reset to the previous height, the adjusting fixture 3 will release the chip placement disk 202 again, and then the transfer seat 2 will send the supporting plate 201 back to the outside of the frame 4 to facilitate the next step.

The positioning lifting frame 6 is driven by the driving member 5 to smoothly rise up, and during the rising process, the adjusting fixture 3 firmly fixes the chip placement tray 202 and the supporting tray to prevent the chip placement tray 202 from shaking and loosening. Then, after the positioning lifting frame 6 lifts the supporting plate 201 to a height that the detection head 7 can detect, the detection head 7 detects the surface of the chip. At the same time, after the positioning lifting frame 6 reaches the detection height, the driving member 5 disconnects the transmission from the positioning lifting frame 6, so that the positioning lifting frame 6 can be reset and descended by its own gravity, thereby realizing rapid reset. After the complete reset, the adjusting fixture 3 will also release the chip placement tray 202. When the transfer seat 2 sends the supporting plate 201 out of the rack 4, it is convenient to grab the chip placement tray 202, thereby improving the detection efficiency.

In a further embodiment of the present invention, a linear motor 101 is installed between the transfer seat 2 and the detection table 1, and a plug rod 203 is fixedly connected to both sides of the support plate 201. A through slot 204 matching the plug rod 203 is vertically opened on both sides of the transfer seat 2. Specifically, the transfer seat 2 is driven by the linear motor 101 to move back and forth in and out of the frame 4, and quickly and smoothly brings the support plate 201 to the corresponding position. Although the plug rod 203 on the support plate 201 is placed at the bottom of the through slot 204 at this time, the adjustment fixture 3 does not clamp the chip placement plate 202, but the movement direction of the transfer seat 2 is horizontal. As long as the chip placement plate 202 is normally embedded in the support plate 201, it will not fall off or shake. Since the transfer seat 2 has a through slot 204 for limiting the left and right movement of the plug rod 203, when the positioning lifting frame 6 lifts the support plate 201, as long as the position of the transfer seat 2 does not change, the support plate 201 can move vertically upward to avoid the chip position offset.

In a further embodiment of the present invention, a receiving groove 205 matching the chip placement tray 202 is provided on the top surface of the support plate 201, and openings 206 are provided on both sides of the inner wall of the receiving groove 205, and the opening 206 is connected to the receiving groove 205, and one side of the opening 206 extends to the bottom of the chip placement tray 202. Specifically, before testing, the chip placement tray 202 with the chip installed is placed in the receiving groove 205 on the support plate 201, and the openings 206 reserved on both sides of the receiving groove 205 are provided to facilitate the staff to take the chip placement tray 202.

In a further embodiment of the present invention, the adjusting fixture 3 includes a clamping frame 301 elastically mounted on the inner side of the opening 206, a positioning rod 303 penetrating the supporting plate 201 is fixedly connected to one side of the clamping frame 301, a compression spring 304 is connected to the outer surface of the positioning rod 303, an abutment frame 302 is fixedly connected to the inner side wall of the transfer seat 2 below the clamping frame 301, and the abutment frame 302 is inclined against the clamping frame 301. Specifically, when the supporting plate 201 is not lifted, the clamping frame 301 is pushed away by the abutment frame 302 in the moving seat, so that The distance between the clamping frame 301 and the chip placement tray 202 becomes larger. At this time, the clamping frame 301 does not clamp and fix the chip placement tray 202, and the chip placement tray 202 can be easily taken and placed. When the supporting plate 201 is lifted, the height of the abutting frame 302 cannot be adjusted together with it, so that the clamping frame 301 is no longer blocked by the abutting frame 302, and the clamping frame 301 clamps the chip placement tray 202 under the action of the compression spring 304, so that the connection between the chip placement tray 202 and the supporting plate 201 is more secure.

In a further embodiment of the present invention, the driving member 5 includes a connecting frame 501 slidably mounted on the top of the frame 4, a screw rod 502 threadedly connected to the connecting frame 501 is rotatably mounted in the frame 4, a guide rod 406 penetratingly connected to the connecting frame 501 is also mounted in the frame 4, an electric shaft 503 is rotatably mounted in the connecting frame 501, a driving gear 504 is symmetrically mounted on the electric shaft 503, a guide plate 401 is symmetrically mounted in the frame 4, and a guide groove for the electric shaft 503 to translate is provided on the guide plate 401 402, specifically, the electric shaft 503 is driven to rotate by the motor. After the positioning lifting frame 6 and the driving gear 504 on the electric shaft 503 are transmitted, the positioning lifting frame 6 is driven to move up smoothly by the rotation of the electric shaft 503. The position of the connecting frame 501 can also be adjusted by rotating the screw rod 502, so that after the positioning lifting frame 6 is lifted to a corresponding height, the position of the driving gear 504 is adjusted to cancel the transmission coordination with the positioning lifting frame 6, so that the positioning lifting frame 6 can descend by itself.

In a further embodiment of the present invention, a slide groove 601 is vertically provided on the outer side of the positioning lifting frame 6, a plug-in slider 602 is slidably installed in the slide groove 601, a guide rail 403 matching the plug-in slider 602 is horizontally provided on the guide plate 401, a top spring 404 is fixedly connected between one side of the inner wall of the guide rail 403 and the plug-in slider 602, a transmission rack 603 matching the driving gear 504 is fixedly connected to one side of the positioning lifting frame 6, a first cam 505 is fixedly provided on the outer fixed sleeve of the screw rod 502, and the top of the positioning lifting frame 6 The first cam 505 is abutted against the protruding part of the first cam 505. Specifically, the plug-in slider 602 is respectively inserted into the slide groove 601 of the positioning lifting frame 6 and the guide rail 403 on the guide plate 401, so that when the transfer seat 2 carries the supporting plate 201 to squeeze the positioning lifting frame 6, the positioning lifting frame 6 can move horizontally. When the driving gear 504 on the electric shaft 503 and the transmission rack 603 on the positioning lifting frame 6 are engaged, the positioning lifting frame 6 can rise vertically, and when the positioning lifting frame 6 moves up to a suitable height, the chip detection is completed. Afterwards, its top will also push up the first cam 505 on the screw rod 502, so that the screw rod 502 rotates at a suitable angle, allowing the connecting frame 501 to move away from the positioning lifting frame 6, so that the driving gear 504 on the electric shaft 503 and the transmission rack 603 on the positioning lifting frame 6 are separated. After there is no external transmission source, the positioning lifting frame 6 quickly descends under the action of gravity. When it is about to descend and reset, the clamping frame 301 abuts against the abutting frame 302 again, allowing the clamping frame 301 to release the chip. The plate is placed, and finally the transfer seat 2 sends the supporting plate 201 and the chip placing plate placed on the supporting plate 201 out of the rack 4. Since the adjustment clamp 3 between the chip placing plate and the supporting plate 201 has been loosened, the staff can easily remove the chip placing plate to proceed to the next process. It is more convenient to use and does not require manual fixing or releasing. When the transfer seat 2 is moved out, the top spring 404 will push the plug-in slider 602 in the direction of the transfer seat 2 moving outward, so that the positioning lifting frame 6 moves to its previous position in the rack 4.

In a further embodiment of the present invention, a second cam 506 is fixedly sleeved outside the screw rod 502, and the raised portion of the second cam 506 is in the opposite direction to the raised portion of the first cam 505. A push rod 405 is vertically slidably installed on the outer side of the guide plate 401, and a wedge-shaped stop block 604 is fixedly connected to the end of the plug-in slider 602. The bottom of the push rod 405 abuts against the wedge-shaped stop block 604, and the top abuts against the raised portion of the second cam 506. Specifically, when the positioning lifting frame 6 is lowered and reset, the plug-in slider 60 In the process of being pushed by the push spring 404, the wedge-shaped stopper 604 pushes up the push rod 405, and the push rod 405 pushes up the raised part of the second cam 506, so that the lead screw 502 rotates in the other direction by the same angle, so that the connecting frame 501 and the electric shaft 503 are reset, and after the next chip placement tray 202 is placed on the supporting plate 201, the positioning lifting frame 6 is pushed to the same position and can still transmit with the driving member 5, so as to realize continuous detection and improve the continuity of detection.

In a further embodiment of the present invention, a pair of dust covers 8 are slidably installed inside the frame 4, and the detection head 7 is located between the pair of dust covers 8. An adjusting tooth ring 701 is rotatably sleeved on the outside of the detection head 7, and an adjusting rack 801 meshing with the adjusting tooth ring 701 is fixed on the two dust covers 8, respectively. A connecting bracket 802 is fixedly connected to the bottom of one of the dust covers 8, and the connecting bracket 802 is slidably connected to the two positioning lifting frames 6, respectively. Specifically, when the positioning lifting frame 6 is pushed inward, the positioning lifting frame 6 will push the connecting bracket 802, so that the dust cover 8 connected to the connecting bracket 802 moves together, and the dust cover 8 drives the adjusting tooth ring 701 to rotate through the adjusting rack 801, so that the other dust cover 8 moves outward synchronously, so that the two dust covers 8 are opened, so that the detection head 7 can work normally after the chip placement tray 202 enters the frame 4, and when the positioning lifting frame 6 is reset, one of the dust covers 8 brings the other dust cover 8 close to each other, so that the lens of the detection head 7 is protected and surrounded, reducing dust accumulation.

In a further embodiment of the present invention, a stopper 605 is fixedly connected to the bottom of the inner wall of the positioning lifting frame 6, and a slot 606 compatible with the insertion rod 203 is opened in the stopper 605. Specifically, when the transfer seat 2 brings the support plate 201 into the frame 4, the insertion rods 203 on both sides of the support plate 201 will be respectively inserted into the slots 606 in the stopper 605. At this time, the height of the support plate 201 is limited by the positioning lifting frame 6, unlike before when it can be lifted freely, so that the positioning lifting frame 6 can ensure the stability of the support plate 201 when lifting the support plate 201.

A detection machine comprises the above-mentioned photonic chip detection mechanism.

The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims (10)

1. A photonic chip detection mechanism, comprising a detection platform (1), characterized in that it also includes: A transfer seat (2), the transfer seat (2) being mounted on the table surface of the detection table (1), and a support plate (201) being vertically slidably mounted inside the transfer seat (2), a chip placement plate (202) being embedded on the top of the support plate (201), and an adjustment fixture (3) being mounted between the support plate (201) and the chip placement plate (202); A frame (4) is fixed on the top of the detection platform (1), and a driving member (5) and a positioning lifting frame (6) that transmits one-way transmission to the driving member (5) are installed in the frame (4), and a detection head (7) is installed on the top of the frame (4); When the transfer seat (2) pushes the positioning lifting frame (6) with the supporting plate (201), the driving member (5) drives the positioning lifting frame (6) to rise, and enables the adjusting fixture (3) to fix the chip placement plate (202) on the supporting plate (201); when the positioning lifting frame (6) is lifted to the detection height, it is reset under the action of gravity, and enables the adjusting fixture (3) to release the chip placement plate (202). 2. A photonic chip detection mechanism according to claim 1, characterized in that a linear motor (101) is installed between the transfer seat (2) and the detection platform (1), both sides of the support plate (201) are fixedly connected with an insertion rod (203), and both sides of the transfer seat (2) are vertically provided with a through groove (204) matching the insertion rod (203). 3. A photonic chip detection mechanism according to claim 1, characterized in that a receiving groove (205) matching the chip placement plate (202) is provided on the top surface of the supporting plate (201), and openings (206) are provided on both sides of the inner wall of the receiving groove (205), and the openings (206) are connected to the receiving groove (205). 4. A photonic chip detection mechanism according to claim 3, characterized in that the adjustment fixture (3) includes a clamping frame (301) elastically mounted on the inner side of the opening (206), and the inner wall of the transfer seat (2) is fixedly connected with an abutment frame (302) below the clamping frame (301), and the abutment frame (302) is inclined against the clamping frame (301). 5. A photonic chip detection mechanism according to claim 1, characterized in that the driving member (5) includes a connecting frame (501) slidably mounted on the top of a frame (4), a screw (502) threadedly connected to the connecting frame (501) is rotatably mounted in the frame (4), an electric shaft (503) is rotatably mounted in the connecting frame (501), a driving gear (504) is symmetrically mounted on the electric shaft (503), a guide plate (401) is symmetrically mounted in the frame (4), and a guide groove (402) is provided on the guide plate (401) for the electric shaft (503) to translate. 6. A photonic chip detection mechanism according to claim 5, characterized in that a slide groove (601) is vertically opened on the outer side of the positioning lifting frame (6), a plug-in slider (602) is slidably installed in the slide groove (601), a guide rail (403) matching the plug-in slider (602) is horizontally opened on the guide plate (401), a top spring (404) is fixedly connected between one side of the inner wall of the guide rail (403) and the plug-in slider (602), a transmission rack (603) matched with the driving gear (504) is fixedly connected to one side of the positioning lifting frame (6), a first cam (505) is fixedly provided on the outer fixed sleeve of the screw rod (502), and the top of the positioning lifting frame (6) is abutted and matched with the raised part of the first cam (505). 7. A photonic chip detection mechanism according to claim 6, characterized in that a second cam (506) is provided on the outer fixed sleeve of the screw rod (502), and the raised portion of the second cam (506) is in the opposite direction to the raised portion of the first cam (505), a push rod (405) is vertically slidably installed on the outer side of the guide plate (401), a wedge-shaped stop block (604) is fixedly connected to the end of the plug-in slider (602), the bottom of the push rod (405) is against the wedge-shaped stop block (604), and the top is against the raised portion of the second cam (506). 8. A photonic chip detection mechanism according to claim 1, characterized in that a pair of dust covers (8) are slidably installed inside the frame (4), the detection head (7) is located between the pair of dust covers (8), and an adjusting tooth ring (701) is rotatably sleeved outside the detection head (7), and adjustment racks (801) meshing with the adjusting tooth rings (701) are respectively fixed on the two dust covers (8), and a connecting bracket (802) is fixedly connected to the bottom of one of the dust covers (8), and the connecting bracket (802) is slidably connected to the two positioning lifting frames (6) respectively. 9. A photonic chip detection mechanism according to claim 2, characterized in that a stopper (605) is fixedly connected to the bottom of the inner wall of the positioning lifting frame (6), and a slot (606) adapted to the insertion rod (203) is provided in the stopper (605). 10. A detection machine, characterized in that it comprises the photonic chip detection mechanism according to any one of claims 1 to 9.