CN118752328A - A high-purity aluminum flat target grinding device - Google Patents

Abstract

The present invention discloses a high-purity aluminum flat target grinding processing device, which belongs to the field of target processing technology, and includes: a base, the top of which is provided with a controller and a fixing fixture for fixing the target; a grinding mechanism, which is used to realize the grinding processing of the target, and the grinding mechanism includes a lifting frame, a translation plate, a mounting frame, a side plate and a grinding wheel; a cooling mechanism, which is used to cool the target and the grinding wheel, and the cooling mechanism includes a compression box, a spray barrel, a connecting shaft and a rotating motor. The present invention can realize temperature monitoring of the grinding area during the grinding process through the cooperation of the grinding mechanism, the cooling mechanism and the infrared thermometer, and automatically adjust the grinding feed speed and cooling intensity according to the monitoring results to avoid deformation of the target or damage to the abrasive tool caused by overheating, and monitor the resistance of the abrasive tool through the pressure sensor, adjust the feed speed according to the resistance, and replace the abrasive tool in time.

Description

A high-purity aluminum flat target grinding device

Technical Field

The invention relates to the technical field of target material processing, and in particular to a high-purity aluminum flat target material grinding processing device.

Background Art

With the development of semiconductor industry, liquid crystal display technology and thin film technology, the demand for high-purity aluminum flat targets is growing. High-purity aluminum targets are widely used in sputtering and coating fields due to their excellent electrical conductivity, thermal conductivity and reflectivity.

High-purity aluminum flat target materials need to be ground during the processing. The current conventional grinding equipment uses a constant grinding feed speed and cooling effect for processing. Overheating of the grinding area will cause high-purity aluminum to oxidize at high temperatures, and overheating of the grinding wheel will also increase the wear rate and even cause damage. Therefore, we propose a high-purity aluminum flat target grinding device to solve this problem.

Summary of the invention

The purpose of the present invention is to provide a high-purity aluminum flat target grinding processing device to solve the problems raised in the above background technology.

In order to achieve the above object, the present invention adopts the following technical solutions:

A high-purity aluminum flat target grinding device, comprising:

A base, the top of which is provided with a controller and a fixing fixture for fixing the target material;

A grinding mechanism, used for realizing the grinding processing of the target material, the grinding mechanism comprises a lifting frame, a translation plate, a mounting frame, a side plate and a grinding wheel, the grinding wheel is rotatably mounted in the mounting frame, the translation plate is slidably connected in the lifting frame, and two screw rods are rotatably mounted in the lifting frame, the translation plate is threadedly sleeved on the outside of the two screw rods, and a driven gear is fixedly mounted on the screw rod, a driving motor is fixedly mounted on an inner wall of one side of the lifting frame, a driving gear is fixedly connected to the output shaft of the driving motor, and the two driven gears are meshed with the driving gear, a mounting rod is fixedly mounted on one side of the side plate, and an infrared thermometer for monitoring the temperature of the grinding area is fixedly connected to the bottom end of the mounting rod;

A cooling mechanism is used to cool the target material and the grinding wheel. The cooling mechanism includes a compression box, a spray barrel, a connecting shaft and a rotating motor. The driving motor and the infrared thermometer are electrically connected to the controller. When the infrared thermometer monitors that the temperature of the grinding area exceeds a threshold, the controller controls the output speed of the rotating motor to increase. The connecting shaft is rotatably connected to the top of the compression box, and the outer side of the spray barrel is connected to multiple nozzles.

Preferably, the two sides of the compression box are respectively connected with a first U-shaped tube and a second U-shaped tube, both ends of the first U-shaped tube and the second U-shaped tube are provided with a one-way valve, and the other end of the first U-shaped tube is connected with a cooling water supply pipe, the other end of the second U-shaped tube is connected with an outlet pipe, the top of the spray cylinder is connected with an inlet pipe, and the other end of the inlet pipe is connected with the other end of the outlet pipe;

The internal sliding seal of the compression box is installed with a piston plate, a vertical rod is fixedly installed on the top of the piston plate, a square frame is fixedly connected to the top of the vertical rod, a square plate is slidably installed in the square frame, a base and two fixed plates are fixedly installed on the top of the compression box, the rotating motor is fixedly installed on the top of the base, the connecting shaft is rotatably connected in the two fixed plates, and both ends of the connecting shaft are fixedly connected with rotating arms, and the other side of the rotating arm is fixedly connected with a round rod, the two square plates are rotatably sleeved on the outside of the corresponding round rods, and a driven bevel gear is fixedly sleeved on the outside of the connecting shaft, and an active bevel gear is fixedly connected to the output shaft of the rotating motor, and the active bevel gear is meshed with the driven bevel gear.

Preferably, a resistor bar is fixedly connected between the two fixed plates, two conductive frames are slidably sleeved on the outer side of the resistor bar, and the resistor bar and the conductive frame are connected in series to the circuit of the drive motor;

A guide plate is fixedly installed at the bottom of the conductive frame, and a guide groove is opened at the top of the compression box. The two guide plates are slidably connected in the guide groove, and a vertical plate is fixedly connected to the top of the conductive frame. Two sleeves are slidably sleeved on the outer side of the connecting shaft, and the two sleeves are respectively rotatably connected in the corresponding vertical plates.

Preferably, two rotating plates are fixedly installed on the outer side of the connecting shaft, and two sleeve plates are slidably sleeved on the outer side of the rotating plate. The two sleeve plates on the same side that are close to each other are fixedly connected with a pull rope, and the other end of the pull rope is fixedly connected to the corresponding sleeve, and the other side of the sleeve plate is fixedly connected with a compression spring, and the other end of the compression spring is fixedly connected with a baffle, and the baffle is fixedly connected to the outer side of the corresponding rotating plate, and two fixed pulleys are rotatably installed on one side of the rotating plate, and the pull rope is wound around the outer side of the corresponding fixed pulley.

Preferably, guide protrusions are integrally formed on both the front and rear sides of the connecting shaft, the sleeve is slidably sleeved on the outside of the guide protrusion, and a limiting protrusion is integrally formed on one end of the sleeve, the limiting protrusion movably abuts against one side of the corresponding vertical plate, and the other end of the sleeve is fixedly connected to a limiting ring, and the limiting ring movably abuts against the other side of the corresponding vertical plate.

Preferably, a grinding motor is fixedly installed on the front side of the mounting frame, the grinding wheel is fixedly connected to the output shaft of the grinding motor, and a cross plate is fixedly connected to the top of the mounting frame, a mounting plate is fixedly installed on the bottom of the side plate, a first pressure sensor is fixedly connected between the mounting plate and the cross plate, and vertical plates are fixedly connected on both sides of the bottom of the mounting plate, the cross plate is slidably sleeved on the outer side of the vertical plate, a limit plate is fixedly installed on the bottom of the vertical plate, the limit plate movably abuts against the bottom of the cross plate, and a second pressure sensor is fixedly connected between the side plate and the translation plate, a slide rail is fixedly connected to the top of the mounting plate, and the translation plate is slidably sleeved on the outer side of the slide rail.

Preferably, both sides of the top of the base are fixedly connected with vertical poles, the top ends of the two vertical poles on the same side are fixedly connected with the same top plate, lifting plates are fixedly installed on both sides of the lifting frame, the two lifting plates are respectively slidably sleeved on the outer sides of the corresponding vertical poles, and an electric push rod is fixedly installed on the top of the top plate, and the output end of the electric push rod is fixedly connected to the top of the corresponding lifting plate.

Preferably, the fixing fixture includes a workbench, a clamping motor and four clamping plates, the outer side of the clamping plate is fixedly connected to an L-plate, the bottom of the L-plate is rotatably connected to an arc-shaped connecting rod, the bottom of the workbench is rotatably installed with a mounting shaft, the outer side of the mounting shaft is fixedly sleeved with a rotating frame, the other end of the arc-shaped connecting rod is rotatably connected to the bottom of the rotating frame, and a first bevel gear is fixedly installed on the outer side of the rotating frame, the clamping motor is fixedly installed on the top of the base, and a horizontal shaft is fixedly connected to the output shaft of the clamping motor, the other end of the horizontal shaft is fixedly connected to a second bevel gear, and the first bevel gear is meshed with the second bevel gear.

Preferably, a groove is provided on the top of the base, a water receiving box is fixedly installed in the groove, a plurality of support rods are fixedly installed on the bottom of the workbench, the bottom ends of the plurality of support rods are fixedly connected to the bottom inner wall of the water receiving box, and a plurality of positioning plates are fixedly installed on the bottom inner wall of the water receiving box, and the positioning plates are rotatably sleeved on the outside of the horizontal axis;

Four sliding holes are opened on the top of the workbench, and the L-plate is slidably connected in the corresponding sliding holes. A limiting strip is integrally formed on the inner wall of the sliding hole, and the L-plate is slidably sleeved on the outer side of the limiting strip.

Preferably, square grooves are provided on both sides of the translation plate and the side plate, the lifting frame is slidably connected in the two square grooves, and a battery is provided on the top of the controller.

The beneficial effects of the present invention are:

In the present invention, a high-purity aluminum flat target grinding processing device is described, wherein the target to be ground is placed on a workbench, and then a clamping motor is started to drive the horizontal axis to rotate, and the horizontal axis drives the installation axis and the rotating frame to rotate through the meshing of the first bevel gear and the second bevel gear, and the rotating frame drives four L plates to approach each other through four arc-shaped connecting rods, and the four L plates drive four clamping plates to approach each other, thereby clamping and fixing the target;

In the present invention, a high-purity aluminum flat target grinding processing device is described, which drives the grinding wheel to rotate by starting the grinding motor, and drives the lifting frame to rise and fall by starting the electric push rod, thereby driving the grinding wheel to feed downward, and drives the driving gear to rotate by starting the driving motor, and the driving gear drives the two screws to rotate by meshing with the driven gear, and the two screws drive the translation plate to move horizontally by thread transmission with the translation plate, and the translation plate drives the side plate to move rightward through the second pressure sensor, and drives the grinding wheel to feed horizontally through the mounting plate, the vertical plate, the horizontal plate and the mounting frame, thereby realizing long-term automated grinding processing;

In the present invention, a high-purity aluminum flat target grinding processing device is described, which drives the active bevel gear to rotate by starting the rotating motor, and the active bevel gear drives the connecting shaft to rotate by meshing with the driven bevel gear, and the connecting shaft drives the two rotating arms to rotate, thereby driving the round rod to perform circular motion, and the rotating arm drives the square frame to reciprocate up and down through the cooperation of the round rod and the square plate and the square frame, and the square frame drives the piston plate to reciprocate up and down through the vertical rod, because the piston plate divides the compression box into an upper cavity and a lower cavity, so that when the piston plate moves upward, the upper cavity becomes smaller, and the water in the upper cavity passes through the first The second U-shaped tube leads to the outlet tube, the lower cavity becomes larger, and the water in the cooling water supply tube is supplemented into the lower cavity through the first U-shaped tube. When the piston plate moves downward, the lower cavity becomes smaller, and the water in the lower cavity is led to the outlet tube through the second U-shaped tube, the upper cavity becomes larger, and the water in the cooling water supply tube is supplemented into the upper cavity through the first U-shaped tube. As a result, when the piston plate moves up and down, the cooling water in the cooling water supply tube can be continuously led into the outlet tube, and then enters the spray barrel through the introduction tube, and then sprayed from multiple nozzles to achieve water spray cooling work in the grinding area to avoid overheating;

In the present invention, the high-purity aluminum flat target grinding processing device monitors the temperature of the grinding area through an infrared thermometer during the grinding process, and transmits the monitoring result to the controller. When the temperature is monitored to be far below the threshold, the controller controls the output shaft speed of the rotating motor to reduce, thereby reducing the speed of the connecting shaft to reduce the up and down movement speed of the piston plate, thereby reducing the cooling water spraying speed, thereby achieving the effect of energy saving and water resource saving. When the temperature exceeds the threshold, the controller controls the output shaft speed of the rotating motor to increase, thereby increasing the speed of the connecting shaft to increase the up and down movement speed of the piston plate, thereby The cooling water spraying speed is increased to improve the cooling effect, thereby avoiding overheating that may cause damage to the target material and accelerated wear of the grinding wheel. At the same time, the connecting shaft drives the two rotating plates to increase their rotation speed, so that the sleeve plates are further separated from each other under the action of centrifugal force, and the two sleeves are driven away from each other by the pull rope. The two sleeves drive the two conductive frames away from each other through the corresponding vertical plates, thereby increasing the length of the resistor bar connected to the drive motor and increasing the resistance, thereby reducing the output speed of the drive motor, thereby reducing the speed of the horizontal feed of the grinding wheel, thereby avoiding excessive feed speed that may cause deformation of the target material or damage to the grinding wheel.

In the present invention, a high-purity aluminum flat target grinding processing device is described, which monitors the vertical resistance of the grinding wheel through the first pressure sensor during the grinding process, monitors the lateral resistance of the grinding wheel through the second pressure sensor, and transmits the monitoring results to the controller. When the vertical resistance of the grinding wheel is too large, the electric push rod is adjusted to control the speed and amplitude of the lifting frame moving downward. When the lateral resistance of the grinding wheel is too large, the controller controls the speed of the grinding motor to increase to increase the grinding speed, and controls the speed of the rotating motor to increase to increase the cooling speed. At the same time, the speed of the driving motor is reduced to reduce the lateral feed speed of the grinding wheel. When the speeds of the rotating motor and the grinding motor reach the maximum value, the first pressure sensor monitors that the pressure is normal and the second pressure sensor monitors that the pressure is too large, then the output end of the electric push rod is controlled to contract to drive the lifting frame to move upward, and the driving motor, the rotating motor and the grinding motor are controlled to stop running, and then the grinding wheel is manually replaced to ensure stable grinding work.

In the present invention, a high-purity aluminum flat target grinding processing device can realize temperature monitoring of the grinding area during the grinding process through the cooperation of the grinding mechanism, cooling mechanism and infrared thermometer, and automatically adjust the grinding feed speed and cooling intensity according to the monitoring results to avoid deformation of the target or damage to the grinding tool caused by overheating, and monitor the resistance of the grinding tool through the set pressure sensor, adjust the feed speed according to the resistance, and replace the grinding tool in time.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of the three-dimensional structure of a high-purity aluminum flat target grinding processing device proposed by the present invention;

FIG2 is a schematic cross-sectional view of a high-purity aluminum flat target grinding device proposed by the present invention;

FIG3 is a partial enlarged view of portion A in FIG2 ;

FIG4 is a schematic diagram of the three-dimensional structure of the grinding mechanism proposed by the present invention;

FIG5 is a partial enlarged view of portion B in FIG4 ;

FIG6 is a schematic diagram of the three-dimensional structure of the grinding mechanism proposed by the present invention from another perspective;

FIG7 is a schematic diagram of the three-dimensional structure of the spray barrel proposed by the present invention;

FIG8 is a schematic cross-sectional view of the cooling mechanism proposed by the present invention;

FIG9 is a schematic diagram of a partial three-dimensional structure of a cooling mechanism proposed by the present invention;

FIG10 is a partial cross-sectional structural schematic diagram of the cooling mechanism proposed by the present invention;

FIG11 is a partial enlarged view of FIG10;

FIG12 is a schematic diagram of a partial structure of a cooling mechanism proposed by the present invention;

FIG13 is an exploded three-dimensional structural diagram of the rotating arm, round rod, square plate and square frame proposed by the present invention;

FIG14 is a schematic diagram of a partial three-dimensional structure of a fixing fixture provided by the present invention;

FIG. 15 is a schematic diagram of the three-dimensional structure of the fixing fixture proposed in the present invention.

In the figure: 1, base; 2, workbench; 201, clamping plate; 202, L plate; 203, arc connecting rod; 204, rotating frame; 205, mounting shaft; 206, first bevel gear; 207, second bevel gear; 208, horizontal axis; 209, clamping motor; 3, water receiving box; 4, lifting frame; 401, lifting plate; 402, top plate; 403, electric push rod; 404, vertical rod; 5, translation plate; 501, screw rod; 502, driven gear; 503, driving gear; 504, driving motor; 6, grinding wheel; 601, mounting frame; 602, grinding motor; 603, horizontal plate; 604, first pressure sensor; 605, second pressure sensor; 606, side plate; 607, slide rail; 608, vertical plate ; 7. Compression box; 701. First U-shaped tube; 702. Cooling water supply pipe; 703. Second U-shaped tube; 704. Export pipe; 705. One-way valve; 706. Piston plate; 707. Vertical rod; 708. Square frame; 709. Square plate; 710. Round rod; 711. Rotating arm; 8. Spray cylinder; 801. Nozzle; 802. Inlet pipe; 9. Connecting shaft; 901. Driven bevel gear; 902. Active bevel gear; 903. Rotating motor; 904. Fixed plate; 905. Sleeve; 906. Pull rope; 907. Fixed pulley; 908. Sleeve plate; 909. Compression spring; 910. Rotating plate; 10. Resistance bar; 11. Conductive frame; 12. Vertical plate; 13. Infrared thermometer; 14. Controller; 15. Battery.

DETAILED DESCRIPTION

The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

1 to 15, a high-purity aluminum flat target grinding device includes:

A base 1, a controller 14 and a fixing fixture for fixing the target material are arranged on the top of the base 1;

A grinding mechanism, used for realizing the grinding processing of the target material, the grinding mechanism comprises a lifting frame 4, a translation plate 5, a mounting frame 601, a side plate 606 and a grinding wheel 6, the grinding wheel 6 is rotatably mounted in the mounting frame 601, the translation plate 5 is slidably connected in the lifting frame 4, and two screw rods 501 are rotatably mounted in the lifting frame 4, the translation plate 5 is threadedly sleeved on the outside of the two screw rods 501, and a driven gear 502 is fixedly mounted on the screw rod 501, a driving motor 504 is fixedly mounted on the inner wall of one side of the lifting frame 4, a driving gear 503 is fixedly connected to the output shaft of the driving motor 504, and the two driven gears 502 are meshed with the driving gear 503, a mounting rod is fixedly mounted on one side of the side plate 606, and an infrared thermometer 13 for monitoring the temperature of the grinding area is fixedly connected to the bottom end of the mounting rod;

The cooling mechanism is used to cool the target material and the grinding wheel. The cooling mechanism includes a compression box 7, a spray tube 8, a connecting shaft 9 and a rotating motor 903. The driving motor 504 and the infrared thermometer 13 are electrically connected to the controller 14. When the infrared thermometer 13 monitors that the temperature of the grinding area exceeds a threshold value, the controller 14 controls the output speed of the rotating motor 903 to increase. The connecting shaft 9 is rotatably connected to the top of the compression box 7, and the outer side of the spray tube 8 is connected to multiple nozzles 801.

In this embodiment, the two sides of the compression box 7 are respectively connected with the first U-shaped tube 701 and the second U-shaped tube 703, both ends of the first U-shaped tube 701 and the second U-shaped tube 703 are provided with a one-way valve 705, and the other end of the first U-shaped tube 701 is connected with the cooling water supply pipe 702, the other end of the second U-shaped tube 703 is connected with the outlet pipe 704, the top of the spray cylinder 8 is connected with the inlet pipe 802, and the other end of the inlet pipe 802 is connected with the other end of the outlet pipe 704;

The internal sliding seal of the compression box 7 is installed with a piston plate 706, and a vertical rod 707 is fixedly installed on the top of the piston plate 706. A square frame 708 is fixedly connected to the top of the vertical rod 707, and a square plate 709 is slidably installed in the square frame 708. A base and two fixed plates 904 are fixedly installed on the top of the compression box 7. The rotating motor 903 is fixedly installed on the top of the base. The connecting shaft 9 is rotatably connected in the two fixed plates 904, and both ends of the connecting shaft 9 are fixedly connected with a rotating arm 711, and the other side of the rotating arm 711 is fixedly connected with a round rod 710. The two square plates 709 are rotatably sleeved on the outside of the corresponding round rod 710, and a driven bevel gear 901 is fixedly sleeved on the outside of the connecting shaft 9. An active bevel gear 902 is fixedly connected to the output shaft of the rotating motor 903, and the active bevel gear 902 is meshed with the driven bevel gear 901, thereby facilitating the driving of the connecting shaft 9 to rotate.

In this embodiment, a resistor bar 10 is fixedly connected between the two fixed plates 904, and two conductive frames 11 are slidably sleeved on the outer side of the resistor bar 10. The resistor bar 10 and the conductive frame 11 are connected in series to the circuit of the drive motor 504;

A guide plate is fixedly installed at the bottom of the conductive frame 11, and a guide groove is opened at the top of the compression box 7. The two guide plates are slidably connected in the guide groove, and a vertical plate 12 is fixedly connected to the top of the conductive frame 11. Two sleeves 905 are slidably sleeved on the outer side of the connecting shaft 9, and the two sleeves 905 are rotatably connected in the corresponding vertical plates 12 respectively.

In this embodiment, two rotating plates 910 are fixedly installed on the outer side of the connecting shaft 9, and two sleeve plates 908 are slidably sleeved on the outer side of the rotating plate 910. The two sleeve plates 908 located on the same side are fixedly connected with a pull rope 906 on the side close to each other, and the other end of the pull rope 906 is fixedly connected to the corresponding sleeve 905, and the other side of the sleeve plate 908 is fixedly connected with a compression spring 909, and the other end of the compression spring 909 is fixedly connected with a baffle, which is fixedly connected to the outer side of the corresponding rotating plate 910, and two fixed pulleys 907 are rotatably installed on one side of the rotating plate 910, and the pull rope 906 is wound around the outer side of the corresponding fixed pulley 907, and the pull rope 906 is guided by the fixed pulley 907.

In this embodiment, guide protrusions are integrally formed on the front and rear sides of the connecting shaft 9, and the sleeve 905 is slidably sleeved on the outer side of the guide protrusion, and a limiting protrusion is integrally formed on one end of the sleeve 905, and the limiting protrusion movably abuts against one side of the corresponding vertical plate 12, and the other end of the sleeve 905 is fixedly connected to a limiting ring, and the limiting ring movably abuts against the other side of the corresponding vertical plate 12, so that the sleeve 905 can rotate freely in the vertical plate 12 while the vertical plate 12 follows the sleeve 905 to perform synchronous horizontal movement, and the front side of the mounting frame 601 is fixedly installed with a grinding motor 602, and the grinding wheel 6 is fixedly connected to the output shaft of the grinding motor 602, and the top of the mounting frame 601 is fixedly connected with a horizontal plate 603, and the bottom of the side plate 606 is fixedly installed with a mounting plate, and a first pressure sensor 604 is fixedly connected between the mounting plate and the horizontal plate 603, and the bottom of the mounting plate is fixedly connected on both sides. There is a vertical plate 608, and the horizontal plate 603 is slidably sleeved on the outer side of the vertical plate 608. A limit plate is fixedly installed at the bottom of the vertical plate 608, and the limit plate movably abuts against the bottom of the horizontal plate 603. A second pressure sensor 605 is fixedly connected between the side plate 606 and the translation plate 5. A slide rail 607 is fixedly connected to the top of the mounting plate, and the translation plate 5 is slidably sleeved on the outer side of the slide rail 607, so as to realize the guidance between the translation plate 5 and the mounting plate. The top sides of the base 1 are fixedly connected with vertical poles 404, and the tops of the two vertical poles 404 on the same side are fixedly connected with the same top plate 402. Lifting plates 401 are fixedly installed on both sides of the lifting frame 4, and the two lifting plates 401 are respectively slidably sleeved on the outer sides of the corresponding vertical poles 404, and an electric push rod 403 is fixedly installed on the top of the top plate 402, and the output end of the electric push rod 403 is fixedly connected to the top of the corresponding lifting plate 401.

In this embodiment, the fixing fixture includes a workbench 2, a clamping motor 209 and four clamping plates 201, the outer side of the clamping plate 201 is fixedly connected with an L plate 202, the bottom of the L plate 202 is rotatably connected with an arc connecting rod 203, the bottom of the workbench 2 is rotatably installed with a mounting shaft 205, the outer side of the mounting shaft 205 is fixedly sleeved with a rotating frame 204, the other end of the arc connecting rod 203 is rotatably connected to the bottom of the rotating frame 204, and the outer side of the rotating frame 204 is fixedly installed with a first bevel gear 206, the clamping motor 209 is fixedly installed on the top of the base 1, and the output shaft of the clamping motor 209 is fixedly connected with a horizontal shaft 208, and the horizontal shaft 208 is fixedly connected to the output shaft of the clamping motor 209. The other end of 08 is fixedly connected with the second bevel gear 207, the first bevel gear 206 is meshed with the second bevel gear 207, a groove is provided at the top of the base 1, a water receiving box 3 is fixedly installed in the groove, a plurality of support rods are fixedly installed at the bottom of the workbench 2, the bottom ends of the plurality of support rods are fixedly connected to the bottom inner wall of the water receiving box 3, and a plurality of positioning plates are fixedly installed on the bottom inner wall of the water receiving box 3, and the positioning plates are rotatably sleeved on the outside of the horizontal axis 208; four sliding holes are provided at the top of the workbench 2, the L plate 202 is slidably connected in the corresponding sliding holes, and a limiting strip is integrally formed on the inner wall of the sliding hole, and the L plate 202 is slidably sleeved on the outside of the limiting strip. Square grooves are provided on both sides of the translation plate 5 and the side plate 606, the lifting frame 4 is slidably connected in the two square grooves, and a battery 15 is provided on the top of the controller 14.

In this embodiment, when in use, the target material to be ground is placed on the workbench 2, and then the clamping motor 209 is started to drive the horizontal shaft 208 to rotate, and the horizontal shaft 208 drives the installation shaft 205 and the rotating frame 204 to rotate through the engagement of the first bevel gear 206 and the second bevel gear 207. The rotating frame 204 drives the four L-plates 202 to approach each other through the four arc-shaped connecting rods 203, and the four L-plates 202 drive the four clamping plates 201 to approach each other, thereby achieving the clamping and fixing of the target material;

The grinding wheel 6 is driven to rotate by starting the grinding motor 602, and the electric push rod 403 is started to drive the lifting frame 4 to rise and fall, thereby driving the grinding wheel 6 to feed downward, and the driving motor 504 is started to drive the active gear 503 to rotate, and the active gear 503 drives the two screw rods 501 to rotate by meshing with the driven gear 502, and the two screw rods 501 drive the translation plate 5 to move horizontally through the thread transmission with the translation plate 5, and the translation plate 5 drives the side plate 606 to move to the right through the second pressure sensor 605, and drives the grinding wheel 6 to feed horizontally through the mounting plate, the vertical plate 608, the horizontal plate 603 and the mounting frame 601, thereby realizing a long automatic grinding process;

By starting the rotating motor 903, the active bevel gear 902 is driven to rotate, and the active bevel gear 902 drives the connecting shaft 9 to rotate by meshing with the driven bevel gear 901, and the connecting shaft 9 drives the two rotating arms 711 to rotate, thereby driving the round rod 710 to perform a circular motion, and the rotating arm 711 drives the square frame 708 to reciprocate up and down through the cooperation of the round rod 710 and the square plate 709 and the square frame 708, and the box 708 drives the piston plate 706 to reciprocate up and down through the vertical rod 707. Since the piston plate 706 divides the compression box 7 into an upper cavity and a lower cavity, when the piston plate 706 moves upward, the upper cavity becomes smaller, and the water in the upper cavity is guided through the second U-shaped tube 703. The water in the inlet and outlet pipe 704 and the lower cavity becomes larger, and the water in the cooling water supply pipe 702 is supplemented into the lower cavity through the first U-shaped pipe 701. When the piston plate 706 moves downward, the lower cavity becomes smaller, and the water in the lower cavity is introduced into the outlet pipe 704 through the second U-shaped pipe 703, the upper cavity becomes larger, and the water in the cooling water supply pipe 702 is supplemented into the upper cavity through the first U-shaped pipe 701. As a result, when the piston plate 706 moves up and down, the cooling water in the cooling water supply pipe 702 can be continuously introduced into the outlet pipe 704, and then enters the spray barrel 8 through the introduction pipe 802, and is sprayed out from multiple nozzles 801 to achieve water spray cooling work in the grinding area to avoid overheating;

During the grinding process, the temperature of the grinding area is monitored by the infrared thermometer 13, and the monitoring result is transmitted to the controller 14. When the temperature is monitored to be far below the threshold, the controller 14 controls the output shaft speed of the rotating motor 903 to decrease, thereby reducing the speed of the connecting shaft 9 to reduce the up and down moving speed of the piston plate 706, thereby reducing the cooling water spraying speed, thereby achieving the effect of energy saving and water resource saving. When the temperature exceeds the threshold, the controller 14 controls the output shaft speed of the rotating motor 903 to increase, thereby increasing the speed of the connecting shaft 9 to increase the up and down moving speed of the piston plate 706, thereby increasing the cooling water spraying speed, and increasing the cooling water spraying speed. The effect is achieved, thereby avoiding overheating that causes damage to the target material and accelerated wear of the grinding wheel 6. At the same time, the connecting shaft 9 drives the two rotating plates 910 to increase their rotation speed, so that the sleeve plates 908 are further separated from each other under the action of centrifugal force, and the two sleeves 905 are driven to separate from each other through the pull rope 906. The two sleeves 905 respectively drive the two conductive frames 11 to separate from each other through the corresponding vertical plates 12, so that the length of the resistor bar 10 connected to the drive motor 504 is increased, and the resistance is increased, so that the output speed of the drive motor 504 is reduced, thereby reducing the speed of the horizontal feeding of the grinding wheel 6, thereby avoiding excessive feeding speed that causes deformation of the target material or damage to the grinding wheel 6;

During the grinding process, the vertical resistance of the grinding wheel 6 is monitored by the first pressure sensor 604, and the lateral resistance of the grinding wheel 6 is monitored by the second pressure sensor 605, and the monitoring results are transmitted to the controller 14. When the vertical resistance of the grinding wheel 6 is too large, the electric push rod 403 is adjusted to control the speed and amplitude of the lifting frame 4 to move downward. When the lateral resistance of the grinding wheel 6 is too large, the controller 14 controls the speed of the grinding motor 602 to increase to increase the grinding speed, and controls the speed of the rotating motor 903 to increase to increase the cooling The speed is reduced, and at the same time, the speed of the driving motor 504 is reduced to reduce the lateral feed speed of the grinding wheel 6, and when the speeds of the rotating motor 903 and the grinding motor 602 reach the maximum value, the first pressure sensor 604 detects that the pressure is normal and the second pressure sensor 605 detects that the pressure is too large, the output end of the electric push rod 403 is controlled to contract to drive the lifting frame 4 to move upward, and the driving motor 504, the rotating motor 903 and the grinding motor 602 are controlled to stop running, and then the grinding wheel 6 is manually replaced to ensure stable grinding work.

The above is a detailed introduction to a high-purity aluminum flat target grinding processing device provided by the present invention. Specific embodiments are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims (10)

1. A high-purity aluminum flat target grinding device, characterized in that it comprises: A base (1), wherein a controller (14) and a fixing fixture for fixing a target material are arranged on the top of the base (1); A grinding mechanism is used to realize grinding processing of a target material, the grinding mechanism comprising a lifting frame (4), a translation plate (5), a mounting frame (601), a side plate (606) and a grinding wheel (6), the grinding wheel (6) being rotatably mounted in the mounting frame (601), the translation plate (5) being slidably connected in the lifting frame (4), and two screw rods (501) being rotatably mounted in the lifting frame (4), the translation plate (5) being threadedly sleeved on the outside of the two screw rods (501), and the screw rods (501) being rotatably mounted in the lifting frame (4). A driven gear (502) is fixedly mounted on the rod (501), a driving motor (504) is fixedly mounted on an inner wall of one side of the lifting frame (4), a driving gear (503) is fixedly connected to the output shaft of the driving motor (504), both of the driven gears (502) are meshed with the driving gear (503), a mounting rod is fixedly mounted on one side of the side plate (606), and an infrared thermometer (13) for monitoring the temperature of the grinding area is fixedly connected to the bottom end of the mounting rod; A cooling mechanism is used to cool a target material and a grinding wheel, the cooling mechanism comprising a compression box (7), a spray barrel (8), a connecting shaft (9) and a rotating motor (903), the driving motor (504) and the infrared thermometer (13) being electrically connected to a controller (14), the infrared thermometer (13) monitoring the temperature of a grinding area exceeding a threshold value and controlling the output speed of the rotating motor (903) to increase through the controller (14), the connecting shaft (9) being rotatably connected to the top of the compression box (7), and the outer side of the spray barrel (8) being connected to a plurality of nozzles (801). 2. A high-purity aluminum flat target grinding processing device according to claim 1, characterized in that the two sides of the compression box (7) are respectively connected with a first U-shaped tube (701) and a second U-shaped tube (703), both ends of the first U-shaped tube (701) and the second U-shaped tube (703) are provided with a one-way valve (705), and the other end of the first U-shaped tube (701) is connected with a cooling water supply pipe (702), and the other end of the second U-shaped tube (703) is connected with an outlet pipe (704), and the top of the spray cylinder (8) is connected with an inlet pipe (802), and the other end of the inlet pipe (802) is connected with the other end of the outlet pipe (704); The compression box (7) is internally slidably sealed with a piston plate (706), the top of the piston plate (706) is fixedly mounted with a vertical rod (707), the top of the vertical rod (707) is fixedly connected with a square frame (708), a square plate (709) is slidably mounted in the square frame (708), a base and two fixed plates (904) are fixedly mounted on the top of the compression box (7), the rotating motor (903) is fixedly mounted on the top of the base, and the connecting shaft (9) is rotatably connected to the two fixed plates (904). ), and both ends of the connecting shaft (9) are fixedly connected to a rotating arm (711), the other side of the rotating arm (711) is fixedly connected to a round rod (710), the two square plates (709) are respectively rotatably sleeved on the outside of the corresponding round rod (710), and a driven bevel gear (901) is fixedly sleeved on the outside of the connecting shaft (9), and a driving bevel gear (902) is fixedly connected to the output shaft of the rotating motor (903), and the driving bevel gear (902) is meshed with the driven bevel gear (901). 3. A high-purity aluminum flat target grinding processing device according to claim 2, characterized in that a same resistor bar (10) is fixedly connected between the two fixed plates (904), two conductive frames (11) are slidably sleeved on the outer side of the resistor bar (10), and the resistor bar (10) and the conductive frame (11) are connected in series to the circuit of the drive motor (504); A guide plate is fixedly mounted on the bottom of the conductive frame (11), a guide groove is provided on the top of the compression box (7), both guide plates are slidably connected in the guide groove, and a vertical plate (12) is fixedly connected to the top of the conductive frame (11), two sleeves (905) are slidably sleeved on the outer side of the connecting shaft (9), and the two sleeves (905) are rotatably connected in the corresponding vertical plates (12) respectively. 4. A high-purity aluminum flat target grinding processing device according to claim 3, characterized in that two rotating plates (910) are fixedly installed on the outer side of the connecting shaft (9), and two sleeve plates (908) are slidably sleeved on the outer side of the rotating plate (910), and the two sleeve plates (908) located on the same side are fixedly connected to a pull rope (906) on the side close to each other, and the other end of the pull rope (906) is fixedly connected to the corresponding sleeve (905), and the other side of the sleeve plate (908) is fixedly connected to a compression spring (909), and the other end of the compression spring (909) is fixedly connected to a baffle, and the baffle is fixedly connected to the outer side of the corresponding rotating plate (910), and two fixed pulleys (907) are rotatably installed on one side of the rotating plate (910), and the pull rope (906) is wound around the outer side of the corresponding fixed pulley (907). 5. A high-purity aluminum flat target grinding processing device according to claim 4, characterized in that the front and rear sides of the connecting shaft (9) are integrally formed with guide protrusions, the sleeve (905) is slidably sleeved on the outside of the guide protrusion, and one end of the sleeve (905) is integrally formed with a limiting protrusion, the limiting protrusion is movably abutted against one side of the corresponding vertical plate (12), and the other end of the sleeve (905) is fixedly connected to a limiting ring, and the limiting ring is movably abutted against the other side of the corresponding vertical plate (12). 6. A high-purity aluminum flat target grinding processing device according to claim 1, characterized in that a grinding motor (602) is fixedly installed on the front side of the mounting frame (601), the grinding wheel (6) is fixedly connected to the output shaft of the grinding motor (602), and a cross plate (603) is fixedly connected to the top of the mounting frame (601), a mounting plate is fixedly installed on the bottom of the side plate (606), a first pressure sensor (604) is fixedly connected between the mounting plate and the cross plate (603), and the Both sides of the bottom of the mounting plate are fixedly connected with vertical plates (608), the horizontal plate (603) is slidably sleeved on the outer side of the vertical plate (608), a limit plate is fixedly installed on the bottom of the vertical plate (608), the limit plate is movably abutted against the bottom of the horizontal plate (603), and a second pressure sensor (605) is fixedly connected between the side plate (606) and the translation plate (5), and a slide rail (607) is fixedly connected to the top of the mounting plate, and the translation plate (5) is slidably sleeved on the outer side of the slide rail (607). 7. A high-purity aluminum flat target grinding processing device according to claim 1, characterized in that vertical poles (404) are fixedly connected to both sides of the top of the base (1), and the tops of the two vertical poles (404) located on the same side are fixedly connected to the same top plate (402), and lifting plates (401) are fixedly installed on both sides of the lifting frame (4), and the two lifting plates (401) are respectively slidably sleeved on the outer sides of the corresponding vertical poles (404), and an electric push rod (403) is fixedly installed on the top of the top plate (402), and the output end of the electric push rod (403) is fixedly connected to the top of the corresponding lifting plate (401). 8. A high-purity aluminum flat target grinding processing device according to claim 1, characterized in that the fixing fixture comprises a workbench (2), a clamping motor (209) and four clamping plates (201), the outer side of the clamping plate (201) is fixedly connected to an L-plate (202), the bottom of the L-plate (202) is rotatably connected to an arc-shaped connecting rod (203), the bottom of the workbench (2) is rotatably installed with a mounting shaft (205), the outer side of the mounting shaft (205) is fixedly sleeved with a rotating frame (204), The other end of the arc-shaped connecting rod (203) is rotatably connected to the bottom of the rotating frame (204), and a first bevel gear (206) is fixedly installed on the outer side of the rotating frame (204). The clamping motor (209) is fixedly installed on the top of the base (1), and a transverse shaft (208) is fixedly connected to the output shaft of the clamping motor (209), and the other end of the transverse shaft (208) is fixedly connected to a second bevel gear (207), and the first bevel gear (206) is meshed with the second bevel gear (207). 9. A high-purity aluminum flat target grinding processing device according to claim 8, characterized in that a groove is provided on the top of the base (1), a water receiving box (3) is fixedly installed in the groove, a plurality of support rods are fixedly installed at the bottom of the workbench (2), the bottom ends of the plurality of support rods are fixedly connected to the bottom inner wall of the water receiving box (3), and a plurality of positioning plates are fixedly installed on the bottom inner wall of the water receiving box (3), and the positioning plates are rotatably sleeved on the outer side of the horizontal axis (208); Four sliding holes are provided on the top of the workbench (2), the L-plate (202) is slidably connected in the corresponding sliding holes, a limiting strip is integrally formed on the inner wall of the sliding hole, and the L-plate (202) is slidably sleeved on the outer side of the limiting strip. 10. A high-purity aluminum flat target grinding processing device according to claim 1, characterized in that square grooves are provided on both sides of the translation plate (5) and the side plate (606), the lifting frame (4) is slidably connected in the two square grooves, and a battery (15) is provided on the top of the controller (14).