CN1186865C - Aging and screening equipment and method of semiconductor laser - Google Patents
Aging and screening equipment and method of semiconductor laser Download PDFInfo
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- CN1186865C CN1186865C CNB011298278A CN01129827A CN1186865C CN 1186865 C CN1186865 C CN 1186865C CN B011298278 A CNB011298278 A CN B011298278A CN 01129827 A CN01129827 A CN 01129827A CN 1186865 C CN1186865 C CN 1186865C
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Abstract
The present invention relates to aging screening equipment for a semiconductor laser, and an aging screening method based on the equipment. A digital potentiometer is arranged in a power control circuit for controlling the luminescence of devices to be tested of the equipment, and is automatically regulated and controlled by a singlechip; then, test results are input to the singlechip and a computer so that the automatization of the process for the aging screening of the semiconductor laser is realized. The present invention provides a basis for screening and grading after industrial mass production.
Description
Technical field
The present invention relates to field of semiconductor devices, refer in particular to a kind of screening installation and screening technique aging in batches in semiconductor laser large-scale production.
Background technology
Semiconductor laser electric device product all will pass through the burn-in screen technical process before dispatching from the factory, to detect the index of aging of new product, this will finish according to certain principle method by special equipment and mechanical clamp.Wanting to measure in real time also on the whole, displayed record is supplied people that the performance of the device that worn out is judged by the relevant performance parameter of aging device.At present, employed the type equipment has the following disadvantages: 1, every number of devices limited (being generally tens-tens) that equipment is aging at every turn, influence production efficiency, and can not satisfy requirement of mass production; 2, the worn out reading speed of device parameters is limited, and the speed of data acquisition, drawing, tabulation and intelligent degree are not high; 3, to not high by the performance parameter acquisition precision of aging device; 4, no quality control standard.Existing many intermediate links based on the ageing and screening method of present equipment needs staff to operate, and automaticity is not high.
Summary of the invention
The present invention aims to provide the burn-in screen equipment of the intelligent judgement of a kind of high efficiency, high accuracy, high power capacity and tool, and the ageing and screening method of automaticity on this basis, satisfying the requirements of large-scale production of semiconductor laser, and reach following purpose: 1, increase substantially can the wear out quantity of device of single device; 2, improve the performance of automatic power control circuitry in the burn-in screen equipment, improve precision, speed, consistency and the reliability of data acquisition; 3, have and undertaken by computer that the manual read fetches data and the randomness of charting.
Above-mentioned purpose can realize in the following way: a kind of semiconductor laser ageing screening installation, comprise: a computer is used for control single chip computer, reads the measurement data of single-chip microcomputer buffer and forms each performance parameter curve of each tested semiconductor laser; A single-chip microcomputer is used for the data of controlling the course of work of measured laser device and gathering this process measured laser device; A plurality of power control circuits are controlled by described single-chip microcomputer by I/O I/O expanded circuit, to adopt the form of digital regulation resistance in negative feedback loop, are used for regulating automatically the operating state of laser, form measurement data; An anchor clamps group comprises the device of fixing detected laser; With a temperature control aging equipment.Described power control circuit comprises an integrating circuit, a drive circuit, a laser works electric current I op testing circuit, a laser monitoring current Im testing circuit, a digital regulation resistance and a switching circuit, wherein an end of digital regulation resistance connects with laser monitoring current Im testing circuit, and the other end connects with supervision detector and integrating circuit in the laser respectively; The other end of integrating circuit connects with drive circuit and switching circuit respectively; The other end of drive circuit connects with laser, is connected with laser works electric current I op testing circuit between drive circuit and laser; In addition, described grip device and power control circuit and measured laser device are supporting.
Wherein, the other end ground connection of described switching circuit; Between drive circuit and laser, be connected with laser works electric current I op testing circuit; Laser monitoring current Im testing circuit, the equal ground connection of laser works electric current I op testing circuit; And digital regulation resistance connects with serial peripheral equipment interface SPI.
Based on described semiconductor laser ageing screening installation, provide a kind of automaticity high semiconductor laser ageing screening technique simultaneously, may further comprise the steps:
A plurality of lasers are placed on the mechanical clamp of burn-in screen equipment; Make laser works in permanent merit, constant current state, adopt by the pipe scan mode and gather the time dependent performance parameter of each laser under each state; Generate each laser performance parameter curve; Provide each laser quality status stamp.At this, the adjusting of the various operating states of laser is to finish automatically by the power control circuit that Single-chip Controlling contains digital regulation resistance, the collection of its performance parameter divides sequential to gather automatically by single-chip microcomputer, and described performance number curve is by the data of computer timing acquiring single-chip microcomputer buffer and generation automatically.
Semiconductor laser ageing screening installation of the present invention adopts digital regulation resistance in the luminous power control circuit of control device under test, by the auto-control of single-chip microcomputer to digital regulation resistance, and the result imported single-chip microcomputer and computer, realized that parameter writes down automatically in the ageing process of semiconductor laser device, preserved automatically, permanent power deviation is calibrated automatically, product Lu matter functions such as identification automatically, but the quantity of the semiconductor laser of every each burn-in screen of equipment is big, thereby has improved production efficiency.Owing to adopted single-chip microcomputer control technology and digital regulation resistance, make device rate, precision and reliability improve greatly, intelligent degree also improves greatly.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is the system principle diagram of the embodiment of the invention; Fig. 2 is the system architecture diagram of the embodiment of the invention, and wherein downward arrow is represented to connect to base plate 2, and the structure of this base plate 2 is with the base plate among the figure 1; Fig. 3 is a single-chip microcomputer flow chart in the embodiment of the invention; Fig. 4 is a power control circuit schematic diagram in the embodiment of the invention; Fig. 5 is the anchor clamps cutaway view in the embodiment of the invention.
Embodiment
Shown in figure, present embodiment consists of the following components: 1 single-chip microcomputer, 256 road power control circuits, 1 computer, 16 anchor clamps 3 and number sleeving temperatures that play fixing and thermolysis are controlled ageing ovens, in detection, each anchor clamps 3 has been fixed 16 testing laser devices and has been positioned in the ageing oven.
As Fig. 5, in order to improve device under test putting on mechanical clamp/get efficient, improve the reliability and the consistency of anchor clamps 3, and the cost of reduction mechanical clamp, and minimizing device under test spoilage, the anchor clamps 3 of squash type have been adopted, be that anchor clamps 3 are offered 16 square grooves 4 in carriage one side of placing device to be checked, the width of this square groove 4 is between 0.9～1.3 millimeter, groove depth is between 0.8～1 millimeter, the outer of square groove 4 bottoms and both sides is provided with hard contact and draws by circuit new 5, these anchor clamps 3 also comprise a clamping part 6, this clamping part has the rubber protuberance 7 that matches with the above square groove, and above-mentioned square groove that matches 4 and protuberance 7 are provided with 15 on each anchor clamps, between carriage and the clamping part by the accurate location and fixing of the housing pin 8 of two identical band springs.Above-mentioned square groove 4 can be provided with equally spaced 16 boss mutually by in the vat of a side of carriage, and device circuit board 5 then, offers 16 identical grooves on the circuit board 5 and matches with boss afterwards and form.
The process that each anchor clamps 3 are installed device under tests is: 1, load onto 16 semiconductor lasers on the aluminum dipping form bar of 16 apertures having; 2, the aluminum dipping form bar is installed in the vat of carriage upside, and accurately locate by aluminum dipping form bar alignment pin, a side of above-mentioned vat and a side of square groove 4 are perpendicular, so that a pin of laser leans in the square groove 4; 3, will press pressing plate integral installation toward testing laser organ pipe shell on anchor clamps, and the projection of the movable copper sheathing in 16 apertures offering on the crush board is pressed on the base of semiconductor laser; 4, screw housing screw, Anchor plate kit compresses semiconductor laser and aluminum strip mould bar downwards; 5, screw nut 8, the rubber protuberance 7 of clamping part and two shoulders thereof are pushed down three pins of semiconductor laser respectively; 6, circuit board 5 interfaces at anchor clamps 3 connect cable, can detect after powering up.It is in order to make halfbody laser ground connection better, to guarantee to detect effect that movable copper sheathing is set on the pressing plate.
Single-chip microcomputer adopts the AT89C52 of American ATMEL, is connected in the computer serial port by RS-232, is connected in 256 power control circuits through the I/O expanded circuit, and single-chip microcomputer mainly carries out following three kinds of operations to power control circuit under the control of computer:
1) by multiselect 1 switching circuit the power control circuit on arbitrary road is carried out gating control, thereby realize the opening or closing of any one in 256 semiconductor lasers to be measured controlled, wherein multi-channel switch adopts common I/O expansion technique, and the device of selecting for use is 4-16 decoder 74LS154 and eight addressable latch CD4099;
2) numerical values recited that adopts common I/O mouth to regulate digital regulation resistance in each power control circuit by the SPI sequential of software generation to change the luminous power of detected laser, makes the luminous power of laser constant in a certain designated value.
3) to the operating current I of power control circuit sample detecting laser
OP, monitoring current I
m, power output P
OThree parameters by 16 passages that select 1 analog switch CD4067 gating to measure, are converted to digital quantity by 8 figure place weighted-voltage D/A converters (adopting ADC0809) with above-mentioned three parameters simultaneously.
Each power control circuit links to each other with a detected laser, this power control circuit is a negative feedback control loop, comprises an integrating circuit, a drive circuit, a laser works electric current I op testing circuit, a laser monitoring current Im testing circuit, a digital regulation resistance R25 and a switching circuit.One end of described digital regulation resistance connects with laser monitoring current Im testing circuit, the other end connects with supervision detector (being labeled as PD in Fig. 4) and integrating circuit in the laser respectively, the other end of integrating circuit connects with drive circuit and switching circuit respectively, and promptly the contact of integrating circuit and drive circuit is connected with switching circuit between the ground; The other end of drive circuit connects with laser, is connected with the laser works electric current I between drive circuit and laser
OPTesting circuit.Wherein, digital regulation resistance R25 has the spi bus interface, and drive circuit is connected with the I of detection laser electric current when providing operating current for laser
OPCurrent detection circuit, Im current detection circuit, I
OPCurrent detection circuit all links to each other with single-chip microcomputer with switching circuit.
The operation of entire equipment process can reduce collection, control/adjusting and the record to photoelectric parameter in the laser ageing process to be measured.
Single-chip microcomputer is analyzed and is handled each parameter that collects then the method for the data acquisition employing acquisition time of the multichannel parameter in the power control circuit, and its process is that single-chip microcomputer is monitored laser output power P in real time
OVariation, simultaneously according to the digital regulation resistance in the SPI sequential regulatory work rate control circuit, R25 is connected laser output power P on this power control circuit with change
O, make all 256 tested lasers work in the permanent merit operating state of specified power value (for example the 650nm laser being got 5 milliwatts ± 0.01 milliwatt) constantly, then, single-chip microcomputer passes through I
OPValue is analyzed, and serious abnormal laser is screened roughly, i.e. I
OPThink during greater than a certain higher limit (, under 70 ℃ of temperature, getting 100mA) that this measured laser device is the bad laser of just choosing, processing is closed in the bad laser implementation that primary election identifies at once for example to the 650nm laser.Single-chip microcomputer is regularly with the operating current I that is gathered
OP, monitoring current I
m, power output P
OData record be kept in its memory RAM 62256, regularly temporary data are transferred in the computer then by its RS-232 mouth, computer can generate the operating current I of each measured device automatically
OP, monitoring current I
m, power output P
OCurve by analyzing these curves, can be determined the quality of institute's survey laser over time.
The adjusting of the operating current of each laser is to realize by the digital regulation resistance R25 in the regulatory work rate control circuit, and the change of digital regulation resistance R25 resistance value is controlled by the instruction of single-chip microcomputer, and the instruction of single-chip microcomputer is to determine with respect to the deviation of the permanent power P that presets according to the survey laser luminous power value Po of institute.
The parameter value of each measured laser device (operating current I
OPMonitoring current I
m, power output P
O) every a time interval Tm (3-10 minute) just by the data acquisition board collection in the single-chip microcomputer and send in its memory RAM (62256).Computer sends instruction and reads these parameters in the memory at any time, and can make the time dependent curve of these parameter values by more random form, and these curves are exactly the foundation of judging measured laser device performance.
In the ageing test process, if certain abnormal conditions occurred by aging device, single-chip microcomputer sends instruction it is carried out shutoff.When device start, in order to prevent to have adopted by regulating digital regulation resistance to by the surge of aging device, the method that the operating current of laser is progressively increased.
Each anchor clamps in the described anchor clamps group have comprised the device of fixing detected laser, and link to each other with described power control circuit.
Claims (8)
1, a kind of semiconductor laser ageing screening installation, comprise a single-chip microcomputer that is used for controlling the course of work of measured laser device and gathers this process measured laser device parameter, one is used for control, read the computer of keeping in measurement data in the single-chip microcomputer and forming each tested semiconductor laser performance curve, be controlled by single-chip microcomputer and regulate the laser works state automatically by I/O I/O expanded circuit with employing digital regulation resistance in negative feedback loop, form the power control circuit of measurement data, the grip device of a fixing detected laser, a temperature control aging equipment is characterized in that
Described power control circuit comprises an integrating circuit, a drive circuit, a laser works electric current I op testing circuit, a laser monitoring current Im testing circuit, a digital regulation resistance and a switching circuit, wherein
One end of digital regulation resistance connects with laser monitoring current Im testing circuit, and the other end connects with supervision detector PD and integrating circuit in the laser respectively;
The other end of integrating circuit connects with drive circuit and switching circuit respectively;
The other end of drive circuit connects with laser, is connected with laser works electric current I op testing circuit between drive circuit and laser;
Described grip device and power control circuit and measured laser device are supporting.
2, burn-in screen equipment according to claim 1 is characterized in that the other end ground connection of described switching circuit.
3, burn-in screen equipment according to claim 1 and 2 is characterized in that described laser monitoring current Im testing circuit, the equal ground connection of laser works electric current I op testing circuit.
4, burn-in screen equipment according to claim 1 and 2 is characterized in that digital regulation resistance connects with serial peripheral equipment interface SPI.
5, burn-in screen equipment according to claim 1, it is characterized in that described grip device offers square groove in carriage one side of placing device to be checked, the width of this square groove is 0.9～1.3 millimeter, groove depth is 0.8～1 millimeter, is provided with the hard contact that electrically connects with circuit board in the outer of square groove bottom and both sides.
6, burn-in screen equipment according to claim 5 is characterized in that described grip device also comprises a clamping element, and this clamping element has the protuberance with the square groove coupling.
7, burn-in screen equipment according to claim 6 is characterized in that the square groove and the clamping element protuberance that match have 16 in grip device, square groove forms semiconductor laser test installing hole with gap after clamping element cooperates.
8, a kind of method of using the described burn-in screen equipment of claim 1 may further comprise the steps:
A, laser is placed on the mechanical clamp of burn-in screen equipment;
B, make laser works, gather the time dependent performance parameter of laser under each state in permanent merit, constant current, scanning mode;
C, generation performance curve;
D, judge the quality state of each laser;
The adjusting of the various operating states of described laser is to finish automatically by the power control circuit that Single-chip Controlling contains digital regulation resistance, its performance parameter is to gather automatically by single-chip microcomputer branch sequential, performance curve be is characterized in that by computer timing acquiring single-chip microcomputer temporary data and generation automatically
Grip device is mechanical type squash type anchor clamps, and the process that the testing laser device is installed on anchor clamps is:
A, adorn semiconductor laser on the aluminum dipping form bar to the location that has 16 installing holes,
B, the aluminum dipping form bar is installed in the vat of carriage upside in the anchor clamps, by behind the aluminum dipping form bar alignment pin location pin of laser being entered in the square groove,
C, will push down testing laser organ pipe shell the pressing plate integral installation on anchor clamps, and the projection of the movable copper sheathing in 16 apertures is pressed on the base of laser,
D, compress laser and aluminum dipping form bar downwards by the housing screw on the Anchor plate kit,
E, the protuberance that makes clamping element and two shoulders thereof are pushed down three pins of laser respectively,
F, connect cable, detect after the energising at the circuit board interface place of anchor clamps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011298278A CN1186865C (en) | 2001-10-26 | 2001-10-26 | Aging and screening equipment and method of semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011298278A CN1186865C (en) | 2001-10-26 | 2001-10-26 | Aging and screening equipment and method of semiconductor laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1389963A CN1389963A (en) | 2003-01-08 |
| CN1186865C true CN1186865C (en) | 2005-01-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011298278A Expired - Fee Related CN1186865C (en) | 2001-10-26 | 2001-10-26 | Aging and screening equipment and method of semiconductor laser |
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| Country | Link |
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| CN (1) | CN1186865C (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1581738B (en) * | 2003-08-05 | 2010-09-29 | 中兴通讯股份有限公司 | Dynamic ageing device and its control method |
| CN100382216C (en) * | 2004-09-28 | 2008-04-16 | 宁夏星日电子股份有限公司 | Lamellar element ageing apparatus |
| CN101373166B (en) * | 2007-08-22 | 2011-06-15 | 佛山普立华科技有限公司 | Aging test system |
| JP5796994B2 (en) * | 2010-06-08 | 2015-10-21 | 株式会社日立国際電気 | Processing system, substrate processing apparatus, data processing method for processing system, collection unit, recording medium, and method for manufacturing semiconductor device |
| CN102353862B (en) * | 2011-08-26 | 2013-05-22 | 成都因纳伟盛科技股份有限公司 | Batch aging tooling system for information decryption module of second-generation ID (Identification) card reader |
| CN102447219B (en) | 2011-12-08 | 2014-02-19 | 索尔思光电（成都）有限公司 | Optical power control circuit |
| CN102437508A (en) * | 2011-12-20 | 2012-05-02 | 江苏飞格光电有限公司 | Laser diode drive circuit with adjustable optical power |
| CN104638510B (en) * | 2013-11-14 | 2018-01-02 | 山东华光光电子股份有限公司 | A kind of semiconductor laser storehouse junior unit test, the device and method of aging |
| CN105136187A (en) * | 2015-09-06 | 2015-12-09 | 北京长峰微电科技有限公司 | Multi-channel data transmission apparatus for aging test |
| CN111123058A (en) * | 2018-10-29 | 2020-05-08 | 潍坊华光光电子有限公司 | Semiconductor laser whole aging device and aging method |
| CN111060808B (en) * | 2019-12-26 | 2022-02-22 | 无锡锐科光纤激光技术有限责任公司 | Aging device and aging method for circuit board of pulse fiber laser |
| CN113049933A (en) * | 2019-12-27 | 2021-06-29 | 山东华光光电子股份有限公司 | Semiconductor laser aging clamp and aging method thereof |
| CN115078887B (en) * | 2022-07-20 | 2022-11-25 | 度亘激光技术（苏州）有限公司 | Semiconductor laser aging test method and device |
| CN117014066B (en) * | 2023-09-27 | 2023-12-05 | 成都明夷电子科技有限公司 | Laser screening method, screening device, electronic equipment and storage medium |
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- 2001-10-26 CN CNB011298278A patent/CN1186865C/en not_active Expired - Fee Related
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| CN1389963A (en) | 2003-01-08 |
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